Toporovsky V, Samarkin V, Kudryashov A, Galaktionov I, Panich A, Malykhin A. Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design.
Micromachines (Basel) 2023;
14:2004. [PMID:
38004862 PMCID:
PMC10673196 DOI:
10.3390/mi14112004]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/18/2023] [Revised: 10/19/2023] [Accepted: 10/25/2023] [Indexed: 11/26/2023]
Abstract
This article presents a study of the electrophysical properties of a piezoceramic material for use in adaptive optics. The key characteristics that may be important for the manufacturing of piezoelectric deformable mirrors are the following: piezoelectric constants (d31, d33, d15), capacitance, elastic compliance values s for different crystal directions, and the dielectric loss tangent (tgδ). Based on PZT ceramics, the PKP-12 material was developed with high values of the dielectric constant, piezoelectric modulus, and electromechanical coupling coefficients. The deformable mirror control elements are made from the resulting material-piezoceramic combs with five individual actuators in a row. In this case, the stroke of the actuator is in the range of 4.1-4.3 microns and the capacitance of the actuator is about 12 nF.
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