Atom Probe Analysis of Nanoparticles Through Pick and Coat Sample Preparation

In Situ Metallic Coating of Atom Probe Specimen for Enhanced Yield, Performance, and Increased Field-of-View

Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpened specimen has been proposed to increase yield and reduce background. However, to date, these coatings have been applied ex situ and mostly are not uniform. Here, we report on the controlled focused-ion beam in situ deposition of a thin metal film on specimens immediately after specimen preparation. Different metallic targets e.g. Cr were attached to a micromanipulator via a conventional lift-out method and sputtered using Ga or Xe ions. We showcase the many advantages of coating specimens from metallic to nonmetallic materials. We have identified an increase in data quality and yield, an improvement of the mass resolution, as well as an increase in the effective field-of-view. This wider field-of-view enables visualization of the entire original specimen, allowing to detect the complete surface oxide layer around the specimen. The ease of implementation of the approach makes it very attractive for generalizing its use across a very wide range of atom probe analyses.

Facilitating Atom Probe Tomography of 2D MXene Films by In Situ Sputtering

2D materials are emerging as promising nanomaterials for applications in energy storage and catalysis. In the wet chemical synthesis of MXenes, these 2D transition metal carbides and nitrides are terminated with a variety of functional groups, and cations such as Li+ are often used to intercalate into the structure to obtain exfoliated nanosheets. Given the various elements involved in their synthesis, it is crucial to determine the detailed chemical composition of the final product, in order to better assess and understand the relationships between composition and properties of these materials. To facilitate atom probe tomography analysis of these materials, a revised specimen preparation method is presented in this study. A colloidal Ti3C2Tz MXene solution was processed into an additive-free free-standing film and specimens were prepared using a dual beam scanning electron microscope/focused ion beam. To mechanically stabilize the fragile specimens, they were coated using an in situ sputtering technique. As various 2D material inks can be processed into such free-standing films, the presented approach is pivotal for enabling atom probe analysis of other 2D materials.

Preparation of atom probe tips from (nano)particles in dispersion using (di)electrophoresis and electroplating

The behavior of catalytic particles depends on their chemical structure and morphology. To reveal this information, the characterization with atom probe tomography has huge potential. Despite progresses and papers proposing various approaches towards the incorporation of particles inside atom probe tips, no single approach has been broadly applicable to date. In this paper, we introduce a workflow that allowed us to prepare atom probe specimens from Ga particles in suspension in the size range of 50 nm up to 2 μm. By combining dielectrophoresis and electrodeposition in a suitable way, we achieve a near-tip shape geometry, without a time-consuming FIB lift-out. This workflow is a simple and quick method to prepare atom probe tips and allows for a high preparation throughput. Also, not using a lift-out allowed us to use a cryo-stage, avoiding melting of the Ga particles, while ensuring a mechanical stable atom probe tip. The specimen prepared by this workflow enable a stable measurement and low fracture rates. RESEARCH HIGHLIGHTS: Enabling cryo-preparation of (nano)particles for the atom probe. Characterization of surface and bulk elemental distribution of GaPt model SCALMS.