Design and Implementation of a Four-Unit Array Piezoelectric Bionic MEMS Vector Hydrophone

High-performance vector hydrophones have been gaining attention for underwater target-monitoring applications. Nevertheless, there exists the mutual constraint between sensitivity and bandwidth of a single hydrophone. To solve this problem, a four-unit array piezoelectric bionic MEMS vector hydrophone (FPVH) was developed in this paper, which has a cross-beam and a bionic fish-lateral-line-nerve-cell-cilia unit array structure. Simulation analysis and optimization in the design of the bionic microstructure have been performed by COMSOL 6.1 software to determine the structure dimensions and the lead zirconate titanate (PZT) thin film distribution. The FPVH was manufactured using MEMS technology and tested in a standing wave bucket. The results indicate that the FPVH has a sensitivity of up to -167.93 dB@1000 Hz (0 dB = 1 V/μPa), which is 12 dB higher than that of the one-unit piezoelectric MEMS vector hydrophone (OPVH). Additionally, the working bandwidth of the FPVH reaches 20 Hz~1200 Hz, exhibiting a good cosine curve with an 8-shape. This work paves a new way for the development of multi-unit piezoelectric vector hydrophones for underwater acoustic detectors.

Piezoelectricity performance and β-phase analysis of PVDF composite fibers with BaTiO3 and PZT reinforcement

Piezoelectric composite fibers have various applications such as energy harvesting and human body monitor devices. Therefore, the construction of fibers that have the highest piezoelectric efficiency while using materials with the least toxicity is of great importance for health. Consequently, in the research a head PZT/PVDF (Lead Zirconate Titanate/Polyvinylidene fluoride) and Lead free BaTiO3/PVDF (Barium Titanate/Polyvinylidene fluoride) 0-3 connection type composites nanofibers were fabricated by Electrospinning method. Dielectric constant with Impedance analyzer, sensitivity with handmade device and their crystalline properties by using FTIR and XRD, were compared. The results showed, adding BaTiO3 will increase the percentage of β-Phase crystal formation more than adding PZT which subsequently leads to a higher dielectric constant.

Reversible Optical Control of Polarization in Epitaxial Ferroelectric Thin Films

Light is an effective tool to probe the polarization and domain distribution in ferroelectric materials passively, that is, non-invasively, for example, via optical second harmonic generation (SHG). With the emergence of oxide electronics, there is now a strong demand to expand the role of light toward active control of the polarization. In this work, optical control of the ferroelectric polarization is demonstrated in prototypical epitaxial PbZrx Ti1-x O3 (PZT)-based heterostructures. This is accomplished in three steps, using above-bandgap UV light, while tracking the response of the polarization with optical SHG. First, it is found that UV-light exposure induces a transient enhancement or suppression of the ferroelectric polarization in films with an upward- or downward-oriented polarization, respectively. This behavior is attributed to a modified charge screening driven by the separation of photoexcited charge carriers at the Schottky interface of the ferroelectric thin film. Second, by taking advantage of this optical handle on electrostatics, remanent optical poling from a pristine multi-domain into a single-domain configuration is accomplished. Third, via thermal annealing or engineered electrostatic boundary conditions, a complete reversibility of the optical poling is further achieved. Hence, this work paves the way for the all-optical control of the spontaneous polarization in ferroelectric thin films.

Magnetron-Sputtered Lead Titanate Thin Films for Pyroelectric Applications: Part 2-Electrical Characteristics and Characterization Methods

Pyroelectric materials are naturally electrically polarized and exhibits a built-in spontaneous polarization in their unit cell structure even in the absence of any externally applied electric field. These materials are regarded as one of the ideal detector elements for infrared applications because they have a fast response time and uniform sensitivity at room temperature across all wavelengths. Crystals of the perovskite lead titanate (PbTiO3) family show pyroelectric characteristics and undergo structural phase transitions. They have a high Curie temperature (the temperature at which the material changes from the ferroelectric (polar) to the paraelectric (nonpolar) phase), high pyroelectric coefficient, high spontaneous polarization, low dielectric constant, and constitute important component materials not only useful for infrared detection, but also with vast applications in electronic, optic, and MEMS devices. However, the preparation of large perfect and pure single crystals PbTiO3 is challenging. Additionally, difficulties arise in the application of such bulk crystals in terms of connection to processing circuits, large size, and high voltages required for their operation. In this part of the review paper, we explain the electrical behavior and characterization techniques commonly utilized to unravel the pyroelectric properties of lead titanate and its derivatives. Further, it explains how the material preparation techniques affect the electrical characteristics of resulting thin films. It also provides an in-depth discussion of the measurement of pyroelectric coefficients using different techniques.

Thermal analysis and SNR comparison of CMUT and PZT transducers using coded excitation

Coded excitation (CE) has the ability to enhance image quality and penetration depth by improving the signal-to-noise ratio (SNR). Their usefulness has been extensively proven in the literature, however, there are very few publications that have discussed the practicality of using CEs, as they can increase the operating temperature of a transducer beyond the safety limits. In this paper, the potential for capacitive micromachined ultrasonic transducers (CMUTs) to handle CEs is investigated and compared to a geometrically similar Lead Zirconate Titanate (PZT) probe. It is hypothesized that CMUTs are comparatively advantageous for CE and can generate CE signals more effectively while operating within the safety limits of temperature specified by the International Electrotechnical Commission (IEC). Simple chirp signals were used for excitation and the temperature of the transducer assembly was measured under two different test conditions following the IEC standards. The still air test showed that at the pulse repetition frequency of 4 kHz and a signal duration of 8μs, the PZT probe reached the safe limit of 27 °C within 3 min of acquisition, whereas the CMUT probe showed an increase of only 4-5 °C over 30 min of scan time. The phantom experiments showed that for the maximum temperature rise allowed at the object-transducer interface by the IEC, the gain in SNR possible for the CMUT probe was 13-14 dB and the increase in penetration depth was 30 mm, whereas no gain in SNR and penetration depth was achieved for the PZT probe. The peak mechanical index and the derated spatial peak temporal averaged intensity were found to be less than half the FDA limits for both probes in all cases, proving temperature to be the first limiting factor when using CE. Therefore, the CMUT has shown to be thermally more efficient than the PZT probe and a good candidate for CE imaging.

Magnetron Sputtered Lead Titanates Thin Films for Pyroelectric Applications: Part 1: Epitaxial Growth, Material Characterization

Pyroelectric materials, are those materials with the property that in the absence of any externally applied electric field, develop a built-in spontaneous polarization in their unit cell structure. They are regarded as ideal detector elements for infrared applications because they can provide fast response time and uniform sensitivity at room temperature over all wavelengths. Crystals of the perovskite Lead Titanate (PbTiO3) family show pyroelectric characteristics and undergo structural phase transitions. They have a high Curie temperature (the temperature at which the material changes from the ferroelectric (polar) to the paraelectric (nonpolar) phase), high pyroelectric coefficient, high spontaneous polarization, low dielectric constant, and constitute important component materials not only useful for infrared detection, but also with vast applications in electronic, optic, and Micro-electromechanical systems (MEMS) devices. However, the preparation of large perfect, and pure single crystals of PbTiO3 is challenging. Additionally, difficulties arise in the application of such bulk crystals in terms of connection to processing circuits, large size, and high voltages required for their operation. A number of thin film fabrication techniques have been proposed to overcome these inadequacies, among which, magnetron sputtering has demonstrated many potentials. By addressing these aspects, the review article aims to contribute to the understanding of the challenges in the field of pyroelectric materials, highlight potential solutions, and showcase the advancements and potentials of pyroelectric perovskite series including PbZrTiO3 (PZT), PbxCa1-x (PZN-PT), etc. for which PbTiO3 is the end member. The review is presented in two parts. Part 1 focuses on material aspects, including preparation methods using magnetron sputtering and material characterization. We take a tutorial approach to discuss the progress made in epitaxial growth of lead titanate-based ceramics prepared by magnetron sputtering and examine how processing conditions may affect the crystalline quality of the growing film by linking to the properties of the substrate/buffer layer, growth substrate temperature, and the oxygen partial pressure in the gas mixture. Careful control and optimization of these parameters are crucial for achieving high-quality thin films with desired structural and morphological characteristics.

A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer

Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm2. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5-7 m/s and the relative error of correction is within 4%.

Radiation-Hardened and Flexible Pb(Zr0.53Ti0.47)O3 Piezoelectric Sensor for Structural Health Monitoring

Piezoelectric sensors are excellent damage detectors that can be applied to structural health monitoring (SHM). SHM for complex structures of aerospace vehicles working in harsh conditions is frequently required, posing challenging requirements for a sensor's flexibility, radiation hardness, and high-temperature tolerance. Here, we fabricate a flexible and lightweight Pb(Zr0.53Ti0.47)O3 piezoelectric film on flexible KMg3(AlSi3O10)F2 substrate via van der Waals (vdW) heteroepitaxy, endowing it with robust ferroelectric and piezoelectric properties under low energy-high flux protons (LE-HFPs) radiation (1015 p/cm2). More importantly, the Pb(Zr0.53Ti0.47)O3 film sensor maintains highly stable damage monitoring sensitivity on an aluminum plate under harsh conditions of LE-HFPs radiation (1015 p/cm2, flat structure), high temperature (175 °C, flat structure), and mechanical fatigue (bending 105 cycles under a radius of 5 mm, curved structure). All these superior qualities are suggested to result from the outstanding film crystal quality due to vdW epitaxy. The flexible and lightweight Pb(Zr0.53Ti0.47)O3 film sensor demonstrated in this work provides an ideal candidate for real-time SHM of aerospace vehicles with flat and complex curve-like structures working in harsh aerospace environments.

Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection

The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based on the capacitive sensor principle is constructed in this paper. The modal simulation of the sensor structure is carried out using COMSOL 6.1 simulation software, the structural parameters of the sensor are derived from the mechanical properties of the model, and finally the physical sensor is processed and fabricated using the derived structural parameters. The mechanical impact characteristics of the model under different overloads were investigated using ANSYS/LS-DYNA, and the numerical simulation of the projectile intrusion into the three-layer concrete slab was carried out using LS-DYNA. Under different overload conditions, the sensor was tested using the Machette's hammer test and the output signal of the sensor was obtained. The output signal was analyzed. Finally, a sensor with self-powered output, high output voltage amplitude, and low spurious interference was obtained. The results show that the ceramic capacitive sensor has a reasonable structure, can reliably receive vibration signals, and has certain engineering applications in the intrusion meter layer.

A Review on Acoustic Emission Testing for Structural Health Monitoring of Polymer-Based Composites

Acoustic emission (AE) has received increased interest as a structural health monitoring (SHM) technique for various materials, including laminated polymer composites. Piezoelectric sensors, including PZT (piezoelectric ceramic) and PVDF (piezoelectric polymer), can monitor AE in materials. The thickness of the piezoelectric sensors (as low as 28 µm-PVDF) allows embedding the sensors within the laminated composite, creating a smart material. Incorporating piezoelectric sensors within composites has several benefits but presents numerous difficulties and challenges. This paper provides an overview of acoustic emission testing, concluding with a discussion on embedding piezoelectric AE sensors within fibre-polymer composites. Various aspects are covered, including the underlying AE principles in fibre-based composites, factors that influence the reliability and accuracy of AE measurements, methods to artificially induce acoustic emission, and the correlation between AE events and damage in polymer composites.

Uniform Lithium Plating for Dendrite-Free Lithium Metal Batteries: Role of Dipolar Channels in Poly(vinylidene fluoride) and PbZrxTi1-xO3 Interface

Conventional polymer/ceramic composite solid-state electrolytes (CPEs) have limitations in inhibiting lithium dendrite growth and fail to meet the contradictory requirements of anodes and cathodes. Herein, an asymmetrical poly(vinylidene fluoride) (PVDF)-PbZrxTi1-xO3 (PZT) CPE was prepared. The CPE incorporates high dielectric PZT nanoparticles, which enrich a dense thin layer on the anode side, making their dipole ends strongly electronegative. This attracts lithium ions (Li+) at the PVDF-PZT interface to transport through dipolar channels and promotes the dissociation of lithium salts into free Li+. Consequently, the CPE enables homogeneous lithium plating and suppresses dendrite growth. Meanwhile, the PVDF-enriched region at the cathode side ensures intermediate contact with positive active materials. Therefore, Li/PVDF-PZT CPE/Li symmetrical cells exhibit a stable cycling performance exceeding 1900 h at 0.1 mA cm-2 at 25 °C, outperforming Li/PVDF solid-state electrolyte/Li cells that fail after 120 h. The LiNi0.8Co0.1Mo0.1O2/PVDF-PZT CPE/Li cells show low interfacial impedances and maintain stable cycling performance for 500 cycles with a capacity retention of 86.2% at 0.5 C and 25 °C. This study introduces a strategy utilizing dielectric ceramics to construct dipolar channels, providing a uniform Li+ transport mechanism and inhibiting dendrite growth.

Simplified Phenomenological Model for Ferroelectric Micro-Actuator

As smart structures are becoming increasingly ubiquitous in our daily life, the need for efficient modeling electromechanical coupling devices is also rapidly advancing. Smart structures are often made of piezoelectric materials such as lead zirconate titanate (PZT), which exhibits strong nonlinear behavior known as hysteresis effect under a large applied electric field. There have been numerous modeling techniques that are able to capture such an effect; some techniques are suitable for obtaining physical insights into the micro-structure of the material, while other techniques are better-suited to practical structural analyses. In this paper, we aim to achieve the latter. We propose a simplified phenomenological macroscopic model of a nonlinear ferroelectric actuator. The assumption is based on the direct relation between the irreversible strain and irreversible electric field, and the consequently irreversible polarization. The proposed model is then implemented in a finite element framework, in which the main features such as local return mapping and the tangent moduli are derived. The outcomes of the model are compared and validated with experimental data. Therefore, the development presented in this paper can be a useful tool for the modeling of nonlinear ferroelectric actuators.

A Graphene-Based Straintronic Physically Unclonable Function

Physically unclonable functions (PUFs) are an integral part of modern-day hardware security. Various types of PUFs already exist, including optical, electronic, and magnetic PUFs. Here, we introduce a novel straintronic PUF (SPUF) by exploiting strain-induced reversible cracking in the contact microstructures of graphene field-effect transistors (GFETs). We found that strain cycling in GFETs with a piezoelectric gate stack and high-tensile-strength metal contacts can lead to an abrupt transition in some GFET transfer characteristics, whereas other GFETs remain resilient to strain cycling. Strain sensitive GFETs show colossal ON/OFF current ratios >10⁷, whereas strain-resilient GFETs show ON/OFF current ratios <10. We fabricated a total of 25 SPUFs, each comprising 16 GFETs, and found near-ideal performance. SPUFs also demonstrated resilience to regression-based machine learning (ML) attacks in addition to supply voltage and temporal stability. Our findings highlight the opportunities for emerging straintronic devices in addressing some of the critical needs of the microelectronics industry.

Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array

This paper presents a fully addressable 8 × 8 two-dimensional (2D) rigid piezoelectric micromachined ultrasonic transducer (PMUT) array. The PMUTs were fabricated on a standard silicon wafer, resulting in a low-cost solution for ultrasound imaging. A polyimide layer is used as the passive layer in the PMUT membranes on top of the active piezoelectric layer. The PMUT membranes are realized by backside deep reactive ion etching (DRIE) with an oxide etch stop. The polyimide passive layer enables high resonance frequencies that can be easily tuned by controlling the thickness of the polyimide. The fabricated PMUT with 6 µm polyimide thickness showed a 3.2 MHz in-air frequency with a 3 nm/V sensitivity. The PMUT has shown an effective coupling coefficient of 14% as calculated from the impedance analysis. An approximately 1% interelement crosstalk between the PMUT elements in one array is observed, which is at least a five-fold reduction compared to the state of the art. A pressure response of 40 Pa/V at 5 mm was measured underwater using a hydrophone while exciting a single PMUT element. A single-pulse response captured using the hydrophone suggested a 70% -6 dB fractional bandwidth for the 1.7 MHz center frequency. The demonstrated results have the potential to enable imaging and sensing applications in shallow-depth regions, subject to some optimization.

A PCA-Based Approach for Very Early-Age Hydration Monitoring of Self-Compacting Concrete Using Embedded PZT Sensors

This work proposed a novel approach based on principal component analyses (PCAs) to monitor the very early-age hydration of self-compacting concrete (SCC) with varying replacement ratios of fly ash (FA) to cement at 0%, 15%, 30%, 45%, and 60%, respectively. Based on the conductance signatures obtained from electromechanical impedance (EMI) tests, the effect of the FA content on the very early-age hydration of SCCs was indicated by the predominant resonance shifts, the statistical metrics, and the contribution ratios of principal components, quantitatively. Among the three, the PCA-based approach not only provided robust indices to predict the setting times with physical implications but also captured the liquid-solid transition elongation (1.5 h) during the hydration of SCC specimens with increasing FA replacement ratios from 0% to 45%. The results demonstrated that the PCA-based approach was more accurate and robust for quantitative hydration monitoring than the conventional penetration resistance test and the other two counterpart indices based on EMI tests.

Enhancing Electromechanical Properties of PZT-Based Piezoelectric Ceramics by High-Temperature Poling for High-Power Applications

Defect engineering is a proven method to tune the properties of perovskite oxides. In demanding high-power piezoelectric ceramic applications, acceptor doping is the most effective method to harden ceramics, but it inevitably degrades the ceramics' electromechanical properties. Herein, a poling method based on acceptor doping, namely, high-temperature poling, is implemented by applying an electric field above the Curie temperature for poling to achieve a balance of the properties of piezoelectric coefficient d₃₃ and mechanical quality factor Q_m. After high-temperature poling, the piezoelectric property of 0.6 mol % Mn-doped Pb_0.92Sr_0.08(Zr_0.533Ti_0.443Nb_0.024)O₃ is d₃₃ = 483 pC/N and Q_m = 448. Compared with the traditional poling, the piezoelectric coefficient d₃₃ of the high-temperature poling ceramics increased by approximately 40%, and Q_m also increased by nearly 18%. Therefore, high d₃₃ and Q_m were exhibited by our PZT piezoelectric ceramics. Rayleigh's law analysis, XRD, and transmission electron microscopy analysis show that, after high-temperature poling, the considerably increased d₃₃ is related to the large increase in the reversible domain wall motion in the intrinsic effect, while the slightly increased Q_m is related to the inhibited irreversible domain wall motion in the extrinsic effect. This study reports a method for high-temperature poling and provides insights into the design of high-power piezoelectric ceramics with high d₃₃ and Q_m.

Laser Sintering of CNT/PZT Composite Film

The discovery of piezoelectricity inspired several sensing applications. For these applications, the thinness and flexibility of the device increase the range of implementations. A thin lead zirconate titanate (PZT) ceramic piezoelectric sensor is advantageous compared with bulk PZT or a polymer when it comes to having minimal impacts on dynamics and high-frequency bandwidth provided by low mass or high stiffness, while satisfying constraints regarding tight spaces. PZT devices have traditionally been thermally sintered inside a furnace and this process consumes large amounts of time and energy. To overcome such challenges, we employed laser sintering of PZT that focused the power onto selected areas of interest. Furthermore, non-equilibrium heating offers the opportunity to use low-melting-point substrates. Additionally, carbon nanotubes (CNTs) were mixed with PZT particles and laser sintered to utilize the high mechanical and thermal properties of CNTs. Laser processing was optimized for the control parameters, raw materials and deposition height. A multi-physics model of laser sintering was created to simulate the processing environment. Sintered films were obtained and electrically poled to enhance the piezoelectric property. The piezoelectric coefficient of laser-sintered PZT increased by approximately 10-fold compared with unsintered PZT. Moreover, CNT/PZT film displayed higher strength compared with PZT film without CNTs after the laser sintering while using less sintering energy. Thus, laser sintering can be effectively used to enhance the piezoelectric and mechanical properties of CNT/PZT films, which can be used in various sensing applications.

Development and Investigation of High-Temperature Ultrasonic Measurement Transducers Resistant to Multiple Heating-Cooling Cycles

Usually for non-destructive testing at high temperatures, ultrasonic transducers made of PZT and silver electrodes are used, but this could lead to damage to or malfunction of the ultrasonic transducer due to poor adhesion between PZT and silver. Soldering is one of the most common types of bonding used for individual parts of ultrasonic transducers (protector, backing, matching layer, etc.), but silver should be protected using additional metal layers (copper) due to its solubility in solder. A mathematical modelling could help to predict if an ultrasonic transducer was manufactured well and if it could operate up to 225 °C. The observed von Mises stresses were very high and concentrated in metal layers (silver and copper), which could lead to disbonding under long-term cyclic temperature loads. This paper presents a multilayer ultrasonic transducer (PZT, silver electrodes, copper layers, backing), which was heated evenly from room temperature to 225 °C and then cooled down. In the B-scan, it was observed that the amplitude of the reflected signal from the bottom of the sample decreased with an increase in temperature. However, after six heating-cooling cycles, the results repeated themselves and no signs of fatigue were noticed. This ultrasonic transducer was well manufactured and could be used for non-destructive testing when the environment temperature changes in cycles up to 225 °C.

Tiling the Silicon for Added Functionality: PLD Growth of Highly Crystalline STO and PZT on Graphene Oxide-Buffered Silicon Surface

The application of two-dimensional (2D) materials has alleviated a number of challenges of traditional epitaxy and pushed forward the integration of dissimilar materials. Besides acting as a seed layer for van der Waals epitaxy, the 2D materials─being atom(s) thick─have also enabled wetting transparency in which the potential field of the substrate, although partially screened, is still capable of imposing epitaxial overgrowth. One of the crucial steps in this technology is the preservation of the quality of 2D materials during and after their transfer to a substrate of interest. In the present study, we show that by honing the achievements of traditional epitaxy and wet chemistry a hybrid approach can be devised that offers a unique perspective for the integration of functional oxides with a silicon platform. It is based on SrO-assisted deoxidation and controllable coverage of silicon surface with a layer(s) of spin-coated graphene oxide, thus simultaneously allowing both direct and van der Waals epitaxy of SrTiO₃ (STO). We were able to grow a high-quality STO pseudo-substrate suitable for further overgrowth of functional oxides, such as PbZr_1-xTi_xO₃ (PZT). Given that the quality of the films grown on a reduced graphene oxide-buffer layer was almost identical to that obtained on SiC-derived graphene, we believe that this approach may provide new routes for direct and "remote" epitaxy or layer-transfer techniques of dissimilar material systems.

Response Surface Methodology Analysis of Energy Harvesting System over Pathway Tiles

This paper presents an experimental analysis of the optimization of PZT-based tiles for energy harvesting. The hardware (actual experiment), PZT-based tiles, were developed using 6 × 6 piezoelectric (PZT-lead zirconate titanate) sensors of 40 mm in diameter on a hard cardboard sheet (300 × 300 mm²). Our experimental analysis of the designed tiles obtained an optimized power of 3.626 mW (85 kg or 0.83 kN using 36 sensors) for one footstep and 0.9 mW for 30 footsteps at high tapping frequency. Theoretical analysis was conducted with software (Design-Expert) using the response surface methodology (RSM) for optimized PZT tiles, obtaining a power of 6784.155 mW at 150 kg or 1.47 kN weight using 34 sensors. This software helped to formulate the mathematical equation for the most suitable PZT tile model for power optimization. It used the quadratic model to provide adjusted and predicted R2 values of 0.9916 and 0.9650, respectively. The values were less than 0.2 apart, which indicates a high correlation between the actual and predicted values. The outcome of the various experiments can help with the selection of input factors for optimized power during pavement design.

Microwave Electrodynamic Study on Antiferroelectric Materials in a Wide Temperature Range

The electrodynamic properties of lead zirconate titanate ceramic solid solutions, exhibiting ferro-antiferroelectric phase transition, are investigated at microwave frequencies in a wide temperature range. Significant changes in the electrodynamic response are found, presumably associated with structural rearrangements accompanying the sequence of phase transitions between para-, ferro-, and antiferroelectric states. The phenomena observed in the experiments are considered under conditions of changing temperature and concentrations of the components; several independent measurement techniques were used for their unambiguous identification.

Temperature Stable Piezoelectric Imprint of Epitaxial Grown PZT for Zero-Bias Driving MEMS Actuator Operation

In piezoelectric transducer applications, it is common to use a unipolar operation signal to avoid switching of the polarisation and the resulting nonlinearities of micro-electromechanical systems. However, semi-bipolar or bipolar operation signals have the advantages of less leakage current, lower power consumption and no additional need of a DC-DC converter for low AC driving voltages. This study investigates the potential of using piezoelectric layers with an imprint for stable bipolar operation on the basis of epitaxially grown lead zirconate titanate cantilevers with electrodes made of a metal and metal oxide stack. Due to the manufacturing process, the samples exhibit high crystallinity, rectangular shaped hysteresis and a high piezoelectric response. Furthermore, the piezoelectric layers have an imprint, indicating a strong built-in field, which shifts the polarisation versus electric field hysteresis. To obtain the stability of the imprint, laser doppler vibrometry and switching current measurements were performed at different temperatures, yielding a stable imprinted electric field of -1.83 MV/m up to at least 100 °C. The deflection of the cantilevers was measured with a constant AC driving voltage while varying the DC bias voltage to examine the influence of the imprint under operation, revealing that the same high deflection and low nonlinearities, quantified by the total harmonic distortion, can be maintained down to low bias voltages compared to unipolar operation. These findings demonstrate that a piezoelectric layer with a strong imprint makes it possible to operate with low DC or even zero DC bias, while still providing strong piezoelectric response and linear behaviour.

Design and Performance Research of a Precision Micro-Drive Reduction System without Additional Motion

A micro-drive system is a key part of macro-micro-drive technology and precision positioning technology in which a micro-drive reduction system can provide more precise motion and suitable small space motion. Therefore, it is necessary to study precision micro-drive reduction systems. In this paper, based on the design of a micro-drive reduction mechanism without force and displacement in non-motion direction, a precision micro-drive reduction system driven by a piezoelectric ceramic actuator (PZT) was designed, and the strength, dynamic and motion performance of the system was analyzed. First, based on the principle of a flexure hinge lever and the principle of balanced additional force, a type of precision micro-drive reduction mechanism with an adjustable reduction ratio was designed. Second, the strength performance of the system was analyzed by finite element analysis, and the dynamic performance of the system was analyzed by finite element analysis and experiments. Finally, the kinematic performance of the system was analyzed by theoretical analysis, the finite element method and experiment, and the motion linear equation was calculated based on the linear fitting equations of three methods. The study results showed that the system had good strength and dynamic performances, and the system's motion had the advantages of high precision and good linearity. This research has certain reference value for the design and performance research of micro-drive mechanisms.

Damage Monitoring of Engineered Cementitious Composite Beams Reinforced with Hybrid Bars Using Piezoceramic-Based Smart Aggregates

In order to explore the crack development mechanism and damage self-repairing capacity of ECC beams reinforced with hybrid bars, the smart aggregate-based active sensing approach were herein adopted to conduct damage monitoring of ECC beams under cyclic loading. A total of six beams, including five engineered cementitious composite (ECC) beams reinforced with different bars and one reinforcement concrete counterpart, were fabricated and tested under cyclic loading. The ultimate failure modes and hysteresis curves were obtained and discussed herein, demonstrating the multiple crack behavior and excellent ductility of ECC material. The damage of the tested beams was monitored by smart aggregate-based (SA) active sensing method, in which two SAs pasted on both beam ends were used as actuator and sensor, respectively. The time domain analysis, wavelet packet-based energy analysis and wavelet packet-based damage index analysis were performed to quantitatively evaluate the crack development. To evaluate the self-repairing capacity of the beams, a self-repairing index defined by the difference of damage index at loading and unloading peak points was proposed. The results in time domain and wavelet packed analysis were in close agreement with the observed crack development, revealing the feasibility of smart aggregate-based active sensing approach in damage detection for ECC beams. Especially, the proposed damage self-repairing index can describe the same structural re-centering phenomena with the test results, showing the proposed index can be used to evaluate the damage self-repairing capacity.

On Mechanical and Electrical Coupling Determination at Piezoelectric Harvester by Customized Algorithm Modeling and Measurable Properties

Piezoelectric harvesters use the actuation potential of the piezoelectric material to transform mechanical and vibrational energies into electrical power, scavenging energy from their environment. Few research has been focused on the development and understanding of the piezoelectric harvesters from the material themselves and the real piezoelectric and mechanical properties of the harvester. In the present work, the authors propose a behavior real model based on the experimentally measured electromechanical parameters of a homemade PZT bimorph harvester with the aim to predict its V_rms output. To adjust the harvester behavior, an iterative customized algorithm has been developed in order to adapt the electromechanical coupling coefficient, finding the relationship between the harvester actuator and generator behavior. It has been demonstrated that the harvester adapts its elongation and its piezoelectric coefficients combining the effect of the applied mechanical strain and the electrical behavior as a more realistic behavior due to the electromechanical nature of the material. The complex rms voltage output of the homemade bimorph harvester in the frequency domain has been successfully reproduced by the proposed model. The Behavior Real Model, BRM, developed could become a powerful tool for the design and manufacturing of a piezoelectric harvester based on its customized dimensions, configuration, and the piezoelectric properties of the smart materials.

Piezoelectric Nanogenerator for Highly Sensitive and Synchronous Multi-Stimuli Sensing

Smart sensors are expected to be sustainable, stretchable, biocomfortable, and tactile over time, either in terms of mechanical performance, reconfigurability, or energy supply. Here, a biocompatible piezoelectric electronic skin (PENG) is demonstrated on the base of PZT-SEBS (lead zirconate titanate and styrene ethylene butylene styrene) composite elastomer. The highly elastic (with an elasticity of about 950%) PENG can not only harvest mechanical energy from ambient environment, but also show low toxicity and excellent sensing performance toward multiple external stimuli. The synchronous and independent sensing performance toward motion capture, temperature, voice identification, and especially the dual-dimensional force perception promotes its wide application in physiological, sound restoration, and other intelligent systems.

Total Harmonic Distortion of a Piezoelectric MEMS Loudspeaker in an IEC 60318-4 Coupler Estimation Using Static Measurements and a Nonlinear State Space Model

We propose a method to evaluate the Total Harmonic Distortion generated by a cantilever-based PZT loudspeaker inside an IEC 60318-4 coupler. The model is validated using experimental data of a commercial loudspeaker. Using the time domain equations of the equivalent electrical circuit of the loudspeaker inside the coupler and a state space formulation, the acoustic pressure response is calculated and compared to the measurement of the manufacturer. Next, the stiffness, transduction and capacitance nonlinear functions are evaluated with a Double-Beam Laser Interferometer (DBLI) and a nanoindenter on test devices and on the commercial loudspeaker. By introducing the nonlinear functions into the model as amplitude-dependent parameters, the THD generated by the loudspeaker is calculated and compared to the value provided by the manufacturer. The good agreement between the measurement and the simulation could allow for a rather quick simulation of the performance of similarly designed loudspeakers at the early stage of the design, by only estimating the static linearity of the main nonlinearity sources.

3D-Printed Liquid Cell Resonator with Piezoelectric Actuation for In-Line Density-Viscosity Measurements

The in-line monitoring of liquid properties, such as density and viscosity, is a key process in many industrial areas such as agro-food, automotive or biotechnology, requiring real-time automation, low-cost and miniaturization, while maintaining a level of accuracy and resolution comparable to benchtop instruments. In this paper, 3D-printed cuboid-shaped liquid cells featuring a rectangular vibrating plate in one of the sides, actuated by PZT piezoelectric layers, were designed, fabricated and tested. The device was resonantly excited in the 3rd-order roof tile-shaped vibration mode of the plate and validated as a density-viscosity sensor. Furthermore, conditioning circuits were designed to adapt the impedance of the resonator and to cancel parasitic effects. This allowed us to implement a phase-locked loop-based oscillator circuit whose oscillation frequency and voltage amplitude could be calibrated against density and viscosity of the liquid flowing through the cell. To demonstrate the performance, the sensor was calibrated with a set of artificial model solutions of grape must, representing stages of a wine fermentation process. Our results demonstrate the high potential of the low-cost sensor to detect the decrease in sugar and the increase in ethanol concentrations during a grape must fermentation, with a resolution of 10 µg/mL and 3 µPa·s as upper limits for the density and viscosity, respectively.

Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy

The importance of high dielectric constant materials in the development of high frequency nano-electronic devices is undeniable. Their polarization properties are directly dependent on the value of their relative permittivity. We report here on the nanoscale metrological quantification of the dielectric constants of two high-κ materials, lead zirconate titanate (PZT) and lead magnesium niobate-lead titanate (PMN-PT), in the GHz range using scanning microwave microscopy (SMM). We demonstrate the importance of the capacitance calibration procedure and dimensional measurements on the weight of the combined relative uncertainties. A novel approach is proposed to correct lateral dimension measurements of micro-capacitive structures using the microwave electrical signatures, especially for rough surfaces of high-κ materials. A new analytical expression is also given for the capacitance calculations, taking into account the contribution of fringing electric fields. We determine the dielectric constant values εPZT = 445 and εPMN-PT = 641 at the frequency around 3.6 GHz, with combined relative uncertainties of 3.5% and 6.9% for PZT and PMN-PT, respectively. This work provides a general description of the metrological path for a quantified measurement of high dielectric constants with well-controlled low uncertainty levels.

Investigation of Electromechanical Properties on 3-D Printed Piezoelectric Composite Scaffold Structures

Piezoelectric composites with 3-3 connectivity gathered attraction due to their potential application as an acoustic transducer in medical imaging, non-destructive testing, etc. In this contribution, piezoelectric composites were fabricated with a material extrusion-based additive manufacturing process (MEX), also well-known under the names fused deposition modeling (FDM), fused filament fabrication (FFF) or fused deposition ceramics (FDC). Thermoplastic filaments were used to achieve open and offset printed piezoelectric scaffold structures. Both scaffold structures were printed, debinded and sintered successfully using commercial PZT and BaTiO₃ powder. For the first time, it could be demonstrated, that using the MEX processing method, closed pore ferroelectric structure can be achieved without pore-former additive. After ceramic processing, the PZT scaffold structures were impregnated with epoxy resin to convert them into composites with 3-3 connectivity. A series of composites with varying ceramic content were achieved by changing the infill parameter during the 3D printing process systematically, and their electromechanical properties were investigated using the electromechanical aix PES device. Also, the Figure of merit (FOM) of these composites was calculated to assess the potential of this material as a candidate for transducer applications. A maximum for the FOM at 25 vol.% of PZT could be observed in this study.

Monitoring Electrical Biasing of Pb(Zr0.2Ti0.8)O3 Ferroelectric Thin Films In Situ by DPC-STEM Imaging

Increased data storage densities are required for the next generation of nonvolatile random access memories and data storage devices based on ferroelectric materials. Yet, with intensified miniaturization, these devices face a loss of their ferroelectric properties. Therefore, a full microscopic understanding of the impact of the nanoscale defects on the ferroelectric switching dynamics is crucial. However, collecting real-time data at the atomic and nanoscale remains very challenging. In this work, we explore the ferroelectric response of a Pb(Zr0.2Ti0.8)O3 thin film ferroelectric capacitor to electrical biasing in situ in the transmission electron microscope. Using a combination of high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) and differential phase contrast (DPC)-STEM imaging we unveil the structural and polarization state of the ferroelectric thin film, integrated into a capacitor architecture, before and during biasing. Thus, we can correlate real-time changes in the DPC signal with the presence of misfit dislocations and ferroelastic domains. A reduction in the domain wall velocity of 24% is measured in defective regions of the film when compared to predominantly defect-free regions.

Measurement of the temperature-dependent output of lead zirconate titanate transducers

The effect of temperature and electrical drive conditions on the output of lead zirconate titanate (PZT) transducers is of particular interest in ultrasound metrology and medical ultrasound applications. In this work, the temperature-dependent output of two single-element PZT transducers was measured between 22 °C and 46 °C. Two independent measurement methods were used, namely radiation force balance measurements and laser vibrometry. When driven at constant voltage using a 50 Ω matched signal generator and amplifier using continuous wave (CW) or quasi-CW excitation, the output of the two transducers increased on average by 0.6 % per degree, largely due to an increase in transducer efficiency with temperature. The two measurement methods showed close agreement. Similar trends were observed when using single cycle excitation with the same signal chain. However, when driven using a pulser (which is not electrically matched), the two transducers exhibited different behaviour depending on their electrical impedance. Accounting for the temperature-dependent output of PZT transducers could have implications for many areas of ultrasound metrology, for example, in therapeutic ultrasound where a coupling fluid at an increased or decreased temperature is often used.

A Seismic Data Acquisition System Based on Wireless Network Transmission

A seismic data acquisition system based on wireless network transmission is designed to improve the low-frequency response and low sensitivity of the existing acquisition system. The system comprises of a piezoelectric transducer, a high-resolution data acquisition system, and a wireless communication module. A seismic piezoelectric transducer based on a piezoelectric simply supported beam using PMN-PT is proposed. High sensitivity is obtained by using a new piezoelectric material PMN-PT, and a simply supported beam matching with the PMN-PT wafer is designed, which can provide a good low-frequency response. The data acquisition system includes an electronic circuit for charge conversion, filtering, and amplification, an FPGA, and a 24-bit analog-to-digital converter (ADC). The wireless communication was based on the ZigBee modules and the WiFi modules. The experimental results show that the application of the piezoelectric simply supported beam based on PMN-PT can effectively improve the sensitivity of the piezoelectric accelerometer by more than 190%, compared with the traditional PZT material. At low frequencies, the fidelity of the PMN-PT piezoelectric simply supported beam is better than that of a traditional central compressed model, which is an effective expansion of the bandwidth to the low-frequency region. The charge conversion, filtering, amplification, and digitization of the output signal of the piezoelectric transducer are processed and, finally, are wirelessly transmitted to the monitoring centre, achieving the design of a seismic data acquisition system based on wireless transmission.

Optimum PZT Patch Size for Corrosion Detection in Reinforced Concrete Using the Electromechanical Impedance Technique

This paper proposes the use of a 1-dimensional (1-D) electromechanical impedance model to extract proper design guidelines when selecting patch-size and frequency range for corrosion detection in reinforced concrete structures using the electromechanical impedance (EMI) technique. The theoretical results show that the sensitivity mainly lies in the peak frequencies of the impedance spectrum, while outside resonant frequencies the sensitivity levels are low, and are prone to natural variation. If the mechanical impedance ratio between the host structure and patch is too large, the peaks and thereby the sensitivity decreases. This can be counteracted by increasing the patch thickness. Tests were carried out in reinforced concrete structures, where lead zirconate titanate (PZT) patches were attached to the rebars. Patches measuring 10 × 10 mm in length and width, with thicknesses of 0.3, 0.5 and 1.5 mm, were used. The results show that only the 10 × 10 × 1.5 mm patch, was able to generate a clear peak in the 50 kHz to 400 kHz impedance spectrum. Furthermore, a reinforced concrete structure with the 1.5 mm patch attached was induced significant corrosion damages, resulting in cracking of the structure. Due to this, a leftward shift of the main peak, and creation of new peaks in the spectrum was observed.

Data-Driven Optimization of Piezoelectric Energy Harvesters via Pattern Search Algorithm

A data-driven optimization strategy based on a generalized pattern search (GPS) algorithm is proposed to automatically optimize piezoelectric energy harvesters (PEHs). As a direct search method, GPS can iteratively solve the derivative-free optimization problem. Taking the finite element method (FEM) as the solver and the GPS algorithm as the optimizer, the automatic interaction between the solver and optimizer ensures optimization with minimum human efforts, saving designers’ time and performing a more precise exploration in the parameter space to obtain better results. When employing it for the optimization of PEHs, the optimal length and thickness of PZT were 6.0 mm and 4.6 µm, respectively. Compared with reported high-output PEHs, this optimal structure showed an increase of 371% in output power, an improvement by 1000% in normalized power density, and a reduction of 254% in resonant frequency. Furthermore, Spearman’s rank correlation coefficient was calculated for evaluating the correlation among geometric parameters and output performance such as resonant frequency and output power, which provides a data-based perspective on the design and optimization of PEHs.

Optical Voltage Transformer Based on FBG-PZT for Power Quality Measurement

Optical Current Transformers (OCTs) and Optical Voltage Transformers (OVTs) are an alternative to the conventional transformers for protection and metering purposes with a much smaller footprint and weight. Their advantages were widely discussed in scientific and technical literature and commercial applications based on the well-known Faraday and Pockels effect. However, the literature is still scarce in studies evaluating the use of optical transformers for power quality purposes, an important issue of power system designed to analyze the various phenomena that cause power quality disturbances. In this paper, we constructed a temperature-independent prototype of an optical voltage transformer based on fiber Bragg grating (FBG) and piezoelectric ceramics (PZT), adequate to be used in field surveys at 13.8 kV distribution lines. The OVT was tested under several disturbances defined in IEEE standards that can occur in the electrical power system, especially short-duration voltage variations such as SAG, SWELL, and INTERRUPTION. The results demonstrated that the proposed OVT presents a dynamic response capable of satisfactorily measuring such disturbances and that it can be used as a power quality monitor for a 13.8 kV distribution system. Test on the proposed system concluded that it was capable to reproduce up to the 41st harmonic without significative distortion and impulsive surges up to 2.5 kHz. As an advantage, when compared with conventional systems to monitor power quality, the prototype can be remote-monitored, and therefore, be installed at strategic locations on distribution lines to be monitored kilometers away, without the need to be electrically powered.

Dual Piezoelectric Energy Investing and Harvesting Interface for High-Voltage Input

A novel harvesting interface for multiple piezoelectric transducers (PZTs) is proposed for high-voltage energy harvesting. Pre-biasing a PZT prior to its mechanical deformation increases its damping force, resulting in higher energy extraction. Unlike the conventional harvesters where a PZT-generated output is assumed to be continuous sinusoidal and output polarity is assumed to be alternating every cycle, PZT-generated output from human motion is expected to be random. Therefore, in the proposed approach, energy is invested to the PZT only when PZT deformation is detected. Upon the motion detection, energy stored at a storage capacitor (C_STOR) from earlier energy harvesting cycle is invested to pre-bias PZT, enhancing energy extraction. The harvested energy is transferred to back C_STOR for energy investment on the next cycle and then excess energy is transferred to the battery. In addition, partial electric charge extraction (PECE) is adapted to extract a partial amount of charges from the PZT every time its voltage approaches the process limit of 40 V. Simulations with 0.35 µm BCD process show 7.61× (with PECE only) and 8.38× (with PECE and energy investment) improvement compared to the conventional rectifier-based harvesting scheme Proposed harvesting interface successfully harvests energy from excitations with open-circuit voltages up to 100 V.

Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic beams for medical imaging. However, PMUT arrays have so far failed to combine the wide, high-frequency bandwidth needed to achieve a high axial resolution. In this paper, a polydimethylsiloxane (PDMS) backing structure is introduced into the PMUTs to improve the device bandwidth while keeping a sub-wavelength (λ) pitch. We implement this backing on a 16 × 8 array with 75 µm pitch (3λ/4) with a 15 MHz working frequency. Adding the backing nearly doubles the bandwidth to 92% (−6 dB) and has little influence on the impulse response sensitivity. By widening the transducer bandwidth, this backing may enable using PMUT ultrasonic arrays for high-resolution 3D imaging.

Design and Integration of a Wireless Stretchable Multimodal Sensor Network in a Composite Wing

This article presents the development of a stretchable sensor network with high signal-to-noise ratio and measurement accuracy for real-time distributed sensing and remote monitoring. The described sensor network was designed as an island-and-serpentine type network comprising a grid of sensor “islands” connected by interconnecting “serpentines.” A novel high-yield manufacturing process was developed to fabricate networks on recyclable 4-inch wafers at a low cost. The resulting stretched sensor network has 17 distributed and functionalized sensing nodes with low tolerance and high resolution. The sensor network includes Piezoelectric (PZT), Strain Gauge (SG), and Resistive Temperature Detector (RTD) sensors. The design and development of a flexible frame with signal conditioning, data acquisition, and wireless data transmission electronics for the stretchable sensor network are also presented. The primary purpose of the frame subsystem is to convert sensor signals into meaningful data, which are displayed in real-time for an end-user to view and analyze. The challenges and demonstrated successes in developing this new system are demonstrated, including (a) developing separate signal conditioning circuitry and components for all three sensor types (b) enabling simultaneous sampling for PZT sensors for impact detection and (c) configuration of firmware/software for correct system operation. The network was expanded with an in-house developed automated stretch machine to expand it to cover the desired area. The released and stretched network was laminated into an aerospace composite wing with edge-mount electronics for signal conditioning, processing, power, and wireless communication.

Sensing of Damage and Repair of Cement Mortar Using Electromechanical Impedance

Lead zirconium titanate (PZT) has recently emerged as a low-cost material for non-destructive monitoring for civil structures. Despite the numerous studies employing PZT transducers for structural health monitoring, no studies have assessed the effects of both damage and repair on the electromechanical impedance response in cementitious materials. To this end, this study was conducted to assess the effects of the damage and repair of mortar samples on the electromechanical response of a surface-mounted PZT transducer. When damage was introduced to the specimen in stages, the resonance frequencies of the admittance signature were shifted to lower frequencies as the damage increased, and an increase in the peak amplitude was detected, indicating an increase in the damping and a reduction in the material stiffness properties. Also, increasing the damage in the material has been shown to decrease the sensitivity of the PZT to further damage. During the repair process, a noticeable difference between the after-damage and the after-repair admittance signatures was noted. The root-mean-square deviation (RMSD) showed a decreasing trend during the repair process, when compared to the before repair RMSD response which indicated a partial recovery for the material properties by decreasing the damping property in the material.

Thickness Dependence of Ferroelectric and Optical Properties in Pb(Zr0.53Ti0.47)O3 Thin Films

As a promising functional material, ferroelectric Pb(Zr_xTi_1−x)O₃ (PZT) are widely used in many optical and electronic devices. Remarkably, as the film thickness decreases, the materials’ properties deviate gradually from those of solid materials. In this work, multilayered PZT thin films with different thicknesses are fabricated by Sol-Gel technique. The thickness effect on its microstructure, ferroelectric, and optical properties has been studied. It is found that the surface quality and the crystalline structure vary with the film thickness. Moreover, the increasing film thickness results in a significant increase in remnant polarization, due to the interfacial layer effect. Meanwhile, the dielectric loss and tunability are strongly dependent on thickness. In terms of optical properties, the refractive index of PZT films increase with the increasing thickness, and the photorefractive effect are also influenced by the thickness, which could all be related to the film density and photovoltaic effect. Besides, the band gap decreases as the film thickness increases. This work is significant for the application of PZT thin film in optical and optoelectronic devices.

Microstructure and Properties of PZT Films with Different PbO Content-Ionic Mechanism of Built-In Fields Formation

Experimental studies were conducted on the effects of lead oxide on the microstructure and the ferroelectric properties of lead zirconate-titanate (PZT) films obtained by the method of radio frequency (RF) magnetron sputtering of a ceramic PZT target and PbO₂ powder with subsequent heat treatment. It is shown that the change in ferroelectric properties of polycrystalline PZT films is attributable to their heterophase structure with impurities of lead oxide. It is also shown that, even in the original stoichiometric PZT film, under certain conditions (temperature above 580 °C, duration greater than 70 min), impurities of lead oxide may be formed. The presence of a sublayer of lead oxide leads to a denser formation of crystallization centers of the perovskite phase, resulting in a reduction of the grain size as well as the emergence of a charge on the lower interface. The formation of the perovskite structure under high-temperature annealing is accompanied by the diffusion of lead into the surface of the film. Also shown is the effect of the lead ions segregation on the formation of the self-polarized state of thin PZT films.

Oxide Heteroepitaxy-Based Flexible Ferroelectric Transistor

With the rise of Internet of Things, the presence of flexible devices has attracted significant attention owing to design flexibility. A ferroelectric field-effect transistor (FeFET), showing the advantages of high speed, nondestructive readout, and low-power consumption, plays a key role in next-generation technology. However, the performance of these devices is restricted since conventional flexible substrates show poor thermal stability to integrate traditional ferroelectric materials, limiting the compatibility of wearable devices. In this study, we adopt flexible muscovite mica as a substrate due to its good thermal properties and epitaxial integration ability. A flexible FeFET composed of oxide heteroepitaxy on muscovite is realized by combining an aluminum-doped zinc oxide film as the semiconductor channel layer and a Pb(Zr_0.7Ti_0.3)O₃ film as the ferroelectric gate dielectric. The excellent characteristics of the transistor together with superior thermal stability and mechanical flexibility are demonstrated through various mechanical bending and temperature measurements. The on/off current ratio of the FeFET is higher than 10³, which based on the field effect in the transfer curve. The smallest bending radius that can be achieved is 5 mm with a cyclability of 300 times and a retention of 100 h. This study opens an avenue to use oxide heteroepitaxy to construct a FeFET for next-generation flexible electronic systems.

Modeling, Simulation, Experimentation, and Compensation of Temperature Effect in Impedance-Based SHM Systems Applied to Steel Pipes

Pipelines have been widely used for the transportation of chemical products, mainly those related to the petroleum industry. Damage in such pipelines can produce leakage with unpredictable consequences to the environment. There are different structural health monitoring (SHM) systems such as Lamb wave, comparative vacuum, acoustic emission, etc. for monitoring such structures. However, those based on piezoelectric sensors and electromechanical impedance technique (EMI) measurements are simple and efficient, and have been applied in a wide range of structures, including pipes. A disadvantage of such technique is that temperature changes can lead to false diagnoses. To overcome this disadvantage, temperature variation compensation techniques are normally incorporated. Therefore, this work has developed a complete study applied to damage detection in pipelines, including an innovative technique for compensating the temperature effect in EMI-based SHM and the modeling of piezoceramics bonded to pipeline structures using finite elements. Experimental results were used to validate the model. Moreover, the compensation method was tested in two steel pipes-healthy and damaged-compensating the temperature effect ranging from -40 °C to +80 °C, with analysis on the frequency range from 5 kHz to 120 kHz. The simulated and experimental results showed that the studies effectively contribute to the SHM area, mainly to EMI-based techniques.

A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers

Lead zirconate titanate (PZT) has wide applications in microelectromechanical systems (MEMS) due to its large piezoelectric coefficients. However, there exist serious issues during PZT wet etching even with multiple etching steps, such as residues on etching fronts and large undercut. In this paper, a one-step residue-free wet etching process of ceramic PZT is developed with fluoroboric acid. In this work, the design of experiments (DOE) method is employed to minimize undercut and residues without sacrificing etching rate. The acid concentration, temperature, and agitation are the process parameters considered in the DOE. Through DOE analysis of the experimental data, an optimal recipe is identified as the volume ratio of HBF₄:H₂O=1:10 at 23 °C. This new PZT etching recipe leads to a high etching rate (1.54 μm/min) with no observable residues and a small undercut (0.78:1) as well as a high selectivity over the photoresist (900:1). This etching recipe can be used for making various piezoelectric transducers.

A Microscale Linear Phased-Array Ultrasonic Transducer Based on PZT Ceramics

In this paper, a microscale high-frequency ultrasonic transducer was prepared by combining traditional planar ultrasonic phased-array technology and micro processing technology. The piezoelectric ceramic material PZT was used as the functional material of the transducer. The number of the arrays was 72, the width of each array was 50 μm, the pitch of each array was 70 μm, and the length of each array was 3 mm. The PZT chip was finely ground to a thickness of 130 μm and could reach a frequency of 10 MHz. The experimental platform of micron-scale precision was set up for a beam-forming lateral sound field test and imaging experiment to validate the theoretical analysis. The echo imaging test showed that a mold with a feature size of about 400 μm could be imaged well.

Resonating Shell: A Spherical-Omnidirectional Ultrasound Transducer for Underwater Sensor Networks

This paper presents the design and fabrication process of a spherical-omnidirectional ultrasound transducer for underwater sensor network applications. The transducer is based on the vibration of two hemispheres with a thickness of 1 mm and an outer diameter of 10 mm, which are actuated by two piezoelectric ring elements. Since the ultrasound wave is generated by the vibration of the two hemispheres, a matching layer is not required. Silicon Carbide (SiC) is used as the material of the hemispherical shells of the transducer. The shells were fabricated by laser sintering as an additive manufacturing method, in which the hemispheres were built layer by layer from a powder bed. All manufactured transducers with an outer dimension of 10×14.2 mm and a center frequency of 155 kHz were measured in a water tank by a hydrophone or in mutual communication. The circumferential source level was measured to vary less than 5dB. The power consumption and the insertion loss of the transducer, ranging from 100 μW to 2.4 mW and 21.2 dB, respectively, along with all other measurements, prove that the transducer can transmit and receive ultrasound waves omnidirectionally at tens of centimeters intervals with a decent power consumption and low actuation voltage.

Highly-Loaded Thermoplastic Polyurethane/Lead Zirconate Titanate Composite Foams with Low Permittivity Fabricated using Expandable Microspheres

The sensitivity enhancement of piezocomposites can realize new applications. Introducing a cellular structure into these materials decreases the permittivity and thus increases their sensitivity. However, foaming of piezocomposites is challenging because of the high piezoceramic loading required. In this work, heat-expandable microspheres were used to fabricate thermoplastic polyurethane (TPU)/lead zirconate titanate (PZT) composite foams with a wide range of PZT content (0 vol % to 40 vol %) and expansion ratio (1–4). The microstructure, thermal behavior, and dielectric properties of the foams were investigated. Composite foams exhibited a fine dispersion of PZT particles in the solid phase and a uniform cellular structure with cell sizes of 50–100 μm; cell size decreased with an increase in the PZT content. The total crystallinity of the composites was also decreased as the foaming degree increased. The results showed that the relative permittivity (ε_r) can be effectively decreased by an increase in the expansion ratio. A maximum of 7.7 times decrease in ε_r was obtained. An extended Yamada model to a three-phase system was also established and compared against the experimental results with a relatively good agreement. This work demonstrates a method to foam highly loaded piezocomposites with a potential to enhance the voltage sensitivity.

Dressing Tool Condition Monitoring through Impedance-Based Sensors: Part 1-PZT Diaphragm Transducer Response and EMI Sensing Technique

Low-cost piezoelectric lead zirconate titanate (PZT) diaphragm transducers have attracted increasing attention as effective sensing devices, based on the electromechanical impedance (EMI) principle, for applications in many engineering sectors. Due to the considerable potential of PZT diaphragm transducers in terms of excellent electromechanical coupling properties, low implementation cost and wide-band frequency response, this technique provides a new alternative approach for tool condition monitoring in grinding processes competing with the conventional and expensive indirect sensor monitoring methods. This paper aims at assessing the structural changes caused by wear in single-point dressers during their lifetime, in order to ensure the reliable monitoring of the tool condition during dressing operations. Experimental dressing tests were conducted on aluminum oxide grinding wheels, which are highly relevant for industrial grinding processes. From the results obtained, it was verified that the dresser tip diamond material and the position of the PZT diaphragm transducer mounted on the dressing tool holder have a significant effect on the sensitivity of damage detection. This paper contributes to the realization of an effective monitoring system of dressing operations capable to avoid catastrophic tool failures as the proposed sensing approach can identify different stages of the dressing tool lifetime based on representative damage indices.

A Simple Wireless Sensor Node System for Electricity Monitoring Applications: Design, Integration, and Testing with Different Piezoelectric Energy Harvesters

Real time electricity monitoring is critical to enable intelligent and customized energy management for users in residential, educational, and commercial buildings. This paper presents the design, integration, and testing of a simple, self-contained, low-power, non-invasive system at low cost applicable for such purpose. The system is powered by piezoelectric energy harvesters (EHs) based on PZT and includes a microcontroller unit (MCU) and a central hub. Real-time information regarding the electricity consumption is measured and communicated by the system, which ultimately offers a dependable and promising solution as a wireless sensor node. The dynamic power management ensures the system to work with different types of PZT EHs at a wide range of input power. Thus, the system is robust against fluctuation of the current in the electricity grid and requires minimum adjustment if EH unit requires exchange or upgrade. Experimental results demonstrate that this unit is in a position to read and transmit 60 Hz alternating current (AC) sensor signals with a high accuracy no less than 91.4%. The system is able to achieve an operation duty cycle from <1 min up to 18 min when the current in an electric wire varies from 7.6 A to 30 A, depending on the characteristics of different EHs and intensity of current being monitored.