A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model

New Carbon Materials for Multifunctional Soft Electronics

Soft electronics are garnering significant attention due to their wide-ranging applications in artificial skin, health monitoring, human-machine interaction, artificial intelligence, and the Internet of Things. Various soft physical sensors such as mechanical sensors, temperature sensors, and humidity sensors are the fundamental building blocks for soft electronics. While the fast growth and widespread utilization of electronic devices have elevated life quality, the consequential electromagnetic interference (EMI) and radiation pose potential threats to device precision and human health. Another substantial concern pertains to overheating issues that occur during prolonged operation. Therefore, the design of multifunctional soft electronics exhibiting excellent capabilities in sensing, EMI shielding, and thermal management is of paramount importance. Because of the prominent advantages in chemical stability, electrical and thermal conductivity, and easy functionalization, new carbon materials including carbon nanotubes, graphene and its derivatives, graphdiyne, and sustainable natural-biomass-derived carbon are particularly promising candidates for multifunctional soft electronics. This review summarizes the latest advancements in multifunctional soft electronics based on new carbon materials across a range of performance aspects, mainly focusing on the structure or composite design, and fabrication method on the physical signals monitoring, EMI shielding, and thermal management. Furthermore, the device integration strategies and corresponding intriguing applications are highlighted. Finally, this review presents prospects aimed at overcoming current barriers and advancing the development of state-of-the-art multifunctional soft electronics.

Two-Stage Micropyramids Enhanced Flexible Piezoresistive Sensor for Health Monitoring and Human-Computer Interaction

High-performance flexible piezoresistive sensors are becoming increasingly essential in various novel applications such as health monitoring, soft robotics, and human-computer interaction. The evolution of the interfacial contact morphology determines the sensing properties of piezoresistive devices. The introduction of microstructures enriches the interfacial contact morphology and effectively boosts the sensitivity; however, the limited compressibility of conventional microstructures leads to rapid saturation of the sensitivity in the low-pressure range, which hinders their application. Herein, we present a flexible piezoresistive sensor featuring a two-stage micropyramid array structure, which effectively enhances the sensitivity while widening the sensing range. Owing to the synergistic enhancement effect resulting from the sequential contact of micropyramids of various heights, the devices demonstrate remarkable performance, including boosting sensitivity (30.8 kPa-1) over a wide sensing range (up to 200 kPa), a fast response/recovery time (75/50 ms), and an ultralong durability of 15,000 loading-unloading cycles. As a proof of concept, the sensor is applied to detect human physiological and motion signals, further demonstrating a real-time spatial pressure distribution sensing system and a game control system, showing great potential for applications in health monitoring and human-computer interaction.

Recent Progress in MEMS Fiber-Optic Fabry-Perot Pressure Sensors

Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry-Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 °C. Finally, we discuss the limitations and opportunities for future development.

A Multifunctional Flexible Tactile Sensor Based on Resistive Effect for Simultaneous Sensing of Pressure and Temperature

Flexible tactile sensors with multifunctional sensing functions have attracted much attention due to their wide applications in artificial limbs, intelligent robots, human-machine interfaces, and health monitoring devices. Here, a multifunctional flexible tactile sensor based on resistive effect for simultaneous sensing of pressure and temperature is reported. The sensor features a simple design with patterned metal film on a soft substrate with cavities and protrusions. The decoupling of pressure and temperature sensing is achieved by the reasonable arrangement of metal layers in the patterned metal film. Systematically experimental and numerical studies are carried out to reveal the multifunctional sensing mechanism and show that the proposed sensor exhibits good linearity, fast response, high stability, good mechanical flexibility, and good microfabrication compatibility. Demonstrations of the multifunctional flexible tactile sensor to monitor touch, breathing, pulse and objects grabbing/releasing in various application scenarios involving coupled temperature/pressure stimuli illustrate its excellent capability of measuring pressure and temperature simultaneously. These results offer an effective tool for multifunctional sensing of pressure and temperature and create engineering opportunities for applications of wearable health monitoring and human-machine interfaces.

Printed Composite Film with Microporous/Micropyramid Hybrid Conductive Architecture for Multifunctional Flexible Force Sensors

Porous structures and micropatterning surfaces play a crucial role in the development of highly sensitive force sensors. However, achieving these two conductive architectures typically requires the synthesis of complex materials and expensive manufacturing processes. In this study, we introduce a novel conductive composite film featuring a microporous/micropyramid hybrid conductive architecture, which is achieved through a straightforward process of materials mixing and one-step screen printing. By utilizing a deep eutectic solvent in the ink component, micropores are induced in the printed composite, while the mesh of the screen mask acts as a template, resulting in a micropyramid film surface. We have successfully realized highly sensitive flexible force sensors (0.15 kPa-1) with multifunctional capabilities for perceiving normal force and shear force.

Nonlinearity synergy: An elegant strategy for realizing high-sensitivity and wide-linear-range pressure sensing

Flexible pressure sensors are indispensable components in various applications such as intelligent robots and wearable devices, whereas developing flexible pressure sensors with both high sensitivity and wide linear range remains a great challenge. Here, we present an elegant strategy to address this challenge by taking advantage of a pyramidal carbon foam array as the sensing layer and an elastomer spacer as the stiffness regulator, realizing an unprecedentedly high sensitivity of 24.6 kPa-1 and an ultra-wide linear range of 1.4 MPa together. Such a wide range of linearity is attributed to the synergy between the nonlinear piezoresistivity of the sensing layer and the nonlinear elasticity of the stiffness regulator. The great application potential of our sensor in robotic manipulation, healthcare monitoring, and human-machine interface is demonstrated. Our design strategy can be extended to the other types of flexible sensors calling for both high sensitivity and wide-range linearity, facilitating the development of high-performance flexible pressure sensors for intelligent robotics and wearable devices.

Normal-Direction Graded Hemispheres for Ionic Flexible Sensors with a Record-High Linearity in a Wide Working Range

Flexible pressure sensors developed rapidly with increased sensitivity, a fast response time, high stability, and excellent deformability. These progresses have expanded the application of wearable electronics under high-pressure backgrounds while also bringing new challenges. In particular, the nonlinearity and narrow working range lead to a gradually insensitive response, principally because the microstructure deforms inconsistently on the device interfaces in the whole working range. Herein, we report an ionic flexible sensor with a record-high linearity (R2 = 0.99994) in a wide working range (up to 600 kPa). The linearity response comes from the normal-direction graded hemisphere (GH) microstructure. It is prepared from poly(dimethylsiloxane) (PDMS)/carbon nanotubes (CNTs)/Au into flexible and deformable electrodes, and its geometry is precisely designed from the linear elastic theory and optimized through finite element simulation. The sensor can achieve a high sensitivity of S = 165.5 kPa-1, a response-relaxation time of <30 ms, and superb consistency, allowing the device to detect vibration signals. Our sensor has been assembled with circuits and capsulation in order to monitor the function state of players in underwater sports in the frequency domain. This work deepens the theory of linearized design of microstructures and provides a strategy to make flexible pressure sensors that have combined the performances of ultrahigh linearity, high sensitivity, and a wide working range.

Flexible tactile sensors with biomimetic microstructures: Mechanisms, fabrication, and applications

In recent years, flexible devices have gained rapid development with great potential in daily life. As the core component of wearable devices, flexible tactile sensors are prized for their excellent properties such as lightweight, stretchable and foldable. Consequently, numerous high-performance sensors have been developed, along with an array of innovative fabrication processes. It has been recognized that the improvement of the single performance index for flexible tactile sensors is not enough for practical sensing applications. Therefore, balancing and optimization of overall performance of the sensor are extensively anticipated. Furthermore, new functional characteristics are required for practical applications, such as freeze resistance, corrosion resistance, self-cleaning, and degradability. From a bionic perspective, the overall performance of a sensor can be optimized by constructing bionic microstructures which can deliver additional functional features. This review briefly summarizes the latest developments in bionic microstructures for different types of tactile sensors and critically analyzes the sensing performance of fabricated flexible tactile sensors. Based on this, the application prospects of bionic microstructure-based tactile sensors in human detection and human-machine interaction devices are introduced.

Rational Structural Design of Polymer Pens for Energy-Efficient Photoactuation

Photoactuated pens have emerged as promising tools for expedient, mask-free, and versatile nanomanufacturing. However, the challenge of effectively controlling individual pens in large arrays for high-throughput patterning has been a significant hurdle. In this study, we introduce novel generations of photoactuated pens and explore the impact of pen architecture on photoactuation efficiency and crosstalk through simulations and experiments. By introducing a thermal insulating layer and incorporating an air ap in the architecture design, we have achieved the separation of pens into independent units. This new design allowed for improved control over the actuation behavior of individual pens, markedly reducing the influence of neighboring pens. The results of our research suggest novel applications of photoactive composite films as advanced actuators across diverse fields, including lithography, adaptive optics, and soft robotics.

High-Linearity Flexible Pressure Sensor Based on the Gaussian-Curve-Shaped Microstructure for Human Physiological Signal Monitoring

Flexible pressure sensors with high-performance show broad application prospects in health monitoring, wearable electronic devices, intelligent robot sensing, and other fields. Although flexible pressure sensors have made significant progress in sensitivity and detection range, most of them still exhibit strong nonlinearity, which leads to significant troubles in signal acquisition and thus limits their popularity in practical applications. It remains a serious challenge for the flexible pressure sensor to achieve high linearity while maintaining high sensitivity. Herein, a doped sensing membrane with a uniformly distributed Gaussian-curve-shaped micropattern array was developed using the micro-electromechanical systems (MEMS) process, and a flexible sensor structure with the doped film as the core was designed and constructed. The prototype sensor has a high sensitivity of 1.77 kPa-1 and a linearity of 0.99 in the full detection range of 20 Pa to 30 kPa. In addition, its excellent performance also includes fast response/recovery times (∼25/50 ms) and long-term endurance (>10,000 cycles at 15 kPa). The prototype sensor has been successfully demonstrated in human pulse monitoring, speech recognition, and gesture recognition. The 2 × 6 sensor array can detect the spatial pressure distribution. Thus, such a microstructure shape design will open a new way to fabricate a high-linearity pressure sensor for potential applications in health monitoring, human-machine interaction, etc.

Flexible and Stretchable Pressure Sensors: From Basic Principles to State-of-the-Art Applications

Flexible and stretchable electronics have emerged as highly promising technologies for the next generation of electronic devices. These advancements offer numerous advantages, such as flexibility, biocompatibility, bio-integrated circuits, and light weight, enabling new possibilities in diverse applications, including e-textiles, smart lenses, healthcare technologies, smart manufacturing, consumer electronics, and smart wearable devices. In recent years, significant attention has been devoted to flexible and stretchable pressure sensors due to their potential integration with medical and healthcare devices for monitoring human activity and biological signals, such as heartbeat, respiratory rate, blood pressure, blood oxygen saturation, and muscle activity. This review comprehensively covers all aspects of recent developments in flexible and stretchable pressure sensors. It encompasses fundamental principles, force/pressure-sensitive materials, fabrication techniques for low-cost and high-performance pressure sensors, investigations of sensing mechanisms (piezoresistivity, capacitance, piezoelectricity), and state-of-the-art applications.