A Sewing Approach to the Fabrication of Eco/bioresorbable Electronics

Eco/bioresorbable electronics represent an emerging class of technology defined by an ability to dissolve or otherwise harmlessly disappear in environmental or biological surroundings after a period of stable operation. The resulting devices provide unique capabilities as temporary biomedical implants, environmental sensors, and related systems. Recent publications report schemes to overcome challenges in fabrication that follow from the low thermostability and/or high chemical reactivity of the eco/bioresorbable constituent materials. Here, this work reports the use of high-speed sewing machines, as the basis for a high-throughput manufacturing technique that addresses many requirements for these applications, without the need for high temperatures or reactive solvents. Results demonstrate that a range of eco/bioresorbable metal wires and polymer threads can be embroidered into complex, user-defined conductive patterns on eco/bioresorbable substrates. Functional electronic components, such as stretchable interconnects and antennas are possible, along with fully integrated systems. Examples of the latter include wirelessly powered light-emitting diodes, radiofrequency identification tags, and temporary cardiac pacemakers. These advances add to a growing range of options in high-throughput, automated fabrication of eco/bioresorbable electronics.

Buckling-induced transmission switching in phononic waveguidesa)

On-chip phononic circuits tailor the transmission of elastic waves and couple to electronics and photonics to enable new signal manipulation capabilities. Phononic circuits rely on waveguides that transmit elastic waves within desired frequency passbands, which are typically designed based on the Bloch modes of the constitutive unit cell of the waveguide, assuming periodicity. Acoustic microelectromechanical system waveguides composed of coupled drumhead resonators offer megahertz operation frequencies for applications in acoustic switching. Here, we construct a reduced-order model (ROM) to demonstrate the mechanism of transmission switching in coupled drumhead-resonator waveguides. The ROM considers the mechanics of buckling under the effect of temperature variation. Each unit cell has two degrees of freedom: translation to capture the symmetric bending modes and angular motion to capture the asymmetric bending modes of the membranes. We show that thermoelastic buckling induces a phase transition triggered by temperature variation, causing the localization of the first-passband modes, similar to Anderson localization caused by disorders. The proposed ROM is essential to understanding these phenomena since Bloch mode analysis fails for weakly disordered (<5%) finite waveguides due to the disorder amplification caused by the thermoelastic buckling. The illustrated transmission control can be extended to two-dimensional circuits in the future.

Polymorphic display and texture integrated systems controlled by capillarity

Soft robotics offer unusual bioinspired solutions to challenging engineering problems. Colorful display and morphing appendages are vital signaling modalities used by natural creatures to camouflage, attract mates, or deter predators. Engineering these display capabilities using traditional light emitting devices is energy expensive and bulky and requires rigid substrates. Here, we use capillary-controlled robotic flapping fins to create switchable visual contrast and produce state-persistent, multipixel displays that are 1000- and 10-fold more energy efficient than light emitting devices and electronic paper, respectively. We reveal the bimorphic ability of these fins, whereby they switch between straight or bent stable equilibria. By controlling the droplets temperature across the fins, the multifunctional cells simultaneously exhibit infrared signals decoupled from the optical signals for multispectral display. The ultralow power, scalability, and mechanical compliance make them suitable for curvilinear and soft machines.

Strain-Driven Faceting of Graphene-Catalyst Interfaces

The interfacial interaction of 2D materials with the substrate leads to striking surface faceting affecting its electronic properties. Here, we quantitatively study the orientation-dependent facet topographies observed on the catalyst under graphene using electron backscatter diffraction and atomic force microscopy. The original flat catalyst surface transforms into two facets: a low-energy low-index surface, e.g. (111), and a vicinal (high-index) surface. The critical role of graphene strain, besides anisotropic interfacial energy, in forming the observed topographies is revealed by molecular simulations. These insights are applicable to other 2D/3D heterostructures.

Dynamic pattern selection in polymorphic elastocapillarity

Drying of fine hair and fibers induces dramatic capillary-driven deformation, with important implications on natural phenomena and industrial processes. We recently observed peculiar self-assembly of hair bundles into various distinct patterns depending on the interplay between the bundle length and the liquid drain rate. Here, we propose a mechanism for this pattern selection, and derive and validate theoretical scaling laws for the polymorphic self-assembly of polygonal hair bundles. Experiments are performed by submerging the bundles into a liquid bath, then draining down the liquid. Depending on the interplay between the drain rates and the length of the fibers, we observe the bundles morphing into stars (having concave sides), polygons (having straight edges and rounded corners), or circles. The mechanism of self-assembly at the high drain regime is governed by two sequential stages. In the first stage of the high drain rate regime, the liquid covers the outside of the bundles, and drainage from inside the bundle does not play a role in the self-assembly due to the high viscous stress. The local pressure at the corners of the wet bundles compresses the fibers inward blunting the corners, and the internal lubrication facilitates fiber rearrangement. In the second stage, the liquid is slowly draining from within the fiber spacing, and the negative capillary pressure at the perimeter causes the fibers to tightly pack. In the slow drainage regime, the first stage is absent, and the fibers slowly aggregate without initial dynamic rearrangement. Understanding the mechanism of dynamic elastocapillarity offers insights for studying the complicated physics of wet granular drying.

Time scale disparity yielding acoustic nonreciprocity in a two-dimensional granular-elastic solid interface with asymmetry

We study nonreciprocal wave transmission across the interface of two dissimilar granular media separated by an elastic solid medium. Specifically, a left, larger-scale and a right smaller-scale granular media composed of two-dimensional, initially uncompressed hexagonally packed granules are interfacing with an intermediate linearly elastic solid, modeled either as a thin elastic plate or a linear Euler-Bernoulli beam. The granular media are modeled by discrete elements and the elastic solid by finite elements assuming a plane stress approximation for the thin plate. Accounting for the combined effects of Hertzian, frictional and rotational interactions in the granular media, as well as the highly discontinuous interfacial effects between the (discrete) granular media and the (continuous) intermediate elastic solid, the nonlinear acoustics of the integrated system is computationally studied subject to a half-sine shock excitation applied to a boundary granule of either the left or right granular medium. The highly discontinuous and nonlinear interaction forces coupling the granular media to the elastic solid are accurately computed through an algorithm with interrelated iteration and interpolation at successive adaptive time steps. Numerical convergence is ensured by monitoring the (linearized) eigenvalues of a nonlinear map of interface forces at each (variable) time step. Due to the strong nonlinearity and hierarchical asymmetry of the left and right granular media, time scale disparity occurs in the response of the interface which breaks acoustic reciprocity. Specifically, depending on the location and intensity of the applied shock, propagating wavefronts are excited in the granular media, which, in turn, excite either (slow) low-frequency vibrations or (fast) high-frequency acoustics in the intermediate elastic medium. This scale disparity is due to the size disparity of the left and right granular media, which yields drastically different wave speeds in the resulting propagating wavefronts. As a result, the continuum part of the interface responds with either low-frequency vibrations-when the shock is applied to the larger-scale granular medium, or high-frequency waves-when the shock is applied to the smaller-scale granular medium. This provides the fundamental mechanism for breaking reciprocity in the interface. The nonreciprocal interfacial acoustics studied here apply to a broad class of asymmetric hybrid (discrete-continuum) nonlinear systems and can inform predictive designs of highly effective granular shock protectors or granular acoustic diodes.

Buckling-Mediated Phase Transitions in Nano-Electromechanical Phononic Waveguides

Waveguides for mechanical signal transmission in the megahertz to gigahertz regimes enable on-chip phononic circuitry, which brings new capabilities complementing photonics and electronics. Lattices of coupled nano-electromechanical drumhead resonators are suitable for these waveguides due to their high Q-factor and precisely engineered band structure. Here, we show that thermally induced elastic buckling of such resonators causes a phase transition in the waveguide leading to reversible control of signal transmission. Specifically, when cooled, the lowest-frequency transmission band associated with the primary acoustic mode vanishes. Experiments show the merging of the lower and upper band gaps, such that signals remain localized at the excitation boundary. Numerical simulations show that the temperature-induced destruction of the pass band is a result of inhomogeneous elastic buckling, which disturbs the waveguide's periodicity and suppresses the wave propagation. Mechanical phase transitions in waveguides open opportunities for drastic phononic band reconfiguration in on-chip circuitry and computing.

Unipolar stroke, electroosmotic pump carbon nanotube yarn muscles

Success in making artificial muscles that are faster and more powerful and that provide larger strokes would expand their applications. Electrochemical carbon nanotube yarn muscles are of special interest because of their relatively high energy conversion efficiencies. However, they are bipolar, meaning that they do not monotonically expand or contract over the available potential range. This limits muscle stroke and work capacity. Here, we describe unipolar stroke carbon nanotube yarn muscles in which muscle stroke changes between extreme potentials are additive and muscle stroke substantially increases with increasing potential scan rate. The normal decrease in stroke with increasing scan rate is overwhelmed by a notable increase in effective ion size. Enhanced muscle strokes, contractile work-per-cycle, contractile power densities, and energy conversion efficiencies are obtained for unipolar muscles.

Emergency ventilator for COVID-19

The COVID-19 pandemic disrupted the world in 2020 by spreading at unprecedented rates and causing tens of thousands of fatalities within a few months. The number of deaths dramatically increased in regions where the number of patients in need of hospital care exceeded the availability of care. Many COVID-19 patients experience Acute Respiratory Distress Syndrome (ARDS), a condition that can be treated with mechanical ventilation. In response to the need for mechanical ventilators, designed and tested an emergency ventilator (EV) that can control a patient's peak inspiratory pressure (PIP) and breathing rate, while keeping a positive end expiratory pressure (PEEP). This article describes the rapid design, prototyping, and testing of the EV. The development process was enabled by rapid design iterations using additive manufacturing (AM). In the initial design phase, iterations between design, AM, and testing enabled a working prototype within one week. The designs of the 16 different components of the ventilator were locked by additively manufacturing and testing a total of 283 parts having parametrically varied dimensions. In the second stage, AM was used to produce 75 functional prototypes to support engineering evaluation and animal testing. The devices were tested over more than two million cycles. We also developed an electronic monitoring system and with automatic alarm to provide for safe operation, along with training materials and user guides. The final designs are available online under a free license. The designs have been transferred to more than 70 organizations in 15 countries. This project demonstrates the potential for ultra-fast product design, engineering, and testing of medical devices needed for COVID-19 emergency response.

Hydrodynamic Elastocapillary Morphing of Hair Bundles

We report polymorphic self-assembly of hair arranged in hollow bundles driven by capillarity, hydrodynamics, and elasticity. Bundles emerging from a liquid bath shrink but remain hollow at slow drainage due to the negative pressure of the menisci trapped between the hairs. The timescale allows the collective stiffening of the fibers to resist closure. At fast drainage, the bundles fully close before the liquid can drain through the hair. A liquid column trapped in the hole closes the bundle while the lubricated hairs still behave softly. Scaling laws predict this reversible hair polymorphism.

Capillary-Induced Hair Twist

We investigate the self-assembly of hair-like fibers into twisted helices as they are pulled through the liquid interface at a controlled rate. Capillary-induced spontaneous fiber twisting phenomena are observed from the nano- to the millimeter scale. Here, we control the drain rate of the liquid and observe two regimes of self-assembly of long hairs. At low drain rates, the hairs coalesce radially to form a dense aggregate. At higher drain rates, spontaneous hair twisting occurs. We find that the drain rate corresponding to the twisting threshold scales with the characteristic velocity of fiber coalescence set by a balance between liquid viscosity μ and surface energy σ and reads ∼(σ/μ)·(S/l)² where S and l are the spacing between hairs and their length, respectively. At drain rates higher than this threshold, liquid is entrained between the hairs as they emerge from the liquid surface, forming a circular liquid column. Twisting is induced by the fast radial shrinking of this liquid column, combined with the nonlinear resistance to the hairs' radial versus tangential coalescence. Understanding the kinetics is crucial to control this complex self-assembly and to engineer fiber drying processes at various length scales.

Bottom-Up Synthesis and Mechanical Behavior of Refractory Coatings Made of Carbon Nanotube-Hafnium Diboride Composites

We use aligned carbon nanotube (CNT) forests as scaffolds to deposit hafnium diboride (HfB₂) and fabricate millimeter-thick ultrahigh-temperature composite coating. HfB₂ has a melting temperature of 3250 °C, which makes it an attractive candidate for applications requiring operation in extreme environments. Compared to typical refractory HfB₂ processing, which requires temperatures exceeding 1500 °C, we use conformal HfB₂ chemical vapor deposition (CVD) to coat CNT forests at a low temperature of 200 °C. During this process, nanometer-thin HfB₂ films grow on the CNT surface and uniformly fill tall CNT forests, thus transforming nanometer film deposition to a scalable HfB₂ coating technology. The conformal HfB₂ coating process uses static (S-) CVD, where the precursor is fed into a closed system, enabling highly conformal coating and economically efficient utilization of the HfB₂ precursor reaching 85%. The modulus and compressive strength of the composites are measured using flat-punch indentation of micropillars having various coating thickness. Filling the CNTs with HfB₂ strengthens their node morphology and effectively enhances the mechanical properties. We study the nonlinear behavior of the material to extract a unique modulus value that describes the stress-strain response at any applied compression. At the highest HfB₂ coating thickness of 45 nm, the solid fraction is increased from 2% for the bare CNTs to 36% for the composite; the modulus and strength reach 107 and 1.5 GPa, respectively. An analytical model is used to explain the mechanism of the measured structure-mechanical property scaling. Finally, the process is used to fabricate CNT-HfB₂ films having 1.7 mm height, a centimeter square area, and only 5.8 × 10^-6 nm/nm thickness gradient to demonstrate the potential for scalability.

Polymorphic Elastocapillarity: Kinetically Reconfigurable Self-Assembly of Hair Bundles by Varying the Drain Rate

We report various patterns formed by draining liquid from hair bundles. Hair-like fibers arranged in triangular bundles self-assemble into various cross sections when immersed in liquid then removed. The combinations of their length and the kinetics, represented by the drain rate, lead to various polymorphic self-assemblies: concave hexagonal, triangular, circular, or inverted triangular patterns. The equilibrium of these shapes is predicted by elastocapillarity, the balance between the bending strain energy of the hairs and the surface energy of the liquid. Shapes with a larger strain energy, such as the inverted triangular bundles, are obtained at the higher liquid drain rates. This polymorphic self-assembly is fully reversible by rewetting and draining and can have applications in multifunctional dynamic textures.

Acoustic nonreciprocity in a lattice incorporating nonlinearity, asymmetry, and internal scale hierarchy: Experimental study

In linear time-invariant systems acoustic reciprocity holds by the Onsager-Casimir principle of microscopic reversibility, and it can be broken only by odd external biases, nonlinearities, or time-dependent properties. Recently it was shown that one-dimensional lattices composed of a finite number of identical nonlinear cells with internal scale hierarchy and asymmetry exhibit nonreciprocity both locally and globally. Considering a single cell composed of a large scale nonlinearly coupled to a small scale, local dynamic nonreciprocity corresponds to vibration energy transfer from the large to the small scale, but absence of energy transfer (and localization) from the small to the large scale. This has been recently proven both theoretically and experimentally. Then, considering the entire lattice, global acoustic nonreciprocity has been recently proven theoretically, corresponding to preferential energy transfer within the lattice under transient excitation applied at one of its boundaries, and absence of similar energy transfer (and localization) when the excitation is applied at its other boundary. This work provides experimental validation of the global acoustic nonreciprocity with a one-dimensional asymmetric lattice composed of three cells, with each cell incorporating nonlinearly coupled large and small scales. Due to the intentional asymmetry of the lattice, low impulsive excitations applied to one of its boundaries result in wave transmission through the lattice, whereas when the same excitations are applied to the other end, they lead in energy localization at the boundary and absence of wave transmission. This global nonreciprocity depends critically on energy (i.e., the intensity of the applied impulses), and reduced-order models recover the nonreciprocal acoustics and clarify the nonlinear mechanism generating nonreciprocity in this system.

Nonreciprocity in the dynamics of coupled oscillators with nonlinearity, asymmetry, and scale hierarchy

In linear time-invariant dynamical and acoustical systems, reciprocity holds by the Onsager-Casimir principle of microscopic reversibility, and this can be broken only by odd external biases, nonlinearities, or time-dependent properties. A concept is proposed in this work for breaking dynamic reciprocity based on irreversible nonlinear energy transfers from large to small scales in a system with nonlinear hierarchical internal structure, asymmetry, and intentional strong stiffness nonlinearity. The resulting nonreciprocal large-to-small scale energy transfers mimic analogous nonlinear energy transfer cascades that occur in nature (e.g., in turbulent flows), and are caused by the strong frequency-energy dependence of the essentially nonlinear small-scale components of the system considered. The theoretical part of this work is mainly based on action-angle transformations, followed by direct numerical simulations of the resulting system of nonlinear coupled oscillators. The experimental part considers a system with two scales-a linear large-scale oscillator coupled to a small scale by a nonlinear spring-and validates the theoretical findings demonstrating nonreciprocal large-to-small scale energy transfer. The proposed study promotes a paradigm for designing nonreciprocal acoustic materials harnessing strong nonlinearity, which in a future application will be implemented in designing lattices incorporating nonlinear hierarchical internal structures, asymmetry, and scale mixing.

Mechanisms for impulsive energy dissipation and small-scale effects in microgranular media

We study impulse response in one-dimensional homogeneous microgranular chains on a linear elastic substrate. Microgranular interactions are analytically described by the Schwarz contact model which includes nonlinear compressive as well as snap-to and from-contact adhesive effects forming a hysteretic loop in the force deformation relationship. We observe complex transient dynamics, including disintegration of solitary pulses, local clustering, and low-to-high-frequency energy transfers resulting in enhanced energy dissipation. We study in detail the underlying dynamics of cluster formation in the impulsively loaded medium and relate enhanced energy dissipation to the rate of cluster formation. These unusual and interesting dynamical phenomena are shown to be robust over a range of physically feasible conditions and are solely scale effects since they are attributed to surface forces, which have no effect at the macroscale. We establish a universal relation between the reclustering rate and the effective damping in these systems. Our findings demonstrate that scale effects generating new nonlinear features can drastically affect the dynamics and acoustics of microgranular materials.

Mechanics of capillary forming of aligned carbon nanotube assemblies

Elastocapillary self-assembly is emerging as a versatile technique to manufacture three-dimensional (3D) microstructures and complex surface textures from arrangements of micro- and nanoscale filaments. Understanding the mechanics of capillary self-assembly is essential to engineering of properties such as shape-directed actuation, anisotropic wetting and adhesion, and mechanical energy transfer and dissipation. We study elastocapillary self-assembly (herein called "capillary forming") of carbon nanotube (CNT) microstructures, combining in situ optical imaging, micromechanical testing, and finite element modeling. By imaging, we identify sequential stages of liquid infiltration, evaporation, and solid shrinkage, whose kinetics relate to the size and shape of the CNT microstructure. We couple these observations with measurements of the orthotropic elastic moduli of CNT forests to understand how the dynamic of shrinkage of the vapor-liquid interface is coupled to the compression of the forest. We compare the kinetics of shrinkage to the rate of evporation from liquid droplets having the same size and geometry. Moreover, we show that the amount of shrinkage during evaporation is governed by the ability of the CNTs to slip against one another, which can be manipulated by the deposition of thin conformal coatings on the CNTs by atomic layer deposition (ALD). This insight is confirmed by finite element modeling of pairs of CNTs as corrugated beams in contact and highlights the coupled role of elasticity and friction in shrinkage and stability of nanoporous solids. Overall, this study shows that nanoscale porosity can be tailored via the filament density and adhesion at contact points, which is important to the development of lightweight multifunctional materials.

Statistical analysis of variation in laboratory growth of carbon nanotube forests and recommendations for improved consistency

While many promising applications have been demonstrated for vertically aligned carbon nanotube (CNT) forests, lack of consistency in results (e.g., CNT quality, height, and density) continues to hinder knowledge transfer and commercialization. For example, it is well known that CNT growth can be influenced by small concentrations of water vapor, carbon deposits on the reactor wall, and experiment-to-experiment variations in pressure within the reaction chamber. However, even when these parameters are controlled during synthesis, we found that variations in ambient lab conditions can overwhelm attempts to perform parametric optimization studies. We established a standard growth procedure, including the chemical vapor deposition (CVD) recipe, while we varied other variables related to the furnace configuration and experimental procedure. Statistical analysis of 280 samples showed that ambient humidity, barometric pressure, and sample position in the CVD furnace contribute significantly to experiment-to-experiment variation. We investigated how these factors lead to CNT growth variation and recommend practices to improve process repeatability. Initial results using this approach reduced run-to-run variation in CNT forest height and density by more than 50%.

Capillary bending of Janus carbon nanotube micropillars

We present a scalable process for the fabrication of slanted carbon nanotube micropillar arrays by inclined metal deposition and capillary self-assembly. Local control of the micropillar angle from vertical to nearly horizontal is achieved, and is explained using a finite element model. These structures may be useful for microscale contacts and anisotropic smart surfaces.

Fabrication, densification, and replica molding of 3D carbon nanotube microstructures

The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip devices, and their applications. In particular, capabilities for cost-effective fabrication of polymer microstructures were transformed by the advent of soft lithography and other micromolding techniques (1, 2), and this led a revolution in applications of microfabrication to biomedical engineering and biology. Nevertheless, it remains challenging to fabricate microstructures with well-defined nanoscale surface textures, and to fabricate arbitrary 3D shapes at the micro-scale. Robustness of master molds and maintenance of shape integrity is especially important to achieve high fidelity replication of complex structures and preserving their nanoscale surface texture. The combination of hierarchical textures, and heterogeneous shapes, is a profound challenge to existing microfabrication methods that largely rely upon top-down etching using fixed mask templates. On the other hand, the bottom-up synthesis of nanostructures such as nanotubes and nanowires can offer new capabilities to microfabrication, in particular by taking advantage of the collective self-organization of nanostructures, and local control of their growth behavior with respect to microfabricated patterns. Our goal is to introduce vertically aligned carbon nanotubes (CNTs), which we refer to as CNT "forests", as a new microfabrication material. We present details of a suite of related methods recently developed by our group: fabrication of CNT forest microstructures by thermal CVD from lithographically patterned catalyst thin films; self-directed elastocapillary densification of CNT microstructures; and replica molding of polymer microstructures using CNT composite master molds. In particular, our work shows that self-directed capillary densification ("capillary forming"), which is performed by condensation of a solvent onto the substrate with CNT microstructures, significantly increases the packing density of CNTs. This process enables directed transformation of vertical CNT microstructures into straight, inclined, and twisted shapes, which have robust mechanical properties exceeding those of typical microfabrication polymers. This in turn enables formation of nanocomposite CNT master molds by capillary-driven infiltration of polymers. The replica structures exhibit the anisotropic nanoscale texture of the aligned CNTs, and can have walls with sub-micron thickness and aspect ratios exceeding 50:1. Integration of CNT microstructures in fabrication offers further opportunity to exploit the electrical and thermal properties of CNTs, and diverse capabilities for chemical and biochemical functionalization (3).

High-speed in situ X-ray scattering of carbon nanotube film nucleation and self-organization

The production of high-performance carbon nanotube (CNT) materials demands understanding of the growth behavior of individual CNTs as well as collective effects among CNTs. We demonstrate the first use of grazing incidence small-angle X-ray scattering to monitor in real time the synthesis of CNT films by chemical vapor deposition. We use a custom-built cold-wall reactor along with a high-speed pixel array detector resulting in a time resolution of 10 msec. Quantitative models applied to time-resolved X-ray scattering patterns reveal that the Fe catalyst film first rapidly dewets into well-defined hemispherical particles during heating in a reducing atmosphere, and then the particles coarsen slowly upon continued annealing. After introduction of the carbon source, the initial CNT diameter distribution closely matches that of the catalyst particles. However, significant changes in CNT diameter can occur quickly during the subsequent CNT self-organization process. Correlation of time-resolved orientation data to X-ray scattering intensity and height kinetics suggests that the rate of self-organization is driven by both the CNT growth rate and density, and vertical CNT growth begins abruptly when CNT alignment reaches a critical threshold. The dynamics of CNT size evolution and self-organization vary according to the catalyst annealing conditions and substrate temperature. Knowledge of these intrinsically rapid processes is vital to improve control of CNT structure and to enable efficient manufacturing of high-density arrays of long, straight CNTs.

Engineering of micro- and nanostructured surfaces with anisotropic geometries and properties

Widespread approaches to fabricate surfaces with robust micro- and nanostructured topographies have been stimulated by opportunities to enhance interface performance by combining physical and chemical effects. In particular, arrays of asymmetric surface features, such as arrays of grooves, inclined pillars, and helical protrusions, have been shown to impart unique anisotropy in properties including wetting, adhesion, thermal and/or electrical conductivity, optical activity, and capability to direct cell growth. These properties are of wide interest for applications including energy conversion, microelectronics, chemical and biological sensing, and bioengineering. However, fabrication of asymmetric surface features often pushes the limits of traditional etching and deposition techniques, making it challenging to produce the desired surfaces in a scalable and cost-effective manner. We review and classify approaches to fabricate arrays of asymmetric 2D and 3D surface features, in polymers, metals, and ceramics. Analytical and empirical relationships among geometries, materials, and surface properties are discussed, especially in the context of the applications mentioned above. Further, opportunities for new fabrication methods that combine lithography with principles of self-assembly are identified, aiming to establish design principles for fabrication of arbitrary 3D surface textures over large areas.

Corrugated carbon nanotube microstructures with geometrically tunable compliance

Deterministic organization of nanostructures into microscale geometries is essential for the development of materials with novel mechanical, optical, and surface properties. We demonstrate scalable fabrication of 3D corrugated carbon nanotube (CNT) microstructures, via an iterative sequence of vertically aligned CNT growth and capillary self-assembly. Vertical microbellows and tilted microcantilevers are created over large areas, and these structures can have thin walls with aspect ratios exceeding 100:1. We show these structures can be used as out-of-plane microsprings with compliance determined by the wall thickness and number of folds.

Fabrication of high-aspect-ratio polymer microstructures and hierarchical textures using carbon nanotube composite master molds

Scalable and cost effective patterning of polymer structures and their surface textures is essential to engineer material properties such as liquid wetting and dry adhesion, and to design artificial biological interfaces. Further, fabrication of high-aspect-ratio microstructures often requires controlled deep-etching methods or high-intensity exposure. We demonstrate that carbon nanotube (CNT) composites can be used as master molds for fabrication of high-aspect-ratio polymer microstructures having anisotropic nanoscale textures. The master molds are made by growth of vertically aligned CNT patterns, capillary densification of the CNTs using organic solvents, and capillary-driven infiltration of the CNT structures with SU-8. The composite master structures are then replicated in SU-8 using standard PDMS transfer molding methods. By this process, we fabricated a library of replicas including vertical micro-pillars, honeycomb lattices with sub-micron wall thickness and aspect ratios exceeding 50:1, and microwells with sloped sidewalls. This process enables batch manufacturing of polymer features that capture complex nanoscale shapes and textures, while requiring only optical lithography and conventional thermal processing.

Structurally programmed capillary folding of carbon nanotube assemblies

We demonstrate the fabrication of horizontally aligned carbon nanotube (HA-CNT) networks by spatially programmable folding, which is induced by self-directed liquid infiltration of vertical CNTs. Folding is caused by a capillary buckling instability and is predicted by the elastocapillary buckling height, which scales with the wall thickness as t(3/2). The folding direction is controlled by incorporating folding initiators at the ends of the CNT walls, and the initiators cause a tilt during densification which precedes buckling. By patterning these initiators and specifying the wall geometry, we control the dimensions of HA-CNT patches over 2 orders of magnitude and realize multilayered and multidirectional assemblies. Multidirectional HA-CNT patterns are building blocks for custom design of nanotextured surfaces and flexible circuits.

Non-destructive characterization of structural hierarchy within aligned carbon nanotube assemblies

Understanding and controlling the hierarchical self-assembly of carbon nanotubes (CNTs) is vital for designing materials such as transparent conductors, chemical sensors, high-performance composites, and microelectronic interconnects. In particular, many applications require high-density CNT assemblies that cannot currently be made directly by low-density CNT growth, and therefore require post-processing by methods such as elastocapillary densification. We characterize the hierarchical structure of pristine and densified vertically aligned multi-wall CNT forests, by combining small-angle and ultra-small-angle x-ray scattering (USAXS) techniques. This enables the nondestructive measurement of both the individual CNT diameter and CNT bundle diameter within CNT forests, which are otherwise quantified only by delicate and often destructive microscopy techniques. Our measurements show that multi-wall CNT forests grown by chemical vapor deposition consist of isolated and bundled CNTs, with an average bundle diameter of 16 nm. After capillary densification of the CNT forest, USAXS reveals bundles with a diameter >4 μm, in addition to the small bundles observed in the as-grown forests. Combining these characterization methods with new CNT processing methods could enable the engineering of macro-scale CNT assemblies that exhibit significantly improved bulk properties.

Measuring the lengthening kinetics of aligned nanostructures by spatiotemporal correlation of height and orientation

Owing to their inherent tortuosity, the collective height of vertically aligned nanostructures does not equal the average length of the individual constituent nanostructures, and therefore temporal height measurement is not an accurate measure of the genuine growth kinetics. We use high-resolution spatial mapping of alignment by small-angle X-ray scattering (SAXS) to transform real-time measurements of array height to the average length of the nanostructures. Applying this approach to carbon nanotube (CNT) forest growth transforms the kinetics from a sub-linear to a linear relationship with time, highlighting the potential for insights into the limiting growth mechanisms of CNTs and other one-dimensional nanostructures.

Flexible high-conductivity carbon-nanotube interconnects made by rolling and printing

Applications of carbon nanotubes (CNTs) in flexible and complementary metal-oxide-semiconductor (CMOS)-based electronic and energy devices are impeded due to typically low CNT areal densities, growth temperatures that are incompatible with device substrates, and challenges in large-area alignment and interconnection. A scalable method for continuous fabrication and transfer printing of dense horizontally aligned CNT (HA-CNT) ribbon interconnects is presented. The process combines vertically aligned CNT (VA-CNT) growth by thermal chemical vapor deposition, a novel mechanical rolling process to transform the VA-CNTs to HA-CNTs, and adhesion-controlled transfer printing without needing a carrier film. The rolling force determines the HA-CNT packing fraction and the HA-CNTs are processed by conventional lithography. An electrical resistivity of 2 mOmega . cm is measured for ribbons having 800-nm thickness, while the resistivity of copper is 100 times lower, a value that exceeds most CNT assemblies made to date, and significant improvements can be made in CNT structural quality. This rolling and printing process could be scaled to full wafer areas and more complex architectures such as continuous CNT sheets and multidirectional patterns could be achieved by straightforward design of the CNT growth process and/or multiple rolling and printing sequences.

Engineering vertically aligned carbon nanotube growth by decoupled thermal treatment of precursor and catalyst

We study synthesis of vertically aligned carbon nanotube (CNT) "forests" by a decoupled method that facilitates control of the mean diameter and structural quality of the CNTs and enables tuning of the kinetics for efficient growth to forest heights of several millimeters. The growth substrate temperature (T(s)) primarily determines the CNT diameter, whereas independent and rapid thermal treatment (T(p)) of the C(2)H(4)/H(2) reactant mixture significantly changes the growth rate and terminal forest height but does not change the CNT diameter. Synchrotron X-ray scattering is utilized for precise, nondestructive measurement of CNT diameter in large numbers of samples. CNT structural quality monotonically increases with T(s) yet decreases with T(p), and forests grown by this decoupled method have significantly higher quality than those grown using a conventional single-zone tube furnace. Chemical analysis reveals that the thermal treatment generates a broad population of hydrocarbon species, and a nonmonotonic relationship between catalyst lifetime and T(p) suggests that certain carbon species either enhance or inhibit CNT growth. However, the forest height kinetics, as measured in real-time during growth, are self-similar, thereby indicating that a common mechanism of growth termination may be present over a wide range of process conditions.