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McBennett B, Beardo A, Nelson EE, Abad B, Frazer TD, Adak A, Esashi Y, Li B, Kapteyn HC, Murnane MM, Knobloch JL. Universal Behavior of Highly Confined Heat Flow in Semiconductor Nanosystems: From Nanomeshes to Metalattices. Nano Lett 2023; 23:2129-2136. [PMID: 36881964 DOI: 10.1021/acs.nanolett.2c04419] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Nanostructuring on length scales corresponding to phonon mean free paths provides control over heat flow in semiconductors and makes it possible to engineer their thermal properties. However, the influence of boundaries limits the validity of bulk models, while first-principles calculations are too computationally expensive to model real devices. Here we use extreme ultraviolet beams to study phonon transport dynamics in a 3D nanostructured silicon metalattice with deep nanoscale feature size and observe dramatically reduced thermal conductivity relative to bulk. To explain this behavior, we develop a predictive theory wherein thermal conduction separates into a geometric permeability component and an intrinsic viscous contribution, arising from a new and universal effect of nanoscale confinement on phonon flow. Using experiments and atomistic simulations, we show that our theory applies to a general set of highly confined silicon nanosystems, from metalattices, nanomeshes, porous nanowires, to nanowire networks, of great interest for next-generation energy-efficient devices.
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Affiliation(s)
- Brendan McBennett
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Albert Beardo
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Emma E Nelson
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Begoña Abad
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Travis D Frazer
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Amitava Adak
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Yuka Esashi
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Baowen Li
- Department of Materials Science and Engineering, Department of Physics, Southern University of Science and Technology, Shenzhen 518055, PR China
- Department of Mechanical Engineering, Department of Physics, University of Colorado, Boulder, Colorado 80309, United States
| | - Henry C Kapteyn
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Margaret M Murnane
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Joshua L Knobloch
- Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
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Knobloch JL, McBennett B, Bevis CS, Yazdi S, Frazer TD, Adak A, Nelson EE, Hernández-Charpak JN, Cheng HY, Grede AJ, Mahale P, Nova NN, Giebink NC, Mallouk TE, Badding JV, Kapteyn HC, Abad B, Murnane MM. Structural and Elastic Properties of Empty-Pore Metalattices Extracted via Nondestructive Coherent Extreme UV Scatterometry and Electron Tomography. ACS Appl Mater Interfaces 2022; 14:41316-41327. [PMID: 36054507 DOI: 10.1021/acsami.2c09360] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Semiconductor metalattices consisting of a linked network of three-dimensional nanostructures with periodicities on a length scale <100 nm can enable tailored functional properties due to their complex nanostructuring. For example, by controlling both the porosity and pore size, thermal transport in these phononic metalattices can be tuned, making them promising candidates for efficient thermoelectrics or thermal rectifiers. Thus, the ability to characterize the porosity, and other physical properties, of metalattices is critical but challenging, due to their nanoscale structure and thickness. To date, only metalattices with high porosities, close to the close-packing fraction of hard spheres, have been studied experimentally. Here, we characterize the porosity, thickness, and elastic properties of a low-porosity, empty-pore silicon metalattice film (∼500 nm thickness) with periodic spherical pores (∼tens of nanometers), for the first time. We use laser-driven nanoscale surface acoustic waves probed by extreme ultraviolet scatterometry to nondestructively measure the acoustic dispersion in these thin silicon metalattice layers. By comparing the data to finite element models of the metalattice sample, we can extract Young's modulus and porosity. Moreover, by controlling the acoustic wave penetration depth, we can also determine the metalattice layer thickness and verify the substrate properties. Additionally, we utilize electron tomography images of the metalattice to verify the geometry and validate the porosity extracted from scatterometry. These advanced characterization techniques are critical for informed and iterative fabrication of energy-efficient devices based on nanostructured metamaterials.
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Affiliation(s)
- Joshua L Knobloch
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Brendan McBennett
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Charles S Bevis
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Sadegh Yazdi
- Renewable and Sustainable Energy Institute and the Materials Science & Engineering Program, University of Colorado, Boulder, Colorado 80309, United States
| | - Travis D Frazer
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Amitava Adak
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Emma E Nelson
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Jorge N Hernández-Charpak
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Hiu Y Cheng
- Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Alex J Grede
- Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Pratibha Mahale
- Department of Chemistry, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - Nabila Nabi Nova
- Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Noel C Giebink
- Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Thomas E Mallouk
- Department of Chemistry, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States
| | - John V Badding
- Department of Chemistry and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Henry C Kapteyn
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
- KMLabs Incorporated, 4775 Walnut Street, Building 102, Boulder, Colorado 80301, United States
| | - Begoña Abad
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
| | - Margaret M Murnane
- Department of Physics, JILA, and STROBE NSF Science & Technology Center, University of Colorado and NIST, Boulder, Colorado 80309, United States
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Brooks NJ, Wang B, Binnie I, Tanksalvala M, Esashi Y, Knobloch JL, Nguyen QLD, McBennett B, Jenkins NW, Gui G, Zhang Z, Kapteyn HC, Murnane MM, Bevis CS. Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source. Opt Express 2022; 30:30331-30346. [PMID: 36242139 DOI: 10.1364/oe.458955] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/21/2022] [Accepted: 07/13/2022] [Indexed: 06/16/2023]
Abstract
We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same area at different times or incidence angles. Furthermore, we show that this technique is compatible with wavelength multiplexing for multibeam spectroscopic imaging, taking full advantage of the temporal and spectral characteristics of high harmonic light sources. This technique enables increased data throughput using a simple experimental implementation and with high photon efficiency.
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Tanksalvala M, Porter CL, Esashi Y, Wang B, Jenkins NW, Zhang Z, Miley GP, Knobloch JL, McBennett B, Horiguchi N, Yazdi S, Zhou J, Jacobs MN, Bevis CS, Karl RM, Johnsen P, Ren D, Waller L, Adams DE, Cousin SL, Liao CT, Miao J, Gerrity M, Kapteyn HC, Murnane MM. Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry. Sci Adv 2021; 7:7/5/eabd9667. [PMID: 33571123 PMCID: PMC7840142 DOI: 10.1126/sciadv.abd9667] [Citation(s) in RCA: 18] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/13/2020] [Accepted: 12/10/2020] [Indexed: 05/23/2023]
Abstract
Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can nondestructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning probe microscopies.
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Affiliation(s)
- Michael Tanksalvala
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
| | - Christina L Porter
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Yuka Esashi
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA.
| | - Bin Wang
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Nicholas W Jenkins
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Zhe Zhang
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Galen P Miley
- Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
| | - Joshua L Knobloch
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Brendan McBennett
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | | | - Sadegh Yazdi
- Renewable and Sustainable Energy Institute (RASEI), University of Colorado, Boulder, CO 80309, USA
| | - Jihan Zhou
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
- Department of Physics and Astronomy and California NanoSystem Institute, University of California, Los Angeles, CA 90095, USA
| | - Matthew N Jacobs
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Charles S Bevis
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Robert M Karl
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Peter Johnsen
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - David Ren
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, USA
| | - Laura Waller
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, USA
| | - Daniel E Adams
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Seth L Cousin
- KMLabs Inc., 4775 Walnut St. #102, Boulder, CO 80301, USA
| | - Chen-Ting Liao
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Jianwei Miao
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
- Department of Physics and Astronomy and California NanoSystem Institute, University of California, Los Angeles, CA 90095, USA
| | - Michael Gerrity
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
| | - Henry C Kapteyn
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
- KMLabs Inc., 4775 Walnut St. #102, Boulder, CO 80301, USA
| | - Margaret M Murnane
- STROBE Science and Technology Center, JILA, University of Colorado, Boulder, CO 80309, USA
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