A Lithography-Free and Field-Programmable Photonic Metacanvas

Nanofabrication for Nanophotonics

Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field.

Switchable Pancharatnam-Berry Phases in Heterogeneously Integrated THz Metasurfaces

The Pancharatnam-Berry (PB) phase has revolutionized the design of metasurfaces, offering a straightforward and robust method for controlling wavefronts of electromagnetic waves. However, traditional metasurfaces have fixed PB phases determined by the orientation of their individual elements. In this study, an innovative structural design and integration scheme is proposed that utilizes vanadium dioxide, a phase-change material, to achieve thermally controlled dynamic PB phase control within the metasurface. By leveraging the material's properties, this can dynamically alter the optical orientation of individual elements of the metasurface and achieve temperature-dependent local phase modulation based on the geometric phase principle. This approach, combined with advanced fabrication processing technology, paves the way for next-generation dynamic devices with customizable functions.

Terahertz Nanoscopy on Low-Dimensional Materials: Toward Ultrafast Physical Phenomena

Low-dimensional materials (LDMs) with unique electromagnetic properties and diverse local phenomena have garnered significant interest, particularly for their low-energy responses within the terahertz (THz) range. Achieving deep subwavelength resolution, THz nanoscopy offers a promising route to investigate LDMs at the nanoscale. Steady-state THz nanoscopy has been demonstrated as a powerful tool for investigating light-matter interactions across boundaries and interfaces, enabling insights into physical phenomena such as localized collective oscillations, quantum confinement of quasiparticles, and metal-to-insulator phase transitions (MITs). However, tracking the ultrafast nonequilibrium dynamics of LDMs remains challenging. Ultrafast THz nanoscopy, with femtosecond temporal resolution, provides a direct pathway to investigate and manipulate the motion of, for example, charges, currents, and carriers at ultrashort time scales. In this review, we focus on recent advances in THz nanoscopy of LDMs, with particular emphasis on the ultrafast dynamics of light-matter interaction. We provide a concise overview of recent advances and suggest future research directions in this impactful field of interdisciplinary science.

Selective Laser Doping and Dedoping for Phase Engineering in Vanadium Dioxide Film

Vanadium dioxide (VO2), renowned for its reversible metal-to-insulator transition (MIT), has been widely used in configurable photonic and electronic devices. Precisely tailoring the MIT of VO2 on micro-/nano-scale is crucial for miniaturized and integrated devices. However, existing tailoring techniques like scanning probe microscopy, despite their precision, fall short in efficiency and adaptability, particularly on complex or curved surfaces. Herein, this work achieves the local engineering of the phase of VO2 films in high efficiency by employing laser writing to assist in the hydrogen doping or dedoping process. The laser doping and laser dedoping technique is also highly flexible, enabling the fabrication of reconfigurable, non-volatile, and multifunctional VO2 devices. This approach establishes a new paradigm for creating reconfigurable micro/nanophotonic and micro/nanoelectronic devices.

Rewritable Photonic Integrated Circuit Canvas Based on Low-Loss Phase Change Material and Nanosecond Pulsed Lasers

Programmable photonic integrated circuits (PICs) are an increasingly important platform in optical science and engineering. However, current programmable PICs are mostly formed through subtractive fabrication techniques, which limits the reconfigurability of the device and makes prototyping costly and time-consuming. A rewritable PIC architecture can circumvent these drawbacks, where PICs are repeatedly written and erased on a single PIC canvas. We demonstrate such a rewritable PIC platform by selective laser writing a layer of wide-band-gap phase change material (PCM) Sb2S3 with a low-cost benchtop setup. We show arbitrary patterning with resolution up to 300 nm and write dielectric assisted waveguides with a low optical loss of 0.0172 dB/μm. We envision that using this inexpensive benchtop platform thousands of PIC designs can be written, tested, and erased on the same chip without the need for lithography/etching tools or a nanofabrication facility, thus reducing manufacturing cost and increasing accessibility.

Multifunctional 2-bit coded reconfigurable metasurface based on graphene-vanadium dioxide

In this paper, a graphene-vanadium dioxide-based reconfigurable metasurface unit structure is proposed. Using the change at a graphene Fermi energy level on the surface of the unit structure to satisfy the 2-bit coding condition, four reflection units with a phase difference of 90 ∘ can be discovered. The modulating impact of the multi-beam reflection wave with 1-bit coding is then confirmed. Then we study the control of a single-beam reflected wave by metasurfaces combined with a convolution theorem in a 2-bit coding mode. Finally, when vanadium dioxide is in an insulating condition, the structure can also be transformed into a terahertz absorber. It is possible to switch between a reflection beam controller and a terahertz multifrequency absorber simply by changing the temperature of the vanadium dioxide layer without retooling a new metasurface. Moreover, compared with the 1-bit coded metasurface, it increases the ability of single-beam regulation, which makes the device more powerful for beam regulation.

Ultracompact Single-Photon Sources of Linearly Polarized Vortex Beams

Ultracompact chip-integrated single-photon sources of collimated beams with polarization-encoded states are crucial for integrated quantum technologies. However, most of currently available single-photon sources rely on external bulky optical components to shape the polarization and phase front of emitted photon beams. Efficient integration of quantum emitters with beam shaping and polarization encoding functionalities remains so far elusive. Here, ultracompact single-photon sources of linearly polarized vortex beams based on chip-integrated quantum emitter-coupled metasurfaces are presented, which are meticulously designed by fully exploiting the potential of nanobrick-arrayed metasurfaces. The authors first demonstrate on-chip single-photon generation of high-purity linearly polarized vortex beams with prescribed topological charges of 0, - 1, and +1. The multiplexing of single-photon emission channels with orthogonal linear polarizations carrying different topological charges are further realized and their entanglement is demonstarated. The work illustrates the potential and feasibility of ultracompact quantum emitter-coupled metasurfaces as a new quantum optics platform for realizing chip-integrated high-dimensional single-photon sources.

Single-pixel reconstructive mid-infrared micro-spectrometer

Miniaturized spectrometers in the mid-infrared (MIR) are critical in developing next-generation portable electronics for advanced sensing and analysis. The bulky gratings or detector/filter arrays in conventional micro-spectrometers set a physical limitation to their miniaturization. In this work, we demonstrate a single-pixel MIR micro-spectrometer that reconstructs the sample transmission spectrum by a spectrally dispersed light source instead of spatially grated light beams. The spectrally tunable MIR light source is realized based on the thermal emissivity engineered via the metal-insulator phase transition of vanadium dioxide (VO₂). We validate the performance by showing that the transmission spectrum of a magnesium fluoride (MgF₂) sample can be computationally reconstructed from sensor responses at varied light source temperatures. With potentially minimum footprint due to the array-free design, our work opens the possibility where compact MIR spectrometers are integrated into portable electronic systems for versatile applications.

Liquid Precursor-Guided Phase Engineering of Single-Crystal VO2 Beams

The study of VO₂ flourishes due to its rich competing phases induced by slight stoichiometry variations. However, the vague mechanism of stoichiometry manipulation makes the precise phase engineering of VO₂ still challenging. Here, stoichiometry manipulation of single-crystal VO₂ beams in liquid-assisted growth is systematically studied. Contrary to previous experience, oxygen-rich VO₂ phases are abnormally synthesized under a reduced oxygen concentration, revealing the important function of liquid V₂ O₅ precursor: It submerges VO₂ crystals and stabilizes their stoichiometric phase (M1) by isolating them from the reactive atmosphere, while the uncovered crystals are oxidized by the growth atmosphere. By varying the thickness of liquid V₂ O₅ precursor and thus the exposure time of VO₂ to the atmosphere, various VO₂ phases (M1, T, and M2) can be selectively stabilized. Furthermore, this liquid precursor-guided growth can be used to spatially manages multiphase structures in single VO₂ beams, enriching their deformation modes for actuation applications.

Temporal and spatial tuning of optical constants in praseodymium doped ceria by electrochemical means

Temporal and spatial tuning of the refractive index of optical thin films is desired for flat optics applications. The redistribution of mobile ions in mixed ionic-electronic conductors (MIEC) has been demonstrated to serve as a viable means for achieving optical tuning down to the nanoscale. Here we studied the dynamic range of the optical tuning achievable in the refractive index, in the MIEC oxide - Pr x Ce1-x O2-δ (PCO), for x = 0.1, 0.2 and 0.4, at 500 °C, by in-situ spectrophotometry. Significant increases in the modulation of both the imaginary and real optical constants in the visible and the adjacent spectra were obtained for increased doping levels. Device employing an electrochemical titration method was implemented to modulate the oxygen concentration, and thereby the optical transmission of PCO. Incorporation of a patterned top electrode allowed for the demonstration of spatial control of PCO thin film properties by in-situ video imaging of the optical switching process. The electrochemically induced optical state is shown to remain non-volatile upon quenching the device to room temperature under applied bias.

Tunable optical anisotropy in epitaxial phase-change VO2 thin films

We theoretically and experimentally demonstrate a strong and tunable optical anisotropy in epitaxially-grown VO2 thin films. Using a combination of temperature-dependent X-ray diffraction, spectroscopic ellipsometry measurements and first-principle calculations, we reveal that these VO2 thin films present an ultra-large birefringence (Δn > 0.9). Furthermore, leveraging the insulator-to-metal transition of VO2, we demonstrate a dynamic reconfiguration of optical properties from birefringent to hyperbolic, which are two distinctive regimes of anisotropy. Such a naturally birefringent and dynamically switchable platform paves the way for multi-functional devices exploiting tunable anisotropy and hyperbolic dispersion.

Enabling Active Nanotechnologies by Phase Transition: From Electronics, Photonics to Thermotics

Phase transitions can occur in certain materials such as transition metal oxides (TMOs) and chalcogenides when there is a change in external conditions such as temperature and pressure. Along with phase transitions in these phase change materials (PCMs) come dramatic contrasts in various physical properties, which can be engineered to manipulate electrons, photons, polaritons, and phonons at the nanoscale, offering new opportunities for reconfigurable, active nanodevices. In this review, we particularly discuss phase-transition-enabled active nanotechnologies in nonvolatile electrical memory, tunable metamaterials, and metasurfaces for manipulation of both free-space photons and in-plane polaritons, and multifunctional emissivity control in the infrared (IR) spectrum. The fundamentals of PCMs are first introduced to explain the origins and principles of phase transitions. Thereafter, we discuss multiphysical nanodevices for electronic, photonic, and thermal management, attesting to the broad applications and exciting promises of PCMs. Emerging trends and valuable applications in all-optical neuromorphic devices, thermal data storage, and encryption are outlined in the end.

Ultracompact Nanophotonics: Light Emission and Manipulation with Metasurfaces

Internet of Things (IoT) technology is prosperous for the betterment of human well-being. With the expeditious needs of miniature functional devices and systems for adaptive optics and light manipulation at will, relevant sensing techniques are thus in the urgent stage of development. Extensive developments in ultrathin artificial structures, namely metasurfaces, are paving the way for the next-generation devices. A bunch of tunable and reconfigurable metasurfaces with diversified catalogs of mechanisms have been developed recently, enabling dynamic light modulation on demand. On the other hand, monolithic integration of metasurfaces and light-emitting sources form ultracompact meta-devices as well as exhibiting desired functionalities. Photon-matter interaction provides revolution in more compact meta-devices, manipulating light directly at the source. This study presents an outlook on this merging paradigm for ultracompact nanophotonics with metasurfaces, also known as metaphotonics. Recent advances in the field hold great promise for the novel photonic devices with light emission and manipulation in simplicity.

Transmissive terahertz metasurfaces with vanadium dioxide split-rings and grids for switchable asymmetric polarization manipulation

Metasurfaces containing arrays of thermally tunable metal-free (double-)split-ring meta-atoms and metal-free grids made of vanadium dioxide (VO[Formula: see text]), a phase-change material can deliver switching between (1) polarization manipulation in transmission mode as well as related asymmetric transmission and (2) other functionalities in the terahertz regime, especially when operation in the transmission mode is needed to be conserved for both phases of VO[Formula: see text]. As the meta-atom arrays function as arrays of metallic subwavelength resonators for the metallic phase of VO[Formula: see text], but as transmissive phase screens for the insulator phase of VO[Formula: see text], numerical simulations of double- and triple-array metasurfaces strongly indicate extreme scenarios of functionality switching also when the resulting structure comprises only VO[Formula: see text] meta-atoms and VO[Formula: see text] grids. More switching scenarios are achievable when only one meta-atom array or one grid is made of VO[Formula: see text] components. They are enabled by the efficient coupling of the geometrically identical resonator arrays/grids that are made of the materials that strongly differ in terms of conductivity, i.e. Cu and VO[Formula: see text] in the metallic phase.

Volatile and Nonvolatile Switching of Phase Change Material Ge2Sb2Te5 Revealed by Time-Resolved Terahertz Spectroscopy

Phase change materials exhibit unique advantages in reconfigurable photonic devices due to drastic tunability of photoelectric properties. Here, we systematically investigate the thermal equilibrium process and the ultrafast dynamics of Ge₂Sb₂Te₅ (GST) driven by femtosecond (fs) pulses, using time-resolved terahertz spectroscopy. Both fs-pulse-driven crystallization and amorphization are demonstrated, and the threshold of photoinduced crystallization (amorphization) is determined to be 8.4 mJ/cm² (10.1 mJ/cm²). The ultrafast carrier dynamics reveal that the cumulative photothermal effect plays a crucial role in the ultrafast crystallization, and modulation depth of volatile (nonvolatile) THz has switching limits up to 30% (15%). A distinctive phonon absorption at 1.1 THz is observed, providing fingerprint spectrum evidence of crystalline lattice formation driven by intense fs pulses. Finally, multistate volatile (nonvolatile) THz switching is implemented by tuning optical pump fluence. These results provide insight into the photoinduced phase change of GST and offer benefits for all optical THz functional devices.

Temperature-adaptive radiative coating for all-season household thermal regulation

[Figure: see text].

Spontaneous emission in inertial and dissipative nematic liquid crystals: the role of critical phenomena

We develop a rigorous, field-theoretical approach to the study of spontaneous emission in inertial and dissipative nematic liquid crystals (LCs), disclosing an alternative application of the massive Stückelberg gauge theory to describe critical phenomena in these systems. This approach allows one not only to unveil the role of phase transitions in the spontaneous emission in LCs but also to make quantitative predictions for quantum emission in realistic nematics of current scientific and technological interest in the field of metamaterials. Specifically, we predict that one can switch on and off quantum emission in LCs by varying the temperature in the vicinities of the crystalline-to-nematic phase transition, for both the inertial and dissipative cases. We also predict from first principles the value of the critical exponent that characterizes such a transition, which we show not only to be independent of the inertial or dissipative dynamics, but also to be in good agreement with experiments. We determine the orientation of the dipole moment of the emitter relative to the nematic director that inhibits spontaneous emission, paving the way to achieve directionality of the emitted radiation, a result that could be applied in tuneable photonic devices such as metasurfaces and tuneable light sources.

Next-Generation Imaging Techniques: Functional and Miniaturized Optical Lenses Based on Metamaterials and Metasurfaces

A variety of applications using miniaturized optical lenses can be found among rapidly evolving technologies. From smartphones and cameras in our daily life to augmented and virtual reality glasses for the recent trends of the untact era, miniaturization of optical lenses permits the development of many types of compact devices. Here, we highlight the importance of ultrasmall and ultrathin lens technologies based on metamaterials and metasurfaces. Focusing on hyperlenses and metalenses that can replace or be combined with the existing conventional lenses, we review the state-of-art of research trends and discuss their limitations. We also cover applications that use miniaturized imaging devices. The miniaturized imaging devices are expected to be an essential foundation for next-generation imaging techniques.

Focusing and defocusing switching of an indium selenide-silicon photonic metalens

With a fixed geometric design, homogeneous change of Indium Selenide (In₂Se₃) switches the focusing length of a silicon photonic metalens between positive and negative values. This unique functionality of the hybrid metasurface is attributed to the fact that the silicon's refractive index is in the middle of the two convertible states in the optical phase change material. The infrared transparency of In₂Se₃ in both states enables near phase-only metasurface structures. The design is foundry compatible and feasible for implementing nonvolatile adaptive transformation optic systems on-chip.

Stimuli-Responsive Phase Change Materials: Optical and Optoelectronic Applications

Stimuli-responsive materials offer a large variety of possibilities in fabrication of solid- state devices. Phase change materials (PCMs) undergo rapid and drastic changes of their optical properties upon switching from one crystallographic phase to another one. This peculiarity makes PCMs ideal candidates for a number of applications including sensors, active displays, photonic volatile and non-volatile memories for information storage and computer science and optoelectronic devices. This review analyzes different examples of PCMs, in particular germanium–antimonium tellurides and vanadium dioxide (VO₂) and their applications in the above-mentioned fields, with a detailed discussion on potential, limitations and challenges.

Reconfigurable all-dielectric metalens with diffraction-limited performance

Active metasurfaces, whose optical properties can be modulated post-fabrication, have emerged as an intensively explored field in recent years. The efforts to date, however, still face major performance limitations in tuning range, optical quality, and efficiency, especially for non-mechanical actuation mechanisms. In this paper, we introduce an active metasurface platform combining phase tuning in the full 2π range and diffraction-limited performance using an all-dielectric, low-loss architecture based on optical phase change materials (O-PCMs). We present a generic design principle enabling binary switching of metasurfaces between arbitrary phase profiles and propose a new figure-of-merit (FOM) tailored for reconfigurable meta-optics. We implement the approach to realize a high-performance varifocal metalens operating at 5.2 μm wavelength. The reconfigurable metalens features a record large switching contrast ratio of 29.5 dB. We further validate aberration-free and multi-depth imaging using the metalens, which represents a key experimental demonstration of a non-mechanical tunable metalens with diffraction-limited performance.

In3SbTe2 as a programmable nanophotonics material platform for the infrared

The high dielectric optical contrast between the amorphous and crystalline structural phases of non-volatile phase-change materials (PCMs) provides a promising route towards tuneable nanophotonic devices. Here, we employ the next-generation PCM In₃SbTe₂ (IST) whose optical properties change from dielectric to metallic upon crystallization in the whole infrared spectral range. This distinguishes IST as a switchable infrared plasmonic PCM and enables a programmable nanophotonics material platform. We show how resonant metallic nanostructures can be directly written, modified and erased on and below the meta-atom level in an IST thin film by a pulsed switching laser, facilitating direct laser writing lithography without need for cumbersome multi-step nanofabrication. With this technology, we demonstrate large resonance shifts of nanoantennas of more than 4 µm, a tuneable mid-infrared absorber with nearly 90% absorptance as well as screening and nanoscale “soldering” of metallic nanoantennas. Our concepts can empower improved designs of programmable nanophotonic devices for telecommunications, (bio)sensing and infrared optics, e.g. programmable infrared detectors, emitters and reconfigurable holograms.

Here, the authors introduce In3SbTe2 (IST) as a programmable material platform for plasmonics and nanophotonics in the infrared. They demonstrate direct optical writing, modifying and erasing of metallic crystalline IST nanoantennas, tuning their resonances, as well as nanoscale screening and soldering.

Dynamic Manipulation of THz Waves Enabled by Phase-Transition VO2 Thin Film

The reversible and multi-stimuli responsive insulator-metal transition of VO2, which enables dynamic modulation over the terahertz (THz) regime, has attracted plenty of attention for its potential applications in versatile active THz devices. Moreover, the investigation into the growth mechanism of VO2 films has led to improved film processing, more capable modulation and enhanced device compatibility into diverse THz applications. THz devices with VO2 as the key components exhibit remarkable response to external stimuli, which is not only applicable in THz modulators but also in rewritable optical memories by virtue of the intrinsic hysteresis behaviour of VO2. Depending on the predesigned device structure, the insulator-metal transition (IMT) of VO2 component can be controlled through thermal, electrical or optical methods. Recent research has paid special attention to the ultrafast modulation phenomenon observed in the photoinduced IMT, enabled by an intense femtosecond laser (fs laser) which supports "quasi-simultaneous" IMT within 1 ps. This progress report reviews the current state of the field, focusing on the material nature that gives rise to the modulation-allowed IMT for THz applications. An overview is presented of numerous IMT stimuli approaches with special emphasis on the underlying physical mechanisms. Subsequently, active manipulation of THz waves through pure VO2 film and VO2 hybrid metamaterials is surveyed, highlighting that VO2 can provide active modulation for a wide variety of applications. Finally, the common characteristics and future development directions of VO2-based tuneable THz devices are discussed.

Reconfigurable Multistate Optical Systems Enabled by VO2 Phase Transitions

Reconfigurable optical systems are the object of continuing, intensive research activities, as they hold great promise for realizing a new generation of compact, miniaturized, and flexible optical devices. However, current reconfigurable systems often tune only a single state variable triggered by an external stimulus, thus, leaving out many potential applications. Here we demonstrate a reconfigurable multistate optical system enabled by phase transitions in vanadium dioxide (VO₂). By controlling the phase-transition characteristics of VO₂ with simultaneous stimuli, the responses of the optical system can be reconfigured among multiple states. In particular, we show a quadruple-state dynamic plasmonic display that responds to both temperature tuning and hydrogen-doping. Furthermore, we introduce an electron-doping scheme to locally control the phase-transition behavior of VO₂, enabling an optical encryption device encoded by multiple keys. Our work points the way toward advanced multistate reconfigurable optical systems, which substantially outperform current optical devices in both breadth of capabilities and functionalities.

Spatiotemporal light control with active metasurfaces

Optical metasurfaces have provided us with extraordinary ways to control light by spatially structuring materials. The space-time duality in Maxwell's equations suggests that additional structuring of metasurfaces in the time domain can even further expand their impact on the field of optics. Advances toward this goal critically rely on the development of new materials and nanostructures that exhibit very large and fast changes in their optical properties in response to external stimuli. New physics is also emerging as ultrafast tuning of metasurfaces is becoming possible, including wavelength shifts that emulate the Doppler effect, Lorentz nonreciprocity, time-reversed optical behavior, and negative refraction. The large-scale manufacturing of dynamic flat optics has the potential to revolutionize many emerging technologies that require active wavefront shaping with lightweight, compact, and power-efficient components.

Dynamic beam steering with all-dielectric electro-optic III-V multiple-quantum-well metasurfaces

Tunable metasurfaces enable dynamical control of the key constitutive properties of light at a subwavelength scale. To date, electrically tunable metasurfaces at near-infrared wavelengths have been realized using free carrier modulation, and switching of thermo-optical, liquid crystal and phase change media. However, the highest performance and lowest loss discrete optoelectronic modulators exploit the electro-optic effect in multiple-quantum-well heterostructures. Here, we report an all-dielectric active metasurface based on electro-optically tunable III–V multiple-quantum-wells patterned into subwavelength elements that each supports a hybrid Mie-guided mode resonance. The quantum-confined Stark effect actively modulates this volumetric hybrid resonance, and we observe a relative reflectance modulation of 270% and a phase shift from 0° to ~70°. Additionally, we demonstrate beam steering by applying an electrical bias to each element to actively change the metasurface period, an approach that can also realize tunable metalenses, active polarizers, and flat spatial light modulators.

Here, the authors demonstrate an electrically tunable metasurface with III–V semiconducting MQW structures as resonant metasurface elements. The amplitude and phase of the light reflected from the metasurface can be continuously tuned by applying DC electric field across the MQW metasurface elements.

Phase Modulation with Electrically Tunable Vanadium Dioxide Phase-Change Metasurfaces

We report a dynamically tunable reflectarray metasurface that continuously modulates the phase of reflected light in the near-infrared wavelength range under active electrical control of the phase transition from semiconducting to semimetallic states. We integrate a vanadium dioxide (VO₂) active layer into the dielectric gap of antenna elements in a reflectarray metasurface, which undergoes an insulator-to-metal transition upon resistive heating of the metallic patch antenna. The induced phase transition in the VO₂ film strongly perturbs the magnetic dipole resonance supported by the metasurface. By carefully controlling the volume fractions of coexisting metallic and dielectric regions of the VO₂ film, we observe a continuous shift of the phase of the reflected light, with a maximal achievable phase shift as high as 250°. We also observe a reflectance modulation of 23.5% as well as a spectral shift of the resonance position by 175 nm. The metasurface phase modulation is fairly broadband, yielding large phase shifts at multiple operation wavelengths.

Switchable multifunctional terahertz metasurfaces employing vanadium dioxide

In this paper, we design a type of switchable metasurfaces by employing vanadium dioxide (VO₂), which possess tunable and diversified functionalities in the terahertz (THz) frequencies. The properly designed homogeneous metasurface can be dynamically tuned from a broadband absorber to a reflecting surface due to the insulator-to-metal transition of VO₂. When VO₂ is in its insulating state, the metasurface can efficiently absorb the normally incident THz wave in the frequency range of 0.535-1.3 THz with the average absorption of ~97.2%. Once the VO₂ is heated up and switched to its fully metallic state, the designed metasurface exhibits broadband and efficient reflection (>80%) in the frequency range from 0.5 to 1.3 THz. Capitalizing on such meta-atom design, we further extend the functionalities by introducing phase-gradients when VO₂ is in its fully metallic state and consequently achieve polarization-insensitive beam-steering and polarization-splitting, while maintaining broadband absorption when VO₂ is in insulating state.

Programming Nanoparticles in Multiscale: Optically Modulated Assembly and Phase Switching of Silicon Nanoparticle Array

Manipulating and tuning nanoparticles by means of optical field interactions is of key interest for nanoscience and applications in electronics and photonics. We report scalable, direct, and optically modulated writing of nanoparticle patterns (size, number, and location) of high precision using a pulsed nanosecond laser. The complex nanoparticle arrangement is modulated by the laser pulse energy and polarization with the particle size ranging from 60 to 330 nm. Furthermore, we report fast cooling-rate induced phase switching of crystalline Si nanoparticles to the amorphous state. Such phase switching has usually been observed in compound phase change materials like GeSbTe. The ensuing modification of atomic structure leads to dielectric constant switching. Based on these effects, a multiscale laser-assisted method of fabricating Mie resonator arrays is proposed. The number of Mie resonators, as well as the resonance peaks and dielectric constants of selected resonators, can be programmed. The programmable light-matter interaction serves as a mechanism to fabricate optical metasurfaces, structural color, and multidimensional optical storage devices.