Development of a high energy resolution electron energy-loss spectroscopy microscope

Automatic and Quantitative Measurement of Spectrometer Aberrations

The performance of electron energy loss spectrometers can often be limited by their electron optical aberrations. Due to recent developments in high energy resolution and momentum-resolved electron energy loss spectroscopy (EELS), there is renewed interest in optimizing the performance of such spectrometers. For example, the "ω - q" mode of momentum-resolved EELS, which uses a small convergence angle and requires aligning diffraction spots with the slot aperture, presents a challenge in the realignments of the spectrometer required by the adjustment of the projection lenses. Automated and robust alignment can greatly benefit such a process. The first step toward this goal is automatic and quantitative measurement of spectrometer aberrations. We demonstrate the measurement of geometric aberrations and distortions in EELS within a monochromated scanning transmission electron microscope (STEM). To better understand the results, we present a wave mechanical simulation of the experiment. Using the measured aberration and distortion coefficients as inputs to the simulation, we find a good match between the simulation and experiment, verifying formulae used in the simulation. From verified simulations with known aberration coefficients, we can assess the accuracy of measurements. Understanding the errors and inaccuracies in the procedure can guide further progress in aberration measurement and correction for new spectrometer developments.

Spatially Resolved Band Gap and Dielectric Function in Two-Dimensional Materials from Electron Energy Loss Spectroscopy

The electronic properties of two-dimensional (2D) materials depend sensitively on the underlying atomic arrangement down to the monolayer level. Here we present a novel strategy for the determination of the band gap and complex dielectric function in 2D materials achieving a spatial resolution down to a few nanometers. This approach is based on machine learning techniques developed in particle physics and makes possible the automated processing and interpretation of spectral images from electron energy loss spectroscopy (EELS). Individual spectra are classified as a function of the thickness with K-means clustering, and then used to train a deep-learning model of the zero-loss peak background. As a proof of concept we assess the band gap and dielectric function of InSe flakes and polytypic WS₂ nanoflowers and correlate these electrical properties with the local thickness. Our flexible approach is generalizable to other nanostructured materials and to higher-dimensional spectroscopies and is made available as a new release of the open-source EELSfitter framework.

Charting the low-loss region in electron energy loss spectroscopy with machine learning

Exploiting the information provided by electron energy-loss spectroscopy (EELS) requires reliable access to the low-loss region where the zero-loss peak (ZLP) often overwhelms the contributions associated to inelastic scatterings off the specimen. Here we deploy machine learning techniques developed in particle physics to realise a model-independent, multidimensional determination of the ZLP with a faithful uncertainty estimate. This novel method is then applied to subtract the ZLP for EEL spectra acquired in flower-like WS₂ nanostructures characterised by a 2H/3R mixed polytypism. From the resulting subtracted spectra we determine the nature and value of the bandgap of polytypic WS₂, finding E_BG=1.6_-0.2^+0.3eV with a clear preference for an indirect bandgap. Further, we demonstrate how this method enables us to robustly identify excitonic transitions down to very small energy losses. Our approach has been implemented and made available in an open source Python package dubbed EELSfitter.

Properties of Dipole-Mode Vibrational Energy Losses Recorded From a TEM Specimen

The authors discuss the dipole vibrational modes that predominate in the energy-loss spectra of ionic materials below 1 eV, concentrating on thin-film specimens of typical transmission electron microscopy (TEM) thickness. The thickness dependence of the intensity is shown to be a useful guide to the bulk or surface character of vibrational peaks. The lateral and depth resolution of the energy-loss signal is investigated with the aid of finite-element calculations.

Emerging Electron Microscopy Techniques for Probing Functional Interfaces in Energy Materials

Interfaces play a fundamental role in many areas of chemistry. However, their localized nature requires characterization techniques with high spatial resolution in order to fully understand their structure and properties. State-of-the-art atomic resolution or in situ scanning transmission electron microscopy and electron energy-loss spectroscopy are indispensable tools for characterizing the local structure and chemistry of materials with single-atom resolution, but they are not able to measure many properties that dictate function, such as vibrational modes or charge transfer, and are limited to room-temperature samples containing no liquids. Here, we outline emerging electron microscopy techniques that are allowing these limitations to be overcome and highlight several recent studies that were enabled by these techniques. We then provide a vision for how these techniques can be paired with each other and with in situ methods to deliver new insights into the static and dynamic behavior of functional interfaces.

Basics and applications of ELNES calculations

The electron energy loss near edge structures (ELNES) appearing in an electron energy loss spectrum obtained through transmission electron microscopy (TEM) have the potential to unravel atomic and electronic structures with sub-nano meter resolution. For this reason, TEM-ELNES has become one of the most powerful analytical methods in materials research. On the other hand, theoretical calculations are indispensable in interpreting the ELNES spectrum. Here, the basics and applications of one-particle, two-particle and multi-particle ELNES calculations are reviewed. A key point for the ELNES calculation is the proper introduction of the core-hole effect. Some applications of one-particle ELNES calculations to huge systems of more than 1000 atoms, and complex systems, such as liquids, are reported. In the two-particle calculations, the importance of the correct treatment of the excitonic interaction is demonstrated in calculating the low-energy ELNES, for example at the Li-K edge. In addition, an unusually strong excitonic interactions in the O-K edge of perovskite oxides is identified. The multi-particle calculations are necessary to reproduce the multiplet structures appearing at the transition metal L2,3-edges and rare-earth M4,5-edges. Applications to dilute magnetic semiconductors and Li-ion battery materials are presented. Furthermore, beyond the 'conventional' ELNES calculations, theoretical calculations of electron/X-ray magnetic circular dichroism (MCD) and the vibrational information in ELNES, are reported.

Correlative electron and X-ray microscopy: probing chemistry and bonding with high spatial resolution

Two powerful and complementary techniques for chemical characterisation of nanoscale systems are electron energy-loss spectroscopy in the scanning transmission electron microscope, and X-ray absorption spectroscopy in the scanning transmission X-ray microscope. A correlative approach to spectro-microscopy may not only bridge the gaps in spatial and spectral resolution which exist between the two instruments, but also offer unique opportunities for nanoscale characterisation. This review will discuss the similarities of the two spectroscopy techniques and the state of the art for each microscope. Case studies have been selected to illustrate the benefits and limitations of correlative electron and X-ray microscopy techniques. In situ techniques and radiation damage are also discussed.

Ultrafast oscilloscope based on laser-triggered field emitters

Laser-triggered electron emission from sharp metal tips has been demonstrated in recent years as a high brightness, ultrafast electron source. Its possible applications range from ultrafast electron microscopy to laser-based particle accelerators to electron interferometry. The ultrafast nature of the emission process allows for the sampling of an instantaneous radio frequency (RF) voltage that has been applied to a field emitter. For proof-of-concept, we use an RF signal derived from our laser's repetition rate, mapping a 9.28 GHz signal in 22.4 fs steps with 28 mv accuracy.

Prospects for vibrational-mode EELS with high spatial resolution

Taking advantage of previous measurements by Geiger and co-workers, we discuss the possibilities and problems of measuring vibrational modes of energy loss in a transmission electron microscope fitted with a monochromator and a high-resolution energy-loss spectrometer. The tail of the zero-loss peak is seen to be a major limitation, rather than its full-width at half-maximum. Because of the low oscillator strengths and small cross-sections involved, radiation damage will limit the spatial resolution if this technique is applied to organic specimens. Delocalization of the inelastic scattering may also be a limitation, if a dipole description of the scattering process is valid.

The development of a 200 kV monochromated field emission electron source

We report the development of a monochromator for an intermediate-voltage aberration-corrected electron microscope suitable for operation in both STEM and TEM imaging modes. The monochromator consists of two Wien filters with a variable energy selecting slit located between them and is located prior to the accelerator. The second filter cancels the energy dispersion produced by the first filter and after energy selection forms a round monochromated, achromatic probe at the specimen plane. The ultimate achievable energy resolution has been measured as 36 meV at 200 kV and 26 meV at 80 kV. High-resolution Annular Dark Field STEM images recorded using a monochromated probe resolve Si-Si spacings of 135.8 pm using energy spreads of 218 meV at 200 kV and 217 meV at 80 kV respectively. In TEM mode an improvement in non-linear spatial resolution to 64 pm due to the reduction in the effects of partial temporal coherence has been demonstrated using broad beam illumination with an energy spread of 134 meV at 200 kV.

Quantifying the low-energy limit and spectral resolution in valence electron energy loss spectroscopy

While the development of monochromators for scanning transmission electron microscopes (STEM) has improved our ability to resolve spectral features in the 0-5 eV energy range of the electron energy loss spectrum, the overall benefits relative to unfiltered microscopes have been difficult to quantify. Simple curve fitting and reciprocal space models that extrapolate the expected behavior of the zero-loss peak are not enough to fully exploit the optimal spectral limit and can hinder the ease of interpreting the resulting spectra due to processing-induced artifacts. To address this issue, here we present a quantitative comparison of two processing methods for performing ZLP removal and for defining the low-energy spectral limit applied to three microscopes with different intrinsic emission and energy resolutions. Applying the processing techniques to spectroscopic data obtained from each instrument leads in each case to a marked improvement in the spectroscopic limit, regardless of the technique implemented or the microscope setup. The example application chosen to benchmark these processing techniques is the energy limit obtained from a silicon wedge sample as a function of thickness. Based on these results, we conclude on the possibility to resolve statistically significant spectral features to within a hundred meV of the native instrumental energy spread, opening up the future prospect of tracking phonon peaks as new and improved hardware becomes available.

Prospects for electron microscopy characterisation of solar cells: opportunities and challenges

Several electron microscopy techniques available for characterising thin-film solar cells are described, including recent advances in instrumentation, such as aberration-correction, monochromators, time-resolved cathodoluminescence and focused ion-beam microscopy. Two generic problems in thin-film solar cell characterisation, namely electrical activity of grain boundaries and 3D morphology of excitionic solar cells, are also discussed from the standpoint of electron microscopy. The opportunities as well as challenges facing application of these techniques to thin-film and excitonic solar cells are highlighted.

High-energy-resolution monochromator for aberration-corrected scanning transmission electron microscopy/electron energy-loss spectroscopy

An all-magnetic monochromator/spectrometer system for sub-30 meV energy-resolution electron energy-loss spectroscopy in the scanning transmission electron microscope is described. It will link the energy being selected by the monochromator to the energy being analysed by the spectrometer, without resorting to decelerating the electron beam. This will allow it to attain spectral energy stability comparable to systems using monochromators and spectrometers that are raised to near the high voltage of the instrument. It will also be able to correct the chromatic aberration of the probe-forming column. It should be able to provide variable energy resolution down to approximately 10 meV and spatial resolution less than 1 A.

Limits to the spatial, energy and momentum resolution of electron energy-loss spectroscopy

We discuss various factors that determine the performance of electron energy-loss spectroscopy (EELS) and energy-filtered (EFTEM) imaging in a transmission electron microscope. Some of these factors are instrumental and have undergone substantial improvement in recent years, including the development of electron monochromators and aberration correctors. Others, such as radiation damage, delocalization of inelastic scattering and beam broadening in the specimen, derive from basic physics and are likely to remain as limitations. To aid the experimentalist, analytical expressions are given for beam broadening, delocalization length, energy broadening due to core-hole and excited-electron lifetimes, and for the momentum resolution in angle-resolved EELS.

Preliminary results from the first monochromated and aberration corrected 200-kV field-emission scanning transmission electron microscope

Experimental results from the first monochromated and aberration-corrected scanning transmission electron microscope operated at 200 kV are described. The formation of an electron probe with a diameter of less than 0.2 nm at an energy width significantly under 0.3 eV and its planned application to the chemical analysis of nanometer-scale structures in materials science are described. Both energy and spatial resolution will benefit from this: The monochromator improves the energy resolution for studies of energy loss near edge structures. The Cs corrector allows formation of either a smaller probe for a given beam current or yields, at fixed probe size, an enhanced beam current density using a larger condenser aperture. We also point out another advantage of the combination of both components: Increasing the convergence angle by using larger condenser apertures in an aberration-corrected instrument will enlarge the undesirable chromatic focus spread. This in turn influences spatial resolution. The effect of polychromatic probe tails is proportional to the product of convergence angle, chromatic aberration constant, and energy spread. It can thus be compensated for in our new instrument by decreasing the energy width by the same factor as the beam convergence is increased to form a more intense probe. An alternative in future developments might be hardware correction of the chromatic aberration, which could eliminate the chromatic probe spread completely.

First experimental test of a new monochromated and aberration-corrected 200kV field-emission scanning transmission electron microscope

The first 200 kV scanning transmission electron microscope (STEM) with an imaging energy filter, a monochromator and a corrector for the spherical aberration (Cs-corrector) of the illumination system has been built and tested. The STEM/TEM concept with Koehler illumination allows to switch easily between STEM mode for analytical and TEM mode for high-resolution or in situ studies. The Cs-corrector allows the use of large illumination angles for retaining a sufficiently high beam current despite the intensity loss in the monochromator. With the monochromator on and a 3 microm slit in the dispersion plane that gives 0.26 eV full-width at half-maximum (FWHM) energy resolution we have obtained so far an electron beam smaller than 0.20 nm in diameter (FWHM as measured by scanning the spot quickly over the CCD) which contains 7 pA current and, according to simulations, should be around 0.12 nm in true size. A high-angle annular dark field (ADF) image with isotropic resolution better than 0.28 nm has been recorded with the monochromator in the above configuration and the Cs-corrector on. The beam current is still somewhat low for electron energy-loss spectroscopy (EELS) but is expected to increase substantially by optimising the condenser set-up and using a somewhat larger condenser aperture.

Soft-X-ray emission spectroscopy based on TEM—Toward a total electronic structure analysis

The construction and basic performances of wavelength-dispersive soft-X-ray emission spectroscopy (SXES) devices attached to a transmission electron microscope were presented. An energy resolution of 0.23 eV was obtained at the aluminum L-emission energy. A Cu L-emission spectrum obtained showed four L-emission lines of Lalpha, Lbeta, Ll and Leta. Angle-resolved measurements of boron K-emission spectra of hexagonal-BN (h-BN) were presented. It clearly showed anisotropic emission intensity of the transition from pi-bonding state to 1s core hole. B K-emission spectra of h- and cubic-BNs showed a difference in energy positions of sigma-bonding peaks. An electron energy-loss spectrum of B K-edge and a B K-emission spectrum of cubic-BN were compared with a result of a LDA band calculation. It showed that high symmetry points in the band diagram appeared as peak and/or shoulder structures in those spectra. Interband transitions appeared in the imaginary part of the dielectric function of cubic-BN experimentally obtained were assigned in the band diagram. These results demonstrated a method to analyze the entire electronic structure of materials in the nanoscale using high energy-resolution spectroscopy methods based on transmission electron microscopy.

Enhancement of resolution in core-loss and low-loss spectroscopy in a monochromated microscope

The significant enhancement of the energy resolution in the new generation of commercially available monochromated transmission electron microscopes presents new challenges in term of selecting the correct experimental conditions and understanding the various effects that can potentially influence the quality of the EELS data. In this respect we investigated the effect of point spread function of the detector and spectrum-diffraction mixing on the energy resolution and the intensity of the zero loss peak tails. Alternative approaches to improve the energy resolution by mathematical methods have been tested. By using a simple and commonly available test case (Si L(2,3) edges) we assessed the efficiency of the deconvolution algorithms to improve the resolution. The results show that the deconvolution is not always successful in improving the resolution of the core loss EELS data and the results may not always be reliable. Contrary to this, the application of the Richardson-Lucy deconvolution algorithm on some bandgap measurements data appears to be very effective. The procedure proved successful in removing the contribution of the zero-loss peak tails and allows an easier access to spectroscopic information starting at energy losses as low as of 0.5 eV with monochromated spectra and 1 eV with the non-monochromated spectra.

Electronic structure analyses of BN network materials using high energy-resolution spectroscopy methods based on transmission electron microscopy

Electronic structures of boron-nitride (BN) nanotubes and a BN cone-structure material were studied by using a high energy-resolution electron energy-loss spectroscopy (EELS) microscope. A trial of the whole electronic structure study of hexagonal BN (h-BN), which consists of flat BN honeycomb layers, was conducted by a combination of EELS and X-ray emission spectroscopy (XES) based on transmission electron microscopy (TEM) (TEM-EELS/XES). The pi and pi+sigma plasmon energies of BN nanotubes (BNT) were smaller than those of h-BN. The pi+sigma energy was explained by the surface plasmon excitation. The spectrum of a two-wall BNT of 2.7 nm in diameter showed a new spectral onset at 4 eV. The valence electron excitation spectra obtained from the tip region of the BN cone with an apex angle of 20 degrees showed similar intensity distribution with those of BNTs. The B K-shell electron excitation spectra obtained from the bottom edge region of the BN cone showed additional peak intensity when compared with those of h-BN and BNT. The B K-shell electron excitation spectra and B K-emission spectra of h-BN were compared with a result of a LDA band calculation. It showed that high symmetry points in the band diagram appear as peak and/or shoulder structures in the EELS and XES spectra. Interband transitions appeared in the imaginary part of the dielectric function of h-BN experimentally obtained were assigned in the band diagram. The analysis also presented that the LDA calculation estimated the bandgap energy smaller than the real material by an amount of 2 eV. Those results of TEM-EELS/XES analysis presented that high energy-resolution spectroscopy methods combined with TEM is a promising method to analyze whole electronic structures of nanometer scale materials.

Valence electron energy-loss spectroscopy in monochromated scanning transmission electron microscopy

With the development of monochromators for (scanning) transmission electron microscopes, valence electron energy-loss spectroscopy (VEELS) is developing into a unique technique to study the band structure and optical properties of nanoscale materials. This article discusses practical aspects of spatially resolved VEELS performed in scanning transmission mode and the alignments necessary to achieve the current optimum performance of approximately 0.15 eV energy resolution with an electron probe size of approximately 1 nm. In particular, a collection of basic concepts concerning the acquisition process, the optimization of the energy resolution, the spatial resolution and the data processing are provided. A brief study of planar defects in a Y(1)Ba(2)Cu(3)O(7-)(delta) high-temperature superconductor illustrates these concepts and shows what kind of information can be accessed by VEELS.

Third-order aberration theory of Wien filters for monochromators and aberration correctors

Third-order aberrations at the first and the second focus planes of double focus Wien filters are derived in terms of the following electric and magnetic field components--dipole: E1, B1; quadrupole: E2, B2; hexapole: E3, B3 and octupole: E4, B4. The aberration coefficients are expressed under the second-order geometrical aberration free conditions of E2 = -(m + 2)E1/8R, B2 = -mB1/8R and E3R2/E1 - B3R2/B1 = m/16, where m is an arbitrary value common to all equations. Aberration figures under the conditions of zero x- and y-axes values show very small probe size and similar patterns to those obtained using a previous numerical simulation [G. Martinez & K. Tsuno (2004) Ultramicroscopy, 100, 105-114]. Round beam conditions are obtained when B3 = 5m2B1/144R2 and (E4/E1 - B4/B1)R3 = -29m2/1152. In this special case, aberration figures contain only chromatic and aperture aberrations at the second focus. The chromatic aberrations become zero when m = 2 and aperture aberrations become zero when m = 1.101 and 10.899 at the second focus. Negative chromatic aberrations are obtained when m < 2 and negative aperture aberrations for m < 1.101. The Wien filter functions not only as a monochromator but also as a corrector of both chromatic and aperture aberrations. There are two advantages in using a Wien filter aberration corrector. First, there is the simplicity that derives from it being a single component aberration correction system. Secondly, the aberration in the off-axis region varies very little from the on-axis figures. These characteristics make the corrector very easy to operate.

Ultralow-energy excitations and prospects for spatially resolved spectroscopy

The key contribution of electron microscopy methods to condensed matter spectroscopy is undoubtedly spatial resolution. So far this has mainly been manifest through electron energy loss spectroscopy in the 1-eV to 10-keV energy range and has not seriously challenged the dominance of optical, X-ray, and neutron spectroscopy methods over most of the vast field at lower energies. At frequencies up to a few megahertz, corresponding to energies of a few nanoelectron volts and below, direct excitation by pulsed electron beams or electric fields has proved effective. Prospects are discussed for extending spatially resolved spectroscopy to the intermediate energy region, mainly by combining the advantages of electrons with those of photons.

Materials science applications of HREELS in near edge structure analysis and low-energy loss spectroscopy

New experiments made possible with a commercial transmission electron microscope (TEM) equipped with a high-resolution electron energy loss spectrometer (EELS) are presented. With this commercial system, a 100 meV energy resolution using a sub 2 nm probe or 500 meV at a 0.20 nm probe are possible, in combination with other modern techniques available for TEMs. In this paper a number of explorative examples of the first results are shown. The benefit of the increased resolution for detecting more details in near edge structures are shown for the Ti K edge in TiO(2) (brookite) and for the N K edge in cubic and hexagonal GaN. The bandgap of GaN is studied in both crystal structures, as well as the dependency of the low-loss spectrum on the momentum transfer direction in diffraction mode.

Electron energy-loss spectroscopic profiling of thin film structures: 0.39 nm line resolution and 0.04 eV precision measurement of near-edge structure shifts at interfaces

The method of energy-loss spectroscopic profiling of interfaces, planar defects and thin film structures in a transmission electron microscope with an imaging filter is introduced. Ways to calculate true chemical profiles with near-atomic line resolution are described. An application to the perovskite system (La,Ca)MnO(3)/SrTiO(3) demonstrates that the technical merit of this method is the simultaneous achievement of high resolution (down to 0.39nm line resolution), high chemical sensitivity (around 1at% standard deviation) and very high precision in the measurement of shifts of edge onsets and energy-loss near-edge structure details (down to 0.04eV). The combination of these characteristics makes the method a powerful tool for the quantification of diffusion and segregation of elements on the atomic scale in a variety of materials systems.

New techniques in electron energy-loss spectroscopy and energy-filtered imaging

This article is a survey of hardware and software advances that promise to increase the power and sensitivity of electron energy-loss spectroscopy (EELS) and energy-filtered imaging (EFTEM) in a transmission electron microscope. Recent developments include electron-gun monochromators, lens-aberration correctors, and software for spectral sharpening, spectral processing and interpretation of fine structure. Future improvements could include the deployment of new electron sources. The expected enhancements in energy and spatial resolution are compared with fundamental limitations that arise from the natural widths of spectral peaks, the delocalization of inelastic scattering and the problem of electron-irradiation damage.

Synchrotron soft X-ray and field-emission electron sources: a comparison

The soft X-ray spectral region and the useful range of electron energy-loss spectroscopy are very similar, both including the energy range 100-1000 eV. Moreover, well-developed monochromators and parallel detection devices with comparable resolution exist for both. Despite the differing interactions of electrons and photons, many complementary experiments in imaging, spectroscopy and diffraction have been performed using both techniques. We therefore compare the brightness, degeneracy, monochromaticity, beam size, source size, spatial and temporal coherence of field-emission electron beams and soft X-ray synchrotron radiation from typical undulators. Recent brightness values for nanotip field emitters and undulators, both measured and calculated, are provided with examples from the Advanced Light Source synchrotron-radiation facility at Berkeley USA. The quantum mechanical upper limit on source brightness, as well as relationships among beam brightness, coherence parameters, and degeneracy, are discussed. Factors which limit these parameters and methods of measurement are reviewed, and the implications for diffraction, imaging and spectroscopic experiments as well as radiation damage are briefly commented on.

A new 200 kV Omega-filter electron microscope

A new 200 kV Omega-filter electron microscope was developed under a project supported by a Grant-in-Aid for Specially Promoted Research of the Ministry of Education, Science, Sports and Culture of Japan. The performance of the microscope is described.