"Sketch and Peel" Lithography for High-Resolution Multiscale Patterning

Surface-Enhanced Raman Spectroscopy: Current Understanding, Challenges, and Opportunities

While surface-enhanced Raman spectroscopy (SERS) has experienced substantial advancements since its discovery in the 1970s, it is an opportunity to celebrate achievements, consider ongoing endeavors, and anticipate the future trajectory of SERS. In this perspective, we encapsulate the latest breakthroughs in comprehending the electromagnetic enhancement mechanisms of SERS, and revisit CT mechanisms of semiconductors. We then summarize the strategies to improve sensitivity, selectivity, and reliability. After addressing experimental advancements, we comprehensively survey the progress on spectrum-structure correlation of SERS showcasing their important role in promoting SERS development. Finally, we anticipate forthcoming directions and opportunities, especially in deepening our insights into chemical or biological processes and establishing a clear spectrum-structure correlation.

Hierarchical Engineering of Sorption-Based Atmospheric Water Harvesters

Harvesting water from air in sorption-based devices is a promising solution to decentralized water production, aiming for providing potable water anywhere, anytime. This technology involves a series of coupled processes occurring at distinct length scales, ranging from nanometer to meter and even larger, including water sorption/desorption at the nanoscale, condensation at the mesoscale, device development at the macroscale and water scarcity assessment at the global scale. Comprehensive understanding and bespoke designs at every scale are thus needed to improve the water-harvesting performance. For this purpose, a brief introduction of the global water crisis and its key characteristics is provided to clarify the impact potential and design criteria of water harvesters. Next the latest molecular-level optimizations of sorbents for efficient moisture capture and release are discussed. Then, novel microstructuring of surfaces to enhance dropwise condensation, which is favorable for atmospheric water generation, is shown. After that, system-level optimizations of sorbent-assisted water harvesters to achieve high-yield, energy-efficient, and low-cost water harvesting are highlighted. Finally, future directions toward practical sorption-based atmospheric water harvesting are outlined.

Pursuit of hidden rules behind the irregularity of nano capillary lithography by hybrid intelligence

Nature finds a way to leverage nanotextures to achieve desired functions. Recent advances in nanotechnologies endow fascinating multi-functionalities to nanotextures by modulating the nanopixel's height. But nanoscale height control is a daunting task involving chemical and/or physical processes. As a facile, cost-effective, and potentially scalable remedy, the nanoscale capillary force lithography (CFL) receives notable attention. The key enabler is optical pre-modification of photopolymer's characteristics via ultraviolet (UV) exposure. Still, the underlying physics of the nanoscale CFL is not well understood, and unexplained phenomena such as the "forbidden gap" in the nano capillary rise (unreachable height) abound. Due to the lack of large data, small length scales, and the absence of first principles, direct adoptions of machine learning or analytical approaches have been difficult. This paper proposes a hybrid intelligence approach in which both artificial and human intelligence coherently work together to unravel the hidden rules with small data. Our results show promising performance in identifying transparent, physics-retained rules of air diffusivity, dynamic viscosity, and surface tension, which collectively appear to explain the forbidden gap in the nanoscale CFL. This paper promotes synergistic collaborations of humans and AI for advancing nanotechnology and beyond.

Flexible, stretchable, and single-molecule-sensitive SERS-active sensor for wearable biosensing applications

The development of wearable sensors for remote patient monitoring and personalized medicine has led to a revolution in biomedical technology. Plasmonic metasurfaces that enhance Raman scattering signals have recently gained attention as wearable sensors. However, finding a flexible, sensitive, and easy-to-fabricate metasurface has been a challenge for decades. In this paper, a novel wearable device, the flexible, stretchable, and single-molecule-sensetive SERS-active sensor, is proposed. This device offers an unprecedented SERS enhancement factor in the order of 1011, along with other long-desired characteristics for SERS applications such as a high scattering to absorption ratio (∼2.5) and a large hotspot volume (40 nm × 40 nm × 5 nm). To achieve flexibility, we use polydimethylsiloxane (PDMS) as the substrate, which is stable, transparent, and biologically compatible. Our numerical calculations show that the proposed sensor offers reliable SERS performance even under bending (up to 100° angles) or stretching (up to 50% stretch). The easy-to-fabricate and flexible nature of our sensor offers a promising avenue for developing highly sensitive wearable sensors for a range of applications, particularly in the field of personalized medicine and remote patient monitoring.

Giant Enhancement of Second-Harmonic Generation in Hybrid Metasurface Coupled MoS2 with Fano-Resonance Effect

Plasmonic nanostructures have been regarded as potential candidates for boosting the nonlinear up-conversion rate at the nanoscale level due to their strong near-field enhancement and inherent high design freedom. Here, we design a hybrid metasurface to realize the moderate interaction of Fano resonance and create the dual-resonant mode-matching condition to facilitate the nonlinear process of second harmonic generation (SHG). The hybrid metasurface presents dipolar and octupolar plasmonic modes near the fundamental and doubled-frequency wavelengths, respectively, further utilized to enhance the SHG of low-dimensional MoS₂ semiconductors. The maximum intensity of SHG in hybrid metasurface coupled MoS₂ is more than ten thousand times larger than that of other structure-units coupled MoS₂. The conversion efficiency is reported to be as high as 3.27 × 10^-7. This work paves the way to optimize nonlinear light-matter interactions in low-dimensional structures coupled with semiconductors.

Broadband Perfect Absorber in the Visible Range Based on Metasurface Composite Structures

The broadband perfect absorption of visible light is of great significance for solar cells and photodetectors. The realization of a two-dimensional broadband perfect absorber in the visible range poses a formidable challenge with regard to improving the integration of optical systems. In this paper, we numerically demonstrate a broadband perfect absorber in the visible range from 400 nm to 700 nm based on metasurface composite structures. Simulation results show that the average absorptance is ~95.7% due to the combination of the intrinsic absorption of the lossy metallic material (Au) and the coupling resonances of the multi-sized resonators. The proposed perfect absorber may find potential applications in photovoltaics and photodetection.

Asymmetric Nanofractures Determined the Nonreciprocal Peeling for Self-Aligned Heterostructure Nanogaps and Devices

Planar heterostructures composed of two or more adjacent structures with different materials are a kind of building blocks for various applications in surface plasmon resonance sensors, rectifiers, photovoltaic devices, and ambipolar devices, but their reliable fabrication with controllable shape, size, and positioning accuracy remains challenging. In this work, we propose a concept for fabricating planar heterostructures via directional stripping and controlled nanofractures of metallic films, with which self-aligned, multimaterial, multiscale heterostructures with arbitrary geometries and sub-20 nm gaps can be obtained. By using a split ring as the template, the asymmetric nanofracture of the deposited film at the split position results in nonreciprocal peeling of the film in the split ring. Compared to the conventional processes, the final heterostructures are defined only by their outlines, thus providing the ability to fabricate complex heterostructures with higher resolutions. We demonstrate that this method can be used to fabricate heterodimers, multimaterial oligomers, and multiscale asymmetrical electrodes. An Ag-MoS₂-Au photodiode with a strong rectification effect is fabricated based on the nanogap heterostructures prepared by this method. This technology provides a unique and reliable approach to define nanogap heterostructures, which are supposed to have potential applications in nanoelectronics, nanoplasmonics, nano-optoelectronics, and electrochemistry.

Scalable Fabrication of Metallic Nanogaps at the Sub-10 nm Level

Metallic nanogaps with metal-metal separations of less than 10 nm have many applications in nanoscale photonics and electronics. However, their fabrication remains a considerable challenge, especially for applications that require patterning of nanoscale features over macroscopic length-scales. Here, some of the most promising techniques for nanogap fabrication are evaluated, covering established technologies such as photolithography, electron-beam lithography (EBL), and focused ion beam (FIB) milling, plus a number of newer methods that use novel electrochemical and mechanical means to effect the patterning. The physical principles behind each method are reviewed and their strengths and limitations for nanogap patterning in terms of resolution, fidelity, speed, ease of implementation, versatility, and scalability to large substrate sizes are discussed.

Plasmonic metal nanostructures with extremely small features: new effects, fabrication and applications

Surface plasmons in metals promise many fascinating properties and applications in optics, sensing, photonics and nonlinear fields. Plasmonic nanostructures with extremely small features especially demonstrate amazing new effects as the feature sizes scale down to the sub-nanometer scale, such as quantum size effects, quantum tunneling, spill-out of electrons and nonlocal states etc. The unusual physical, optical and photo-electronic properties observed in metallic structures with extreme feature sizes enable their unique applications in electromagnetic field focusing, spectra enhancing, imaging, quantum photonics, etc. In this review, we focus on the new effects, fabrication and applications of plasmonic metal nanostructures with extremely small features. For simplicity and consistency, we will focus our topic on the plasmonic metal nanostructures with feature sizes of sub-nanometers. Subsequently, we discussed four main and typical plasmonic metal nanostructures with extremely small features, including: (1) ultra-sharp plasmonic metal nanotips; (2) ultra-thin plasmonic metal films; (3) ultra-small plasmonic metal particles and (4) ultra-small plasmonic metal nanogaps. Additionally, the corresponding fascinating new effects (quantum nonlinear, non-locality, quantum size effect and quantum tunneling), applications (spectral enhancement, high-order harmonic wave generation, sensing and terahertz wave detection) and reliable fabrication methods will also be discussed. We end the discussion with a brief summary and outlook of the main challenges and possible breakthroughs in the field. We hope our discussion can inspire the broader design, fabrication and application of plasmonic metal nanostructures with extremely small feature sizes in the future.

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This paper reviews the materials modification research that has been enabled by the helium ion microscope since its commercialization in 2007, ranging from fundamental studies of beam-sample effects, to the prototyping of new devices with features in the sub-10 nm domain.

Silicon Nanoantenna Mix Arrays for a Trifecta of Quantum Emitter Enhancements

Dielectric nanostructures have demonstrated optical antenna effects due to Mie resonances. Previous work has exhibited enhancements in absorption, emission rates and directionality with practical limitations. In this paper, we present a Si mix antenna array to achieve a trifecta enhancement of ∼1200-fold with a Purcell factor of ∼47. The antenna design incorporates ∼10 nm gaps, within which fluorescent molecules strongly absorb the pump laser energy through a resonant mode. In the emission process, the antenna array increases the radiative decay rates of the fluorescence molecules via a Purcell effect and provides directional emission through a separate mode. This work could lead to novel CMOS-compatible platforms to enhance fluorescence for biological and chemical applications.

Fabrication of single-nanometer metallic gaps via spontaneous nanoscale dewetting

Ultrasmall metallic nanogaps are of great significance for wide applications in various nanodevices. However, it is challenging to fabricate ultrasmall metallic nanogaps by using common lithographic methods due to the limited resolution. In this work, we establish an effective approach for successful formation of ultrasmall metallic nanogaps based on the spontaneous nanoscale dewetting effect during metal deposition. By varying the initial opening size of the exposed resist template, the influence of dewetting behavior could be adjusted and tiny metallic nanogaps can be obtained. We demonstrate that this method is effective to fabricate diverse sub-10 nm gaps in silver nanostructures. Based on this fabrication concept, even sub-5 nm metallic gaps were obtained. SERS measurements were performed to show the molecular detection capability of the fabricated Ag nanogaps. This approach is a promising candidate for sub-10 nm metallic gaps fabrication, thus possessing potential applications in nanoelectronics, nanoplasmonics, and nano-optoelectronics.

Massively Parallel Arrays of Size-Controlled Metallic Nanogaps with Gap-Widths Down to the Sub-3-nm Level

Metallic nanogaps (MNGs) are fundamental components of nanoscale photonic and electronic devices. However, the lack of reproducible, high-yield fabrication methods with nanometric control over the gap-size has hindered practical applications. A patterning technique based on molecular self-assembly and physical peeling is reported here that allows the gap-width to be tuned from more than 30 nm to less than 3 nm. The ability of the technique to define sub-3-nm gaps between dissimilar metals permits the easy fabrication of molecular rectifiers, in which conductive molecules bridge metals with differing work functions. A method is further described for fabricating massively parallel nanogap arrays containing hundreds of millions of ring-shaped nanogaps, in which nanometric size control is maintained over large patterning areas of up to a square centimeter. The arrays exhibit strong plasmonic resonances under visible light illumination and act as high-performance substrates for surface-enhanced Raman spectroscopy, with high enhancement factors of up to 3 × 10⁸ relative to thin gold films. The methods described here extend the range of metallic nanostructures that can be fabricated over large areas, and are likely to find many applications in molecular electronics, plasmonics, and biosensing.

Study on the enhancing water collection efficiency of cactus- and beetle-like biomimetic structure using UV-induced controllable diffusion method and 3D printing technology

Collecting water from fog flow has emerged as a promising strategy for the relief of water shortage problems. Herein, using a UV-induced (ultraviolet light induced) controllable diffusion method combined with technology of three-dimensional (3D) printing, we fabricate biomimetic materials incorporating beetle-like hydrophobic-hydrophilic character and cactus-like cone arrays with various structure parameters, and then systematically study their fog-harvesting performance. The UV-induced controllable diffusion method can break away from the photomask to regulate the hybrid wettability. Moreover, employing 3D printing technology can flexibly control the structure parameters to improve the water collection efficiency. It is found that the water collection rate (WCR) can be optimized by controlling the hybrid wettability of the sample surface and cone distance and using substrates with printed holes, which lead to a 109% increase of WCR.

Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing. Among the various fabrication techniques, focused ion beam (FIB) nanofabrication has been established as a well-suited and promising technique in nearly all fields of nanotechnology for the fabrication of 3D nanostructures and devices because of increasing demands from industry and research. In this article, a series of FIB nanofabrication factors related to the fabrication of 3D nanostructures and devices, including mechanisms, instruments, processes, and typical applications of FIB nanofabrication, are systematically summarized and analyzed in detail. Additionally, current challenges and future development trends of FIB nanofabrication in this field are also given. This work intends to provide guidance for practitioners, researchers, or engineers who wish to learn more about the FIB nanofabrication technology that is driving the revolution in 3D nanostructures and devices.

Manipulation and Applications of Hotspots in Nanostructured Surfaces and Thin Films

The synthesis of nanostructured surfaces and thin films has potential applications in the field of plasmonics, including plasmon sensors, plasmon-enhanced molecular spectroscopy (PEMS), plasmon-mediated chemical reactions (PMCRs), and so on. In this article, we review various nanostructured surfaces and thin films obtained by the combination of nanosphere lithography (NSL) and physical vapor deposition. Plasmonic nanostructured surfaces and thin films can be fabricated by controlling the deposition process, etching time, transfer, fabrication routes, and their combination steps, which manipulate the formation, distribution, and evolution of hotspots. Based on these hotspots, PEMS and PMCRs can be achieved. This is especially significant for the early diagnosis of hepatocellular carcinoma (HCC) based on surface-enhanced Raman scattering (SERS) and controlling the growth locations of Ag nanoparticles (AgNPs) in nanostructured surfaces and thin films, which is expected to enhance the optical and sensing performance.

Strongly coupled evenly divided disks: a new compact and tunable platform for plasmonic Fano resonances

Plasmonic artificial molecules are promising platforms for linear and nonlinear optical modulation at various regimes including the visible, infrared and terahertz bands. Fano resonances in plasmonic artificial structures are widely used for controlling spectral lineshapes and tailoring of near-field and far-field optical response. Generation of a strong Fano resonance usually relies on strong plasmon coupling in densely packed plasmonic structures. Challenges in reproducible fabrication using conventional lithography significantly hinders the exploration of novel plasmonic nanostructures for strong Fano resonance. In this work, we propose a new class of plasmonic molecules with symmetric structure for Fano resonances, named evenly divided disk, which shows a strong Fano resonance due to the interference between a subradiant anti-bonding mode and a superradiant bonding mode. We successfully fabricated evenly divided disk structures with high reproducibility and with sub-20 nm gaps, using our recently developed sketch and peel lithography technique. The experimental spectra agree well with the calculated response, indicating the robustness of the Fano resonance for the evenly divided disk geometry. Control experiments reveal that the strength of the Fano resonance gradually increases when increasing the number of split parts on the disk from three to eight individual segments. The Fano-resonant plasmonic molecules that can also be reliably defined by our unique fabrication approach open up new avenues for application and provide insight into the design of artificial molecules for controlling light-matter interactions.

Well-ordered nanoparticle arrays for floating gate memory applications

A non-volatile floating gate memory device containing well-ordered Au nanoparticles (NPs) is fabricated as a metal-oxide-semiconductor capacitor structure. With superior control on the size, shape and position of nanoparticles, the presented nano-floating gate memory (NFGM) device possesses almost perfect precision of device geometry. The well-ordered Au NPs embedded within the memory device exhibit large memory window at low operation voltages (8.8V @ ± 15V), fast operation time (<10^-4 s) and good retention (up to 10⁷ s). In this work, the structural properties of the NFGM device are correlated with the examined electrical properties. The current results are compared with the other studies in the literature to emphasis the advantages of the precise ordering and geometry of the NPs.

Plasma-assisted filling electron beam lithography for high throughput patterning of large area closed polygon nanostructures

Electron-beam lithography is widely applied in nanofabrication due to its high resolution. However, it suffers from low throughput due to its patterning process. All the pixels within a pattern's boundary are needed to be scanned for patterning, which is inefficient for a large area closed polygon structure. Introducing an additional step to perform the polygon-filling function for patterning will significantly improve the fabrication throughput. In this work, we introduce a practical polygon-filling process for electron beam lithography, termed plasma-assisted filling electron beam lithography (PFEBL), that makes use of post-exposure plasma treatment on the resist which only crosslinks the top surface of the resist. Using this technique, we only need to expose the outline of the patterns during the writing process and could still obtain the full structure after post-exposure plasma treatment and development. We show that the lithography patterning efficiency could be enhanced 50 times and above while sub-10 nm resolution patterning with a sharp boundary feature size can still be obtained. The plasma exposure mechanism and development mechanism were discussed for the characteristics of the resist that enables this filling process. Our approach allows large area closed polygon structures to be patterned with high patterning efficiency, which could find uses in various applications in nanophotonic and optoelectronic devices.

Ultra-large local field enhancement effect of isolated thick triangular silver nanoplates on a silicon substrate in the green waveband

The local field enhancement in plasmonic nanostructures is vital for surface enhanced Raman scattering (SERS). However, it remains a challenge to achieve a large local field enhancement at an illumination wavelength in the green waveband. Here we report on an ultra-large local field enhancement effect of isolated thick triangular silver nanoplates (ITTSNPs) on a silicon substrate at an illumination wavelength in the green waveband. We show that when the thickness of the ITTSNP is larger than a critical thickness depending on the illumination wavelength, a large local field enhancement with an enhancement factor (EF) greater than 350 can be achieved at an illumination wavelength in the green waveband, which is due to the excitation of strong localized surface plasmon polaritons only at three top apexes of the ITTSNP. Furthermore, we experimentally demonstrate that at an excitation wavelength of 514.5 nm, the average SERS EF of the ITTSNPs can exceed ${{10}^{11}}$10¹¹, and the sensitivity for the detection of Rhodamine 6 G molecules can reach ${{10}^{ - 12}}\;{\rm M}$10^-12M.

Huge field enhancement and high transmittance enabled by terahertz bow-tie aperture arrays: a simulation study

Sub-wavelength aperture arrays featuring small gaps have an extraordinary significance in enhancing the interactions of terahertz (THz) waves with matters. But it is difficult to obtain large light-substance interaction enhancement and high optical response signal detection capabilities at the same time. Here, we propose a simple terahertz bow-tie aperture arrays structure with a large electric field enhancement factor and high transmittance at the same time. The field enhancement factor can reach a high value of 1.9×10⁴ and the transmission coefficient of around 0.8 (the corresponding normalized-to-area transmittance is about 14.3) at 0.04 µm feature gap simultaneously. The systematic simulation results show that the designed structure can enhance the intensity of electromagnetic hotspot by continuously reducing the feature gap size without affecting the intensity of the transmittance. We also visually displayed the significant advantages of extremely strong electromagnetic hot spots in local terahertz refractive index detection, which provides a potential platform and simple strategy for enhanced THz spectral detection.

Ultraviolet Interband Plasmonics With Si Nanostructures

Although Si acts as an electrical semiconductor, it has properties of an optical dielectric. Here, we revisit the behavior of Si as a plasmonic metal. This behavior was previously shown to arise from strong interband transitions that lead to negative permittivity of Si across the ultraviolet spectral range. However, few have studied the plasmonic characteristics of Si, particularly in its nanostructures. In this paper, we report localized plasmon resonances of Si nanostructures and the observation of plasmon hybridization in the UV (∼250 nm wavelength). In addition, simulation results show that Si nanodisk dimers can achieve a local intensity enhancement greater than ∼500-fold in a 1 nm gap. Lastly, we investigate hybrid Si-Al nanostructures to achieve sharp resonances in the UV, due to the coupling between plasmon resonances supported by Si and Al nanostructures. These results will have potential applications in the UV range, such as nanostructured devices for spectral filtering, plasmon-enhanced Si photodetectors, interrogation of molecular chirality, and catalysis. It could have significant impact on UV photolithography on patterned Si structures.

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

We found that continuous films of gold (Au) on oxidized silicon (SiO₂) substrates, upon treatment with ultraviolet (UV)-ozone, exhibit strong adhesion to the SiO₂ support. Importantly, the enhancement is independent of micro- or nanostructuring of such nanometer-thick films. Deposition of a second Au layer on top of the pretreated Au layer makes the adhesion stable for at least 5 months in environmental air. Using this treatment method enables us to large-scale fabricate various SiO₂-supported Au structures at various thicknesses with dimensions spanning from a few hundreds of nanometers to a few micrometers, without the use of additional adhesion layers. We explain the observed adhesion improvement as polarization-induced increased strength of Au^δ-Si^δ+ bonds at the Au-SiO₂ interface due to the formation of a gold oxide monolayer on the Au surface by the UV-ozone treatment. Our simple and enabling method thus provides opportunities for patterning Au micro/nanostructures on SiO₂ substrates without an intermediate metallic adhesion layer, which is critical for biosensing and nanophotonic applications.

Coupling effects in single-mode and multimode resonator-coupled system

We have proposed a simple metal-dielectric-metal (MDM) waveguide system side-coupled with single-mode and multimode resonators. This proposed structure can achieve a typical dual plasmon-induced transparency (PIT) effect in the transmission spectra. The two PIT peaks exhibit opposite evolution tendencies with the increase in the depth of stubs. A multimode-coupled mode theory (M-CMT), confirmed by simulated results, is originally introduced to investigate the coupling effects of the proposed structure. Compared to the previous reported multichannel filters, the proposed structure includes obvious advantages, such as structural simplicity and ease of fabrication. In addition, the sensing characteristics of the proposed structure based on PIT effects are discussed numerically. The results demonstrate that the proposed structure is suitable for applications in multichannel filters, optical switches, and sensors.

Plasmon-assisted nanojet lithography

The great barrier of optical diffraction significantly limits the resolution of photolithography and the manipulation of nano-objects by light. Here, through utilizing near-field enhancement and photothermal effects, we demonstrate the nanolithography of polystyrene (PS) films and self-jetting of gold nanoparticles (Au NPs), which happen simultaneously. This nanojet lithography creates subwavelength holes via the single step of laser irradiation. We find that the laser power input strongly affects the etching of PS films, as well as the movement of Au NPs, which is a synergic effect of photoablation (including both photothermal and photochemical aspects) and gas pushing. This facile approach not only generates polymer holes with sizes below the diffraction limit, but also provides an intriguing way to detach and move particles on surfaces via thermal jetting.

Kirigami-inspired multiscale patterning of metallic structures via predefined nanotrench templates

Reliable fabrication of multiscale metallic patterns with precise geometry and size at both the nanoscale and macroscale is of importance for various applications in electronic and optical devices. The existing fabrication processes, which usually involve film deposition in combination with electron-beam patterning, are either time-consuming or offer limited precision. Inspired by the kirigami, an ancient handicraft art of paper cutting, this work demonstrates an electron-beam patterning process for multiscale metallic structures with significantly enhanced efficiency and precision. Similar to the kirigami, in which the final pattern is defined by cutting its contour in a paper and then removing the unwanted parts, we define the target multiscale structures by first creating nanotrench contours in a metallic film via an electron-beam-based process and then selectively peeling the separated film outside the contours. Compared with the conventional approach, which requires the exposure of the whole pattern, much less exposure area is needed for nanotrench contours, thus enabling reduced exposure time and enhanced geometric precision due to the mitigated proximity effect. A theoretical model based on interface mechanics allows a clear understanding of the nanotrench-assisted selective debonding behaviour in the peeling process. By using this fabrication process, multiscale metallic structures with sub-10-nm up to submillimetre features can be reliably achieved, having potential applications for anti-counterfeiting and gap-plasmon-enhanced spectroscopy.

Mechanical-Tunable Capillary-Force-Driven Self-Assembled Hierarchical Structures on Soft Substrate

Capillary-force-driven self-assembly (CFSA) has been combined with many top-down fabrication methods to be alternatives to conventional single micro/nano manufacturing techniques for constructing complicated micro/nanostructures. However, most CFSA structures are fabricated on a rigid substrate, and little attention is paid to the tuning of CFSA, which means that the pattern of structures cannot be regulated once they are manufactured. Here, by combining femtosecond laser direct writing with CFSA, a flexible method is proposed to fabricate self-assembled hierarchical structures on a soft substrate. Then, the tuning of the self-assembly process is realized with a mechanical-stretching strategy. With this method, different patterns of tunable self-assembled structures are obtained before tuning and after release, which is difficult to achieve with other techniques. In addition, as a proof-of-concept application, this mechanical tunable self-assembly of microstructures on a soft substrate is used for smart displays and versatile micro-object trapping.

A Coulomb explosion strategy to tailor the nano-architecture of α-MoO3 nanobelts and an insight into its intrinsic mechanism

Tailoring the nanoarchitecture of materials is significant for the development of nanoscience and nanotechnology. To date, one of the most powerful strategies is convergent electron beam irradiation (EBI). However, only two main functions of knock-on or atomic displacement have been achieved to date. In this study, a Coulomb explosion phenomenon was found to occur in α-MoO3 nanobelts (NBs) under electron beam irradiation, which was controllable and could be used to efficiently create nanostructures such as holes, gaps, and other atomic/nanometer patterns on a single α-MoO3 NB. Theoretical simulations starting from the charging state, charging rate to the threshold time of Coulomb explosion reveal that the Coulomb explosion phenomenon should result from positive charging. The results also show that the multiple charged regions are quickly fragmented, and the monolayered α-MoO3 pieces can then be peeled off once the Coulombic repulsion is sufficient to break the Mo-O bonds in the crystalline structure. It is believed that this efficient and versatile strategy may open up a new avenue to tailor α-MoO3 NBs or other kind of transition metal dichalcogenides via the Coulomb explosion effect.

Tip-Based Nanofabrication for Scalable Manufacturing

Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.

Bioinspired Special Wettability Surfaces: From Fundamental Research to Water Harvesting Applications

Nowadays, the pollution of water has become worse in many parts of the world, which causes a severe shortage of clean water and attracts widespread attention worldwide. Bioinspired from nature, i.e. spider silk, cactus, Namib desert beetle, Nepenthes alata, special wettability surfaces have attracted great interest from fundamental research to water-harvesting applications. Here, recently published literature about creatures possessing water-harvesting ability are reviewed, with a focus on the corresponding water-harvesting mechanisms of creatures in dry or arid regions, consisting of the theory of wetting and transporting. Then a detailed account of the innovative fabrication technologies and bionic water-harvesting materials with special wetting are summarized, i.e. bio-inspired artificial spider silk, bio-inspired artificial cactus-like structures, and bio-inspired artificial Namib desert beetle-like surfaces. Special attentions are paid to the discussion of the advantages and disadvantages of the technologies, as well as factors that affect the amount of water-harvesting. Finally, conclusions, future outlooks and the current challenges for future development of the water-harvesting technology are presented and discussed.

Pronounced Fano Resonance in Single Gold Split Nanodisks with 15 nm Split Gaps for Intensive Second Harmonic Generation

Single metallic nanostructures supporting strong Fano resonances allow more compact nanophotonics integration and easier geometrical control in practical applications such as enhanced spectroscopy and sensing. In this work, we designed a class of plasmonic split nanodisks that show pronounced Fano resonance comparable to that observed in widely studied plasmonic oligomer clusters. Using our recently developed "sketch and peel" electron-beam lithography, split nanodisks with varied diameter and split length were fabricated over a large area with high uniformity. Transmission spectroscopy measurements demonstrated that the fabricated structures with 15 nm split gap exhibit disk diameter and split length controlled Fano resonances in the near-infrared region, showing excellent agreement with simulation results. Together with the plasmon hybridization theory, in-depth full-wave analyses elucidated that the Fano resonances observed in the split nanodisks were induced by mode interference between the bright antibonding dipole mode of split disks and the subradiant mode supported by the narrow split gap. With the giant near-field enhancement enabled by the intensive Fano resonance at the tiny split gap, strong wavelength-dependent second harmonic generation was observed under near-infrared excitation. Our work demonstrated that single split nanodisks could serve as important building blocks for plasmonic and nanophotonic applications including sensing and nonlinear optics.

Rapid Focused Ion Beam Milling Based Fabrication of Plasmonic Nanoparticles and Assemblies via "Sketch and Peel" Strategy

Focused ion beam (FIB) milling is a versatile maskless and resistless patterning technique and has been widely used for the fabrication of inverse plasmonic structures such as nanoholes and nanoslits for various applications. However, due to its subtractive milling nature, it is an impractical method to fabricate isolated plasmonic nanoparticles and assemblies which are more commonly adopted in applications. In this work, we propose and demonstrate an approach to reliably and rapidly define plasmonic nanoparticles and their assemblies using FIB milling via a simple "sketch and peel" strategy. Systematic experimental investigations and mechanism studies reveal that the high reliability of this fabrication approach is enabled by a conformally formed sidewall coating due to the ion-milling-induced redeposition. Particularly, we demonstrated that this strategy is also applicable to the state-of-the-art helium ion beam milling technology, with which high-fidelity plasmonic dimers with tiny gaps could be directly and rapidly prototyped. Because the proposed approach enables rapid and reliable patterning of arbitrary plasmonic nanostructures that are not feasible to fabricate via conventional FIB milling process, our work provides the FIB milling technology an additional nanopatterning capability and thus could greatly increase its popularity for utilization in fundamental research and device prototyping.

An anti-ultrasonic-stripping effect in confined micro/nanoscale cavities and its applications for efficient multiscale metallic patterning

We report a method to reliably and efficiently fabricate high-fidelity metallic structures from a ten-nanometer to a millimeter scale based on an anti-ultrasonic-stripping (AUS) effect in confined micro/nanoscale cavities. With this AUS effect, metallic structures, which are surrounded by the pre-patterned closed templates, could be defined through selectively removing the evaporated metallic layer at the top and outside of the templates by ultrasonic-cavitation-induced stripping. Because only pre-patterned templates are required for exposure in this multiscale patterning process, this AUS-based process enables much smaller and more reliable plasmonic nanogaps due to the mitigated proximity effect and allows rapid fabrication of multiscale metallic structures which require both tiny and large structures. With unprecedented efficiency and resolution down to a ten-nanometer scale, various metallic structures were fabricated using this AUS-effect-based multiscale patterning process. This AUS effect paves the way for direct writing of metallic structures with a high resolution over a large area for practical applications in plasmonics and nanogap-based electronics.