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Huang H, Liang X, Wang Y, Tang J, Li Y, Du Y, Sun W, Zhang J, Yao P, Mou X, Xu F, Zhang J, Lu Y, Liu Z, Wang J, Jiang Z, Hu R, Wang Z, Zhang Q, Gao B, Bai X, Fang L, Dai Q, Yin H, Qian H, Wu H. Fully integrated multi-mode optoelectronic memristor array for diversified in-sensor computing. NATURE NANOTECHNOLOGY 2025; 20:93-103. [PMID: 39516386 DOI: 10.1038/s41565-024-01794-z] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/23/2023] [Accepted: 08/26/2024] [Indexed: 11/16/2024]
Abstract
In-sensor computing, which integrates sensing, memory and processing functions, has shown substantial potential in artificial vision systems. However, large-scale monolithic integration of in-sensor computing based on emerging devices with complementary metal-oxide-semiconductor (CMOS) circuits remains challenging, lacking functional demonstrations at the hardware level. Here we report a fully integrated 1-kb array with 128 × 8 one-transistor one-optoelectronic memristor (OEM) cells and silicon CMOS circuits, which features configurable multi-mode functionality encompassing three different modes of electronic memristor, dynamic OEM and non-volatile OEM (NV-OEM). These modes are configured by modulating the charge density within the oxygen vacancies via synergistic optical and electrical operations, as confirmed by differential phase-contrast scanning transmission electron microscopy. Using this OEM system, three visual processing tasks are demonstrated: image sensory pre-processing with a recognition accuracy enhanced from 85.7% to 96.1% by the NV-OEM mode, more advanced object tracking with 96.1% accuracy using both dynamic OEM and NV-OEM modes and human motion recognition with a fully OEM-based in-sensor reservoir computing system achieving 91.2% accuracy. A system-level benchmark further shows that it consumes over 20 times less energy than graphics processing units. By monolithically integrating the multi-functional OEMs with Si CMOS, this work provides a cost-effective platform for diverse in-sensor computing applications.
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Affiliation(s)
- Heyi Huang
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
- Beijing National Research Center for Information Science and Technology, Tsinghua University, Beijing, China
- Integrated Circuit Advanced Process R&D Center and Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
| | - Xiangpeng Liang
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Yuyan Wang
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China.
- Beijing National Research Center for Information Science and Technology, Tsinghua University, Beijing, China.
| | - Jianshi Tang
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China.
- Beijing National Research Center for Information Science and Technology, Tsinghua University, Beijing, China.
| | - Yuankun Li
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Yiwei Du
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Wen Sun
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Jianing Zhang
- Department of Electronic Engineering, Tsinghua University, Beijing, China
| | - Peng Yao
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Xing Mou
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Feng Xu
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Jinzhi Zhang
- Department of Electronic Engineering, Tsinghua University, Beijing, China
| | - Yuyao Lu
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Zhengwu Liu
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Jianlin Wang
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, China
| | - Zhixing Jiang
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Ruofei Hu
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Ze Wang
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Qingtian Zhang
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Bin Gao
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
- Beijing National Research Center for Information Science and Technology, Tsinghua University, Beijing, China
| | - Xuedong Bai
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, China
| | - Lu Fang
- Beijing National Research Center for Information Science and Technology, Tsinghua University, Beijing, China
- Department of Electronic Engineering, Tsinghua University, Beijing, China
| | - Qionghai Dai
- Beijing National Research Center for Information Science and Technology, Tsinghua University, Beijing, China
| | - Huaxiang Yin
- Integrated Circuit Advanced Process R&D Center and Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
| | - He Qian
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China
| | - Huaqiang Wu
- School of Integrated Circuits, Beijing Innovation Center for Integrated Circuits, Tsinghua University, Beijing, China.
- Beijing National Research Center for Information Science and Technology, Tsinghua University, Beijing, China.
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Li J, Abbas H, Ang DS, Ali A, Ju X. Emerging memristive artificial neuron and synapse devices for the neuromorphic electronics era. NANOSCALE HORIZONS 2023; 8:1456-1484. [PMID: 37615055 DOI: 10.1039/d3nh00180f] [Citation(s) in RCA: 8] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/25/2023]
Abstract
Growth of data eases the way to access the world but requires increasing amounts of energy to store and process. Neuromorphic electronics has emerged in the last decade, inspired by biological neurons and synapses, with in-memory computing ability, extenuating the 'von Neumann bottleneck' between the memory and processor and offering a promising solution to reduce the efforts both in data storage and processing, thanks to their multi-bit non-volatility, biology-emulated characteristics, and silicon compatibility. This work reviews the recent advances in emerging memristive devices for artificial neuron and synapse applications, including memory and data-processing ability: the physics and characteristics are discussed first, i.e., valence changing, electrochemical metallization, phase changing, interfaced-controlling, charge-trapping, ferroelectric tunnelling, and spin-transfer torquing. Next, we propose a universal benchmark for the artificial synapse and neuron devices on spiking energy consumption, standby power consumption, and spike timing. Based on the benchmark, we address the challenges, suggest the guidelines for intra-device and inter-device design, and provide an outlook for the neuromorphic applications of resistive switching-based artificial neuron and synapse devices.
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Affiliation(s)
- Jiayi Li
- School of Electrical and Electronics Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798.
| | - Haider Abbas
- School of Electrical and Electronics Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798.
| | - Diing Shenp Ang
- School of Electrical and Electronics Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798.
| | - Asif Ali
- School of Electrical and Electronics Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798.
| | - Xin Ju
- Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Singapore 138634
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Ju D, Kim S, Lee S, Kim S. Double-Forming Mechanism of TaO x-Based Resistive Memory Device and Its Synaptic Applications. MATERIALS (BASEL, SWITZERLAND) 2023; 16:6184. [PMID: 37763461 PMCID: PMC10533022 DOI: 10.3390/ma16186184] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/03/2023] [Revised: 09/12/2023] [Accepted: 09/12/2023] [Indexed: 09/29/2023]
Abstract
The bipolar resistive switching properties of Pt/TaOx/InOx/ITO-resistive random-access memory devices under DC and pulse measurement conditions are explored in this work. Transmission electron microscopy and X-ray photoelectron spectroscopy were used to confirm the structure and chemical compositions of the devices. A unique two-step forming process referred to as the double-forming phenomenon and self-compliance characteristics are demonstrated under a DC sweep. A model based on oxygen vacancy migration is proposed to explain its conduction mechanism. Varying reset voltages and compliance currents were applied to evaluate multilevel cell characteristics. Furthermore, pulses were applied to the devices to demonstrate the neuromorphic system's application via testing potentiation, depression, spike-timing-dependent plasticity, and spike-rate-dependent plasticity.
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Affiliation(s)
| | | | | | - Sungjun Kim
- Division of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, Republic of Korea; (D.J.); (S.K.); (S.L.)
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Sarkar S, Banik H, Rahman FY, Majumdar S, Bhattacharjee D, Hussain SA. Effect of long chain fatty acids on the memory switching behavior of tetraindolyl derivatives. RSC Adv 2023; 13:26330-26343. [PMID: 37671340 PMCID: PMC10476023 DOI: 10.1039/d3ra03869f] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/09/2023] [Accepted: 08/18/2023] [Indexed: 09/07/2023] Open
Abstract
Non-volatile memory devices using organic materials have attracted much attention due to their excellent scalability, fast switching speed, low power consumption, low cost etc. Here, we report both volatile as well as non-volatile resistive switching behavior of p-di[3,3'-bis(2-methylindolyl)methane]benzene (Indole2) and its mixture with stearic acid (SA). Previously, we have reported the bipolar resistive switching (BRS) behavior using 1,4-bis(di(1H-indol-3-yl)methyl)benzene (Indole1) molecules under ambient conditions [Langmuir 37 (2021) 4449-4459] and complementary resistive switching (CRS) behavior when the device was exposed to 353 K or higher temperature [Langmuir 38 (2022) 9229-9238]. However, the present study revealed that when the H of -NH group of Indole1 is replaced by -CH3, the resultant Indole2 molecule-based device showed volatile threshold switching behaviour. On the other hand, when Indole2 is mixed with SA at a particular mole fraction, dynamic evolution of an Au/Indole2-SA/ITO device from volatile to non-volatile switching occurred with very good device stability (>285 days), memory window (6.69 × 102), endurance (210 times), data retention (6.8 × 104 s) and device yield of the order of 78.5%. Trap controlled SCLC as well as electric field driven conduction was the key behind the observed switching behaviour of the devices. In the active layer, trap centers due to the SA network may be responsible for non-volatile characteristics of the device. Observed non-volatile switching may be a potential candidate for write once read many (WORM) memory applications in future.
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Affiliation(s)
- Surajit Sarkar
- Thin Film and Nanoscience Laboratory, Department of Physics, Tripura University Suryamaninagar 799022 West Tripura Tripura India
| | - Hritinava Banik
- Thin Film and Nanoscience Laboratory, Department of Physics, Tripura University Suryamaninagar 799022 West Tripura Tripura India
| | - Farhana Yasmin Rahman
- Thin Film and Nanoscience Laboratory, Department of Physics, Tripura University Suryamaninagar 799022 West Tripura Tripura India
| | - Swapan Majumdar
- Department of Chemistry, Tripura University Suryamaninagar 799022 West Tripura Tripura India
| | - Debajyoti Bhattacharjee
- Thin Film and Nanoscience Laboratory, Department of Physics, Tripura University Suryamaninagar 799022 West Tripura Tripura India
| | - Syed Arshad Hussain
- Thin Film and Nanoscience Laboratory, Department of Physics, Tripura University Suryamaninagar 799022 West Tripura Tripura India
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Ju D, Kim S, Kim S. Artificial Synapse Emulated by Indium Tin Oxide/SiN/TaN Resistive Switching Device for Neuromorphic System. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:2477. [PMID: 37686985 PMCID: PMC10490079 DOI: 10.3390/nano13172477] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/26/2023] [Revised: 08/23/2023] [Accepted: 08/24/2023] [Indexed: 09/10/2023]
Abstract
In this paper, we fabricate an ITO/SiN/TaN memristor device and analyze its electrical characteristics for a neuromorphic system. The device structure and chemical properties are investigated using transmission electron microscopy and X-ray photoelectron spectroscopy. Uniform bipolar switching is achieved through DC sweep under a compliance current of 5 mA. Also, the analog reset phenomenon is observed by modulating the reset voltage for long-term memory. Additionally, short-term memory characteristics are obtained by controlling the strength of the pulse response. Finally, bio-inspired synaptic characteristics are emulated using Hebbian learning rules such as spike-rate-dependent plasticity (SRDP) and spike-timing-dependent plasticity (STDP). As a result, we believe that the coexistence of short-term and long-term memories in the ITO/SiN/TaN device can provide flexibility in device design in future neuromorphic applications.
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Affiliation(s)
| | | | - Sungjun Kim
- Division of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, Republic of Korea
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Wang R, Zhang W, Wang S, Zeng T, Ma X, Wang H, Hao Y. Memristor-Based Signal Processing for Compressed Sensing. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:1354. [PMID: 37110939 PMCID: PMC10141131 DOI: 10.3390/nano13081354] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/15/2023] [Revised: 04/04/2023] [Accepted: 04/05/2023] [Indexed: 06/19/2023]
Abstract
With the rapid progress of artificial intelligence, various perception networks were constructed to enable Internet of Things (IoT) applications, thereby imposing formidable challenges to communication bandwidth and information security. Memristors, which exhibit powerful analog computing capabilities, emerged as a promising solution expected to address these challenges by enabling the development of the next-generation high-speed digital compressed sensing (CS) technologies for edge computing. However, the mechanisms and fundamental properties of memristors for achieving CS remain unclear, and the underlying principles for selecting different implementation methods based on various application scenarios have yet to be elucidated. A comprehensive overview of memristor-based CS techniques is currently lacking. In this article, we systematically presented CS requirements on device performance and hardware implementation. The relevant models were analyzed and discussed from the mechanism level to elaborate the memristor CS system scientifically. In addition, the method of deploying CS hardware using the powerful signal processing capabilities and unique performance of memristors was further reviewed. Subsequently, the potential of memristors in all-in-one compression and encryption was anticipated. Finally, existing challenges and future outlooks for memristor-based CS systems were discussed.
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Affiliation(s)
- Rui Wang
- Key Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
| | - Wanlin Zhang
- Key Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
| | - Saisai Wang
- Key Laboratory of Wide Band Gap Semiconductor Technology, School of Advanced Materials and Nanotechnology, Xidian University, Xi’an 710071, China
| | - Tonglong Zeng
- Key Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
| | - Xiaohua Ma
- Key Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
| | - Hong Wang
- Key Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
| | - Yue Hao
- Key Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
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Jetty P, Mohanan KU, Jammalamadaka SN. α-Fe 2O 3-based artificial synaptic RRAM device for pattern recognition using artificial neural networks. NANOTECHNOLOGY 2023; 34:265703. [PMID: 36975196 DOI: 10.1088/1361-6528/acc811] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/07/2022] [Accepted: 03/28/2023] [Indexed: 06/18/2023]
Abstract
We report on theα-Fe2O3-based artificial synaptic resistive random access memory device, which is a promising candidate for artificial neural networks (ANN) to recognize the images. The device consists of a structure Ag/α-Fe2O3/FTO and exhibits non-volatility with analog resistive switching characteristics. We successfully demonstrated synaptic learning rules such as long-term potentiation, long-term depression, and spike time-dependent plasticity. In addition, we also presented off-chip training to obtain good accuracy by backpropagation algorithm considering the synaptic weights obtained fromα-Fe2O3based artificial synaptic device. The proposedα-Fe2O3-based device was tested with the FMNIST and MNIST datasets and obtained a high pattern recognition accuracy of 88.06% and 97.6% test accuracy respectively. Such a high pattern recognition accuracy is attributed to the combination of the synaptic device performance as well as the novel weight mapping strategy used in the present work. Therefore, the ideal device characteristics and high ANN performance showed that the fabricated device can be useful for practical ANN implementation.
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Affiliation(s)
- Prabana Jetty
- Magnetic Materials and Device Physics Laboratory, Department of Physics, Indian Institute of Technology Hyderabad, Hyderabad, 502 284, India
| | - Kannan Udaya Mohanan
- Department of Electronic Engineering, Gachon University, Seongnam-si, Gyeonggi-do, 13120, Republic of Korea
| | - S Narayana Jammalamadaka
- Magnetic Materials and Device Physics Laboratory, Department of Physics, Indian Institute of Technology Hyderabad, Hyderabad, 502 284, India
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Zeng J, Chen X, Liu S, Chen Q, Liu G. Organic Memristor with Synaptic Plasticity for Neuromorphic Computing Applications. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:803. [PMID: 36903681 PMCID: PMC10005145 DOI: 10.3390/nano13050803] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/31/2022] [Revised: 02/13/2023] [Accepted: 02/20/2023] [Indexed: 06/18/2023]
Abstract
Memristors have been considered to be more efficient than traditional Complementary Metal Oxide Semiconductor (CMOS) devices in implementing artificial synapses, which are fundamental yet very critical components of neurons as well as neural networks. Compared with inorganic counterparts, organic memristors have many advantages, including low-cost, easy manufacture, high mechanical flexibility, and biocompatibility, making them applicable in more scenarios. Here, we present an organic memristor based on an ethyl viologen diperchlorate [EV(ClO4)]2/triphenylamine-containing polymer (BTPA-F) redox system. The device with bilayer structure organic materials as the resistive switching layer (RSL) exhibits memristive behaviors and excellent long-term synaptic plasticity. Additionally, the device's conductance states can be precisely modulated by consecutively applying voltage pulses between the top and bottom electrodes. A three-layer perception neural network with in situ computing enabled was then constructed utilizing the proposed memristor and trained on the basis of the device's synaptic plasticity characteristics and conductance modulation rules. Recognition accuracies of 97.3% and 90% were achieved, respectively, for the raw and 20% noisy handwritten digits images from the Modified National Institute of Standards and Technology (MNIST) dataset, demonstrating the feasibility and applicability of implementing neuromorphic computing applications utilizing the proposed organic memristor.
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Affiliation(s)
- Jianmin Zeng
- School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Xinhui Chen
- College of Information Engineering, Jinhua Polytechnic, Jinhua 321017, China
| | - Shuzhi Liu
- School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Qilai Chen
- AEROSPACE SCIENCE & INDUSTRY SHENZHEN (GROUP) CO., LTD., Shenzhen 518000, China
| | - Gang Liu
- School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
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Pyo J, Bae JH, Kim S, Cho S. Short-Term Memory Characteristics of IGZO-Based Three-Terminal Devices. MATERIALS (BASEL, SWITZERLAND) 2023; 16:1249. [PMID: 36770256 PMCID: PMC9919079 DOI: 10.3390/ma16031249] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/25/2022] [Revised: 01/19/2023] [Accepted: 01/26/2023] [Indexed: 06/18/2023]
Abstract
A three-terminal synaptic transistor enables more accurate controllability over the conductance compared with traditional two-terminal synaptic devices for the synaptic devices in hardware-oriented neuromorphic systems. In this work, we fabricated IGZO-based three-terminal devices comprising HfAlOx and CeOx layers to demonstrate the synaptic operations. The chemical compositions and thicknesses of the devices were verified by transmission electron microscopy and energy dispersive spectroscopy in cooperation. The excitatory post-synaptic current (EPSC), paired-pulse facilitation (PPF), short-term potentiation (STP), and short-term depression (STD) of the synaptic devices were realized for the short-term memory behaviors. The IGZO-based three-terminal synaptic transistor could thus be controlled appropriately by the amplitude, width, and interval time of the pulses for implementing the neuromorphic systems.
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Affiliation(s)
- Juyeong Pyo
- Division of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, Republic of Korea
| | - Jong-Ho Bae
- School of Electrical Engineering, Kookmin University, Seoul 02707, Republic of Korea
| | - Sungjun Kim
- Division of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, Republic of Korea
| | - Seongjae Cho
- Department of Electronics Engineering, Gachon University, Seongnam 13120, Republic of Korea
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Pyo J, Ha H, Kim S. Enhanced Short-Term Memory Plasticity of WOx-Based Memristors by Inserting AlO x Thin Layer. MATERIALS (BASEL, SWITZERLAND) 2022; 15:9081. [PMID: 36556886 PMCID: PMC9786020 DOI: 10.3390/ma15249081] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/09/2022] [Revised: 12/12/2022] [Accepted: 12/15/2022] [Indexed: 06/17/2023]
Abstract
ITO/WOx/TaN and ITO/WOx/AlOx/TaN memory cells were fabricated as a neuromorphic device that is compatible with CMOS. They are suitable for the information age, which requires a large amount of data as next-generation memory. The device with a thin AlOx layer deposited by atomic layer deposition (ALD) has different electrical characteristics from the device without an AlOx layer. The low current is achieved by inserting an ultra-thin AlOx layer between the switching layer and the bottom electrode due to the tunneling barrier effect. Moreover, the short-term memory characteristics in bilayer devices are enhanced. The WOx/AlOx device returns to the HRS without a separate reset process or energy consumption. The amount of gradual current reduction could be controlled by interval time. In addition, it is possible to maintain LRS for a longer time by forming it to implement long-term memory.
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Kwon O, Lee H, Kim S. Effects of Oxygen Flow Rate on Metal-to-Insulator Transition Characteristics in NbO x-Based Selectors. MATERIALS (BASEL, SWITZERLAND) 2022; 15:8575. [PMID: 36500071 PMCID: PMC9739534 DOI: 10.3390/ma15238575] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/25/2022] [Revised: 11/23/2022] [Accepted: 11/28/2022] [Indexed: 06/17/2023]
Abstract
In this work, NbOx-based selector devices were fabricated by sputtering deposition systems. Metal-to-insulator transition characteristics of the device samples were investigated depending on the oxygen flow rate (3.5, 4.5, and 5.5 sccm) and the deposition time. The device stack was scanned by transmission electron microscopy (TEM) and energy-dispersive X-ray spectroscopy (EDS). The yields, including MIT, nonlinear, and Ohmic, in working devices with different deposition conditions were also evaluated. Moreover, we observed the trend in yield values as a function of selectivity. In addition, the current-voltage (I-V) curves were characterized in terms of DC and pulse endurance. Finally, the switching speed and operating energies were obtained by applying a triangular pulse on the devices, and the recovery time and drift-free characteristics were obtained by the paired pulses.
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