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Chen C, Wang Q, Zhang Z, Liu Z, Xu C, Ren W. Facile Growth of h-BN Films by Using Surface-Activated h-BN Powders as Precursors. SMALL METHODS 2025; 9:e2401422. [PMID: 39950512 DOI: 10.1002/smtd.202401422] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/02/2024] [Revised: 12/03/2024] [Indexed: 04/25/2025]
Abstract
Atomically thick hexagonal boron nitride (h-BN) films have gained increasing interest, such as nanoelectronics and protection coatings. Chemical vapor deposition (CVD) has been proven to be an efficient method for synthesizing h-BN thin films, but its precursors are still limited. Here, it is reported that a novel and easily available precursor, surface-activated h-BN (As-hBN), with NH3/N2 as an additional nitrogen source is used for CVD growth of monolayer h-BN films on the Cu foils. The as-grown h-BN films can significantly enhance the anti-oxidation ability of copper. Molecular dynamics simulations reveal that the reactivity of the As-hBN precursors is attributed to the decomposition of unstable BO3 and O-terminal edges on the surface under H2 atmosphere. This method provides a more reliable approach for fabricating h-BN films.
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Affiliation(s)
- Chen Chen
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, P. R. China
- School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, P. R. China
| | - Qiang Wang
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, P. R. China
- School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, P. R. China
| | - Zongyuan Zhang
- Center of High Magnetic Fields and Free Electron Lasers, Information Materials and Intelligent Sensing Laboratory of Anhui Province, Institutes of Physical Science and Information Technology, Anhui University, Hefei, 230601, P. R. China
| | - Zhibo Liu
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, P. R. China
- School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, P. R. China
| | - Chuan Xu
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, P. R. China
- School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, P. R. China
| | - Wencai Ren
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, P. R. China
- School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, P. R. China
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2
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Peng Y, Liu L, Xu Q, Luo Y, Bai J, Xie X, Wei H, Wei W, Xiao K, Sun W. Improvement of GaN-Based Device Performance by Plasma-Enhanced Chemical Vapor Deposition (PECVD) Directly Preparing h-BN with Excellent Thermal Management Characteristics. Molecules 2025; 30:1307. [PMID: 40142082 PMCID: PMC11944708 DOI: 10.3390/molecules30061307] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/16/2024] [Revised: 03/09/2025] [Accepted: 03/11/2025] [Indexed: 03/28/2025] Open
Abstract
As the demand for high voltage levels and fast charging rates in the electric power industry increases, the third-generation semiconductor materials typified by GaN with a wide bandgap and high electron mobility have become a central material in technological development. Nonetheless, thermal management challenges have persistently been a critical barrier to the extensive adoption of gallium-nitride-based devices. The integration of two-dimensional materials into GaN-based applications stands out as a significant strategy for tackling heat-dissipation problems. However, the direct preparation of two-dimensional materials on gallium nitride is rather challenging. In this study, high-quality h-BN was prepared directly on GaN films using plasma-enhanced chemical vapor deposition, which revealed that the introduction of appropriately sized active sites is key to the growth of h-BN. Owing to the high in-plane thermal conductivity of h-BN, the thermal conductivity of the sample has been enhanced from 218 W·m-1 K-1 to 743 W·m-1 K-1. Ultraviolet photodetectors were constructed based on the obtained h-BN/GaN heterostructure and maintained excellent detection performance under high-temperature conditions, with detectivity and responsivity at 200 °C of 2.26 × 1013 Jones and 1712.4 mA/W, respectively. This study presents innovative concepts and provides a foundation for improving the heat-dissipation capabilities of GaN-based devices, thereby promoting their broader application.
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Affiliation(s)
- Yi Peng
- Research Center for Optoelectronic Materials and Devices, School of Physical Science & Technology, Guangxi University, Nanning 530004, China; (W.W.); (K.X.)
- College of Electric Power Engineering, Guangxi Vocational College of Water Resources and Electric Power, Nanning 530023, China; (L.L.); (Q.X.); (Y.L.); (J.B.); (X.X.); (H.W.)
| | - Lingyun Liu
- College of Electric Power Engineering, Guangxi Vocational College of Water Resources and Electric Power, Nanning 530023, China; (L.L.); (Q.X.); (Y.L.); (J.B.); (X.X.); (H.W.)
| | - Qingfeng Xu
- College of Electric Power Engineering, Guangxi Vocational College of Water Resources and Electric Power, Nanning 530023, China; (L.L.); (Q.X.); (Y.L.); (J.B.); (X.X.); (H.W.)
| | - Yuqiang Luo
- College of Electric Power Engineering, Guangxi Vocational College of Water Resources and Electric Power, Nanning 530023, China; (L.L.); (Q.X.); (Y.L.); (J.B.); (X.X.); (H.W.)
| | - Jianzhi Bai
- College of Electric Power Engineering, Guangxi Vocational College of Water Resources and Electric Power, Nanning 530023, China; (L.L.); (Q.X.); (Y.L.); (J.B.); (X.X.); (H.W.)
| | - Xifeng Xie
- College of Electric Power Engineering, Guangxi Vocational College of Water Resources and Electric Power, Nanning 530023, China; (L.L.); (Q.X.); (Y.L.); (J.B.); (X.X.); (H.W.)
| | - Huanbing Wei
- College of Electric Power Engineering, Guangxi Vocational College of Water Resources and Electric Power, Nanning 530023, China; (L.L.); (Q.X.); (Y.L.); (J.B.); (X.X.); (H.W.)
| | - Wenwang Wei
- Research Center for Optoelectronic Materials and Devices, School of Physical Science & Technology, Guangxi University, Nanning 530004, China; (W.W.); (K.X.)
- Guangxi Key Laboratory of Calcium Carbonate Resources Comprehensive Utilization, College of Materials and Chemical Engineering, Hezhou University, Hezhou 542899, China
| | - Kai Xiao
- Research Center for Optoelectronic Materials and Devices, School of Physical Science & Technology, Guangxi University, Nanning 530004, China; (W.W.); (K.X.)
- School of Chemistry and Chemical Engineering, Sichuan Institute of Arts and Science, Dazhou 635000, China
| | - Wenhong Sun
- Research Center for Optoelectronic Materials and Devices, School of Physical Science & Technology, Guangxi University, Nanning 530004, China; (W.W.); (K.X.)
- State Key Laboratory of Featured Metal Materials and Life-Cycle Safety for Composite Structures, Guangxi University, Nanning 530004, China
- Third Generation Semiconductor Industry Research Institute, Guangxi University, Nanning 530004, China
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Wang G, Huang J, Zhang S, Meng J, Chen J, Shi Y, Jiang J, Li J, Cheng Y, Zeng L, Yin Z, Zhang X. Wafer-Scale Single Crystal Hexagonal Boron Nitride Layers Grown by Submicron-Spacing Vapor Deposition. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2023; 19:e2301086. [PMID: 36919923 DOI: 10.1002/smll.202301086] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/07/2023] [Revised: 02/21/2023] [Indexed: 06/15/2023]
Abstract
The direct growth of wafer-scale single crystal two-dimensional (2D) hexagonal boron nitride (h-BN) layer with a controllable thickness is highly desirable for 2D-material-based device applications. Here, for the first time, a facile submicron-spacing vapor deposition (SSVD) method is reported to achieve 2-inch single crystal h-BN layers with controllable thickness from monolayer to tens of nanometers on the dielectric sapphire substrates using a boron film as the solid source. In the SSVD growth, the boron film is fully covered by the same-sized sapphire substrate with a submicron spacing, leading to an efficient vapor diffusion transport. The epitaxial h-BN layer exhibits extremely high crystalline quality, as demonstrated by both a sharp Raman E2g vibration mode (12 cm-1 ) and a narrow X-ray rocking curve (0.10°). Furthermore, a deep ultraviolet photodetector and a ZrS2 /h-BN heterostructure fabricated from the h-BN layer demonstrate its fascinating properties and potential applications. This facile method to synthesize wafer-scale single crystal h-BN layers with controllable thickness paves the way to future 2D semiconductor-based electronics and optoelectronics.
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Affiliation(s)
- Gaokai Wang
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Jidong Huang
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Siyu Zhang
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Junhua Meng
- Faculty of Science, Beijing University of Technology, Beijing, 100124, P. R. China
| | - Jingren Chen
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Yiming Shi
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
- Faculty of Science, Beijing University of Technology, Beijing, 100124, P. R. China
| | - Ji Jiang
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Jingzhen Li
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Yong Cheng
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Libin Zeng
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Zhigang Yin
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Xingwang Zhang
- Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
- Joint Lab of Digital Optical Chip, Wuyi University, Jiangmen, 529020, P. R. China
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4
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Moon S, Kim J, Park J, Im S, Kim J, Hwang I, Kim JK. Hexagonal Boron Nitride for Next-Generation Photonics and Electronics. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2204161. [PMID: 35735090 DOI: 10.1002/adma.202204161] [Citation(s) in RCA: 22] [Impact Index Per Article: 11.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/09/2022] [Revised: 06/14/2022] [Indexed: 06/15/2023]
Abstract
Hexagonal boron nitride (h-BN), an insulating 2D layered material, has recently attracted tremendous interest motivated by the extraordinary properties it shows across the fields of optoelectronics, quantum optics, and electronics, being exotic material platforms for various applications. At an early stage of h-BN research, it is explored as an ideal substrate and insulating layers for other 2D materials due to its atomically flat surface that is free of dangling bonds and charged impurities, and its high thermal conductivity. Recent discoveries of structural and optical properties of h-BN have expanded potential applications into emerging electronics and photonics fields. h-BN shows a very efficient deep-ultraviolet band-edge emission despite its indirect-bandgap nature, as well as stable room-temperature single-photon emission over a wide wavelength range, showing a great potential for next-generation photonics. In addition, h-BN is extensively being adopted as active media for low-energy electronics, including nonvolatile resistive switching memory, radio-frequency devices, and low-dielectric-constant materials for next-generation electronics.
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Affiliation(s)
- Seokho Moon
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, Pohang, 37673, Republic of Korea
| | - Jiye Kim
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, Pohang, 37673, Republic of Korea
| | - Jeonghyeon Park
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, Pohang, 37673, Republic of Korea
| | - Semi Im
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, Pohang, 37673, Republic of Korea
| | - Jawon Kim
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, Pohang, 37673, Republic of Korea
| | - Inyong Hwang
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, Pohang, 37673, Republic of Korea
| | - Jong Kyu Kim
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-ro, Nam-gu, Pohang, 37673, Republic of Korea
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5
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Sunny A, Balapure A, Ganesan R, Thamankar R. Room-Temperature Deep-UV Photoluminescence from Low-Dimensional Hexagonal Boron Nitride Prepared Using a Facile Synthesis. ACS OMEGA 2022; 7:33926-33933. [PMID: 36188247 PMCID: PMC9520545 DOI: 10.1021/acsomega.2c02884] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/09/2022] [Accepted: 09/06/2022] [Indexed: 06/16/2023]
Abstract
Identification and evaluation of defect levels in low-dimensional materials is an important aspect in quantum science. In this article, we report a facile synthesis method of low-dimensional hexagonal boron nitride (h-BN) and study light emission characteristics due to the defects. The thermal annealing procedure is optimized to obtain clean multilayered h-BN as revealed by transmission electron microscopy. UV-vis spectroscopy shows the optical energy gap of 5.28 eV, which is comparable to the reported energy gap for exfoliated, clean h-BN samples. X-ray photoelectron spectroscopy reveals the location of the valence band edge at 2 eV. The optimized synthesis route of h-BN generates two kinds of defects, which are characterized using room-temperature photoluminescence (PL) measurements. The defects emit light at 4.18 eV [deep-UV (DUV)] and 3.44 eV (UV) photons. The intensity of PL has an oscillatory dependence on the excitation energy for the defect emitting DUV light. A series of spectral lines are observed with the energy ranging between 2.56 and 3.44 eV. The average peak-to-peak energy separation is about 125 meV. The locations of the spectral lines can be modeled using Franck-Condon-type transition and associated with displaced harmonic oscillator approximation. Our facile route gives an easier approach to prepare clean h-BN, which is essential for classical two-dimensional material-based electronics and single-photon-based quantum devices.
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Affiliation(s)
- Ashly Sunny
- Department
of Physics, School of Advanced Sciences, Vellore Institute of Technology, Vellore, Tamilnadu 632014, India
| | - Aniket Balapure
- Department
of Chemistry, Birla Institute of Technology
and Science (BITS), Pilani,
Hyderabad Campus, Jawahar Nagar, Kapra Mandal, Medchal
District, Hyderabad, Telangana 500078, India
| | - Ramakrishnan Ganesan
- Department
of Chemistry, Birla Institute of Technology
and Science (BITS), Pilani,
Hyderabad Campus, Jawahar Nagar, Kapra Mandal, Medchal
District, Hyderabad, Telangana 500078, India
| | - R. Thamankar
- Centre
for Functional Materials, Vellore Institute
of Technology, Vellore, Tamilnadu 632014, India
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6
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Sun X, Feng Y, Wang F, Wang P, Gao W, Yin H. Direct growth of h-BN multilayers with controlled thickness on non-crystalline dielectric substrates without metal catalysts. Chem Commun (Camb) 2022; 58:9750-9753. [PMID: 35946432 DOI: 10.1039/d2cc03025j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
We report an rGO-assisted CVD approach that enables the direct growth of high-quality single crystalline h-BN films with adjustable thickness and layered order on amorphous quartz and SiO2/Si substrates at relatively low temperatures. This work demonstrates a viable prototype for growing continuous ultrathin h-BN films on desired substrates without the requirement of lattice orientation, thus offering a great opportunity for their appealing applications.
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Affiliation(s)
- Xiaoyan Sun
- State Key Lab of Superhard Materials, College of Physics, Jilin University, Changchun 130012, Jilin, People's Republic of China.
| | - Yuanfang Feng
- State Key Lab of Superhard Materials, College of Physics, Jilin University, Changchun 130012, Jilin, People's Republic of China.
| | - Fei Wang
- State Key Lab of Superhard Materials, College of Physics, Jilin University, Changchun 130012, Jilin, People's Republic of China.
| | - Peng Wang
- State Key Lab of Superhard Materials, College of Physics, Jilin University, Changchun 130012, Jilin, People's Republic of China.
| | - Wei Gao
- State Key Lab of Superhard Materials, College of Physics, Jilin University, Changchun 130012, Jilin, People's Republic of China.
| | - Hong Yin
- State Key Lab of Superhard Materials, College of Physics, Jilin University, Changchun 130012, Jilin, People's Republic of China.
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Shtansky DV, Matveev AT, Permyakova ES, Leybo DV, Konopatsky AS, Sorokin PB. Recent Progress in Fabrication and Application of BN Nanostructures and BN-Based Nanohybrids. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:2810. [PMID: 36014675 PMCID: PMC9416166 DOI: 10.3390/nano12162810] [Citation(s) in RCA: 13] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/28/2022] [Revised: 08/11/2022] [Accepted: 08/12/2022] [Indexed: 05/27/2023]
Abstract
Due to its unique physical, chemical, and mechanical properties, such as a low specific density, large specific surface area, excellent thermal stability, oxidation resistance, low friction, good dispersion stability, enhanced adsorbing capacity, large interlayer shear force, and wide bandgap, hexagonal boron nitride (h-BN) nanostructures are of great interest in many fields. These include, but are not limited to, (i) heterogeneous catalysts, (ii) promising nanocarriers for targeted drug delivery to tumor cells and nanoparticles containing therapeutic agents to fight bacterial and fungal infections, (iii) reinforcing phases in metal, ceramics, and polymer matrix composites, (iv) additives to liquid lubricants, (v) substrates for surface enhanced Raman spectroscopy, (vi) agents for boron neutron capture therapy, (vii) water purifiers, (viii) gas and biological sensors, and (ix) quantum dots, single photon emitters, and heterostructures for electronic, plasmonic, optical, optoelectronic, semiconductor, and magnetic devices. All of these areas are developing rapidly. Thus, the goal of this review is to analyze the critical mass of knowledge and the current state-of-the-art in the field of BN-based nanomaterial fabrication and application based on their amazing properties.
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Affiliation(s)
- Dmitry V. Shtansky
- Labotoary of Inorganic Nanomaterials, National University of Science and Technology “MISiS”, Leninsky Prospect 4, 119049 Moscow, Russia
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Zhang Y, Zhou M, Yang M, Yu J, Li W, Li X, Feng S. Experimental Realization and Computational Investigations of B 2S 2 as a New 2D Material with Potential Applications. ACS APPLIED MATERIALS & INTERFACES 2022; 14:32330-32340. [PMID: 35796513 DOI: 10.1021/acsami.2c03762] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
A new two-dimensional material B2S2 has been successfully synthesized for the first time and validated using first-principles calculations, with fundamental properties analyzed in detail. B2S2 has a similar structure as transition-metal dichalcogenides (TMDs) such as MoS2, and the experimentally prepared free-standing B2S2 nanosheets show a uniform height profile lower than 1 nm. A thickness-modulated and unique oxidation-level dependent band gap of B2S2 is revealed by theoretical calculations, and vibration signatures are determined to offer a practical scheme for the characterization of B2S2. It is shown that the functionalized B2S2 is able to provide favorable sites for lithium adsorption with low diffusion barriers, and the prepared B2S2 shows a wide band photoluminescence response. These findings offer a feasible new and lighter member for the TMD-like 2D material family with potential for various aspects of applications, such as an anode material for Li-ion batteries and electronic and optoelectronic devices.
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Affiliation(s)
- Yibo Zhang
- State Key Laboratory of Tribology, School of Mechanical Engineering, Tsinghua University, Beijing 100084, China
| | - Ming Zhou
- State Key Laboratory of Tribology, School of Mechanical Engineering, Tsinghua University, Beijing 100084, China
- Key Laboratory of Advanced Materials Processing Technology, Ministry of Education, Tsinghua University, Beijing 100084, China
| | - Mingyang Yang
- State Key Laboratory of Tribology, School of Mechanical Engineering, Tsinghua University, Beijing 100084, China
| | - Jianwen Yu
- State Key Laboratory of Tribology, School of Mechanical Engineering, Tsinghua University, Beijing 100084, China
| | - Wenming Li
- State Key Laboratory of Tribology, School of Mechanical Engineering, Tsinghua University, Beijing 100084, China
| | - Xuyin Li
- State Key Laboratory of Tribology, School of Mechanical Engineering, Tsinghua University, Beijing 100084, China
| | - Shijia Feng
- State Key Laboratory of Tribology, School of Mechanical Engineering, Tsinghua University, Beijing 100084, China
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