Optofluidic waveguides: II. Fabrication and structures

Micro- and nanosystems for the detection of hemorrhagic fever viruses

Hemorrhagic fever viruses (HFVs) are virulent pathogens that can cause severe and often fatal illnesses in humans. Timely and accurate detection of HFVs is critical for effective disease management and prevention. In recent years, micro- and nano-technologies have emerged as promising approaches for the detection of HFVs. This paper provides an overview of the current state-of-the-art systems for micro- and nano-scale approaches to detect HFVs. It covers various aspects of these technologies, including the principles behind their sensing assays, as well as the different types of diagnostic strategies that have been developed. This paper also explores future possibilities of employing micro- and nano-systems for the development of HFV diagnostic tools that meet the practical demands of clinical settings.

Label-free monitoring of proteins in optofluidic hollow-core photonic crystal fibres

The fluorescent detection of proteins without labels or stains, which affect their behaviour and require additional genetic or chemical preparation, has broad applications to biological research. However, standard approaches require large sample volumes or analyse only a small fraction of the sample. Here we use optofluidic hollow-core photonic crystal fibres to detect and quantify sub-microlitre volumes of unmodified bovine serum albumin (BSA) protein down to 100 nM concentrations. The optofluidic fibre's waveguiding properties are optimised for guidance at the (auto)fluorescence emission wavelength, enabling fluorescence collection from a 10 cm long excitation region, increasing sensitivity. The observed spectra agree with spectra taken from a conventional cuvette-based fluorimeter, corrected for the guidance properties of the fibre. The BSA fluorescence depended linearly on BSA concentration, while only a small hysteresis effect was observed, suggesting limited biofouling of the fibre sensor. Finally, we briefly discuss how this method could be used to study aggregation kinetics. With small sample volumes, the ability to use unlabelled proteins, and continuous flow, the method will be of interest to a broad range of protein-related research.

Optofluidic Particle Manipulation Platform with Nanomembrane

We demonstrate a method for fabricating and utilizing an optofluidic particle manipulator on a silicon chip that features a 300 nm thick silicon dioxide membrane as part of a microfluidic channel. The fabrication method is based on etching silicon channels and converting the walls to silicon dioxide through thermal oxidation. Channels are encapsulated by a sacrificial polymer which fills the length of the fluid channel by way of spontaneous capillary action. The sacrificial material is then used as a mold for the formation of a nanoscale, solid-state, silicon dioxide membrane. The hollow channel is primarily used for fluid and particle transport but is capable of transmitting light over short distances and utilizes radiation pressure for particle trapping applications. The optofluidic platform features solid-core ridge waveguides which can direct light on and off of the silicon chip and intersect liquid channels. Optical loss values are characterized for liquid and solid-core structures and at interfaces. Estimates are provided for the optical power needed to trap particles of various sizes.

Numerical Investigation of a Designed-Inlet Optofluidic Beam Splitter for Split-Angle and Transmission Improvement

The beam splitter is one of the important elements in optical waveguide circuits. To improve the performance of an optofluidic beam splitter, a microchannel including a two-stage main channel with divergent side walls and two pairs of inlet channels is proposed. Besides, the height of the inlets injected with cladding fluid is set to be less than the height of other parts of the microchannel. When we inject calcium chloride solution (cladding fluid) and deionized water (core fluid) into the inlet channels, the gradient refractive index (GRIN) developed in fluids flowing through the microchannel splits the incident light beam into two beams with a larger split angle. Moreover, the designed inlets yield a GRIN distribution which increases the light collected around the middle horizontal line on the objective plane, and so enhances the transmission efficiency of the device. To demonstrate the performance of the proposed beam splitter, we use polydimethylsiloxane to fabricate the microchannel. The results obtained by simulation and experiment are compared to show the effectiveness of the device and the validity of numerical simulation. The influence of the microchannel geometry and the flow rate ratio on the performance of the proposed beam splitter is investigated.

3× multiplexed detection of antibiotic resistant plasmids with single molecule sensitivity

Bacterial pathogens resistant to antibiotics have become a serious health threat. Those species which have developed resistance against multiple drugs such as the carbapenems, are more lethal as these are last line therapy antibiotics. Current diagnostic tests for these resistance traits are based on singleplex target amplification techniques which can be time consuming and prone to errors. Here, we demonstrate a chip based optofluidic system with single molecule sensitivity for amplification-free, multiplexed detection of plasmids with genes corresponding to antibiotic resistance, within one hour. Rotating disks and microfluidic chips with functionalized polymer monoliths provided the upstream sample preparation steps to selectively extract these plasmids from blood spiked with E. coli DH5α cells. Waveguide-based spatial multiplexing using a multi-mode interference waveguide on an optofluidic chip was used for parallel detection of three different carbapenem resistance genes. These results point the way towards rapid, amplification-free, multiplex analysis of antibiotic-resistant pathogens.

Characterization of optofluidic devices for the sorting of sub-micrometer particles

In this work, we investigate methods of fabricating a device for the optical actuation of nanoparticles. To create the microfluidic channel, we pursued three fabrication methods: SU-8 to molded polydimethylsiloxane soft lithography, laser etching of glass, and deep reactive ion etching of fused silica. We measured the surface roughness of the etched sidewalls, and the laser power transmission through each device. We then measured the radiation pressure on 0.5-µm particles in the best-performing fabricated device (etched fused silica) and in a square glass capillary.

Gas Detection Using Portable Deep-UV Absorption Spectrophotometry: A Review

Several gas molecules of environmental and domestic significance exhibit a strong deep-UV absorption. Therefore, a sensitive and a selective gas detector based on this unique molecular property (i.e., absorption at a specific wavelength) can be developed using deep-UV absorption spectrophotometry. UV absorption spectrometry provides a highly sensitive, reliable, self-referenced, and selective approach for gas sensing. This review article addresses the recent progress in the application of deep-UV absorption for gas sensing owing to its inherent features and tremendous potentials. Applications, advancements, and challenges related to UV emission sources, gas cells, and UV photodetectors are assessed and compared. We present the relevant theoretical aspects and challenges associated with the development of portable sensitive spectrophotometer. Finally, the applications of UV absorption spectrometry for ozone, NO₂, SO₂, and aromatic organic compounds during the last decades are discussed and compared. A portable UV absorption spectrophotometer can be developed by using LEDs, hollow core waveguides (HCW), and UV photodetectors (i.e., photodiodes). LED provides a portable UV emission source with low power input, low-intensity drifts, low cost, and ease of alignment. It is a quasi-chromatic UV source and covers the absorption band of molecules without optical filters for absorbance measurement of a target analyte. HCWs can be applied as a miniature gas cell for guiding UV radiation for measurement of low gas concentrations. Photodiodes, on the other hand, offer a portable UV photodetector with excellent spectral selectivity with visible rejection, minimal dark current, linearity, and resistance against UV-aging.

Micro-optics for microfluidic analytical applications

This critical review summarizes the developments in the integration of micro-optical elements with microfluidic platforms for facilitating detection and automation of bio-analytical applications.

Scalable Spatial-Spectral Multiplexing of Single-Virus Detection Using Multimode Interference Waveguides

Simultaneous detection of multiple pathogens and samples (multiplexing) is one of the key requirements for diagnostic tests in order to enable fast, accurate and differentiated diagnoses. Here, we introduce a novel, highly scalable, photonic approach to multiplex analysis with single virus sensitivity. A solid-core multimode interference (MMI) waveguide crosses multiple fluidic waveguide channels on an optofluidic chip to create multi-spot excitation patterns that depend on both the wavelength and location of the channel along the length of the MMI waveguide. In this way, joint spectral and spatial multiplexing is implemented that encodes both spatial and spectral information in the time dependent fluorescence signal. We demonstrate this principle by using two excitation wavelengths and three fluidic channels to implement a 6x multiplex assay with single virus sensitivity. High fidelity detection and identification of six different viruses from a standard influenza panel is reported. This multimodal multiplexing strategy scales favorably to large numbers of targets or large numbers of clinical samples. Further, since single particles are detected unbound in flow, the technique can be broadly applied to direct detection of any fluorescent target, including nucleic acids and proteins.

Optofluidic bioanalysis: fundamentals and applications

Over the past decade, optofluidics has established itself as a new and dynamic research field for exciting developments at the interface of photonics, microfluidics, and the life sciences. The strong desire for developing miniaturized bioanalytic devices and instruments, in particular, has led to novel and powerful approaches to integrating optical elements and biological fluids on the same chip-scale system. Here, we review the state-of-the-art in optofluidic research with emphasis on applications in bioanalysis and a focus on waveguide-based approaches that represent the most advanced level of integration between optics and fluidics. We discuss recent work in photonically reconfigurable devices and various application areas. We show how optofluidic approaches have been pushing the performance limits in bioanalysis, e.g. in terms of sensitivity and portability, satisfying many of the key requirements for point-of-care devices. This illustrates how the requirements for bianalysis instruments are increasingly being met by the symbiotic integration of novel photonic capabilities in a miniaturized system.

Aerogels for Optofluidic Waveguides

Aerogels—solid materials keeping their internal structure of interconnected submicron-sized pores intact upon exchanging the pore liquid with a gas—were first synthesized in 1932 by Samuel Kistler. Overall, an aerogel is a special form of a highly porous material with a very low solid density and it is composed of individual nano-sized particles or fibers that are connected to form a three-dimensional network. The unique properties of these materials, such as open pores and high surface areas, are attributed to their high porosity and irregular solid structure, which can be tuned through proper selection of the preparation conditions. Moreover, their low refractive index makes them a remarkable solid-cladding material for developing liquid-core optofluidic waveguides based on total internal reflection of light. This paper is a comprehensive review of the literature on the use of aerogels for optofluidic waveguide applications. First, an overview of different types of aerogels and their physicochemical properties is presented. Subsequently, possible techniques to fabricate channels in aerogel monoliths are discussed and methods to make the channel surfaces hydrophobic are described in detail. Studies in the literature on the characterization of light propagation in liquid-filled channels within aerogel monoliths as well as their light-guiding characteristics are discussed. Finally, possible applications of aerogel-based optofluidic waveguides are described.

Solvent immersion imprint lithography: A high-performance, semi-automated procedure

We expand upon our recent, fundamental report on solvent immersion imprint lithography (SIIL) and describe a semi-automated and high-performance procedure for prototyping polymer microfluidics and optofluidics. The SIIL procedure minimizes manual intervention through a cost-effective (∼$200) and easy-to-assemble apparatus. We analyze the procedure's performance specifically for Poly (methyl methacrylate) microsystems and report repeatable polymer imprinting, bonding, and 3D functionalization in less than 5 min, down to 8 μm resolutions and 1:1 aspect ratios. In comparison to commercial approaches, the modified SIIL procedure enables substantial cost reductions, a 100-fold reduction in imprinting force requirements, as well as a more than 10-fold increase in bonding strength. We attribute these advantages to the directed polymer dissolution that strictly localizes at the polymer-solvent interface, as uniquely offered by SIIL. The described procedure opens new desktop prototyping opportunities, particularly for non-expert users performing live-cell imaging, flow-through catalysis, and on-chip gas detection.

Signal-to-noise Enhancement in Optical Detection of Single Viruses with Multi-spot Excitation

We present fluorescence detection of single H1N1 viruses with enhanced signal to noise ratio (SNR) achieved by multi-spot excitation in liquid-core anti-resonant reflecting optical waveguides (ARROWs). Solid-core Y-splitting ARROW waveguides are fabricated orthogonal to the liquid-core section of the chip, creating multiple excitation spots for the analyte. We derive expressions for the SNR increase after signal processing, and analyze its dependence on signal levels and spot number. Very good agreement between theoretical calculations and experimental results is found. SNR enhancements up to 5x10⁴ are demonstrated.

Reconfigurable liquid-core/liquid-cladding optical waveguides with dielectrophoresis-driven virtual microchannels on an electromicrofluidic platform

An electrically reconfigurable liquid-core/liquid-cladding (L(2)) optical waveguide with core liquid γ-butyrolactone (GBL, ncore = 1.4341, εcore = 39) and silicone oil (ncladding = 1.401, εcladding = 2.5) as cladding liquid is accomplished using dielectrophoresis (DEP) that attracts and deforms the core liquid with the greater permittivity to occupy the region of strong electric field provided by Teflon-coated ITO electrodes between parallel glass plates. Instead of continuously flowing core and cladding liquids along a physical microchannel, the DEP-formed L(2) optical waveguide guides light in a stationary virtual microchannel that requires liquids of limited volume without constant supply and creates stable liquid/liquid interfaces for efficient light guidance in a simply fabricated microfluidic device. We designed and examined (1) stationary and (2) moving L(2) optical waveguides on the parallel-plate electromicrofluidic platform. In the stationary L-shaped waveguide, light was guided in a GBL virtual microchannel core for a total of 27.85 mm via a 90° bend (radius 5 mm) before exiting from the light outlet of cross-sectional area 100 μm × 100 μm. For the stationary spiral waveguide, light was guided in a GBL core containing Rhodamine 6G (R6G, 1 mM) and through a series of 90° bends with decreasing radii from 5 mm to 2.5 mm. With the stationary straight waveguide, the propagation loss was measured to be 2.09 dB cm(-1) in GBL with R6G (0.01 mM). The moving L-shaped waveguide was implemented on a versatile electromicrofluidic platform on which electrowetting and DEP were employed to generate a precise GBL droplet and form a waveguide core. On sequentially applying appropriate voltage to one of three parallel L-shaped driving electrodes, the GBL waveguide core was shifted; the guided light was switched at a speed of up to 0.929 mm s(-1) (switching period 70 ms, switching rate 14.3 Hz) when an adequate electric signal (173.1 VRMS, 100 kHz) was applied.

Optofluidic devices with integrated solid-state nanopores

This review (with 90 refs.) covers the state of the art in optofluidic devices with integrated solid-state nanopores for use in detection and sensing. Following an introduction into principles of optofluidics and solid-state nanopore technology, we discuss features of solid-state nanopore based assays using optofluidics. This includes the incorporation of solid-state nanopores into optofluidic platforms based on liquid-core anti-resonant reflecting optical waveguides (ARROWs), methods for their fabrication, aspects of single particle detection and particle manipulation. We then describe the new functionalities provided by solid-state nanopores integrated into optofluidic chips, in particular acting as smart gates for correlated electro-optical detection and discrimination of nanoparticles. This enables the identification of viruses and λ-DNA, particle trajectory simulations, enhancing sensitivity by tuning the shape of nanopores. The review concludes with a summary and an outlook.

Photosynthesis of cyanobacteria in a miniaturized optofluidic waveguide platform

We investigated the effect of increasing the optical penetration length, inside polydimethylsiloxane (PDMS)-based photobioreactors (PBRs), upon the photosynthetic cell growth of cyanobacteria.

Micromachined Fused Silica Liquid Core Waveguide Capillary Flow Cell

A planar, chip-based flow cell for UV-vis absorbance detection in HPLC is presented. The device features a microfabricated free-standing liquid core waveguide (LCW) capillary detection tube of long path length that is based on total internal reflection. We report on the linearity and calibration slope characteristics of lithographically produced LCWs with different interior/exterior geometries. 3D ray tracing was indispensable in modeling behavior in the more demanding geometries: multipath behavior may be intrinsic to these waveguides with consequent nonlinearity. Fortunately, nonlinearity in lithographically easy-to-produce waveguide geometries (such as with a flat, concave exterior and a round interior) is not as detrimental as might be initially expected. Experimental performance is predictably affected by the attainable surface quality of the LCW and efficient and reproducible coupling of the input light into the LCW.

Dynamic manipulation of particles via transformative optofluidic waveguides

Optofluidics is one of the most remarkable areas in the field of microfluidic research. Particle manipulation with optofluidic platforms has become central to optical chromatography, biotechnology, and μ-total analysis systems. Optical manipulation of particles depends on their sizes and refractive indices (n), which occasionally leads to undesirable separation consequences when their optical mobilities are identical. Here, we demonstrate rapid and dynamic particle manipulation according to n, regardless of size. Integrated liquid-core/solid-cladding (LS) and liquid-core/liquid-cladding (L²) waveguides were fabricated and their characteristics were experimentally and theoretically determined. The high and low n particles showed the opposite behaviors by controlling the contrast of their n values to those of the working fluids. The LS waveguide was found to successfully manipulate particles according to n, and the L² waveguide was found to provide additional system stability and flexibility, compared to the LS system.

Electro-optical detection of single λ-DNA

Single λ-DNA molecules are detected on a nanopore-gated optofluidic chip electrically and optically. Statistical variations in the single particle trajectories are used to predict the intensity distribution of the fluorescence signals.

Time encoded multicolor fluorescence detection in a microfluidic flow cytometer

We describe an optical detection technique that delivers high signal-to-noise discrimination to enable a multi-parameter flow cytometer that combines high performance, robustness, compactness and low cost. The enabling technique is termed "spatially modulated detection" and generates a time-dependent signal as a continuously fluorescing (bio-) particle traverses an optical transmission pattern along the fluidic channel. Correlating the detected signal with the expected transmission pattern achieves high discrimination of the particle signal from background noise. Additionally, the particle speed and its fluorescence emission characteristics are deduced from the correlation analysis. Our method uses a large excitation/emission volume along the fluidic channel in order to increase the total flux of fluorescence light that originates from a particle while requiring minimal optical alignment. Despite the large excitation/detection volume, the mask pattern enables a high spatial resolution in the micron range. This allows for detection and characterization of particles with a separation (in flow direction) comparable to the dimension of individual particles. In addition, the concept is intrinsically tolerant of non-encoded background fluorescence originating from fluorescent components in solution, fluorescing components of the chamber and contaminants on its surface. The optical detection technique is illustrated with experimental results of multicolor detection with a single large area detector by filtering fluorescence emission of different particles through a patterned color mask. Thereby the particles' fluorescence emission spectrum is encoded in a time dependent intensity signal and color information can be extracted from the correlation analysis. The multicolor detection technique is demonstrated by differentiation of micro-beads loaded with PE (Phycoerythrin) and PE-Cy5 that are excited at 532 nm.

Dual-core optofluidic chip for independent particle detection and tunable spectral filtering

We present the first integration of fluidically tunable filters with a separate particle detection channel on a single planar, optofluidic chip. Two optically connected, but fluidically isolated liquid-core antiresonant reflecting optical waveguide (ARROW) segments serve as analyte and spectral filter sections, respectively. Ultrasensitive detection of fluorescent nanobeads with high signal-to-noise ratio provided by a fluidically tuned excitation notch filter is demonstrated. In addition, reconfigurable filter response is demonstrated using both core index tuning and bulk liquid tuning. Notch filters with 43 dB rejection ratio and a record 90 nm tuning range are implemented by using different mixtures of ethylene glycol and water in the filter section. Moreover, absorber dyes and liquids with pH-dependent transmission in the filter channel provide additional spectral control independent of the waveguide response. Using both core index and pH control, independent filter tuning at multiple wavelengths is demonstrated for the first time. This extensive on-chip control over spectral filtering as one of the fundamental components of optical particle detection techniques offers significant advantages in terms of compactness, cost, and simplicity, and opens new opportunities for waveguide-based optofluidic analysis systems.

Optofluidics incorporating actively controlled micro- and nano-particles

The advent of optofluidic systems incorporating suspended particles has resulted in the emergence of novel applications. Such systems operate based on the fact that suspended particles can be manipulated using well-appointed active forces, and their motions, locations and local concentrations can be controlled. These forces can be exerted on both individual and clusters of particles. Having the capability to manipulate suspended particles gives users the ability for tuning the physical and, to some extent, the chemical properties of the suspension media, which addresses the needs of various advanced optofluidic systems. Additionally, the incorporation of particles results in the realization of novel optofluidic solutions used for creating optical components and sensing platforms. In this review, we present different types of active forces that are used for particle manipulations and the resulting optofluidic systems incorporating them. These systems include optical components, optofluidic detection and analysis platforms, plasmonics and Raman systems, thermal and energy related systems, and platforms specifically incorporating biological particles. We conclude the review with a discussion of future perspectives, which are expected to further advance this rapidly growing field.

Bragg waveguides with low-index liquid cores

The spectral properties of light confined to low-index media by binary layered structures is discussed. A novel phase-based model with a simple analytical form is derived for the approximation of the center of arbitrary bandgaps of binary layered structures operating at arbitrary effective indices. An analytical approximation to the sensitivity of the bandgap center to changes in the core refractive index is thus derived. Experimentally, significant shifting of the fundamental bandgap of a hollow-core Bragg fiber with a large cladding layer refractive index contrast is demonstrated by filling the core with liquids of various refractive indices. Confirmation of these results against theory is shown, including the new analytical model, highlighting the importance of considering material dispersion. The work demonstrates the broad and sensitive tunability of Bragg structures and includes discussions on refractive index sensing.

Optical Characterization of Optofluidic Waveguides Using Scattered Light Imaging

The use of scattered light images is shown to be an attractive method for the characterization of optofluidic waveguides. The method is shown to be capable of measuring waveguide propagation losses and transmissions between solid and liquid-core structures. Measurement uncertainties are considered and characterized and were typically less than 15%.

Electrically tunable liquid crystal waveguide attenuators

The attenuator for the wavelength at 1550 nm is fabricated by using the capillary effect to infiltrate liquid crystal (LC) E7 into hollow waveguides (HWGs) on silicon substrate with SiO2 cladding layer. The length of the waveguide is 0.4 cm. The device can be operated with relatively low driving voltage below 5 V(pp) with the distance between two electrodes to be 9 μm. The light attenuation of the device can be over 30 dB. The performance of the device is independent of the polarization states of the input light.

A single-layer, planar, optofluidic Mach-Zehnder interferometer for label-free detection

We have developed a planar, optofluidic Mach-Zehnder interferometer for the label-free detection of liquid samples. In contrast to most on-chip interferometers which require complex fabrication, our design was realized via a simple, single-layer soft lithography fabrication process. In addition, a single-wavelength laser source and a silicon photodetector were the only optical equipment used for data collection. The device was calibrated using published data for the refractive index of calcium chloride (CaCl(2)) in solution, and the biosensing capabilities of the device were tested by detecting bovine serum albumin (BSA). Our design enables a refractometer with a low limit of detection (1.24 × 10(-4) refractive index units (RIU)), low variability (1 × 10(-4) RIU), and high sensitivity (927.88 oscillations per RIU). This performance is comparable to state-of-the-art optofluidic refractometers that involve complex fabrication processes and/or expensive, bulky optics. The advantages of our device (i.e. simple fabrication process, straightforward optical equipment, low cost, and high detection sensitivity) make it a promising candidate for future mass-producible, inexpensive, highly sensitive, label-free optical detection systems.

Dual-color fluorescence cross-correlation spectroscopy on a planar optofluidic chip

Fluorescence cross-correlation spectroscopy (FCCS) is a highly sensitive fluorescence technique with distinct advantages in many bioanalytical applications involving interaction and binding of multiple components. Due to the use of multiple beams, bulk optical FCCS setups require delicate and complex alignment procedures. We demonstrate the first implementation of dual-color FCCS on a planar, integrated optofluidic chip based on liquid-core waveguides that can guide liquid and light simultaneously. In this configuration, the excitation beams are delivered in predefined locations and automatically aligned within the excitation waveguides. We implement two canonical applications of FCCS in the optofluidic lab-on-chip environment: particle colocalization and binding/dissociation dynamics. Colocalization is demonstrated in the detection and discrimination of single-color and double-color fluorescently labeled nanobeads. FCCS in combination with fluorescence resonance energy transfer (FRET) is used to detect the denaturation process of double-stranded DNA at nanomolar concentration.

Nanomanipulation using near field photonics

In this article we review the use of near-field photonics for trapping, transport and handling of nanomaterials. While the advantages of traditional optical tweezing are well known at the microscale, direct application of these techniques to the handling of nanoscale materials has proven difficult due to unfavourable scaling of the fundamental physics. Recently a number of research groups have demonstrated how the evanescent fields surrounding photonic structures like photonic waveguides, optical resonators, and plasmonic nanoparticles can be used to greatly enhance optical forces. Here, we introduce some of the most common implementations of these techniques, focusing on those which have relevance to microfluidic or optofluidic applications. Since the field is still relatively nascent, we spend much of the article laying out the fundamental and practical advantages that near field optical manipulation offers over both traditional optical tweezing and other particle handling techniques. In addition we highlight three application areas where these techniques namely could be of interest to the lab-on-a-chip community, namely: single molecule analysis, nanoassembly, and optical chromatography.

Tailorable integrated optofluidic filters for biomolecular detection

Spectral filtering is an essential component of biophotonic methods such as fluorescence and Raman spectroscopy. Predominantly utilized in bulk microscopy, filters require efficient and selective transmission or removal of signals at one or more wavelength bands. However, towards highly sensitive and fully self-contained lab-on-chip systems, the integration of spectral filters is an essential step. In this work, a novel optofluidic solution is presented in which a liquid-core optical waveguide both transports sample analytes and acts as an efficient filter for advanced spectroscopy. To this end, the wavelength dependent nature of interference-based antiresonant reflecting optical waveguide technology is exploited. An extinction of 37 dB, a narrow rejection band of only 2.5 nm and a free spectral range of 76 nm using three specifically designed dielectric layers are demonstrated. These parameters result in an 18.4-fold increase in the signal-to-noise ratio for on-chip fluorescence detection. In addition, liquid-core waveguide filters with three operating wavelengths were designed for Förster resonance energy transfer detection and demonstrated using doubly labeled oligonucleotides. Incorporation of high-performance spectral processing illustrates the power of the optofluidic concept where fluidic channels also perform optical functions to create innovative and highly integrated lab-on-chip devices.

Hollow waveguides with low intrinsic photoluminescence fabricated with Ta(2)O(5) and SiO(2) films

A type of integrated hollow core waveguide with low intrinsic photoluminescence fabricated with Ta(2)O(5) and SiO(2) films is demonstrated. Hollow core waveguides made with a combination of plasma-enhanced chemical vapor deposition SiO(2) and sputtered Ta(2)O(5) provide a nearly optimal structure for optofluidic biofluorescence measurements with low optical loss, high fabrication yield, and low background photoluminescence. Compared to earlier structures made using Si(3)N(4), the photoluminescence background of Ta(2)O(5) based hollow core waveguides is decreased by a factor of 10 and the signal-to-noise ratio for fluorescent nanobead detection is improved by a factor of 12.

Optimized piranha etching process for SU8-based MEMS and MOEMS construction

We demonstrate the optimization of the concentration, temperature and cycling of a piranha (H(2)O(2):H(2)SO(4)) mixture that produces high yields while quickly etching hollow structures made using a highly crosslinked SU8 polymer sacrificial core. The effects of the piranha mixture on the thickness, refractive index and roughness of common micro-electromechanical systems and micro-opto-electromechanical systems fabrication materials (SiN, SiO(2) and Si) were determined. The effectiveness of the optimal piranha mixture was demonstrated in the construction of hollow anti-resonant reflecting optical waveguides.

Tunable two-dimensional liquid gradient refractive index (L-GRIN) lens for variable light focusing

We report a two-dimensional (2D) tunable liquid gradient refractive index (L-GRIN) lens for variable focusing of light in the out-of-plane direction. This lens focuses a light beam through a liquid medium with a 2D hyperbolic secant (HS) refractive index gradient. The refractive index gradient is established in a microfluidic chamber through the diffusion between two fluids with different refractive indices, i.e. CaCl(2) solution and deionized (DI) water. The 2D HS refractive index profile and subsequently the focal length of the L-GRIN lens can be tuned by changing the ratio of the flow rates of the CaCl(2) solution and DI water. The focusing effect is experimentally characterized through side-view and top-view image analysis, and the experimental data match well with the results from ray-tracing optical simulations. Advantages of the 2D L-GRIN lens include simple device fabrication procedure, low fluid consumption rate, convenient lens-tuning mechanism, and compatibility with existing microfluidic devices. We expect that with further optimizations, this 2D L-GRIN lens can be used in many optics-based lab-on-a-chip applications.

UV patterned nanoporous solid-liquid core waveguides

Nanoporous Solid-Liquid core waveguides were prepared by UV induced surface modification of hydrophobic nanoporous polymers. With this method, the index contrast (deltan = 0.20) is a result of selective water infiltration. The waveguide core is defined by UV light, rendering the exposed part of a nanoporous polymer block hydrophilic. A propagation loss of 0.62 dB/mm and a bend loss of 0.81 dB/90 degrees for bend radius as low as 1.75 mm was obtained in these multimode waveguides.

High-visibility optofluidic Mach-Zehnder interferometer

A high-visibility integrated optofluidic Mach-Zehnder interferometer based on liquid-core antiresonant reflecting optical waveguides is reported. The device's geometry has been optimized to minimize the intensity imbalance between the two arms for highly unbalanced Mach-Zehnder configurations. This results in a very compact device with a total length of only 2.5 mm and with required liquid volume of about 0.16 nl. High visibility is demonstrated for two interferometers corresponding to different sensing lengths. The devices have been optically characterized, and the measured interference fringes in the transmitted spectra show good agreement with the theoretical ones.

Optofluidic notch filter integration by lift-off of thin films

Optofluidic platforms used for biomolecular detection require spectral filtering for distinguishing analyte signals from unwanted background. Towards a fully integrated platform, an on-chip filter is required. Selective deposition of dielectric thin films on an optofluidic sensor based on antiresonant reflecting optical waveguide (ARROW) technology provides the means for localized, on-chip optical filtering. We present a lift-off technique, compatible with thin-film processing including plasma-enhanced chemical vapor and sputtering deposition. The resulting optofluidic notch filters exhibited a 20 dB rejection with linewidths as low as 20 nm for approximately 1 cm long chips consisting of liquid-core and solid-core waveguides.

Ultralow power trapping and fluorescence detection of single particles on an optofluidic chip

The development of on-chip methods to manipulate particles is receiving rapidly increasing attention. All-optical traps offer numerous advantages, but are plagued by large required power levels on the order of hundreds of milliwatts and the inability to act exclusively on individual particles. Here, we demonstrate a fully integrated electro-optical trap for single particles with optical excitation power levels that are five orders of magnitude lower than in conventional optical force traps. The trap is based on spatio-temporal light modulation that is implemented using networks of antiresonant reflecting optical waveguides. We demonstrate the combination of on-chip trapping and fluorescence detection of single microorganisms by studying the photobleaching dynamics of stained DNA in E. coli bacteria. The favorable size scaling facilitates the trapping of single nanoparticles on integrated optofluidic chips.

Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides

We demonstrate the fabrication of micropore and nanopore features in hollow antiresonant reflecting optical waveguides to create an electrical and optical analysis platform that can size select and detect a single nanoparticle. Micropores (4 μm diameter) are reactive-ion etched through the top SiO(2) and SiN layers of the waveguides, leaving a thin SiN membrane above the hollow core. Nanopores are formed in the SiN membranes using a focused ion-beam etch process that provides control over the pore size. Openings as small as 20 nm in diameter are created. Optical loss measurements indicate that micropores did not significantly alter the loss along the waveguide.

Multi-mode mitigation in an optofluidic chip for particle manipulation and sensing

A new waveguide design for an optofluidic chip is presented. It mitigates multi-mode behavior in solid and liquid-core waveguides by increasing fundamental mode coupling to 82% and 95%, respectively. Additionally, we demonstrate a six-fold improvement in lateral confinement of optically guided dielectric microparticles and double the detection efficiency of fluorescent particles.

Loss-based optical trap for on-chip particle analysis

Optical traps have become widespread tools for studying biological objects on the micro and nanoscale. However, conventional laser tweezers and traps rely on bulk optics and are not compatible with current trends in optofluidic miniaturization. Here, we report a new type of particle trap that relies on propagation loss in confined modes in liquid-core optical waveguides to trap particles. Using silica beads and E. coli bacteria, we demonstrate unique key capabilities of this trap. These include single particle trapping with micron-scale accuracy at arbitrary positions over waveguide lengths of several millimeters, definition of multiple independent particle traps in a single waveguide, and combination of optical trapping with single particle fluorescence analysis. The exclusive use of a two-dimensional network of planar waveguides strongly reduces experimental complexity and defines a new paradigm for on-chip particle control and analysis.

Optofluidic particle concentration by a long-range dual-beam trap

Ultrahigh sensitivity detection of particles in solution implies the ability to detect at very low concentrations. At the single-particle level, this is achieved through fluorescence detection, reaching down to single fluorophores. Sensitivity may also be improved by concentrating many particles into a compact cluster, thus "integrating" the signal of many particles. We show how both ways can be combined on an optofluidic chip in a fully planar geometry utilizing counterpropagating liquid-core waveguide modes to form a loss-based optical trap. This all-optical concentrator can increase the concentration of particles by more than 2 orders of magnitude and also provides a convenient, nondispersive means of transport for particle ensembles.

Ultrasensitive Qbeta phage analysis using fluorescence correlation spectroscopy on an optofluidic chip

We demonstrate detection and analysis of the Qbeta bacteriophage on the single virus level using an integrated optofluidic biosensor. Individual Qbeta phages with masses on the order of attograms were sensed and analyzed on a silicon chip in their natural liquid environment without the need for virus immobilization. The diffusion coefficient of the viruses was extracted from the fluorescence signal by means of fluorescence correlation spectroscopy (FCS) and found to be 15.90+/-1.50 microm(2)/s in excellent agreement with previously published values. The aggregation and disintegration of the phage were also observed. Virus flow velocities determined by FCS were in the 60-300 microm/s range. This study suggests considerable potential for an inexpensive and portable sensor capable of discrimination between viruses of different sizes.

Generalized Debye series expansion of electromagnetic plane wave scattering by an infinite multilayered cylinder at oblique incidence

The Debye series expansion expresses the Mie scattering coefficients into a series of Fresnel coefficients and gives physical interpretation of different scattering modes, but when an infinite multilayered cylinder is obliquely illuminated by electromagnetic plane waves, the scattering process becomes very complicated because of cross polarization. Based on the relation of boundary conditions between global scattering process and local scattering processes, the generalized Debye series expansion of plane wave scattering by an infinite multilayered cylinder at oblique incidence is derived in this paper. The formula and the code are verified by the comparison of the results with that of Lorenz-Mie theory in special cases and those presented in the literatures.

Fluorescent liquid-core/air-cladding waveguides towards integrated optofluidic light sources

We have demonstrated fluorescent liquid-core/air-cladding (LA) waveguides suitable for use as integrated optofluidic light sources. These waveguides were fabricated by conventional soft lithography using poly(dimethylsiloxane) (PDMS). Two-phase stratified flows of air and ethylene glycol with fluorescent dye were generated along the PDMS channel. Compared to the liquid-core/liquid-cladding (L(2)) waveguide, the larger refractive index contrast of the LA waveguide resulted in stronger optical confinement. Specifically, the larger refractive index contrast led to experimentally achievable captured fractions (the amount of light to be coupled into the liquid core) as high as 22.8% and the measured propagation losses as low as 0.14 dB cm(-1). Furthermore, in our LA waveguides, diffusional mixing of the core and cladding fluids did not occur and the size of the core stream could be reversibly tuned simply by adjusting the flow rates of the two contiguous phases.