High fill-factor miniaturized SPAD arrays with a guard-ring-sharing technique

A 3.06 μm Single-Photon Avalanche Diode Pixel with Embedded Metal Contact and Power Grid on Deep Trench Pixel Isolation for High-Resolution Photon Counting

In this study, a 3.06 μm pitch single-photon avalanche diode (SPAD) pixel with an embedded metal contact and power grid on two-step deep trench isolation in the pixel is presented. The embedded metal contact can suppress edge breakdown and reduce the dark count rate to 15.8 cps with the optimized potential design. The embedded metal for the contact is also used as an optical shield and a low crosstalk probability of 0.4% is achieved, while the photon detection efficiency is as high as 57%. In addition, the integration of a power grid and the polysilicon resistor on SPAD pixels can help to reduce the voltage drop in anode power supply and reduce the power consumption with SPAD multiplication, respectively, in a large SPAD pixel array for a high-resolution photon-counting image sensor.

Challenges and prospects for multi-chip microlens imprints on front-side illuminated SPAD imagers

The overall sensitivity of frontside-illuminated, silicon single-photon avalanche diode (SPAD) arrays has often suffered from fill factor limitations. The fill factor loss can however be recovered by employing microlenses, whereby the challenges specific to SPAD arrays are represented by large pixel pitch (> 10 µm), low native fill factor (as low as ∼10%), and large size (up to 10 mm). In this work we report on the implementation of refractive microlenses by means of photoresist masters, used to fabricate molds for imprints of UV curable hybrid polymers deposited on SPAD arrays. Replications were successfully carried out for the first time, to the best of our knowledge, at wafer reticle level on different designs in the same technology and on single large SPAD arrays with very thin residual layers (∼10 µm), as needed for better efficiency at higher numerical aperture (NA > 0.25). In general, concentration factors within 15-20% of the simulation results were obtained for the smaller arrays (32×32 and 512×1), achieving for example an effective fill factor of 75.6-83.2% for a 28.5 µm pixel pitch with a native fill factor of 28%. A concentration factor up to 4.2 was measured on large 512×512 arrays with a pixel pitch of 16.38 µm and a native fill factor of 10.5%, whereas improved simulation tools could give a better estimate of the actual concentration factor. Spectral measurements were also carried out, resulting in good and uniform transmission in the visible and NIR.

Avalanche Photodiodes and Silicon Photomultipliers of Non-Planar Designs

Conventional designs of an avalanche photodiode (APD) have been based on a planar p-n junction since the 1960s. APD developments have been driven by the necessity to provide a uniform electric field over the active junction area and to prevent edge breakdown by special measures. Most modern silicon photomultipliers (SiPM) are designed as an array of Geiger-mode APD cells based on planar p-n junctions. However, the planar design faces an inherent trade-off between photon detection efficiency and dynamic range due to loss of an active area at the cell edges. Non-planar designs of APDs and SiPMs have also been known since the development of spherical APDs (1968), metal-resistor-semiconductor APDs (1989), and micro-well APDs (2005). The recent development of tip avalanche photodiodes (2020) based on the spherical p-n junction eliminates the trade-off, outperforms the planar SiPMs in the photon detection efficiency, and opens new opportunities for SiPM improvements. Furthermore, the latest developments in APDs based on electric field-line crowding and charge-focusing topology with quasi-spherical p-n junctions (2019-2023) show promising functionality in linear and Geiger operating modes. This paper presents an overview of designs and performances of non-planar APDs and SiPMs.

Submerged single-photon LiDAR imaging sensor used for real-time 3D scene reconstruction in scattering underwater environments

We demonstrate a fully submerged underwater LiDAR transceiver system based on single-photon detection technologies. The LiDAR imaging system used a silicon single-photon avalanche diode (SPAD) detector array fabricated in complementary metal-oxide semiconductor (CMOS) technology to measure photon time-of-flight using picosecond resolution time-correlated single-photon counting. The SPAD detector array was directly interfaced to a Graphics Processing Unit (GPU) for real-time image reconstruction capability. Experiments were performed with the transceiver system and target objects immersed in a water tank at a depth of 1.8 meters, with the targets placed at a stand-off distance of approximately 3 meters. The transceiver used a picosecond pulsed laser source with a central wavelength of 532 nm, operating at a repetition rate of 20 MHz and average optical power of up to 52 mW, dependent on scattering conditions. Three-dimensional imaging was demonstrated by implementing a joint surface detection and distance estimation algorithm for real-time processing and visualization, which achieved images of stationary targets with up to 7.5 attenuation lengths between the transceiver and the target. The average processing time per frame was approximately 33 ms, allowing real-time three-dimensional video demonstrations of moving targets at ten frames per second at up to 5.5 attenuation lengths between transceiver and target.

Area and Bandwidth Enhancement of an n+/p-Well Dot Avalanche Photodiode in 0.35 μm CMOS Technology

This paper presents a CMOS-integrated dot avalanche photodiode (dot-APD) that features a small central n⁺/p-well hemispherical cathode/p-well structure circularly surrounded by an anode ring. The dot-APD enables wide hemispherical depletion, charge collection from a large volume, and a small multiplication region. These features result in a large light-sensitive area, high responsivity and bandwidth, and exceptionally low junction capacitance. The active area can be further expanded using a multi-dot structure, which is an array of several cathode/p-well dots with a shared anode. Experimental results show that a 5 × 5 multi-dot APD with an active area of 70 μm × 70 μm achieves a bandwidth of 1.8 GHz, a responsivity of 9.7 A/W, and a capacitance of 27 fF. The structure of the multi-dot APD allows for the design of APDs in various sizes that offer high bandwidth and responsivity as an optical detector for various applications while still maintaining a small capacitance.

Multi-Scale Histogram-Based Probabilistic Deep Neural Network for Super-Resolution 3D LiDAR Imaging

LiDAR (Light Detection and Ranging) imaging based on SPAD (Single-Photon Avalanche Diode) technology suffers from severe area penalty for large on-chip histogram peak detection circuits required by the high precision of measured depth values. In this work, a probabilistic estimation-based super-resolution neural network for SPAD imaging that firstly uses temporal multi-scale histograms as inputs is proposed. To reduce the area and cost of on-chip histogram computation, only part of the histogram hardware for calculating the reflected photons is implemented on a chip. On account of the distribution rule of returned photons, a probabilistic encoder as a part of the network is first proposed to solve the depth estimation problem of SPADs. By jointly using this neural network with a super-resolution network, 16× up-sampling depth estimation is realized using 32 × 32 multi-scale histogram outputs. Finally, the effectiveness of this neural network was verified in the laboratory with a 32 × 32 SPAD sensor system.

Time-division technique for quantum optical receivers utilizing single-photon detector array technology and spatial-multiplexing

Free-space quantum key distribution (QKD) has been gaining popularity in recent years due to its advantages in creating networking options for the quantum internet. One of the main challenges to be addressed in QKD is the achievable secret key rate, which must meet current and future demand. Some of the existing solutions include the use of higher bandwidth electronics, untrusted relay architectures such as Twin-Field QKD, or high dimensional QKD. In this work, we proposed the use of a combination of spatial-multiplexing and time-division techniques, together with the use of 2D single-photon avalanche diode arrays to increase the final throughput. The main challenge in a free-space scenario is the effects introduced by turbulence. This paper demonstrates how appropriate time-division of the spatial-modes can reduce the quantum bit error rate due to optical crosstalk from 36% to 0%. With this technique, we believe the future need for superconducting nanowires single photon detectors, in some free-space QKD applications, can be relaxed, obtaining more cost-effective receiver systems.

Application of Image Sensors to Detect and Locate Electrical Discharges: A Review

Today, there are many attempts to introduce the Internet of Things (IoT) in high-voltage systems, where partial discharges are a focus of concern since they degrade the insulation. The idea is to detect such discharges at a very early stage so that corrective actions can be taken before major damage is produced. Electronic image sensors are traditionally based on charge-coupled devices (CCDs) and, next, on complementary metal oxide semiconductor (CMOS) devices. This paper performs a review and analysis of state-of-the-art image sensors for detecting, locating, and quantifying partial discharges in insulation systems and, in particular, corona discharges since it is an area with an important potential for expansion due to the important consequences of discharges and the complexity of their detection. The paper also discusses the recent progress, as well as the research needs and the challenges to be faced, in applying image sensors in this area. Although many of the cited research works focused on high-voltage applications, partial discharges can also occur in medium- and low-voltage applications. Thus, the potential applications that could potentially benefit from the introduction of image sensors to detect electrical discharges include power substations, buried power cables, overhead power lines, and automotive applications, among others.

A Multi-Time-Gated SPAD Array with Integrated Coarse TDCs

Time-gating of single-photon avalanche diodes (SPADs) was commonly used as a method to reduce dark noise in biomedical imaging applications where photon events are correlated with a reference clock. Time-gating was also used to obtain timing information of photon events by shifting the gate windows applied to a SPAD array. However, in this approach, fine timing resolution comes at the cost of a lengthened measurement time due to the large number of counts required for each shift. As a solution, we present a multi-time-gated SPAD array that simultaneously applies shifted gate windows to an array of SPADs, which has the potential to reduce the measurement time compared to a single time gate window. Compared to similar works, this design has fully integrated the multi-gate generation using shared circuitry which also functions as a coarse time-to-digital converter. The proposed array, fabricated in the TSMC 65 nm standard CMOS process, achieved a median dark count rate (DCR) of 37 kHz, 4.37 ns gate widths, 550 ps timing resolution, and a peak photon detection probability (PDP) of 42.9% at 420 nm, all at a 0.8 V excess bias.

Assessing Novel Lidar Modalities for Maximizing Coverage of a Spaceborne System through the Use of Diode Lasers

Current satellite lidars have sparse spatial coverage, leading to uncertainty from sampling. This complicates robust change detection and does not allow applications that require continuous coverage. One potential way to increase lidar sampling density is to use more efficient lasers. All current spaceborne lidars use solid-state lasers with a limited efficiency of 5–8%. In this paper, we investigate the potential for using diode lasers, with their higher efficiencies, as an alternative. Diode lasers have reported efficiencies of about 25% and are much smaller and lighter than solid-state lasers. However, they can only emit good beam quality at lower peak powers, which has so far prevented them from being used in spaceborne lidar applications. In this paper, we assess whether the novel lidar modalities necessitated by these lower peak powers are suitable for satellite lidar, determined by whether they can match the design performance of GEDI by being able to accurately measure ground elevation through 98% canopy cover, referred to as having “98% beam sensitivity”. Through this, we show that a diode laser can be operated in pulse train or pulse compressed lidar (PCL) mode from space, using a photon-counting detector. In the best case scenario, this setup requires a detected energy of Edet=0.027 fJ to achieve a beam sensitivity of 98%, which is less than the 0.28 fJ required by a full-waveform solid-state lidar instrument, exemplified by GEDI. When also accounting for the higher laser and detector efficiency, the diode laser in pulse train mode requires similar shot energy as a photon counting solid-state laser such as ICESat-2 which along with the higher laser efficiency could result in a doubling of coverage. We conclude that there is a clear opportunity for diode lasers to be used in spaceborne lidars, potentially allowing wider coverage through their higher efficiencies.

SPADs and SiPMs Arrays for Long-Range High-Speed Light Detection and Ranging (LiDAR)

Light Detection and Ranging (LiDAR) is a 3D imaging technique, widely used in many applications such as augmented reality, automotive, machine vision, spacecraft navigation and landing. Achieving long-ranges and high-speed, most of all in outdoor applications with strong solar background illumination, are challenging requirements. In the introduction we review different 3D-ranging techniques (stereo-vision, projection with structured light, pulsed-LiDAR, amplitude-modulated continuous-wave LiDAR, frequency-modulated continuous-wave interferometry), illumination schemes (single point and blade scanning, flash-LiDAR) and time-resolved detectors for LiDAR (EM-CCD, I-CCD, APD, SPAD, SiPM). Then, we provide an extensive review of silicon- single photon avalanche diode (SPAD)-based LiDAR detectors (both commercial products and research prototypes) analyzing how each architecture faces the main challenges of LiDAR (i.e., long ranges, centimeter resolution, large field-of-view and high angular resolution, high operation speed, background immunity, eye-safety and multi-camera operation). Recent progresses in 3D stacking technologies provided an important step forward in SPAD array development, allowing to reach smaller pitch, higher pixel count and more complex processing electronics. In the conclusions, we provide some guidelines for the design of next generation SPAD-LiDAR detectors.

A Scaling Law for SPAD Pixel Miniaturization

The growing demands on compact and high-definition single-photon avalanche diode (SPAD) arrays have motivated researchers to explore pixel miniaturization techniques to achieve sub-10 μm pixels. The scaling of the SPAD pixel size has an impact on key performance metrics, and it is, thereby, critical to conduct a systematic analysis of the underlying tradeoffs in miniaturized SPADs. On the basis of the general assumptions and constraints for layout geometry, we performed an analytical formulation of the scaling laws for the key metrics, such as the fill factor (FF), photon detection probability (PDP), dark count rate (DCR), correlated noise, and power consumption. Numerical calculations for various parameter sets indicated that some of the metrics, such as the DCR and power consumption, were improved by pixel miniaturization, whereas other metrics, such as the FF and PDP, were degraded. Comparison of the theoretically estimated scaling trends with previously published experimental results suggests that the scaling law analysis is in good agreement with practical SPAD devices. Our scaling law analysis could provide a useful tool to conduct a detailed performance comparison between various process, device, and layout configurations, which is essential for pushing the limit of SPAD pixel miniaturization toward sub-2 μm-pitch SPADs.

Towards combined quantum bit detection and spatial tracking using an arrayed single-photon sensor

Experimental quantum key distribution through free-space channels requires accurate pointing-and-tracking to co-align telescopes for efficient transmission. The hardware requirements for the sender and receiver could be drastically reduced by combining the detection of quantum bits and spatial tracking signal using two-dimensional single-photon detector arrays. Here, we apply a two-dimensional CMOS single-photon avalanche diode detector array to measure and monitor the single-photon level interference of a free-space time-bin receiver interferometer while simultaneously tracking the spatial position of the single-photon level signal. We verify an angular field-of-view of 1.28° and demonstrate a post-processing technique to reduce background noise. The experimental results show a promising future for two-dimensional single-photon detectors in low-light level free-space communications, such as quantum communications.

Fluorescence lifetime imaging with a megapixel SPAD camera and neural network lifetime estimation

Fluorescence lifetime imaging microscopy (FLIM) is a key technology that provides direct insight into cell metabolism, cell dynamics and protein activity. However, determining the lifetimes of different fluorescent proteins requires the detection of a relatively large number of photons, hence slowing down total acquisition times. Moreover, there are many cases, for example in studies of cell collectives, where wide-field imaging is desired. We report scan-less wide-field FLIM based on a 0.5 MP resolution, time-gated Single Photon Avalanche Diode (SPAD) camera, with acquisition rates up to 1 Hz. Fluorescence lifetime estimation is performed via a pre-trained artificial neural network with 1000-fold improvement in processing times compared to standard least squares fitting techniques. We utilised our system to image HT1080-human fibrosarcoma cell line as well as Convallaria. The results show promise for real-time FLIM and a viable route towards multi-megapixel fluorescence lifetime images, with a proof-of-principle mosaic image shown with 3.6 MP.

Integrated Neurophotonics: Toward Dense Volumetric Interrogation of Brain Circuit Activity-at Depth and in Real Time

We propose a new paradigm for dense functional imaging of brain activity to surmount the limitations of present methodologies. We term this approach "integrated neurophotonics"; it combines recent advances in microchip-based integrated photonic and electronic circuitry with those from optogenetics. This approach has the potential to enable lens-less functional imaging from within the brain itself to achieve dense, large-scale stimulation and recording of brain activity with cellular resolution at arbitrary depths. We perform a computational study of several prototype 3D architectures for implantable probe-array modules that are designed to provide fast and dense single-cell resolution (e.g., within a 1-mm3 volume of mouse cortex comprising ∼100,000 neurons). We describe progress toward realizing integrated neurophotonic imaging modules, which can be produced en masse with current semiconductor foundry protocols for chip manufacturing. Implantation of multiple modules can cover extended brain regions.

Fully Integrated Time-Gated 3D Fluorescence Imager for Deep Neural Imaging

This paper presents a device for time-gated fluorescence imaging in the deep brain, consisting of two on-chip laser diodes and 512 single-photon avalanche diodes (SPADs). The edge-emitting laser diodes deliver fluorescence excitation above the SPAD array, parallel to the imager. In the time domain, laser diode illumination is pulsed and the SPAD is time-gated, allowing a fluorescence excitation rejection up to O.D. 3 at 1 ns of time-gate delay. Each SPAD pixel is masked with Talbot gratings to enable the mapping of 2D array photon counts into a 3D image. The 3D image achieves a resolution of 40, 35, and 73 μm in the x, y, and z directions, respectively, in a noiseless environment, with a maximum frame rate of 50 kilo-frames-per-second. We present measurement results of the spatial and temporal profiles of the dual-pulsed laser diode illumination and of the photon detection characteristics of the SPAD array. Finally, we show the imager's ability to resolve a glass micropipette filled with red fluorescent microspheres. The system's 420 μm-wide cross section allows it to be inserted at arbitrary depths of the brain while achieving a field of view four times larger than fiber endoscopes of equal diameter.