Low-cost fabrication technologies for nanostructures: state-of-the-art and potential

Wetting Characteristics of Laser-Ablated Hierarchical Textures Replicated by Micro Injection Molding

Texturing can be used to functionalize the surface of plastic parts and, in particular, to modify the interaction with fluids. Wetting functionalization can be used for microfluidics, medical devices, scaffolds, and more. In this research, hierarchical textures were generated on steel mold inserts using femtosecond laser ablation to transfer on plastic parts surface via injection molding. Different textures were designed to study the effects of various hierarchical geometries on the wetting behavior. The textures are designed to create wetting functionalization while avoiding high aspect ratio features, which are complex to replicate and difficult to manufacture at scale. Nano-scale ripples were generated over the micro-scale texture by creating laser-induced periodic surface structures. The textured molds were then replicated by micro-injection molding using polypropylene and poly(methyl methacrylate). The static wetting behavior was investigated on steel inserts and molded parts and compared to the theoretical values obtained from the Cassie-Baxter and Wenzel models. The experimental results showed correlations between texture design, injection molding replication, and wetting properties. The wetting behavior on the polypropylene parts followed the Cassie-Baxter model, while for PMMA, a composite wetting state of Cassie-Baxter and Wenzel was observed.

Texturing Technologies for Plastics Injection Molding: A Review

Texturing is an engineering technology that can be used to enable surface functionalization in the plastics injection molding industry. A texture is defined as the geometrical modification of the topography by addition of surface features that are characterized by a smaller scale than the overall surface dimensions. Texturing is added to products to create novel functionalities of plastic products and tools, which can be exploited to modify interactions with other materials in contact with the surface. The geometry, dimensions, and positioning on the surface define the function of a texture and its properties. This work reviews and discuss the wide range of texturing technologies available in the industry. The advantages and limitations of each technology are presented to support the development of new surface engineering applications in the plastics manufacturing industry.

Maskless nanostructure photolithography by ultrahigh-order modes of a symmetrical metal-cladding waveguide

To fabricate fine patterns beyond the diffraction limit, a nanostructure photolithography technique is required. In this Letter, we present a method that allows sub-100-nm lines to be patterned photolithographically using ultrahigh-order modes from a symmetrical metal-cladding waveguide (SMCW) in the near field, which are excited by continuous-wave visible light without focusing. The etching depth of the nanopattern reaches more than 200 nm. The localized light intensity distribution can be used to map the photoresist exposure pattern, which agrees well with our theoretical model. This technique opens up the possibility of localizing light fields below the diffraction limit using maskless and lower power visible light.

Effect of the Substrate Crystallinity on Morphological and Magnetic Properties of Fe70Pd30 Nanoparticles Obtained by the Solid-State Dewetting

Advances in nanofabrication techniques are undoubtedly needed to obtain nanostructured magnetic materials with physical and chemical properties matching the pressing and relentless technological demands of sensors. Solid-state dewetting is known to be a low-cost and "top-down" nanofabrication technique able to induce a controlled morphological transformation of a continuous thin film into an ordered nanoparticle array. Here, magnetic Fe70Pd30 thin film with 30 nm thickness is deposited by the co-sputtering technique on a monocrystalline (MgO) or amorphous (Si3N4) substrate and, subsequently, annealed to promote the dewetting process. The different substrate properties are able to tune the activation thermal energy of the dewetting process, which can be tuned by depositing on substrates with different microstructures. In this way, it is possible to tailor the final morphology of FePd nanoparticles as observed by advanced microscopy techniques (SEM and AFM). The average size and height of the nanoparticles are in the ranges 150-300 nm and 150-200 nm, respectively. Moreover, the induced spatial confinement of magnetic materials in almost-spherical nanoparticles strongly affects the magnetic properties as observed by in-plane and out-of-plane hysteresis loops. Magnetization reversal in dewetted FePd nanoparticles is mainly characterized by a rotational mechanism leading to a slower approach to saturation and smaller value of the magnetic susceptibility than the as-deposited thin film.

Membrane-Suspended Nanopores in Microchip Arrays for Stochastic Transport Recording and Sensing

The transport of nutrients, xenobiotics, and signaling molecules across biological membranes is essential for life. As gatekeepers of cells, membrane proteins and nanopores are key targets in pharmaceutical research and industry. Multiple techniques help in elucidating, utilizing, or mimicking the function of biological membrane-embedded nanodevices. In particular, the use of DNA origami to construct simple nanopores based on the predictable folding of nucleotides provides a promising direction for innovative sensing and sequencing approaches. Knowledge of translocation characteristics is crucial to link structural design with function. Here, we summarize recent developments and compare features of membrane-embedded nanopores with solid-state analogues. We also describe how their translocation properties are characterized by microchip systems. The recently developed silicon chips, comprising solid-state nanopores of 80 nm connecting femtoliter cavities in combination with vesicle spreading and formation of nanopore-suspended membranes, will pave the way to characterize translocation properties of nanopores and membrane proteins in high-throughput and at single-transporter resolution.

Distribution of RKKY coupling value in 1D crystal with disorder. Specific heat in XY model

The presence of disorder in one-dimensional crystals leads to the localization of all charge carriers and the calculation of the indirect exchange interaction (Ruderman-Kittel-Kasuya-Yosida (RKKY) interaction) cannot be performed perturbatively on disorder. In two and three-dimensional systems it makes sense to calculate the magnitude of RKKY interaction perturbatively treating nearly free carriers scattering on the random potential, and this approach results in a rather high magnitude of the exchange interaction due to interference effects similar to weak localization. We show that in one-dimensional systems the indirect exchange interaction should be described as a random value with heavy-tail distribution function, which is calculated in this work, on scales of carriers localization length. We also demonstrate that heavy tails and the absence of a characteristic value of RKKY interaction magnitude leads to a significant change in observables for these systems. We calculate a specific heat for the one-dimensional XY model taking into account the effect of disorder and assuming that typical distance between impurities exceeds the localization length. In contrast to an ideal system, where specific heat temperature dependence has a peak at a certain temperature proportional to exchange constant describing characteristic energy scale, disorder eliminates the peak as soon as there is no characteristic excitation energy in this case anymore.

Imprint and transfer fabrication of freestanding plasmonic membranes

This paper reports an imprint and transfer approach for the rapid and inexpensive fabrication of the ultra-thin freestanding plasmonic membrane (FPM) that supports surface plasmon resonances. The imprint and transfer fabrication method involves the soft imprint lithography on an ultrathin polymer film, transfer of the perforated polymer film to a supporting frame, subsequent deposition of gold, and final removal of the polymer film. Without using any sophisticated lithography and etching processes, the imprint and transfer method can produce freestanding gold membranes with 2D arrays of submicrometer-sized holes that support plasmonic modes in the mid-wavelength infrared (mid-IR) range. Two FPM devices with an array constant of 4.0 and 2.5 μm have been simulated, fabricated, and measured for their transmittance characteristics. The fabricated FPMs exhibit surface plasmon polariton Bloch mode and extraordinary optical transmission (EOT) with the enhanced local field around the membrane. The effects of membrane thickness and angle dispersion on the FPM were investigated to show the tuning of EOT modes in IR. Furthermore, we demonstrated the refractometric sensing and enhanced IR absorption of the FPM device for its potential in chemical and biomolecule sensing applications.

Recent Progress in Simple and Cost-Effective Top-Down Lithography for ≈10 nm Scale Nanopatterns: From Edge Lithography to Secondary Sputtering Lithography

The development of a simple and cost-effective method for fabricating ≈10 nm scale nanopatterns over large areas is an important issue, owing to the performance enhancement such patterning brings to various applications including sensors, semiconductors, and flexible transparent electrodes. Although nanoimprinting, extreme ultraviolet, electron beams, and scanning probe litho-graphy are candidates for developing such nanopatterns, they are limited to complicated procedures with low throughput and high startup cost, which are difficult to use in various academic and industry fields. Recently, several easy and cost-effective lithographic approaches have been reported to produce ≈10 nm scale patterns without defects over large areas. This includes a method of reducing the size using the narrow edge of a pattern, which has been attracting attention for the past several decades. More recently, secondary sputtering lithography using an ion-bombardment technique was reported as a new method to create high-resolution and high-aspect-ratio structures. Recent progress in simple and cost-effective top-down lithography for ≈10 nm scale nanopatterns via edge and secondary sputtering techniques is reviewed. The principles, technical advances, and applications are demonstrated. Finally, the future direction of edge and secondary sputtering lithography research toward issues to be resolved to broaden applications is discussed.

Functionalization of Plastic Parts by Replication of Variable Pitch Laser-Induced Periodic Surface Structures

Surface functionalization of plastic parts has been studied and developed for several applications. However, demand for the development of reliable and profitable manufacturing strategies is still high. Here we develop and characterize a new process chain for the versatile and cost-effective production of sub-micron textured plastic parts using laser ablation. The study includes the generation of different sub-micron structures on the surface of a mold using femtosecond laser ablation and vario-thermal micro-injection molding. The manufactured parts and their surfaces are characterized in consideration of polymer replication and wetting behavior. The results of the static contact angle measurements show that replicated Laser-Induced Periodic Surface Structures (LIPSSs) always increase the hydrophobicity of plastic parts. A maximum contact angle increase of 20% was found by optimizing the manufacturing thermal boundary conditions. The wetting behavior is linked to the transition from a Wenzel to Cassie–Baxter state, and is crucial in optimizing the injection molding cycle time.

Fully Integrated, Simple, and Low-Cost Electrochemical Sensor Array for in Situ Water Quality Monitoring

Rapid, accurate and inexpensive monitoring of water quality parameters is indispensable for continued water safety, especially in resource-limited areas. Most conventional sensing systems either can only monitor one parameter at a time or lack user-friendly on-site monitoring capabilities. A fully integrated electrochemical sensor array is an excellent solution to this barrier. Electrochemical sensing methods involve transduction of water quality parameters where chemical interactions are converted to electrical signals. The challenge remains in designing low-cost, easy-to-use, and highly sensitive sensor array that can continuously monitor major water quality parameters such as pH, free chlorine, temperature along with emerging pharmaceutical contaminants, and heavy metal without the use of expensive laboratory-based techniques and trained personnel. Here, we overcame this challenge through realizing a fully integrated electrochemical sensing system that offers simultaneous monitoring of pH (57.5 mV/pH), free chlorine (186 nA/ppm), and temperature (16.9 mV/°C) and on-demand monitoring of acetaminophen and 17β-estradiol (<10 nM) and heavy metal (<10 ppb), bridging the technological gap between signal transduction, processing, wireless transmission, and smartphone interfacing. This was achieved by merging nanomaterials and carbon nanotube-based sensors fabricated on microscopic glass slides controlled by a custom-designed readout circuit, a potentiostat, and an Android app. The sensing system can be easily modified and programmed to integrate other sensors, a capability that can be exploited to monitor a range of water quality parameters. We demonstrate the integrated system for monitoring tap, swimming pool, and lake water. This system opens the possibility for a wide range of low-cost and ubiquitous environmental monitoring applications.

Highly Cross-Linked, Physiologically Responsive, Mechanically Adaptive Polymer Networks Made by Photopolymerization

Mechanically adaptive materials that soften upon exposure to physiological conditions are useful for biomedical applications, notably as substrates for implantable neural electrodes. So far, device fabrication efforts have largely relied on shaping such devices by laser cutting, but this process makes it difficult to produce complex electrode architectures and leads to ill-defined surface chemistries. Here, we report mechanically adaptive, physiologically responsive polymers that can be photopolymerized and thus patterned via soft lithography and photolithography. The adaptive polymer networks produced exhibit, in optimized compositions, a ca. 500-fold decrease of their storage modulus when exposed to simulated physiological conditions, for example, from 2.5 GPa to 5 MPa. This effect is caused by modest swelling (30% w/w), which in turn leads to plasticization so that the polymer network's glass transition temperature is reduced from 145 to 25 °C. The polymer networks can further be rendered pH-responsive by the incorporation of methacrylic acid. The dual stimuli-responsive materials thus made show promise as coatings or substrates for drug delivery devices.

Electrochemical Engineering of Nanoporous Materials for Photocatalysis: Fundamentals, Advances, and Perspectives

Photocatalysis comprises a variety of light-driven processes in which solar energy is converted into green chemical energy to drive reactions such as water splitting for hydrogen energy generation, degradation of environmental pollutants, CO2 reduction and NH3 production. Electrochemically engineered nanoporous materials are attractive photocatalyst platforms for a plethora of applications due to their large effective surface area, highly controllable and tuneable light-harvesting capabilities, efficient charge carrier separation and enhanced diffusion of reactive species. Such tailor-made nanoporous substrates with rational chemical and structural designs provide new exciting opportunities to develop advanced optical semiconductor structures capable of performing precise and versatile control over light–matter interactions to harness electromagnetic waves with unprecedented high efficiency and selectivity for photocatalysis. This review introduces fundamental developments and recent advances of electrochemically engineered nanoporous materials and their application as platforms for photocatalysis, with a final prospective outlook about this dynamic field.

Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography

In proximity mask aligner photolithography, diffraction of light at the mask pattern is the predominant source for image shape distortions such as line end shortening and corner rounding. One established method to mitigate the impact of diffraction is optical proximity correction. This method relies on a deliberate sub-resolution modification of photomask features to counteract such shape distortions, with the goal to improve pattern fidelity and uniformity of printed features. While previously considered for masks featuring only rectangular shapes in horizontal or vertical orientation, called Manhatten geometries, we demonstrate here the capabilities of computational mask aligner lithography by extending optical proximity correction to non-Manhattan geometries. We combine a rigorous simulation method for light propagation with a particle-swarm optimization to identify suitable mask patterns adapt to each occurring feature in the mask. The improvement in pattern quality is demonstrated in experimental prints. Our method extends the use of proximity lithography in optical manufacturing, as required in a multitude of micro-optical devices.

Delocalisation of Majorana quasiparticles in plaquette-nanowire hybrid system

Interplay between superconductivity, spin-orbit coupling and magnetic field can lead to realisation of the topologically non–trivial states which in finite one dimensional nanowires are manifested by emergence of a pair of zero-energy Majorana bound states. On the other hand, in two dimensional systems the chiral edge states can appear. We investigate novel properties of the bound states in a system of mixed dimensionality, composed of one-dimensional nanowire connected with two-dimensional plaquette. We study this system, assuming either its part or the entire structure to be in topologically non–trivial superconducting state. Our results show delocalisation of the Majorana modes, upon leaking from the nanowire to the plaquette with some tendency towards its corners.

A versatile micro-reflectivity setup for probing the optical properties of photonic nanostructures

The spatial- and spectral-dependent optical reflectivity measurements are essential to characterize various natural as well as artificial micron-scale photonic nanostructures. However, it is onerous to measure spatially and spectrally resolved reflectivity values from such photonic nanostructures due to their size limitations. Here, we discuss the development of a versatile micro-reflectivity setup with an in situ optical microscope combined with high-resolution actuators to measure the reflectivity from areas as small as 25 × 25 µm². We illustrate the reflectivity measurements from natural as well as artificially prepared ordered and disordered photonic nanostructures. The optical features that are hidden in the conventional reflectivity measurements are clearly resolved using the micro-reflectivity measurements. The proposed setup is also capable of measuring the polarization-dependent reflectivity and transmission of light.

Nanoporous water oxidation electrodes with a low loading of laser-deposited Ru/C exhibit enhanced corrosion stability

For the oxidation of water to dioxygen, oxide-covered ruthenium metal is known as the most efficient catalyst, however, with limited stability. Herein, we present a strategy for incorporating a Ru/C composite onto a novel nanoporous electrode surface with low noble metal loading and improved stability. The Ru/C is coated on the pore walls of anodic alumina templates in a one-step laser-induced deposition method from Ru₃(CO)₁₂ solutions. Scanning electron microscopy proves the presence of a continuous Ru/C layer along the inner pore walls. The amorphous material consists of metallic Ru incorporated in a carbonaceous C matrix as shown by X-ray diffraction combined with Raman and X-ray photoelectron spectroscopies. These porous electrodes reveal enhanced stability during water oxidation as compared to planar samples at pH 4. Finally, their electrocatalytic performance depends on the geometric parameters and is optimized with 13 μm pore length, which yields 2.6 mA cm^-2, or 49 A g^-1, at η = 0.20 V.

The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography

We report a method for fabricating periodic nanostructures on the surface of polydimethylsiloxane (PDMS) using laser interference lithography. The wave-front splitting method was used for the system, as the period and duty cycle can be easily controlled. Indium tin oxide (ITO) glass reveals favorable characteristics for controlling the standing waves distributed in the vertical direction, and was selected as the rigid substrate for the curing of the PDMS prepolymer, photoresist spin coating, and exposure processes. Periodic nanostructures such as gratings, dot, and hole arrays were prepared. This efficient way of fabricating large area periodic nanoscale patterns will be useful for surface plasmonic resonance and wearable electronics.

Photolithographic nanoseeding method for selective synthesis of metal-catalysed nanostructures

In this work we present a general method for the selective synthesis by photolithography of localised nanostructures in planar geometries. The methodology relies on the previous concept of photo-patternable metallic nanoparticle (NP)/polymer nanocomposites, which can provide a range of NP sizes, polydispersity and densities. First, a photoresist containing metallic ions is patterned by photolithography. Silver NPs are synthesised in situ after the exposure and development of the patterned thin film via the thermal-induced reduction of ions embedded in its structure. Gentle plasma ashing is used to selectively remove the polymer, which leaves NPs on the patterned areas. These NPs are used as seeds for subsequent processes. In order to demonstrate the flexibility of the method, its use to selectively produce localised nanostructures through different processes is shown here. Following a top-down approach, high aspect-ratio silicon nanograss has been produced by reactive ion etching and masking by the NPs. In a bottom-up approach, 280 nm copper clusters have been selectively grown in arrays. This method can be easily extrapolated to other metals and it provides a quick way to selectively generate hierarchical nanostructures in large planar areas that can be used for different applications, such as the fabrication of nanostructured sensor arrays.

Tape nanolithography: a rapid and simple method for fabricating flexible, wearable nanophotonic devices

This paper describes a tape nanolithography method for the rapid and economical manufacturing of flexible, wearable nanophotonic devices. This method involves the soft lithography of a donor substrate with air-void nanopatterns, subsequent deposition of materials onto the substrate surface, followed by direct taping and peeling of the deposited materials by an adhesive tape. Without using any sophisticated techniques, the nanopatterns, which are preformed on the surface of the donor substrate, automatically emerge in the deposited materials. The nanopatterns can then be transferred to the tape surface. By leveraging the works of adhesion at the interfaces of the donor substrate-deposited material-tape assembly, this method not only demonstrates sub-hundred-nanometer resolution in the transferred nanopatterns on an area of multiple square inches but also exhibits high versatility and flexibility for configuring the shapes, dimensions, and material compositions of tape-supported nanopatterns to tune their optical properties. After the tape transfer, the materials that remain at the bottom of the air-void nanopatterns on the donor substrate exhibit shapes complementary to the transferred nanopatterns on the tape surface but maintain the same composition, thus also acting as functional nanophotonic structures. Using tape nanolithography, we demonstrate several tape-supported plasmonic, dielectric, and metallo-dielectric nanostructures, as well as several devices such as refractive index sensors, conformable plasmonic surfaces, and Fabry-Perot cavity resonators. Further, we demonstrate tape nanolithography-assisted manufacturing of a standalone plasmonic nanohole film and its transfer to unconventional substrates such as a cleaved facet and the curved side of an optical fiber.

Structural tailoring of nanoporous anodic alumina optical microcavities for enhanced resonant recirculation of light

A comprehensive study about the structural engineering of high quality nanoporous anodic alumina optical microcavities (NAA-μCVs) fabricated by rationally designed anodisation strategies to enhance the light-confining capabilities of these photonic crystal (PC) structures is presented. Two types of NAA-μCV architectures are produced: (i) GIF-NAA-μCVs composed of a cavity layer featuring straight nanopores that is sandwiched between two gradient-index filters (GIFs) with sinusoidally modulated porosity in depth, and (ii) DBR-NAA-μCVs formed by sandwiching a cavity layer with straight nanopores between two distributed Bragg reflectors (DBRs), in which the porosity is engineered in a stepwise fashion. The geometric features of GIF-NAA-μCVs and DBR-NAA-μCVs are engineered and optimised through a systematic modification of the anodisation parameters (i.e. cavity anodisation time, cavity anodisation current density, anodisation period and number of anodisation pulses, and pore widening time). This methodology enables fine-tuning of the optical properties of GIF-NAA-μCVs and DBR-NAA-μCVs, such as quality factor and position and width of resonance band, to generate NAA-μCVs with unprecedented quality factors (i.e. 170 ± 8 and 206 ± 10 for the first and second order resonance bands - threefold and fourfold quality enhancement as compared to previous studies). Our results demonstrate that an optimal design of the geometric features and the nanoporous architecture of NAA-μCVs can significantly enhance resonant recirculation of light within these PC structures, creating new opportunities to develop ultrasensitive optical platforms, highly selective optical filters, and other photonic devices.

Engineering of Hybrid Nanoporous Anodic Alumina Photonic Crystals by Heterogeneous Pulse Anodization

In this study, we present an advanced nanofabrication approach, so-called ‘heterogeneous pulse anodization’ (HPA), in which galvanostatic stepwise and apodized sinusoidal pulse anodizations are combined in a single process. This novel anodization method enables the precise optical engineering of the characteristic photonic stopbands (PSBs) of nanoporous anodic alumina photonic crystals (NAA-PCs). The resulting structures are hybrid PCs (Hy-NAA-PCs) composed of distributed Bragg reflectors (DBRs) and apodized gradient-index filters (APO-GIFs) embedded within the same PC structure. The modification of various anodization parameters such as anodization period, relative and total anodization time, structural arrangement of PCs within Hy-NAA-PCs, and pore widening time allows the fine-tuning of the PSBs’ features (i.e. number, position and bandwidth of central wavelength) across the spectral regions. The effects of these fabrication parameters are systematically assessed, revealing that the positions of the characteristic transmission bands of Hy-NAA-PCs are highly controllable. Our study provides a comprehensive rationale towards the development of unique Hy-NAA-PCs with controllable optical properties, which could open new opportunities for a plethora of applications.

On the Precise Tuning of Optical Filtering Features in Nanoporous Anodic Alumina Distributed Bragg Reflectors

This study presents a nanofabrication approach that enables the production of nanoporous anodic alumina distributed Bragg reflectors (NAA-DBRs) with finely engineered light filtering features across the spectral regions. The photonic stopband (PSB) of these NAA-based photonic crystal (PC) structures is precisely tuned by an apodization strategy applied during stepwise pulse anodization with the aim of engineering the effective medium of NAA-DBRs in depth. We systematically assess the effect of different fabrication parameters such as apodization function (i.e. linear positive, linear negative, logarithmic positive and logarithmic negative), amplitude difference (from 0.105 to 0.420 mA cm⁻²), current density offset (from 0.140 to 0.560 mA cm⁻²), anodization period (from 1100 to 1700 s), and pore widening time (from 0 to 6 min) on the quality and central wavelength of the PSB of NAA-DBRs. The PSB’s features these PC structures are demonstrated to be highly tunable with the fabrication parameters, where a logarithmic negative apodization is found to be the most effective function to produce NAA-DBRs with high quality PSBs across the UV-visible-NIR spectrum. Our study establishes that apodized NAA-DBRs are more sensitive to changes in their effective medium than non-apodized NAA-DBRs, making them more suitable sensing platforms to develop advanced optical sensing systems.

Metamaterials based on the phase transition of VO2

In this article, we present a comprehensive review on recent research progress in design and fabrication of active tunable metamaterials and devices based on phase transition of VO₂. Firstly, we introduce mechanisms of the metal-to-insulator phase transition (MIPT) in VO₂ investigated by ultrafast THz spectroscopies. By analyzing the THz spectra, the evolutions of MIPT in VO₂ induced by different external excitations are described. The superiorities of using VO₂ as building blocks to construct highly tunable metamaterials are discussed. Subsequently, the recently demonstrated metamaterial devices based on VO₂ are reviewed. These metamaterials devices are summarized and described in the categories of working frequency. In each working frequency range, representative metamaterials based on VO₂ with different architectures and functionalities are reviewed and the contributions of the MIPT of VO₂ are emphasized. Finally, we conclude the recent reports and provide a prospect on the strategies of developing future tunable metamaterials based on VO₂.

Dipole-field-assisted charge extraction in metal-perovskite-metal back-contact solar cells

Hybrid organic-inorganic halide perovskites are low-cost solution-processable solar cell materials with photovoltaic properties that rival those of crystalline silicon. The perovskite films are typically sandwiched between thin layers of hole and electron transport materials, which efficiently extract photogenerated charges. This affords high-energy conversion efficiencies but results in significant performance and fabrication challenges. Herein we present a simple charge transport layer-free perovskite solar cell, comprising only a perovskite layer with two interdigitated gold back-contacts. Charge extraction is achieved via self-assembled monolayers and their associated dipole fields at the metal-perovskite interface. Photovoltages of ~600 mV generated by self-assembled molecular monolayer modified perovskite solar cells are equivalent to the built-in potential generated by individual dipole layers. Efficient charge extraction results in photocurrents of up to 12.1 mA cm⁻² under simulated sunlight, despite a large electrode spacing.

Simplified device concepts may become important for the development of low cost photovoltaics. Lin et al. report solar cells based on interdigitated gold back-contacts and metal halide perovskites where charge extraction is assisted via a dipole field generated by self-assembled molecular monolayers.

Fabrication of Silicon Nanobelts and Nanopillars by Soft Lithography for Hydrophobic and Hydrophilic Photonic Surfaces

Soft lithography allows for the simple and low-cost fabrication of nanopatterns with different shapes and sizes over large areas. However, the resolution and the aspect ratio of the nanostructures fabricated by soft lithography are limited by the depth and the physical properties of the stamp. In this work, silicon nanobelts and nanostructures were achieved by combining soft nanolithography patterning with optimized reactive ion etching (RIE) in silicon. Using polymethylmethacrylate (PMMA) nanopatterned layers with thicknesses ranging between 14 and 50 nm, we obtained silicon nanobelts in areas of square centimeters with aspect ratios up to ~1.6 and linewidths of 225 nm. The soft lithographic process was assisted by a thin film of SiO_x (less than 15 nm) used as a hard mask and RIE. This simple patterning method was also used to fabricate 2D nanostructures (nanopillars) with aspect ratios of ~2.7 and diameters of ~200 nm. We demonstrate that large areas patterned with silicon nanobelts exhibit a high reflectivity peak in the ultraviolet C (UVC) spectral region (280 nm) where some aminoacids and peptides have a strong absorption. We also demonstrated how to tailor the aspect ratio and the wettability of these photonic surfaces (contact angles ranging from 8.1 to 96.2°) by changing the RIE power applied during the fabrication process.

Ag-Cu mixed phase plasmonic nanostructures fabricated by shadow nanosphere lithography and glancing angle co-deposition

By combining shadow nanosphere lithography with a glancing angle co-deposition technique, mixed-phase Ag-Cu triangular nanopatterns and films were fabricated. They were prepared at different compositions with respect to Ag from 100% to 0% by changing the relative deposition ratio of each metal. Characterizations by ellipsometry, energy dispersive x-ray spectroscopy, and x-ray diffraction revealed that the thin films and nanopatterns were composed of small, well-mixed Ag and Cu nano-grains with a diameter less than 20 nm, and their optical properties could be described by an effective medium theory. All compositions of the nanopattern had the same shape, but showed tunable localized surface plasmon resonance (LSPR) properties. In general, the LSPR of the nanopatterns redshifted with decreasing composition. Such a relation could be fitted by an empirical model based on the bulk theory of alloy plasmonics. By changing the colloidal template and the material deposited, this fabrication technique can be used to produce other alloy plasmonic nanostructures with predicted LSPR wavelengths.

A Novel Nanofabrication Technique of Silicon-Based Nanostructures

A novel nanofabrication technique which can produce highly controlled silicon-based nanostructures in wafer scale has been proposed using a simple amorphous silicon (α-Si) material as an etch mask. SiO₂ nanostructures directly fabricated can serve as nanotemplates to transfer into the underlying substrates such as silicon, germanium, transistor gate, or other dielectric materials to form electrically functional nanostructures and devices. In this paper, two typical silicon-based nanostructures such as nanoline and nanofin have been successfully fabricated by this technique, demonstrating excellent etch performance. In addition, silicon nanostructures fabricated above can be further trimmed to less than 10 nm by combing with assisted post-treatment methods. The novel nanofabrication technique will be expected a new emerging technology with low process complexity and good compatibility with existing silicon integrated circuit and is an important step towards the easy fabrication of a wide variety of nanoelectronics, biosensors, and optoelectronic devices.

Fine tuning of optical signals in nanoporous anodic alumina photonic crystals by apodized sinusoidal pulse anodisation

In this study, we present an advanced nanofabrication approach to produce gradient-index photonic crystal structures based on nanoporous anodic alumina. An apodization strategy is for the first time applied to a sinusoidal pulse anodisation process in order to engineer the photonic stop band of nanoporous anodic alumina (NAA) in depth. Four apodization functions are explored, including linear positive, linear negative, logarithmic positive and logarithmic negative, with the aim of finely tuning the characteristic photonic stop band of these photonic crystal structures. We systematically analyse the effect of the amplitude difference (from 0.105 to 0.840 mA cm^-2), the pore widening time (from 0 to 6 min), the anodisation period (from 650 to 950 s) and the anodisation time (from 15 to 30 h) on the quality and the position of the characteristic photonic stop band and the interferometric colour of these photonic crystal structures using the aforementioned apodization functions. Our results reveal that a logarithmic negative apodisation function is the most optimal approach to obtain unprecedented well-resolved and narrow photonic stop bands across the UV-visible-NIR spectrum of NAA-based gradient-index photonic crystals. Our study establishes a fully comprehensive rationale towards the development of unique NAA-based photonic crystal structures with finely engineered optical properties for advanced photonic devices such as ultra-sensitive optical sensors, selective optical filters and all-optical platforms for quantum computing.

Tuning the plasmonic properties of silver nanopatterns fabricated by shadow nanosphere lithography

Regular silver (Ag) nanopatterns, from disconnected nanotriangles to well coupled triangular clusters of nanoparticles, were prepared by shadow nanosphere lithography at different incident angles θ from 0° to 20° with continuous azimuthal rotation. The resulting nanopatterns were consistent with predictions by numerical calculations and Monte Carlo simulations of adatoms with high diffusivity. The visible localized surface plasmon resonance of these nanopatterns was tuned by θ systematically due to the change in size, shape, and arrangement of Ag nanopatterns. These resonances were consistent with finite-difference time-domain simulations using realistic nanopatterns based upon scanning electron micrographs. Such a simple fabrication strategy can be used to optimize surface enhanced Raman scattering substrate fabrication, as well as other plasmonics based applications.

Multiscale conformal pattern transfer

We demonstrate a method for seamless transfer from a parent flat substrate of basically any lithographic top-down or bottom-up pattern onto essentially any kind of surface. The nano- or microscale patterns, spanning macroscopic surface areas, can be transferred with high conformity onto a large variety of surfaces when such patterns are produced on a thin carbon film, grown on top of a sacrificial layer. The latter allows lifting the patterns from the flat parent substrate onto a water-air interface to be picked up by the host surface of choice. We illustrate the power of this technique by functionalizing broad range of materials including glass, plastics, metals, rough semiconductors and polymers, highlighting the potential applications in in situ colorimetry of the chemistry of materials, anti-counterfeit technologies, biomolecular and biomedical studies, light-matter interactions at the nanoscale, conformal photovoltaics and flexible electronics.

Method for making a single-step etch mask for 3D monolithic nanostructures

Current nanostructure fabrication by etching is usually limited to planar structures as they are defined by a planar mask. The realization of three-dimensional (3D) nanostructures by etching requires technologies beyond planar masks. We present a method for fabricating a 3D mask that allows one to etch three-dimensional monolithic nanostructures using only CMOS-compatible processes. The mask is written in a hard-mask layer that is deposited on two adjacent inclined surfaces of a Si wafer. By projecting in a single step two different 2D patterns within one 3D mask on the two inclined surfaces, the mutual alignment between the patterns is ensured. Thereby after the mask pattern is defined, the etching of deep pores in two oblique directions yields a three-dimensional structure in Si. As a proof of concept we demonstrate 3D mask fabrication for three-dimensional diamond-like photonic band gap crystals in silicon. The fabricated crystals reveal a broad stop gap in optical reflectivity measurements. We propose how 3D nanostructures with five different Bravais lattices can be realized, namely cubic, tetragonal, orthorhombic, monoclinic and hexagonal, and demonstrate a mask for a 3D hexagonal crystal. We also demonstrate the mask for a diamond-structure crystal with a 3D array of cavities. In general, the 2D patterns on the different surfaces can be completely independently structured and still be in perfect mutual alignment. Indeed, we observe an alignment accuracy of better than 3.0 nm between the 2D mask patterns on the inclined surfaces, which permits one to etch well-defined monolithic 3D nanostructures.

Scalable lithography from Natural DNA Patterns via polyacrylamide gel

A facile strategy for fabricating scalable stamps has been developed using cross-linked polyacrylamide gel (PAMG) that controllably and precisely shrinks and swells with water content. Aligned patterns of natural DNA molecules were prepared by evaporative self-assembly on a PMMA substrate, and were transferred to unsaturated polyester resin (UPR) to form a negative replica. The negative was used to pattern the linear structures onto the surface of water-swollen PAMG, and the pattern sizes on the PAMG stamp were customized by adjusting the water content of the PAMG. As a result, consistent reproduction of DNA patterns could be achieved with feature sizes that can be controlled over the range of 40%–200% of the original pattern dimensions. This methodology is novel and may pave a new avenue for manufacturing stamp-based functional nanostructures in a simple and cost-effective manner on a large scale.

Low-temperature solution processing of palladium/palladium oxide films and their pH sensing performance

Highly sensitive, easy-to-fabricate, and low-cost pH sensors with small dimensions are required to monitor human bodily fluids, drinking water quality and chemical/biological processes. In this study, a low-temperature, solution-based process is developed to prepare palladium/palladium oxide (Pd/PdO) thin films for pH sensing. A precursor solution for Pd is spin coated onto pre-cleaned glass substrates and annealed at low temperature to generate Pd and PdO. The percentages of PdO at the surface and in the bulk of the electrodes are correlated to their sensing performance, which was studied by using the X-ray photoelectron spectroscope. Large amounts of PdO introduced by prolonged annealing improve the electrode's sensitivity and long-term stability. Atomic force microscopy study showed that the low-temperature annealing results in a smooth electrode surface, which contributes to a fast response. Nano-voids at the electrode surfaces were observed by scanning electron microscope, indicating a reason for the long-term degradation of the pH sensitivity. Using the optimized annealing parameters of 200°C for 48 h, a linear pH response with sensitivity of 64.71±0.56 mV/pH is obtained for pH between 2 and 12. These electrodes show a response time shorter than 18 s, hysteresis less than 8 mV and stability over 60 days. High reproducibility in the sensing performance is achieved. This low-temperature solution-processed sensing electrode shows the potential for the development of pH sensing systems on flexible substrates over a large area at low cost without using vacuum equipment.

Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies

Combining vapour sensors into arrays is an accepted compromise to mitigate poor selectivity of conventional sensors. Here we show individual nanofabricated sensors that not only selectively detect separate vapours in pristine conditions but also quantify these vapours in mixtures, and when blended with a variable moisture background. Our sensor design is inspired by the iridescent nanostructure and gradient surface chemistry of Morpho butterflies and involves physical and chemical design criteria. The physical design involves optical interference and diffraction on the fabricated periodic nanostructures and uses optical loss in the nanostructure to enhance the spectral diversity of reflectance. The chemical design uses spatially controlled nanostructure functionalization. Thus, while quantitation of analytes in the presence of variable backgrounds is challenging for most sensor arrays, we achieve this goal using individual multivariable sensors. These colorimetric sensors can be tuned for numerous vapour sensing scenarios in confined areas or as individual nodes for distributed monitoring.

Individual vapour sensors often suffer from poor selectivity, which hinders their broad applicability. Here, Potyrailo et al. fabricate individual sensors inspired by the Morpho butterfly capable of selectively detecting vapours in mixtures and with a variable moisture background.

Materials analyses and electrochemical impedance of implantable metal electrodes

Implantable electrodes with high flexibility, high mechanical fixation and low electrochemical impedance are desirable for neuromuscular activation because they provide safe, effective and stable stimulation. In this paper, we report on detailed materials and electrical analyses of three metal implantable electrodes - gold (Au), platinum (Pt) and titanium (Ti) - using X-ray photoelectron spectroscopy (XPS), scanning acoustic microscopy, drop shape analysis and electrochemical impedance spectroscopy. We investigated the cause of changes in electrochemical impedance of long-term immersed Au, Pt and Ti electrodes on liquid crystal polymers (LCPs) in phosphate buffered saline (PBS). We analyzed the surface wettability, surface and interface defects and the elemental depth profile of the electrode-adhesion layers on the LCP. The impedance of the electrodes decreased at lower frequencies, but increased at higher frequencies compared with that of the short-term immersion. The increase of impedances was influenced by the oxidation of the electrode/adhesion-layers that affected the double layer capacitance behavior of the electrode/PBS. The oxidation of the adhesion layer for all the electrodes was confirmed by XPS. Alkali ions (sodium) were adsorbed on the Au and Pt surfaces, but diffused into the Ti electrode and LCPs. The Pt electrode showed a higher sensitivity to surface and interface defects than that of Ti and Au electrodes. These findings may be useful when designing electrodes for long-term implantable devices.

Controlled convective self-assembly of silver nanoparticles in volatile organic solvent and its application in electronics

A controlled convective self-assembly approach is reported for producing conductive coatings and patterns using ultra-small Ag nanoparticles in volatile solvents.

Microfabricated electrochemical pH and free chlorine sensors for water quality monitoring: recent advances and research challenges

Recent advances of micro-electrochemical ph and free chlorine sensors are reviewed and their technological challenges and perspectives are provided.