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Sojo-Gordillo JM, Gadea-Diez G, Renahy D, Salleras M, Duque-Sierra C, Vincent P, Fonseca L, Chapuis PO, Morata A, Gomès S, Tarancón A. Local Heat Dissipation and Elasticity of Suspended Silicon Nanowires Revealed by Dual Scanning Electron and Thermal Microscopies. Small 2024; 20:e2305831. [PMID: 38088536 DOI: 10.1002/smll.202305831] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/11/2023] [Revised: 10/24/2023] [Indexed: 04/19/2024]
Abstract
A novel combined setup, with a scanning thermal microscope (SThM) embedded in a scanning electron microscope (SEM), is used to characterize a suspended silicon rough nanowire (NW), which is epitaxially clamped at both sides and therefore monolithically integrated in a microfabricated device. The rough nature of the NW surface, which prohibits vacuum-SThM due to loose contact for heat dissipation, is circumvented by decorating the NW with periodic platinum dots. Reproducible approaches over these dots, enabled by the live feedback image provided by the SEM, yield a strong improvement in thermal contact resistance and a higher accuracy in its estimation. The results-thermal resistance at the tip-sample contact of 188±3.7K µW-1 and thermal conductivity of the NW of 13.7±1.6W m-1 K-1-are obtained by performing a series of approach curves on the dots. Noteworthy, the technique allows measuring elastic properties at the same time-the moment of inertia of the NW is found to be (6.1±1.0) × 10-30m4-which permits to correlate the respective effects of the rough shell on heat dissipation and on the NW stiffness. The work highlights the capabilities of the dual SThM/SEM instrument, in particular the interest of systematic approach curves with well-positioned and monitored tip motion.
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Affiliation(s)
- Jose M Sojo-Gordillo
- Department of advanced energy materials, Catalonia Institute for Energy Research, IREC, Jardins de les Dones de Negre 1, Sant Adrià de Besòs, Barcelona, 08930, Spain
- Department of Physics, University of Basel, Klingelbergstrasse 82, Basel, 4056, Switzerland
| | - Gerard Gadea-Diez
- Department of Physics, University of Basel, Klingelbergstrasse 82, Basel, 4056, Switzerland
| | - David Renahy
- Université de Lyon, CNRS, INSA-Lyon, Université Claude Bernard Lyon 1, CETHIL UMR5008, Villeurbanne, F-69621, France
- Université de Lyon, Université Clade Bernard Lyon 1, CNRS, Institut Lumière Matière, Villeurbanne, F-69622, France
| | - Marc Salleras
- Institute of Microelectronics of Barcelona, IMB-CNM (CSIC), C/Til-lers s/n, Campus UAB, Bellaterra, Barcelona, 08193, Spain
| | - Carolina Duque-Sierra
- Department of advanced energy materials, Catalonia Institute for Energy Research, IREC, Jardins de les Dones de Negre 1, Sant Adrià de Besòs, Barcelona, 08930, Spain
| | - Pascal Vincent
- Université de Lyon, Université Clade Bernard Lyon 1, CNRS, Institut Lumière Matière, Villeurbanne, F-69622, France
| | - Luis Fonseca
- Institute of Microelectronics of Barcelona, IMB-CNM (CSIC), C/Til-lers s/n, Campus UAB, Bellaterra, Barcelona, 08193, Spain
| | - Pierre-Olivier Chapuis
- Université de Lyon, CNRS, INSA-Lyon, Université Claude Bernard Lyon 1, CETHIL UMR5008, Villeurbanne, F-69621, France
| | - Alex Morata
- Department of advanced energy materials, Catalonia Institute for Energy Research, IREC, Jardins de les Dones de Negre 1, Sant Adrià de Besòs, Barcelona, 08930, Spain
| | - Séverine Gomès
- Université de Lyon, CNRS, INSA-Lyon, Université Claude Bernard Lyon 1, CETHIL UMR5008, Villeurbanne, F-69621, France
| | - Albert Tarancón
- Department of advanced energy materials, Catalonia Institute for Energy Research, IREC, Jardins de les Dones de Negre 1, Sant Adrià de Besòs, Barcelona, 08930, Spain
- Catalan Institution for Research and Advanced Studies, ICREA, Passeig de Lluís Companys, 23, Barcelona, 08010, Spain
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Wang X, Gonçalves W, Lacroix D, Isaiev M, Gomès S, Termentzidis K. Thermal conductivity temperature dependence of water confined in nanoporous silicon. J Phys Condens Matter 2022; 34:305701. [PMID: 35405665 DOI: 10.1088/1361-648x/ac664b] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/01/2022] [Accepted: 04/11/2022] [Indexed: 05/27/2023]
Abstract
Recently, it has been shown that high density nanoconfined water was the reason of the important enhancement of the effective thermal conductivity up to a factor of 50% of a nanoporous silicon filled with water. In this work, using molecular dynamics simulations, we further investigate the role of the temperatureT(from 285 to 360 K) on the thermal conductivity enhancement of nanohybrid porous silicon and water system. Furthermore, by studying and analysing several structural and dynamical parameters of the nanoconfined water, we give physical insights of the observed phenomena. Upon increasing the temperature of the system, the thermal conductivity of the hybrid system increases reaching a maximum forT= 300 K. With this article, we prove the existence of new heat flux channels between a solid matrix and a nanoconfined liquid, with clear signatures both in the radial distribution function, mean square displacements, water molecules orientation, hydrogen bond networks and phonon density of states.
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Affiliation(s)
- Xiaorui Wang
- Univ. Lyon, INSA-Lyon, CETHIL CNRS-UMR5008, F-69621, Villeurbanne, France
| | - William Gonçalves
- Univ. Lyon, INSA-Lyon, CETHIL CNRS-UMR5008, F-69621, Villeurbanne, France
| | - David Lacroix
- Université de Lorraine, CNRS, LEMTA, Nancy F-54000, France
| | - Mykola Isaiev
- Université de Lorraine, CNRS, LEMTA, Nancy F-54000, France
| | - Séverine Gomès
- Univ. Lyon, INSA-Lyon, CETHIL CNRS-UMR5008, F-69621, Villeurbanne, France
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Nguyen TP, Thiery L, Euphrasie S, Gomès S, Hay B, Vairac P. Calibration of thermocouple-based scanning thermal microscope in active mode (2ω method). Rev Sci Instrum 2019; 90:114901. [PMID: 31779385 DOI: 10.1063/1.5119044] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/08/2019] [Accepted: 10/26/2019] [Indexed: 06/10/2023]
Abstract
We present a procedure dedicated to the calibration of a scanning thermal microscopy probe operated in an active mode and a modulated regime especially for the measurement of solid material thermal conductivities. The probe used is a microthermocouple wire mounted on a quartz tuning fork. Measurements on reference samples are performed successively in vacuum and ambient air conditions revealing a clear difference in the dependence of the thermal interaction between the probe and the sample on the sample properties. Analytical modeling based on the resolution of the heat equation in the wire probe and a description of the thermal interaction using a network of thermal conductances are used to fit experimental data and analyze this difference. We have experimentally verified that the effective thermal contact radius of the probe tip depends on the sample thermal conductivity in ambient conditions, whereas it remains constant in vacuum. We have defined the measurement range of the technique based on the decrease in the probe sensitivity at high thermal conductivities. Considering the experimental noise of our electrical device, it is shown that the maximum measurable value of thermal conductivity is near 23 W m-1 K-1 in vacuum and 37 W m-1 K-1 in ambient air conditions. Moreover, the lowest uncertainties are obtained for thermal conductivities below 5 W m-1 K-1 typically.
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Affiliation(s)
- T P Nguyen
- Institut FEMTO-ST, UMR 6174, CNRS, ENSMM, Univ. Bourgogne Franche-Comté, 15B, Avenue des Montboucons, 25030 Besancon Cedex, France
| | - L Thiery
- Institut FEMTO-ST, UMR 6174, CNRS, ENSMM, Univ. Bourgogne Franche-Comté, 15B, Avenue des Montboucons, 25030 Besancon Cedex, France
| | - S Euphrasie
- Institut FEMTO-ST, UMR 6174, CNRS, ENSMM, Univ. Bourgogne Franche-Comté, 15B, Avenue des Montboucons, 25030 Besancon Cedex, France
| | - S Gomès
- CETHIL UMR5008, Univ. Lyon, CNRS, INSA-Lyon, Univ. Claude Bernard Lyon 1, F-69621 Villeurbanne, France
| | - B Hay
- LNE, 1 Rue Gaston Boissier, 75015 Paris, France
| | - P Vairac
- Institut FEMTO-ST, UMR 6174, CNRS, ENSMM, Univ. Bourgogne Franche-Comté, 15B, Avenue des Montboucons, 25030 Besancon Cedex, France
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Assy A, Gomès S. Temperature-dependent capillary forces at nano-contacts for estimating the heat conduction through a water meniscus. Nanotechnology 2015; 26:355401. [PMID: 26245265 DOI: 10.1088/0957-4484/26/35/355401] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
The temperature dependence of the capillary forces at nano-sized contacts is investigated. Two different resistive scanning thermal microscopy (SThM) nanoprobes are used in this study. Measurements of the capillary forces are reported as a function of the probe temperature on hydrophilic samples of different thermal properties. These forces appear to be largely reduced for probe temperatures larger than a threshold temperature, where the value depends on the sample thermal conductance. This could pave the way to an alternative solution to reduce the stiction in nano/ micro-electromechanical (NEMS/MEMS) devices. The dimensions of the water meniscus at the probe-sample contact were then estimated. Moreover, these results help the evaluation of thermal conductance through the water meniscus. It is found, through this work, that the values of the thermal conductance through the water meniscus can represent 6% of those of the contact thermal conductance in the case of the KNT probe (from Kelvin nanotechnology). These values can be equal to 4% of those of thermal conduction in the cantilever-sample air gap in the case of a doped-silicon probe.
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Affiliation(s)
- Ali Assy
- Centre d'Energétique et de Thermique de Lyon (CETHIL), UMR CNRS 5008, INSA Lyon, UCBL, Université de Lyon, Villeurbanne, France
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Pailhès S, Euchner H, Giordano VM, Debord R, Assy A, Gomès S, Bosak A, Machon D, Paschen S, de Boissieu M. Localization of propagative phonons in a perfectly crystalline solid. Phys Rev Lett 2014; 113:025506. [PMID: 25062208 DOI: 10.1103/physrevlett.113.025506] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/28/2014] [Indexed: 06/03/2023]
Abstract
Perfectly crystalline solids are excellent heat conductors. Prominent counterexamples are intermetallic clathrates, guest-host systems with a high potential for thermoelectric applications due to their ultralow thermal conductivities. Our combined experimental and theoretical investigation of the lattice dynamics of a particularly simple binary representative, Ba(8)Si(46), identifies the mechanism responsible for the reduction of lattice thermal conductivity intrinsic to the perfect crystal structure. Above a critical wave vector, the purely harmonic guest-host interaction leads to a drastic transfer of spectral weight to the guest atoms, corresponding to a localization of the propagative phonons.
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Affiliation(s)
- S Pailhès
- Institute of Light and Matter, UMR5306 Université Lyon 1-CNRS, Université de Lyon 69622 Villeurbanne cedex, France
| | - H Euchner
- Institut für Theoretische und Angwandte Physik, Universität Stuttgart, D-70550 Stuttgart, Germany and Institute of Materials Science and Technology, Vienna University of Technology, A-1040 Vienna, Austria
| | - V M Giordano
- Institute of Light and Matter, UMR5306 Université Lyon 1-CNRS, Université de Lyon 69622 Villeurbanne cedex, France and CNRS, SIMAP, F-38000 Grenoble, France
| | - R Debord
- Institute of Light and Matter, UMR5306 Université Lyon 1-CNRS, Université de Lyon 69622 Villeurbanne cedex, France
| | - A Assy
- Université de Lyon, INSA-Lyon, CETHIL UMR5008, F-69621 Villeurbanne, France
| | - S Gomès
- Université de Lyon, CNRS, CETHIL UMR5008, F-69621, France
| | - A Bosak
- European Synchrotron Radiation Facility, BP 220, F-38043 Grenoble cedex, France
| | - D Machon
- Institute of Light and Matter, UMR5306 Université Lyon 1-CNRS, Université de Lyon 69622 Villeurbanne cedex, France
| | - S Paschen
- Institute of Solid State Physics, Vienna University of Technology, 1040 Vienna, Austria
| | - M de Boissieu
- Université Grenoble Alpes, SIMAP, F-38000 Grenoble, France and CNRS, SIMAP, F-38000 Grenoble, France
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Chapuis PO, Rousseau E, Assy A, Gomès S, Lefèvre S, Volz S. Heat transfer between a hot AFM tip and a cold sample: impact of the air pressure. ACTA ACUST UNITED AC 2013. [DOI: 10.1557/opl.2013.674] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
Abstract
ABSTRACTWe observe the heat flux exchanged by the hot tip of a scanning thermal microscope, which is an instrument based on the atomic force microscope. We first vary the pressure in order to analyze the impact on the hot tip temperature. Then the distance between the tip and a cold sample is varied down to few nanometers, in order to reach the ballistic regime. We observe the cooling of the tip due to the tip-sample heat flux and compare it to the current models in the literature.
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