Sealing Graphene Nanodrums

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.

Thermal dynamics of few-layer-graphene seals

Being of atomic thickness, graphene is the thinnest imaginable membrane. While graphene's basal plane is highly impermeable at the molecular level, the impermeability is, in practice, compromised by leakage pathways located at the graphene-substrate interface. Here, we provide a kinetic analysis of such interface-mediated leakage by probing gas trapped in graphene-sealed SiO2 cavities versus time and temperature using electron energy loss spectroscopy. The results show that gas leakage exhibits an Arrhenius-type temperature dependency with apparent activation energies between 0.2 and 0.7 eV. Surprisingly, the interface leak rate can be improved by several orders of magnitude by thermal processing, which alters the kinetic parameters of the temperature dependency. The present study thus provides fundamental insight into the leakage mechanism while simultaneously demonstrating thermal processing as a generic approach for tightening graphene-based-seals with applications within chemistry and biology.

Gold Nanodrum Resonators

Nanodrum resonators have been fabricated using nanometer-thick gold films as the drumheads. The fabrication method is favorable for large-area array manufacture of arbitrary shapes. The drum resonators exhibit fundamental mode vibration frequencies in the MHz regime. We use the stretched-plate model to describe the natural vibrations of the drum. The Q factor of the fundamental mode increases as the thickness of the drum increases and decreases as the drum diameter goes up. The highest Q factor of the fundamental mode reaches 290 at room temperature and atmospheric pressure. Based on the deduced material properties we estimate that the resonator has a mass sensitivity of 1.11 × 10-22 g/Hz.

High-Sensitivity Graphene MOEMS Resonant Pressure Sensor

Nanomechanical resonators made from suspended graphene exhibit high sensitivity toward pressure variations. Nevertheless, these devices exhibit significant energy loss in nonvacuum environments due to air damping, as well as inevitably weak gas leakage within the reference cavity because of the slight permeation of graphene. We present a new type of graphene resonant pressure sensor utilizing micro-opto-electro-mechanical systems technology, which features a multilayer graphene membrane that is sealed in vacuum and adhered to pressure-sensitive silicon film with grooves. This approach innovatively employs an indirectly sensitive method, exhibiting 60 times smaller energy loss in atmosphere, and solving the long-standing issue of gas permeation between the substrate and graphene. Notably, the proposed sensor exhibits a high pressure sensitivity of 1.7 Hz/Pa, which is 5 times higher than the sensitivity of the silicon counterparts. Also, the all-optical encapsulating cavity structure contributes a high signal-to-noise ratio of 6.9 × 10^-5 Pa^-1 and a low temperature drift (0.014%/^◦C). The proposed method offers a promising solution for long-term stability and energy loss suppression of pressure sensors using two-dimensional materials as the sensitive membrane.

Very high-frequency, gate-tunable CrPS4 nanomechanical resonator with single mode

Two-dimensional (2D) antiferromagnetic semiconductor chromium thiophosphate (CrPS₄) has gradually become a major candidate material for low-dimensional nanoelectromechanical devices due to its remarkable structural, photoelectric characteristics and potentially magnetic properties. Here, we report the experimental study of a new few-layer CrPS₄ nanomechanical resonator demonstrating excellent vibration characteristics through the laser interferometry system, including the uniqueness of resonant mode, the ability to work at the very high frequency, and gate tuning. In addition, we demonstrate that the magnetic phase transition of CrPS₄ strips can be effectively detected by temperature-regulated resonant frequencies, which proves the coupling between magnetic phase and mechanical vibration. We believe that our findings will promote the further research and applications of the resonator for 2D magnetic materials in the field of optical/mechanical signal sensing and precision measurement.

Significant Enhanced Mechanical Properties of Suspended Graphene Film by Stacking Multilayer CVD Graphene Films

Suspended graphene film is of great significance for building high-performance electrical devices. However, fabricating large-area suspended graphene film with good mechanical properties is still a challenge, especially for the chemical vapor deposition (CVD)-grown graphene films. In this work, the mechanical properties of suspended CVD-grown graphene film are investigated systematically for the first time. It is found that monolayer graphene film is hard to maintain on circular holes with a diameter of tens of micrometers, which can be improved greatly by increasing the layer of graphene films. The mechanical properties of CVD-grown multilayer graphene films suspended on a circular hole with a diameter of 70 µm can be increased by 20%, and multilayer graphene films prepared by layer-layer stacking process can be increased by up to 400% for the same size. The corresponding mechanism was also discussed in detail, which might pave the way for building high-performance electrical devices based on high-strength suspended graphene film.

Applications of Graphene in Five Senses, Nervous System, and Artificial Muscles

Graphene remains of great interest in biomedical applications because of biocompatibility. Diseases relating to human senses interfere with life satisfaction and happiness. Therefore, the restoration by artificial organs or sensory devices may bring a bright future by the recovery of senses in patients. In this review, we update the most recent progress in graphene based sensors for mimicking human senses such as artificial retina for image sensors, artificial eardrums, gas sensors, chemical sensors, and tactile sensors. The brain-like processors are discussed based on conventional transistors as well as memristor related neuromorphic computing. The brain-machine interface is introduced for providing a single pathway. Besides, the artificial muscles based on graphene are summarized in the means of actuators in order to react to the physical world. Future opportunities remain for elevating the performances of human-like sensors and their clinical applications.

Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing

Nanomechanical resonators made from suspended graphene combine the properties of ultracompactness and ultrahigh detection sensitivity, making them interesting devices for sensing applications. However, nanomechanical systems can be affected by membrane stress. The present work developed an optomechanical resonator for thermal stress sensing. The proposed resonator consists of a section of hollow core fiber (HCF) and a trampoline graphene-Au membrane. An all-optical system that integrated optical excitation and optical detection was applied. Then, the resonance frequency of the resonator was obtained through this all-optical system. In addition, this system and the resonator were used to detect the membrane's built-in stress, which depended on the ambient temperature, by monitoring the resonance frequency shift. The results verified that the temperature-induced thermal effect had a significant impact on membrane stress. Temperature sensitivities of 2.2646 kHz/°C and 2.3212 kHz/°C were obtained when the temperature rose and fell, respectively. As such, we believe that this device will be beneficial for the quality monitoring of graphene mechanical resonators.

Ultrathin Piezoelectric Resonators Based on Graphene and Free-Standing Single-Crystal BaTiO3

Suspended piezoelectric thin films are key elements enabling high-frequency filtering in telecommunication devices. To meet the requirements of next-generation electronics, it is essential to reduce device thickness for reaching higher resonance frequencies. Here, the high-quality mechanical and electrical properties of graphene electrodes are combined with the strong piezoelectric performance of the free-standing complex oxide, BaTiO₃ (BTO), to create ultrathin piezoelectric resonators. It is demonstrated that the device can be brought into mechanical resonance by piezoelectric actuation. By sweeping the DC bias voltage on the top graphene electrode, the BTO membrane is switched between the two poled ferroelectric states. Remarkably, ferroelectric hysteresis is also observed in the resonance frequency, magnitude and Q-factor of the first membrane mode. In the bulk acoustic mode, the device vibrates at 233 GHz. This work demonstrates the potential of combining van der Waals materials with complex oxides for next-generation electronics, which not only opens up opportunities for increasing filter frequencies, but also enables reconfiguration by poling, via ferroelectric memory effect.

Nano-optomechanical Resonators for Sensitive Pressure Sensing

Nanomechanical sensors made from suspended graphene are sensitive to pressure changes. However, these devices typically function by obtaining an electrical signal based on the static displacement of a suspended graphene membrane and so, in practice, have limited sensitivity and operational range. The present work demonstrates an optomechanical Au/graphene membrane-based gas pressure sensor with ultrahigh sensitivity. This sensor comprises a suspended Au/graphene membrane appended to a section of hollow-core fiber to form a sealed Fabry-Pérot cavity. In contrast to conventional nanomechanical pressure sensors, pressure changes are monitored via resonant sensing with an optical readout. A miniature pressure sensor based on this principle was able to detect an ultrasmall pressure difference of 1 × 10-7 mbar in the ultrahigh-vacuum region with a pressure range of 4.1 × 10-5 to 8.3 × 10-6 mbar. Furthermore, this pressure sensor can work over an extended pressure range of 7 × 10-6 mbar to 1000 mbar at room temperature, outperforming commercial pressure sensors. Similar results were obtained using both the fundamental and higher-order resonant frequencies but with the latter providing improved sensitivity. This sensor has a wide range of potential applications, including indoor navigation, altitude monitoring, and motion detection.

A Resonant Graphene NEMS Vibrometer

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.

Green syntheses of graphene and its applications in internet of things (IoT)-a status review

Internet of Things (IoT) is a trending technological field that converts any physical object into a communicable smarter one by converging the physical world with the digital world. This innovative technology connects the device to the internet and provides a platform to collect real-time data, cloud storage, and analyze the collected data to trigger smart actions from a remote location via remote notifications, etc. Because of its wide-ranging applications, this technology can be integrated into almost all the industries. Another trending field with tremendous opportunities is Nanotechnology, which provides many benefits in several areas of life, and helps to improve many technological and industrial sectors. So, integration of IoT and Nanotechnology can bring about the very important field of Internet of Nanothings (IoNT), which can re-shape the communication industry. For that, data (collected from trillions of nanosensors, connected to billions of devices) would be the 'ultimate truth', which could be generated from highly efficient nanosensors, fabricated from various novel nanomaterials, one of which is graphene, the so-called 'wonder material' of the 21st century. Therefore, graphene-assisted IoT/IoNT platforms may revolutionize the communication technologies around the globe. In this article, a status review of the smart applications of graphene in the IoT sector is presented. Firstly, various green synthesis of graphene for sustainable development is elucidated, followed by its applications in various nanosensors, detectors, actuators, memory, and nano-communication devices. Also, the future market prospects are discussed to converge various emerging concepts like machine learning, fog/edge computing, artificial intelligence, big data, and blockchain, with the graphene-assisted IoT field to bring about the concept of 'all-round connectivity in every sphere possible'.

A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator

This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO₂ substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic field changed the surface tension of the graphene, resulting in a significant change in the resonance frequency of graphene. Using the finite element analysis, it could be found that the response of the resonance frequency revealed a good linear relationship with the external magnetic field (along the x-axis) in the range of the 1 to 1.6 mT. By optimizing the sizes of each component of the magnetic sensor, such as the thickness of the Si/SiO₂ substrate and the Fe–Ga alloy, and the length of the graphene, the sensitivity could even reach 834 kHz/mT, which is three orders of magnitude higher than conventional resonant magnetic devices. This provides a new method for highly sensitive and miniaturized magnetic sensors.

Self-Sealing Complex Oxide Resonators

Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO₃ and SrTiO₃ membranes suspended over SiO₂/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si₃N₄/Si do not show such improvements, suggesting that the adhesion increase over SiO₂ is mediated by oxygen bonds that are formed at the SiO₂/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.

Strain-Modulated Dissipation in Two-Dimensional Molybdenum Disulfide Nanoelectromechanical Resonators

Resonant nanoelectromechanical systems (NEMS) based on two-dimensional (2D) materials such as molybdenum disulfide (MoS₂) are interesting for highly sensitive mass, force, photon, or inertial transducers, as well as for fundamental research approaching the quantum limit, by leveraging the mechanical degree of freedom in these atomically thin materials. For these mechanical resonators, the quality factor (Q) is essential, yet the mechanism and tuning methods for energy dissipation in 2D NEMS resonators have not been fully explored. Here, we demonstrate that by tuning static strain and vibration-induced strain in suspended MoS₂ using gate voltages, we can effectively tune the Q in 2D MoS₂ NEMS resonators. We further show that for doubly clamped resonators, the Q increases with larger DC gate voltage, while fully clamped drumhead resonators show the opposite trend. Using DC gate voltages, we can tune the Q by ΔQ/Q = 448% for fully clamped resonators, and by ΔQ/Q = 369% for doubly clamped resonators. We develop the strain-modulated dissipation model for these 2D NEMS resonators, which is verified against our measurement data for 8 fully clamped resonators and 7 doubly clamped resonators. We find that static tensile strain decreases dissipation while vibration-induced strain increases dissipation, and the actual dependence of Q on DC gate voltage depends on the competition between these two effects, which is related to the device boundary condition. Such strain dependence of Q is useful for optimizing the resonance linewidth in 2D NEMS resonators toward low-power, ultrasensitive, and frequency-selective devices for sensing and signal processing.

A Review on the Applications of Graphene in Mechanical Transduction

A pressing need to develop low-cost, environmentally friendly, and sensitive sensors has arisen with the advent of the always-connected paradigm of the internet-of-things (IoT). In particular, mechanical sensors have been widely studied in recent years for applications ranging from health monitoring, through mechanical biosignals, to structure integrity analysis. On the other hand, innovative ways to implement mechanical actuation have also been the focus of intense research in an attempt to close the circle of human-machine interaction, and move toward applications in flexible electronics. Due to its potential scalability, disposability, and outstanding properties, graphene has been thoroughly studied in the field of mechanical transduction. The applications of graphene in mechanical transduction are reviewed here. An overview of sensor and actuator applications is provided, covering different transduction mechanisms such as piezoresistivity, capacitive sensing, optically interrogated displacement, piezoelectricity, triboelectricity, electrostatic actuation, chemomechanical and thermomechanical actuation, as well as thermoacoustic emission. A critical review of the main approaches is presented within the scope of a wider discussion on the future of this so-called wonder material in the field of mechanical transduction.

Graphene-Based Nanoelectromechanical Periodic Array with Tunable Frequency

Phononic crystals (PnCs) have attracted much attention due to their great potential for dissipation engineering and propagation manipulation of phonons. Notably, the excellent electrical and mechanical properties of graphene make it a promising material for nanoelectromechanical resonators. Transferring a graphene flake to a prepatterned periodic mechanical structure enables the realization of a PnC with on-chip scale. Here, we demonstrate a nanoelectromechanical periodic array by anchoring a graphene membrane to a 9 × 9 array of standing nanopillars. The device exhibits a quasi-continuous frequency spectrum with resonance modes distributed from ∼120 MHz to ∼980 MHz. Moreover, the resonant frequencies of these modes can be electrically tuned by varying the voltage applied to the gate electrode sitting underneath. Simulations suggest that the observed band-like spectrum provides an experimental evidence for PnC formation. Our architecture has large fabrication flexibility, offering a promising platform for investigations on PnCs with electrical accessibility and tunability.

Multi-layer graphene pirani pressure sensors

The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are required, but also minimization of the suspended strip dimensions is essential to maximize the responsivity and minimize the power consumption. Due to this, nanomaterials are especially attractive for this application. Here, we demonstrate the use of a multi-layer suspended graphene strip as a Pirani pressure sensor and compare its behavior with existing models. A clear pressure dependence of the strip's electrical resistance is observed, with a maximum relative change of 2.75% between 1 and 1000 mbar and a power consumption of 8.5 mW. The use of graphene enables miniaturization of the device footprint by 100 times compared to state-of-the-art. Moreover, miniaturization allows for lower power consumption and/or higher responsivity and the sensor's nanogap enables operation near atmospheric pressure that can be used in applications such as barometers for altitude measurement. Furthermore, we demonstrate that the sensor response depends on the type of gas molecules, which opens up the way to selective gas sensing applications. Finally, the graphene synthesis technology is compatible with wafer-scale fabrication, potentially enabling future chip-level integration with readout electronics.

Large-Size Suspended Mono-Layer Graphene Film Transfer Based on the Inverted Floating Method

Suspended graphene can perfectly present the excellent material properties of graphene, which has a good application prospect in graphene sensors. The existing suspended graphene pressure sensor has several problems that need to be solved, one of which is the fabrication of a suspended sample. It is still very difficult to obtain large-size suspended graphene films with a high integrity that are defect-free. Based on the simulation and analysis of the kinetic process of the traditional suspended graphene release process, a novel setup for large-size suspended graphene release was designed based on the inverted floating method (IFM). The success rate of the single-layer suspended graphene with a diameter of 200 μm transferred on a stainless-steel substrate was close to 50%, which is greatly improved compared with the traditional impregnation method. The effects of the defects and burrs around the substrate cavity on the stress concentration of graphene transfer explain why the transfer success rate of large-size suspended graphene is not high. This research lays the foundation for providing large-size suspended graphene films in the area of graphene high-precision sensors.

Tuning nonlinear damping in graphene nanoresonators by parametric-direct internal resonance

Mechanical sources of nonlinear damping play a central role in modern physics, from solid-state physics to thermodynamics. The microscopic theory of mechanical dissipation suggests that nonlinear damping of a resonant mode can be strongly enhanced when it is coupled to a vibration mode that is close to twice its resonance frequency. To date, no experimental evidence of this enhancement has been realized. In this letter, we experimentally show that nanoresonators driven into parametric-direct internal resonance provide supporting evidence for the microscopic theory of nonlinear dissipation. By regulating the drive level, we tune the parametric resonance of a graphene nanodrum over a range of 40–70 MHz to reach successive two-to-one internal resonances, leading to a nearly two-fold increase of the nonlinear damping. Our study opens up a route towards utilizing modal interactions and parametric resonance to realize resonators with engineered nonlinear dissipation over wide frequency range.

Nonlinear dissipation is frequently observed in nanomechanical resonators, but its microscopic origin remains unclear. Here, nonlinear damping is found to be enhanced in graphene nanodrums close to internal resonance conditions, providing insights on the mechanisms at the basis of this phenomenon.

Sensitive capacitive pressure sensors based on graphene membrane arrays

The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8  aF Pa^-1 mm^-2, thereby outperforming the commercial sensors.

Improved Graphene Blisters by Ultrahigh Pressure Sealing

Graphene is a very attractive material for nanomechanical devices and membrane applications. Graphene blisters based on silicon oxide microcavities are a simple but relevant example of nanoactuators. A drawback of this experimental setup is that gas leakage through the graphene-SiO₂ interface contributes significantly to the total leak rate. Here, we study the diffusion of air from pressurized graphene drumheads on SiO₂ microcavities and propose a straightforward method to improve the already strong adhesion between graphene and the underlying SiO₂ substrate, resulting in reduced leak rates. This is carried out by applying controlled and localized ultrahigh pressure (>10 GPa) with an atomic force microscopy diamond tip. With this procedure, we are able to significantly approach the graphene layer to the SiO₂ surface around the drumheads, thus enhancing the interaction between them, allowing us to better seal the graphene-SiO₂ interface, which is reflected in up to ∼ 4 times lower leakage rates. Our work opens an easy way to improve the performance of graphene as a gas membrane on a technological relevant substrate such as SiO₂.

Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 µm

In this paper ultra clean monolayer and bilayer Chemical Vapor Deposited (CVD) graphene membranes with diameters up to 500 µm and 750 µm, respectively have been fabricated using Inverted Floating Method (IFM) followed by thermal annealing in vacuum. The yield decreases with size but we show the importance of choosing a good graphene raw material. Dynamic mechanical properties of the membranes at room temperature in different diameters are measured before and after annealing. The quality factor ranges from 200 to 2000 and shows no clear dependence on the size. The resonance frequency is inversely proportional to the diameter of the membranes. We observe a reduction of the effective intrinsic stress in the graphene, as well as of the relative error in the determination of said stress after thermal annealing. These measurements show that it is possible to produce graphene membranes with reproducible and excellent mechanical properties.

Nanoelectromechanical Sensors Based on Suspended 2D Materials

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.