GISAXS and GISANS as metrology technique for understanding the 3D morphology of block copolymer thin films

Influence of the airflow and humidity on the chain aggregation during the film-formation in a flexible waterborne polyurethane formulation

STATEMENT OF OBJECTIVES

Soft, waterborne polyurethane dispersions are indispensable components in many state-of-the-art materials, with applications ranging from binders for coatings and adhesives to matrixes for flexible devices. While the static bulk nanostructure of such systems is widely studied, the influence that environmental conditions such as relative humidity and airflow have on their film formation and phase segregation behavior in supported films is unknown.

EXPERIMENTS

Here, we elucidate the nanostructure evolution occurring during drying of an industrially relevant, soft polyurethane, utilizing real-time, non-destructive grazing incidence X-ray scattering analysis. Using an environmental-controlled casting cell, we highlight the differences between the drying mechanism under different conditions generated by tuning the airflow and the relative humidity.

FINDINGS

Our results show how the environment's relative humidity strongly influences chain aggregation and chain interdiffusion due to extended plasticization of the hard segment at high humidities, while accelerated air flows are responsible for the occurrence of (partial) skinning. Interestingly, despite changes in the chain aggregation behavior and occurrence of skinning and skin breakup during drying resulting in higher roughness at the film surface, minor influence is registered on the bulk tensile properties of the films, revealing the resilient nature towards environmental conditions of these soft weakly phase segregating polyurethane systems.

Transparent, Flexible, Responsive Switching "Delayed" Amphiphilic Coatings Designed on the Basis of the Full-Cycle Antifouling Strategy

Marine fouling on the surface of ships and equipment not only creates problems of enhanced resistance to navigation and increased energy consumption but also leads to unclear vision and inaccurate data collection. Antifouling coatings to resist fouling are effective, but it is difficult to achieve long-lasting fouling protection with a single interface state. Switching the status of the interface by intelligent response is a reasonable way to achieve full-cycle efficient antifouling. In this study, the hydrophobic and active antifouling interface in the initial state was achieved by adopting the fluorine-containing group and the natural extract (citronellol) as the antifouling active site. The switching of the interface relies on silanes, which respond to the generation of zwitterions in a seawater environment. Eventually, the interface switched from the hydrophobic state to the amphiphilic state with delayed formation, which achieved continued antifouling. Based on the full-cycle antifouling concept, the combination of low surface energy and antifouling active ingredients in the initial state sustainably switched surfaces in the midterm (free radicals generated during the hydrolysis process), and amphiphilic interfaces formed by "delays" produced an antifouling effect from the initial stage to the subsequent stage. The excellent antifouling activity (bacterial and diatom attachment inhibition by over 90% and significantly reduced mussel adhesion force), optical transparency, and flexibility of these coatings indicate the potential for the application of antifouling coatings prepared from hyperbranched silicone-based resins; they can also be used for data extraction sensors, underwater probes, marine photovoltaics, and other areas where transparency is required.

Ultrafine Network-Like Monolayer Structures of Amphiphilic Hyperbranched Copolymers Revealed by the Relative Aggregation Number Method

The aggregation behavior of two amphiphilic hyperbranched copolymers of poly[oligo(ethylene glycol) methacrylate-co-lauryl methacrylate] (H-[P(OEGMA-co-LMA)]) at the air/water interface was investigated by using the Langmuir film balance technique and atomic force microscopy (AFM). At the air/water interface, H-[P(OEGMA-co-LMA)] copolymers spontaneously form the ultrafine network-like monolayer structures of micelles; each micelle consists of a tiny hydrophobic core of one or two carbon backbones and lauryl side groups and a short hydrophilic shell of oligo(ethylene glycol) (OEG) side groups, and the micellar cores are connected by the branching agent ethylene glycol dimethacrylate (EGDMA). These ultrafine micellar structures are successfully revealed by our relative aggregation number method presented in this work, which is based on our previous relative mass method and methylene number method. The surface pressure-molecular area isotherms of POEGMA29%-PLMA71% (weight percent) and POEGMA69%-PLMA31% are condensed and expanded, respectively, because the density/number of OEG side groups in the former shells is smaller than that in the latter case. Upon monolayer compression, the isotherms of the former are classified into regions I-IV, whereas those of the latter are classified into regions II and III based on their different variation trends of surface pressure. Subphase pH has little influence on the isotherms of the two copolymers because the stretching degrees of hydrophilic OEG side groups in the shells are probably limited by the connected cores, which is different from the large effects in our previous block copolymers containing POEGMA or poly[oligo(ethylene glycol) acrylate] blocks. Under neutral and alkaline conditions, in region III, the mean molecular area (mmA) values of the isotherms of the two copolymers at 20 °C are smaller than those at 10 °C due to the collapse of the OEG side groups above 15 °C. Furthermore, the isotherms of POEGMA69%-PLMA31% move to larger mmA values at 30 °C due to the increased thermal mobility and stretching degrees of more OEG side groups.

Hybrid Metrology for Nanostructured Optical Metasurfaces

Metasurfaces have garnered increasing research interest in recent years due to their remarkable advantages, such as efficient miniaturization and novel functionalities compared to traditional optical elements such as lenses and filters. These advantages have facilitated their rapid commercial deployment. Recent advancements in nanofabrication have enabled the reduction of optical metasurface dimensions to the nanometer scale, expanding their capabilities to cover visible wavelengths. However, the pursuit of large-scale manufacturing of metasurfaces with customizable functions presents challenges in controlling the dimensions and composition of the constituent dielectric materials. To address these challenges, the combination of block copolymer (BCP) self-assembly and sequential infiltration synthesis (SIS), offers an alternative for fabrication of high-resolution dielectric nanostructures with tailored composition and optical functionalities. However, the absence of metrological techniques capable of providing precise and reliable characterization of the refractive index of dielectric nanostructures persists. This study introduces a hybrid metrology strategy that integrates complementary synchrotron-based traceable X-ray techniques to achieve comprehensive material characterization for the determination of the refractive index on the nanoscale. To establish correlations between material functionality and their underlying chemical, compositional and dimensional properties, TiO2 nanostructures model systems were fabricated by SIS of BCPs. The results from synchrotron-based analyses were integrated into physical models, serving as a validation scheme for laboratory-scale measurements to determine effective refractive indices of the nanoscale dielectric materials.

Strategy to simulate and fit 2D grazing-incidence small-angle X-ray scattering patterns of nanostructured thin films

Grazing-incidence small-angle X-ray scattering (GISAXS) is a widely used method for the characterization of the nanostructure of supported thin films and enables time-resolved in situ measurements. The 2D scattering patterns contain detailed information about the nanostructures within the film and at its surface. However, this information is distorted not only by the reflection of the X-ray beam at the substrate-film interface and its refraction at the film surface but also by scattering of the substrate, the sample holder and other types of parasitic background scattering. In this work, a new, efficient strategy to simulate and fit 2D GISAXS patterns that explicitly includes these effects is introduced and demonstrated for (i) a model case nanostructured thin film on a substrate and (ii) experimental data from a microphase-separated block copolymer thin film. To make the protocol efficient, characteristic linecuts through the 2D GISAXS patterns, where the different contributions dominate, are analysed. The contributions of the substrate and the parasitic background scattering - which ideally are measured separately - are determined first and are used in the analysis of the 2D GISAXS patterns of the nanostructured, supported film. The nanostructures at the film surface and within the film are added step by step to the real-space model of the simulation, and their structural parameters are determined by minimizing the difference between simulated and experimental scattering patterns in the selected linecuts. Although in the present work the strategy is adapted for and tested with BornAgain, it can be easily used with other types of simulation software. The strategy is also applicable to grazing-incidence small-angle neutron scattering.

Lyotropic Liquid Crystal (LLC)-Templated Nanofiltration Membranes by Precisely Administering LLC/Substrate Interfacial Structure

Mesoporous materials based on lyotropic liquid crystal templates with precisely defined and flexible nanostructures offer an alluring solution to the age-old challenge of water scarcity. In contrast, polyamide (PA)-based thin-film composite (TFC) membranes have long been hailed as the state of the art in desalination. They grapple with a common trade-off between permeability and selectivity. However, the tides are turning as these novel materials, with pore sizes ranging from 0.2 to 5 nm, take center stage as highly coveted active layers in TFC membranes. With the ability to regulate water transport and influence the formation of the active layer, the middle porous substrate of TFC membranes becomes an essential player in unlocking their true potential. This review delves deep into the recent advancements in fabricating active layers using lyotropic liquid crystal templates on porous substrates. It meticulously analyzes the retention of the liquid crystal phase structure, explores the membrane fabrication processes, and evaluates the water filtration performance. Additionally, it presents an exhaustive comparison between the effects of substrates on both polyamide and lyotropic liquid crystal template top layer-based TFC membranes, covering crucial aspects such as surface pore structures, hydrophilicity, and heterogeneity. To push the boundaries even further, the review explores a diverse array of promising strategies for surface modification and interlayer introduction, all aimed at achieving an ideal substrate surface design. Moreover, it delves into the realm of cutting-edge techniques for detecting and unraveling the intricate interfacial structures between the lyotropic liquid crystal and the substrate. This review is a passport to unravel the enigmatic world of lyotropic liquid crystal-templated TFC membranes and their transformative role in global water challenges.

Controlling self-assembling co-polymer coatings of hydrophilic polysaccharide substrates via co-polymer block length ratio

HYPOTHESIS

The degree of polymerization of amphiphilic di-block co-polymers, which can be varied with ease in computer simulations, provides a means to control self-assembling di-block co-polymer coatings on hydrophilic substrates.

SIMULATIONS

We examine self-assembly of linear amphiphilic di-block co-polymers on hydrophilic surface via dissipative particle dynamics simulations. The system models a glucose based polysaccharide surface on which random co-polymers of styrene and n-butyl acrylate, as the hydrophobic block, and starch, as the hydrophilic block, forms a film. Such setups are common in e.g. hygiene, pharmaceutical, and paper product applications.

FINDINGS

Variation of the block length ratio (35 monomers in total) reveals that all examined compositions readily coat the substrate. However, strongly asymmetric block co-polymers with short hydrophobic segments are best in wetting the surface, whereas approximately symmetric composition leads to most stable films with highest internal order and well-defined internal stratification. At intermediate asymmetries, isolated hydrophobic domains form. We map the sensitivity and stability of the assembly response for a large variety of interaction parameters. The reported response persists for a wide polymer mixing interactions range, providing general means to tune surface coating films and their internal structure, including compartmentalization.

Poly(ionic liquid) Gating Materials for High-Performance Organic Thin-Film Transistors: The Role of Block Copolymer Self-Assembly at the Semiconductor Interface

The widespread realization of wearable electronics requires printable active materials capable of operating at low voltages. Polymerized ionic liquid (PIL) block copolymers exhibit a thickness-independent double-layer capacitance that makes them a promising gating medium for the development of organic thin-film transistors (OTFTs) with low operating voltages and high switching speed. PIL block copolymer structure and self-assembly can influence ion conductivity and the resulting OTFT performance. In an OTFT, self-assembly of the PIL gate on the semiconducting polymer may differ from bulk self-assembly, which would directly influence electrical double-layer formation. To this end, we used poly{[N,N'-bis(2-octyldodecyl)-naphthalene-1,4,5,8-bis(dicarboximide)-2,6-diyl]-alt-5,5'-(2,2'-bithiophene)} (P(NDI2OD-T2)) as a model semiconductor for our OTFTs, on which our PILs exhibited self-assembly. In this study, we explore this critical interface by grazing-incidence small-angle X-ray scattering (GISAXS) and atomic force microscopy (AFM) of P(NDI2OD-T2) and a series of poly(styrene)-b-poly(1-(4-vinylbenzyl)-3-butylimidazolium-random-poly(ethylene glycol) methyl ether methacrylate) (poly(S)-b-poly(VBBI⁺[X]-r-PEGMA)) block copolymers with varying PEGMA/VBBI⁺ ratios and three different mobile anions (where X = TFSI^-, PF₆^-, or BF₄^-). We investigate the thin-film self-assembly of block copolymers as a function of device performance. Overall, a mixed orientation at the interface leads to improved device performance, while predominantly hexagonal packing leads to nonfunctional devices, regardless of the anion present. These PIL gated OTFTs were characterized with a threshold voltage below 1 V, making understanding of their structure-property relationships crucial to enabling the further development of high-performance gating materials.

In Situ Grazing-Incidence SAXS Investigation of Thermal-Induced Self-Assembly Process of PS-b-PMMA Films Deposited on Surface-Modified Substrate

Directed self-assembly of block copolymers (BCPs) is widely investigated for its potential application in surface patterning. The self-assembly kinetics of BCP based on modified layers is the key to realizing structural control for obtaining highly ordered lamellar grains. In this study, morphological evolution of PS-b-PMMA films during the thermal-induced self-assembly process was investigated via the in situ grazing-incidence small-angle X-ray scattering (GISAXS) technique. In the first heating stage, reorientation of lamellar grains occurred as the temperature increased above the glass transition temperature. Then, a fast increase in the lamellar repeat period L₀ was observed, which is considered as a phase separation process. Whereas the size of the lamellar grain ξ was observed to have rapidly increased in the stage wherein the temperature was held at 230 °C, the L₀ was almost constant. This result indicates that the formation of ordered structure in PS-b-PMMA films was mainly determined by two periods: phase separation of block molecules followed by growth of grains in the nanodomain. In addition, it was interesting that the better-order nanodomains were obtained with thermal annealing at a faster heating rate. These findings suggest that accomplishing ordered structure control in a large area could be realized via the design of a proper heating profile.

Sequential Infiltration Synthesis into Maltoheptaose and Poly(styrene): Implications for Sub-10 nm Pattern Transfer

Vapor phase infiltration into a self-assembled block copolymer (BCP) to create a hybrid material in one of the constituent blocks can enhance the etch selectivity for pattern transfer. Multiple pulse infiltration into carbohydrate-based high-χ BCP has previously been shown to enable sub-10 nm feature pattern transfer. By optimizing the amount of infiltrated material, the etch selectivity should be further improved. Here, an investigation of semi-static sequential infiltration synthesis of trimethyl aluminum (TMA) and water into maltoheptaose (MH) films, and into hydroxyl-terminated poly(styrene) (PS-OH) films, was performed, by varying the process parameters temperature, precursor pulse duration, and precursor exposure length. It was found that, by decreasing the exposure time from 100 to 20 s, the volumetric percentage on included pure Al2O3 in MH could be increased from 2 to 40 vol% at the expense of a decreased infiltration depth. Furthermore, the degree of infiltration was minimally affected by temperature between 64 and 100 °C. Shorter precursor pulse durations of 10 ms TMA and 5 ms water, as well as longer precursor pulses of 75 ms TMA and 45 ms water, were both shown to promote a higher degree, 40 vol%, of infiltrated alumina in MH. As proof of concept, 12 nm pitch pattern transfer into silicon was demonstrated using the method and can be concluded to be one of few studies showing pattern transfer at such small pitch. These results are expected to be of use for further understanding of the mechanisms involved in sequential infiltration synthesis of TMA/water into MH, and for further optimization of carbohydrate-based etch masks for sub-10 nm pattern transfer. Enabling techniques for high aspect ratio pattern transfer at the single nanometer scale could be of high interest, e.g., in the high-end transistor industry.

In Situ GISAXS Observation and Large Area Homogeneity Study of Slot-Die Printed PS-b-P4VP and PS-b-P4VP/FeCl3 Thin Films

Mesoporous hematite (α-Fe₂O₃) thin films with high surface-to-volume ratios show great potential as photoelectrodes or electrochemical electrodes in energy conversion and storage. In the present work, with the assistance of an up-scalable slot-die coating technique, locally highly ordered α-Fe₂O₃ thin films are successfully printed based on the amphiphilic diblock copolymer poly(styrene-b-4-vinylpyridine) (PS-b-P4VP) as a structure-directing agent. Pure PS-b-P4VP films are printed under the same conditions for comparison. The micellization of the diblock copolymer in solution, the film formation process of the printed thin films, the homogeneity of the dry films in the lateral and vertical direction as well as the morphological and compositional information on the calcined hybrid PS-b-P4VP/FeCl₃ thin film are investigated. Because of convection during the solvent evaporation process, a similar dimple-type structure of vertically aligned cylindrical PS domains in a P4VP matrix developed for both printed PS-b-P4VP and hybrid PS-b-P4VP/FeCl₃ thin films. The coordination effect between the Fe³⁺ ions and the vinylpyridine groups significantly affects the attachment ability of the P4VP chains to the silicon substrate. Accordingly, distinct feature sizes and homogeneity in the lateral direction, as well as the thicknesses in the perpendicular direction, are demonstrated in the two printed films. By removing the polymer template from the hybrid PS-b-P4VP/FeCl₃ film at high temperature, a locally highly ordered mesoporous α-Fe₂O₃ film is obtained. Thus, a facile and up-scalable printing technique is presented for producing homogeneous mesoporous α-Fe₂O₃ thin films.

Unidirectional Perpendicularly Aligned Lamella-Structured Oligosaccharide (A) ABA Triblock Elastomer (B) Thin Films Utilizing Triazolium+/TFSI- Ionic Nanochannels

We designed and synthesized high χ-low N-maltoheptaose-(triazolium+/N(SO2CF3)2-)-polyisoprene-(triazolium+/N(SO2CF3)2-)-maltoheptaose ABA triblock elastomers featuring triazolium+/N(SO2CF3)2- (TFSI-) counteranion ionic interfaces separating their constituting polymeric sub-blocks. Spin-coated and solvent-vapor-annealed (SVA) MH1.2k-(T+/TFSI-)-PI4.3k-(T+/TFSI-)-MH1.2k thin films demonstrate interface-induced charge cohesion through ca. 1 nm "thick" ionic nanochannels which facilitate the self-assembly of a perpendicularly aligned lamellar structure. Atomic force microscopy (AFM) and (grazing-incidence) small-angle X-ray scattering ((GI)SAXS) characterizations of MH1.2k-(T+/TFSI-)-PI4.3k-(T+/TFSI-)-MH1.2k and pristine triBCP analogous thin films revealed sub-10 nm block copolymer (BCP) self-assembly and unidirectionally aligned nanostructures developed over several μm2 areas. Solvated TFSI- counterions enhance the oligosaccharide sub-block packing during SVA. The overall BCP phase behavior was mapped through SAXS characterizations comparing di- vs triblock polymeric architectures, a middle PI sub-block with two different molecular masses, and TFSI- or I- counteranion effects. This work highlights the benefits of inducing single-point electrostatic interactions within chemical structures of block copolymers to master the long-range self-assembly of prescribed morphologies.

Wafer-Scale Unidirectional Alignment of Supramolecular Columns on Faceted Surfaces

The long-range alignment of supramolecular structures must be engineered as a first step toward advanced nanopatterning processes aimed at miniaturizing features to dimensions below 5 nm. This study introduces a facile method of directing the orientation of supramolecular columns over wafer-scale areas using faceted surfaces. Supramolecular columns with features on the sub-5 nm scale were highly aligned in a direction orthogonal to that of the facet patterning on unidirectional and nanoscopic faceted surface patterns. This unidirectional alignment of supramolecular columns is also observed by varying the thickness of the supramolecular film or by altering the dimensions of the facet pattern. The ordering behavior of the supramolecular columns can be attributed to the triangular depth profile of the bottom facet pattern. Furthermore, this directed self-assembly principle allows for the continuous alignment of supramolecular structures across ultralarge distances on flexible patterned substrates.

Understanding near-surface polymer dynamics by a combination of grazing-incidence neutron scattering and virtual experiments

Neutron spin-echo spectroscopy is a unique experimental method for the investigation of polymer dynamics. The combination of neutron spin-echo spectroscopy with grazing-incidence geometry (GINSES) opens the possibility to probe the dynamics of soft-matter materials in the vicinity of the solid substrate in the time range up to 100 ns. However, the usage of the GINSES technique has some peculiarities and, due to the novelty of the method and complexity of the scattering geometry, difficulties in further data analysis occur. The current work discusses how virtual experiments within the distorted-wave Born approximation using the BornAgain software can improve GINSES data treatment and aid the understanding of polymer dynamics in the vicinity of the solid surface. With two examples, poly(N-isopropyl acrylamide) brushes and poly(ethylene glycol) microgels on Si surfaces, the simulation as well as the application of the simulation to the GINSES data analysis are presented. The approach allowed a deeper insight to be gained of the background effect and scattering contribution of different layers.

3D printed spherical environmental chamber for neutron reflectometry and grazing-incidence small-angle neutron scattering experiments

In neutron scattering on soft matter, an important concern is the control and stability of environmental conditions surrounding the sample. Complex sample environment setups are often expensive to fabricate or simply not achievable by conventional workshop manufacturing. We make use of state-of-the-art 3D metal-printing technology to realize a sample environment for large sample sizes, optimized for investigations on thin film samples with neutron reflectometry (NR) and grazing-incidence small-angle neutron scattering (GISANS). With the flexibility and freedom of design given by 3D metal-printing, a spherical chamber with fluidic channels inside its walls is printed from an AlSi10Mg powder via selective laser melting (SLM). The thin channels ensure a homogeneous heating of the sample environment from all directions and allow for quick temperature switches in well-equilibrated atmospheres. In order to optimize the channel layout, flow simulations were carried out and verified in temperature switching tests. The spherical, edgeless design aids the prevention of condensation inside the chamber in case of high humidity conditions. The large volume of the sample chamber allows for high flexibility in sample size and geometry. While a small-angle neutron scattering (SANS) measurement through the chamber walls reveals a strong isotropic scattering signal resulting from the evenly orientated granular structure introduced by SLM, a second SANS measurement through the windows shows no additional background originating from the chamber. Exemplary GISANS and NR measurements in time-of-flight mode are shown to prove that the chamber provides a stable, background free sample environment for the investigation of thin films.

Self-assembly of block copolymers under non-isothermal annealing conditions as revealed by grazing-incidence small-angle X-ray scattering

An accurate knowledge of the parameters governing the kinetics of block copolymer self-assembly is crucial to model the time- and temperature-dependent evolution of pattern formation during annealing as well as to predict the most efficient conditions for the formation of defect-free patterns. Here, the self-assembly kinetics of a lamellar PS-b-PMMA block copolymer under both isothermal and non-isothermal annealing conditions are investigated by combining grazing-incidence small-angle X-ray scattering (GISAXS) experiments with a novel modelling methodology that accounts for the annealing history of the block copolymer film before it reaches the isothermal regime. Such a model allows conventional studies in isothermal annealing conditions to be extended to the more realistic case of non-isothermal annealing and prediction of the accuracy in the determination of the relevant parameters, namely the correlation length and the growth exponent, which define the kinetics of the self-assembly.

Application of Synchrotron Radiation X-ray Scattering and Spectroscopy to Soft Matter

Light produced by synchrotron radiation (SR) is much brighter than that produced by conventional laboratory X-ray sources. The photon energy of SR X-ray ranges from soft and tender X-rays to hard X-rays. Moreover, X-rays become element sensitive with decreasing photon energy. By using a wide energy range and high-quality light of SR, different scattering and spectroscopic methods were applied to various soft matters. We present five of our recent studies performed using specific light properties of a synchrotron facility, which are as follows: (1) In situ USAXS study to understand the deformation behavior of colloidal crystals during uniaxial stretching; (2) structure characterization of semiconducting polymer thin films along the film thickness direction by grazing-incidence wide-angle X-ray scattering using tender X-rays; (3) X-ray absorption fine structure (XAFS) analysis of the formation mechanism of poly(3-hexylthiophene) (P3HT); (4) soft X-ray absorption and emission spectroscopic analysis of water structure in polyelectrolyte brushes; and (5) X-ray photon correlation spectroscopic analysis of the diffusion behavior of polystyrene-grafted nanoparticles dispersed in a polystyrene matrix.

Lattice self-consistent field calculations of confined symmetric block copolymers of various chain architectures

The effects of chain architecture and confinement on the structure and orientation of lamellae formed by incompressible and symmetric AB-type block copolymer melts confined between two parallel and identical surfaces are investigated using self-consistent field calculations on a simple cubic lattice. Five systems of various chain architectures (linear, ring, and star) and lengths are studied, with their bulk lamellar period L₀ chosen such that they have comparable L₀/R_g, where R_g denotes the ideal-chain radius of gyration. For thin films of thickness D = L₀ confined between two neutral surfaces, we define the rescaled volume fraction profiles of A, B, chain end, and joint segments in the parallel and perpendicular lamellae such that these profiles can be directly compared among the five systems to quantitatively reveal the interplay between the chain-end enrichment near confining surfaces and the surface-induced A-B compatibilization, and how such interplay is affected by the chain architectures (for example, the chain-crowding effects in the star block copolymers). The effects of D and surface preference for one of the blocks are also investigated.

Effect of Trapped Solvent on the Interface between PS-b-PMMA Thin Films and P(S-r-MMA) Brush Layers

The orientation of block copolymer (BCP) features in thin films can be obtained by spin-coating a BCP solution on a substrate surface functionalized by a polymer brush layer of the appropriate random copolymer (RCP). Although this approach is well established, little work reporting the amount and distribution of residual solvent in the polymer film after the spin-coating process is available. Moreover, no information can be found on the effect of trapped solvent on the interface between the BCP film and RCP brush. In this work, systems consisting of poly(styrene)-b-poly(methyl methacrylate) thin films deposited on poly(styrene-r-methyl methacrylate) brush layers are investigated by combining neutron reflectivity (NR) experiments with simulation techniques. An increase in the amount of trapped solvent is observed by NR as the BCP film thickness increases accompanied by a significant decrease of the interpenetration length between the BCP and RCP, thus suggesting that the interpenetration between grafted chains and block copolymer chains is hampered by the solvent. Hybrid particle-field molecular dynamics simulations of the analyzed system confirm the experimental observations and demonstrate a clear correlation between the interpenetration length and the amount of trapped solvent.

Self-Assembly in ultrahigh molecular weight sphere-forming diblock copolymer thin films under strong confinement

Ultrahigh molecular weight (UHMW) diblock copolymers (DBCs) have emerged as a promising template for fabricating large-sized nanostructures. Therefore, it is of high significance to systematically study the influence of film thickness and solvent vapor annealing (SVA) on the structure evolution of UHMW DBC thin films. In this work, spin coating of an asymmetric linear UHMW polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) DBC is used to fabricate thin films, which are spherically structured with an inter-domain distance larger than 150 nm. To enhance the polymer chain mobility and facilitate approaching equilibrium nanostructures, SVA is utilized as a post-treatment of the spin coated films. With increasing film thickness, a local hexagonal packing of PMMA half-spheres on the surface can be obtained, and the order is improved at larger thickness, as determined by grazing incidence small angle X-ray scattering (GISAXS). Additionally, the films with locally hexagonal packed half-spherical morphology show a poor order-order-poor order transition upon SVA, indicating the realization of ordered structure using suitable SVA parameters.

Broadband hyperbolic metamaterial covering the whole visible-light region

Nanowire-based hyperbolic metamaterials (HMMs) with rich optical dispersion engineering capabilities are promising for use in miniaturization devices, such as nanophotonic chips and circuits. Herein, based on a one-step and template-free sputtering method, we are capable of precisely tuning the microstructural parameters of Ag nanowires (with a diameter <10  nm) in silica matrix, offering plenty of opportunities to perform hyperbolic dispersion engineering. Thus, the effective plasma frequency of the designed HMMs was shifted into the near-ultraviolet region (∼350  nm), leading to a broadband hyperbolic dispersion feature covering the whole visible-light region. This demonstration could pave the way for the development of metamaterial-based flat lenses, deep-subwavelength waveguiding, and broadband perfect absorbers and sensing, etc.

Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with grazing-incidence small-angle X-ray scattering

In this study, grazing-incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 × 15 mm on photonic structures produced by nanoimprint lithography. The photonic structures are composed of crystalline and locally quasicrystalline two-dimensional patterns with structure sizes between about 100 nm and 10 µm to enable broadband visible light absorption for use in solar-energy harvesting. These first GISAXS measurements on locally quasicrystalline samples demonstrate that GISAXS is capable of showing the locally quasicrystalline nature of the samples while at the same time revealing the long-range periodicity introduced by the lattice design. The scattering is described qualitatively in the framework of the distorted-wave Born approximation using a hierarchical model mirroring the sample design, which consists of a rectangular and locally quasicrystalline supercell that is repeated periodically to fill the whole surface. The nanoimprinted samples are compared with a sample manufactured using electron-beam lithography and the distortions of the periodic and locally quasiperiodic samples are quantified statistically. Owing to the high sensitivity of GISAXS to deviations from the perfect lattice, the misalignment of the crystallographic axes was measured with a resolution of 0.015°, showing distortions of up to ±0.15° in the investigated samples.

Unwarping GISAXS data

Grazing-incidence small-angle X-ray scattering (GISAXS) is a powerful technique for measuring the nanostructure of coatings and thin films. However, GISAXS data are plagued by distortions that complicate data analysis. The detector image is a warped representation of reciprocal space because of refraction, and overlapping scattering patterns appear because of reflection. A method is presented to unwarp GISAXS data, recovering an estimate of the true undistorted scattering pattern. The method consists of first generating a guess for the structure of the reciprocal-space scattering by solving for a mutually consistent prediction from the transmission and reflection sub-components. This initial guess is then iteratively refined by fitting experimental GISAXS images at multiple incident angles, using the distorted-wave Born approximation (DWBA) to convert between reciprocal space and detector space. This method converges to a high-quality reconstruction for the undistorted scattering, as validated by comparing with grazing-transmission scattering data. This new method for unwarping GISAXS images will broaden the applicability of grazing-incidence techniques, allowing experimenters to inspect undistorted visualizations of their data and allowing a broader range of analysis methods to be applied to GI data.

Grazing incidence scattering

Reflectometry experiments probe the scattering length density along the normal of interfaces by analysing the specularly scattered intensity. Lateral fluctuations result in intensity scattered away from the specular condition. In this paper the principles and peculiarities of grazing incidence scattering experiments are explained. One specific example, the self assembly of polymer micelles close to interfaces, is taken as a show case in order to introduce the scattering geometry and accessible length scales. The basic idea of the distorted wave Born approximation is lined out and some scientific examples are summarized.

In Situ Synthesis of Ternary Block Copolymer/Homopolymer Blends for Organic Photovoltaics

A detailed investigation of in situ-synthesized all-conjugated block copolymer (BCP) compatibilized ternary blends containing poly(3-hexylthiophene) (P3HT) and poly{[ N, N'-bis(2-octyldodecyl)naphthalene-1,4,5,8-bis(dibcarboximide)-2,6-diyl]- alt-5,5'-(2,2'-bithiophene)} (PNDIT2) as donor and acceptor polymers, respectively, is presented. Both polymers are incompatible and show strong segregation in blends, which renders compatibilization with their corresponding BCPs promising to enable nanometer-phase-separated structures suitable for excitonic devices. Here, we synthesize a ternary block copolymer/homopolymer blend system and investigate the phase behavior as a function of block copolymer molecular weight and different annealing conditions. The device performance decreases on increasing annealing temperatures. To understand this effect, morphological investigations including atomic force microscopy, high-resolution transmission electron microscopy (HR-TEM), and grazing incidence wide- and small-angle X-ray scattering (GIWAXS/GISAXS) are carried out. On comparing domain sizes of pristine and compatibilized blends obtained from GISAXS, a weak compatibilization effect appears to take place for the in situ-synthesized ternary systems. The effect of thermal annealing is most prevalent for all samples, which, for the highest annealing temperature above the melting point of PNDIT2 (310 °C), ultimately leads to a change from the face-on to edge-on orientation of PNDIT2, as seen in GIWAXS. This effect dominates and decreases all photovoltaic parameters, irrespective of whether a pristine or compatibilized blend is used.

High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films

Despite its efficacy in producing well-ordered, periodic nanostructures, the intricate role multiple parameters play in solvent vapor annealing has not been fully established. In solvent vapor annealing a thin polymer film is exposed to a vapor of solvent(s) thus forming a swollen and mobile layer to direct the self-assembly process at the nanoscale. Recent developments in both theory and experiments have directly identified critical parameters that govern this process, but controlling them in any systematic way has proven non-trivial. These identified parameters include vapor pressure, solvent concentration in the film, and the solvent evaporation rate. To explore their role, a purpose-built solvent vapor annealing chamber was designed and constructed. The all-metal chamber is designed to be inert to solvent exposure. Computer-controlled, pneumatically actuated valves allow for precision timing in the introduction and withdrawal of solvent vapor from the film. The mass flow controller-regulated inlet, chamber pressure gauges, in situ spectral reflectance-based thickness monitoring, and low flow micrometer relief valve give real-time monitoring and control during the annealing and evaporation phases with unprecedented precision and accuracy. The reliable and repeatable alignment of polylactide cylinders formed from polystyrene-b-polylactide, where cylinders stand perpendicular to the substrate and span the thickness of the film, provides one illustrative example.

In Situ Monitoring the Uptake of Moisture into Hybrid Perovskite Thin Films

Solution-processed hybrid perovskites are of great interest for use in photovoltaics. However, polycrystalline perovskite thin films show strong degradation in humid atmospheres, which poses an important challenge for large-scale market introduction. With in situ grazing incidence neutron scattering (GISANS) we analyzed water content, degradation products, and morphological changes during prolonged exposure to several humidity levels. In high humidity, the formation of metastable hydrate phases is accompanied by domain swelling, which transforms the faceted crystals to a round-washed, pebble-like form. The films incorporate much more water than is integrated into the hydrates, with smaller crystals being more affected, making the degradation strongly dependent on film morphology. Even at low humidity, water is adsorbed on the crystal surfaces without the formation of crystalline degradation products. Thus, although production in an ambient atmosphere is of interest for industrial production it might lead to long-term degradation without appropriate countermeasures like postproduction drying below 30% RH.

Optimizing self-consistent field theory block copolymer models with X-ray metrology

A block copolymer self-consistent field theory (SCFT) model is used for direct analysis of experimental X-ray scattering data obtained from thin films of polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA) made from directed self-assembly. In a departure from traditional approaches, which reconstruct the real space structure using simple geometric shapes, we build on recent work that has relied on physics-based models to determine shape profiles and extract thermodynamic processing information from the scattering data. More specifically, an SCFT model, coupled to a covariance matrix adaptation evolutionary strategy (CMAES), is used to find the set of simulation parameters for the model that best reproduces the scattering data. The SCFT model is detailed enough to capture the essential physics of the copolymer self-assembly, but sufficiently simple to rapidly produce structure profiles needed for interpreting the scattering data. The ability of the model to produce a matching scattering profile is assessed, and several improvements are proposed in order to more accurately recreate the experimental observations. The predicted parameters are compared to those extracted from model fits via additional experimental methods and with predicted parameters from direct particle-based simulations of the same model, which incorporate the effects of fluctuations. The Flory-Huggins interaction parameter for PS-b-PMMA is found to be in agreement with reported ranges for this material. These results serve to strengthen the case for relying on physics-based models for direct analysis of scattering and light signal based experiments.

Controlled solvent vapor annealing of a high χ block copolymer thin film

Molecular self-assembling block copolymers (BCPs) have shown promise as a next generation bottom-up lithography technology. However, a critical step in advancing this approach is the elimination of polymer dewetting due to bulk solvent nucleation and thermodynamically driven film rupture that can occur during the solvent vapor annealing process. We report on the pattern formation via phase segregation of spin coated diblock copolymer films through the investigation of annealing parameters in the limit of high solvent vapor saturation conditions that results in wafer-scale patterning without observing polymer dewetting defects. Specifically, the work addresses polymer dewetting in diblock copolymer nanodot templates through the use of a "neutral" functionalization layer and the development of a custom-built solvent vapor annealing chamber to precisely control saturation conditions. Furthermore, the long anneal times (4 h) using a standard static solvent vapor annealing procedure were reduced to ∼15-30 minutes with our dynamic solvent vapor annealing system for the high χ, cylindrical forming poly(styrene)-block-poly(4-vinyl-pyridine) [PS-b-P4VP] diblock copolymer system. We discuss the kinetic mechanism governing the phase segregation process that highlights the small processing window bounded by long phase segregation timescales (≳1 min) on one side and the initiation of polymer film dewetting on the other. These results demonstrate a key step towards realizing a high fidelity, low cost BCP patterning technique for large-scale "bottom-up" feature definition at nanometer length scales.

Macroscale and Nanoscale Morphology Evolution during in Situ Spray Coating of Titania Films for Perovskite Solar Cells

Mesoporous titania is a cheap and widely used material for photovoltaic applications. To enable a large-scale fabrication and a controllable pore size, we combined a block copolymer-assisted sol-gel route with spray coating to fabricate titania films, in which the block copolymer polystyrene-block-poly(ethylene oxide) (PS-b-PEO) is used as a structure-directing template. Both the macroscale and nanoscale are studied. The kinetics and thermodynamics of the spray deposition processes are simulated on a macroscale, which shows a good agreement with the large-scale morphology of the spray-coated films obtained in practice. On the nanoscale, the structure evolution of the titania films is probed with in situ grazing incidence small-angle X-ray scattering (GISAXS) during the spray process. The changes of the PS domain size depend not only on micellization but also on solvent evaporation during the spray coating. Perovskite (CH₃NH₃PbI₃) solar cells (PSCs) based on sprayed titania film are fabricated, which showcases the suitability of spray-deposited titania films for PSCs.

Influence of block copolymer feature size on reactive ion etching pattern transfer into silicon

A successful realisation of sub-20 nm features on silicon (Si) is becoming the focus of many technological studies, strongly influencing the future performance of modern integrated circuits. Although reactive ion etching (RIE), at both micrometric and nanometric scale has already been the target of many studies, a better understanding of the different mechanisms involved at sub-20 nm size etching is still required. In this work, we investigated the influence of the feature size on the etch rate of Si, performed by a cryogenic RIE process through cylinder-forming polystyrene-block-polymethylmethacrylate (PS-b-PMMA) diblock copolymer (DBC) masks with diameter ranging between 19-13 nm. A sensible decrease of the etch depth and etch rate was observed in the mask with the smallest feature size. For all the DBCs under investigation, we determined the process window useful for the correct transfer of the nanometric cylindrical pattern into a Si substrate. A structural and physicochemical investigation of the resulting nanostructured Si is reported in order to delineate the influence of various RIE pattern effects. Feature-size-dependent etch, or RIE-lag, is proved to significantly affect the obtained results.

Optical Imaging of Large Gyroid Grains in Block Copolymer Templates by Confined Crystallization

Block copolymer (BCP) self-assembly is a promising route to manufacture functional nanomaterials for applications from nanolithography to optical metamaterials. Self-assembled cubic morphologies cannot, however, be conveniently optically characterized in the lab due to their structural isotropy. Here, the aligned crystallization behavior of a semicrystalline-amorphous polyisoprene-b-polystyrene-b-poly(ethylene oxide) (ISO) triblock terpolymer was utilized to visualize the grain structure of the cubic microphase-separated morphology. Upon quenching from a solvent swollen state, ISO first self-assembles into an alternating gyroid morphology, in the confinement of which the PEO crystallizes preferentially along the least tortuous pathways of the single gyroid morphology with grain sizes of hundreds of micrometers. Strikingly, the resulting anisotropic alignment of PEO crystallites gives rise to a unique optical birefringence of the alternating gyroid domains, which allows imaging of the self-assembled grain structure by optical microscopy alone. This study provides insight into polymer crystallization within a tortuous three-dimensional network and establishes a useful method for the optical visualization of cubic BCP morphologies that serve as functional nanomaterial templates.

Healing X-ray scattering images

X-ray scattering images contain numerous gaps and defects arising from detector limitations and experimental configuration. We present a method to heal X-ray scattering images, filling gaps in the data and removing defects in a physically meaningful manner. Unlike generic inpainting methods, this method is closely tuned to the expected structure of reciprocal-space data. In particular, we exploit statistical tests and symmetry analysis to identify the structure of an image; we then copy, average and interpolate measured data into gaps in a way that respects the identified structure and symmetry. Importantly, the underlying analysis methods provide useful characterization of structures present in the image, including the identification of diffuse versus sharp features, anisotropy and symmetry. The presented method leverages known characteristics of reciprocal space, enabling physically reasonable reconstruction even with large image gaps. The method will correspondingly fail for images that violate these underlying assumptions. The method assumes point symmetry and is thus applicable to small-angle X-ray scattering (SAXS) data, but only to a subset of wide-angle data. Our method succeeds in filling gaps and healing defects in experimental images, including extending data beyond the original detector borders.

Thickness-dependence of block copolymer coarsening kinetics

Despite active research, many fundamental aspects of block copolymer ordering remain unresolved. We studied the thickness-dependence of block copolymer grain coarsening kinetics, and find that thinner films order more rapidly than thicker films. Bilayer films, or monolayers with partial layers of islands, order more slowly than monolayers because of the greater amount of material that must rearrange in a coordinated fashion. Sub-monolayer films order much more rapidly than monolayers, exhibiting considerably smaller activation energies, as well as larger exponents for the time-growth power-law. Using molecular dynamics simulations, we directly study the motion of defects in these film regimes. We attribute the enhanced grain growth in sub-monolayers to the film boundaries, where defects can be spontaneously eliminated. The boundaries thus act as efficient sinks for morphological defects, pointing towards methods for engineering rapid ordering of self-assembling thin films.

GISAXS Analysis of the In-Depth Morphology of Thick PS-b-PMMA Films

The morphological evolution of cylinder-forming poly(styrene)-b-poly(methyl methacrylate) block copolymer (BCP) thick films treated at high temperatures in the rapid thermal processing (RTP) machine was monitored by means of in-depth grazing-incidence small-angle X-ray scattering (GISAXS). The use of this nondisruptive technique allowed one to reveal the formation of buried layers composed of both parallel- and perpendicular-oriented cylinders as a function of the film thickness (24 ≤ h ≤ 840 nm) and annealing time (0 ≤ t ≤ 900 s). Three distinct behaviors were observed depending on the film thickness. Up to h ≤ 160 nm, a homogeneous film consisting of perpendicular-oriented cylinders is observed. When h is between 160 and 700 nm, a decoupling process between both the air-BCP and substrate-BCP interfaces takes place, leading to the formation of mixed orientations (parallel and perpendicular) of the cylinders. Finally, for h > 700 nm, the two interfaces are completely decoupled, and the formation of a superficial layer of about 50 nm composed of perpendicular cylinders is observed. Furthermore, the through-film morphology affects the nanodomain long-range order, which substantially decreases in correspondence with the beginning of the decoupling process. When the thick samples are exposed to longer thermal treatments, an increase in the long-range order of the nanodomains occurs, without any sensible variation of the thickness of the superficial layer.

Non-native three-dimensional block copolymer morphologies

Self-assembly is a powerful paradigm, wherein molecules spontaneously form ordered phases exhibiting well-defined nanoscale periodicity and shapes. However, the inherent energy-minimization aspect of self-assembly yields a very limited set of morphologies, such as lamellae or hexagonally packed cylinders. Here, we show how soft self-assembling materials-block copolymer thin films-can be manipulated to form a diverse library of previously unreported morphologies. In this iterative assembly process, each polymer layer acts as both a structural component of the final morphology and a template for directing the order of subsequent layers. Specifically, block copolymer films are immobilized on surfaces, and template successive layers through subtle surface topography. This strategy generates an enormous variety of three-dimensional morphologies that are absent in the native block copolymer phase diagram.

In-depth TEM characterization of block copolymer pattern transfer at germanium surfaces

Dry plasma etching for the pattern transfer of mask features is fundamental to semiconductor processing and the development of device and electrically conducting elements becomes more challenging as features reach the deep nanoscale regime. In this work, high resolution transmission electron microscopy (TEM) coupled with energy dispersive x-ray (EDX) characterization were used to analyze the pattern transfer of graphoepitaxially aligned block copolymer (BCP) features to germanium (Ge) substrates as a function of time. The BCP patterns were converted into metal oxide hardmasks in order to affect good aspect ratios of the transferred features. An unusual interface layer between metal oxide nanowires and the germanium-on-insulator substrate was observed. EDX analysis shows that the origin of this interface layer is a result of the presence of a negative tone e-beam resist material, HSQ (hydrogen silsesquioxane). HSQ was employed as a guiding material to align line-space features of poly(styrene)-block-poly(4-vinylpyridine) (PS-b-P4VP) BCP with 16 nm half-pitch topography. Additionally, the existence of a metal oxide layer (from the initial PS-b-P4VP film) is also shown through ex situ TEM and EDX characterization. Three dimensional modeling of features is also provided giving a unique insight into the arrangement and structure of BCP features prior to and after the pattern transfer process. The results presented in this article highlight the accuracy of high resolution electron microscopy and elemental mapping of BCP generated on-chip etch masks to observe and understand through-film features affecting pattern transfer.

Rapid ordering of block copolymer thin films

Block-copolymers self-assemble into diverse morphologies, where nanoscale order can be finely tuned via block architecture and processing conditions. However, the ultimate usage of these materials in real-world applications may be hampered by the extremely long thermal annealing times-hours or days-required to achieve good order. Here, we provide an overview of the fundamentals of block-copolymer self-assembly kinetics, and review the techniques that have been demonstrated to influence, and enhance, these ordering kinetics. We discuss the inherent tradeoffs between oven annealing, solvent annealing, microwave annealing, zone annealing, and other directed self-assembly methods; including an assessment of spatial and temporal characteristics. We also review both real-space and reciprocal-space analysis techniques for quantifying order in these systems.