Multi-beam X-ray ptychography using coded probes for rapid non-destructive high resolution imaging of extended samples

Imaging large areas of a sample non-destructively and with high resolution is of great interest for both science and industry. For scanning coherent X-ray diffraction microscopy, i. e., ptychography, the achievable scan area at a given spatial resolution is limited by the coherent photon flux of modern X-ray sources. Multibeam X-ray ptychography can improve the scanning speed by scanning the sample with several parallel mutually incoherent beams, e. g., generated by illuminating multiple focusing optics in parallel by a partially coherent beam. The main difficulty with this scheme is the robust separation of the superimposed signals from the different beams, especially when the beams and the illuminated sample areas are quite similar. We overcome this difficulty by encoding each of the probing beams with its own X-ray phase plate. This helps the algorithm to robustly reconstruct the multibeam data. We compare the coded multibeam scans to uncoded multibeam and single beam scans, demonstrating the enhanced performance on a microchip sample with regular and repeating structures.

Evolution of Hierarchically Porous Nickel Alumina Catalysts Studied by X-Ray Ptychography

The synthesis of hierarchically porous materials usually requires complex experimental procedures, often based around extensive trial and error approaches. One common synthesis strategy is the sol-gel method, although the relation between synthesis parameters, material structure and function has not been widely explored. Here, in situ 2D hard X-ray ptychography (XRP) and 3D ptychographic X-ray computed tomography (PXCT) are applied to monitor the development of hierarchical porosity in Ni/Al₂ O₃ and Al₂ O₃ catalysts with connected meso- and macropore networks. In situ XRP allows to follow textural changes of a dried gel Ni/Al₂ O₃ sample as a function of temperature during calcination, activation and CO₂ methanation reaction. Complementary PXCT studies on dried gel particles of Ni/Al₂ O₃ and Al₂ O₃ provide quantitative information on pore structure, size distribution, and shape with 3D spatial resolution approaching 50 nm, while identical particles are imaged ex situ before and after calcination. The X-ray imaging results are correlated with N₂ -sorption, Hg porosimetry and He pycnometry pore characterization. Hard X-ray nanotomography is highlighted to derive fine structural details including tortuosity, branching nodes, and closed pores, which are relevant in understanding transport phenomena during chemical reactions. XRP and PXCT are enabling technologies to understand complex synthesis pathways of porous materials.

Off-axis multilayer zone plate with 16 nm × 28 nm focus for high-resolution X-ray beam induced current imaging

Using multilayer zone plates (MZPs) as two-dimensional optics, focal spot sizes of less than 10 nm can be achieved, as we show here with a focus of 8.4 nm × 9.6 nm, but the need for order-sorting apertures prohibits practical working distances. To overcome this issue, here an off-axis illumination of a circular MZP is introduced to trade off between working distance and focal spot size. By this, the working distance between order-sorting aperture and sample can be more than doubled. Exploiting a 2D focus of 16 nm × 28 nm, real-space 2D mapping of local electric fields and charge carrier recombination using X-ray beam induced current in a single InP nanowire is demonstrated. Simulations show that a dedicated off-axis MZP can reach sub-10 nm focusing combined with reasonable working distances and low background, which could be used for in operando imaging of composition, carrier collection and strain in nanostructured devices.

Planar refractive lenses made of SiC for high intensity nanofocusing

We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm×275 nm has been achieved with a lens working distance of 29 mm.

Hard X-ray wavefront correction via refractive phase plates made by additive and subtractive fabrication techniques

Modern subtractive and additive manufacturing techniques present new avenues for X-ray optics with complex shapes and patterns. Refractive phase plates acting as glasses for X-ray optics have been fabricated, and spherical aberration in refractive X-ray lenses made from beryllium has been successfully corrected. A diamond phase plate made by femtosecond laser ablation was found to improve the Strehl ratio of a lens stack with a numerical aperture (NA) of 0.88 × 10-3 at 8.2 keV from 0.1 to 0.7. A polymer phase plate made by additive printing achieved an increase in the Strehl ratio of a lens stack at 35 keV with NA of 0.18 × 10-3 from 0.15 to 0.89, demonstrating diffraction-limited nanofocusing at high X-ray energies.

PtyNAMi: ptychographic nano-analytical microscope

Ptychographic X-ray imaging at the highest spatial resolution requires an optimal experimental environment, providing a high coherent flux, excellent mechanical stability and a low background in the measured data. This requires, for example, a stable performance of all optical components along the entire beam path, high temperature stability, a robust sample and optics tracking system, and a scatter-free environment. This contribution summarizes the efforts along these lines to transform the nanoprobe station on beamline P06 (PETRA III) into the ptychographic nano-analytical microscope (PtyNAMi).

Refractive hard x-ray vortex phase plates

In this Letter, we report on the creation of hard x-ray beams carrying orbital angular momentum of topological charge -ℏ and -3ℏ at a photon energy of 8.2 keV via spiral phase plates made out of fused silica by ultrashort-pulsed laser ablation. The phase plates feature a smooth phase ramp with a 0.5 μm nominal step height and a surface roughness of 0.5 μm. The measured vortex beams show submicrometer-sized donut rings and agree well with numerical modeling. Fused silica phase plates are potentially suited to manipulate the electromagnetic field in highly intense x-ray beams at x-ray free-electron laser sources.

Diamond nanofocusing refractive X-ray lenses made by planar etching technology

The manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron-beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360 nm (FWHM) at an energy E = 24.3 keV is observed.

Ptychographic characterisation of polymer compound refractive lenses manufactured by additive technology

The recent success in the development of high-precision printing techniques allows one to manufacture free-standing polymer structures of high quality. Two-photon polymerization lithography is a mask-less technique with down to 100 nm resolution that provides full geometric freedom. It has recently been applied to the nanofabrication of X-ray compound refractive lenses (CRLs). In this article we report on the characterization of two sets of CRLs of different design produced by two-photon polymerization-induced lithography.

30-Lens interferometer for high-energy X-rays

A novel high-energy multi-lens interferometer consisting of 30 arrays of planar compound refractive lenses is reported. Under coherent illumination each lens array creates a diffraction-limited secondary source. Overlapping such coherent beams produces an interference pattern demonstrating strong longitudinal functional dependence. The proposed multi-lens interferometer was tested experimentally at the 100 m-long ID11 ESRF beamline in the X-ray energy range from 30 to 65 keV. The interference pattern generated by the interferometer was recorded at fundamental and fractional Talbot distances. An effective source size (FWHM) of the order of 15 µm was determined from the first Talbot image, proving the concept that the multi-lens interferometer can be used as a high-resolution tool for beam diagnostics.

Lens coupled tunable Young's double pinhole system for hard X-ray spatial coherence characterization

We have implemented a modified Young's double slit experiment using pinholes with tunable separation distance coupled with compound refractive lens for hard X-ray spatial coherence characterization. Varying distance between the apertures provides a high sensitivity to the determination of spatial coherence across a wide range of experimental parameters. The use of refractive lenses as a Fourier transformer ensures far field registration conditions and allows the realization of a very compact experimental setup in comparison with the classical Young technique and its derivatives. The tunable double aperture interferometer was experimentally tested at the ESRF ID06 beamline in the energy range from 8 to 25 keV. The spatial coherence and the source size were measured by evaluating the visibility of the interference fringes at various separation distances between the apertures and this value agrees very well with the data obtained by other techniques. The proposed scheme can be used for comprehensive characterization of the coherence properties of the source on low emittance synchrotrons in the hard X-ray region.

Hard x-ray single crystal bi-mirror

We report a novel hard x-ray interferometer consisting of two parallel channels manufactured in a single Si crystal by means of microfabrication technology. The sidewall surfaces of the channels, similar to mirrors, scatter at very small incident angles, acting equivalently to narrow micrometer size slits as in the Young double-slit interferometer. Experimental tests of the interferometer were performed at the ESRF ID06 beamline in the energy range from 12 to 16 keV. The interference patterns at different grazing incidence angles were recorded in the near- and far-field. Evaluation of the influence of the channel surface roughness on the visibility of interference fringes was performed. The proposed interferometer design allows the arrangement of mirrors at different split distances.

X-ray multilens interferometer based on Si refractive lenses

We report a multilens X-ray interferometer consisting of six parallel arrays of planar compound refractive lenses, each of which creates a diffraction limited beam under coherent illumination. Overlapping such coherent beams produces an interference pattern demonstrating substantially strong longitudinal functional dependence. The interference fringe pattern produced by multilens interferometer was described by Talbot imaging formalism. Theoretical analysis of the interference pattern formation was carried out and corresponding computer simulations were performed. The proposed multilens interferometer was experimentally tested at ID06 ESRF beamline in the X-ray energy range from 10 to 30 keV. The experimentally recorded fractional Talbot images are in a good agreement with computer simulations.