Digital holographic microscopy based on a modified lateral shearing interferometer for three-dimensional visual inspection of nanoscale defects on transparent objects

Off-axis common-path digital holography using a cube beam splitter

An off-axis common-path digital holography is built up by inserting a 45° tilted cube beam splitter (CBS) into a 4f system that is described in this paper. Two apertures are set as the input of the 4f system, where one supports the object, and the other is vacant. The CBS divides the incoming beam into two copies, which are symmetrical with each other along the semi-reflecting layer. Due to the separation of two beams in a Fourier plane and the flipping of the field of view induced by the CBS, an off-axis hologram can be captured. Moreover, the carrier frequency can be easily modulated by translating the CBS perpendicular to the optical axis. The new proposed scheme has high light utilization, a compact setup, and high temporal stability. The experiments are carried out to demonstrate the validity and stability of the proposed method.

Optimal modified lateral shearing interferometer with axial range extension by using a dual optical plate

We present a method to extend the axial range of digital holographic microscopy based on the optimal modified lateral shearing interferometer (MLSI). The proposed system can extend the axial range by using a dual optical plate. The interference pattern with two spatial wavelengths is generated by the plate with different thicknesses. These spatial wavelengths transfer a dual spatial frequency into the Fourier plane by using FFT. Two phases are extracted by a dual spatial frequency and combined to create a synthetic wavelength, which is applied to measure the micrometer-scale object without phase unwrapping. Also, the noise-reducing algorithm is used to reduce phase noise caused by the amplified noise of the synthetic wavelength. The experimental result confirms the feasibility of the optimal MLSI by using a dual optical plate.

Quantitative phase imaging based on simple Michelson-type lateral shearing interferometry with rotational right-angle prisms

By using a kind of simple Michelson-type lateral shearing interferometry, in this paper, the precise quantitative phase measurement of transparent microscopic objects is realized successfully. For this interferometry, on the basis of the fundamental structure of the traditional Michelson interferometer, the two plane mirrors are replaced with two ordinary right-angle prisms. In the beginning, the ridges of the two right-angle prisms are set to align with the optical axis and be in the vertical direction. Subsequently, to achieve the lateral shear, one of these two right-angle prisms is rotated around its ridge. Furthermore, the goal to obtain more lateral shear can be achieved by introducing a bigger rotating angle or rotating another prism simultaneously. In addition, owing to the simple structure of the Michelson interferometer and the inexpensive optical components used, the system is compact, portable, easy to operate, and low cost. The experimental results show the practicability of this system.

Alignment-tolerant single-shot digital holographic microscopy based on computer-controlled telecentricity

An alignment-tolerant telecentric digital holographic microscopy (AT-T-DHM) system based on computer-controlled telecentricity is proposed. It consists of a three-step process-optical recording, computational compensation, and retrieving processes. With a tube-lens-based two-beam interferometer, phase information of the object is recorded on the hologram, where another optical quadratic phase error (O-QPE) due to the misalignment of the tube lens happens to be added. In the computational compensation process, this phase error can be estimated, by which the O-QPE is balanced out from the recorded hologram. Then, only the phase information of the object can be retrieved from the O-QPE-compensated hologram. This computational compensation process makes the proposed system virtually operate in a telecentric imaging mode, which enables implementing a practical AT-T-DHM. Wave-optical analysis and experiments with a test object confirm the feasibility of the proposed system.

Optimal modified lateral shearing interferometer for submicro-defects measurement of transparent objects

Transparent optical components, which are required for high-precision and high-performance, are made by a plastic injection molding method. This can cause inner defects to appear because of the difference in cooling rate and pressure. However, submicron inner defects, caused by the refractive index error, are extremely difficult to determine. Thus, digital holographic microscopy based on an optimal modified lateral shearing interferometer is proposed. This is to measure submicron defects in transparent objects, such as a defective microlens. In addition, the optimal lateral shearing distance is proposed to efficiently remove duplicate images. Optical experiments using the suggested lateral shearing interferometer are presented, and the experimental results with a test microlens confirm the feasibility of the proposed method.

Double-channel angular-multiplexing polarization holography with common-path and off-axis configuration

We propose a double-channel angular-multiplexing polarization holographic imaging system with common-path and off-axis configurations. In the system, its input plane is spatially divided into three windows: an object window and two reference windows, and two orthogonal linear polarizers are attached, respectively, on the two reference windows; a two-dimensional cross grating is inserted between the input and output planes of the system. Thus the object beam passing through the object window and the two orthogonal polarized reference beams passing through the two reference windows can overlap each other at the output plane of the system and form a double-channel angular-multiplexing polarization hologram (DC-AM-PH). Using this system, the complex amplitude distributions of two orthogonal polarized components from an object can be recorded and reconstructed by one single-shot DC-AM-PH at the same time. Theoretical analysis and experimental results demonstrated that the system can be used to measure the Jones matrix parameters of polarization-sensitive or birefringent materials.

Single-shot digital holographic microscopy with a modified lateral-shearing interferometer based on computational telecentricity

Single-shot digital holographic microscopy (SS-DHM) with a modified lateral-shearing interferometer (MLSI) based on computational telecentricity is proposed. The proposed system is composed of three-step processes such as optical recording, digital compensation and numerical reconstruction processes. In the 1st step, the object beam is optically recorded with the MLSI, where a tube lens is set to be located at the slightly shorter distance than its focal length from the objective lens. Then, another phase factor due to the deviated locating of the tube lens from its focal length is additionally generated, which is called an additional quadratic phase factor (AQPF). However, in the 2nd step, this AQPF can be balanced out with the computer-generated version of the AQPF. In the 3rd step, the three-dimensional (3-D) object can be finally reconstructed from this AQPF-compensated hologram. Thus, by combined use of the optical recording and digital compensation processes of the AQPF, the proposed system can be made virtually operate in a so-called computational telecentricity, which enables us to implement a MLSI-based SS-DHM system. Wave-optical analysis and successful experiments with actual 3-D objects confirm the feasibility of the proposed system in the practical application fields.

Compact and field-portable 3D printed shearing digital holographic microscope for automated cell identification

We propose a low-cost, compact, and field-portable 3D printed holographic microscope for automated cell identification based on a common path shearing interferometer setup. Once a hologram is captured from the portable setup, a 3D reconstructed height profile of the cell is created. We extract several morphological cell features from the reconstructed 3D height profiles, including mean physical cell thickness, coefficient of variation, optical volume (OV) of the cell, projected area of the cell (PA), ratio of PA to OV, cell thickness kurtosis, cell thickness skewness, and the dry mass of the cell for identification using the random forest (RF) classifier. The 3D printed prototype can serve as a low-cost alternative for the developing world, where access to laboratory facilities for disease diagnosis are limited. Additionally, a cell phone sensor is used to capture the digital holograms. This enables the user to send the acquired holograms over the internet to a computational device located remotely for cellular identification and classification (analysis). The 3D printed system presented in this paper can be used as a low-cost, stable, and field-portable digital holographic microscope as well as an automated cell identification system. To the best of our knowledge, this is the first research paper presenting automatic cell identification using a low-cost 3D printed digital holographic microscopy setup based on common path shearing interferometry.

Dual-wavelength common-path digital holographic microscopy for quantitative phase imaging based on lateral shearing interferometry

A dual-wavelength common-path digital holographic microscopy based on a single parallel glass plate is presented to achieve quantitative phase imaging, which combines the dual-wavelength technique with lateral shearing interferometry. Two illumination laser beams with different wavelengths (λ₁=532  nm and λ₂=632.8  nm) are reflected by the front and back surfaces of the parallel glass plate to create the lateral shear and form the digital hologram, and then the hologram is reconstructed to obtain the phase distribution with a synthetic wavelength Λ=3339.8  nm. The experimental configuration is very compact, with the advantages of vibration resistance and measurement range extension. The experimental results of the laser-ablated pit, groove, and staircase specimens show the feasibility of the proposed configuration.

Visual inspection of 3-D surface and refractive-index profiles of microscopic lenses using a single-arm off-axis holographic interferometer

A single-arm off-axis holographic interferometer (SA-OHI) system for visual inspection of the three-dimensional (3-D) surfaces and refractive-index profiles of micrometer-scale optical lenses is proposed. In this system, a couple of pellicle beam splitters and optical mirrors are employed to generate two sheared off-axis beams from the single object beam by controlling the tilted angle of the optical mirror. Each sheared beam is divided into two areas with and without object data, which are called half-object and half-reference beams, respectively. These sub-divided object and reference beams then make interference patterns, just like the conventional two-arm holographic interferometer. This holographic interferometer system, called SA-OHI, can solve the DC bias, virtual and duplicated image problems occurred in most lateral shearing interferometers, which allow extraction of the hologram data only related to the target object. The operational principle of the proposed system is analyzed based on ray-optics. To confirm the feasibility of the proposed system in the practical application fields, experiments with test lenses are also carried out and the results are comparatively discussed with those of the conventional system.