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Igura K, Nozawa K, Ishiyama T, Suemasu T, Toko K. Strain-dependent grain boundary properties of n-type germanium layers. Sci Rep 2024; 14:7812. [PMID: 38565560 PMCID: PMC10987518 DOI: 10.1038/s41598-024-56282-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/07/2023] [Accepted: 03/04/2024] [Indexed: 04/04/2024] Open
Abstract
Polycrystalline Ge thin films have attracted considerable attention as potential materials for use in various electronic and optical devices. We recently developed a low-temperature solid-phase crystallization technology for a doped Ge layer and achieved the highest electron mobility in a polycrystalline Ge thin film. In this study, we investigated the effects of strain on the crystalline and electrical properties of n-type polycrystalline Ge layers. By inserting a GeOx interlayer directly under Ge and selecting substrates with different coefficients of thermal expansion, we modulated the strain in the polycrystalline Ge layer, ranging from approximately 0.6% (tensile) to - 0.8% (compressive). Compressive strain enlarged the grain size to 12 µm, but decreased the electron mobility. The temperature dependence of the electron mobility clarified that changes in the potential barrier height of the grain boundary caused this behavior. Furthermore, we revealed that the behavior of the grain boundary barrier height with respect to strain is opposite for the n- and p-types. This result strongly suggests that this phenomenon is due to the piezoelectric effect. These discoveries will provide guidelines for improving the performance of Ge devices and useful physical knowledge of various polycrystalline semiconductor thin films.
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Affiliation(s)
- Kota Igura
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Koki Nozawa
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan.
| | - Takamitsu Ishiyama
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
- JSPS Research Fellow, 8 Ichiban-cho, Chiyoda-ku, Tokyo, 102-8472, Japan
| | - Takashi Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Kaoru Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan.
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2
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Sarkar D, Mottakin M, Mahmud Hasan A, Selvanathan V, Sobayel K, Khan M, Masum Rabbani A, Shahinuzzaman M, Aminuzzaman M, Anuar FH, Suemasu T, Sopian K, Akhtaruzzaman M. A Comprehensive Study on RbGeI3 based Inorganic Perovskite Solar Cell using Green Synthesized CuCrO2 as Hole Conductor. J Photochem Photobiol A Chem 2023. [DOI: 10.1016/j.jphotochem.2023.114623] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/12/2023]
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3
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Maeda S, Ishiyama T, Nishida T, Ozawa T, Saitoh N, Yoshizawa N, Suemasu T, Toko K. High Thermoelectric Performance in Polycrystalline GeSiSn Ternary Alloy Thin Films. ACS Appl Mater Interfaces 2022; 14:54848-54854. [PMID: 36450141 DOI: 10.1021/acsami.2c14785] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/17/2023]
Abstract
Group IV materials are promising candidates for highly reliable and human-friendly thin-film thermoelectric generators, used for micro-energy harvesting. In this study, we investigated the synthesis and thermoelectric applications of a Ge-based ternary alloy thin film, Ge1-x-ySixSny. The solid-phase crystallization of the highly densified amorphous precursors allowed the formation of high-quality polycrystalline Ge1-x-ySixSny layers on an insulating substrate. The small compositions of Si and Sn in Ge1-x-ySixSny (x < 0.15 and y < 0.05) lowered the thermal conductivity (3.1 W m-1 K-1) owing to the alloy scattering of phonons, while maintaining a high carrier mobility (approximately 200 cm2 V-1 s-1). The solid-phase diffusion of Ga and P allowed us to control the carrier concentration to the order of 1019 cm-3 for holes and 1018 cm-3 for electrons. For both p- and n-type Ge1-x-ySixSny, the power factor peaked at x = 0.06 and y = 0.02, reaching 1160 μW m-1 K-2 for p-type and 2040 μW m-1 K-2 for n-type. The resulting dimensionless figure of merits (0.12 for p-type and 0.20 for n-type) are higher than those of most environmentally friendly thermoelectric thin films. These results indicate that group IV alloys are promising candidates for high-performance, reliable thin-film thermoelectric generators.
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Affiliation(s)
- Shintaro Maeda
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki305-8573, Japan
| | - Takamitsu Ishiyama
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki305-8573, Japan
| | - Takeshi Nishida
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki305-8573, Japan
| | - Tomoki Ozawa
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki305-8573, Japan
| | - Noriyuki Saitoh
- Electron Microscope Facility, TIA, AIST, 1-2-1 Namiki, Tsukuba, Ibaraki305-8564, Japan
| | - Noriko Yoshizawa
- Global Zero Emission Research Center, AIST, 16-1 Onogawa, Tsukuba, Ibaraki305-8569, Japan
| | - Takashi Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki305-8573, Japan
| | - Kaoru Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki305-8573, Japan
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4
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Suzuki T, Murata H, Kado Y, Ishiyama T, Saitoh N, Yoshizawa N, Suemasu T, Toko K. Thickness Dependency of Battery Anode Properties in Multilayer Graphene. ACS Appl Mater Interfaces 2022; 14:54670-54675. [PMID: 36383763 DOI: 10.1021/acsami.2c14152] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/16/2023]
Abstract
With the development of practical thin-film batteries, multilayer graphene (MLG) is being actively investigated as an anode material. Therefore, research on determining a technique to fabricate thick MLG on arbitrary substrates at low temperatures is essential. In this study, we formed an MLG with controlled thickness at low temperatures using a layer exchange (LE) technique and evaluated its anode properties. The LE technique enabled the formation of a uniform MLG with a wide range of thicknesses (25-500 nm) on Ta foil. The charge/discharge characterization using coin-type cells revealed that the total capacity, which corresponded to Li intercalation into the MLG interlayer, increased with increasing MLG thickness. In contrast, cross-sectional transmission electron microscopy showed a metal oxide formed at the MLG/Ta interface during annealing, which had small Li capacity. MLG with sufficient thickness (500 nm) exhibited an excellent Coulombic efficiency and capacity retention compared to bulk graphite formed at high temperatures. These results have led to the development of inexpensive and reliable rechargeable thin-film batteries.
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Affiliation(s)
- Taisei Suzuki
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan
| | - Hiromasa Murata
- Device Technology Research Institute, AIST, 1-1-1 Umezono, Tsukuba 305-8568, Japan
| | - Yuya Kado
- Energy Process Research Institute, AIST, 16-1 Onogawa, Tsukuba 305-8569, Japan
| | - Takamitsu Ishiyama
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan
| | - Noriyuki Saitoh
- Electron Microscope Facility, TIA, AIST, 1-2-1 Namiki, Tsukuba 305-8564, Japan
| | - Noriko Yoshizawa
- Global Zero Emission Research Center, AIST, 16-1 Onogawa, Tsukuba 305-8569, Japan
| | - Takashi Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan
| | - Kaoru Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan
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Imajo T, Ishiyama T, Nozawa K, Suemasu T, Toko K. Acceptor defects in polycrystalline Ge layers evaluated using linear regression analysis. Sci Rep 2022; 12:14941. [PMID: 36056074 PMCID: PMC9440008 DOI: 10.1038/s41598-022-19221-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/27/2022] [Accepted: 08/25/2022] [Indexed: 11/09/2022] Open
Abstract
Polycrystalline Ge thin films have recently attracted renewed attention as a material for various electronic and optical devices. However, the difficulty in the Fermi level control of polycrystalline Ge films owing to their high density of defect-induced acceptors has limited their application in the aforementioned devices. Here, we experimentally estimated the origin of acceptor defects by significantly modulating the crystallinity and electrical properties of polycrystalline Ge layers and investigating their correlation. Our proposed linear regression analysis method, which is based on deriving the acceptor levels and their densities from the temperature dependence of the hole concentration, revealed the presence of two different acceptor levels. A systematic analysis of the effects of grain size and post annealing on the hole concentration suggests that deep acceptor levels (53-103 meV) could be attributed to dangling bonds located at grain boundaries, whereas shallow acceptor levels (< 15 meV) could be attributed to vacancies in grains. Thus, this study proposed a machine learning-based simulation method that can be widely applied in the analysis of physical properties, and can provide insights into the understanding and control of acceptor defects in polycrystalline Ge thin films.
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Affiliation(s)
- Toshifumi Imajo
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan.,JSPS Research Fellow, 8 Ichiban-cho, Chiyoda-ku, Tokyo, 102-8472, Japan
| | - Takamitsu Ishiyama
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Koki Nozawa
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Takashi Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Kaoru Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan.
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6
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Murata H, Nozawa K, Suzuki T, Kado Y, Suemasu T, Toko K. Si 1-xGe x anode synthesis on plastic films for flexible rechargeable batteries. Sci Rep 2022; 12:13779. [PMID: 35962140 PMCID: PMC9374656 DOI: 10.1038/s41598-022-18072-4] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/28/2022] [Accepted: 08/04/2022] [Indexed: 11/09/2022] Open
Abstract
SiGe is a promising anode material for replacing graphite in next generation thin-film batteries owing to its high theoretical charge/discharge capacity. Metal-induced layer exchange (LE) is a unique technique used for the low-temperature synthesis of SiGe layers on arbitrary substrates. Here, we demonstrate the synthesis of Si1-xGex (x = 0-1) layers on plastic films using Al-induced LE. The resulting SiGe layers exhibited high electrical conductivity (up to 1200 S cm-1), reflecting the self-organized doping effect of LE. Moreover, the Si1-xGex layer synthesized by the same process was adopted as the anode for the lithium-ion battery. All Si1-xGex anodes showed clear charge/discharge operation and high coulombic efficiency (≥ 97%) after 100 cycles. While the discharge capacities almost reflected the theoretical values at each x at 0.1 C, the capacity degradation with increasing current rate strongly depended on x. Si-rich samples exhibited high initial capacity and low capacity retention, while Ge-rich samples showed contrasting characteristics. In particular, the Si1-xGex layers with x ≥ 0.8 showed excellent current rate performance owing to their high electrical conductivity and low volume expansion, maintaining a high capacity (> 500 mAh g-1) even at a high current rate (10 C). Thus, we revealed the relationship between SiGe composition and anode characteristics for the SiGe layers formed by LE at low temperatures. These results will pave the way for the next generation of flexible batteries based on SiGe anodes.
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Affiliation(s)
- H Murata
- Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki, 305-8568, Japan.
| | - K Nozawa
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - T Suzuki
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Y Kado
- Energy Process Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
| | - T Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - K Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan.
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7
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Yamashita Y, Takayanagi K, Gotoh K, Toko K, Usami N, Suemasu T. Zn 1-xGe xO y Passivating Interlayers for BaSi 2 Thin-Film Solar Cells. ACS Appl Mater Interfaces 2022; 14:13828-13835. [PMID: 35170952 DOI: 10.1021/acsami.1c23070] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
BaSi2 is a promising absorber material for next-generation thin-film solar cells (TFSCs). For high-efficiency TFSCs, a suitable interlayer should be found for every light absorber. However, such an interlayer has not been studied for BaSi2. In this study, we investigated amorphous Zn1-xGexOy films as interlayers for BaSi2. The Zn/Ge atomic ratio in the Zn1-xGexOy film and the optical band gap depend on the substrate temperature during sputtering deposition. A suitable i-Zn1-xGexOy/BaSi2 heterointerface with spike-type conduction band offset was achieved when Zn1-xGexOy was deposited on BaSi2 at 50 °C. Furthermore, photoresponsivity measurements revealed that Zn1-xGexOy has an excellent surface passivation effect on BaSi2. When the thickness of Zn1-xGexOy was 2 nm, a high photoresponsivity of 0.9 A/W was obtained for a 500 nm thick BaSi2 layer at a wavelength of 780 nm under an applied bias voltage of 0.5 V between the front and rear electrodes, where the photoresponsivity in the short-wavelength region was significantly improved compared with that of BaSi2 capped with an amorphous Si layer. X-ray photoelectron spectroscopy revealed that the Zn1-xGexOy films suppressed the oxidation of the BaSi2 surface, decreasing the carrier recombination rate. This is the first demonstration of passivation interlayers for BaSi2 with suitable band alignment for carrier transport and surface passivation effects.
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Affiliation(s)
- Yudai Yamashita
- Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Kaori Takayanagi
- Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Kazuhiro Gotoh
- Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
| | - Kaoru Toko
- Department of Applied Physics, Faculty of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Noritaka Usami
- Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
| | - Takashi Suemasu
- Department of Applied Physics, Faculty of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
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8
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Ozawa T, Murata M, Suemasu T, Toko K. Flexible Thermoelectric Generator Based on Polycrystalline SiGe Thin Films. Materials (Basel) 2022; 15:ma15020608. [PMID: 35057324 PMCID: PMC8782019 DOI: 10.3390/ma15020608] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/30/2021] [Revised: 12/25/2021] [Accepted: 01/12/2022] [Indexed: 12/07/2022]
Abstract
Flexible and reliable thermoelectric generators (TEGs) will be essential for future energy harvesting sensors. In this study, we synthesized p- and n-type SiGe layers on a high heat-resistant polyimide film using metal-induced layer exchange (LE) and demonstrated TEG operation. Despite the low process temperature (<500 °C), the polycrystalline SiGe layers showed high power factors of 560 µW m−1 K−2 for p-type Si0.4Ge0.6 and 390 µW m−1 K−2 for n-type Si0.85Ge0.15, owing to self-organized doping in LE. Furthermore, the power factors indicated stable behavior with changing measurement temperature, an advantage of SiGe as an inorganic material. An in-plane π-type TEG based on these SiGe layers showed an output power of 0.45 µW cm−2 at near room temperature for a 30 K temperature gradient. This achievement will enable the development of environmentally friendly and highly reliable flexible TEGs for operating micro-energy devices in the future Internet of Things.
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Affiliation(s)
- Tomoki Ozawa
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan; (T.O.); (T.S.)
| | - Masayuki Murata
- Research Institute for Energy Conservation, AIST, Tsukuba 305-8569, Japan
- Correspondence: (M.M.); (K.T.)
| | - Takashi Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan; (T.O.); (T.S.)
| | - Kaoru Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan; (T.O.); (T.S.)
- Correspondence: (M.M.); (K.T.)
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Ito K, Honda S, Suemasu T. Transition metal nitrides and their mixed crystals for spintronics. Nanotechnology 2021; 33:062001. [PMID: 34649229 DOI: 10.1088/1361-6528/ac2fe4] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/12/2021] [Accepted: 10/14/2021] [Indexed: 06/13/2023]
Abstract
Anti-perovskite transition metal nitrides exhibit a variety of magnetic properties-such as ferromagnetic, ferrimagnetic, and paramagnetic-depending on the 3dtransition metal. Fe4N and Co4N are ferromagnetic at room temperature (RT), and the minority spins play a dominant role in the electrical transport properties. However, Mn4N is ferrimagnetic at RT and exhibits a perpendicular magnetic anisotropy caused by tensile strain. Around the magnetic compensation in Mn4N induced by impurity doping, researchers have demonstrated ultrafast current-induced domain wall motion reaching 3000 m s-1at RT, making switching energies lower and switching speed higher compared with Mn4N. In this review article, we start with individual magnetic nitrides-such as Fe4N, Co4N, Ni4N, and Mn4N; describe the nitrides' features; and then discuss compounds such as Fe4-xAxN (A = Co, Ni, and Mn) and Mn4-xBxN (B = Ni, Co, and Fe) to evaluate nitride properties from the standpoint of spintronics applications. We pay particular attention to preferential sites of A and B atoms in these compounds, based on x-ray absorption spectroscopy and x-ray magnetic circular dichroism.
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Affiliation(s)
- Keita Ito
- Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan
- Center for Spintronics Research Network, Tohoku University, Sendai 980-8577, Japan
| | - Syuta Honda
- Department of Pure and Applied Physics, Kansai University, Suita, Osaka 564-8680, Japan
| | - Takashi Suemasu
- Department of Applied Physics, Faculty of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
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10
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Abstract
Polycrystalline Ge thin films have attracted increasing attention because their hole mobilities exceed those of single-crystal Si wafers, while the process temperature is low. In this study, we investigate the strain effects on the crystal and electrical properties of polycrystalline Ge layers formed by solid-phase crystallization at 375 °C by modulating the substrate material. The strain of the Ge layers is in the range of approximately 0.5% (tensile) to -0.5% (compressive), which reflects both thermal expansion difference between Ge and substrate and phase transition of Ge from amorphous to crystalline. For both tensile and compressive strains, a large strain provides large crystal grains with sizes of approximately 10 μm owing to growth promotion. The potential barrier height of the grain boundary strongly depends on the strain and its direction. It is increased by tensile strain and decreased by compressive strain. These findings will be useful for the design of Ge-based thin-film devices on various materials for Internet-of-things technologies.
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Affiliation(s)
- Toshifumi Imajo
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan. .,JSPS Research Fellow, 8 Ichiban-cho, Chiyoda-ku, Tokyo, 102-8472, Japan.
| | - Takashi Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Kaoru Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan. .,PRESTO, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama, 332-0012, Japan.
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Ghosh S, Komori T, Hallal A, Peña Garcia J, Gushi T, Hirose T, Mitarai H, Okuno H, Vogel J, Chshiev M, Attané JP, Vila L, Suemasu T, Pizzini S. Current-Driven Domain Wall Dynamics in Ferrimagnetic Nickel-Doped Mn 4N Films: Very Large Domain Wall Velocities and Reversal of Motion Direction across the Magnetic Compensation Point. Nano Lett 2021; 21:2580-2587. [PMID: 33705154 DOI: 10.1021/acs.nanolett.1c00125] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Spin-transfer torque (STT) and spin-orbit torque (SOT) are spintronic phenomena allowing magnetization manipulation using electrical currents. Beyond their fundamental interest, they allow developing new classes of magnetic memories and logic devices, in particular based on domain wall (DW) motion. In this work, we report the study of STT-driven DW motion in ferrimagnetic manganese nickel nitride (Mn4-xNixN) films, in which magnetization and angular momentum compensation can be obtained by the fine adjustment of the Ni content. Large domain wall velocities, approaching 3000 m/s, are measured for Ni compositions close to the angular momentum compensation point. The reversal of the DW motion direction, observed when the compensation composition is crossed, is related to the change of direction of the angular momentum with respect to that of the spin polarization. This is confirmed by the results of ab initio band structure calculations.
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Affiliation(s)
- Sambit Ghosh
- Université Grenoble Alpes, CEA, CNRS, Grenoble INP, IRIG-Spintec, 38054 Grenoble, France
- Institute of Applied Physics, Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Taro Komori
- Institute of Applied Physics, Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Ali Hallal
- Université Grenoble Alpes, CEA, CNRS, Grenoble INP, IRIG-Spintec, 38054 Grenoble, France
| | - Jose Peña Garcia
- Université Grenoble Alpes, CNRS, Institut Néel, 38042 Grenoble, France
| | - Toshiki Gushi
- Université Grenoble Alpes, CEA, CNRS, Grenoble INP, IRIG-Spintec, 38054 Grenoble, France
- Institute of Applied Physics, Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Taku Hirose
- Institute of Applied Physics, Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Haruka Mitarai
- Institute of Applied Physics, Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Hanako Okuno
- Université Grenoble Alpes, CEA, IRIG-MEM, 38000 Grenoble, France
| | - Jan Vogel
- Université Grenoble Alpes, CNRS, Institut Néel, 38042 Grenoble, France
| | - Mairbek Chshiev
- Université Grenoble Alpes, CEA, CNRS, Grenoble INP, IRIG-Spintec, 38054 Grenoble, France
- Institut Universitaire de France, 75231, Paris, France
| | - Jean-Philippe Attané
- Université Grenoble Alpes, CEA, CNRS, Grenoble INP, IRIG-Spintec, 38054 Grenoble, France
| | - Laurent Vila
- Université Grenoble Alpes, CEA, CNRS, Grenoble INP, IRIG-Spintec, 38054 Grenoble, France
| | - Takashi Suemasu
- Institute of Applied Physics, Graduate School of Pure and Applied Sciences, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Stefania Pizzini
- Université Grenoble Alpes, CNRS, Institut Néel, 38042 Grenoble, France
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Murata H, Saitoh N, Yoshizawa N, Suemasu T, Toko K. Impact of the carbon membrane inserted below Ni in the layer exchange of multilayer graphene. CrystEngComm 2020. [DOI: 10.1039/d0ce00394h] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
High-quality multilayer graphene on glass is achieved at a low temperature (400 °C).
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Affiliation(s)
- H. Murata
- Institute of Applied Physics
- University of Tsukuba
- Tsukuba
- Japan
| | - N. Saitoh
- Electron Microscope Facility
- TIA
- AIST
- Tsukuba 305-8569
- Japan
| | - N. Yoshizawa
- Electron Microscope Facility
- TIA
- AIST
- Tsukuba 305-8569
- Japan
| | - T. Suemasu
- Institute of Applied Physics
- University of Tsukuba
- Tsukuba
- Japan
| | - K. Toko
- Institute of Applied Physics
- University of Tsukuba
- Tsukuba
- Japan
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13
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Gushi T, Jovičević Klug M, Peña Garcia J, Ghosh S, Attané JP, Okuno H, Fruchart O, Vogel J, Suemasu T, Pizzini S, Vila L. Large Current Driven Domain Wall Mobility and Gate Tuning of Coercivity in Ferrimagnetic Mn 4N Thin Films. Nano Lett 2019; 19:8716-8723. [PMID: 31664840 DOI: 10.1021/acs.nanolett.9b03416] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Spintronics, which is the basis of a low-power, beyond-CMOS technology for computational and memory devices, remains up to now entirely based on critical materials such as Co, heavy metals and rare-earths. Here, we show that Mn4N, a rare-earth free ferrimagnet made of abundant elements, is an exciting candidate for the development of sustainable spintronics devices. Mn4N thin films grown epitaxially on SrTiO3 substrates possess remarkable properties, such as a perpendicular magnetization, a very high extraordinary Hall angle (2%) and smooth domain walls at the millimeter scale. Moreover, domain walls can be moved at record speeds by spin-polarized currents, in absence of spin-orbit torques. This can be explained by the large efficiency of the adiabatic spin transfer torque, due to the conjunction of a reduced magnetization and a large spin polarization. Finally, we show that the application of gate voltages through the SrTiO3 substrates allows modulating the Mn4N coercive field with a large efficiency.
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Affiliation(s)
- Toshiki Gushi
- Institute of Applied Physics, Graduate School of Pure and Applied Sciences , University of Tsukuba , Tsukuba , Ibaraki 305-8573 , Japan
- Université Grenoble Alpes , CEA, CNRS, Grenoble INP, SPINTEC , F-38000 Grenoble , France
| | | | - Jose Peña Garcia
- Université Grenoble Alpes , CNRS, Institut Neél , F-38042 Grenoble , France
| | - Sambit Ghosh
- Université Grenoble Alpes , CEA, CNRS, Grenoble INP, SPINTEC , F-38000 Grenoble , France
| | - Jean-Philippe Attané
- Université Grenoble Alpes , CEA, CNRS, Grenoble INP, SPINTEC , F-38000 Grenoble , France
| | - Hanako Okuno
- Université Grenoble Alpes , CEA, IRIG, MEM , F-38000 Grenoble , France
| | - Olivier Fruchart
- Université Grenoble Alpes , CEA, CNRS, Grenoble INP, SPINTEC , F-38000 Grenoble , France
| | - Jan Vogel
- Université Grenoble Alpes , CNRS, Institut Neél , F-38042 Grenoble , France
| | - Takashi Suemasu
- Institute of Applied Physics, Graduate School of Pure and Applied Sciences , University of Tsukuba , Tsukuba , Ibaraki 305-8573 , Japan
| | - Stefania Pizzini
- Université Grenoble Alpes , CNRS, Institut Neél , F-38042 Grenoble , France
| | - Laurent Vila
- Université Grenoble Alpes , CEA, CNRS, Grenoble INP, SPINTEC , F-38000 Grenoble , France
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14
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Murata H, Saitoh N, Yoshizawa N, Suemasu T, Toko K. Impact of Amorphous-C/Ni Multilayers on Ni-Induced Layer Exchange for Multilayer Graphene on Insulators. ACS Omega 2019; 4:14251-14254. [PMID: 31508548 PMCID: PMC6733173 DOI: 10.1021/acsomega.9b01708] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/10/2019] [Accepted: 08/06/2019] [Indexed: 06/10/2023]
Abstract
Layer exchange growth of amorphous carbon (a-C) is a unique technique for fabricating high-quality multilayer graphene (MLG) on insulators at low temperatures. We investigated the effects of the a-C/Ni multilayer structure on the quality of MLG formed by Ni-induced layer exchange. The crystal quality and electrical conductivity of MLG improved dramatically as the number of a-C/Ni multilayers increased. A 600 °C-annealed sample in which 15 layers of 4-nm-thick a-C and 0.5-nm-thick Ni were laminated recorded an electrical conductivity of 1430 S/cm. This value is close to that of highly oriented pyrolytic graphite synthesized at approximately 3000 °C. This improvement is likely related to the bond weakening in a-C due to the screening effect of Ni. We expect that these results will contribute to low-temperature synthesis of MLG using a solid-phase reaction with metals.
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Affiliation(s)
- Hiromasa Murata
- Institute
of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan
| | - Noriyuki Saitoh
- Electron
Microscope Facility, TIA, AIST, 16-1 Onogawa, Tsukuba 305-8569, Japan
| | - Noriko Yoshizawa
- Electron
Microscope Facility, TIA, AIST, 16-1 Onogawa, Tsukuba 305-8569, Japan
| | - Takashi Suemasu
- Institute
of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan
| | - Kaoru Toko
- Institute
of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan
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15
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Nakajima Y, Murata H, Saitoh N, Yoshizawa N, Suemasu T, Toko K. Low-Temperature (400 °C) Synthesis of Multilayer Graphene by Metal-Assisted Sputtering Deposition. ACS Omega 2019; 4:6677-6680. [PMID: 31459793 PMCID: PMC6649283 DOI: 10.1021/acsomega.9b00420] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/14/2019] [Accepted: 04/01/2019] [Indexed: 05/20/2023]
Abstract
Low-temperature synthesis of multilayer graphene (MLG) is essential for combining advanced electronic devices with carbon materials. We investigated the vapor-phase synthesis of MLG by sputtering deposition of C atoms on metal-coated insulators. Ni, Co, and Fe catalysts, which have high C solid solubility, enabled us to form MLG at 400 °C. The domain size and surface coverage of MLG were determined by the supplied amount of C atoms and the thickness of the metal layer associated with the solid solution amount of C. An average domain size of 2.5 μm and surface coverage of approximately 50% were obtained for a 1 μm thick Ni layer. Transmission electron microscopy demonstrated the high crystalline quality of the MLG layer despite the low processing temperature. Therefore, this simple sputtering technique has great potential for integrating graphene-based devices on various platforms.
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Affiliation(s)
- Yoshiki Nakajima
- Institute
of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan
| | - Hiromasa Murata
- Institute
of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan
- E-mail: (H.M.)
| | - Noriyuki Saitoh
- Electron
Microscope Facility, TIA, AIST, 16-1 Onogawa, Tsukuba 305-8569, Japan
| | - Noriko Yoshizawa
- Electron
Microscope Facility, TIA, AIST, 16-1 Onogawa, Tsukuba 305-8569, Japan
| | - Takashi Suemasu
- Institute
of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan
| | - Kaoru Toko
- Institute
of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573, Japan
- E-mail: (K.T.)
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16
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Murata H, Nakajima Y, Saitoh N, Yoshizawa N, Suemasu T, Toko K. High-Electrical-Conductivity Multilayer Graphene Formed by Layer Exchange with Controlled Thickness and Interlayer. Sci Rep 2019; 9:4068. [PMID: 30858422 PMCID: PMC6411750 DOI: 10.1038/s41598-019-40547-0] [Citation(s) in RCA: 27] [Impact Index Per Article: 5.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/19/2018] [Accepted: 02/19/2019] [Indexed: 11/19/2022] Open
Abstract
The layer exchange technique enables high-quality multilayer graphene (MLG) on arbitrary substrates, which is a key to combining advanced electronic devices with carbon materials. We synthesize uniform MLG layers of various thicknesses, t, ranging from 5 nm to 200 nm using Ni-induced layer exchange at 800 °C. Raman and transmission electron microscopy studies show the crystal quality of MLG is relatively low for t ≤ 20 nm and dramatically improves for t ≥ 50 nm when we prepare a diffusion controlling Al2O3 interlayer between the C and Ni layers. Hall effect measurements reveal the carrier mobility for t = 50 nm is 550 cm2/Vs, which is the highest Hall mobility in MLG directly formed on an insulator. The electrical conductivity (2700 S/cm) also exceeds a highly oriented pyrolytic graphite synthesized at 3000 °C or higher. Synthesis technology of MLG with a wide range of thicknesses will enable exploration of extensive device applications of carbon materials.
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Affiliation(s)
- Hiromasa Murata
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Yoshiki Nakajima
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Noriyuki Saitoh
- Electron Microscope Facility, TIA, AIST, 16-1 Onogawa, Tsukuba, 305-8569, Japan
| | - Noriko Yoshizawa
- Electron Microscope Facility, TIA, AIST, 16-1 Onogawa, Tsukuba, 305-8569, Japan
| | - Takashi Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Kaoru Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan. .,PRESTO, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama, 332-0012, Japan.
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17
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Chen X, Higashikozono S, Ito K, Jin L, Ho PL, Yu CP, Tai NH, Mayer J, Dunin-Borkowski RE, Suemasu T, Zhong X. Nanoscale measurement of giant saturation magnetization in α″-Fe 16N 2 by electron energy-loss magnetic chiral dichroism. Ultramicroscopy 2019; 203:37-43. [PMID: 30862364 DOI: 10.1016/j.ultramic.2019.02.016] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/28/2018] [Revised: 02/10/2019] [Accepted: 02/18/2019] [Indexed: 10/27/2022]
Abstract
Metastable α″-Fe16N2 thin films were reported to have a giant saturation magnetization of above 2200 emu/cm3 in 1972 and have been considered as candidates for next-generation rare-earth-free permanent magnetic materials. However, their magnetic properties have not been confirmed unequivocally. As a result of the limited spatial resolution of most magnetic characterization techniques, it is challenging to measure the saturation magnetization of the α″-Fe16N2 phase, as it is often mixed with the parent α'-Fe8N phase in thin films. Here, we use electron energy-loss magnetic chiral dichroism (EMCD), aberration-corrected transmission electron microscopy, X-ray diffraction and macroscopic magnetic measurements to study α″-Fe16N2 (containing ordered N atoms) and α'-Fe8N (containing disordered N atoms). The ratio of saturation magnetization in α″-Fe16N2 to that in α'-Fe8N is determined to be 1.31 ± 0.10 from quantitative EMCD measurements and dynamical diffraction calculations, confirming the giant saturation magnetization of α″-Fe16N2. Crystallographic information is also obtained about the two phases, which are mixed on the nanoscale.
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Affiliation(s)
- Xinfeng Chen
- National Center for Electron Microscopy in Beijing, Key Laboratory of Advanced Materials (MOE), The State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
| | - Soma Higashikozono
- Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Keita Ito
- Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Lei Jin
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich GmbH, Jülich 52425, Germany
| | - Ping-Luen Ho
- National Center for Electron Microscopy in Beijing, Key Laboratory of Advanced Materials (MOE), The State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
| | - Chu-Ping Yu
- National Center for Electron Microscopy in Beijing, Key Laboratory of Advanced Materials (MOE), The State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China; Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 30013, Taiwan
| | - Nyan-Hwa Tai
- Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 30013, Taiwan
| | - Joachim Mayer
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich GmbH, Jülich 52425, Germany; Central Facility for Electron Microscopy, RWTH Aachen University, Aachen 52074, Germany
| | - Rafal E Dunin-Borkowski
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich GmbH, Jülich 52425, Germany
| | - Takashi Suemasu
- Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Xiaoyan Zhong
- National Center for Electron Microscopy in Beijing, Key Laboratory of Advanced Materials (MOE), The State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China.
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18
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Nakajima Y, Murata H, Saitoh N, Yoshizawa N, Suemasu T, Toko K. Metal Catalysts for Layer-Exchange Growth of Multilayer Graphene. ACS Appl Mater Interfaces 2018; 10:41664-41669. [PMID: 30403335 DOI: 10.1021/acsami.8b14960] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Metal-induced layer-exchange growth of amorphous carbon (a-C) is a unique technique for fabricating high-quality, uniform multilayer graphene (MLG) directly on an insulating material. Here, we investigated the effect of transition-metal species on the interaction between metals and a-C in the temperature range of 600-1000 °C. As a result, metals were classified into four groups: (1) layer exchange (Co, Ni, Cr, Mn, Fe, Ru, Ir, and Pt), (2) carbonization (Ti, Mo, and W), (3) local MLG formation (Pd), and (4) no graphitization (Cu, Ag, and Au). Some layer-exchange metals allowed for low-temperature MLG synthesis at 600 °C, whereas others allowed for high-quality MLG with a Raman G/D peak ratio of up to 8.3. Based on the periodic table, we constructed metal selection guidelines for growing MLG on an insulator, opening the door for applications that combine advanced electronic devices with carbon materials.
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Affiliation(s)
- Yoshiki Nakajima
- Institute of Applied Physics , University of Tsukuba , 1-1-1 Tennodai , Tsukuba , Ibaraki 305-8573 , Japan
| | - Hiromasa Murata
- Institute of Applied Physics , University of Tsukuba , 1-1-1 Tennodai , Tsukuba , Ibaraki 305-8573 , Japan
| | - Noriyuki Saitoh
- Electron Microscope Facility , TIA, AIST , 16-1 Onogawa , Tsukuba , Ibaraki 305-8569 , Japan
| | - Noriko Yoshizawa
- Electron Microscope Facility , TIA, AIST , 16-1 Onogawa , Tsukuba , Ibaraki 305-8569 , Japan
| | - Takashi Suemasu
- PRESTO , Japan Science and Technology Agency , 4-1-8 Honcho , Kawaguchi , Saitama 332-0012 , Japan
| | - Kaoru Toko
- Institute of Applied Physics , University of Tsukuba , 1-1-1 Tennodai , Tsukuba , Ibaraki 305-8573 , Japan
- PRESTO , Japan Science and Technology Agency , 4-1-8 Honcho , Kawaguchi , Saitama 332-0012 , Japan
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19
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Imajo T, Toko K, Takabe R, Saitoh N, Yoshizawa N, Suemasu T. Fabrication of SrGe 2 thin films on Ge (100), (110), and (111) substrates. Nanoscale Res Lett 2018; 13:22. [PMID: 29340830 PMCID: PMC5770350 DOI: 10.1186/s11671-018-2437-1] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/15/2017] [Accepted: 01/04/2018] [Indexed: 06/07/2023]
Abstract
Semiconductor strontium digermanide (SrGe2) has a large absorption coefficient in the near-infrared light region and is expected to be useful for multijunction solar cells. This study firstly demonstrates the formation of SrGe2 thin films via a reactive deposition epitaxy on Ge substrates. The growth morphology of SrGe2 dramatically changed depending on the growth temperature (300-700 °C) and the crystal orientation of the Ge substrate. We succeeded in obtaining single-oriented SrGe2 using a Ge (110) substrate at 500 °C. Development on Si or glass substrates will lead to the application of SrGe2 to high-efficiency thin-film solar cells.
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Affiliation(s)
- T. Imajo
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573 Japan
| | - K. Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573 Japan
| | - R. Takabe
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573 Japan
| | - N. Saitoh
- Electron Microscope Facility, TIA, AIST, 16-1 Onogawa, Tsukuba, 305-8569 Japan
| | - N. Yoshizawa
- Electron Microscope Facility, TIA, AIST, 16-1 Onogawa, Tsukuba, 305-8569 Japan
| | - T. Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki 305-8573 Japan
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20
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Toko K, Yoshimine R, Moto K, Suemasu T. High-hole mobility polycrystalline Ge on an insulator formed by controlling precursor atomic density for solid-phase crystallization. Sci Rep 2017; 7:16981. [PMID: 29209030 PMCID: PMC5717061 DOI: 10.1038/s41598-017-17273-6] [Citation(s) in RCA: 58] [Impact Index Per Article: 8.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/28/2017] [Accepted: 11/23/2017] [Indexed: 11/18/2022] Open
Abstract
High-carrier mobility semiconductors on insulators are essential for fabricating advanced thin-film transistors, allowing for three-dimensional integrated circuits or high-performance mobile terminals. We investigate the low-temperature (375–450 °C) solid-phase crystallization (SPC) of Ge on a glass substrate, focusing on the precursor conditions. The substrate temperature during the precursor deposition, Td, ranged from 50 to 200 °C. According to the atomic density of the precursor and the Td dependent SPC properties, the precursor conditions were determined by three regimes: the low-density regime (Td < 100 °C), high-density regime (100 ≤ Td ≤ 125 °C), and nucleation regime (Td > 125 °C). The use of the precursor in the narrow high-density regime enabled us to form SPC-Ge with a hole mobility of 340 cm2/Vs, the highest value among semiconductor thin films grown on insulators at low temperature (<900 °C). The origins of the high hole mobility were determined to be both a large grain size (5 µm) and a low energy barrier height (6.4 meV) for the grain boundary. The findings from and knowledge gained in this study, that is, the influence of the precursor conditions on subsequent crystal growth, will be universal and applicable to various materials.
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Affiliation(s)
- Kaoru Toko
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan.
| | - Ryota Yoshimine
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Kenta Moto
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
| | - Takashi Suemasu
- Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, Ibaraki, 305-8573, Japan
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21
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Toko K, Nakata M, Jevasuwan W, Fukata N, Suemasu T. Vertically Aligned Ge Nanowires on Flexible Plastic Films Synthesized by (111)-Oriented Ge Seeded Vapor-Liquid-Solid Growth. ACS Appl Mater Interfaces 2015; 7:18120-4. [PMID: 26230716 DOI: 10.1021/acsami.5b05394] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/21/2023]
Abstract
Transfer-free fabrication of vertical Ge nanowires (NWs) on a plastic substrate is demonstrated using a vapor-liquid-solid (VLS) method. The crystal quality of Ge seed layers (50 nm thickness) prepared on plastic substrates strongly influenced the VLS growth morphology, i.e., the density, uniformity, and crystal quality of Ge NWs. The metal-induced layer exchange yielded a (111)-oriented Ge seed layer at 325 °C, which allowed for the VLS growth of vertically aligned Ge NWs. The Ge NW array had almost the same quality as that formed on a bulk Ge(111) substrate. Transmission electron microscopy demonstrated that the Ge NWs were defect-free single crystals. The present investigation paves the way for advanced electronic optical devices integrated on a low-cost flexible substrate.
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Affiliation(s)
- Kaoru Toko
- †Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Mitsuki Nakata
- †Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
| | - Wipakorn Jevasuwan
- ‡International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Namiki, Tsukuba, Ibaraki 305-0044, Japan
| | - Naoki Fukata
- ‡International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Namiki, Tsukuba, Ibaraki 305-0044, Japan
| | - Takashi Suemasu
- †Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
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22
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Toko K, Nakazawa K, Saitoh N, Yoshizawa N, Usami N, Suemasu T. Orientation control of Ge thin films by underlayer-selected Al-induced crystallization. CrystEngComm 2014. [DOI: 10.1039/c3ce42057d] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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23
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Toko K, Nakazawa K, Saitoh N, Yoshizawa N, Suemasu T. Self-organization of Ge(111)/Al/glass structures through layer exchange in metal-induced crystallization. CrystEngComm 2014. [DOI: 10.1039/c4ce01252f] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Al-induced crystallization enabled the self-organization of high-quality Ge/Al/glass structures through layer exchange at a low temperature of 325 °C.
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Affiliation(s)
- K. Toko
- Institute of Applied Physics
- University of Tsukuba
- Tsukuba, Japan
| | - K. Nakazawa
- Institute of Applied Physics
- University of Tsukuba
- Tsukuba, Japan
| | - N. Saitoh
- Electron Microscope Facility
- TIA
- AIST
- 16-1 Onogawa
- Tsukuba 305-8569, Japan
| | - N. Yoshizawa
- Electron Microscope Facility
- TIA
- AIST
- 16-1 Onogawa
- Tsukuba 305-8569, Japan
| | - T. Suemasu
- Institute of Applied Physics
- University of Tsukuba
- Tsukuba, Japan
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24
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Takabe R, Baba M, Nakamura K, Du W, Khan MA, Koike S, Toko K, Hara KO, Usami N, Suemasu T. Fabrication and characterizations of phosphorus-doped n-type BaSi2epitaxial films grown by molecular beam epitaxy. ACTA ACUST UNITED AC 2013. [DOI: 10.1002/pssc.201300326] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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25
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Latiff NAA, Yoneyama T, Shibutami T, Matsumaru K, Toko K, Suemasu T. Fabrication and characterization of polycrystalline BaSi2
by RF sputtering. ACTA ACUST UNITED AC 2013. [DOI: 10.1002/pssc.201300333] [Citation(s) in RCA: 40] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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26
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Ito K, Lee GH, Suemasu T. Epitaxial growth of ferromagnetic Fe4N thin films on SrTiO3(001) substrates by molecular beam epitaxy. ACTA ACUST UNITED AC 2011. [DOI: 10.1088/1742-6596/266/1/012091] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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27
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