Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions

High-performance flexible sensors are essential for real-time information analysis and constructing noncontact communication modules for emerging human-machine interactions. In these applications, batch fabrication of sensors that exhibit high performance at the wafer level is in high demand. Here, we present organic nanoforest-based humidity sensor (NFHS) arrays on a 6 in. flexible substrate prepared via a facile, cost-effective manufacturing approach. Such an NFHS achieves state-of-the-art overall performance: high sensitivity and fast recovery time; the best properties are at a small device footprint. The high sensitivity (8.84 pF/% RH) and fast response time (5 s) of the as-fabricated organic nanoforests are attributed to the abundant hydrophilic groups, the ultra-large surface area with a huge number of nanopores, and the vertically distributed structures beneficial to the transfer of molecules up and down. The NFHS also exhibits excellent long-term stability (90 days), superior mechanical flexibility, and good performance repeatability after bending. With these superiorities, the NFHS is further applied as a smart noncontact switch, and the NFHS array is used as the motion trajectory tracker. The wafer-level batch fabrication capability of our NFHS provides a potential strategy for developing practical applications of such humidity sensors.

Preparation of Tubular Forest-like and Other Carbon Structures Using Distinct Carbon Sources and Catalyst Concentrations

BACKGROUND

In this work, various carbon nanotubes (MWCNTs) were synthetized by the spray pyrolysis method. Resulting nanoforest-like and bamboo-like carbon nanotubes, as well as Yjunctions of carbon nanotubes, possess different shapes and morphology, depending on the kind of carbon source used and on the number of iron particles on the furnace tube surface, which derives from various concentrations of ferrocene catalyst.

METHODS

We used the spray pyrolysis method, using different carbon sources (n-pentane, n-hexane, nheptane, and acrylonitrile) as precursors and two different concentrations of ferrocene as a catalyst. Reactions of hydrocarbon decomposition were carried out at 800oC. The solution (hydrocarbon and catalyst) was introduced with a syringe, with a flow of 1 mL/min and the synthesis time of 20 min. Argon was used as carrier gas (1000 L/min). Preheater and oven temperatures were selected 180°C and 800°C, respectively, for each carbon source. The solution passed into a quartz tube placed in an oven.

RESULTS

According to the studies of carbon nanostructures, obtained from different precursors, it can be proposed that the structures synthesized from n-pentane, n-hexane and n-heptane are formed by the root growth method. The growth mechanism of MWCNTs was studied, confirming that the root growth formation of products takes place, whose parameters also depend on furnace temperature and gas flow rate. Dependence of interlayer distance (0.34-0.50 nm) in the formed MWCNTs on precursors and reaction conditions is also elucidated. The formation of carbon nanotubes does not merely depend on carbon precursors but also has strong correlations with such growth conditions as different catalyst concentrations, furnace temperature and gas flow rate. Such parameters as the amount of catalyst and synthesis time are also needed to be considered, since they are important to find minor values of these parameters in the synthesis of forest-like carbon nanotubes and other structures such as bamboo-like carbon nanotubes and Y-junctions in carbon nanotubes.

CONCLUSION

As a result of the evaluation of interlayer distance in CNTs formed from different carbon sources, a standard value of interlayer distance normally for CNTs is 0.34 nm and for pentane A (0.5 wt.%), hexane B (1 wt.%), toluene A (0.5 wt.%) the range is from 0.33 to 0.35 nm. In case of pentane and acrylonitrile, under an increase of the catalyst concentration, an increase of the value of interlayer distance takes place from 0.35 and 0.4 to 0.4 and 0.5 nm, respectively, but for hexane, heptane and cyclohexane, an increase of the catalyst concentration maintains the same interlayer distance. This involves the use of lower quantities of raw materials and, therefore less cost for obtaining these materials.