Direct electron-beam patterning of transferrable plasmonic gold nanoparticles using a HAuCl4/PVP composite resist

Advanced lithography materials: From fundamentals to applications

The semiconductor industry has long been driven by advances in a nanofabrication technology known as lithography, and the fabrication of nanostructures on chips relies on an important coating, the photoresist layer. Photoresists are typically spin-coated to form a film and have a photolysis solubility transition and etch resistance that allow for rapid fabrication of nanostructures. As a result, photoresists have attracted great interest in both fundamental research and industrial applications. Currently, the semiconductor industry has entered the era of extreme ultraviolet lithography (EUVL) and expects photoresists to be able to fabricate sub-10 nm structures. In order to realize sub-10 nm nanofabrication, the development of photoresists faces several challenges in terms of sensitivity, etch resistance, and molecular size. In this paper, three types of lithographic mechanisms are reviewed to provide strategies for designing photoresists that can enable high-resolution nanofabrication. The discussion of the current state of the art in optical lithography is presented in depth. Practical applications of photoresists and related recent advances are summarized. Finally, the current achievements and remaining issues of photoresists are discussed and future research directions are envisioned.

Tunable terahertz absorption of ion gel-graphene hybrids based on the Salisbury effect

The gate-tunable absorption properties of graphene make it suitable for terahertz (THz) absorbers. However, the realization of a graphene-based THz absorber faces challenges between the difficulty of patterning graphene for processing and the intrinsically low absorbance of graphene with the high electric field needed to change the conductivity of graphene. This report presents an electrically tunable graphene THz absorber where a single-layer graphene film and a gold reflective layer are separated by a polyimide (PI) dielectric layer to form an easily fabricated three-layer Salisbury screen structure. The carrier density of the graphene layer can be efficiently tuned by a small external electrical gating (-5V-5 V) with the assistance of an ion gel layer. The voltage modulation of the Fermi energy level (EF) of graphene was confirmed by Raman spectra, and the variation of the device absorbance was confirmed using a THz time-domain spectroscopy system (THz-TDS). The measurements show that the EF is adjusted in the range of 0-0.5 eV, and THz absorbance is adjusted in the range of 60%-99%. The absorber performs well under different curvatures, and the peak absorbance is all over 95%. We conducted further analysis of the absorber absorbance by varying the thickness of the PI dielectric layer, aiming to examine the correlation between the resonant frequency of the absorber and the dielectric layer thickness. Our research findings indicate that the proposed absorber holds significant potential for application in diverse fields such as communication, medicine, and sensing.

A comprehensive review of cancer therapies mediated by conjugated gold nanoparticles with nucleic acid

Nucleic acids provide a promising therapeutic platform by targeting various cell signaling pathways involved in cancer and genetic disorders. However, maintaining optimal stability during delivery limits their utility. Nucleic acid delivery vehicles are generally categorized into biological and synthetic carriers. Regardless of the efficiency of biological vectors, such as viral vectors, issues related to their immunogenicity and carcinogenesis are very important and vital for clinical applications. On the other hand, synthetic vectors such as lipids or polymers, have been widely used for nucleic acid delivery. Despite their transfection efficiency, low storage stability, targeting inefficiency, and tracking limitations are among the limitations of the clinical application of these vectors. In the past decades, gold nanoparticles with unique properties have been shown to be highly efficient mineral vectors for overcoming these obstacles. In this review, we focus on gold nanoparticle-nucleic acid combinations and highlight their use in the treatment of various types of cancers. Furthermore, by stating the biological applications of these structures, we will discuss their clinical applications.

Necked gold nanoparticles prepared by submerged alternating current arc discharge in water

The article presents the method of producing gold nanoparticles using a high voltage arc discharge of alternating current with a frequency of 50 Hz in distilled water. The equipment necessary to carry out the process is described, including the construction of the reactor and the power source of a very simple design necessary to generate a high-voltage arc discharge between the electrodes. Arc discharge processes were carried out two times for 2 and 5 minutes, respectively, in ambient conditions without thermostating the reactor, at medium temperature varying in the range of 25-70 °C. The obtained gold nanoparticles were examined by means of various analytical techniques such as UV-vis spectroscopy, zeta potential measurement, energy dispersive X-ray analysis (EDS), X-ray diffraction (XRD). The morphology, surface, and size of the obtained nanoparticles were carried out using transmission electron microscopy (HRTEM) and dynamic light scattering (DLS). The concentration of the obtained colloids were determined using the mass spectrometry ICP-MS technique. The results show that high-voltage AC arc discharge is a simple and effective way to obtain stable gold nanoparticles under environmentally friendly conditions at relatively low production costs, and can be considered as an alternative to arc discharge nanoparticles synthesis by means of direct current (DC) methods.

Low-resistivity Pd nanopatterns created by a direct electron beam irradiation process free of post-treatment steps

The ability to create metallic patterned nanostructures with excellent control of size, shape and spatial orientation is of utmost importance in the construction of next-generation electronic and optical devices as well as in other applications such as (bio)sensors, reactive surfaces for catalysis, etc. Moreover, development of simple, rapid and low-cost fabrication processes of metallic patterned nanostructures is a challenging issue for the incorporation of such devices in real market applications. In this contribution, a direct-write method that results in highly conducting palladium-based nanopatterned structures without the need of applying subsequent curing processes is presented. Spin-coated films of palladium acetate were irradiated with an electron beam to produce palladium nanodeposits (PdNDs) with controlled size, shape and height. The use of different electron doses was investigated and its influence on the PdNDs features determined, namely: (1) thickness of the deposits, (2) atomic percentage of palladium content, (3) oxidation state of palladium in the deposit, (4) morphology of the sample and grain size of the Pd nanocrystals and (5) resistivity. It has been probed that the use of high electron doses, 30000μC cm^-2results in the lowest resistivity reported to date for PdNDs, namely 145μΩ cm, which is only one order of magnitude higher than bulk palladium. This result paves the way for development of simplified lithography processes of nanostructured deposits avoiding subsequent post-treatment steps.

Morphology and Optical Properties of Gas-Phase-Synthesized Plasmonic Nanoparticles: Cu and Cu/MgO

In this paper, an investigation of the properties of Cu and Cu/MgO nanoparticles (NPs) is presented. The NPs were obtained with gas-phase synthesis, and the MgO shells or matrices were formed via the co-deposition method on inert substrates. SEM and AFM were used to investigate the NP morphology on Si/SiO_x, quartz, and HOPG. The Cu NPs revealed flattening of their shape, and when they were deposited on HOPG, diffusion and formation of small chains were observed. The embedding of Cu NPs in MgO was confirmed by TEM and EDX maps. XPS showed that Cu was in its metallic state, regardless of the presence of the surrounding MgO. UV–Vis revealed the presence of an intense localized surface plasmon resonance (LSPR) for Cu/MgO and for “bare” NPs. These results confirmed the role of MgO as a protective transparent medium for Cu, and the wavelength position of the LSPR in the Cu/MgO system was consistent with calculations. The wavelength position of the LSPR observed for “bare” and post-oxidized Cu NPs was probably affected by the formation of copper oxide shells after exposure to air. This study paves the way for the use of Cu/MgO NPs as plasmonic nanomaterials in applications such as photovoltaics and sensor technology.

Second Harmonic Optical Circular Dichroism of Plasmonic Chiral Helicoid-III Nanoparticles

While plasmonic particles can provide optical resonances in a wide spectral range from the lower visible up to the near-infrared, often, symmetry effects are utilized to obtain particular optical responses. By breaking certain spatial symmetries, chiral structures arise and provide robust chiroptical responses to these plasmonic resonances. Here, we observe strong chiroptical responses in the linear and nonlinear optical regime for chiral L-handed helicoid-III nanoparticles and quantify them by means of an asymmetric factor, the so-called g-factor. We calculate the linear optical g-factors for two distinct chiroptical resonances to -0.12 and -0.43 and the nonlinear optical g-factors to -1.45 and -1.63. The results demonstrate that the chirality of the helicoid-III nanoparticles is strongly enhanced in the nonlinear regime.