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Jang J, Yeom JW, Kang WK, Haq MR, Lu X, Shin D, Kim SM, In JB. Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes. Micromachines (Basel) 2020; 11:mi11080746. [PMID: 32751742 PMCID: PMC7464924 DOI: 10.3390/mi11080746] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/11/2020] [Revised: 07/27/2020] [Accepted: 07/29/2020] [Indexed: 02/04/2023]
Abstract
The design or dimension of micro-supercapacitor electrodes is an important factor that determines their performance. In this study, a microsupercapacitor was precisely fabricated on a silicon substrate by irradiating an imprinted furan micropattern with a CO2 laser beam under ambient conditions. Since furan is a carbon-abundant polymer, electrically conductive and porous carbon structures were produced by laser-induced pyrolysis. While the pyrolysis of a furan film in a general electric furnace resulted in severe cracks and delamination, the laser pyrolysis method proposed herein yielded porous carbon films without cracks or delamination. Moreover, as the imprinting process already designated the furan area for laser pyrolysis, high-precision patterning was achieved in the subsequent laser pyrolysis step. This two-step process exploited the superior resolution of imprinting for the fabrication of a laser-pyrolyzed carbon micropattern. As a result, the technical limitations of conventional laser direct writing could be overcome. The laser-pyrolyzed carbon structure was employed for microsupercapacitor electrodes. The microsupercapacitor showed a specific capacitance of 0.92 mF/cm2 at 1 mA/cm2 with a PVA-H2SO4 gel electrolyte, and retained an up to 88% capacitance after 10,000 charging/discharging cycles.
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Affiliation(s)
- Jina Jang
- Department of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, Korea; (J.J.); (J.W.Y.); (W.K.K.); (M.R.H.); (D.S.)
| | - Jeong Woo Yeom
- Department of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, Korea; (J.J.); (J.W.Y.); (W.K.K.); (M.R.H.); (D.S.)
| | - Won Kyu Kang
- Department of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, Korea; (J.J.); (J.W.Y.); (W.K.K.); (M.R.H.); (D.S.)
| | - Muhammad Refatul Haq
- Department of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, Korea; (J.J.); (J.W.Y.); (W.K.K.); (M.R.H.); (D.S.)
| | - Xun Lu
- Department of Mechanical Engineering, Yanbian University, Yanji 133002, China;
| | - Dongjun Shin
- Department of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, Korea; (J.J.); (J.W.Y.); (W.K.K.); (M.R.H.); (D.S.)
| | - Seok-Min Kim
- Department of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, Korea; (J.J.); (J.W.Y.); (W.K.K.); (M.R.H.); (D.S.)
- Correspondence: (S.-M.K.); (J.B.I.); Tel.: +82-2-820-5877 (S.-M.K.); +82-2-820-5971 (J.B.I.)
| | - Jung Bin In
- Department of Mechanical Engineering, Chung-Ang University, 84 Heukseok-ro, Dongjak-gu, Seoul 06974, Korea; (J.J.); (J.W.Y.); (W.K.K.); (M.R.H.); (D.S.)
- Correspondence: (S.-M.K.); (J.B.I.); Tel.: +82-2-820-5877 (S.-M.K.); +82-2-820-5971 (J.B.I.)
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