High-Linearity Flexible Pressure Sensor Based on the Gaussian-Curve-Shaped Microstructure for Human Physiological Signal Monitoring

Flexible pressure sensors with high-performance show broad application prospects in health monitoring, wearable electronic devices, intelligent robot sensing, and other fields. Although flexible pressure sensors have made significant progress in sensitivity and detection range, most of them still exhibit strong nonlinearity, which leads to significant troubles in signal acquisition and thus limits their popularity in practical applications. It remains a serious challenge for the flexible pressure sensor to achieve high linearity while maintaining high sensitivity. Herein, a doped sensing membrane with a uniformly distributed Gaussian-curve-shaped micropattern array was developed using the micro-electromechanical systems (MEMS) process, and a flexible sensor structure with the doped film as the core was designed and constructed. The prototype sensor has a high sensitivity of 1.77 kPa-1 and a linearity of 0.99 in the full detection range of 20 Pa to 30 kPa. In addition, its excellent performance also includes fast response/recovery times (∼25/50 ms) and long-term endurance (>10,000 cycles at 15 kPa). The prototype sensor has been successfully demonstrated in human pulse monitoring, speech recognition, and gesture recognition. The 2 × 6 sensor array can detect the spatial pressure distribution. Thus, such a microstructure shape design will open a new way to fabricate a high-linearity pressure sensor for potential applications in health monitoring, human-machine interaction, etc.

Micromachined Vibrating Ring Gyroscope Architecture with High-Linearity, Low Quadrature Error and Improved Mode Ordering

A new micromachined vibrating ring gyroscope (VRG) architecture with low quadrature error and high-linearity is proposed, which successfully optimizes the working modes to first order resonance mode of the structure. The improved mode ordering can significantly reduce the vibration sensitivity of the device by adopting the hinge-frame mechanism. The frequency difference ratio is introduced to represent the optimization effect of modal characteristic. Furthermore, the influence of the structural parameters of hinge-frame mechanism on frequency difference ratio is clarified through analysis of related factors, which contributes to a more effective design of hinge-frame structure. The designed VRG architecture accomplishes the goal of high-linearity by using combination hinge and variable-area capacitance strategy, in contrast to the conventional approach via variable-separation drive/sense strategy. Finally, finite element method (FEM) simulations are carried out to investigate the stiffness, modal analysis, linearity, and decoupling characteristics of the design. The simulation results are sufficiently in agreement with theoretical calculations. Meanwhile, the hinge-frame mechanism can be widely applied in other existing ring gyroscopes, and the new design provides a path towards ultra-high performance for VRG.