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Saifullah MSM, Rajak AK, Hofhuis KA, Tiwale N, Mahfoud Z, Testino A, Karadan P, Vockenhuber M, Kazazis D, Valiyaveettil S, Ekinci Y. Approaching Angstrom-Scale Resolution in Lithography Using Low-Molecular-Mass Resists (<500 Da). ACS NANO 2024; 18:24076-24094. [PMID: 39163414 PMCID: PMC11375778 DOI: 10.1021/acsnano.4c03939] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/22/2024]
Abstract
Resists that enable high-throughput and high-resolution patterning are essential in driving the semiconductor technology forward. The ultimate patterning performance of a resist in lithography is limited because of the trade-off between resolution, line-width roughness, and sensitivity; improving one or two of these parameters typically leads to a loss in the third. As the patterned feature sizes approach angstrom scale, the trade-off between these three metrics becomes increasingly hard to resolve and calls for a fundamental rethinking of the resist chemistry. Low-molecular-mass monodispersed metal-containing resists of high atom economy can provide not only very high resolution but also very low line-width roughness without sacrificing sensitivity. Here we describe a modular metal-containing resist platform (molecular mass <500 Da) where a molecular resist consists of just two components: a metal and a radical initiator bonded to it. This simple system not only is amenable to high-resolution electron beam lithography (EBL) and extreme ultraviolet lithography (EUVL) but also unites them mechanistically, giving a consolidated perspective of molecular and chemical processes happening during exposure. Irradiation of the resist leads to the production of secondary electrons that generate radicals in the initiator bonded to metal. This brings about an intramolecular rearrangement and causes solubility switch in the exposed resist. We demonstrate record 1.9-2.0 nm isolated patterns and 7 nm half-pitch dense line-space features over a large area using EBL. With EUVL, 12 nm half-pitch line-space features are shown at a dose of 68 mJ/cm2. In both of these patterning techniques, the line-width roughness was found to be ≤2 nm, a record low value for any resist platform, also leading to a low-performance trade-off metric, Z factor, of 0.6 × 10-8 mJ·nm3. With the ultimate resolution limited by instrumental factors, potential patterning at the level of a unit cell can be envisaged, making low-molecular-mass resists best poised for angstrom-scale lithography.
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Affiliation(s)
- Mohammad S M Saifullah
- Paul Scherrer Institut, Forschungsstrasse 111, Villigen PSI 5232, Switzerland
- PiBond Oy, Kutojantie 2B, Espoo 02630, Finland
| | - Anil Kumar Rajak
- Paul Scherrer Institut, Forschungsstrasse 111, Villigen PSI 5232, Switzerland
| | - Kevin A Hofhuis
- Paul Scherrer Institut, Forschungsstrasse 111, Villigen PSI 5232, Switzerland
| | - Nikhil Tiwale
- Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973-5000, United States of America
| | - Zackaria Mahfoud
- Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology, and Research), 2 Fusionopolis Way, #08-03 Innovis, Singapore 138634, Republic of Singapore
| | - Andrea Testino
- Paul Scherrer Institut, Forschungsstrasse 111, Villigen PSI 5232, Switzerland
- École Polytechnique Fédérale de Lausanne, STI SMX-GE, Lausanne CH 1015, Switzerland
| | - Prajith Karadan
- Paul Scherrer Institut, Forschungsstrasse 111, Villigen PSI 5232, Switzerland
| | | | - Dimitrios Kazazis
- Paul Scherrer Institut, Forschungsstrasse 111, Villigen PSI 5232, Switzerland
| | - Suresh Valiyaveettil
- Department of Chemistry, National University of Singapore, 3 Science Drive 3, Singapore 117543, Republic of Singapore
| | - Yasin Ekinci
- Paul Scherrer Institut, Forschungsstrasse 111, Villigen PSI 5232, Switzerland
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Peng X, Zhang J, Xiao P. Photopolymerization Approach to Advanced Polymer Composites: Integration of Surface-Modified Nanofillers for Enhanced Properties. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2400178. [PMID: 38843462 DOI: 10.1002/adma.202400178] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/04/2024] [Revised: 05/08/2024] [Indexed: 06/28/2024]
Abstract
The incorporation of functionalized nanofillers into polymers via photopolymerization approach has gained significant attention in recent years due to the unique properties of the resulting composite materials. Surface modification of nanofillers plays a crucial role in their compatibility and polymerization behavior within the polymer matrix during photopolymerization. This review focuses on the recent developments in surface modification of various nanofillers, enabling their integration into polymer systems through photopolymerization. The review discusses the key aspects of surface modification of nanofillers, including the selection of suitable surface modifiers, such as photoinitiators and polymerizable groups, as well as the optimization of modification conditions to achieve desired surface properties. The influence of surface modification on the interfacial interactions between nanofillers and the polymer matrix is also explored, as it directly impacts the final properties of the nanocomposites. Furthermore, the review highlights the applications of nanocomposites prepared by photopolymerization, such as sensors, gas separation membranes, purification systems, optical devices, and biomedical materials. By providing a comprehensive overview of the surface modification strategies and their impact on the photopolymerization process and the resulting nanocomposite properties, this review aims to inspire new research directions and innovative ideas in the development of high-performance polymer nanocomposites for diverse applications.
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Affiliation(s)
- Xiaotong Peng
- Research School of Chemistry, Australian National University, Canberra, ACT, 2601, Australia
| | - Jing Zhang
- Future Industries Institute, University of South Australia, Mawson Lakes, SA, 5095, Australia
| | - Pu Xiao
- State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, 200050, P. R. China
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Dumur F. Recent advances on water-soluble photoinitiators of polymerization. Eur Polym J 2023. [DOI: 10.1016/j.eurpolymj.2023.111942] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 03/06/2023]
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Dumur F. Recent Advances on Photoinitiating Systems Designed for Solar Photocrosslinking Polymerization Reactions. Eur Polym J 2023. [DOI: 10.1016/j.eurpolymj.2023.111988] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 03/17/2023]
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Dumur F. Recent Advances on Anthraquinone-based Photoinitiators of Polymerization. Eur Polym J 2023. [DOI: 10.1016/j.eurpolymj.2023.112039] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 03/30/2023]
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Recent Advances on Furan-Based Visible Light Photoinitiators of Polymerization. Catalysts 2023. [DOI: 10.3390/catal13030493] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 03/04/2023] Open
Abstract
Photopolymerization is an active research field enabling to polymerize in greener conditions than that performed with traditional thermal polymerization. At present, a great deal of effort is devoted to developing visible light photoinitiating systems. Indeed, the traditional UV photoinitiating systems are currently the focus of numerous safety concerns so alternatives to UV light are being actively researched. However, visible light photons are less energetic than UV photons so the reactivity of the photoinitiating systems should be improved to address this issue. In this field, furane constitutes an interesting candidate for the design of photocatalysts of polymerization due to its low cost and its easy chemical modification. In this review, an overview concerning the design of furane-based photoinitiators is provided. Comparisons with reference systems are also established to demonstrate evidence of the interest of these photoinitiators in innovative structures.
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A Review on Recently Proposed Oxime Ester Photoinitiators. Eur Polym J 2023. [DOI: 10.1016/j.eurpolymj.2023.111901] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/19/2023]
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Dumur F. The Future of Visible Light Photoinitiators of Polymerization for Photocrosslinking Applications. Eur Polym J 2023. [DOI: 10.1016/j.eurpolymj.2023.111883] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/13/2023]
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Recent Advances on Photobleachable Visible Light Photoinitiators of Polymerization. Eur Polym J 2023. [DOI: 10.1016/j.eurpolymj.2023.111874] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/04/2023]
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High-Performance Photoinitiating Systems for LED-Induced Photopolymerization. Polymers (Basel) 2023; 15:polym15020342. [PMID: 36679223 PMCID: PMC9860695 DOI: 10.3390/polym15020342] [Citation(s) in RCA: 9] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/25/2022] [Revised: 12/29/2022] [Accepted: 01/05/2023] [Indexed: 01/11/2023] Open
Abstract
Currently, increasing attention has been focused on light-emitting diodes (LEDs)-induced photopolymerization. The common LEDs (e.g., LED at 365 nm and LED at 405 nm) possess narrow emission bands. Due to their light absorption properties, most commercial photoinitiators are sensitive to UV light and cannot be optimally activated under visible LED irradiation. Although many photoinitiators have been designed for LED-induced free radical polymerization and cationic polymerization, there is still the issue of the mating between photoinitiators and LEDs. Therefore, the development of novel photoinitiators, which could be applied under LED irradiation, is significant. Many photoinitiating systems have been reported in the past decade. In this review, some recently developed photoinitiators used in LED-induced photopolymerization, mainly in the past 5 years, are summarized and categorized as Type Ⅰ photoinitiators, Type Ⅱ photoinitiators, and dye-based photoinitiating systems. In addition, their light absorption properties and photoinitiation efficiencies are discussed.
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Naphthalene-Based Oxime Esters as Type I Photoinitiators for Free Radical Photopolymerization. Polymers (Basel) 2022; 14:polym14235261. [PMID: 36501655 PMCID: PMC9735988 DOI: 10.3390/polym14235261] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/03/2022] [Revised: 11/27/2022] [Accepted: 11/29/2022] [Indexed: 12/03/2022] Open
Abstract
In order to discuss the polymerization effect from the substituted position and methoxy group of Type I photinitiators, a series of naphthalene-based oxime esters was designed and synthesized. Compared to the 2-naphthalene-substituted compound, the UV absorption region of the 1-naphthalene-based compound was greatly improved. In addition, the methoxy substitution exhibited longer absorption characteristics than did the methoxy-free one. The photochemical reaction behavior of these novel compounds was also studied by photolysis, cyclic voltammetry (CV), and electron spin resonance (ESR) experiments. Finally, the initiation abilities of naphthalene-based oxime esters toward trimethylolpropane triacrylate (TMPTA) monomer were conducted through the photo-DSC instrument under UV and a 405@nm LED lamp. Remarkedly, the naphthalene-based oxime ester (NA-3) that contains 1-naphthalene with o-methoxy substituent showed the rather red-shifted absorption region with the highest final conversion efficiency under UV (46%) and 405@nm LED (41%) lamp irradiation.
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Dumur F. Recent advances on benzylidene cyclopentanones as visible light photoinitiators of polymerization. Eur Polym J 2022. [DOI: 10.1016/j.eurpolymj.2022.111639] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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Liu Z, Dumur F. Recent Advances on Visible Light Coumarin-based Oxime Esters as Initiators of Polymerization. Eur Polym J 2022. [DOI: 10.1016/j.eurpolymj.2022.111449] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/17/2022]
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Müller SM, Schlögl S, Wiesner T, Haas M, Griesser T. Recent Advances in Type I Photoinitiators for Visible Light Induced Photopolymerization. CHEMPHOTOCHEM 2022. [DOI: 10.1002/cptc.202200091] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
Affiliation(s)
- Stefanie Monika Müller
- Montanuniversität Leoben: Montanuniversitat Leoben Institute of Chemistry of Polymeric Materials AUSTRIA
| | - Sandra Schlögl
- Polymer Competence Center Leoben GmbH Chemistry of Elastomers and Surfaces AUSTRIA
| | - Tanja Wiesner
- Graz University of Technology: Technische Universitat Graz Institute of Inorganic Chemistry AUSTRIA
| | - Michael Haas
- Graz University of Technology: Technische Universitat Graz Institute of Inorganic Chemistry AUSTRIA
| | - Thomas Griesser
- Montanuniversitat Leoben Chair of Chemistry of Polymeric Materials Otto Glöckel-Straße 2/IV 8700 Leoben AUSTRIA
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Ma Q, Buchon L, Magné V, Graff B, Morlet‐Savary F, Xu Y, Benltifa M, Lakhdar S, Lalevée J. Charge Transfer Complexes (CTCs) with Pyridinium Salts: Towards Efficient Dual Photochemical/Thermal Initiators and 3D Printing Applications. Macromol Rapid Commun 2022; 43:e2200314. [DOI: 10.1002/marc.202200314] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/31/2022] [Revised: 04/25/2022] [Indexed: 11/11/2022]
Affiliation(s)
- Qiang Ma
- CNRS Université de Haute‐Alsace IS2M UMR 7361 Mulhouse F‐68100 France
- Université de Strasbourg Strasbourg F‐67081 France
- Key Laboratory of Molecule Synthesis and Function Discovery (Fujian Province University) College of Chemistry Fuzhou University Fuzhou 350116 P. R. China
| | - Loïc Buchon
- CNRS Université de Haute‐Alsace IS2M UMR 7361 Mulhouse F‐68100 France
| | - Valentin Magné
- Laboratoire Hétérochimie Fondamentale et Appliquée UMR CNRS Université Paul Sabatier France
| | - Bernadette Graff
- CNRS Université de Haute‐Alsace IS2M UMR 7361 Mulhouse F‐68100 France
| | | | - Yangyang Xu
- College of Chemistry and Materials Science Anhui Normal University South Jiuhua Road 189 Wuhu 241002 P. R. China
| | - Mahmoud Benltifa
- Laboratory of Wastewaters and Environment Center for Water Research and Technologies CERTE BP 273 Soliman 8020 Tunisia
| | - Sami Lakhdar
- Laboratoire Hétérochimie Fondamentale et Appliquée UMR CNRS Université Paul Sabatier France
| | - Jacques Lalevée
- CNRS Université de Haute‐Alsace IS2M UMR 7361 Mulhouse F‐68100 France
- Université de Strasbourg Strasbourg F‐67081 France
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Hammoud F, Hijazi A, Ibrahim-Ouali M, Lalevée J, Dumur F. Chemical engineering around the 5,12-dihydroindolo[3,2-a]carbazole scaffold : Fine tuning of the optical properties of visible light photoinitiators of polymerization. Eur Polym J 2022. [DOI: 10.1016/j.eurpolymj.2022.111218] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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Liu S, Giacoletto N, Schmitt M, Nechab M, Graff B, Morlet-Savary F, Xiao P, Dumur F, Lalevée J. Effect of Decarboxylation on the Photoinitiation Behavior of Nitrocarbazole-Based Oxime Esters. Macromolecules 2022. [DOI: 10.1021/acs.macromol.2c00294] [Citation(s) in RCA: 6] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/14/2022]
Affiliation(s)
- Shaohui Liu
- CNRS, IS2M UMR 7361, Université de Haute-Alsace, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
| | | | - Michael Schmitt
- CNRS, IS2M UMR 7361, Université de Haute-Alsace, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
| | - Malek Nechab
- Aix Marseille Univ, CNRS, ICR UMR7273, F-13397 Marseille, France
| | - Bernadette Graff
- CNRS, IS2M UMR 7361, Université de Haute-Alsace, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
| | - Fabrice Morlet-Savary
- CNRS, IS2M UMR 7361, Université de Haute-Alsace, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
| | - Pu Xiao
- Research School of Chemistry, Australian National University, Canberra, ACT 2601, Australia
| | - Frédéric Dumur
- Aix Marseille Univ, CNRS, ICR UMR7273, F-13397 Marseille, France
| | - Jacques Lalevée
- CNRS, IS2M UMR 7361, Université de Haute-Alsace, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
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Lalevée J, Hammoud F, Pavlou A, Petropoulos A, Graff B, Siskos M, Hijazi A, Morlet-Savary F, Dumur F. Naphthoquinone-based Imidazolyl Esters as Blue-Light-Sensitive Type I Photoinitiators. Polym Chem 2022. [DOI: 10.1039/d2py00753c] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
In this work, a series of Type I photoinitiators (PIs) based on the naphthoquinone scaffold were designed and synthesized for the first time, in order to induce photopolymerization under visible...
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Lee ZH, Huang TL, Hammoud F, Chen CC, Hijazi A, Graff B, Lalevée J, Chen YC. Effect of the Steric Hindrance and Branched Substituents on Visible Phenylamine Oxime Ester Photoinitiators: Photopolymerization Kinetics Investigation through Photo-DSC Experiments. Photochem Photobiol 2021; 98:773-782. [PMID: 34674274 DOI: 10.1111/php.13545] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/09/2021] [Accepted: 10/18/2021] [Indexed: 01/06/2023]
Abstract
In this work, free radical photopolymerization (FRP) kinetics for series of different phenylamine oxime ester structures (DMA-P, DEA-P, DMA-M, TP-2P, TP-2M and TP-3M) was investigated. Steric hindrance and branched substituents were prepared to realize the corresponding electronic and photopolymerization effects. The photophysical, electrochemical, thermal properties and radical concentration were investigated by UV-visible spectroscopy, cyclic voltammetry (CV), thermogravimetric analysis (TGA), differential scanning calorimetry (DSC) and electron paramagnetic resonance (EPR). Furthermore, the structure-reactivity relationships were also studied in detail through photo-DSC experiment. We demonstrate that the introduction of alkyl chains and/or numbers of oxime esters affects significantly the photoreactivity. Under the same weight ratio of formulation and irradiated condition, TP-3M containing three oxime esters in its structure and methyl group in the periphery exhibits the highest double-bond conversion efficiency. TP-3M-based formulation also shows a wide operation window under different contents and light intensities. Importantly, the photoreactivity of the TP-3M-based system was found to be better than the commercial photoinitiator (OXE-01) under LED@405 nm at a low concentration. This work could provide some significance to the design of oxime esters with enhanced photoreactivity.
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Affiliation(s)
- Zhong-Han Lee
- Department of Chemical and Materials Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan
| | - Tung-Liang Huang
- Department of Chemical and Materials Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan
| | - Fatima Hammoud
- IS2M UMR 7361, Université de Haute-Alsace, CNRS, Mulhouse, France.,Université de Strasbourg, Strasbourg, France.,EDST, Université Libanaise, Beyrouth, Lebanon
| | - Ching-Chin Chen
- Department of Chemistry, National Chung Hsing University, Taichung, Taiwan
| | | | - Bernadette Graff
- IS2M UMR 7361, Université de Haute-Alsace, CNRS, Mulhouse, France.,Université de Strasbourg, Strasbourg, France
| | - Jacques Lalevée
- IS2M UMR 7361, Université de Haute-Alsace, CNRS, Mulhouse, France.,Université de Strasbourg, Strasbourg, France
| | - Yung-Chung Chen
- Department of Chemical and Materials Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan.,Photo-SMART (Photo-sensitive Material Advanced Research and Technology Center), National Kaohsiung University of Science and Technology, Kaohsiung City, Taiwan
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Ma Q, Liu S, Le Dot M, Mokbel H, Zhang Y, Graff B, Lalevée J. Imidazole based dual photo/thermal initiators for highly efficient radical polymerization under air with a metal-free approach. Polym Chem 2021. [DOI: 10.1039/d1py01079d] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
A metal-free visible LED photopolymerization process, initiated by imidazole based charge transfer complexes under mild conditions (room temperature, without an inert atmosphere, monomer purification or stabilizer removal), is reported.
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Affiliation(s)
- Qiang Ma
- Université de Haute-Alsace, CNRS, IS2 M UMR 7361, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
- Key Laboratory of Molecule Synthesis and Function Discovery (Fujian Province University), College of Chemistry, Fuzhou University, Fuzhou 350116, P. R. China
| | - Shaohui Liu
- Université de Haute-Alsace, CNRS, IS2 M UMR 7361, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
| | - Marie Le Dot
- Université de Haute-Alsace, CNRS, IS2 M UMR 7361, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
| | - Haifaa Mokbel
- Université de Haute-Alsace, CNRS, IS2 M UMR 7361, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
| | - Yijun Zhang
- Université de Haute-Alsace, CNRS, IS2 M UMR 7361, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
| | - Bernadette Graff
- Université de Haute-Alsace, CNRS, IS2 M UMR 7361, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
| | - Jacques Lalevée
- Université de Haute-Alsace, CNRS, IS2 M UMR 7361, F-68100 Mulhouse, France
- Université de Strasbourg, F-67081 Strasbourg, France
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