Heterogeneous Wafer Bonding Technology and Thin-Film Transfer Technology-Enabling Platform for the Next Generation Applications beyond 5G

Metal Nanoparticles Assisted Ultrafast Laser Plasmonic Microwelding of Oxide-Semiconductor Interconnects

Integration of wafer-scale oxide and semiconductor materials meets the difficulties of residual stress and materials incompatibility. In this work, Ag NPs thin film is contributed as an energy confinement layer between oxide (Sapphire) and semiconductor (Si) wafers to localize the materials interaction during ultrafast laser irradiation. Due to the plasmonic effects generated within constructed dielectric-metal-dielectric structures (i.e., Sapphire-Ag-Si), thermal diffusion and chemical reaction between Ag and its neighboring materials facilitate the microwelding of Sapphire and Si wafers. Ag NPs can be totally sintered within the junction area to bridge oxide and semiconductor, while Al─O─Ag bond and Ag─Si bond are formed at Ag-Sapphire and Ag─Si interfaces, respectively. As-received heterogeneous joint exhibits a high shear strength up to 5.4 MPa, with the fracture occurring inside Si wafer. Meanwhile, insertion of metal nanolayer can greatly relieve the residual stress-induced microcracking inside the brittle materials. Such wafer-scale Sapphire and Si interconnects thus show robust strength and excellent impermeability even after thermal shocking (-40 °C to 120 °C) for 200 cycles. This metal NPs layer-assisted plasmonic microwelding technology can extend to broad materials integration, which is promising for high-performance microdevices development in MEMS, MOEMS, or microfluidics.

Dual-Passband SAW Filter Based on a 32°YX-LN/SiO2/SiC Multilayered Substrate

To meet the demands of highly integrated and miniaturized radio frequency front-end (RFFE) modules, multi-passband filters which support multi-channel compounding come to the foreground. In this work, we proposed a new design of a dual-passband surface acoustic wave (SAW) filter based on a 32°YX-LiNbO₃ (LN)/SiO₂/SiC multilayered structure. The filter is of a standalone ladder topology and comprises dual-mode resonators, in which the shear horizontal (SH) mode and high-order SH mode are simultaneously excited through electrode thickness modulation. The impact of electrode thickness on the performance of the dual-mode resonator was systematically investigated by the finite element method (FEM), and resonators were prepared and verified the simulation results. The electromechanical coupling coefficients (K²) of the SH modes are 15.1% and 17.0%, while the maximum Bode-Q (Q_max) values are 150 and 247, respectively, for the fabricated resonators with wavelengths of 1 μm and 1.1 μm. In terms of the high-order SH modes in these resonators, the K² values are 9.8% and 8.4%, and Q_max values are 190 and 262, respectively. The fabricated dual-band filter shows the center frequencies (f_c) of 3065 MHz and 4808 MHz as two bands, with 3-dB fractional bandwidths (FBW) of 5.1% and 5.9%, respectively. Such a dual-band SAW filter based on a conventional ladder topology is meaningful in terms of its compact layout and diminished area occupancy. This work provides a promising avenue to constitute a high-performance dual-passband SAW filter for sub-6 GHz RF application.

Machine learning-augmented surface-enhanced spectroscopy toward next-generation molecular diagnostics

The world today is witnessing the significant role and huge demand for molecular detection and screening in healthcare and medical diagnosis, especially during the outbreak of COVID-19. Surface-enhanced spectroscopy techniques, including Surface-Enhanced Raman Scattering (SERS) and Infrared Absorption (SEIRA), provide lattice and molecular vibrational fingerprint information which is directly linked to the molecular constituents, chemical bonds, and configuration. These properties make them an unambiguous, nondestructive, and label-free toolkit for molecular diagnostics and screening. However, new issues in molecular diagnostics, such as increasing molecular species, faster spread of viruses, and higher requirements for detection accuracy and sensitivity, have brought great challenges to detection technology. Advancements in artificial intelligence and machine learning (ML) techniques show promising potential in empowering SERS and SEIRA with rapid analysis and automatic data processing to jointly tackle the challenge. This review introduces the combination of ML and SERS/SEIRA by investigating how ML algorithms can be beneficial to SERS/SEIRA, discussing the general process of combining ML and SEIRA/SERS, highlighting the molecular diagnostics and screening applications based on ML-combined SEIRA/SERS, and providing perspectives on the future development of ML-integrated SEIRA/SERS. In general, this review offers comprehensive knowledge about the recent advances and the future outlook regarding ML-integrated SEIRA/SERS for molecular diagnostics and screening.

Neuro-nanotechnology: diagnostic and therapeutic nano-based strategies in applied neuroscience

Artificial, de-novo manufactured materials (with controlled nano-sized characteristics) have been progressively used by neuroscientists during the last several decades. The introduction of novel implantable bioelectronics interfaces that are better suited to their biological targets is one example of an innovation that has emerged as a result of advanced nanostructures and implantable bioelectronics interfaces, which has increased the potential of prostheses and neural interfaces. The unique physical-chemical properties of nanoparticles have also facilitated the development of novel imaging instruments for advanced laboratory systems, as well as intelligently manufactured scaffolds and microelectrodes and other technologies designed to increase our understanding of neural tissue processes. The incorporation of nanotechnology into physiology and cell biology enables the tailoring of molecular interactions. This involves unique interactions with neurons and glial cells in neuroscience. Technology solutions intended to effectively interact with neuronal cells, improved molecular-based diagnostic techniques, biomaterials and hybridized compounds utilized for neural regeneration, neuroprotection, and targeted delivery of medicines as well as small chemicals across the blood-brain barrier are all purposes of the present article.

MOF/Polymer-Integrated Multi-Hotspot Mid-Infrared Nanoantennas for Sensitive Detection of CO2 Gas

Metal-organic frameworks (MOFs) have been extensively used for gas sorption, storage and separation owing to ultrahigh porosity, exceptional thermal stability, and wide structural diversity. However, when it comes to ultra-low concentration gas detection, technical bottlenecks of MOFs appear due to the poor adsorption capacity at ppm-/ppb-level concentration and the limited sensitivity for signal transduction. Here, we present hybrid MOF-polymer physi-chemisorption mechanisms integrated with infrared (IR) nanoantennas for highly selective and ultrasensitive CO₂ detection. To improve the adsorption capacity for trace amounts of gas molecules, MOFs are decorated with amino groups to introduce the chemisorption while maintaining the structural integrity for physisorption. Additionally, leveraging all major optimization methods, a multi-hotspot strategy is proposed to improve the sensitivity of nanoantennas by enhancing the near field and engineering the radiative and absorptive loss. As a benefit, we demonstrate the competitive advantages of our strategy against the state-of-the-art miniaturized IR CO₂ sensors, including low detection limit, high sensitivity (0.18%/ppm), excellent reversibility (variation within 2%), and high selectivity (against C₂H₅OH, CH₃OH, N₂). This work provides valuable insights into the integration of advanced porous materials and nanophotonic devices, which can be further adopted in ultra-low concentration gas monitoring in industry and environmental applications.

Machine Learning-Assisted Multifunctional Environmental Sensing Based on a Piezoelectric Cantilever

Multifunctional environmental sensing is crucial for various applications in agriculture, pollution monitoring, and disease diagnosis. However, most of these sensing systems consist of multiple sensors, leading to significantly increased dimensions, energy consumption, and structural complexity. They also often suffer from signal interferences among multiple sensing elements. Herein, we report a multifunctional environmental sensor based on one single sensing element. A MoS₂ film was deposited on the surface of a piezoelectric microcantilever (300 × 1000 μm²) and used as both a sensing layer and top electrode to make full use of the changes in multiple properties of MoS₂ after its exposure to various environments. The proposed sensor has been demonstrated for humidity detection and achieved high resolution (0.3% RH), low hysteresis (5.6%), and fast response (1 s) and recovery (2.8 s). Based on the analysis of the magnitude spectra for transmission using machine learning algorithms, the sensor accurately quantifies temperatures and CO₂ concentrations in the interference of humidity with accuracies of 91.9 and 92.1%, respectively. Furthermore, the sensor has been successfully demonstrated for real-time detection of humidity and temperature or CO₂ concentrations for various applications, revealing its great potential in human-machine interactions and health monitoring of plants and human beings.

Flexible multifunctional platform based on piezoelectric acoustics for human-machine interaction and environmental perception

Flexible human-machine interfaces show broad prospects for next-generation flexible or wearable electronics compared with their currently available bulky and rigid counterparts. However, compared to their rigid counterparts, most reported flexible devices (e.g., flexible loudspeakers and microphones) show inferior performance, mainly due to the nature of their flexibility. Therefore, it is of great significance to improve their performance by developing and optimizing new materials, structures and design methodologies. In this paper, a flexible acoustic platform based on a zinc oxide (ZnO) thin film on an aluminum foil substrate is developed and optimized; this platform can be applied as a loudspeaker, a microphone, or an ambient sensor depending on the selection of its excitation frequencies. When used as a speaker, the proposed structure shows a high sound pressure level (SPL) of ~90 dB (with a standard deviation of ~3.6 dB), a low total harmonic distortion of ~1.41%, and a uniform directivity (with a standard deviation of ~4 dB). Its normalized SPL is higher than those of similar devices reported in the recent literature. When used as a microphone, the proposed device shows a precision of 98% for speech recognition, and the measured audio signals show a strong similarity to the original audio signals, demonstrating its equivalent performance compared to a rigid commercial microphone. As a flexible sensor, this device shows a high temperature coefficient of frequency of -289 ppm/K and good performance for respiratory monitoring.

Virtual Sensor Array Based on Piezoelectric Cantilever Resonator for Identification of Volatile Organic Compounds

Piezoelectric cantilever resonator is one of the most promising platforms for real-time sensing of volatile organic compounds (VOCs). However, it has been a great challenge to eliminate the cross-sensitivity of various VOCs for these cantilever-based VOC sensors. Herein, a virtual sensor array (VSA) is proposed on the basis of a sensing layer of GO film deposited onto an AlN piezoelectric cantilever with five groups of top electrodes for identification of various VOCs. Different groups of top electrodes are applied to obtain high amplitudes of multiple resonance peaks for the cantilever, thus achieving low limits of detection (LODs) to VOCs. Frequency shifts of multiple resonant modes and changes of impedance values are taken as the responses of the proposed VSA to VOCs, and these multidimensional responses generate a unique fingerprint for each VOC. On the basis of machine learning algorithms, the proposed VSA can accurately identify different types of VOCs and mixtures with accuracies of 95.8 and 87.5%, respectively. Furthermore, the VSA has successfully been applied to identify the emissions from healthy plants and "plants with late blight" with an accuracy of 89%. The high levels of identifications show great potentials of the VSA for diagnosis of infectious plant diseases by detecting VOC biomarkers.

Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator

Here, we report on a composite nanomechanical resonant magnetometer with magnetoelastic thin film integrated on the surface of a film bulk acoustic resonator (FBAR). By exploiting the delta-E effect of magnetoelastic thin film and resonance characteristic in piezoelectric thin film, we theoretically and experimentally demonstrate the capability to realize ultrahigh resonance frequency and excellent magnetic field sensitivity in such composite configuration, thereby greatly improving the limit of detection of weak magnetic field. The proposed FBAR-based resonant magnetometer achieves maximum magnetic sensitivity of 137 kHz/Oe in a proof-of-concept device without structural optimization, corresponding to a noise equivalent power as low as 7 nT/Hz^1/2. Further study indicates that by optimizing the thicknesses of the magnetic sensitive layer and piezoelectric layer, an unprecedented sensitivity of 5 GHz/Oe with an exceptional limit of detection of weak magnetic field down to 190 [Formula: see text]/Hz^1/2 could be potentially achieved. Our work provides a forward new and exciting route toward ultralow magnetic field detection in civilian and military applications.

Reconfigurable terahertz metamaterials: From fundamental principles to advanced 6G applications

Terahertz (THz) electromagnetic spectrum ranging from 0.1THz to 10THz has become critical for sixth generation (6G) applications, such as high-speed communication, fingerprint chemical sensing, non-destructive biosensing, and bioimaging. However, the limited response of naturally existing materials THz waves has induced a gap in the electromagnetic spectrum, where a lack of THz functional devices using natural materials has occurred in this gap. Metamaterials, artificially composed structures that can engineer the electromagnetic properties to manipulate the waves, have enabled the development of many THz devices, known as "metadevices". Besides, the tunability of THz metadevices can be achieved by tunable structures using microelectromechanical system (MEMS) technologies, as well as tunable materials including phase change materials (PCMs), electro-optical materials (EOMs), and thermo-optical materials (TOMs). Leveraging various tuning mechanisms together with metamaterials, tremendous research works have demonstrated reconfigurable functional THz devices, playing an important role to fill the THz gap toward the 6G applications. This review introduces reconfigurable metadevices from fundamental principles of metamaterial resonant system to the design mechanisms of functional THz metamaterial devices and their related applications. Moreover, we provide perspectives on the future development of THz photonic devices for state-of-the-art applications.

Analysis of the Influence of Ferromagnetic Material on the Output Characteristics of Halbach Array Energy-Harvesting Structure

Due to the particular arrangement of permanent magnets, a Halbach array has an significant effect of magnetism and magnetic self-shielding. It can stretch the magnetic lines on one side of the magnetic field to obtain an ideal sinusoidal unilateral magnetic field. It has a wide application range in the field of energy harvesting. In practical applications, magnetic induction intensity of each point in magnetic field is not only related to the induced current and conductor but also related to the permeability of the medium (also known as a magnetic medium) in the magnetic field. Permeability is the physical quantity that represents the magnetism of the magnetic medium, which indicates the resistance of magnetic flux or the ability of magnetic lines to be connected in the magnetic field after coil flows through current in space or in the core space. When the permeability is much greater than one, it is a ferromagnetic material. Adding a ferromagnetic material in a magnetic field can increase the magnetic induction intensity B. Iron sheet is a good magnetic material, and it is easy to magnetize to generate an additional magnetic field to strengthen the original magnetic field, and it is easy to obtain at low cost. In this paper, in order to explore the influence of ferromagnetic material on the magnetic field and energy harvesting efficiency of the Halbach array energy harvesting structure, iron sheets are installed on the periphery of the Halbach array rotor. Iron sheet has excellent magnetic permeability. Through simulation, angle between iron sheet and Halbach array, radian size of iron sheet itself and distance between iron sheet and Halbach array can all have different effects on the magnetic field of the Halbach array. It shows that adding iron sheets as a magnetic medium could indeed change the magnetic field distribution of the Halbach array and increase energy harvesting efficiency. In this paper, a Halbach array can be used to provide electrical power for passive wireless low-power devices.

Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared

Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks. However, there is still a need for the development of MIR reconfigurable photonics to enable powerful on-chip optical systems and new functionalities. In this paper, we present an MIR (3.7~4.1 μm wavelength range) MEMS reconfiguration approach using the suspended silicon waveguide platform on the silicon-on-insulator. With the sub-wavelength grating claddings, the photonic waveguide can be well integrated with the MEMS actuator, thus offering low-loss, energy-efficient, and effective reconfiguration. We present a simulation study on the waveguide design and depict the MEMS-integration approach. Moreover, we experimentally report the suspended waveguide with propagation loss (−2.9 dB/cm) and bending loss (−0.076 dB each). The suspended waveguide coupler is experimentally investigated. In addition, we validate the proposed optical MEMS approach using a reconfigurable ring resonator design. In conclusion, we experimentally demonstrate the proposed waveguide platform’s capability for MIR MEMS-reconfigurable photonics, which empowers the MIR on-chip optical systems for various applications.