1
|
Coutancier D, Zhang ST, Bernardini S, Fournier O, Mathieu-Pennober T, Donsanti F, Tchernycheva M, Foldyna M, Schneider N. ALD of ZnO:Ti: Growth Mechanism and Application as an Efficient Transparent Conductive Oxide in Silicon Nanowire Solar Cells. ACS APPLIED MATERIALS & INTERFACES 2020; 12:21036-21044. [PMID: 32274923 DOI: 10.1021/acsami.9b22973] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
In the quest for the replacement of indium tin oxide (ITO), Ti-doped zinc oxide (TZO) films have been synthesized by atomic layer deposition (ALD) and applied as an n-type transparent conductive oxide (TCO). TZO thin films were obtained from titanium (IV) i-propoxide (TTIP), diethyl zinc, and water by introducing TiO2 growth cycle in a ZnO matrix. Process parameters such as the order of precursor introduction, the cycle ratio, and the film thickness were optimized. The as-deposited films were analyzed for their surface morphology, elemental stoichiometry, optoelectronic properties, and crystallinity using a variety of characterization techniques. The growth mechanism was investigated for the first time by in situ quartz crystal microbalance measurements. It evidenced different insertion modes of titanium depending on the precursor introduction, as well as the etching of Zn-Et surface groups by TTIP. Resistivity as low as 1.2 × 10-3 Ω cm and transmittance >80% in the visible range were obtained for 72-nm-thick films. Finally, the first application of ALD-TZO as TCO was reported. TZO films were successfully implemented as top electrodes in silicon nanowire solar cells. The unique properties of TZO combined with conformal coverage realized by the ALD technique make it possible for the cell to show almost flat external quantum efficiency (EQE) response, surpassing the bell-like EQE curve seen in devices with a sputtered ITO top electrode.
Collapse
Affiliation(s)
- Damien Coutancier
- Institut Photovoltaı̈que d'Ile-de-France (IPVF), 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
- CNRS, UMR 9006, Institut Photovoltaı̈que d'Ile-de-France (IPVF), 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
| | - Shan-Ting Zhang
- Institut Photovoltaı̈que d'Ile-de-France (IPVF), 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
- CNRS, UMR 9006, Institut Photovoltaı̈que d'Ile-de-France (IPVF), 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
| | - Simone Bernardini
- Institut Photovoltaı̈que d'Ile-de-France (IPVF), 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
- TOTAL, 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
| | - Olivier Fournier
- Institut Photovoltaı̈que d'Ile-de-France (IPVF), 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
- EDF R&D, IPVF, 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
| | - Tiphaine Mathieu-Pennober
- Centre de Nanosciences et de Nanotechnologies, UMR 9001 CNRS, University Paris-Saclay, 10 Boulevard Thomas Gobert, 91120 Palaiseau, France
| | - Frédérique Donsanti
- Institut Photovoltaı̈que d'Ile-de-France (IPVF), 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
- EDF R&D, IPVF, 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
| | - Maria Tchernycheva
- Centre de Nanosciences et de Nanotechnologies, UMR 9001 CNRS, University Paris-Saclay, 10 Boulevard Thomas Gobert, 91120 Palaiseau, France
| | - Martin Foldyna
- LPICM, CNRS, Ecole Polytechnique, IP Paris, 91128 Palaiseau, France
| | - Nathanaelle Schneider
- Institut Photovoltaı̈que d'Ile-de-France (IPVF), 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
- CNRS, UMR 9006, Institut Photovoltaı̈que d'Ile-de-France (IPVF), 18 Boulevard Thomas Gobert, 91120 Palaiseau, France
| |
Collapse
|
2
|
Ehsan MA, Khaledi H, Pandikumar A, Rameshkumar P, Huang NM, Arifin Z, Mazhar M. Nitrite ion sensing properties of ZnTiO3–TiO2 composite thin films deposited from a zinc–titanium molecular complex. NEW J CHEM 2015. [DOI: 10.1039/c5nj00850f] [Citation(s) in RCA: 28] [Impact Index Per Article: 3.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
ZnTiO3–TiO2 composite thin film electrode has been fabricated by AACVD method and tested for electrochemical nitrite ion detection.
Collapse
Affiliation(s)
- Muhammad Ali Ehsan
- Nanotechnology and Catalysis Center (NANOCAT), University of Malaya
- 50603-Kuala Lumpur
- Malaysia
| | - Hamid Khaledi
- Department of Chemistry
- Faculty of Science
- University of Malaya
- 50603-Kuala Lumpur
- Malaysia
| | - Alagarsamy Pandikumar
- Department of Physics
- Faculty of Science
- University of Malaya
- 50603-Kuala Lumpur
- Malaysia
| | - Perumal Rameshkumar
- Department of Physics
- Faculty of Science
- University of Malaya
- 50603-Kuala Lumpur
- Malaysia
| | - Nay Ming Huang
- Department of Physics
- Faculty of Science
- University of Malaya
- 50603-Kuala Lumpur
- Malaysia
| | - Zainudin Arifin
- Department of Chemistry
- Faculty of Science
- University of Malaya
- 50603-Kuala Lumpur
- Malaysia
| | - Muhammad Mazhar
- Department of Chemistry
- Faculty of Science
- University of Malaya
- 50603-Kuala Lumpur
- Malaysia
| |
Collapse
|