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Roszko DA, Chen FD, Straguzzi J, Wahn H, Xu A, McLaughlin B, Yin X, Chua H, Luo X, Lo GQ, Siegle JH, Poon JKS, Sacher WD. Foundry-fabricated dual-color nanophotonic neural probes for photostimulation and electrophysiological recording. NEUROPHOTONICS 2025; 12:025002. [PMID: 40161465 PMCID: PMC11952718 DOI: 10.1117/1.nph.12.2.025002] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/22/2024] [Revised: 02/18/2025] [Accepted: 03/04/2025] [Indexed: 04/02/2025]
Abstract
Significance Compact tools capable of delivering multicolor optogenetic stimulation to deep tissue targets with sufficient span, spatiotemporal resolution, and optical power remain challenging to realize. Here, we demonstrate foundry-fabricated nanophotonic neural probes for blue and red photostimulation and electrophysiological recording, which use a combination of spatial multiplexing and on-shank wavelength demultiplexing to increase the number of on-shank emitters. Aim We demonstrate silicon (Si) photonic neural probes with 26 photonic channels and 26 recording sites, which were fabricated on 200-mm diameter wafers at a commercial Si photonics foundry. Each photonic channel consists of an on-shank demultiplexer and separate grating coupler emitters for blue and red light, for a total of 52 emitters. Approach We evaluate neural probe functionality through bench measurements and in vivo experiments by photostimulating through 16 of the available 26 emitter pairs. Results We report neural probe electrode impedances, optical transmission, and beam profiles. We validated a packaged neural probe in optogenetic experiments with mice sensitive to blue or red photostimulation. Conclusions Our foundry-fabricated nanophotonic neural probe demonstrates dense dual-color emitter integration on a single shank for targeted photostimulation. Given its two emission wavelengths, high emitter density, and long site span, this probe will facilitate experiments involving bidirectional circuit manipulations across both shallow and deep structures simultaneously.
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Affiliation(s)
- David A. Roszko
- Max Planck Institute of Microstructure Physics, Halle (Saale), Germany
- University of Toronto, Department of Electrical and Computer Engineering, Toronto, Ontario, Canada
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, Ontario, Canada
| | - Fu-Der Chen
- Max Planck Institute of Microstructure Physics, Halle (Saale), Germany
- University of Toronto, Department of Electrical and Computer Engineering, Toronto, Ontario, Canada
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, Ontario, Canada
| | - John Straguzzi
- Max Planck Institute of Microstructure Physics, Halle (Saale), Germany
| | - Hannes Wahn
- Max Planck Institute of Microstructure Physics, Halle (Saale), Germany
| | - Alec Xu
- Max Planck Institute of Microstructure Physics, Halle (Saale), Germany
| | - Blaine McLaughlin
- Max Planck Institute of Microstructure Physics, Halle (Saale), Germany
| | - Xinxin Yin
- Allen Institute for Neural Dynamics, Seattle, Washington, United States
| | | | | | | | - Joshua H. Siegle
- Allen Institute for Neural Dynamics, Seattle, Washington, United States
| | - Joyce K. S. Poon
- University of Toronto, Department of Electrical and Computer Engineering, Toronto, Ontario, Canada
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, Ontario, Canada
| | - Wesley D. Sacher
- Max Planck Institute of Microstructure Physics, Halle (Saale), Germany
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, Ontario, Canada
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2
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Taha BA, Addie AJ, Chahal S, Haider AJ, Rustagi S, Arsad N, Chaudhary V. Unlocking new frontiers in healthcare: The impact of nano-optical biosensors on personalized medical diagnostics. J Biotechnol 2025; 400:29-47. [PMID: 39961549 DOI: 10.1016/j.jbiotec.2025.02.005] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/26/2024] [Revised: 01/06/2025] [Accepted: 02/11/2025] [Indexed: 02/20/2025]
Abstract
Nano-optical biosensors have emerged as transformative tools in healthcare and clinical research, offering rapid, portable, and specific diagnostic solutions. This review critically analyzes the recent advancements, translational challenges, and sustainable approaches in nano-optical biosensor implementation for biomedical applications. We explore the integration of innovative nanomaterials, microelectronics, and molecular biology techniques that have significantly enhanced biosensor sensitivity and specificity, enabling detection of biomarkers ranging from cancer indicators to cardiovascular markers. The potential of nanoplasmonic and silicon photonic biosensors in overcoming current limitations is discussed, alongside the promising integration of artificial intelligence and Internet of Things technologies for improved data analytics and clinical validation. We address key challenges, including size constraints, energy efficiency, and integration with existing technologies, and propose sustainable strategies for eco-friendly materials, energy-efficient designs, and circular economy approaches. The review also examines emerging trends such as multiplexed sensing platforms, wearable biosensors, and their applications in personalized medicine. By critically assessing these developments, we provide insights into the prospects of nano-optical biosensors and their potential to revolutionize point-of-care diagnostics and personalized healthcare, while emphasizing the need for interdisciplinary collaboration to overcome remaining obstacles in translating these technologies from laboratory research to real-world clinical applications.
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Affiliation(s)
- Bakr Ahmed Taha
- UKM - Photonic Technology Research Group, Department of Electrical, Electronic and Systems Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, UKM, Bangi 43600, Malaysia; Alimam University College /Balad -Iraq.
| | - Ali J Addie
- Centre of Industrial Applications and Materials Technology, Scientific Research Commission, Baghdad, Iraq.
| | - Surjeet Chahal
- University Centre for Research and Development, Chandigarh University, Mohali, Punjab 140413, India.
| | - Adawiya J Haider
- Applied Sciences Department/Laser Science and Technology Branch, University of Technology, Iraq.
| | - Sarvesh Rustagi
- School of Applied and Life Sciences, Uttranchal University, Dehradun, Uttrakhand, India
| | - Norhana Arsad
- UKM - Photonic Technology Research Group, Department of Electrical, Electronic and Systems Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, UKM, Bangi 43600, Malaysia.
| | - Vishal Chaudhary
- Physics Department, Bhagini Nivedita College, University of Delhi, New Delhi 110045, INDIA; Centre for Research Impact & Outcome, Chitkara University, Punjab 140401, India.
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3
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Govdeli A, Chen H, Azadeh SS, Straguzzi JN, Chua H, Lo GQ, Poon JKS, Sacher WD. Integrated photonic MEMS switch for visible light. OPTICS EXPRESS 2025; 33:650-664. [PMID: 39876253 DOI: 10.1364/oe.539485] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/21/2024] [Accepted: 11/12/2024] [Indexed: 01/30/2025]
Abstract
Visible-light integrated photonics serve applications inaccessible to conventional (C- and O-band) silicon photonics, including trapped-ion and neutral atom quantum experiments, biophotonics, and displays. Despite demonstrations of increasingly advanced functionalities and levels of integration, the development of low-power, monolithically integrated, visible-light switches and phase shifters remains an outstanding challenge. Here, we demonstrate an integrated photonic, electrostatic MEMS-actuated Mach-Zehnder interferometer optical switch for the visible spectrum. The device operated with an extinction ratio of 7.2 dB and optical loss of 2.5 dB at a wavelength of 540 nm. The measured 10-90% rise (fall) times were 5 (28) µs, and a low static power dissipation of about 0.5 nW was achieved. The dynamic power dissipation at a 30 kHz switching frequency was estimated to be < 70 µW.
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4
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Chen FD, Sharma A, Xue T, Jung Y, Govdeli A, Mak JCC, Chameh HM, Movahed M, Brunk MGK, Luo X, Chua H, Lo PGQ, Valiante TA, Sacher WD, Poon JKS. Implantable silicon neural probes with nanophotonic phased arrays for single-lobe beam steering. COMMUNICATIONS ENGINEERING 2024; 3:182. [PMID: 39695300 DOI: 10.1038/s44172-024-00328-8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/02/2024] [Accepted: 11/26/2024] [Indexed: 12/20/2024]
Abstract
In brain activity mapping with optogenetics, patterned illumination is crucial for targeted neural stimulation. However, due to optical scattering in brain tissue, light-emitting implants are needed to bring patterned illumination to deep brain regions. A promising solution is silicon neural probes with integrated nanophotonic circuits that form tailored beam patterns without lenses. Here we propose neural probes with grating-based light emitters that generate a single steerable beam. The light emitters, optimized for blue or amber light, combine end-fire optical phased arrays with slab gratings to suppress higher-order sidelobes. In vivo experiments in mice demonstrated that the optical phased array provided sufficient power for optogenetic stimulation. While beam steering performance in tissue reveals challenges, including beam broadening from scattering and the need for a wider steering range, this proof-of-concept demonstration illustrates the design principles for realizing compact optical phased arrays capable of continuous single-beam scanning, laying the groundwork for advancing optical phased arrays toward targeted optogenetic stimulation.
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Affiliation(s)
- Fu-Der Chen
- Max Planck Institute of Microstructure Physics, Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada.
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada.
| | - Ankita Sharma
- Max Planck Institute of Microstructure Physics, Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada.
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada.
| | - Tianyuan Xue
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada
| | - Youngho Jung
- Max Planck Institute of Microstructure Physics, Halle, Germany
| | - Alperen Govdeli
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada
| | - Jason C C Mak
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada
| | | | - Mandana Movahed
- Krembil Brain Institute, University Health Network, Toronto, ON, Canada
| | - Michael G K Brunk
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada
| | - Xianshu Luo
- Advanced Micro Foundry Pte. Ltd., Singapore Science Park II, Singapore
| | - Hongyao Chua
- Advanced Micro Foundry Pte. Ltd., Singapore Science Park II, Singapore
| | | | - Taufik A Valiante
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada
- Krembil Brain Institute, University Health Network, Toronto, ON, Canada
- Division of Neurosurgery, Department of Surgery, Toronto Western Hospital, University of Toronto, Toronto, ON, Canada
- Institute of Biomedical Engineering, University of Toronto, Toronto, ON, Canada
| | - Wesley D Sacher
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada
| | - Joyce K S Poon
- Max Planck Institute of Microstructure Physics, Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada.
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada.
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5
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Ahmed Taha B, Addie AJ, Saeed AQ, Haider AJ, Chaudhary V, Arsad N. Nanostructured Photonics Probes: A Transformative Approach in Neurotherapeutics and Brain Circuitry. Neuroscience 2024; 562:106-124. [PMID: 39490518 DOI: 10.1016/j.neuroscience.2024.10.046] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/11/2024] [Revised: 10/23/2024] [Accepted: 10/24/2024] [Indexed: 11/05/2024]
Abstract
Neuroprobes that use nanostructured photonic interfaces are capable of multimodal sensing, stimulation, and imaging with unprecedented spatio-temporal resolution. In addition to electrical recording, optogenetic modulation, high-resolution optical imaging, and molecular sensing, these advanced probes combine nanophotonic waveguides, optical transducers, nanostructured electrodes, and biochemical sensors. The potential of this technology lies in unraveling the mysteries of neural coding principles, mapping functional connectivity in complex brain circuits, and developing new therapeutic interventions for neurological disorders. Nevertheless, achieving the full potential of nanostructured photonic neural probes requires overcoming challenges such as ensuring long-term biocompatibility, integrating nanoscale components at high density, and developing robust data-analysis pipelines. In this review, we summarize and discuss the role of photonics in neural probes, trends in electrode diameter for neural interface technologies, nanophotonic technologies using nanostructured materials, advances in nanofabrication photonics interface engineering, and challenges and opportunities. Finally, interdisciplinary efforts are required to unlock the transformative potential of next-generation neuroscience therapies.
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Affiliation(s)
- Bakr Ahmed Taha
- UKM-Department of Electrical, Electronic and Systems Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, UKM Bangi 43600, Malaysia.
| | - Ali J Addie
- Center of Industrial Applications and Materials Technology, Scientific Research Commission, Iraq
| | - Ali Q Saeed
- Computer Center / Northern Technical University, Iraq
| | - Adawiya J Haider
- Applied Sciences Department/Laser Science and Technology Branch, University of Technology, Iraq.
| | - Vishal Chaudhary
- Research Cell & Department of Physics, Bhagini Nivedita College, University of Delhi, New Delhi 110045, India; Centre for Research Impact & Outcome, Chitkara University, Punjab, 140401 India
| | - Norhana Arsad
- UKM-Department of Electrical, Electronic and Systems Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, UKM Bangi 43600, Malaysia.
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6
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Dang KM, Zhang YJ, Zhang T, Wang C, Sinner A, Coronica P, Poon JKS. NeuroQuantify - An image analysis software for detection and quantification of neuron cells and neurite lengths using deep learning. J Neurosci Methods 2024; 411:110273. [PMID: 39197681 DOI: 10.1016/j.jneumeth.2024.110273] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/02/2024] [Revised: 06/23/2024] [Accepted: 08/25/2024] [Indexed: 09/01/2024]
Abstract
BACKGROUND The segmentation of cells and neurites in microscopy images of neuronal networks provides valuable quantitative information about neuron growth and neuronal differentiation, including the number of cells, neurites, neurite length and neurite orientation. This information is essential for assessing the development of neuronal networks in response to extracellular stimuli, which is useful for studying neuronal structures, for example, the study of neurodegenerative diseases and pharmaceuticals. NEW METHOD We have developed NeuroQuantify, an open-source software that uses deep learning to efficiently and quickly segment cells and neurites in phase contrast microscopy images. RESULTS NeuroQuantify offers several key features: (i) automatic detection of cells and neurites; (ii) post-processing of the images for the quantitative neurite length measurement based on segmentation of phase contrast microscopy images, and (iii) identification of neurite orientations. COMPARISON WITH EXISTING METHODS NeuroQuantify overcomes some of the limitations of existing methods in the automatic and accurate analysis of neuronal structures. It has been developed for phase contrast images rather than fluorescence images. In addition to typical functionality of cell counting, NeuroQuantify also detects and counts neurites, measures the neurite lengths, and produces the neurite orientation distribution. CONCLUSIONS We offer a valuable tool to assess network development rapidly and effectively. The user-friendly NeuroQuantify software can be installed and freely downloaded from GitHub at https://github.com/StanleyZ0528/neural-image-segmentation.
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Affiliation(s)
- Ka My Dang
- Max Planck Institute of Microstructure Physics, Weinberg 2, Halle D-06120, Germany; Max Planck-University of Toronto Centre for Neural Science and Technology, Canada.
| | - Yi Jia Zhang
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Rd., Toronto, Ontario M5S 3G4, Canada
| | - Tianchen Zhang
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Rd., Toronto, Ontario M5S 3G4, Canada
| | - Chao Wang
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Rd., Toronto, Ontario M5S 3G4, Canada
| | - Anton Sinner
- Max Planck Institute of Microstructure Physics, Weinberg 2, Halle D-06120, Germany
| | - Piero Coronica
- Max Planck Computing and Data Facility, Gießenbachstraße 2, Garching 85748, Germany
| | - Joyce K S Poon
- Max Planck Institute of Microstructure Physics, Weinberg 2, Halle D-06120, Germany; Max Planck-University of Toronto Centre for Neural Science and Technology, Canada; Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Rd., Toronto, Ontario M5S 3G4, Canada.
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7
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Yi D, Yao Y, Wang Y, Chen L. Design, Fabrication, and Implantation of Invasive Microelectrode Arrays as in vivo Brain Machine Interfaces: A Comprehensive Review. JOURNAL OF MANUFACTURING PROCESSES 2024; 126:185-207. [PMID: 39185373 PMCID: PMC11340637 DOI: 10.1016/j.jmapro.2024.07.100] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/27/2024]
Abstract
Invasive Microelectrode Arrays (MEAs) have been a significant and useful tool for us to gain a fundamental understanding of how the brain works through high spatiotemporal resolution neuron-level recordings and/or stimulations. Through decades of research, various types of microwire, silicon, and flexible substrate-based MEAs have been developed using the evolving new materials, novel design concepts, and cutting-edge advanced manufacturing capabilities. Surgical implantation of the latest minimal damaging flexible MEAs through the hard-to-penetrate brain membranes introduces new challenges and thus the development of implantation strategies and instruments for the latest MEAs. In this paper, studies on the design considerations and enabling manufacturing processes of various invasive MEAs as in vivo brain-machine interfaces have been reviewed to facilitate the development as well as the state-of-art of such brain-machine interfaces from an engineering perspective. The challenges and solution strategies developed for surgically implanting such interfaces into the brain have also been evaluated and summarized. Finally, the research gaps have been identified in the design, manufacturing, and implantation perspectives, and future research prospects in invasive MEA development have been proposed.
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Affiliation(s)
- Dongyang Yi
- Department of Mechanical and Industrial Engineering, University of Massachusetts Lowell, Lowell, MA 01854
| | - Yao Yao
- Department of Industrial and Systems Engineering, University of Missouri, Columbia, MO 65211
| | - Yi Wang
- Department of Industrial and Systems Engineering, University of Missouri, Columbia, MO 65211
| | - Lei Chen
- Department of Mechanical and Industrial Engineering, University of Massachusetts Lowell, Lowell, MA 01854
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Xue T, Stalmashonak A, Chen FD, Ding P, Luo X, Chua H, Lo GQ, Sacher WD, Poon JKS. Implantable photonic neural probes with out-of-plane focusing grating emitters. Sci Rep 2024; 14:13812. [PMID: 38877050 PMCID: PMC11178810 DOI: 10.1038/s41598-024-64037-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/18/2024] [Accepted: 06/04/2024] [Indexed: 06/16/2024] Open
Abstract
We have designed, fabricated, and characterized implantable silicon neural probes with nanophotonic grating emitters that focus the emitted light at a specified distance above the surface of the probe for spatially precise optogenetic targeting of neurons. Using the holographic principle, we designed gratings for wavelengths of 488 and 594 nm, targeting the excitation spectra of the optogenetic actuators Channelrhodopsin-2 and Chrimson, respectively. The measured optical emission pattern of these emitters in non-scattering medium and tissue matched well with simulations. To our knowledge, this is the first report of focused spots with the size scale of a neuron soma in brain tissue formed from implantable neural probes.
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Affiliation(s)
- Tianyuan Xue
- Department of Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Weinberg 2, Halle, 06120, Germany.
- The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, M5S 3G4, ON, Canada.
| | - Andrei Stalmashonak
- Department of Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Weinberg 2, Halle, 06120, Germany
| | - Fu-Der Chen
- Department of Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Weinberg 2, Halle, 06120, Germany
- The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, M5S 3G4, ON, Canada
| | - Peisheng Ding
- Department of Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Weinberg 2, Halle, 06120, Germany
- The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, M5S 3G4, ON, Canada
| | - Xianshu Luo
- Advanced Micro Foundry Pte. Ltd., 11 Science Park Road, Singapore, 117685, Singapore
| | - Hongyao Chua
- Advanced Micro Foundry Pte. Ltd., 11 Science Park Road, Singapore, 117685, Singapore
| | - Guo-Qiang Lo
- Advanced Micro Foundry Pte. Ltd., 11 Science Park Road, Singapore, 117685, Singapore
| | - Wesley D Sacher
- Department of Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Weinberg 2, Halle, 06120, Germany
| | - Joyce K S Poon
- Department of Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Weinberg 2, Halle, 06120, Germany.
- The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, M5S 3G4, ON, Canada.
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Chen FD, Sharma A, Roszko DA, Xue T, Mu X, Luo X, Chua H, Lo PGQ, Sacher WD, Poon JKS. Development of wafer-scale multifunctional nanophotonic neural probes for brain activity mapping. LAB ON A CHIP 2024; 24:2397-2417. [PMID: 38623840 DOI: 10.1039/d3lc00931a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/17/2024]
Abstract
Optical techniques, such as optogenetic stimulation and functional fluorescence imaging, have been revolutionary for neuroscience by enabling neural circuit analysis with cell-type specificity. To probe deep brain regions, implantable light sources are crucial. Silicon photonics, commonly used for data communications, shows great promise in creating implantable devices with complex optical systems in a compact form factor compatible with high volume manufacturing practices. This article reviews recent developments of wafer-scale multifunctional nanophotonic neural probes. The probes can be realized on 200 or 300 mm wafers in commercial foundries and integrate light emitters for photostimulation, microelectrodes for electrophysiological recording, and microfluidic channels for chemical delivery and sampling. By integrating active optical devices to the probes, denser emitter arrays, enhanced on-chip biosensing, and increased ease of use may be realized. Silicon photonics technology makes possible highly versatile implantable neural probes that can transform neuroscience experiments.
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Affiliation(s)
- Fu Der Chen
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - Ankita Sharma
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - David A Roszko
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - Tianyuan Xue
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - Xin Mu
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - Xianshu Luo
- Advanced Micro Foundry Pte Ltd, 11 Science Park Road, Singapore Science Park II, 117685, Singapore
| | - Hongyao Chua
- Advanced Micro Foundry Pte Ltd, 11 Science Park Road, Singapore Science Park II, 117685, Singapore
| | - Patrick Guo-Qiang Lo
- Advanced Micro Foundry Pte Ltd, 11 Science Park Road, Singapore Science Park II, 117685, Singapore
| | - Wesley D Sacher
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
| | - Joyce K S Poon
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
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10
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Kim JY, Kim J, Yoon J, Hong S, Neseli B, Kwon N, You JB, Yoon H, Park HH, Kurt H. Deep neural network-based phase calibration in integrated optical phased arrays. Sci Rep 2023; 13:19929. [PMID: 37968312 PMCID: PMC10651891 DOI: 10.1038/s41598-023-47004-z] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/29/2023] [Accepted: 11/07/2023] [Indexed: 11/17/2023] Open
Abstract
Calibrating the phase in integrated optical phased arrays (OPAs) is a crucial procedure for addressing phase errors and achieving the desired beamforming results. In this paper, we introduce a novel phase calibration methodology based on a deep neural network (DNN) architecture to enhance beamforming in integrated OPAs. Our methodology focuses on precise phase control, individually tailored to each of the 64 OPA channels, incorporating electro-optic phase shifters. To effectively handle the inherent complexity arising from the numerous voltage set combinations required for phase control across the 64 channels, we employ a tandem network architecture, further optimizing it through selective data sorting and hyperparameter tuning. To validate the effectiveness of the trained DNN model, we compared its performance with 20 reference beams obtained through the hill climbing algorithm. Despite an average intensity reduction of 0.84 dB in the peak values of the beams compared to the reference beams, our experimental results demonstrate substantial agreements between the DNN-predicted beams and the reference beams, accompanied by a slight decrease of 0.06 dB in the side-mode-suppression-ratio. These results underscore the practical effectiveness of the DNN model in OPA beamforming, highlighting its potential in scenarios that necessitate the intelligent and time-efficient calibration of multiple beams.
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Affiliation(s)
- Jae-Yong Kim
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea
| | - Junhyeong Kim
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea
| | - Jinhyeong Yoon
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea
| | - Seokjin Hong
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea
| | - Berkay Neseli
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea
| | - Namhyun Kwon
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea
| | - Jong-Bum You
- National Nanofab Center (NNFC), Daejeon, 34141, Republic of Korea
| | - Hyeonho Yoon
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea
| | - Hyo-Hoon Park
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea
| | - Hamza Kurt
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea.
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11
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Mu X, Chen FD, Dang KM, Brunk MGK, Li J, Wahn H, Stalmashonak A, Ding P, Luo X, Chua H, Lo GQ, Poon JKS, Sacher WD. Implantable photonic neural probes with 3D-printed microfluidics and applications to uncaging. Front Neurosci 2023; 17:1213265. [PMID: 37521687 PMCID: PMC10373094 DOI: 10.3389/fnins.2023.1213265] [Citation(s) in RCA: 8] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/27/2023] [Accepted: 06/13/2023] [Indexed: 08/01/2023] Open
Abstract
Advances in chip-scale photonic-electronic integration are enabling a new generation of foundry-manufacturable implantable silicon neural probes incorporating nanophotonic waveguides and microelectrodes for optogenetic stimulation and electrophysiological recording in neuroscience research. Further extending neural probe functionalities with integrated microfluidics is a direct approach to achieve neurochemical injection and sampling capabilities. In this work, we use two-photon polymerization 3D printing to integrate microfluidic channels onto photonic neural probes, which include silicon nitride nanophotonic waveguides and grating emitters. The customizability of 3D printing enables a unique geometry of microfluidics that conforms to the shape of each neural probe, enabling integration of microfluidics with a variety of existing neural probes while avoiding the complexities of monolithic microfluidics integration. We demonstrate the photonic and fluidic functionalities of the neural probes via fluorescein injection in agarose gel and photoloysis of caged fluorescein in solution and in fixed brain tissue.
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Affiliation(s)
- Xin Mu
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada
| | - Fu-Der Chen
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada
| | - Ka My Dang
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada
| | - Michael G. K. Brunk
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada
| | - Jianfeng Li
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada
| | - Hannes Wahn
- Max Planck Institute of Microstructure Physics, Halle, Germany
| | | | - Peisheng Ding
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada
| | - Xianshu Luo
- Advanced Micro Foundry Pte. Ltd., Singapore, Singapore
| | - Hongyao Chua
- Advanced Micro Foundry Pte. Ltd., Singapore, Singapore
| | - Guo-Qiang Lo
- Advanced Micro Foundry Pte. Ltd., Singapore, Singapore
| | - Joyce K. S. Poon
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, Canada
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada
| | - Wesley D. Sacher
- Max Planck Institute of Microstructure Physics, Halle, Germany
- Max Planck-University of Toronto Centre for Neural Science and Technology, Toronto, ON, Canada
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12
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Huang Q, Yu H, Zhang Z, Zhao J, Zhou Z, Ning N, Lv B, Yin K, Wang Y, Yang J. Sparse 2-D optical phased array with large grating-lobe-free steering range based on an aperiodic grid. OPTICS LETTERS 2023; 48:2849-2852. [PMID: 37262226 DOI: 10.1364/ol.488891] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/28/2023] [Accepted: 05/04/2023] [Indexed: 06/03/2023]
Abstract
Two-dimensional (2-D) optical phased arrays (OPAs) usually suffer from limited scan ranges and small aperture sizes. To overcome these bottlenecks, we utilize an aperiodic 32 × 32 grid to increase the beam scanning range and furthermore distribute 128 grating antennas sparsely among 1024 grid points so as to reduce the array element number. The genetic algorithm is used to optimize the uneven grid spacings and the sparse distribution of grating antennas. With these measures, a 128-channel 2-D OPA operating at 1550 nm realizes a grating-lobe-free steering range of 53° × 16°, a field of view of 24° × 16°, a beam divergence of 0.31° × 0.49°, and a sidelobe suppression ratio of 9 dB.
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13
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Sharif Azadeh S, Mak JCC, Chen H, Luo X, Chen FD, Chua H, Weiss F, Alexiev C, Stalmashonak A, Jung Y, Straguzzi JN, Lo GQ, Sacher WD, Poon JKS. Microcantilever-integrated photonic circuits for broadband laser beam scanning. Nat Commun 2023; 14:2641. [PMID: 37156850 PMCID: PMC10167362 DOI: 10.1038/s41467-023-38260-8] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/16/2022] [Accepted: 04/19/2023] [Indexed: 05/10/2023] Open
Abstract
Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm2 areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips.
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Affiliation(s)
- Saeed Sharif Azadeh
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany.
| | - Jason C C Mak
- University of Toronto, Department of Electrical and Computer Engineering, 10 King's College Road, ON, M5S 3G4, Toronto, Canada
| | - Hong Chen
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany
| | - Xianshu Luo
- Advanced Micro Foundry Pte. Ltd., 11 Science Park Road, Singapore Science Park II, Singapore, 117685, Singapore
| | - Fu-Der Chen
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany
- University of Toronto, Department of Electrical and Computer Engineering, 10 King's College Road, ON, M5S 3G4, Toronto, Canada
| | - Hongyao Chua
- Advanced Micro Foundry Pte. Ltd., 11 Science Park Road, Singapore Science Park II, Singapore, 117685, Singapore
| | - Frank Weiss
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany
| | - Christopher Alexiev
- University of Toronto, Department of Electrical and Computer Engineering, 10 King's College Road, ON, M5S 3G4, Toronto, Canada
| | - Andrei Stalmashonak
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany
| | - Youngho Jung
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany
| | - John N Straguzzi
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany
| | - Guo-Qiang Lo
- Advanced Micro Foundry Pte. Ltd., 11 Science Park Road, Singapore Science Park II, Singapore, 117685, Singapore
| | - Wesley D Sacher
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany
| | - Joyce K S Poon
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120, Halle, Germany.
- University of Toronto, Department of Electrical and Computer Engineering, 10 King's College Road, ON, M5S 3G4, Toronto, Canada.
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