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Li L, Tian B, Zhang Z, Shi M, Liu J, Liu Z, Lei J, Li S, Lin Q, Zhao L, Jiang Z. Highly sensitive flexible heat flux sensor based on a microhole array for ultralow to high temperatures. Microsyst Nanoeng 2023; 9:133. [PMID: 37886351 PMCID: PMC10598026 DOI: 10.1038/s41378-023-00599-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/05/2023] [Revised: 08/05/2023] [Accepted: 08/23/2023] [Indexed: 10/28/2023]
Abstract
With the growing demand for thermal management of electronic devices, cooling of high-precision instruments, and biological cryopreservation, heat flux measurement of complex surfaces and at ultralow temperatures has become highly imperative. However, current heat flux sensors (HFSs) are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions, such as low sensitivity and embrittlement. In this study, we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures, ranging from -196 °C to 273 °C. The sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm, which are efficiently manufactured by the screen-printing method, reach 11.21 μV/(W/m2) and 13.43 μV/(W/m2), respectively. The experimental results show that there is a less than 3% resistance change from bending to stretching. Additionally, the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/m2. Additionally, we demonstrate the application of the HFS to the measurement of minuscule heat flux, such as heat dissipation of human skin and cold water. This technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces, which has great importance in the superconductor and cryobiology field.
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Affiliation(s)
- Le Li
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
| | - Bian Tian
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai, 265503 China
| | - Zhongkai Zhang
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
| | - Meng Shi
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
| | - Jiangjiang Liu
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
| | - Zhaojun Liu
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
| | - Jiaming Lei
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
| | - Shuimin Li
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
| | - Qijing Lin
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
| | - Libo Zhao
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
| | - Zhuangde Jiang
- School of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China
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