1
|
Qiao D, Shi F, Tian Y, Zhang W, Xie L, Guo S, Song C, Tie G. Ultra-Smooth Polishing of Single-Crystal Silicon Carbide by Pulsed-Ion-Beam Sputtering of Quantum-Dot Sacrificial Layers. Materials (Basel) 2023; 17:157. [PMID: 38204011 PMCID: PMC10779731 DOI: 10.3390/ma17010157] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/30/2023] [Revised: 12/23/2023] [Accepted: 12/26/2023] [Indexed: 01/12/2024]
Abstract
Single-crystal silicon carbide has excellent electrical, mechanical, and chemical properties. However, due to its high hardness material properties, achieving high-precision manufacturing of single-crystal silicon carbide with an ultra-smooth surface is difficult. In this work, quantum dots were introduced as a sacrificial layer in polishing for pulsed-ion-beam sputtering of single-crystal SiC. The surface of single-crystal silicon carbide with a quantum-dot sacrificial layer was sputtered using a pulsed-ion beam and compared with the surface of single-crystal silicon carbide sputtered directly. The surface roughness evolution of single-crystal silicon carbide etched using a pulsed ion beam was studied, and the mechanism of sacrificial layer sputtering was analyzed theoretically. The results show that direct sputtering of single-crystal silicon carbide will deteriorate the surface quality. On the contrary, the surface roughness of single-crystal silicon carbide with a quantum-dot sacrificial layer added using pulsed-ion-beam sputtering was effectively suppressed, the surface shape accuracy of the Ø120 mm sample was converged to 7.63 nm RMS, and the roughness was reduced to 0.21 nm RMS. Therefore, the single-crystal silicon carbide with the quantum-dot sacrificial layer added via pulsed-ion-beam sputtering can effectively reduce the micro-morphology roughness phenomenon caused by ion-beam sputtering, and it is expected to realize the manufacture of a high-precision ultra-smooth surface of single-crystal silicon carbide.
Collapse
Affiliation(s)
- Dongyang Qiao
- College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China; (D.Q.); (Y.T.); (W.Z.); (L.X.); (S.G.); (C.S.); (G.T.)
- Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China
- Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, 109 Deya Road, Changsha 410073, China
| | - Feng Shi
- College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China; (D.Q.); (Y.T.); (W.Z.); (L.X.); (S.G.); (C.S.); (G.T.)
- Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China
- Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, 109 Deya Road, Changsha 410073, China
| | - Ye Tian
- College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China; (D.Q.); (Y.T.); (W.Z.); (L.X.); (S.G.); (C.S.); (G.T.)
- Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China
- Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, 109 Deya Road, Changsha 410073, China
| | - Wanli Zhang
- College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China; (D.Q.); (Y.T.); (W.Z.); (L.X.); (S.G.); (C.S.); (G.T.)
- Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China
- Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, 109 Deya Road, Changsha 410073, China
| | - Lingbo Xie
- College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China; (D.Q.); (Y.T.); (W.Z.); (L.X.); (S.G.); (C.S.); (G.T.)
- Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China
- Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, 109 Deya Road, Changsha 410073, China
| | - Shuangpeng Guo
- College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China; (D.Q.); (Y.T.); (W.Z.); (L.X.); (S.G.); (C.S.); (G.T.)
- Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China
- Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, 109 Deya Road, Changsha 410073, China
| | - Ci Song
- College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China; (D.Q.); (Y.T.); (W.Z.); (L.X.); (S.G.); (C.S.); (G.T.)
- Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China
- Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, 109 Deya Road, Changsha 410073, China
| | - Guipeng Tie
- College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China; (D.Q.); (Y.T.); (W.Z.); (L.X.); (S.G.); (C.S.); (G.T.)
- Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China
- Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, 109 Deya Road, Changsha 410073, China
- Precision Optical Manufacturing and Testing Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
| |
Collapse
|