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Tsarapkin A, Maćkosz K, Jureddy CS, Utke I, Höflich K. Area-Selective Chemical Vapor Deposition of Gold by Electron Beam Seeding. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024:e2313571. [PMID: 38546415 DOI: 10.1002/adma.202313571] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/12/2023] [Revised: 03/06/2024] [Indexed: 04/19/2024]
Abstract
Chemical vapor deposition (CVD) is an established method for producing high-purity thin films, but it typically necessitates the pre- and post-processing using a mask to produce structures. This study presents a novel maskless patterning technique that enables area-selective CVD of gold. A focused electron beam is used to decompose the metal-organic precursor Au(acac)Me2 locally, thereby creating an autocatalytically active seed layer for subsequent CVD with the same precursor. The procedure can be included in the same CVD process without the need for clean room lithographic processing. Moreover, it operates at low temperatures of 80 °C, over 200 K lower than standard CVD temperatures for this precursor, reducing thermal load on the specimen. Given that electron beam seeding operates on any even moderately conductive surface, the process does not constrain device design. This is demonstrated by the example of vertical nanostructures with high aspect ratios of ≈40:1 and more. Written using a focused electron beam and the same precursor, these nanopillars exhibit catalytically active nuclei on their surface. Furthermore, by using the onset of the autocatalytic CVD growth, for the first time the local temperature increase caused by the writing of nanostructures with an electron beam can be precisely determined.
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Affiliation(s)
- Aleksei Tsarapkin
- Ferdinand-Braun-Institut (FBH), Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, D-12489, Berlin, Germany
| | - Krzysztof Maćkosz
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, Thun, CH-3602, Switzerland
| | - Chinmai Sai Jureddy
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, Thun, CH-3602, Switzerland
| | - Ivo Utke
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, Thun, CH-3602, Switzerland
| | - Katja Höflich
- Ferdinand-Braun-Institut (FBH), Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, D-12489, Berlin, Germany
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2
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Jurczyk J, Höflich K, Madajska K, Berger L, Brockhuis L, Edwards TEJ, Kapusta C, Szymańska IB, Utke I. Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:nano13091516. [PMID: 37177061 PMCID: PMC10180361 DOI: 10.3390/nano13091516] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/19/2023] [Revised: 04/21/2023] [Accepted: 04/25/2023] [Indexed: 05/15/2023]
Abstract
Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in its infancy. Here, we examine and compare five different silver carboxylates, three perfluorinated: [Ag2(µ-O2CCF3)2], [Ag2(µ-O2CC2F5)2], and [Ag2(µ-O2CC3F7)2], and two containing branched substituents: [Ag2(µ-O2CCMe2Et)2] and [Ag2(µ-O2CtBu)2], as potential precursors for focused electron-beam-induced deposition. All of the compounds show high sensitivity to electron dissociation and efficient dissociation of Ag-O bonds. The as-deposited materials have silver contents from 42 at.% to above 70 at.% and are composed of silver nano-crystals with impurities of carbon and fluorine between them. Precursors with the shortest carbon-fluorine chain ligands yield the highest silver contents. In addition, the deposited silver content depends on the balance of electron-induced ligand co-deposition and ligand desorption. For all of the tested compounds, low electron flux was related to high silver content. Our findings demonstrate that silver carboxylates constitute a promising group of precursors for gas-assisted focused electron beam writing of high silver content materials.
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Affiliation(s)
- Jakub Jurczyk
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Science, AGH University of Krakow Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Katja Höflich
- Helmholtz-Zentrum Berlin Für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
- Ferdinand-Braun Institut, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489 Berlin, Germany
| | - Katarzyna Madajska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Luisa Berger
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Leo Brockhuis
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Science, AGH University of Krakow Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Thomas Edward James Edwards
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Czesław Kapusta
- Faculty of Physics and Applied Computer Science, AGH University of Krakow Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Iwona B Szymańska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
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Dyck O, Lupini AR, Jesse S. Atom-by-Atom Direct Writing. NANO LETTERS 2023; 23:2339-2346. [PMID: 36877825 DOI: 10.1021/acs.nanolett.3c00114] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Direct-write processes enable the alteration or deposition of materials in a continuous, directable, sequential fashion. In this work, we demonstrate an electron beam direct-write process in an aberration-corrected scanning transmission electron microscope. This process has several fundamental differences from conventional electron-beam-induced deposition techniques, where the electron beam dissociates precursor gases into chemically reactive products that bond to a substrate. Here, we use elemental tin (Sn) as a precursor and employ a different mechanism to facilitate deposition. The atomic-sized electron beam is used to generate chemically reactive point defects at desired locations in a graphene substrate. Temperature control of the sample is used to enable the precursor atoms to migrate across the surface and bond to the defect sites, thereby enabling atom-by-atom direct writing.
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Affiliation(s)
- Ondrej Dyck
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830, United States
| | - Andrew R Lupini
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830, United States
| | - Stephen Jesse
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830, United States
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Zhang H, Zhou X, Li X, Gong P, Zhang Y, Zhao Y. Recent Advancements of LSPR Fiber-Optic Biosensing: Combination Methods, Structure, and Prospects. BIOSENSORS 2023; 13:bios13030405. [PMID: 36979617 PMCID: PMC10046874 DOI: 10.3390/bios13030405] [Citation(s) in RCA: 6] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/21/2023] [Revised: 03/15/2023] [Accepted: 03/18/2023] [Indexed: 05/31/2023]
Abstract
Fiber-optic biosensors based on localized surface plasmon resonance (LSPR) have the advantages of great biocompatibility, label-free, strong stability, and real-time monitoring of various analytes. LSPR fiber-optic biosensors have attracted extensive research attention in the fields of environmental science, clinical medicine, disease diagnosis, and food safety. The latest development of LSPR fiber-optic biosensors in recent years has focused on the detection of clinical disease markers and the detection of various toxic substances in the environment and the progress of new sensitization mechanisms in LSPR fiber-optic sensors. Therefore, this paper reviews the LSPR fiber-optic sensors from the aspects of working principle, structure, and application fields in biosensors. According to the structure, the sensor can be divided into three categories: traditional ordinary optical fiber, special shape optical fiber, and specialty optical fiber. The advantages and disadvantages of existing and future LSPR fiber-optic biosensors are discussed in detail. Additionally, the prospect of future development of fiber-optic biosensors based on LSPR is addressed.
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Affiliation(s)
- Hongxin Zhang
- College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
| | - Xue Zhou
- College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
| | - Xuegang Li
- College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
- The State Key Laboratory of Synthetical Automation for Process Industries, Shenyang 110819, China
- Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology, Qinhuangdao 066004, China
| | - Pengqi Gong
- College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
- The State Key Laboratory of Synthetical Automation for Process Industries, Shenyang 110819, China
- Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology, Qinhuangdao 066004, China
| | - Yanan Zhang
- College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
- The State Key Laboratory of Synthetical Automation for Process Industries, Shenyang 110819, China
- Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology, Qinhuangdao 066004, China
| | - Yong Zhao
- College of Information Science and Engineering, Northeastern University, Shenyang 110819, China
- The State Key Laboratory of Synthetical Automation for Process Industries, Shenyang 110819, China
- Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology, Qinhuangdao 066004, China
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Madajska K, Dobrzańska L, Muzioł T, Szymańska IB. Silver ionic compounds as a source of metal carriers in the gas phase. Polyhedron 2022. [DOI: 10.1016/j.poly.2022.116149] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/31/2022]
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6
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Jurczyk J, Pillatsch L, Berger L, Priebe A, Madajska K, Kapusta C, Szymańska IB, Michler J, Utke I. In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:2710. [PMID: 35957140 PMCID: PMC9370286 DOI: 10.3390/nano12152710] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/15/2022] [Revised: 07/22/2022] [Accepted: 07/29/2022] [Indexed: 06/15/2023]
Abstract
Recent developments in nanoprinting using focused electron beams have created a need to develop analysis methods for the products of electron-induced fragmentation of different metalorganic compounds. The original approach used here is termed focused-electron-beam-induced mass spectrometry (FEBiMS). FEBiMS enables the investigation of the fragmentation of electron-sensitive materials during irradiation within the typical primary electron beam energy range of a scanning electron microscope (0.5 to 30 keV) and high vacuum range. The method combines a typical scanning electron microscope with an ion-extractor-coupled mass spectrometer setup collecting the charged fragments generated by the focused electron beam when impinging on the substrate material. The FEBiMS of fragments obtained during 10 keV electron irradiation of grains of silver and copper carboxylates and shows that the carboxylate ligand dissociates into many smaller volatile fragments. Furthermore, in situ FEBiMS was performed on carbonyls of ruthenium (solid) and during electron-beam-induced deposition, using tungsten carbonyl (inserted via a gas injection system). Loss of carbonyl ligands was identified as the main channel of dissociation for electron irradiation of these carbonyl compounds. The presented results clearly indicate that FEBiMS analysis can be expanded to organic, inorganic, and metal organic materials used in resist lithography, ice (cryo-)lithography, and focused-electron-beam-induced deposition and becomes, thus, a valuable versatile analysis tool to study both fundamental and process parameters in these nanotechnology fields.
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Affiliation(s)
- Jakub Jurczyk
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow, Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Lex Pillatsch
- TOFWERK AG, Schorenstrasse 39, CH-3645 Thun, Switzerland
| | - Luisa Berger
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Agnieszka Priebe
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Katarzyna Madajska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Czesław Kapusta
- Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow, Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Iwona B. Szymańska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Johann Michler
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
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7
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Martinović P, Rohdenburg M, Butrymowicz A, Sarigül S, Huth P, Denecke R, Szymańska IB, Swiderek P. Electron-Induced Decomposition of Different Silver(I) Complexes: Implications for the Design of Precursors for Focused Electron Beam Induced Deposition. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:1687. [PMID: 35630909 PMCID: PMC9147827 DOI: 10.3390/nano12101687] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/05/2022] [Revised: 05/05/2022] [Accepted: 05/11/2022] [Indexed: 12/07/2022]
Abstract
Focused electron beam induced deposition (FEBID) is a versatile tool to produce nanostructures through electron-induced decomposition of metal-containing precursor molecules. However, the metal content of the resulting materials is often low. Using different Ag(I) complexes, this study shows that the precursor performance depends critically on the molecular structure. This includes Ag(I) 2,2-dimethylbutanoate, which yields high Ag contents in FEBID, as well as similar aliphatic Ag(I) carboxylates, aromatic Ag(I) benzoate, and the acetylide Ag(I) 3,3-dimethylbutynyl. The compounds were sublimated on inert surfaces and their electron-induced decomposition was monitored by electron-stimulated desorption (ESD) experiments in ultrahigh vacuum and by reflection-absorption infrared spectroscopy (RAIRS). The results reveal that Ag(I) carboxylates with aliphatic side chains are particularly favourable for FEBID. Following electron impact ionization, they fragment by loss of volatile CO2. The remaining alkyl radical converts to a stable and equally volatile alkene. The lower decomposition efficiency of Ag(I) benzoate and Ag(I) 3,3-dimethylbutynyl is explained by calculated average local ionization energies (ALIE) which reveal that ionization from the unsaturated carbon units competes with ionization from the coordinate bond to Ag. This can stabilise the ionized complex with respect to fragmentation. This insight provides guidance with respect to the design of novel FEBID precursors.
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Affiliation(s)
- Petra Martinović
- Institute for Applied and Physical Chemistry (IAPC), Fachbereich 2 (Chemie/Biologie), University of Bremen, Leobener Str. 5 (NW2), 28359 Bremen, Germany; (P.M.); (M.R.); (S.S.)
| | - Markus Rohdenburg
- Institute for Applied and Physical Chemistry (IAPC), Fachbereich 2 (Chemie/Biologie), University of Bremen, Leobener Str. 5 (NW2), 28359 Bremen, Germany; (P.M.); (M.R.); (S.S.)
- Wilhelm-Ostwald-Institute for Physical and Theoretical Chemistry (WOI), Leipzig University, Linnéstr. 2, 04103 Leipzig, Germany; (P.H.); (R.D.)
| | - Aleksandra Butrymowicz
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland; (A.B.); (I.B.S.)
| | - Selma Sarigül
- Institute for Applied and Physical Chemistry (IAPC), Fachbereich 2 (Chemie/Biologie), University of Bremen, Leobener Str. 5 (NW2), 28359 Bremen, Germany; (P.M.); (M.R.); (S.S.)
| | - Paula Huth
- Wilhelm-Ostwald-Institute for Physical and Theoretical Chemistry (WOI), Leipzig University, Linnéstr. 2, 04103 Leipzig, Germany; (P.H.); (R.D.)
| | - Reinhard Denecke
- Wilhelm-Ostwald-Institute for Physical and Theoretical Chemistry (WOI), Leipzig University, Linnéstr. 2, 04103 Leipzig, Germany; (P.H.); (R.D.)
| | - Iwona B. Szymańska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland; (A.B.); (I.B.S.)
| | - Petra Swiderek
- Institute for Applied and Physical Chemistry (IAPC), Fachbereich 2 (Chemie/Biologie), University of Bremen, Leobener Str. 5 (NW2), 28359 Bremen, Germany; (P.M.); (M.R.); (S.S.)
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8
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Utke I, Swiderek P, Höflich K, Madajska K, Jurczyk J, Martinović P, Szymańska I. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coord Chem Rev 2022. [DOI: 10.1016/j.ccr.2021.213851] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/11/2022]
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9
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Utke I, Michler J, Winkler R, Plank H. Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review. MICROMACHINES 2020; 11:E397. [PMID: 32290292 PMCID: PMC7231341 DOI: 10.3390/mi11040397] [Citation(s) in RCA: 22] [Impact Index Per Article: 5.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/04/2020] [Revised: 03/23/2020] [Accepted: 03/25/2020] [Indexed: 11/17/2022]
Abstract
This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using volatile organic and organometallic precursors. Gas-assisted focused electron and ion beam-induced deposition-based additive manufacturing technologies enable the direct-write fabrication of complex 3D nanostructures with feature dimensions below 50 nm, pore-free and nanometer-smooth high-fidelity surfaces, and an increasing flexibility in choice of materials via novel precursors. We discuss the principles, possibilities, and literature proven examples related to the mechanical properties of such 3D nanoobjects. Most materials fabricated via these approaches reveal a metal matrix composition with metallic nanograins embedded in a carbonaceous matrix. By that, specific material functionalities, such as magnetic, electrical, or optical can be largely independently tuned with respect to mechanical properties governed mostly by the matrix. The carbonaceous matrix can be precisely tuned via electron and/or ion beam irradiation with respect to the carbon network, carbon hybridization, and volatile element content and thus take mechanical properties ranging from polymeric-like over amorphous-like toward diamond-like behavior. Such metal matrix nanostructures open up entirely new applications, which exploit their full potential in combination with the unique 3D additive manufacturing capabilities at the nanoscale.
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Affiliation(s)
- Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, CH-3602 Thun, Switzerland
| | - Johann Michler
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, CH-3602 Thun, Switzerland
| | - Robert Winkler
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Harald Plank
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
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Jurczyk J, Brewer CR, Hawkins OM, Polyakov MN, Kapusta C, McElwee-White L, Utke I. Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η 3-C 3H 5)Ru(CO) 3Br. ACS APPLIED MATERIALS & INTERFACES 2019; 11:28164-28171. [PMID: 31310091 DOI: 10.1021/acsami.9b07634] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
Focused electron beam-induced deposition using the heteroleptic complex (η3-C3H5)Ru(CO)3Br as a precursor resulted in deposition of material with Ru content of 23 at. %. Transmission electron microscopy images indicated a nanogranular structure of pure Ru nanocrystals, embedded into a matrix containing carbon, oxygen, and bromine. The deposits were purified by annealing in a reactive 98% N2/2% H2 atmosphere at 300 °C, resulting in a reduction of contaminants and an increase of the Ru content to 83 at. %. Although a significant volume loss of 79% was found, the shrinkage was observed mostly for vertical thickness (around 75%). The lateral dimensions decreased much less significantly (around 9%). Deposition results, in conjunction with previous gas-phase and condensed-phase surface studies on the electron-induced reactions of (η3-C3H5)Ru(CO)3Br, provide insights into the behavior of allyl, carbonyl, and bromide ligands under identical electron beam irradiation.
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Affiliation(s)
- Jakub Jurczyk
- Laboratory for Mechanics of Materials and Nanostructures , Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39 , CH-3602 Thun , Switzerland
- Faculty of Physics and Applied Computer Science , AGH University of Science and Technology Krakow , Al. Mickiewicza 30 , 30-059 Kraków , Poland
| | - Christopher R Brewer
- Department of Chemistry , University of Florida , 32611-7200 Gainesville , Florida , United States
| | - Olivia M Hawkins
- Department of Chemistry , University of Florida , 32611-7200 Gainesville , Florida , United States
| | - Mikhail N Polyakov
- Laboratory for Mechanics of Materials and Nanostructures , Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39 , CH-3602 Thun , Switzerland
| | - Czeslaw Kapusta
- Faculty of Physics and Applied Computer Science , AGH University of Science and Technology Krakow , Al. Mickiewicza 30 , 30-059 Kraków , Poland
| | - Lisa McElwee-White
- Department of Chemistry , University of Florida , 32611-7200 Gainesville , Florida , United States
| | - Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures , Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39 , CH-3602 Thun , Switzerland
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11
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Luo B, Fang Y, Li J, Huang Z, Hu B, Zhou J. Improved Stability of Metal Nanowires via Electron Beam Irradiation Induced Surface Passivation. ACS APPLIED MATERIALS & INTERFACES 2019; 11:12195-12201. [PMID: 30880382 DOI: 10.1021/acsami.9b00875] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Suppressing the corrosion of nanoscaled metal materials is a critical issue for various devices. Herein, we demonstrate the electron beam irradiation can be a simple and efficient method to realize silver/copper nanowires protection by transforming the original organic capping agents into dense carbonaceous shells. Single nanowire tests prove the significant stability improvement from 4 days to 20 days for silver nanowire and from 20 h to at least 1 week for copper nanowire. The comprehensive advantages such as solution/pollution-free and continuous process with high precision offer this method substantial potential applications in bottom-up assembled electronic and optoelectronic devices.
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Affiliation(s)
- Beibei Luo
- Wuhan National Laboratory for Optoelectronics , Huazhong University of Science and Technology , Wuhan 430074 , China
| | - Yunsheng Fang
- Wuhan National Laboratory for Optoelectronics , Huazhong University of Science and Technology , Wuhan 430074 , China
| | - Jia Li
- Wuhan National Laboratory for Optoelectronics , Huazhong University of Science and Technology , Wuhan 430074 , China
| | - Zhen Huang
- Wuhan National Laboratory for Optoelectronics , Huazhong University of Science and Technology , Wuhan 430074 , China
| | - Bin Hu
- Wuhan National Laboratory for Optoelectronics , Huazhong University of Science and Technology , Wuhan 430074 , China
- Shenzhen Huazhong University of Science and Technology Research Institute , Shenzhen 518057 , China
| | - Jun Zhou
- Wuhan National Laboratory for Optoelectronics , Huazhong University of Science and Technology , Wuhan 430074 , China
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12
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Martin AA, Depond PJ. Formation mechanisms of boron oxide films fabricated by large-area electron beam-induced deposition of trimethyl borate. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:1282-1287. [PMID: 29765806 PMCID: PMC5942371 DOI: 10.3762/bjnano.9.120] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/08/2018] [Accepted: 03/27/2018] [Indexed: 06/08/2023]
Abstract
Boron-containing materials are increasingly drawing interest for the use in electronics, optics, laser targets, neutron absorbers, and high-temperature and chemically resistant ceramics. In this article, the first investigation into the deposition of boron-based material via electron beam-induced deposition (EBID) is reported. Thin films were deposited using a novel, large-area EBID system that is shown to deposit material at rates comparable to conventional techniques such as laser-induced chemical vapor deposition. The deposition rate and stoichiometry of boron oxide fabricated by EBID using trimethyl borate (TMB) as precursor is found to be critically dependent on the substrate temperature. By comparing the deposition mechanisms of TMB to the conventional, alkoxide-based precursor tetraethyl orthosilicate it is revealed that ligand chemistry does not precisely predict the pathways leading to deposition of material via EBID. The results demonstrate the first boron-containing material deposited by the EBID process and the potential for EBID as a scalable fabrication technique that could have a transformative effect on the athermal deposition of materials.
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Affiliation(s)
- Aiden A Martin
- Physical and Life Sciences Directorate, Lawrence Livermore National Laboratory, Livermore, California 94550, USA
| | - Philip J Depond
- Physical and Life Sciences Directorate, Lawrence Livermore National Laboratory, Livermore, California 94550, USA
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Höflich K, Jurczyk JM, Madajska K, Götz M, Berger L, Guerra-Nuñez C, Haverkamp C, Szymanska I, Utke I. Towards the third dimension in direct electron beam writing of silver. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:842-849. [PMID: 29600145 PMCID: PMC5852464 DOI: 10.3762/bjnano.9.78] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/09/2017] [Accepted: 02/14/2018] [Indexed: 05/06/2023]
Abstract
Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell-time-dependent deposition behavior and growth characteristics. While silver 2,2-dimethylbutyrate showed a strong depletion in the center of the impinging electron beam profile hindering any vertical growth, silver pentafluoropropionate indicated a pronounced dependency of the deposit height on the dwell time. Truly three-dimensional silver structures could be realized with silver pentafluoropropionate. The pillars were polycrystalline with silver contents of more than 50 atom % and exhibit strong Raman enhancement. This constitutes a promising route towards the direct electron beam writing of three-dimensional plasmonic device parts from the gas phase.
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Affiliation(s)
- Katja Höflich
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Jakub Mateusz Jurczyk
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Sciences, AGH University of Science and Technology, 30-059 Kraków, Poland
| | - Katarzyna Madajska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Maximilian Götz
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Luisa Berger
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Carlos Guerra-Nuñez
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Caspar Haverkamp
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Iwona Szymanska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Ivo Utke
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
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15
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Berger L, Madajska K, Szymanska IB, Höflich K, Polyakov MN, Jurczyk J, Guerra-Nuñez C, Utke I. Gas-assisted silver deposition with a focused electron beam. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:224-232. [PMID: 29441267 PMCID: PMC5789381 DOI: 10.3762/bjnano.9.24] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/02/2017] [Accepted: 12/18/2017] [Indexed: 05/15/2023]
Abstract
Focused electron beam induced deposition (FEBID) is a flexible direct-write method to obtain defined structures with a high lateral resolution. In order to use this technique in application fields such as plasmonics, suitable precursors which allow the deposition of desired materials have to be identified. Well known for its plasmonic properties, silver represents an interesting candidate for FEBID. For this purpose the carboxylate complex silver(I) pentafluoropropionate (AgO2CC2F5) was used for the first time in FEBID and resulted in deposits with high silver content of up to 76 atom %. As verified by TEM investigations, the deposited material is composed of pure silver crystallites in a carbon matrix. It showed good electrical properties and a strong Raman signal enhancement. Interestingly, silver crystal growth presents a strong dependency on electron dose and precursor refreshment.
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Affiliation(s)
- Luisa Berger
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Katarzyna Madajska
- Department of Chemistry, Nicolaus Copernicus University, Gagarina 7, 87 100 Toruń, Poland
| | - Iwona B Szymanska
- Department of Chemistry, Nicolaus Copernicus University, Gagarina 7, 87 100 Toruń, Poland
| | - Katja Höflich
- Nanoscale Structures and Microscopic Analysis, Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Mikhail N Polyakov
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Jakub Jurczyk
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- AGH University of Science and Technology Krakow, Faculty of Physics and Applied Computer Science, Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Carlos Guerra-Nuñez
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Ivo Utke
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
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16
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Haverkamp C, Sarau G, Polyakov MN, Utke I, Puydinger dos Santos MV, Christiansen S, Höflich K. A novel copper precursor for electron beam induced deposition. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:1220-1227. [PMID: 29765799 PMCID: PMC5942376 DOI: 10.3762/bjnano.9.113] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/02/2017] [Accepted: 03/23/2018] [Indexed: 05/07/2023]
Abstract
A fluorine free copper precursor, Cu(tbaoac)2 with the chemical sum formula CuC16O6H26 is introduced for focused electron beam induced deposition (FEBID). FEBID with 15 keV and 7 nA results in deposits with an atomic composition of Cu:O:C of approximately 1:1:2. Transmission electron microscopy proved that pure copper nanocrystals with sizes of up to around 15 nm were dispersed inside the carbonaceous matrix. Raman investigations revealed a high degree of amorphization of the carbonaceous matrix and showed hints for partial copper oxidation taking place selectively on the surfaces of the deposits. Optical transmission/reflection measurements of deposited pads showed a dielectric behavior of the material in the optical spectral range. The general behavior of the permittivity could be described by applying the Maxwell-Garnett mixing model to amorphous carbon and copper. The dielectric function measured from deposited pads was used to simulate the optical response of tip arrays fabricated out of the same precursor and showed good agreement with measurements. This paves the way for future plasmonic applications with copper-FEBID.
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Affiliation(s)
- Caspar Haverkamp
- Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
- Max Planck Institute for the Science of Light, Staudtstr. 2, 91058 Erlangen, Germany
| | - George Sarau
- Max Planck Institute for the Science of Light, Staudtstr. 2, 91058 Erlangen, Germany
- Institute of Optics, Information and Photonics, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Staudtstr. 7/B2, 91058 Erlangen, Germany
| | - Mikhail N Polyakov
- Empa—Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Ivo Utke
- Empa—Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Marcos V Puydinger dos Santos
- Empa—Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Institute of Physics Gleb Wataghin, University of Campinas, Rua Sergio Buarque de Holanda 777, Cidade Universitaria, 13083-859 Campinas-SP, Brazil
| | - Silke Christiansen
- Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
- Max Planck Institute for the Science of Light, Staudtstr. 2, 91058 Erlangen, Germany
- Physics Department, Freie Universität Berlin, Arnimallee 14, 14195 Berlin, Germany
| | - Katja Höflich
- Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
- Max Planck Institute for the Science of Light, Staudtstr. 2, 91058 Erlangen, Germany
- Empa—Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
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