Bimorph material/structure designs for high sensitivity flexible surface acoustic wave temperature sensors

Parameter optimization of interdigital transducers for high-performance acoustofluidic devices

Microfluidic actuators based on surface acoustic waves (SAWs) typically operate at frequencies below 100 MHz, often neglecting the effect of interdigital transducer (IDT) parameters on device size, cost, and actuation performance. In this paper, we aim to optimize IDT parameters to improve fluidic actuation performance while maintaining a compact size, thereby enhancing the space utilization and reducing manufacturing cost. We systematically investigate the effects of IDT parameters, including wavelength, acoustic aperture, and the number of electrode pairs on fluidic actuation and explore the underlying mechanisms. Results show that increasing the number of electrode pairs and wavelength, or reducing the acoustic aperture width, enhances fluidic actuation performance. Additionally, fluid behaviors vary significantly with frequency. Above 80 MHz, the droplet pumping exhibits a jumping motion that requires a higher power, while jetting resembles the launch of liquid droplet projectile. Below 62 MHz, the droplet pumping combines a rolling and sliding motion, with jetting following a continuous water column along the Rayleigh angle. Moreover, the ejected liquid column size is determined by the acoustic aperture width when the droplet size exceeds the aperture width. Based on these findings, we propose an optimized IDT design guideline: a wavelength range of 64 to 80 µm, 40 to 60 electrode pairs, and an acoustic aperture width of 4 to 6 mm, to achieve optimal fluidic actuation performance while maintaining a compact size for most biomedical applications.

Wireless Powered Surface Acoustic Wave Platform for Achieving Integrated Functions of Fogging/Icing Protection and Monitoring

In this study, we introduced an integrated approach using piezoelectric thin film-based surface acoustic wave (SAW) and wireless power transfer (WPT) technologies, designed for both passive monitoring and active defogging/icing functions. We systematically investigated the resonant frequency shifts of ZnO/glass SAW devices, establishing their correlations with variations in humidity and temperature under cold conditions. Acoustic waves generated through the ZnO/glass SAW device were used for defogging and deicing functions with effects of RF powers and acousto-heating thoroughly evaluated. More significantly, the WPT system was successfully applied for achieving defogging and deicing functions, with its performance comparable to that of conventional wired SAW systems. Our findings demonstrated that the WPT SAW system significantly minimizes localized acousto-heating effects, although the time taken for both defogging and deicing was slightly longer than the wired system. This work represents a significant advancement in developing multifunctional, optically compatible, and wireless-integrated solutions for SAW based ice protection.

Joint subarray acoustic tweezers enable controllable cell translation, rotation, and deformation

Contactless microscale tweezers are highly effective tools for manipulating, patterning, and assembling bioparticles. However, current tweezers are limited in their ability to comprehensively manipulate bioparticles, providing only partial control over the six fundamental motions (three translational and three rotational motions). This study presents a joint subarray acoustic tweezers platform that leverages acoustic radiation force and viscous torque to control the six fundamental motions of single bioparticles. This breakthrough is significant as our manipulation mechanism allows for controlling the three translational and three rotational motions of single cells, as well as enabling complex manipulation that combines controlled translational and rotational motions. Moreover, our tweezers can gradually increase the load on an acoustically trapped cell to achieve controllable cell deformation critical for characterizing cell mechanical properties. Furthermore, our platform allows for three-dimensional (3D) imaging of bioparticles without using complex confocal microscopy by rotating bioparticles with acoustic tweezers and taking images of each orientation using a standard microscope. With these capabilities, we anticipate the JSAT platform to play a pivotal role in various applications, including 3D imaging, tissue engineering, disease diagnostics, and drug testing.

Design and Characterization of Surface Acoustic Wave-Based Wireless and Passive Temperature Sensing System

The surface acoustic wave (SAW) temperature sensor has received significant attention due to its wirelessly powered, battery-free, and chipless capabilities. This paper proposes a wireless sensing system comprising a one-port SAW resonator, helix antenna, and transceiver circuit. The SAW resonator used in this system is based on aluminum nitride (AlN) thin film, which exhibits high velocity and excellent piezoelectric properties. Simulations and experiments were conducted to investigate the performance of the designed SAW resonator. A helix antenna was also designed using finite element simulation to facilitate signal transmission between the SAW temperature sensor and the transceiver. An impedance-matching network was introduced between the helix antenna and the SAW resonator to optimize signal transmission. When the wireless SAW temperature sensor was placed within a certain distance of the mother antenna, the reflection peak of the SAW resonator was observed in the spectrum of the return signal. The frequency of the echo signal increased almost linearly as the temperature increased during the temperature tests. The fitted temperature coefficient of frequency (TCF) was -31.34 ppm/°C, indicating that the wireless temperature sensing system has high-temperature sensitivity.

Fundamentals of Monitoring Condensation and Frost/Ice Formation in Cold Environments Using Thin-Film Surface-Acoustic-Wave Technology

Moisture condensation, fogging, and frost or ice formation on structural surfaces cause severe hazards in many industrial components such as aircraft wings, electric power lines, and wind-turbine blades. Surface-acoustic-wave (SAW) technology, which is based on generating and monitoring acoustic waves propagating along structural surfaces, is one of the most promising techniques for monitoring, predicting, and also eliminating these hazards occurring on these surfaces in a cold environment. Monitoring condensation and frost/ice formation using SAW devices is challenging in practical scenarios including sleet, snow, cold rain, strong wind, and low pressure, and such a detection in various ambient conditions can be complex and requires consideration of various key influencing factors. Herein, the influences of various individual factors such as temperature, humidity, and water vapor pressure, as well as combined or multienvironmental dynamic factors, are investigated, all of which lead to either adsorption of water molecules, condensation, and/or frost/ice in a cold environment on the SAW devices. The influences of these parameters on the frequency shifts of the resonant SAW devices are systematically analyzed. Complemented with experimental studies and data from the literature, relationships among the frequency shifts and changes of temperature and other key factors influencing the dynamic phase transitions of water vapor on SAW devices are investigated to provide important guidance for icing detection and monitoring.

Acousto-dielectric tweezers for size-insensitive manipulation and biophysical characterization of single cells

The intrinsic biophysical properties of cells, such as mechanical, acoustic, and electrical properties, are valuable indicators of a cell's function and state. However, traditional single-cell biophysical characterization methods are hindered by limited measurable properties, time-consuming procedures, and complex system setups. This study presents acousto-dielectric tweezers that leverage the balance between controllable acoustophoretic and dielectrophoretic forces applied on cells through surface acoustic waves and alternating current electric fields, respectively. Particularly, the balanced acoustophoretic and dielectrophoretic forces can trap cells at equilibrium positions independent of the cell size to differentiate between various cell-intrinsic mechanical, acoustic, and electrical properties. Experimental results show our mechanism has the potential for applications in single-cell analysis, size-insensitive cell separation, and cell phenotyping, which are all primarily based on cells' intrinsic biophysical properties. Our results also show the measured equilibrium position of a cell can inversely determine multiple biophysical properties, including membrane capacitance, cytoplasm conductivity, and acoustic contrast factor. With these features, our acousto-dielectric tweezing mechanism is a valuable addition to the resources available for biophysical property-based biological and medical research.

A solution to the biophysical fractionation of extracellular vesicles: Acoustic Nanoscale Separation via Wave-pillar Excitation Resonance (ANSWER)

High-precision isolation of small extracellular vesicles (sEVs) from biofluids is essential toward developing next-generation liquid biopsies and regenerative therapies. However, current methods of sEV separation require specialized equipment and time-consuming protocols and have difficulties producing highly pure subpopulations of sEVs. Here, we present Acoustic Nanoscale Separation via Wave-pillar Excitation Resonance (ANSWER), which allows single-step, rapid (<10 min), high-purity (>96% small exosomes, >80% exomeres) fractionation of sEV subpopulations from biofluids without the need for any sample preprocessing. Particles are iteratively deflected in a size-selective manner via an excitation resonance. This previously unidentified phenomenon generates patterns of virtual, tunable, pillar-like acoustic field in a fluid using surface acoustic waves. Highly precise sEV fractionation without the need for sample preprocessing or complex nanofabrication methods has been demonstrated using ANSWER, showing potential as a powerful tool that will enable more in-depth studies into the complexity, heterogeneity, and functionality of sEV subpopulations.

Flexible multifunctional platform based on piezoelectric acoustics for human-machine interaction and environmental perception

Flexible human-machine interfaces show broad prospects for next-generation flexible or wearable electronics compared with their currently available bulky and rigid counterparts. However, compared to their rigid counterparts, most reported flexible devices (e.g., flexible loudspeakers and microphones) show inferior performance, mainly due to the nature of their flexibility. Therefore, it is of great significance to improve their performance by developing and optimizing new materials, structures and design methodologies. In this paper, a flexible acoustic platform based on a zinc oxide (ZnO) thin film on an aluminum foil substrate is developed and optimized; this platform can be applied as a loudspeaker, a microphone, or an ambient sensor depending on the selection of its excitation frequencies. When used as a speaker, the proposed structure shows a high sound pressure level (SPL) of ~90 dB (with a standard deviation of ~3.6 dB), a low total harmonic distortion of ~1.41%, and a uniform directivity (with a standard deviation of ~4 dB). Its normalized SPL is higher than those of similar devices reported in the recent literature. When used as a microphone, the proposed device shows a precision of 98% for speech recognition, and the measured audio signals show a strong similarity to the original audio signals, demonstrating its equivalent performance compared to a rigid commercial microphone. As a flexible sensor, this device shows a high temperature coefficient of frequency of -289 ppm/K and good performance for respiratory monitoring.

Breath monitoring, sleep disorder detection, and tracking using thin-film acoustic waves and open-source electronics

Apnoea, a major sleep disorder, affects many adults and causes several issues, such as fatigue, high blood pressure, liver conditions, increased risk of type II diabetes, and heart problems. Therefore, advanced monitoring and diagnosing tools of apnoea disorders are needed to facilitate better treatment, with advantages such as accuracy, comfort of use, cost effectiveness, and embedded computation capabilities to recognise, store, process, and transmit time series data. In this work we present an adaptation of our apnoea-Pi open-source surface acoustic wave (SAW) platform (Apnoea-Pi) to monitor and recognise apnoea in patients. The platform is based on a thin-film SAW device using bimorph ZnO and Al structures, including those fabricated as Al foils or plates, to achieve breath tracking based on humidity and temperature changes. We applied open-source electronics and provided embedded computing characteristics for signal processing, data recognition, storage, and transmission of breath signals. We show that the thin-film SAW device out-performed standard and off-the-shelf capacitive electronic sensors in terms of their response and accuracy for human breath-tracking purposes. This in combination with embedded electronics makes a suitable platform for human breath monitoring and sleep disorder recognition.

Acousto-Pi: An Opto-Acoustofluidic System Using Surface Acoustic Waves Controlled With Open-Source Electronics for Integrated In-Field Diagnostics

Surface acoustic wave (SAW) devices are increasingly applied in life sciences, biology, and point-of-care applications due to their combined acoustofluidic sensing and actuating properties. Despite the advances in this field, there remain significant gaps in interfacing hardware and control strategies to facilitate system integration with high performance and low cost. In this work, we present a versatile and digitally controlled acoustofluidic platform by demonstrating key functions for biological assays such as droplet transportation and mixing using a closed-loop feedback control with image recognition. Moreover, we integrate optical detection by demonstrating in situ fluorescence sensing capabilities with a standard camera and digital filters, bypassing the need for expensive and complex optical setups. The Acousto-Pi setup is based on open-source Raspberry Pi hardware and 3-D printed housing, and the SAW devices are fabricated with piezoelectric thin films on a metallic substrate. The platform enables the control of droplet position and speed for sample processing (mixing and dilution of samples), as well as the control of temperature based on acousto-heating, offering embedded processing capability. It can be operated remotely while recording the measurements in cloud databases toward integrated in-field diagnostic applications such as disease outbreak control, mass healthcare screening, and food safety.

Unconventional acoustic approaches for localized and designed micromanipulation

Acoustic fields are ideal for micromanipulation, being biocompatible and with force gradients approaching the scale of single cells. They have accordingly found use in a variety of microfluidic devices, including for microscale patterning, separation, and mixing. The bulk of work in acoustofluidics has been predicated on the formation of standing waves that form periodic nodal positions along which suspended particles and cells are aligned. An evolving range of applications, however, requires more targeted micromanipulation to create unique patterns and effects. To this end, recent work has made important advances in improving the flexibility with which acoustic fields can be applied, impressively demonstrating generating arbitrary arrangements of pressure fields, spatially localizing acoustic fields and selectively translating individual particles in ways that are not achievable via traditional approaches. In this critical review we categorize and examine these advances, each of which open the door to a wide range of applications in which single-cell fidelity and flexible micromanipulation are advantageous, including for tissue engineering, diagnostic devices, high-throughput sorting and microfabrication.

Printable, Highly Sensitive Flexible Temperature Sensors for Human Body Temperature Monitoring: A Review

In recent years, the development and research of flexible sensors have gradually deepened, and the performance of wearable, flexible devices for monitoring body temperature has also improved. For the human body, body temperature changes reflect much information about human health, and abnormal body temperature changes usually indicate poor health. Although body temperature is independent of the environment, the body surface temperature is easily affected by the surrounding environment, bringing challenges to body temperature monitoring equipment. To achieve real-time and sensitive detection of various parts temperature of the human body, researchers have developed many different types of high-sensitivity flexible temperature sensors, perfecting the function of electronic skin, and also proposed many practical applications. This article reviews the current research status of highly sensitive patterned flexible temperature sensors used to monitor body temperature changes. First, commonly used substrates and active materials for flexible temperature sensors have been summarized. Second, patterned fabricating methods and processes of flexible temperature sensors are introduced. Then, flexible temperature sensing performance are comprehensively discussed, including temperature measurement range, sensitivity, response time, temperature resolution. Finally, the application of flexible temperature sensors based on highly delicate patterning are demonstrated, and the future challenges of flexible temperature sensors have prospected.

Flexible and Integrated Sensing Platform of Acoustic Waves and Metamaterials based on Polyimide-Coated Woven Carbon Fibers

Versatile, in situ sensing and continuous monitoring capabilities are critically needed, but challenging, for components made of solid woven carbon fibers in aerospace, electronics, and medical applications. In this work, we proposed a unique concept of integrated sensing technology on woven carbon fibers through integration of thin-film surface acoustic wave (SAW) technology and electromagnetic metamaterials, with capabilities of noninvasive, in situ, and continuous monitoring of environmental parameters and biomolecules wirelessly. First, we fabricated composite materials using a three-layer composite design, in which the woven carbon fiber cloth was first coated with a polyimide (PI) layer followed by a layer of ZnO film. Integrated SAW and metamaterials devices were then fabricated on this composite structure. The temperature of the functional area of the device could be controlled precisely using the SAW devices, which could provide a proper incubation environment for biosampling processes. As an ultraviolet light sensor, the SAW device could achieve a good sensitivity of 56.86 ppm/(mW/cm²). On the same integrated platform, an electromagnetic resonator based on the metamaterials was demonstrated to work as a glucose concentration monitor with a sensitivity of 0.34 MHz/(mg/dL).

Acoustofluidic Scanning Nanoscope with High Resolution and Large Field of View

Optical imaging with nanoscale resolution and a large field of view is highly desirable in many research areas. Unfortunately, it is challenging to achieve these two features simultaneously while using a conventional microscope. An objective lens with a low numerical aperture (NA) has a large field of view but poor resolution. In contrast, a high NA objective lens will have a higher resolution but reduced field of view. In an effort to close the gap between these trade-offs, we introduce an acoustofluidic scanning nanoscope (AS-nanoscope) that can simultaneously achieve high resolution with a large field of view. The AS-nanoscope relies on acoustofluidic-assisted scanning of multiple microsized particles. A scanned 2D image is then compiled by processing the microparticle images using an automated big-data image algorithm. The AS-nanoscope has the potential to be integrated into a conventional microscope or could serve as a stand-alone instrument for a wide range of applications where both high resolution and large field of view are required.

Hierarchical Nanotexturing Enables Acoustofluidics on Slippery yet Sticky, Flexible Surfaces

The ability to actuate liquids remains a fundamental challenge in smart microsystems, such as those for soft robotics, where devices often need to conform to either natural or three-dimensional solid shapes, in various orientations. Here, we propose a hierarchical nanotexturing of piezoelectric films as active microfluidic actuators, exploiting a unique combination of both topographical and chemical properties on flexible surfaces, while also introducing design concepts of shear hydrophobicity and tensile hydrophilicity. In doing so, we create nanostructured surfaces that are, at the same time, both slippery (low in-plane pinning) and sticky (high normal-to-plane liquid adhesion). By enabling fluid transportation on such arbitrarily shaped surfaces, we demonstrate efficient fluid motions on inclined, vertical, inverted, or even flexible geometries in three dimensions. Such surfaces can also be deformed and then reformed into their original shapes, thereby paving the way for advanced microfluidic applications.

Integrating microfluidics and biosensing on a single flexible acoustic device using hybrid modes

Integration of microfluidics and biosensing functionalities on a single device holds promise in continuous health monitoring and disease diagnosis for point-of-care applications. However, the required functions of fluid handling and biomolecular sensing usually arise from different actuation mechanisms. In this work, we demonstrate that a single acoustofluidic device, based on a flexible thin film platform, is able to generate hybrid wave modes, which can be used for fluidic actuation (Lamb waves) and biosensing (thickness shear waves). On this integrated platform, we show multiple and sequential functions of mixing, transport and disposal of liquid volumes using Lamb waves, whilst the thickness bulk shear waves allow us to sense the chemotherapeutic Imatinib, using an aptamer-based strategy, as would be required for therapy monitoring. Upon binding, the conformation of the aptamer results in a change in coupled mass, which has been detected. This platform architecture has the potential to generate a wide range of simple sample-to-answer biosensing acoustofluidic devices.

Shape memory polymer resonators as highly sensitive uncooled infrared detectors

Uncooled infrared detectors have enabled the rapid growth of thermal imaging applications. These detectors are predominantly bolometers, reading out a pixel’s temperature change due to infrared radiation as a resistance change. Another uncooled sensing method is to transduce the infrared radiation into the frequency shift of a mechanical resonator. We present here highly sensitive resonant infrared sensors, based on thermo-responsive shape memory polymers. By exploiting the phase-change polymer as transduction mechanism, our approach provides 2 orders of magnitude improvement of the temperature coefficient of frequency. Noise equivalent temperature difference of 22 mK in vacuum and 112 mK in air are obtained using f/2 optics. The noise equivalent temperature difference is further improved to 6 mK in vacuum by using high-Q silicon nitride membranes as substrates for the shape memory polymers. This high performance in air eliminates the need for vacuum packaging, paving a path towards flexible non-hermetically sealed infrared sensors.

Though resonant infrared (IR) detectors are an attractive thermal imaging technology owing to its high performance potential, realizing devices with high sensitivity remains a challenge. Here, the authors report high-sensitivity resonant IR sensors based on thermo-responsive shape memory polymers.