1
|
Wani SS, Hsu CC, Kuo YZ, Darshana Kumara Kimbulapitiya KM, Chung CC, Cyu RH, Chen CT, Liu MJ, Chaudhary M, Chiu PW, Zhong YL, Chueh YL. Enhanced Electrical Transport Properties of Molybdenum Disulfide Field-Effect Transistors by Using Alkali Metal Fluorides as Dielectric Capping Layers. ACS NANO 2024; 18:10776-10787. [PMID: 38587200 PMCID: PMC11044573 DOI: 10.1021/acsnano.3c11025] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/07/2023] [Revised: 02/23/2024] [Accepted: 03/01/2024] [Indexed: 04/09/2024]
Abstract
The electronic properties of 2D materials are highly influenced by the molecular activity at their interfaces. A method was proposed to address this issue by employing passivation techniques using monolayer MoS2 field-effect transistors (FETs) while preserving high performance. Herein, we have used alkali metal fluorides as dielectric capping layers, including lithium fluoride (LiF), sodium fluoride (NaF), and potassium fluoride (KF) dielectric capping layers, to mitigate the environmental impact of oxygen and water exposure. Among them, the LiF dielectric capping layer significantly improved the transistor performance, specifically in terms of enhanced field effect mobility from 74 to 137 cm2/V·s, increased current density from 17 μA/μm to 32.13 μA/μm at a drain voltage of Vd of 1 V, and decreased subthreshold swing to 0.8 V/dec The results have been analytically verified by X-ray photoelectron spectroscopy (XPS) and Raman, and photoluminescence (PL) spectroscopy, and the demonstrated technique can be extended to other transition metal dichalcogenide (TMD)-based FETs, which can become a prospect for cutting-edge electronic applications. These findings highlight certain important trade-offs and provide insight into the significance of interface control and passivation material choice on the electrical stability, performance, and enhancement of the MoS2 FET.
Collapse
Affiliation(s)
- Sumayah-Shakil Wani
- Department
of Materials Science and Engineering, National
Tsing-Hua University, Hsinchu, 30013, Taiwan
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Department
of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Chen Chieh Hsu
- Department
of Physics and Quantum Information Center, Chung Yuan Christian University, Taoyuan, 32034, Taiwan
| | - Yao-Zen Kuo
- Department
of Materials Science and Engineering, National
Tsing-Hua University, Hsinchu, 30013, Taiwan
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Department
of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Kimbulapitiya Mudiyanselage
Madhusanka Darshana Kumara Kimbulapitiya
- Department
of Materials Science and Engineering, National
Tsing-Hua University, Hsinchu, 30013, Taiwan
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Department
of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Chia-Chen Chung
- Department
of Materials Science and Engineering, National
Tsing-Hua University, Hsinchu, 30013, Taiwan
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Department
of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Ruei-Hong Cyu
- Department
of Materials Science and Engineering, National
Tsing-Hua University, Hsinchu, 30013, Taiwan
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Department
of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Chieh-Ting Chen
- Department
of Materials Science and Engineering, National
Tsing-Hua University, Hsinchu, 30013, Taiwan
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Department
of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Ming-Jin Liu
- Department
of Materials Science and Engineering, National
Tsing-Hua University, Hsinchu, 30013, Taiwan
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Department
of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Mayur Chaudhary
- Department
of Materials Science and Engineering, National
Tsing-Hua University, Hsinchu, 30013, Taiwan
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Department
of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
| | - Po-Wen Chiu
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Institute
of Electronics Engineering, National Tsing
Hua University, Hsinchu, 30013, Taiwan
| | - Yuan-Liang Zhong
- Department
of Physics and Quantum Information Center, Chung Yuan Christian University, Taoyuan, 32034, Taiwan
| | - Yu-Lun Chueh
- Department
of Materials Science and Engineering, National
Tsing-Hua University, Hsinchu, 30013, Taiwan
- College
of Semiconductor Research, National Tsing-Hua
University, Hsinchu, 30013, Taiwan
- Department
of Physics, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan
- Department
of Materials Science and Engineering, Korea
University, Seoul 02841, Republic of Korea
| |
Collapse
|
2
|
Wang H, Zhang J, Su G, Lu J, Wan Y, Yu X, Yang P. The growth mechanism of PtS2 single crystal. J Chem Phys 2024; 160:134703. [PMID: 38577980 DOI: 10.1063/5.0201654] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/31/2024] [Accepted: 03/14/2024] [Indexed: 04/06/2024] Open
Abstract
PtS2, a member of the group 10 transition metal dichalcogenides (TMDs), has received extensive attention because of its excellent electrical properties and air stability. However, there are few reports on the preparation of single-crystal PtS2 in the literature, and the growth mechanism of single crystal PtS2 is not well elucidated. In this work, we proposed a method of preparation that combines magnetron sputtering and chemical vapor transport to obtain monocrystalline PtS2 on a SiO2/Si substrate. By controlling the growth temperature and time, we have synthesized a single crystalline PtS2 of hexagonal shape and size of 1-2 μm on a silicon substrate. Combining the molecular dynamics simulation, the growth mechanism of single crystal PtS2 was investigated both experimentally and theoretically. The synthesis method has a short production cycle and low cost, which opens the door for the fabrication of other TMDs single crystals.
Collapse
Affiliation(s)
- Huachao Wang
- National Center for International Research on Photoelectric and Energy Materials, Yunnan Key Laboratory for Micro/Nano Materials and Technology, School of Materials and Energy, Yunnan University, Kunming 650091, People's Republic of China
| | - Jisheng Zhang
- National Center for International Research on Photoelectric and Energy Materials, Yunnan Key Laboratory for Micro/Nano Materials and Technology, School of Materials and Energy, Yunnan University, Kunming 650091, People's Republic of China
| | - Guowen Su
- National Center for International Research on Photoelectric and Energy Materials, Yunnan Key Laboratory for Micro/Nano Materials and Technology, School of Materials and Energy, Yunnan University, Kunming 650091, People's Republic of China
| | - Jiangwei Lu
- Kunming Institute of Physics, Kunming 650223, People's Republic of China
| | - Yanfen Wan
- National Center for International Research on Photoelectric and Energy Materials, Yunnan Key Laboratory for Micro/Nano Materials and Technology, School of Materials and Energy, Yunnan University, Kunming 650091, People's Republic of China
| | - Xiaohua Yu
- Faculty of Materials Science and Engineering, Kunming University of Science and Technology, Kunming 650093, People's Republic of China
| | - Peng Yang
- National Center for International Research on Photoelectric and Energy Materials, Yunnan Key Laboratory for Micro/Nano Materials and Technology, School of Materials and Energy, Yunnan University, Kunming 650091, People's Republic of China
| |
Collapse
|
3
|
Wu Y, Xin Z, Zhang Z, Wang B, Peng R, Wang E, Shi R, Liu Y, Guo J, Liu K, Liu K. All-Transfer Electrode Interface Engineering Toward Harsh-Environment-Resistant MoS 2 Field-Effect Transistors. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2210735. [PMID: 36652589 DOI: 10.1002/adma.202210735] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/18/2022] [Revised: 01/08/2023] [Indexed: 05/05/2023]
Abstract
Nanoscale electronic devices that can work in harsh environments are in high demand for wearable, automotive, and aerospace electronics. Clean and defect-free interfaces are of vital importance for building nanoscale harsh-environment-resistant devices. However, current nanoscale devices are subject to failure in these environments, especially at defective electrode-channel interfaces. Here, harsh-environment-resistant MoS2 transistors are developed by engineering electrode-channel interfaces with an all-transfer of van der Waals electrodes. The delivered defect-free, graphene-buffered electrodes keep the electrode-channel interfaces intact and robust. As a result, the as-fabricated MoS2 devices have reduced Schottky barrier heights, leading to a very large on-state current and high carrier mobility. More importantly, the defect-free, hydrophobic graphene buffer layer prevents metal diffusion from the electrodes to MoS2 and the intercalation of water molecules at the electrode-MoS2 interfaces. This enables high resistances of MoS2 devices with all-transfer electrodes to various harsh environments, including humid, oxidizing, and high-temperature environments, surpassing the devices with other kinds of electrodes. The work deepens the understanding of the roles of electrode-channel interfaces in nanoscale devices and provides a promising interface engineering strategy to build nanoscale harsh-environment-resistant devices.
Collapse
Affiliation(s)
- Yonghuang Wu
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China
| | - Zeqin Xin
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China
| | - Zhibin Zhang
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871, China
| | - Bolun Wang
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China
| | - Ruixuan Peng
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China
| | - Enze Wang
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China
| | - Run Shi
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China
| | - Yiqun Liu
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China
| | - Jing Guo
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China
| | - Kaihui Liu
- State Key Laboratory for Mesoscopic Physics, Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing, 100871, China
| | - Kai Liu
- State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China
| |
Collapse
|
4
|
Yan X, Qian JH, Sangwan VK, Hersam MC. Progress and Challenges for Memtransistors in Neuromorphic Circuits and Systems. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2022; 34:e2108025. [PMID: 34813677 DOI: 10.1002/adma.202108025] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/07/2021] [Revised: 11/07/2021] [Indexed: 06/13/2023]
Abstract
Due to the increasing importance of artificial intelligence (AI), significant recent effort has been devoted to the development of neuromorphic circuits that seek to emulate the energy-efficient information processing of the brain. While non-volatile memory (NVM) based on resistive switches, phase-change memory, and magnetic tunnel junctions has shown potential for implementing neural networks, additional multi-terminal device concepts are required for more sophisticated bio-realistic functions. Of particular interest are memtransistors based on low-dimensional nanomaterials, which are capable of electrostatically tuning memory and learning behavior at the device level. Herein, a conceptual overview of the memtransistor is provided in the context of neuromorphic circuits. Recent progress is surveyed for memtransistors and related multi-terminal NVM devices including dual-gated floating-gate memories, dual-gated ferroelectric transistors, and dual-gated van der Waals heterojunctions. The different materials systems and device architectures are classified based on the degree of control and relative tunability of synaptic behavior, with an emphasis on device concepts that harness the reduced dimensionality, weak electrostatic screening, and phase-changes properties of nanomaterials. Finally, strategies for achieving wafer-scale integration of memtransistors and multi-terminal NVM devices are delineated, with specific attention given to the materials challenges for practical neuromorphic circuits.
Collapse
Affiliation(s)
- Xiaodong Yan
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA
| | - Justin H Qian
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA
| | - Vinod K Sangwan
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA
| | - Mark C Hersam
- Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA
- Department of Electrical and Computer Engineering, Northwestern University, Evanston, IL, 60208, USA
- Department of Chemistry, Northwestern University, Evanston, IL, 60208, USA
| |
Collapse
|
5
|
Waltl M, Knobloch T, Tselios K, Filipovic L, Stampfer B, Hernandez Y, Waldhör D, Illarionov Y, Kaczer B, Grasser T. Perspective of 2D Integrated Electronic Circuits: Scientific Pipe Dream or Disruptive Technology? ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2022; 34:e2201082. [PMID: 35318749 DOI: 10.1002/adma.202201082] [Citation(s) in RCA: 11] [Impact Index Per Article: 5.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/01/2022] [Revised: 03/14/2022] [Indexed: 06/14/2023]
Abstract
Within the last decade, considerable efforts have been devoted to fabricating transistors utilizing 2D semiconductors. Also, small circuits consisting of a few transistors have been demonstrated, including inverters, ring oscillators, and static random access memory cells. However, for industrial applications, both time-zero and time-dependent variability in the performance of the transistors appear critical. While time-zero variability is primarily related to immature processing, time-dependent drifts are dominated by charge trapping at defects located at the channel/insulator interface and in the insulator itself, which can substantially degrade the stability of circuits. At the current state of the art, 2D transistors typically exhibit a few orders of magnitude higher trap densities than silicon devices, which considerably increases their time-dependent variability, resulting in stability and yield issues. Here, the stability of currently available 2D electronics is carefully evaluated using circuit simulations to determine the impact of transistor-related issues on the overall circuit performance. The results suggest that while the performance parameters of transistors based on certain material combinations are already getting close to being competitive with Si technologies, a reduction in variability and defect densities is required. Overall, the criteria for parameter variability serve as guidance for evaluating the future development of 2D technologies.
Collapse
Affiliation(s)
- Michael Waltl
- Christian Doppler Laboratory for Single-Defect Spectroscopy at the Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria
| | - Theresia Knobloch
- Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria
| | - Konstantinos Tselios
- Christian Doppler Laboratory for Single-Defect Spectroscopy at the Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria
| | - Lado Filipovic
- Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria
| | - Bernhard Stampfer
- Christian Doppler Laboratory for Single-Defect Spectroscopy at the Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria
| | - Yoanlys Hernandez
- Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria
| | - Dominic Waldhör
- Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria
| | - Yury Illarionov
- Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria
- Ioffe Institute, Polytechnicheskaya 26, St-Petersburg, 194021, Russia
| | - Ben Kaczer
- imec, Kapeldreef 75, Leuven, 3001, Belgium
| | - Tibor Grasser
- Institute for Microelectronics, TU Wien, Gusshausstrasse 27-29, Vienna, 1040, Austria
| |
Collapse
|
6
|
Albarghouthi FM, Williams NX, Doherty JL, Lu S, Franklin AD. Passivation Strategies for Enhancing Solution-Gated Carbon Nanotube Field-Effect Transistor Biosensing Performance and Stability in Ionic Solutions. ACS APPLIED NANO MATERIALS 2022; 5:15865-15874. [PMID: 36815139 PMCID: PMC9943062 DOI: 10.1021/acsanm.2c04098] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Interest in point-of-care diagnostics has led to increasing demand for the development of nanomaterial-based electronic biosensors such as biosensor field-effect transistors (BioFETs) due to their inherent simplicity, sensitivity, and scalability. The utility of BioFETs, which use electrical transduction to detect biological signals, is directly dependent upon their electrical stability in detection-relevant environments. BioFET device structures vary substantially, especially in electrode passivation modalities. Improper passivation of electronic components in ionic solutions can lead to excessive leakage currents and signal drift, thus presenting a hinderance to signal detectability. Here, we harness the sensitivity of nanomaterials to study the effects of various passivation strategies on the performance and stability of a transistor-based biosensing platform based on aerosol-jet-printed carbon nanotube thin-film transistors. Specifically, non-passivated devices were compared to devices passivated with photoresist (SU-8), dielectric (HfO2), or photoresist + dielectric (SU-8 followed by HfO2) and were evaluated primarily by initial performance metrics, large-scale device yield, and stability throughout long-duration cycling in phosphate buffered saline. We find that all three passivation conditions result in improved device performance compared to non-passivated devices, with the photoresist + dielectric strategy providing the lowest average leakage current in solution (~2 nA). Notably, the photoresist + dielectric strategy also results in the greatest yield of BioFET devices meeting our selected performance criteria on a wafer scale (~90%), the highest long-term stability in solution (<0.01% change in on-current), and the best average on/off-current ratio (~104), hysteresis (~32 mV), and subthreshold swing (~192 mV/decade). This passivation schema has the potential to pave the path toward a truly high-yield, stable, and robust electrical biosensing platform.
Collapse
Affiliation(s)
- Faris M. Albarghouthi
- Department of Electrical & Computer Engineering, Duke University, Durham, North Carolina 27708, United States
| | - Nicholas X. Williams
- Department of Electrical & Computer Engineering, Duke University, Durham, North Carolina 27708, United States
| | - James L. Doherty
- Department of Electrical & Computer Engineering, Duke University, Durham, North Carolina 27708, United States
| | - Shiheng Lu
- Department of Electrical & Computer Engineering, Duke University, Durham, North Carolina 27708, United States
| | - Aaron D. Franklin
- Department of Electrical & Computer Engineering, Duke University, Durham, North Carolina 27708, United States
- Department of Chemistry, Duke University, Durham, North Carolina 27708, United States
| |
Collapse
|
7
|
Lee DH, Dongquoc V, Hong S, Kim SI, Kim E, Cho SY, Oh CH, Je Y, Kwon MJ, Hoang Vo A, Seo DB, Lee JH, Kim S, Kim ET, Park JH. Surface Passivation of Layered MoSe 2 via van der Waals Stacking of Amorphous Hydrocarbon. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2022; 18:e2202912. [PMID: 36058645 DOI: 10.1002/smll.202202912] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/16/2022] [Revised: 06/22/2022] [Indexed: 06/15/2023]
Abstract
Development of efficient surface passivation methods for semiconductor devices is crucial to counter the degradation in their electrical performance owing to scattering or trapping of carriers in the channels induced by molecular adsorption from the ambient environment. However, conventional dielectric deposition involves the formation of additional interfacial defects associated with broken covalent bonds, resulting in accidental electrostatic doping or enhanced hysteretic behavior. In this study, centimeter-scaled van der Waals passivation of transition metal dichalcogenides (TMDCs) is demonstrated by stacking hydrocarbon (HC) dielectrics onto MoSe2 field-effect transistors (FETs), thereby enhancing the electric performance and stability of the device, accompanied with the suppression of chemical disorder at the HC/TMDCs interface. The stacking of HC onto MoSe2 FETs enhances the carrier mobility of MoSe2 FET by over 50% at the n-branch, and a significant decrease in hysteresis, owing to the screening of molecular adsorption. The electron mobility and hysteresis of the HC/MoSe2 FETs are verified to be nearly intact compared to those of the fabricated HC/MoSe2 FETs after exposure to ambient environment for 3 months. Consequently, the proposed design can act as a model for developing advanced nanoelectronics applications based on layered materials for mass production.
Collapse
Affiliation(s)
- Do-Hyeon Lee
- Department of Materials Engineering and Convergence Technology, Gyeongsang National University, Jinju, Gyeongsangnam-do, 52828, Republic of Korea
| | - Viet Dongquoc
- Department of Materials Science and Engineering, Chungnam National University, Daejeon, 34134, Republic of Korea
| | - Seongin Hong
- Department of Physics, Gachon University, 1342 Seongnamdaero, Sujeong-gu, Seongnam-si, Gyeonggi-do, 13120, South Korea
| | - Seung-Il Kim
- Department of Materials Science and Engineering & Department of Energy Systems Research, Ajou University, Suwon, Gyeonggi-do, 16499, Republic of Korea
| | - Eunjeong Kim
- Materials Science Division, Lawrence Livermore National Laboratory, Livermore, CA, 94550, USA
| | - Su-Yeon Cho
- School of Materials Science and Engineering, Gyeongsang National University, Jinju, Gyeongsangnam-do, 52828, Republic of Korea
| | - Chang-Hwan Oh
- Department of Materials Engineering and Convergence Technology, Gyeongsang National University, Jinju, Gyeongsangnam-do, 52828, Republic of Korea
| | - Yeonjin Je
- School of Materials Science and Engineering, Gyeongsang National University, Jinju, Gyeongsangnam-do, 52828, Republic of Korea
| | - Mi Ji Kwon
- School of Materials Science and Engineering, Gyeongsang National University, Jinju, Gyeongsangnam-do, 52828, Republic of Korea
| | - Anh Hoang Vo
- Department of Materials Science and Engineering, Chungnam National University, Daejeon, 34134, Republic of Korea
| | - Dong-Bum Seo
- Department of Materials Science and Engineering, Chungnam National University, Daejeon, 34134, Republic of Korea
| | - Jae Hyun Lee
- Department of Materials Science and Engineering & Department of Energy Systems Research, Ajou University, Suwon, Gyeonggi-do, 16499, Republic of Korea
| | - Sunkook Kim
- School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon, Gyeonggi-do, 440-745, Republic of Korea
| | - Eui-Tae Kim
- Department of Materials Science and Engineering, Chungnam National University, Daejeon, 34134, Republic of Korea
| | - Jun Hong Park
- Department of Materials Engineering and Convergence Technology, Gyeongsang National University, Jinju, Gyeongsangnam-do, 52828, Republic of Korea
- School of Materials Science and Engineering, Gyeongsang National University, Jinju, Gyeongsangnam-do, 52828, Republic of Korea
| |
Collapse
|
8
|
Huang W, Zhang Y, Song M, Wang B, Hou H, Hu X, Chen X, Zhai T. Encapsulation strategies on 2D materials for field effect transistors and photodetectors. CHINESE CHEM LETT 2022. [DOI: 10.1016/j.cclet.2021.08.086] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/28/2022]
|
9
|
Cheng Z, Zhang H, Le ST, Abuzaid H, Li G, Cao L, Davydov AV, Franklin AD, Richter CA. Are 2D Interfaces Really Flat? ACS NANO 2022; 16:5316-5324. [PMID: 35290014 DOI: 10.1021/acsnano.1c11493] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Two-dimensional (2D) van der Waals materials are subject to mechanical deformation and thus forming bubbles and wrinkles during exfoliation and transfer. A lack of interfacial "flatness" has implications for interface properties, such as those formed by metal contacts or insulating layers. Therefore, an understanding of the detailed properties of 2D interfaces, especially their flatness under different conditions, is of high importance. Here we use cross-sectional scanning transmission electron microscopy (STEM) to investigate various 2D interfaces (2D-2D and 3D-2D) under the effects of stacking, atomic layer deposition (ALD), and metallization. We characterize and compare the flatness of the hBN-2D and metal-2D interfaces down to angstrom resolution. It is observed that the dry transfer of hexagonal boron nitride (hBN) can dramatically alter the interface structure. When characterizing 3D metal-2D interfaces, we find that Ni-MoS2 interfaces are more uneven and have larger nanocavities compared to other metal-2D interfaces. The electrical characteristics of a MoS2-based field-effect transistor are correlated to the interfacial transformation in the contact and channel regions. The device transconductance is improved by 40% after the hBN encapsulation, likely due to the interface interactions at both the channel and contacts. Overall, these observations reveal the intricacy of 2D interfaces and their dependence on the fabrication processes.
Collapse
Affiliation(s)
- Zhihui Cheng
- Nanoscale Device Characterization Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
- Department of Electrical & Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States
| | - Huairuo Zhang
- Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
- Theiss Research, La Jolla, California 92037, United States
| | - Son T Le
- Nanoscale Device Characterization Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
- Theiss Research, La Jolla, California 92037, United States
| | - Hattan Abuzaid
- Department of Electrical & Computer Engineering, Duke University, Durham, North Carolina 27708, United States
| | - Guoqing Li
- Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695, United States
| | - Linyou Cao
- Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695, United States
| | - Albert V Davydov
- Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
| | - Aaron D Franklin
- Department of Electrical & Computer Engineering, Duke University, Durham, North Carolina 27708, United States
- Department of Chemistry, Duke University, Durham, North Carolina 27708, United States
| | - Curt A Richter
- Nanoscale Device Characterization Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States
| |
Collapse
|
10
|
Wang Z, Zeng P, Hu S, Wu X, He J, Wu Z, Wang W, Zheng P, Zheng H, Zheng L, Huo D, Zhang Y. Broadband photodetector based on ReS 2/graphene/WSe 2heterostructure. NANOTECHNOLOGY 2021; 32:465201. [PMID: 34359053 DOI: 10.1088/1361-6528/ac1b53] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/09/2021] [Accepted: 08/06/2021] [Indexed: 06/13/2023]
Abstract
Two-dimensional van der Waals heterostructures can combine properties of individual materials to enable high-performance photodetection. Here, a novel ReS2/graphene/WSe2heterostructure, prepared by dry transfer, demonstrates air-stable, high-performance, polarization-sensitive, and broadband photodetection. Dark current can be strongly suppressed by the built-in electric field of the heterostructure. The specific detectivities are up to 1010Jones and 109Jones under zero and reverse bias, respectively. Response time is on the order of a millisecond. The polarization-sensitive photodetection has been observed in the heterostructure due to the low lattice symmetry of ReS2. Broadband photoresponse from visible to infrared range has been demonstrated. A high photoresponsivity of 1.02 A W-1is achieved for illumination at the wavelength of 785 nm. This work provides a viable approach toward future high-performance, air-stable, and polarization-sensitive broadband photodetectors.
Collapse
Affiliation(s)
- Zengda Wang
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Peiyu Zeng
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Shuojie Hu
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Xiaomei Wu
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Jiaoyan He
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Zhangting Wu
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Wenhui Wang
- School of Physics, Southeast University, Nanjing 211189, People's Republic of China
| | - Peng Zheng
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Hui Zheng
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Liang Zheng
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Dexuan Huo
- Institute of Materials Physics, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| | - Yang Zhang
- Lab for Nanoelectronics and NanoDevices, Department of Electronics Science and Technology, Hangzhou Dianzi University, Hangzhou 310018, People's Republic of China
| |
Collapse
|
11
|
Noyce SG, Doherty JL, Zauscher S, Franklin AD. Understanding and Mapping Sensitivity in MoS 2 Field-Effect-Transistor-Based Sensors. ACS NANO 2020; 14:11637-11647. [PMID: 32790325 PMCID: PMC7895328 DOI: 10.1021/acsnano.0c04192] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Sensors based on two-dimensional (2D) field-effect transistors (FETs) are extremely sensitive and can detect charged analytes with attomolar limits of detection (LOD). Despite some impressive LODs, the operating mechanisms and factors that determine the signal-to-noise ratio in 2D FET-based sensors remain poorly understood. These uncertainties, coupled with an expansive design space for sensor layout and analyte positioning, result in a field with many reported highlights but limited collective progress. Here, we provide insight into sensing mechanisms of 2D molybdenum disulfide (MoS2) FETs by realizing precise control over the position and charge of an analyte using a customized atomic force microscope (AFM), with the AFM tip acting as an analyte. The sensitivity of the MoS2 FET channel is revealed to be nonuniform, manifesting sensitive hotspots with locations that are stable over time. When the charge of the analyte is varied, an asymmetry is observed in the device drain-current response, with analytes acting to turn the device off leading to a 2.5× increase in the signal-to-noise ratio (SNR). We developed a numerical model, applicable to all FET-based charge-detection sensors, that confirms our experimental observation and suggests an underlying mechanism. Further, extensive characterization of a set of different MoS2 FETs under various analyte conditions, coupled with the numerical model, led to the identification of three distinct SNRs that peak with dependence on the layout and operating conditions used for a sensor. These findings reveal the important role of analyte position and coverage in determining the optimal operating bias conditions for maximal sensitivity in 2D FET-based sensors, which provides key insights for future sensor design and control.
Collapse
Affiliation(s)
- Steven G. Noyce
- Duke University, Department of Electrical & Computer Engineering, Durham, North Carolina 27708, USA
| | - James L. Doherty
- Duke University, Department of Electrical & Computer Engineering, Durham, North Carolina 27708, USA
| | - Stefan Zauscher
- Duke University, Department of Mechanical Engineering and Materials Science, Durham, North Carolina, 27708, USA
| | - Aaron D. Franklin
- Duke University, Department of Electrical & Computer Engineering, Durham, North Carolina 27708, USA
- Duke University, Department of Chemistry, Durham, North Carolina 27708, USA
| |
Collapse
|