Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays

Design and Fabrication of 1-D CMUT Arrays for Dual-Mode Dual-Frequency Acoustic Angiography Applications

When microbubble contrast agents are excited at low frequencies (less than 5 MHz), they resonate and produce higher-order harmonics due to their nonlinear behavior. We propose a novel scheme with a capacitive micromachined ultrasonic transducer (CMUT) array to receive high-frequency microbubble harmonics in collapse mode and to transmit a low-frequency high-pressure pulse by releasing the CMUT plate from collapse and pull it back to collapse again in the same transmit-receive cycle. By patterning and etching the substrate to create glass spacers in the device cavity we can reliably operate the CMUT in collapse mode and receive high-frequency signals. Previously, we demonstrated a single-element CMUT with spacers operating in the described fashion. In this article, we present the design and fabrication of a dual-mode, dual-frequency 1-D CMUT array with 256 elements. We present two different insulating glass spacer designs in rectangular cells for the collapse mode. For the device with torus-shaped spacers, the 3 dB receive bandwidth is from 8 to 17 MHz, and the transmitted maximum peak-to-peak pressure from 32 elements at 4 mm focal depth was 2.12 MPa with a 1.21 MPa peak negative pressure, which corresponds to a mechanical index (MI) of 0.58 at 4.3 MHz. For the device with line-shaped spacers, the 3-dB receive bandwidth at 150 V dc bias extends from 10.9 to 19.2 MHz. By increasing the bias voltage to 180 V, the 3 dB bandwidth shifts, and extends from 11.7 to 20.4 MHz. The transmitting maximum peak-to-peak pressure with 32 elements at 4 mm was 2.06 MPa with a peak negative pressure of 1.19 MPa, which corresponds to an MI of 0.62 at 3.7 MHz.

Review of pMUTs for medical imaging: towards high frequency arrays

pMUT (piezoelectric Micromachined Ultrasound Transducer) devices are an alternative that can overcome the limitations associated with conventional ultrasound transducers. pMUT's are reported for many applications such as range-finding, biometrics, and ultrasound imaging. However, pulse-echo measurements from fabricated pMUT devices/arrays are not commonly reported in literature, a reason being lack of desirable performance either in transmit or receive mode of operation. There is also limited information about the design, fabrication and characterization of 2D-pMUT-arrays operating at high frequencies (>15 MHz) in water medium. In this paper we review 'state-of-the-art' for pMUT-array based medical ultrasound imaging, with a focus on their pulse-echo imaging capability. Over the next 3-5 years, we expect further improvement in piezoelectric thin film deposition techniques, on-chip integration of pre-amplification circuits and further miniaturization of pMUT devices, thus paving the way for development of pMUT-array based high frequency medical imaging systems.

A Handheld Imaging Probe for Acoustic Angiography With an Ultrawideband Capacitive Micromachined Ultrasonic Transducer (CMUT) Array

This article presents an imaging probe with a 256-element ultrawideband (UWB) 1-D capacitive micromachined ultrasonic transducer (CMUT) array designed for acoustic angiography (AA). This array was fabricated on a borosilicate glass wafer with a reduced bottom electrode and an additional central plate mass to achieve the broad bandwidth. A custom 256-channel handheld probe was designed and implemented with integrated low-noise amplifiers and supporting power circuitry. This probe was used to characterize the UWB CMUT, which has a functional 3-dB frequency band from 3.5 to 23.5 MHz. A mechanical index (MI) of 0.33 was achieved at 3.5 MHz at a depth of 11 mm. These promising measurements are then combined to demonstrate AA. The use of alternate amplitude modulation (aAM) combined with a frequency analysis of the measured transmit signal demonstrates the suitability of the UWB CMUT for AA. This is achieved by measuring only a low level of unwanted high-frequency harmonics in both the transmit signal and the reconstructed image in the areas other than the contrast bubbles.

Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging

This paper presents a dual-frequency piezoelectric micromachined ultrasonic transducer (pMUT) array based on thin ceramic PZT for endoscopic photoacoustic imaging (PAI) applications. With a chip size of 7 × 7 mm², the pMUT array consists of 256 elements, half of which have a lower resonant frequency of 1.2 MHz and the other half have a higher resonant frequency of 3.4 MHz. Ceramic PZT, with outstanding piezoelectric coefficients, has been successfully thinned down to a thickness of only 4 μ by using wafer bonding and chemical mechanical polishing (CMP) techniques and employed as the piezoelectric layer of the pMUT elements. The diaphragm diameters of the lower-frequency and higher-frequency elements are 220 μm and 120 μm, respectively. The design methodology, multiphysics modeling, fabrication process, and characterization of the pMUTs are presented in detail. The fabricated pMUT array has been fully characterized via electrical, mechanical, and acoustic measurements. The measured maximum responsivities of the lower- and higher- frequency elements reach 110 nm/V and 30 nm/V at their respective resonances. The measured cross-couplings of the lower-frequency elements and higher-frequency elements are about 9% and 5%, respectively. Furthermore, PAI experiments with pencil leads embedded into an agar phantom have been conducted, which clearly shows the advantages of using dual-frequency pMUT arrays to provide comprehensive photoacoustic images with high spatial resolution and large signal-to-noise ratio simultaneously.

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.

Equivalent Circuit Model for a Large Array of Coupled Piezoelectric Micromachined Ultrasonic Transducers With High Emission Performance

In this article, an analytical equivalent circuit model is established for the piezoelectric micromachined ultrasonic transducer (PMUT) cell and array with a combination of the annular and circular diaphragms used for structural optimization and complex array design. Based on this model, a comprehensive analysis is conducted on the acoustic-structural coupling of an annular and circular diaphragm-coupled PMUT (AC-PMUT) with a new excitation method. The model-derived results are in good agreement with the simulation and experimental results. Then, an optimized design has been presented to achieve high-output pressure and a good array working performance. In summary, a comparison of the array working performance is conducted between the arrays that consist of AC-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs). The results indicate that the AC-PMUT array has a much lower crosstalk effect than that of the traditional C-PMUT array. By this means, the AC-PMUT array can fully use the high vibration amplitude achieved by each AC-PMUT cell to improve its output ability. As a result, the highest ultrasonic output pressure generated by the AC-PMUT array in its resonant condition can achieve an increase of 155%, compared with that generated by the C-PMUT array.

Equivalent Circuit Models of Cell and Array for Resonant Cavity-Based Piezoelectric Micromachined Ultrasonic Transducer

This article presents a design of resonant cavity-based piezoelectric micromachined ultrasonic transducers (PMUTs), including impedance matching tube-integrated (T) and Helmholtz resonant (HR) cavity-integrated PMUTs. In addition, equivalent circuit models for single PMUT cell and PMUT array are developed for structural optimization and complex array design. The model-derived results agree well with the FEM results. On the basis of the proposed models, an optimized design is established to achieve high output pressure and a good array working performance. The working performance of arrays that consist of HR-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs) is compared. Results indicate that the HR-PMUT array has a lower crosstalk effect than the traditional C-PMUT array. Furthermore, the highest ultrasonic output pressure of HR-PMUT array at the resonant frequency can be achieved with an increase of up to 163% compared with that of the C-PMUT array because of the liquid amplification effect. Also, the cavity-based design and its model can be used for further advanced PMUT cell structures in other arrays to improve their performance.

Array Design of Piezoelectric Micromachined Ultrasonic Transducers With Low-Crosstalk and High-Emission Performance

This article presents a resonant cavity-based array design for piezoelectric micromachined ultrasonic transducers (PMUTs). The cavity depth is designed to ensure that its open end achieves a considerably smaller acoustic impedance than the surrounding PMUT cells. The interference acoustic wave generated between every two adjacent PMUT cells at the near surface of the array will take an easy path down to the cavity bottom. As such, the crosstalk effect among different adjacent cells in the array can be largely reduced. An equivalent circuit model of the proposed array is established for its design and optimization. In addition, the solutions for circuit parameters in the electromechanical domain are analytically derived and verified via FEM simulations. Given the low crosstalk effect achieved by the proposed array design, the output sensitivity of the proposed PMUTs can be improved by 259% compared with the traditional PMUTs with a high distribution density of the same size. The cavity-based array design and its model can be used for further advanced PMUT cell structures in other arrays to improve their performance.

Investigation of ultrasonic absorption in the MHz frequency range by silicon substrates with a built-in porous silicon layer

The present study is focused on the development and characterization of an innovative substrate to optimize the axial resolution of ultrasonic transducers on a silicon substrate that is dedicated to ultrasound imaging. The substrate must efficiently dampen wave propagation to avoid degradation of the axial resolution of ultrasound images. In this study, the proposed approach implements a silicon substrate with a built-in acoustic damping layer composed of porous silicon. Porous silicon layers with thicknesses of less than 100 µm and porosities varying from 27% to 62% were fabricated, and their substrate resonances were characterized. The experimental results obtained in the frequency range from 6 MHz to 10 MHz show that the substrate acoustic damping is controlled by adjusting the characteristics of the porous silicon layer; a significant damping of 70% is demonstrated with only 70 µm of porous silicon.

Refractive-index-based ultrasound sensing with photonic crystal slabs

We demonstrate ultrasound detection with 500-μm-diameter photonic-crystal slab (PCS) sensors fabricated from CMOS-compatible technology. An ultrasound signal impinging a PCS sensor causes a local modulation of the refractive index (RI) of the medium (water) in which the PCS is immersed, resulting in a periodic spectral shift of the optical resonance of the PCS. The acoustic sensitivity is found to scale with the index sensitivity S and quality factor Q. A noise equivalent pressure (NEP) of 650 Pa with averaging (7.4  Pa/Hz) and relative wavelength shifts of up to 4.3×10^-5  MPa^-1 are measured. The frequency response of the sensors is observed to be flat from 1 to 20 MHz, with the range limited only by our measurement apparatus.

Acoustic characterization of a miniature matrix transducer for pediatric 3D transesophageal echocardiography

This paper presents the design, fabrication and characterization of a miniature PZT-on-CMOS matrix transducer for real-time pediatric 3-dimensional (3D) transesophageal echocardiography (TEE). This 3D TEE probe consists of a 32 × 32 array of PZT elements integrated on top of an Application Specific Integrated Circuit (ASIC). We propose a partitioned transmit/receive array architecture wherein the 8 × 8 transmitter elements, located at the centre of the array, are directly wired out and the remaining receive elements are grouped into 96 sub-arrays of 3 × 3 elements. The echoes received by these sub-groups are locally processed by micro-beamformer circuits in the ASIC that allow pre-steering up to ±37°. The PZT-on-CMOS matrix transducer has been characterized acoustically and has a centre frequency of 5.8 MHz, -6 dB bandwidth of 67%, a transmit efficiency of 6 kPa/V at 30 mm, and a receive dynamic range of 85 dB with minimum and maximum detectable pressures of 5 Pa and 84 kPa respectively. The properties are very suitable for a miniature pediatric real-time 3D TEE probe.

Quantitative imaging performance of frequency-tunable capacitive micromachined ultrasonic transducer array designed for intracardiac application: Phantom study

Commercially available intracardiac echo (ICE) catheters face a trade-off between viewing depth and resolution. Frequency-tunable ICE probes would offer versatility of choice between penetration or resolution imaging within a single device. In this phantom study, the imaging performance of a novel, frequency-tunable, 32-element, 1-D CMUT array integrated with front-end electronics is evaluated. Phased-array ultrasound imaging with a forward-looking CMUT probe prototype operated beyond collapse mode at voltages up to three times higher than the collapse voltage (-65 V) is demonstrated. Imaging performance as a function of bias voltage (-70 V to -160 V), transmit pulse frequency (5-25 MHz), and number of transmit pulse cycles (1-3) is quantified, based on which penetration, resolution, and generic imaging modes are identified. It is shown that by utilizing the concept of frequency tuning, images with different characteristics can be generated trading-off the resolution and penetration depth. The penetration mode provides imaging up to 71 mm in the tissue-mimicking phantom, axial resolution of 0.44 mm, and lateral resolution of 0.12 rad. In the resolution mode, axial resolution of 0.055 mm, lateral resolution of 0.035 rad, and penetration depth of 16 mm are measured. These results show what this CMUT array has the potential versatile characteristics needed for intracardiac imaging, despite its relatively small transducer aperture size of 2 mm × 2 mm imposed by the clinical application.

Quantitative comparison of PZT and CMUT probes for photoacoustic imaging: Experimental validation

Photoacoustic (PA) signals are short ultrasound (US) pulses typically characterized by a single-cycle shape, often referred to as N-shape. The spectral content of such wideband signals ranges from a few hundred kilohertz to several tens of megahertz. Typical reception frequency responses of classical piezoelectric US imaging transducers, based on PZT technology, are not sufficiently broadband to fully preserve the entire information contained in PA signals, which are then filtered, thus limiting PA imaging performance. Capacitive micromachined ultrasonic transducers (CMUT) are rapidly emerging as a valid alternative to conventional PZT transducers in several medical ultrasound imaging applications. As compared to PZT transducers, CMUTs exhibit both higher sensitivity and significantly broader frequency response in reception, making their use attractive in PA imaging applications. This paper explores the advantages of the CMUT larger bandwidth in PA imaging by carrying out an experimental comparative study using various CMUT and PZT probes from different research laboratories and manufacturers. PA acquisitions are performed on a suture wire and on several home-made bimodal phantoms with both PZT and CMUT probes. Three criteria, based on the evaluation of pure receive impulse response, signal-to-noise ratio (SNR) and contrast-to-noise ratio (CNR) respectively, have been used for a quantitative comparison of imaging results. The measured fractional bandwidths of the CMUT arrays are larger compared to PZT probes. Moreover, both SNR and CNR are enhanced by at least 6 dB with CMUT technology. This work highlights the potential of CMUT technology for PA imaging through qualitative and quantitative parameters.

A capacitive ultrasonic transducer based on parametric resonance

A capacitive ultrasonic transducer based on a parametric resonator structure is described and experimentally demonstrated. The transducer structure, which we call capacitive parametric ultrasonic transducer (CPUT), uses a parallel plate capacitor with a movable membrane as part of a degenerate parametric series RLC resonator circuit with a resonance frequency of f_o. When the capacitor plate is driven with an incident harmonic ultrasonic wave at the pump frequency of 2f_o with sufficient amplitude, the RLC circuit becomes unstable and ultrasonic energy can be efficiently converted to an electrical signal at f_o frequency in the RLC circuit. An important characteristic of the CPUT is that unlike other electrostatic transducers, it does not require DC bias or permanent charging to be used as a receiver. We describe the operation of the CPUT using an analytical model and numerical simulations, which shows drive amplitude dependent operation regimes including parametric resonance when a certain threshold is exceeded. We verify these predictions by experiments with a micromachined membrane based capacitor structure in immersion where ultrasonic waves incident at 4.28 MHz parametrically drive a signal with significant amplitude in the 2.14 MHz RLC circuit. With its unique features, the CPUT can be particularly advantageous for applications such as wireless power transfer for biomedical implants and acoustic sensing.

A capacitive ultrasonic transducer based on parametric resonance

A capacitive ultrasonic transducer based on a parametric resonator structure is described and experimentally demonstrated. The transducer structure, which we call capacitive parametric ultrasonic transducer (CPUT), uses a parallel plate capacitor with a movable membrane as part of a degenerate parametric series RLC resonator circuit with a resonance frequency of f_o. When the capacitor plate is driven with an incident harmonic ultrasonic wave at the pump frequency of 2f_o with sufficient amplitude, the RLC circuit becomes unstable and ultrasonic energy can be efficiently converted to an electrical signal at f_o frequency in the RLC circuit. An important characteristic of the CPUT is that unlike other electrostatic transducers, it does not require DC bias or permanent charging to be used as a receiver. We describe the operation of the CPUT using an analytical model and numerical simulations, which shows drive amplitude dependent operation regimes including parametric resonance when a certain threshold is exceeded. We verify these predictions by experiments with a micromachined membrane based capacitor structure in immersion where ultrasonic waves incident at 4.28 MHz parametrically drive a signal with significant amplitude in the 2.14 MHz RLC circuit. With its unique features, the CPUT can be particularly advantageous for applications such as wireless power transfer for biomedical implants and acoustic sensing.

Dual-Frequency Piezoelectric Endoscopic Transducer for Imaging Vascular Invasion in Pancreatic Cancer

Cancers of the pancreas have the poorest prognosis among all cancers, as many tumors are not detected until surgery is no longer a viable option. Surgical viability is typically determined via endoscopic ultrasound imaging. However, many patients who may be eligible for resection are not offered surgery due to diagnostic challenges in determining vascular or lymphatic invasion. In this paper, we describe the development of a dual-frequency piezoelectric transducer for rotational endoscopic imaging designed to transmit at 4 MHz and receive at 20 MHz in order to image microbubble-specific superharmonic signals. Imaging performance is assessed in a tissue-mimicking phantom at depths from 1 cm [contrast-to-tissue ratio (CTR) = 21.6 dB] to 2.5 cm (CTR = 11.4 dB), in ex vivo porcine vessels, and in vivo in a rodent. The prototyped 1.1-mm aperture transducer demonstrates contrast-specific imaging of microbubbles in a 200- [Formula: see text]-diameter tube through the wall of a 1-cm-diameter porcine artery, suggesting such a device may enable direct visualization of small vessels from within the lumen of larger vessels such as the portal vein or superior mesenteric vein.

Image-guided ultrasound phased arrays are a disruptive technology for non-invasive therapy

Focused ultrasound offers a non-invasive way of depositing acoustic energy deep into the body, which can be harnessed for a broad spectrum of therapeutic purposes, including tissue ablation, the targeting of therapeutic agents, and stem cell delivery. Phased array transducers enable electronic control over the beam geometry and direction, and can be tailored to provide optimal energy deposition patterns for a given therapeutic application. Their use in combination with modern medical imaging for therapy guidance allows precise targeting, online monitoring, and post-treatment evaluation of the ultrasound-mediated bioeffects. In the past there have been some technical obstacles hindering the construction of large aperture, high-power, densely-populated phased arrays and, as a result, they have not been fully exploited for therapy delivery to date. However, recent research has made the construction of such arrays feasible, and it is expected that their continued development will both greatly improve the safety and efficacy of existing ultrasound therapies as well as enable treatments that are not currently possible with existing technology. This review will summarize the basic principles, current statures, and future potential of image-guided ultrasound phased arrays for therapy.

Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement

This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes.

Wideband acoustic activation and detection of droplet vaporization events using a capacitive micromachined ultrasonic transducer

An ongoing challenge exists in understanding and optimizing the acoustic droplet vaporization (ADV) process to enhance contrast agent effectiveness for biomedical applications. Acoustic signatures from vaporization events can be identified and differentiated from microbubble or tissue signals based on their frequency content. The present study exploited the wide bandwidth of a 128-element capacitive micromachined ultrasonic transducer (CMUT) array for activation (8 MHz) and real-time imaging (1 MHz) of ADV events from droplets circulating in a tube. Compared to a commercial piezoelectric probe, the CMUT array provides a substantial increase of the contrast-to-noise ratio.

Rayleigh-Bloch waves in CMUT arrays

Using the small-signal electrical equivalent circuit of a capacitive micromachined ultrasonic transducer (CMUT) cell, along with the self and mutual radiation impedances of such cells, we present a computationally efficient method to predict the frequency response of a large CMUT element or array. The simulations show spurious resonances, which may degrade the performance of the array. We show that these unwanted resonances are due to dispersive Rayleigh-Bloch waves excited on the CMUT surface-liquid interface. We derive the dispersion relation of these waves for the purpose of predicting the resonance frequencies. The waves form standing waves at frequencies where the reflections from the edges of the element or the array result in a Fabry-Pérot resonator. High-order resonances are eliminated by a small loss in the individual cells, but low-order resonances remain even in the presence of significant loss. These resonances are reduced to tolerable levels when CMUT cells are built from larger and thicker plates at the expense of reduced bandwidth.

Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

Experimental study of underwater transmission characteristics of high-frequency 30 MHz polyurea ultrasonic transducer

In this paper, we present the transmission characteristics of a polyurea ultrasonic transducer operating in water. In this study, we used a polyurea transducer with fundamental resonance at approximately 30 MHz. Firstly, acoustic pressure radiated from the transducer was measured using a hydrophone, which has a diameter of 0.2 mm. The transmission characteristics such as relative bandwidth, pulse width, and acoustic sensitivity were calculated from the experimental results. The results of the experiment showed a relative bandwidth of 50% and a pulse width of 0.061 μs. The acoustic sensitivity was 0.60 kPa/V with good linearity, where the correlation coefficient R in the fitting calculation was 0.996. A maximum pressure of 13.1 kPa was observed when the transducer was excited at a zero-to-peak voltage of 21 V. Moreover, we experimentally verified the results. The results of the pulse/echo experiment showed that the estimated diameters of the copper wires were 458 and 726 μm, where the differences between the actual and measured values were 15% and 4%, respectively. Acoustic streaming was also observed so that a particle velocity map was estimated by particle image velocimetry (PIV). The sound pressure calculated from the particle velocity obtained by PIV showed good agreement with the acoustic pressure measured using the hydrophone, where the differences between the calculated and measured values were 12-19%.

Top-orthogonal-to-bottom-electrode (TOBE) CMUT arrays for 3-D ultrasound imaging

Two-dimensional ultrasound arrays hold great promise for 3-D imaging; however, wiring of each channel becomes impractical for large arrays or for small-footprint catheter probes for which the number of wires must be limited. Capacitive micromachined ultrasound transducers offer a promising solution for such 2-D array applications, but channel routing is still non-trivial. A top-orthogonal-to-bottom-electrode (TOBE) 2-D CMUT array architecture is presented along with row-column addressing schemes for low-channel-count 3-D ultrasound imaging. An N × N TOBE array is capable of obtaining 3-D images using only 2N channels. An interfacing scheme is presented in which transmit-receive signals are routed along rows while bias voltages are applied along columns, effectively allowing for single-element transmit/receive control. Simulations demonstrated potentially finer resolution and improved side lobe suppression over a previously published row-column-based imaging method. Laser vibrometer testing was done to measure membrane displacement in air and confirmed that single-element air-coupled actuation in transmit mode could be achieved using our proposed interfacing scheme. Acoustic testing was also performed in both transmit and receive modes to characterize the ability of the proposed interfacing scheme to achieve dominant-element transmission and reception in immersion operation. It was seen that membrane displacement in both modes was indeed largely confined to the active area.

Parametric nonlinear lumped element model for circular CMUTs in collapsed mode

We present a parametric equivalent circuit model for a circular CMUT in collapsed mode. First, we calculate the collapsed membrane deflection, utilizing the exact electrical force distribution in the analytical formulation of membrane deflection. Then we develop a lumped element model of collapsed membrane operation. The radiation impedance for collapsed mode is also included in the model. The model is merged with the uncollapsed mode model to obtain a simulation tool that handles all CMUT behavior, in transmit or receive. Large- and small-signal operation of a single CMUT can be fully simulated for any excitation regime. The results are in good agreement with FEM simulations.

Thickness design, fabrication, and evaluation of 100-MHz polyurea ultrasonic transducer

In this paper, we present a polyurea transducer that works at 100 MHz under water. The transducer was designed using an equivalent circuit model so that an aluminum (top)-polyurea-aluminum (bottom)-polyimide layer had a resonant frequency of 100 MHz and output sound pressure became maximum at that frequency. The thicknesses of the top aluminum electrode, polyurea, and bottom aluminum electrode were determined to be 3.3, 3.5, and 1.7 μm, respectively. A 100-MHz polyurea transducer with the designed thickness was fabricated using deposition equipment. To evaluate the performance of the designed and fabricated polyurea transducer, transmission-reception experiments with pulsed and burst waves were carried out. The results show that transmitting and receiving ultrasounds at a frequency of 100 MHz are possible as expected with the thickness design. To evaluate actual use, B-mode imaging of an onion was also performed using the transducer, which was formed into a line-focused shape. The result shows that the outer layer of the onion, of 0.1 to 0.2 mm thickness, was successfully imaged.

Second harmonic and subharmonic for non-linear wideband contrast imaging using a capacitive micromachined ultrasonic transducer array

When insonified with suitable ultrasound excitation, contrast microbubbles generate various non-linear scattered components, such as the second harmonic (2H) and the subharmonic (SH). In this study, we exploit the wide frequency bandwidth of capacitive micromachined ultrasonic transducers (CMUTs) to enhance the response from ultrasound contrast agents by selective imaging of both the 2H and SH components simultaneously. To this end, contrast images using the pulse inversion method were recorded with a 64-element CMUT linear array connected to an open scanner. In comparison to imaging at 2H alone, the wideband imaging including both the 2H and SH contributions provided up to 130% and 180% increases in the signal-to-noise and contrast-to-tissue ratios, respectively. The wide-frequency band of CMUTs offers new opportunities for improved ultrasound contrast agent imaging.

Equivalent circuit-based analysis of CMUT cell dynamics in arrays

Capacitive micromachined ultrasonic transducers (CMUTs) are usually composed of large arrays of closely packed cells. In this work, we use an equivalent circuit model to analyze CMUT arrays with multiple cells. We study the effects of mutual acoustic interactions through the immersion medium caused by the pressure field generated by each cell acting upon the others. To do this, all the cells in the array are coupled through a radiation impedance matrix at their acoustic terminals. An accurate approximation for the mutual radiation impedance is defined between two circular cells, which can be used in large arrays to reduce computational complexity. Hence, a performance analysis of CMUT arrays can be accurately done with a circuit simulator. By using the proposed model, one can very rapidly obtain the linear frequency and nonlinear transient responses of arrays with an arbitrary number of CMUT cells. We performed several finite element method (FEM) simulations for arrays with small numbers of cells and showed that the results are very similar to those obtained by the equivalent circuit model.

Acoustic backing in 3-D integration of CMUT with front-end electronics

Capacitive micromachined ultrasonic transducers (CMUTs) have shown promising qualities for medical imaging. However, there are still some problems to be investigated, and some challenges to overcome. Acoustic backing is necessary to prevent SAWs excited in the surface of the silicon substrate from affecting the transmit pattern from the array. In addition, echoes resulting from bulk waves in the substrate must be removed. There is growing interest in integrating electronic circuits to do some of the beamforming directly below the transducer array. This may be easier to achieve for CMUTs than for traditional piezoelectric transducers. We will present simulations showing that the thickness of the silicon substrate and thicknesses and acoustic properties of the bonding material must be considered, especially when designing highfrequency transducers. Through simulations, we compare the acoustic properties of 3-D stacks bonded with three different bonding techniques; solid-liquid interdiffusion (SLID) bonding, direct fusion bonding, and anisotropic conductive adhesives (ACA). We look at a CMUT array with a center frequency of 30 MHz and three silicon wafers underneath, having a total silicon thickness of 100 μm. We find that fusion bonding is most beneficial if we want to prevent surface waves from damaging the array response, but SLID and ACA are also promising if bonding layer thicknesses can be reduced.

A 32 x 32 capacitive micromachined ultrasonic transducer array manufactured in standard CMOS

As ultrasound imagers become increasingly portable and lower cost, breakthroughs in transducer technology will be needed to provide high-resolution, real-time 3-D imaging while maintaining the affordability needed for portable systems. This paper presents a 32 x 32 ultrasound array prototype, manufactured using a CMUT-in-CMOS approach whereby ultrasonic transducer elements and readout circuits are integrated on a single chip using a standard integrated circuit manufacturing process in a commercial CMOS foundry. Only blanket wet-etch and sealing steps are added to complete the MEMS devices after the CMOS process. This process typically yields better than 99% working elements per array, with less than ±1.5 dB variation in receive sensitivity among the 1024 individually addressable elements. The CMUT pulseecho frequency response is typically centered at 2.1 MHz with a -6 dB fractional bandwidth of 60%, and elements are arranged on a 250 μm hexagonal grid (less than half-wavelength pitch). Multiplexers and CMOS buffers within the array are used to make on-chip routing manageable, reduce the number of physical output leads, and drive the transducer cable. The array has been interfaced to a commercial imager as well as a set of custom transmit and receive electronics, and volumetric images of nylon fishing line targets have been produced.

Capacitive micromachined ultrasonic transducers for medical imaging and therapy

Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure, and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated frontend electronic circuits we developed and their use for 2-D and 3-D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a MEMS technology for many medical diagnostic and therapeutic applications.

CMUT characterization by interferometric and electric measurements

Capacitive micromachined ultrasonic transducers (CMUTs) with 5.7 mum radius, realized by wafer bonding, have been characterized by both optical and electrical measurements. These measurements are performed by our heterodyne interferometer and a network analyzer, respectively. The results from this article will be used to improve the fabrication of next-generation CMUTs. We have investigated the spread in resonance frequency of different CMUT membranes along the array. Q-factors have been obtained using both measurement methods, and the results from the 2 methods have been numerically compared. The relation between applied dc voltage and resonance frequency has been studied. Temperature measurements show that increasing temperature leads to a small decrease in the resonance frequency of the CMUTs; however, the decrease is small enough to ensure stable operation with small variations in room temperature. The heterodyne interferometer is used to inspect the vibration pattern of the CMUTs' higher harmonic modes. These modes are located at approximately 60 MHz in air. To the authors' knowledge, vibration modes at frequencies >40 MHz have not been previously studied.

Reducing inter-element acoustic crosstalk in capacitive micromachined ultrasound transducers

The inter-element acoustic crosstalk problem in capacitive micromachined ultrasound transducer (CMUT) arrays is discussed in this paper. A transfer function matrix approach was used to derive modified transmit waveforms on adjacent elements to reduce the apparent acoustic crosstalk. The significance of this is that this technique relies on programmable waveforms, so that it yields a reduced crosstalk effect with no additional fabrication complexity if the requisite programmable waveform transmit circuits are available. The crosstalk reduction achieved by this method also was examined in combination with conventional (physical separation-based) crosstalk reduction approaches. A CMUT transducer array structure was simulated in a two-dimensional (2-D) model using finite element analysis (FEA), and the crosstalk reduction method was tested for both small and large alternating current (AC) (ultrasonic) excitation conditions. A 25 dB crosstalk reduction was achieved for small AC excitation conditions in which approximately linear operation is encountered. When the AC excitation amplitude was large compared to the direct current (DC) bias, an "iterative harmonic cancellation" approach (also based on programmable waveform techniques) could be applied in combination with the crosstalk reduction method to minimize the inherently transmitted harmonics, and a similar crosstalk reduction effect of 25.5 dB was achieved. This method also can be combined with other structure-modification based crosstalk reduction approaches.

Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays

Crosstalk is the coupling of energy between the elements of an ultrasonic transducer array. This coupling degrades the performance of transducers in applications such as medical imaging and therapeutics. In this paper, we present an experimental demonstration of guided interface waves in capacitive micromachined ultrasonic transducers (CMUTs). We compare the experimental results to finite element calculations using a commercial package (LS-DYNA) for a 1-D CMUT array operating in the conventional and collapsed modes. An element in the middle of the array was excited with a unipolar voltage pulse, and the displacements were measured using a laser interferometer along the center line of the array elements immersed in soybean oil. We repeated the measurements for an identical CMUT array covered with a 4.5-microm polydimethylsiloxane (PDMS) layer. The main crosstalk mechanism is the dispersive guided modes propagating in the fluid-solid interface. Although the transmitter element had a center frequency of 5.8 MHz with a 130% fractional bandwidth in the conventional operation, the dispersive guided mode was observed with the maximum amplitude at a frequency of 2.1 MHz, and had a cut-off frequency of 4 MHz. In the collapsed operation, the dispersive guided mode was observed with the maximum amplitude at a frequency of 4.0 MHz, and had a cut-off frequency of 10 MHz. Crosstalk level was lower in the collapsed operation (-39 dB) than in the conventional operation (-24.4 dB). The coverage of the PDMS did not significantly affect the crosstalk level, but reduced the phase velocity for both operation modes. Lamb wave modes, A0 and S0, were also observed with crosstalk levels of -40 dB and -65 dB, respectively. We observed excellent agreement between the finite element and the experimental results.

Annular-ring CMUT arrays for forward-looking IVUS: transducer characterization and imaging

In this study, a 64-element, 1.15-mm diameter annular-ring capacitive micromachined ultrasonic transducer (CMUT) array was characterized and used for forward-looking intravascular ultrasound (IVUS) imaging tests. The array was manufactured using low-temperature processes suitable for CMOS electronics integration on a single chip. The measured radiation pattern of a 43 X 140-microm2 array element depicts a 40 degrees view angle for forward-looking imaging around a 15-MHz center frequency in agreement with theoretical models. Pulse-echo measurements show a -10-dB fractional bandwidth of 104% around 17 MHz for wire targets 2.5 mm away from the array in vegetable oil. For imaging and SNR measurements, RF A-scan data sets from various targets were collected using an interconnect scheme forming a 32-element array configuration. An experimental point spread function was obtained and compared with simulated and theoretical array responses, showing good agreement. Therefore, this study demonstrates that annular-ring CMUT arrays fabricated with CMOS-compatible processes are capable of forward-looking IVUS imaging, and the developed modeling tools can be used to design improved IVUS imaging arrays.

Design of a front-end integrated circuit for 3D acoustic imaging using 2D CMUT arrays

Integration of front-end electronics with 2D capacitive micromachined ultrasonic transducer (CMUT) arrays has been a challenging issue due to the small element size and large channel count. We present design and verification of a front-end drive-readout integrated circuit for 3D ultrasonic imaging using 2D CMUT arrays. The circuit cell dedicated to a single CMUT array element consists of a high-voltage pulser and a low-noise readout amplifier. To analyze the circuit cell together with the CMUT element, we developed an electrical CMUT model with parameters derived through finite element analysis, and performed both the pre- and postlayout verification. An experimental chip consisting of 4 X 4 array of the designed circuit cells, each cell occupying a 200 X 200 microm2 area, was formed for the initial test studies and scheduled for fabrication in 0.8 microm, 50 V CMOS technology. The designed circuit is suitable for integration with CMUT arrays through flip-chip bonding and the CMUT-on-CMOS process.

Acoustic coupling in capacitive microfabricated ultrasonic transducers: modeling and experiments

In the design of low-frequency transducer arrays for active sonar systems, the acoustic interactions that occur between the transducer elements have received much attention. Because of these interactions, the acoustic loading on each transducer depends on its position in the array, and the radiated acoustic power may vary considerably from one element to another. Capacitive microfabricated ultrasonic transducers (CMUT) are made of a two-dimensional array of metallized micromembranes, all electrically connected in parallel, and driven into flexural motion by the electrostatic force produced by an applied voltage. The mechanical impedance of these membranes is typically much lower than the acoustic impedance of water. In our investigations of acoustic coupling in CMUTs, interaction effects between the membranes in immersion were observed, similar to those reported in sonar arrays. Because CMUTs have many promising applications in the field of medical ultrasound imaging, understanding of cross-coupling mechanisms and acoustic interaction effects is especially important for reducing cross-talk between array elements, which can produce artifacts and degrade image quality. In this paper, we report a finite-element study of acoustic interactions in CMUTs and experimental results obtained by laser interferometry measurements. The good agreement found between finite element modeling (FEM) results and optical displacement measurements demonstrates that acoustic interactions through the liquid represent a major source of cross coupling in CMUTs.

A finite difference model for cMUT devices

A finite difference method was implemented to simulate capacitive micromachined ultrasonic transducers (cMUTs) and compared to models described in the literature such as finite element methods. Similar results were obtained. It was found that one master curve described the clamped capacitance. We introduced normalized capacitance versus normalized bias voltage and metallization rate, independent of layer thickness, gap height, and size membrane, leading to the determination of a coupling factor master curve. We present here calculations and measurements of electrical impedance for cMUTs. An electromechanical equivalent circuit was used to perform simulations. Our experimental measurements confirmed the theoretical results in terms of resonance, anti-resonance frequencies, clamped capacitance, and electromechanical coupling factor. Due to inhomogeneity of the tested element array and strong parasitic capacitance between cells, the maximum coupling coefficient value achieved was 0.27. Good agreement with theory was obtained for all findings.

Three-dimensional modelling of micromachined-ultrasonic-transducer arrays operating in water

We report on the 3-D modelling of periodic arrays of capacitive micromachined ultrasonic transducers (cMUTs) operating in fluid. Specific developments have been performed to model biperiodic transducer arrays and to take into account radiation into any stratified media at the front-side as well as the back-side of the device. The model is based on a periodic finite-element-analysis/boundary-element-method (FEA/BEM). It is applied to micromachined ultrasonic transducers (MUTs), based on silicon-nitride-circular-membrane arrays on a silicon substrate, and operating in water. The spectrum characteristics of MUTs excited in phase are investigated, showing that very-large-band emission is achievable as previously demonstrated by many authors. However, other contributions are also found, depending on the excitation conditions, that do not radiate in the fluid. These contributions are identified as guided modes that could generate significant cross-talk effects. The origin and the nature of these modes is analyzed to gain insight in the actual operation of MUTs.

Precompensated excitation waveforms to suppress harmonic generation in MEMS electrostatic transducers

Microelectromechanical systems (MEMS) electrostatic-based transducers inherently produce harmonics as the electrostatic force generated in the transmit mode is approximately proportional to the square of the applied voltage signal. This characteristic precludes them from being effectively used for harmonic imaging (either with or without the addition of microbubble-based contrast agents). The harmonic signal that is nonlinearly generated by tissue (or contrast agent) cannot be distinguished from the inherent transmitted harmonic signal. We investigated two precompensation methods to cancel this inherent harmonic generation in electrostatic transducers. A combination of finite element analysis (FEA) and experimental results are presented. The first approach relies on a calculation, or measurement, of the transducer's linear transfer function, which is valid for small signal levels. Using this transfer function and a measurement of the undesired harmonic signal, a predistorted transmit signal was calculated to cancel the harmonic inherently generated by the transducer. Due to the lack of perfect linearity, the approach does hot work completely in a single iteration. However, with subsequent iterations, the problem becomes more linear and converges toward a very satisfactory result (a 18.6 dB harmonic reduction was achieved in FEA simulations and a 20.7 dB reduction was measured in a prototype experiment). The second approach tested involves defining a desired function [including a direct current (DC) offset], then taking the square root of this function to determine the shape of the required input function. A 5.5 dB reduction of transmitted harmonic was obtained in both FEA simulation and experimental prototypes test.

Forward-viewing CMUT arrays for medical imaging

This paper reports the design and testing of forward-viewing annular arrays fabricated using capacitive micromachined ultrasonic transducer (CMUT) technology. Recent research studies have shown that CMUTs have broad frequency bandwidth and high-transduction efficiency. One- and two-dimensional CMUT arrays of various sizes already have been fabricated, and their viability for medical imaging applications has been demonstrated. We fabricated 64-element, forward-viewing annular arrays using the standard CMUT fabrication process and carried out experiments to measure the operating frequency, bandwidth, and transmit/receive efficiency of the array elements. The annular array elements, designed for imaging applications in the 20 MHz range, had a resonance frequency of 13.5 MHz in air. The immersion pulse-echo data collected from a plane reflector showed that the devices operate in the 5-26 MHz range with a fractional bandwidth of 135%. The output pressure at the surface of the transducer was measured to be 24 kPa/V. These values translate into a dynamic range of 131.5 dB for 1-V excitation in 1-Hz bandwidth with a commercial low noise receiving circuitry. The designed, forward-viewing annular CMUT array is suitable for mounting on the front surface of a cylindrical catheter probe and can provide Doppler information for measurement of blood flow and guiding information for navigation through blood vessels in intravascular ultrasound imaging.

Quo vadis medical ultrasound?

The last three decades of development in diagnostic ultrasound imaging and technology are briefly reviewed and the impact of the crucial link between the two apparently independent research efforts, which eventually facilitated implementation of harmonic imaging modality is explored. These two efforts included the experiments with piezoelectric PVDF polymer material and studies of the interaction between ultrasound energy and biological tissue. Harmonic imaging and its subsequent improvements revolutionized the diagnostic power of clinical ultrasound and brought along images of unparalleled resolution, close to that of magnetic resonance imaging (MRI) quality. The nonlinear propagation effects and their implications for both diagnostic and therapeutic applications of ultrasound are also briefly addressed. In diagnostic applications, the impact of these effects on image resolution and tissue characterization is reviewed; in therapeutic applications, the influence of nonlinear propagation effects on highly localized tissue ablation and cauterization is examined. Next, the most likely developments and future trends in clinical ultrasound technology, including 3D and 4D imaging, distant palpation, image enhancement using contrast agents, monitoring, and merger of diagnostic and therapeutic applications by e.g. introducing ultrasonically controlled targeted drug delivery are reviewed. Finally, a possible competition from other imaging modalities is discussed.

Influence of acousto-optic interactions on the determination of the diffracted field by an array obtained from displacement measurements

This paper deals with the influence of acousto-optic interactions on the displacement measurements performed over transducer array and their effects on the predicted diffraction field. Changes on the temporal/spatial responses and the plane wave decomposition of the displacement are discussed. Modifications made on the directivity pattern are shown. A theoretical analysis of acousto-optic phenomenon, based on the plane wave decomposition of radiated field by the array is developed. Theoretical and experimental results are compared, showing first that waves with phase velocity near the one of the fluid are greatly amplified. Second, the interaction of laser beam with edge wave produced by the vertical size of elements induces a parasitic temporal pulse on the x-t diagram and so an interference pattern in the omega-k diagram. Corrections are proposed to eliminate errors induced by acousto-optic interactions and validated by comparing predicted diffraction field with measurements.

An approach for reducing adjacent element crosstalk in ultrasound arrays

A method is presented for active cancellation of crosstalk effects in ultrasonic arrays. The approach makes use of the programmable transmitter waveform generators that are now being used with growing prevalence in diagnostic ultrasound systems. The array's transmit mode transfer function is represented by a transfer function matrix. Elements of this matrix are determined by exciting a single, central element with a wideband waveform and determining the resulting pressure output from the central element and adjacent elements. The desired output then is defined (e.g., finite output from a single, central element) and zero output from all other elements. The transfer function matrix equation can be solved to determine the required excitation functions on both the central array element and its neighbors. These excitation functions will result in reduced evidence of crosstalk on the output signals. Therefore, the single-element, angular-response function is improved. Using superposition, the approach can be extended to beamformed array excitation. A variety of theoretical and experimental results are shown. The method also can be used in the receive mode but with a less satisfactory solution. A transmitting mode experiment based on a prototype five-element transducer has provided results indicating that sidelobes in the angular response can be reduced using this technique.

Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection

Capacitive detection limits the performance of capacitive micromachined ultrasonic transducers (CMUTs) by providing poor sensitivity below megahertz frequencies and limiting acoustic power output by imposing constraints on the membrane-substrate gap height. In this paper, an integrated optical interferometric detection method for CMUTs, which provides high displacement sensitivity independent of operation frequency and device capacitance, is reported. The method also enables optoelectronics integration in a small volume and provides optoelectronic isolation between transmit and receive electronics. Implementation of the method involves fabricating CMUTs on transparent substrates and shaping the electrode under each individual CMUT membrane in the form of an optical diffraction grating. Each CMUT membrane thus forms a phase-sensitive optical diffraction grating structure that is used to measure membrane displacements down to 2 x 10(-4) A/square root(Hz) level in the dc to 2-MHz range. Test devices are fabricated on quartz substrates, and ultrasonic array imaging in air is performed using a single 4-mm square CMUT consisting of 19 x 19 array of membranes operating at 750 kHz.

Volumetric ultrasound imaging using 2-D CMUT arrays

Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a candidate to overcome the difficulties in the realization of 2-D arrays for real-time 3-D imaging. In this paper, we present the first volumetric images obtained using a 2-D CMUT array. We have fabricated a 128 x 128-element 2-D CMUT array with through-wafer via interconnects and a 420-microm element pitch. As an experimental prototype, a 32 x 64-element portion of the 128 x 128-element array was diced and flip-chip bonded onto a glass fanout chip. This chip provides individual leads from a central 16 x 16-element portion of the array to surrounding bondpads. An 8 x 16-element portion of the array was used in the experiments along with a 128-channel data acquisition system. For imaging phantoms, we used a 2.37-mm diameter steel sphere located 10 mm from the array center and two 12-mm-thick Plexiglas plates located 20 mm and 60 mm from the array. A 4 x 4 group of elements in the middle of the 8 x 16-element array was used in transmit, and the remaining elements were used to receive the echo signals. The echo signal obtained from the spherical target presented a frequency spectrum centered at 4.37 MHz with a 100% fractional bandwidth, whereas the frequency spectrum for the echo signal from the parallel plate phantom was centered at 3.44 MHz with a 91% fractional bandwidth. The images were reconstructed by using RF beamforming and synthetic phased array approaches and visualized by surface rendering and multiplanar slicing techniques. The image of the spherical target has been used to approximate the point spread function of the system and is compared with theoretical expectations. This study experimentally demonstrates that 2-D CMUT arrays can be fabricated with high yield using silicon IC-fabrication processes, individual electrical connections can be provided using through-wafer vias, and flip-chip bonding can be used to integrate these dense 2-D arrays with electronic circuits for practical 3-D imaging applications.

Electrical characterization of coupled and uncoupled MEMS ultrasonic transducers

We report electrical characterization of micromachined polysilicon capacitive diaphragms for use as ultrasonic transducers. Admittance measurements yield insight into the resonant behavior and also the damping resulting from ultrasonic radiation and frictional forces caused by the etch release holes. Unbonded transducers exhibit sharp resonances with Q values that increase with decreasing air pressure. We also report for the first time direct bonding of these transducers to solid surfaces. Transducers survive the bonding process and show distinctly different displacement in response to applied dc bias. Finally, a single-degree-of-freedom model is used to obtain insight into the various contributions to damping.

MEMS ultrasonic transducers for the testing of solids

Arrays of capacitive diaphragm ultrasonic transducers could potentially be used for non-destructive ultrasonic testing and structural monitoring. In this paper, we consider the efficiency of coupling of these transducers to solid media. We show that efficient coupling can be realized by using a silicone coating as a coupling medium. We present the results of experimental characterization of ultrasonic transducers coupled to solids in this way. We show that these transducers can be used with piezoelectric emitting transducers within the range from 1 to 5 MHz, and we demonstrate the use of several transducers as a phased array to determine the direction and distance of an ultrasonic source.

Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?

Piezoelectric materials have dominated the ultrasonic transducer technology. Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as an alternative technology offering advantages such as wide bandwidth, ease of fabricating large arrays, and potential for integration with electronics. The aim of this paper is to demonstrate the viability of CMUTs for ultrasound imaging. We present the first pulse-echo phased array B-scan sector images using a 128-element, one-dimensional (1-D) linear CMUT array. We fabricated 64- and 128-element 1-D CMUT arrays with 100% yield and uniform element response across the arrays. These arrays have been operated in immersion with no failure or degradation in performance over the time. For imaging experiments, we built a resolution test phantom roughly mimicking the attenuation properties of soft tissue. We used a PC-based experimental system, including custom-designed electronic circuits to acquire the complete set of 128 x 128 RF A-scans from all transmit-receive element combinations. We obtained the pulse-echo frequency response by analyzing the echo signals from wire targets. These echo signals presented an 80% fractional bandwidth around 3 MHz, including the effect of attenuation in the propagating medium. We reconstructed the B-scan images with a sector angle of 90 degrees and an image depth of 210 mm through offline processing by using RF beamforming and synthetic phased array approaches. The measured 6-dB lateral and axial resolutions at 135 mm depth were 0.0144 radians and 0.3 mm, respectively. The electronic noise floor of the image was more than 50 dB below the maximum mainlobe magnitude. We also performed preliminary investigations on the effects of crosstalk among array elements on the image quality. In the near field, some artifacts were observable extending out from the array to a depth of 2 cm. A tail also was observed in the point spread function (PSF) in the axial direction, indicating the existence of crosstalk. The relative amplitude of this tail with respect to the mainlobe was less than -20 dB.