Accurate post-mortem alignment for Focused Ion Beam and Scanning Electron Microscopy (FIB-SEM) tomography

Drifts in the three directions (X, Y, Z) during the FIB-SEM slice-and-view tomography is an important issue in 3D-FIB experiments which may induce significant inaccuracies in the subsequent volume reconstruction and further quantification of morphological volume parameters of the sample microstructure. Cross-correlation is frequently applied directly to the cross-section image series for aligning FIB sliced images. This solution is hazardous and can be flawed as it has been easily demonstrated by a dedicated test experiment. As a result, a novel aligning procedure based on the quantification of the topography of the sample surface has been developed. This new approach will be compared to the common cross-correlation methods, as well as another approach consisting in using an artificial reference marker fabricated during the FIB procedure. All these methods will then be discussed in terms of accuracy and liability.