In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum

Recent developments in nanoprinting using focused electron beams have created a need to develop analysis methods for the products of electron-induced fragmentation of different metalorganic compounds. The original approach used here is termed focused-electron-beam-induced mass spectrometry (FEBiMS). FEBiMS enables the investigation of the fragmentation of electron-sensitive materials during irradiation within the typical primary electron beam energy range of a scanning electron microscope (0.5 to 30 keV) and high vacuum range. The method combines a typical scanning electron microscope with an ion-extractor-coupled mass spectrometer setup collecting the charged fragments generated by the focused electron beam when impinging on the substrate material. The FEBiMS of fragments obtained during 10 keV electron irradiation of grains of silver and copper carboxylates and shows that the carboxylate ligand dissociates into many smaller volatile fragments. Furthermore, in situ FEBiMS was performed on carbonyls of ruthenium (solid) and during electron-beam-induced deposition, using tungsten carbonyl (inserted via a gas injection system). Loss of carbonyl ligands was identified as the main channel of dissociation for electron irradiation of these carbonyl compounds. The presented results clearly indicate that FEBiMS analysis can be expanded to organic, inorganic, and metal organic materials used in resist lithography, ice (cryo-)lithography, and focused-electron-beam-induced deposition and becomes, thus, a valuable versatile analysis tool to study both fundamental and process parameters in these nanotechnology fields.

In Situ Atomic Force Microscopy Depth-Corrected Three-Dimensional Focused Ion Beam Based Time-of-Flight Secondary Ion Mass Spectroscopy: Spatial Resolution, Surface Roughness, Oxidation

Atomic force microscopy (AFM) is a well-known tool for studying surface roughness and to collect depth information about features on the top atomic layers of samples. By combining secondary ion mass spectroscopy (SIMS) with focused ion beam (FIB) milling in a scanning electron microscope (SEM), chemical information of sputtered structures can be visualized and located with high lateral and depth resolution. In this paper, a high vacuum (HV) compatible AFM was installed in a TESCAN FIB-SEM instrument that was equipped with a time-of-flight SIMS (ToF-SIMS) detector. To calibrate the sputtering rate and measure the induced roughness caused by the ToF-SIMS analysis, subsequent AFM measurements were performed on an inorganic multilayer vertical cavity surface-emitting laser sample. Normalized sputtering rates were used to aid the accurate three-dimensional reconstruction of the sputtered volume's chemical composition. Achievable resolution, surface roughness during sputtering, and surface oxidation issues were analyzed. The integration of complementary detectors opens up the ability to determine the sample properties as well as to understand the influence of the Ga+ ion sputtering method on the sample surface during the analysis.

Multicomposite Nanostructured Hematite-Titania Photoanodes with Improved Oxygen Evolution: The Role of the Oxygen Evolution Catalyst

We present a sol-gel processed hematite-titania-based photoanode, which exhibits a photocurrent of up to 2.5 mA/cm² at 1.23 V_RHE under simulated AM 1.5 G illumination (100 mW/cm²) thanks to the addition of an amorphous cocatalyst with the nominal composition Fe₂₀Cr₄₀Ni₄₀O _x . To unveil the role of the cocatalyst interconnected to the photoanode, we performed impedance measurements. According to the one order of magnitude higher value for the capacitance associated with surface states (C _SS) compared to the bare photoanode, the function of the catalyst-photoanode interface resembles that of a p-n-like junction. In addition, the charge transfer resistance associated with charge transfer processes from surface states (R _ct,ss) was unchanged at potentials between 0.8 and 1.1 V_RHE after adding the cocatalyst, indicating that the catalyst has a negligible effect on the hole transport to the electrolyte. The understanding of the role of oxygen evolution catalysts (OECs) in conjunction with the photoanodes is particularly important for water splitting because most OECs are studied separately at considerably higher potentials compared to the potentials at which photoanode materials are operated.