Nanosphere Lithography: A Versatile Approach to Develop Transparent Conductive Films for Optoelectronic Applications

Advancements in Transparent Conductive Oxides for Photoelectrochemical Applications

Photoelectrochemical cells (PECs) are an important technology for converting solar energy, which has experienced rapid development in recent decades. Transparent conductive oxides (TCOs) are also gaining increasing attention due to their crucial role in PEC reactions. This review comprehensively delves into the significance of TCO materials in PEC devices. Starting from an in-depth analysis of various TCO materials, this review discusses the properties, fabrication techniques, and challenges associated with these TCO materials. Next, we highlight several cost-effective, simple, and environmentally friendly methods, such as element doping, plasma treatment, hot isostatic pressing, and carbon nanotube modification, to enhance the transparency and conductivity of TCO materials. Despite significant progress in the development of TCO materials for PEC applications, we at last point out that the future research should focus on enhancing transparency and conductivity, formulating advanced theories to understand structure-property relationships, and integrating multiple modification strategies to further improve the performance of TCO materials in PEC devices.

Physiochemical Coupled Dynamic Nanosphere Lithography Enabling Multiple Metastructures from Single Mask

Metastructures are widely used in photonic devices, energy conversion, and biomedical applications. However, to fabricate multiple patterns continuously in single etching protocol with highly tunable photonic properties is challenging. Here, a simple and robust dynamic nanosphere lithography is proposed by inserting a spacer between the nanosphere assembly and the wafer. The nanosphere diameter decrease and uneven penetration of the spacer during etching lead to a dynamic masking process. Coupled anisotropic physical ion sputtering and ricocheting with isotropic chemical radical etching achieve highly tunable structures with various 3D patterns continuously forming through a single etching process. Specifically, the nanosphere diameters define the periodicity, the etched spacer forms the upper parts, and the wafer forms the lower parts. Each part of the structure is highly tunable through changing nanosphere diameter, spacer thickness, and etch conditions. Using this protocol, numerous structures of varying sizes including nanomushrooms, nanocones, nanopencils, and nanoneedles with diverse shapes are realized as proof of concepts. The broadband antireflection ability of the nanostructures and their use in surface-enhanced Raman spectroscopy are also demonstrated for practical application. This method substantially simplifies the fabrication procedure of various metastructures, paving the way for its application in multiple disciplines especially in photonic devices.

Massively Scalable Self-Assembly of Nano and Microparticle Monolayers via Aerosol Assisted Deposition

An extremely rapid process for self-assembling well-ordered, nano, and microparticle monolayers via a novel aerosolized method is presented. The novel technique can reach monolayer self-assembly rates as high as 268 cm2 min-1 from a single aerosolizing source and methods to reach faster monolayer self-assembly rates are outlined. A new physical mechanism describing the self-assembly process is presented and new insights enabling high-efficiency nanoparticle monolayer self-assembly are developed. In addition, well-ordered monolayer arrays from particles of various sizes, surface functionality, and materials are fabricated. This new technique enables a 93× increase in monolayer self-assembly rates compared to the current state of the art and has the potential to provide an extremely low-cost option for submicron nanomanufacturing.

Highly Flexible and Acid-Alkali Resistant TiN Nanomesh Transparent Electrodes for Next-Generation Optoelectronic Devices

Transparent electrodes are vital for optoelectronic devices, but their development has been constrained by the limitations of existing materials such as indium tin oxide (ITO) and newer alternatives. All face issues of robustness, flexibility, conductivity, and stability in harsh environments. Addressing this challenge, we developed a flexible, low-cost titanium nitride (TiN) nanomesh transparent electrode showcasing exceptional acid-alkali resistance. The TiN nanomesh electrode, created by depositing a TiN coating on a naturally cracked gel film substrate via a sputtering method, maintains a stable electrical performance through thousands of bending cycles. It exhibits outstanding chemical stability, resisting strong acid and alkali corrosion, which is a key hurdle for current electrodes when in contact with acidic/alkaline materials and solvents during device fabrication. This, coupled with superior light transmission and conductivity (88% at 550 nm with a sheet resistance of ∼200 Ω/sq), challenges the reliance on conventional materials. Our TiN nanomesh electrode, successfully applied in electric heaters and electrically controlled thermochromic devices, offers broad potential beyond harsh environment applications. It enables alternative possibilities for the design and fabrication of future optoelectronics for advancements in this pivotal field.

Rapid Electrohydrodynamic-Driven Pattern Replication over a Large Area via Ultrahigh Voltage Pulses

Despite the prospects of electrohydrodynamic instability patterning (EHIP), poor process parameter controllability is a significant challenge in uniform large-scale nanopatterning. Herein, we introduce a EHIP process using an ultrahigh electric field (>108 V/m) to effectively accelerate the pattern growth evolution. Owing to the strong dependence on a temporal parameter (1/τm) of the field strength, our method not only reduces the completion time of pattern growth but also overcomes critical parametric restrictions on the pattern replication, thereby enhancing the replicated pattern quality in three dimensions. The pattern can be uniformly replicated over the entire film surface even without a perfectly uniform air gap, which has been severely difficult in the conventional method. To further demonstrate how straightforward yet versatile our approach is, we applied our EHIP approach to successfully replicate the densely packed nanostructures of cicada wings.

Discretely-supported transfer nanoimprint anti-reflection nanostructures on complex uneven surface of Fresnel lenses

Nanopatterning complex uneven surface of numerous functional devices to improve their performance is significantly appealing; however, it is extremely challenging. This study proposes a discretely-supported transfer nanoimprint technique to fabricate nanostructures on complex device surfaces containing multi-spatial frequencies. First, a discretely-supported nanoimprint template was designed based on the built energy criterion. A contact fidelity of over 99% was achieved between the designed template and the targeted complex uneven substrate surface. Next, the prefilled nanostructures on the template were transferred to the target surface after contact. By precisely controlling the amount of micro-droplet jetting on the template on-demand, the accumulation of the polymer in the micro-valley sites on the complex substrate was avoided, thus maintaining the morphology and generating function of the devices. Finally, high-quality Fresnel lenses with broadband wide-directional antireflection and excellent imaging performance were developed by imprinting subwavelength-tapered nanostructures on the relief surface.

Effective Approach for Fabricating Highly Precise High-Curvature Structural Patterns via Air-Bubble Induction

Developing a new master mold-based patterning technology that can be used to accurately, precisely, and uniformly create large-area micropatterns while controlling the micropatterns of curved structures is essential for promoting innovative developments in various application fields. This study develops a new top-down lithographic process that can effectively produce structural patterns with high curvatures by growing isolated microbubbles in the master pattern holes. The isolated air-pocket lithography (IAL) we developed is based on the controlled behavior of micrometer-sized air pockets trapped between the grooves of the master pattern and the curable polymer. We successfully fabricated a concave array polydimethylsiloxane (PDMS) film and a convex array polymer film. In addition, the IAL mechanism was proven by confirming the expansion process of micrometer-sized air pockets trapped between the deep groove of the silicon master pattern and the PDMS coating film by using optical microscopy images. We successfully obtained complex three-dimensional structural patterns containing both 3D hollow spherical concave and ring-shaped two-dimensional convex patterns. This simple, fast, and effective high-curvature patterning technique is expected to provide innovative solutions for future applications such as nanoelectronics, optical devices, displays, and photovoltaics.

Modeling the co-assembly of binary nanoparticles

In this work, we present a binary assembly model that can predict the co-assembly structure and spatial frequency spectra of monodispersed nanoparticles with two different particle sizes. The approach relies on an iterative algorithm based on geometric constraints, which can simulate the assembly patterns of particles with two distinct diameters, size distributions, and at various mixture ratios on a planar surface. The two-dimensional spatial-frequency spectra of the modeled assembles can be analyzed using fast Fourier transform analysis to examine their frequency content. The simulated co-assembly structures and spectra are compared with assembled nanoparticles fabricated using transfer coating method are in qualitative agreement with the experimental results. The co-assembly model can also be used to predict the peak spatial frequency and the full-width at half-maximum bandwidth, which can lead to the design of the structure spectra by selection of different monodispersed particles. This work can find applications in fabrication of non-periodic nanostructures for functional surfaces, light extraction structures, and broadband nanophotonics.

Chemically-stable flexible transparent electrode: gold-electrodeposited on embedded silver nanowires

Silver nanowires (AgNWs) with a low diameter, high aspect ratio, stable suspension, and easy synthesis have recently attracted the optoelectronic industry as a low-cost alternative to indium tin oxide transparent conductive films. However, silver nanowires are not chemically stable, and their conductivity diminishes over time due to reactions with atmospheric components. This is a bottleneck for their wide industrial applications. In this study, we aim to address this issue by synthesizing silver nanowires with an average diameter of approximately 65 nm and a length of approximately 13 µm. The prepared Ag nanowires are then applied to fabricate transparent, flexible, and chemically stable conductive films. The fabrication includes spraying of silver nanowires suspension on a glass substrate followed by Dr. blade coating of polystyrene (PS) solution and delamination of the PS-AgNWs film. The resulting film exhibits an optimum sheet resistance of 24 Ω/□ and transmittance of 84%. To further enhance the stability of the transparent conductive film, the facial and scalable double pulse electrodeposition method is used for coating of gold on the exposed surface of the AgNWs embedded in PS. The final transparent film with gold coating demonstrates a remarkable stability under harsh conditions including long exposure to UV light and nitric acid solution. After 100 min of UV/Ozone treatment, the increase in sheet resistance of the optimal PS-AgNW@Au sample is 15.6 times lower than the samples without gold coating. In addition, the change in sheet resistance after 2000 bending cycles in the optimal PS-AgNW@Au electrode is measured and it showed an increase of only 22% of its initial sheet resistance indicating its good flexibility. The proposed electrode performs an excellent chemical stability, good conductivity, transparency, and flexibility that makes it a potential candidate for various optoelectronic devices.

Zinc Oxide-Encapsulated Copper Nanowires for Stable Transparent Conductors

Cu nanowire (NW)-based transparent conductors are considered to be highly promising constituents of next-generation flexible transparent electronics. However, the fast oxidation of copper under ambient conditions hinders the use of Cu NWs. Herein, we demonstrate a low-cost and scalable approach for preparing a ZnO shell on the surface of Cu NWs under ambient conditions. The covered ZnO shells enhance the oxidative stability of Cu NWs. The optical and electrical properties of ZnO@Cu NWs remain similar to the original performance of the Cu NWs (for example, before encapsulating: 13.5 Ω/sq. at 84.3%, after encapsulating: 19.2 Ω/sq. at 86.7%), which indicates that encapsulation with a ZnO shell enables the preservation of the transparency and conductivity of Cu NW networks. More importantly, the ZnO@Cu NWs exhibit excellent stability in terms of long-term storage, hot/humid environments, and strong oxidizing atmosphere/solution.

Emerging trends in the development of flexible optrode arrays for electrophysiology

Optical-electrode (optrode) arrays use light to modulate excitable biological tissues and/or transduce bioelectrical signals into the optical domain. Light offers several advantages over electrical wiring, including the ability to encode multiple data channels within a single beam. This approach is at the forefront of innovation aimed at increasing spatial resolution and channel count in multichannel electrophysiology systems. This review presents an overview of devices and material systems that utilize light for electrophysiology recording and stimulation. The work focuses on the current and emerging methods and their applications, and provides a detailed discussion of the design and fabrication of flexible arrayed devices. Optrode arrays feature components non-existent in conventional multi-electrode arrays, such as waveguides, optical circuitry, light-emitting diodes, and optoelectronic and light-sensitive functional materials, packaged in planar, penetrating, or endoscopic forms. Often these are combined with dielectric and conductive structures and, less frequently, with multi-functional sensors. While creating flexible optrode arrays is feasible and necessary to minimize tissue-device mechanical mismatch, key factors must be considered for regulatory approval and clinical use. These include the biocompatibility of optical and photonic components. Additionally, material selection should match the operating wavelength of the specific electrophysiology application, minimizing light scattering and optical losses under physiologically induced stresses and strains. Flexible and soft variants of traditionally rigid photonic circuitry for passive optical multiplexing should be developed to advance the field. We evaluate fabrication techniques against these requirements. We foresee a future whereby established telecommunications techniques are engineered into flexible optrode arrays to enable unprecedented large-scale high-resolution electrophysiology systems.

Structural engineering of electrodes for flexible energy storage devices

The emergence of multifunctional wearable electronics over the past decades has triggered the exploration of flexible energy storage devices. As an important component of flexible batteries, novel electrodes with good flexibility, mechanical stability and high energy density are required to adapt to mechanical deformation while powering devices. Electrodes with sophisticated designed structures are key to achieving novel batteries and supercapacitors with extended lifetimes under long-term deformation exposures. Many different novel structures including serpentine, auxetic and biomimetic are explored to construct electrodes thanks to their excellent mechanical deformability in three dimensions. This paper considers the various design strategies established for fabricating flexible electrodes using novel structural modifications. The current state-of-the-art developments of novel structures made of two-dimensional (2D) planar and three-dimensional (3D) cellular, interconnected architectures for flexible energy storage with different functionalities, are discussed. The key tunable geometrical parameters of structures for achieving high performance are critically assessed, and the challenges and limitations of electrodes facing their practical application are revealed, to offer new insights into future prospects of this field.

Transparent and Stretchable Electromagnetic Interference Shielding Film with Fence-like Aligned Silver Nanowire Conductive Network

Flexible transparent conductive electrodes (TCEs) that can be used as electromagnetic interference (EMI) shielding materials have a great potential for use as electronic components in optical window and display applications. However, development of TCEs that display high shielding effectiveness (SE) and good stretchability for flexible electronic device applications has proven challenging. Herein, this study describes a stretchable polydimethylsiloxane (PDMS)/silver nanowire (AgNW) TCE with a fence-like aligned conductive network that is fabricated via pre-stretching method. The fence-like AgNW network endowed the PDMS/AgNW film with excellent optoelectronic properties, i.e., low sheet resistance of 7.68 Ω sq^-1 at 73.7% optical transmittance, thus causing an effective EMI SE of 32.2 dB at X-band. More importantly, the fence-like aligned AgNW conductive network reveals a high stability toward tensile deformation, thus gives the PDMS/AgNW film stretch-stable conductivity and EMI shielding property in the strain range of 0-100%. Typically, the film can reserve ≈70% or 80% of its initial EMI SE when stretching at 100% strain or stretching/releasing (50% strain) for 128 cycles, respectively. Additionally, the film exhibits a low-voltage driven and stretchable Joule heating performance. With these overall performances, the PDMS/AgNW film should be well suited for use in flexible and stretchable optical electronic devices.

Dewetting-Induced Hierarchical Self-Assembly of Block Copolymers Templated by Colloidal Crystals

Recent advances in high-performance flexible electronic devices have increased the demand for more diverse and complex nanofabrication methods; high-resolution, high-efficiency, and low-cost patterning strategies for next-generation devices are therefore required. In this study, we demonstrate the formation of dewetting-induced hierarchical patterns using two self-assembled materials: block copolymers (BCPs) and colloidal crystals. The combination of the two self-assembly methods successfully generates multiscale hierarchical patterns because the length scales of the periodic colloidal crystal structures are suitable for templating the BCP patterns. Various concentric ring patterns were observed on the templated BCP films, and a free energy model of the polymer chain was applied to explain the formation of these patterns relative to the template width. Frequently occurring spiral-defective features were also examined and found to be promoted by Y-junction defects.

Plasmonic Biosensors with Nanostructure for Healthcare Monitoring and Diseases Diagnosis

Nanophotonics has been widely utilized in enhanced molecularspectroscopy or mediated chemical reaction, which has major applications in the field of enhancing sensing and enables opportunities in developing healthcare monitoring. This review presents an updated overview of the recent exciting advances of plasmonic biosensors in the healthcare area. Manufacturing, enhancements and applications of plasmonic biosensors are discussed, with particular focus on nanolisted main preparation methods of various nanostructures, such as chemical synthesis, lithography, nanosphere lithography, nanoimprint lithography, etc., and describing their respective advances and challenges from practical applications of plasmon biosensors. Based on these sensing structures, different types of plasmonic biosensors are summarized regarding detecting cancer biomarkers, body fluid, temperature, gas and COVID-19. Last, the existing challenges and prospects of plasmonic biosensors combined with machine learning, mega data analysis and prediction are surveyed.

Combining Azimuthal and Polar Angle Resolved Shadow Mask Deposition and Nanosphere Lithography to Uncover Unique Nano-Crystals

In this article, we present a systematic investigation on a multistep nanosphere lithography technique to uncover its potential in fabricating a wide range of two- and three-dimensional nanostructures. A tilted (polar angle) electron beam shower on a nanosphere mask results in an angled shadow mask deposition. The shape of the shadow also depends on the azimuthal angle of the mask sitting on top of the substrate. We performed angled shadow mask depositions with systematic variation of these two angular parameters, giving rise to complex nanostructures (down to 50 nm), repeated over a large area without defect. In this article, nanosphere lithography with two- and four-fold azimuthal symmetry was studied at constant tilt angles followed by variations in tilt without azimuthal rotation of the substrate. Finally, both angular parameters were simultaneously varied. The structure of shadow crystals was explained using Matlab simulation. This work stretches the horizons of nanosphere lithography, opening up new scopes in plasmonic and magnonic research.

Recent Advances in Silver Nanostructured Substrates for Plasmonic Sensors

Noble metal nanostructures are known to confine photon energies to their dimensions with resonant oscillations of their conduction electrons, leading to the ultrahigh enhancement of electromagnetic fields in numerous spectroscopic methods. Of all the possible plasmonic nanomaterials, silver offers the most intriguing properties, such as best field enhancements and tunable resonances in visible-to-near infrared regions. This review highlights the recent developments in silver nanostructured substrates for plasmonic sensing with the main emphasis on surface plasmon resonance (SPR) and surface-enhanced Raman spectroscopy (SERS) over the past decade. The main focus is on the synthesis of silver nanostructured substrates via physical vapor deposition and chemical synthesis routes and their applications in each sensing regime. A comprehensive review of recent literature on various possible silver nanostructures prepared through these methodologies is discussed and critically reviewed for various planar and optical fiber-based substrates.