Direct creation of three-dimensional photonic crystals by a top-down approach

Chiral 3D structures through multi-dimensional transfer printing of multilayer quantum dot patterns

Three-dimensional optical nanostructures have garnered significant interest in photonics due to their extraordinary capabilities to manipulate the amplitude, phase, and polarization states of light. However, achieving complex three-dimensional optical nanostructures with bottom-up fabrication has remained challenging, despite its nanoscale precision and cost-effectiveness, mainly due to inherent limitations in structural controllability. Here, we report the optical characteristics of intricate two- and three-dimensional nanoarchitectures made of colloidal quantum dots fabricated with multi-dimensional transfer printing. Our customizable fabrication platform, directed by tailored interface polarity, enables flexible geometric control over a variety of one-, two-, and three-dimensional quantum dot architectures, achieving tunable and advanced optical features. For example, we demonstrate a two-dimensional quantum dot nanomesh with tuned subwavelength square perforations designed by finite-difference time-domain calculations, achieving an 8-fold enhanced photoluminescence due to the maximized optical resonance. Furthermore, a three-dimensional quantum dot chiral structure is also created via asymmetric stacking of one-dimensional quantum dot layers, realizing a pronounced circular dichroism intensity exceeding 20°.

Optical and Electrical Modulation Strategies of Photoelectrodes for Photoelectrochemical Water Splitting

When constructing efficient, cost-effective, and stable photoelectrodes for photoelectrochemical (PEC) systems, the solar-driven photo-to-chemical conversion efficiency of semiconductors is limited by several factors, including the surface catalytic activity, light absorption range, carrier separation, and transfer efficiency. Accordingly, various modulation strategies, such as modifying the light propagation behavior and regulating the absorption range of incident light based on optics and constructing and regulating the built-in electric field of semiconductors based on carrier behaviors in semiconductors, are implemented to improve the PEC performance. Herein, the mechanism and research advancements of optical and electrical modulation strategies for photoelectrodes are reviewed. First, parameters and methods for characterizing the performance and mechanism of photoelectrodes are introduced to reveal the principle and significance of modulation strategies. Then, plasmon and photonic crystal structures and mechanisms are summarized from the perspective of controlling the propagation behavior of incident light. Subsequently, the design of an electrical polarization material, polar surface, and heterojunction structure is elaborated to construct an internal electric field, which serves as the driving force to facilitate the separation and transfer of photogenerated electron-hole pairs. Finally, the challenges and opportunities for developing optical and electrical modulation strategies for photoelectrodes are discussed.

Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers

Silicon Carbide (SiC) is an outstanding material, not only for electronic applications, but also for projected functionalities in the realm of spin-based quantum technologies, nano-mechanical resonators and photonics-on-a-chip. For shaping 3D structures out of SiC wafers, predominantly dry-etching techniques are used. SiC is nearly inert with respect to wet etching, occasionally photoelectrochemical etching strategies have been applied. Here, we propose an electrochemical etching strategy that solely relies on defining etchable volumina by implantation of p-dopants. Together with the inertness of the n-doped regions, very sharp etching contrasts can be achieved. We present devices as different as monolithic cantilevers, disk-shaped optical resonators and membranes etched out of a single crystal wafer. The high quality of the resulting surfaces can even be enhanced by thermal treatment, with shape-stable devices up to and even beyond 1550°C. The versatility of our approach paves the way for new functionalities on SiC as high-performance multi-functional wafer platform.

Ordered Macro-Microporous Single Crystals of Covalent Organic Frameworks with Efficient Sorption of Iodine

Fashioning microporous covalent organic frameworks (COFs) into single crystals with ordered macropores allows for an effective reduction of the mass transfer resistance and the maximum preservation of their intrinsic properties but remains unexplored. Here, we report the first synthesis of three-dimensional (3D) ordered macroporous single crystals of the imine-linked 3D microporous COFs (COF-300 and COF-303) via a template-assisted modulated strategy. In this strategy, COFs crystallized within the sacrificial colloidal crystal template, assembled from monodisperse polystyrene microspheres, and underwent an aniline-modulated amorphous-to-crystalline transformation to form large single crystals with 3D interconnected macropores. The effects of the introduced macroporous structure on the sorption performances of COF-300 single crystals were further probed by iodine. Our results indicate that iodine adsorption occurred in micropores of COF-300 but not in the introduced macropores. Accordingly, the iodine adsorption capacity of COF single crystals was governed by their micropore accessibility. The relatively long diffusion path in the non-macroporous COF-300 single crystals resulted in a limited micropore accessibility (48.4%) and thus a low capacity in iodine adsorption (1.48 g·g^-1). The introduction of 3D ordered macropores can greatly shorten the microporous diffusion path in COF-300 single crystals and thus render all their micropores fully accessible in iodine adsorption with a capacity (3.15 g·g^-1) that coincides well with the theoretical one.

Self-growing photonic composites with programmable colors and mechanical properties

Many organisms produce stunning optical displays based on structural color instead of pigmentation. This structural or photonic color is achieved through the interaction of light with intricate micro-/nano-structures, which are "grown" from strong, sustainable biological materials such as chitin, keratin, and cellulose. In contrast, current synthetic structural colored materials are usually brittle, inert, and produced via energy-intensive processes, posing significant challenges to their practical uses. Inspired by the brilliantly colored peacock feathers which selectively grow keratin-based photonic structures with different photonic bandgaps, we develop a self-growing photonic composite system in which the photonic bandgaps and hence the coloration can be easily tuned. This is achieved via the selective growth of the polymer matrix with polymerizable compounds as feeding materials in a silica nanosphere-polymer composite system, thus effectively modulating the photonic bandgaps without compromising nanostructural order. Such strategy not only allows the material system to continuously vary its colors and patterns in an on-demand manner, but also endows it with many appealing properties, including flexibility, toughness, self-healing ability, and reshaping capability. As this innovative self-growing method is simple, inexpensive, versatile, and scalable, we foresee its significant potential in meeting many emerging requirements for various applications of structural color materials.

Thermally Tunable Structural Coloration of Water/Surfactant/Oil Emulsions

Stimuli-responsive structural color in nature has fascinated scientists, directing them to develop artificial coloration materials that adjust colors in response to external stimuli. Many stimuli-responsive structural color materials have been realized. However, only a few have reported on all-liquid-type materials, which have a particularly desirable feature because they impart their function to the device of any shape. We have previously reported the development of a consistent structural color within a narrow temperature range for all-liquid-type emulsions comprising a long-chain amidoamine derivative (C18AA) and tetraoctylammonium bromide (TOAB). In the present study, we demonstrate that introducing NaCl as an electrolyte affords a highly thermo-sensitive color-changing ability to the emulsions. The structural color of the emulsions can be controlled from red to blue by tuning the temperature. Furthermore, the C18AA and TOAB concentrations can independently regulate the color and coloring-temperature, respectively, realizing that the desired color can develop at a given temperature.

Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems

Transformation of conventional 2D platforms into unusual 3D configurations provides exciting opportunities for sensors, electronics, optical devices, and biological systems. Engineering material properties or controlling and modulating stresses in thin films to pop-up 3D structures out of standard planar surfaces has been a highly active research topic over the last decade. Implementation of 3D micro and nanoarchitectures enables unprecedented functionalities including multiplexed, monolithic mechanical sensors, vertical integration of electronics components, and recording of neuron activities in 3D organoids. This paper provides an overview on stress engineering approaches to developing 3D functional microsystems. The paper systematically presents the origin of stresses generated in thin films and methods to transform a 2D design into an out-of-plane configuration. Different types of 3D micro and nanostructures, along with their applications in several areas are discussed. The paper concludes with current technical challenges and potential approaches and applications of this fast-growing research direction.

Multicolor Photonic Pigments for Rotation-Asymmetric Mechanochromic Devices

Photonic crystals are extensively explored to replace inorganic pigments and organic dyes as coloring elements in printing, painting, sensing, and anti-counterfeiting due to their brilliant structural colors, chemical stability, and environmental friendliness. However, most existing photonic-crystal-based pigments can only display monochromatic colors once made, and generating multicolors has to start with designing different building blocks. Here, a novel photonic pigment featuring highly tunable structural colors in the entire visible spectrum, made by the magnetic assembly of monodisperse nanorods into body-centered-tetragonal photonic crystals, is reported. Their prominent magnetic and crystal anisotropy makes it efficient to generate multicolors using one photonic pigment by magnetically controlling the crystal orientation. Further, the combination of angle-dependent diffraction and magnetic orientation control enables the design of rotation-asymmetric photonic films that display distinct patterns and encrypted information in response to rotation. The efficient multicolor generation through precise orientational control makes this novel photonic pigment promising in developing high-performance structural-colored materials and optical devices.

Silicon nanosheets derived from silicate minerals: controllable synthesis and energy storage application

Silicon plays a crucial part in developing high-performance energy storage materials, owing to a high specific capacity compared to carbon. Moreover, nanoscale silicon is beneficial for reducing the inherent disadvantage of large volume change during repeated lithiation/de-lithiation, while artificial synthesis methods usually involve complex procedures and high costs. On account of the abundant natural reserve and low cost, the manipulation of silicate minerals is a simple and economical approach to prepare silicon nanosheets. In this regard, this mini review introduces different classes of silicate minerals and summarizes some typical molten salt-assisted reduction methods and other valuable methods applied to prepare silicon nanosheets for energy storage. Finally, the challenges and perspectives in this field are also proposed.

Diamond photonic crystal mirror with a partial bandgap by two 2D photonic crystal layers

In this study, photonic crystals with a partial bandgap are demonstrated in the visible region using single-crystal diamonds. Quasi-three-dimensional photonic crystal structures are fabricated in the surface of the single-crystal diamonds using a tetrahedron Faraday cage that enables angled dry etching in three directions simultaneously. The reflection spectra can be controlled by varying the lattice constant of the photonic crystals. In addition, nitrogen-vacancy center single-photon sources are implanted on top of the diamond photonic crystals, and doubled collection efficiency from the light sources is achieved.

Fabricating 3D Metastructures by Simultaneous Modulation of Flexible Resist Stencils and Basal Molds

Metamaterials have gained much attention thanks to their extraordinary and intriguing optical properties beyond natural materials. However, universal high-resolution fabrications of 3D micro/nanometastructures with high-resolution remain a challenge. Here, a novel approach to fabricate sophisticated 3D micro/nanostructures with excellent robustness and precise controllability is demonstrated by simultaneously modulating of flexible resist stencils and basal molds. This method allows arbitrary manipulations of morphology, size, and orientation, as well as contact angles of the objects. Combined with a new alignment strategy of high-resolution, previously inaccessible architectures are fabricated with ultrahigh precision, leading to an excellent spectra response from the fabricated metastructures. This method provides a new possibility to realize true 3D metamaterial fabrications featuring high-resolution and direct-compatibility with broad planar lithography platforms.

Experimental probe of a complete 3D photonic band gap

The identification of a complete three-dimensional (3D) photonic band gap in real crystals typically employs theoretical or numerical models that invoke idealized crystal structures. Such an approach is prone to false positives (gap wrongly assigned) or false negatives (gap missed). Therefore, we propose a purely experimental probe of the 3D photonic band gap that pertains to any class of photonic crystals. We collect reflectivity spectra with a large aperture on exemplary 3D inverse woodpile structures that consist of two perpendicular nanopore arrays etched in silicon. We observe intense reflectivity peaks (R>90%) typical of high-quality crystals with broad stopbands. A resulting parametric plot of s-polarized versus p-polarized stopband width is linear ("y=x"), a characteristic of a 3D photonic band gap, as confirmed by simulations. By scanning the focus across the crystal, we track the polarization-resolved stopbands versus the volume fraction of high-index material and obtain many more parametric data to confirm that the high-NA stopband corresponds to the photonic band gap. This practical probe is model-free and provides fast feedback on the advanced nanofabrication needed for 3D photonic crystals and stimulates practical applications of band gaps in 3D silicon nanophotonics and photonic integrated circuits, photovoltaics, cavity QED, and quantum information processing.

Oblique angled plasma etching for 3D silicon structures with wiggling geometries

Three dimensional (3D) silicon micro- and nanostructures have attracted special research interest, particularly in photonic and electrochemical devices, due to the extra degrees of freedom for manipulation of device performance and properties. However, it is still considered to be difficult to fabricate 3D silicon structures with an arbitrary geometric form in a scalable volume, especially with standard fabrication techniques, which are intrinsically directional and anisotropic. In this work we proposed a unique method of oblique-angled plasma etching from various angles, thus multilayered silicon structures with wiggling geometries can be fabricated in a controllable manner both in micro- and nanoscale. The mechanism is explained as induced modifications of substrate topology and surface charging when a glass pad is attached on the sample surface, thus the incoming ion fluxes can be directed to the substrate surface with an off-normal angle. The process is convenient to perform without additional modifications on the plasma etching systems. At the same time, it provides more possibilities in the toolkit for fabricating 3D silicon structures with conventional fabrication technologies.

Manipulating Luminescence of Light Emitters by Photonic Crystals

The modulation of luminescence is essential because unwanted spontaneous-emission modes have a negative effect on the performance of luminescence-based photonic devices. Photonic crystals are promising materials for the control of light emission because of the variation in the local density of optical modes within them. They have been widely investigated for the manipulation of the emission intensity and lifetime of light emitters. Several groups have achieved greatly enhanced emission by depositing emitters on the surface of photonic crystals. Herein, the different modulating effects of photonic crystal dimensions, light-emitter positions, photonic crystal structure type, and the refractive index of photonic crystal building blocks are highlighted, with the aim of evaluating the fundamental principles that determine light propagation. The applications of using photonic crystals to manipulate spontaneous emission in light-emitting diodes and sensors are also reviewed. In addition, potential future challenges and improvements in this field are presented.

Applications of Photonic Crystal Nanobeam Cavities for Sensing

In recent years, there has been growing interest in optical sensors based on microcavities due to their advantages of size reduction and enhanced sensing capability. In this paper, we aim to give a comprehensive review of the field of photonic crystal nanobeam cavity-based sensors. The sensing principles and development of applications, such as refractive index sensing, nanoparticle sensing, optomechanical sensing, and temperature sensing, are summarized and highlighted. From the studies reported, it is demonstrated that photonic crystal nanobeam cavities, which provide excellent light confinement capability, ultra-small size, flexible on-chip design, and easy integration, offer promising platforms for a range of sensing applications.

Achieving Color and Function with Structure: Optical and Catalytic Support Properties of ZrO2 Inverse Opal Thin Films

Taking inspiration from natural photonic crystal architectures, we report herein the successful fabrication of zirconia inverse opal (ZrO₂ IO) thin-film photonic crystals possessing striking iridescence at visible wavelengths. Poly(methyl methacrylate) (PMMA) colloidal crystal thin films (synthetic opals) were first deposited on glass microscope slides, after which the interstitial voids in the films were filled with a Zr(IV) sol. Controlled calcination of the resulting composite films yielded iridescent ZrO₂ IO thin films with pseudo photonic band gaps (PBGs) along the surface normal at visible wavelengths. The PBG position was dependent on the macropore diameter (D) in the inverse opals (and thus proportional to the diameter of the PMMA colloids in the sacrificial templates), the incident angle of light with respect to the surface normal (θ), and also the refractive index of the medium filling the macropores, all of which were accurately described by a modified Bragg's law expression. Au/ZrO₂ IO catalysts prepared using the ZrO₂ IO films demonstrated outstanding performance for the reduction of 4-nitrophenol to 4-aminophenol in the presence of NaBH₄, which can be attributed to the interconnected macroporosity in the films, which afforded a high Au nanoparticle dispersion and also facile diffusion of 4-nitrophenol to the catalytically active Au sites.

In situ inward epitaxial growth of bulk macroporous single crystals

The functionalities of porous materials could be significantly enhanced if the materials themselves were in single-crystal form, which, owing to structural coherence, would reduce electronic and optical scattering effects. However, growing macroporous single crystals remains a fundamental challenge, let alone manufacturing crystals large enough to be of practical use. Here we demonstrate a straightforward, inexpensive, versatile method for creating macroporous gallium nitride single crystals on a centimetre scale. The synthetic strategy is built upon a disruptive crystal growth mechanism that utilises direct nitridation of a parent LiGaO₂ single crystal rendering an inward epitaxial growth process. Strikingly, the resulting single crystals exhibit electron mobility comparable to that for bulk crystals grown by the conventional sodium flux method. This approach not only affords control of both crystal and pore size through synthetic modification, but proves generic, thus opening up the possibility of designing macroporous crystals in a wealth of other materials.

Porous single crystals are desirable for optoelectronic applications, but their fabrication remains challenging. Here the authors produce centimetre-sized macroporous GaN single crystals with electron mobility comparable to that of bulk crystals via in situ inward epitaxial growth on parent LiGaO₂ crystals.

Fabrication of Nanoshell-Based 3D Periodic Structures by Templating Process using Solution-derived ZnO

Fabrication methods for a 3D periodic nanostructure with excellent and unique properties for various applications, such as photonic and phononic crystals, have attracted considerable interest. Templating processes using colloidal crystals have been proposed to create nanoshell-based 3D structures over a large area with ease. However, there are technical limitations in structural design, resulting in difficulties for structural flexibility. Here, we demonstrate a combination of proximity field nanopatterning and infiltration processes using solution-derived ZnO for a nanoshell-based 3D periodic structure with high structural flexibility and controllability. A unique process of infiltration of a solution-derived material into a polymeric template prepared by a proximity field nanopatterning process achieves the fabrication of a pre-formed layer that works as a protective layer for the template and framework for the inverse structure. Subsequently, this process shows the controllability of nanoshell thickness and significant improvement in the structure height shrinkage factor (16%) compared to those of a previous non-vacuum infiltration method (34%). The proposed method offers high controllability and flexibility in the design of structural sizes, leading to further development toward nanoshell-based 3D structures for various applications including energy devices and sensors.

Design of photonic-crystal surface-emitting lasers with circularly-polarized beam

We propose new structure of photonic-crystal surface-emitting lasers with oblique-triangular-prism-shaped air holes for direct emission of circularly polarized beam. We show appropriate height and tilt angle of oblique-triangular-prism-shaped air holes to achieve high degree of polarization. Secondly, we investigate the influence of cavity length. High degree of polarization can be obtained by appropriate air-hole shape and cavity length. We also show that right-handed or left-handed circular polarization can be chosen by changing tilt direction of air holes.

Predictive Synthesis of Freeform Carbon Nanotube Microarchitectures by Strain-Engineered Chemical Vapor Deposition

High-throughput fabrication of microstructured surfaces with multi-directional, re-entrant, or otherwise curved features is becoming increasingly important for applications such as phase change heat transfer, adhesive gripping, and control of electromagnetic waves. Toward this goal, curved microstructures of aligned carbon nanotubes (CNTs) can be fabricated by engineered variation of the CNT growth rate within each microstructure, for example by patterning of the CNT growth catalyst partially upon a layer which retards the CNT growth rate. This study develops a finite-element simulation framework for predictive synthesis of complex CNT microarchitectures by this strain-engineered growth process. The simulation is informed by parametric measurements of the CNT growth kinetics, and the anisotropic mechanical properties of the CNTs, and predicts the shape of CNT microstructures with impressive fidelity. Moreover, the simulation calculates the internal stress distribution that results from extreme deformation of the CNT structures during growth, and shows that delamination of the interface between the differentially growing segments occurs at a critical shear stress. Guided by these insights, experiments are performed to study the time- and geometry-depended stress development, and it is demonstrated that corrugating the interface between the segments of each microstructure mitigates the interface failure. This study presents a methodology for 3D microstructure design based on "pixels" that prescribe directionality to the resulting microstructure, and show that this framework enables the predictive synthesis of more complex architectures including twisted and truss-like forms.

Light-trapping for room temperature Bose-Einstein condensation in InGaAs quantum wells

We demonstrate the possibility of room-temperature, thermal equilibrium Bose-Einstein condensation (BEC) of exciton-polaritons in a multiple quantum well (QW) system composed of InGaAs quantum wells surrounded by InP barriers, allowing for the emission of light near telecommunication wavelengths. The QWs are embedded in a cavity consisting of double slanted pore (SP2) photonic crystals composed of InP. We consider exciton-polaritons that result from the strong coupling between the multiple quantum well excitons and photons in the lowest planar guided mode within the photonic band gap (PBG) of the photonic crystal cavity. The collective coupling of three QWs results in a vacuum Rabi splitting of 3% of the bare exciton recombination energy. Due to the full three-dimensional PBG exhibited by the SP2 photonic crystal (16% gap to mid-gap frequency ratio), the radiative decay of polaritons is eliminated in all directions. Due to the short exciton-phonon scattering time in InGaAs quantum wells of 0.5 ps and the exciton non-radiative decay time of 200 ps at room temperature, polaritons can achieve thermal equilibrium with the host lattice to form an equilibrium BEC. Using a SP2 photonic crystal with a lattice constant of a = 516 nm, a unit cell height of 2a=730nm and a pore radius of 0.305a = 157 nm, light in the lowest planar guided mode is strongly localized in the central slab layer. The central slab layer consists of 3 nm InGaAs quantum wells with 7 nm InP barriers, in which excitons have a recombination energy of 0.944 eV, a binding energy of 7 meV and a Bohr radius of aB = 10 nm. We take the exciton recombination energy to be detuned 35 meV above the lowest guided photonic mode so that an exciton-polariton has a photonic fraction of approximately 97% per QW. This increases the energy range of small-effective-mass photonlike states and increases the critical temperature for the onset of a Bose-Einstein condensate. With three quantum wells in the central slab layer, the strong light confinement results in light-matter coupling strength of ℏΩ = 13.7 meV. Assuming an exciton density per QW of (15aB)^-2, well below the saturation density, in a 2-D box-trap with a side length of 10 to 500 µm, we predict thermal equilibrium Bose-Einstein condensation well above room temperature.

Control of radiation angle by introducing symmetric end structure to oblique waveguide in three-dimensional photonic crystal

We investigate the radiation angle of an oblique waveguide in a stripe-stacked three-dimensional photonic crystal. We show that the output-light is radiated in a different direction from the oblique waveguide direction. Moreover, the radiation polar angle varies from 30° to 50° depending on the frequency. To inhibit the frequency dependence and obtain vertical radiation, we introduced a symmetric structure at the end of the waveguide. As a result of cancellation of the in-plane asymmetric wavenumber, the radiation polar angle is less than 6° from the surface-normal direction and does not depend on frequency.

Preparation of three-dimensional ordered macroporous C60 and its application in electrochemical sensors

Three-dimensional ordered macroporous (3DOM) materials of C₆₀ were prepared on gold surfaces by using colloidal crystals as templates.

Nonionic amphiphile nanoarchitectonics: self-assembly into micelles and lyotropic liquid crystals

Amphiphiles, molecules that possess both hydrophilic and hydrophobic moieties, are architecturally simple molecules that can spontaneously self-assemble into complex hierarchical structures from lower to higher dimensions either in the bulk phase or at an interface. Recent developments in multifunctional nanostructure design using the advanced concept of nanoarchitectonics utilize this simple process of assembly. Amphiphilic self-assemblies involving lipids or proteins mimic the structure of biological systems, thus highlighting the necessity of a fundamental physical understanding of amphiphilic self-assembly towards a realization of the complex mechanisms operating in nature. Herein, we describe self-assembled microstructures of biocompatible and biodegradable tetraglycerol lauryl ether (C12G4) nonionic surfactant in an aqueous solvent system. Temperature-composition analyses of equilibrium phases identified by using small-angle x-ray scattering (SAXS) provide strong evidence of various spontaneously self-assembled mesostructures, such as normal micelles (Wm), hexagonal liquid crystal (H1), and reverse micelles (Om). In contrast to conventional poly(oxyethylene) nonionic surfactants, C12G4 did not exhibit the clouding phenomenon at higher temperatures (phase separation was not observed up to 100 °C), demonstrating the greater thermal stability of the self-assembled mesophases. Generalized indirect Fourier transformation (GIFT) evaluation of the SAXS data confirmed the formation of core-shell-type spherical micelles with a maximum dimension ca. 8.7 nm. The shape and size of the C12G4 micelles remained apparently unchanged over a wide range of concentrations (up to 20%), but intermicellar interactions increased and could be described by the Percus-Yevick (PY) theory (after Carnahan and Starling), which provides a very accurate analytical expression for the osmotic pressure of a monodisperse hard sphere.

Structural color painting by rubbing particle powder

Structural colors originate from purely physical structures. Scientists have been inspired to mimic the structures found in nature, the realization of these structures still presents a great challenge. We have recently introduced unidirectional rubbing of a dry particle powder on a rubbery surface as a quick, highly reproducible means to fabricate a single crystal monolayer assembly of particles over an unlimited area. This study extends the particle-rubbing process to a novel fine-art painting, structural color painting (SCP). SCP is based on structural coloring with varying iridescence according to the crystal orientation, as controlled by the rubbing direction. This painting technique can be applied on curved surfaces, which enriches the objects to be painted and helps the painter mimic the structures found in nature. It also allows for quick fabrication of complicated particle-assembly patterns, which enables replication of paintings.

The conquest of middle-earth: combining top-down and bottom-up nanofabrication for constructing nanoparticle based devices

The development of top-down nanofabrication techniques has opened many possibilities for the design and realization of complex devices based on single molecule phenomena such as e.g. single molecule electronic devices. These impressive achievements have been complemented by the fundamental understanding of self-assembly phenomena, leading to bottom-up strategies to obtain hybrid nanomaterials that can be used as building blocks for more complex structures. In this feature article we highlight some relevant published work as well as present new experimental results, illustrating the versatility of self-assembly methods combined with top-down fabrication techniques for solving relevant challenges in modern nanotechnology. We present recent developments on the use of hierarchical self-assembly methods to bridge the gap between sub-nanometer and micrometer length scales. By the use of non-covalent self-assembly methods, we show that we are able to control the positioning of nanoparticles on surfaces, and to address the deterministic assembly of nano-devices with potential applications in plasmonic sensing and single-molecule electronics experiments.

Three-dimensional photonic crystals created by single-step multi-directional plasma etching

We fabricate 3D photonic nanostructures by simultaneous multi-directional plasma etching. This simple and flexible method is enabled by controlling the ion-sheath in reactive-ion-etching equipment. We realize 3D photonic crystals on single-crystalline silicon wafers and show high reflectance (>95%) and low transmittance (<-15dB) at optical communication wavelengths, suggesting the formation of a complete photonic bandgap. Moreover, our method simply demonstrates Si-based 3D photonic crystals that show the photonic bandgap effect in a shorter wavelength range around 0.6 μm, where further fine structures are required.

Electron beam lithography on irregular surfaces using an evaporated resist

An electron beam resist is typically applied by spin-coating, which cannot be reliably applied on nonplanar, irregular, or fragile substrates. Here we demonstrate that the popular negative electron beam resist polystyrene can be coated by thermal evaporation. A high resolution of 30 nm half-pitch was achieved using the evaporated resist. As a proof of concept of patterning on irregular surfaces, we fabricated nanostructures on the AFM cantilever and the optical fiber. Although an ice (H2O) resist has also been recently demonstrated as being capable of nanopatterning on irregular and fragile substrates, it requires specially designed accessories mounted inside a SEM chamber, whereas our process works with any thermal evaporator and is thus simpler and much more accessible. Nanofabrication on nonplanar surfaces may find applications in fields such as (AFM) tip-enhanced Raman spectroscopy for chemical analysis and lab-on-fiber technology.

Rapid and low-cost prototyping of 3D nanostructures with multi-layer hydrogen silsesquioxane scaffolds

A layer-by-layer (LBL) method can generate or approximate any three-dimensional (3D) structure, and has been the approach for the manufacturing of complementary metal-oxide-semiconductor (CMOS) devices. However, its high cost precludes the fabrication of anything other than CMOS-compatible devices, and general 3D nanostructures have been difficult to prototype in academia and small businesses, due to the lack of expensive facility and state-of-the-art tools. It is proposed and demonstrated that a novel process that can rapidly fabricate high-resolution three-dimensional (3D) nanostructures at low cost, without requiring specialized equipment. An individual layer is realized through electron-beam lithography patterning of hydrogen silsesquioxane (HSQ) resist, followed by planarization via spinning SU-8 resist and etch-back. A 4-layer silicon inverse woodpile photonic crystal with a period of 650 nm and a 7-layer HSQ scaffold with a period of 300 nm are demonstrated. This process provides a versatile and accessible solution to the fabrication of highly complex 3D nanostructures.

Isotropic band gaps and freeform waveguides observed in hyperuniform disordered photonic solids

Recently, disordered photonic media and random textured surfaces have attracted increasing attention as strong light diffusers with broadband and wide-angle properties. We report the experimental realization of an isotropic complete photonic band gap (PBG) in a 2D disordered dielectric structure. This structure is designed by a constrained optimization method, which combines advantages of both isotropy due to disorder and controlled scattering properties due to low-density fluctuations (hyperuniformity) and uniform local topology. Our experiments use a modular design composed of Al2O3 walls and cylinders arranged in a hyperuniform disordered network. We observe a complete PBG in the microwave region, in good agreement with theoretical simulations, and show that the intrinsic isotropy of this unique class of PBG materials enables remarkable design freedom, including the realization of waveguides with arbitrary bending angles impossible in photonic crystals. This experimental verification of a complete PBG and realization of functional defects in this unique class of materials demonstrate their potential as building blocks for precise manipulation of photons in planar optical microcircuits and has implications for disordered acoustic and electronic band gap materials.

Titania woodpiles with complete three-dimensional photonic bandgaps in the visible

Titania woodpile photonic crystals are fabricated by a combination of stimulated-emission depletion direct laser writing and a novel titania double-inversion procedure. The procedure relies on atomic-layer deposition, which is also used to fine-tune the template geometry to maximize the gapsize. Angle- and polarization-resolved transmittance spectroscopy and a comparison with theory provide evidence for the first complete photonic bandgap in the visible.

Nanocavities at the surface of three-dimensional photonic crystals

We investigate nanocavities at the surface of three-dimensional (3D) photonic crystals, where the polarization-independent surface-mode gap can be utilized. We consider the formation of various nanocavities by introducing artificial defects utilizing the 3D structures around the surface and discuss the possibilities for increasing the Q-factors of the surface nanocavities with TE-like polarization based on the advanced designs of donor-type defects. We also introduce the design of acceptor-type defects and show that TM-like nanocavities are obtained. We then fabricate the designed nanocavities and examine their resonant characteristics; we successfully demonstrate TE-like nanocavities with Q-factors of ~40,000, which is four-times higher than previous surface cavities and as high as that of the cavities embedded inside 3D photonic crystals. TM-like nanocavities with Q-factors of ~22,000 are also demonstrated for the first time.

Free-standing mechanical and photonic nanostructures in single-crystal diamond

A variety of nanoscale photonic, mechanical, electronic, and optoelectronic devices require scalable thin film fabrication. Typically, the device layer is defined by thin film deposition on a substrate of a different material, and optical or electrical isolation is provided by the material properties of the substrate or by removal of the substrate. For a number of materials this planar approach is not feasible, and new fabrication techniques are required to realize complex nanoscale devices. Here, we report a three-dimensional fabrication technique based on anisotropic plasma etching at an oblique angle to the sample surface. As a proof of concept, this angled-etching methodology is used to fabricate free-standing nanoscale components in bulk single-crystal diamond, including nanobeam mechanical resonators, optical waveguides, and photonic crystal and microdisk cavities. Potential applications of the fabricated prototypes range from classical and quantum photonic devices to nanomechanical-based sensors and actuators.

Three-dimensional photonic crystals by large-area membrane stacking

We designed and analyzed a "mesh-stack" three-dimensional photonic crystal of a 12.4% bandgap with a dielectric constant ratio of 12 : 1. The mesh-stack consists of four offset identical square-lattice air-hole patterned membranes in each vertical period that is equal to the in-plane period of the square lattice. This design is fully compatible with the membrane-stacking fabrication method, which is based on alignment and stacking of large-area single-crystal membranes containing engineered defects. A bandgap greater than 10% is preserved as long as the membranes are subjected to in-plane misalignment less than 3% of the square period. By introducing a linear defect with a nonsymmorphic symmetry into the mesh-stack, we achieved a single-mode waveguide over a wide bandwidth.

Micro-/nanostructured mechanical metamaterials

Mechanical properties of materials have long been one of the most fundamental and studied areas of materials science for a myriad of applications. Recently, mechanical metamaterials have been shown to possess extraordinary effective properties, such as negative dynamic modulus and/or density, phononic bandgaps, superior thermoelectric properties, and high specific energy absorption. To obtain such materials on appropriate length scales to enable novel mechanical devices, it is often necessary to effectively design and fabricate micro-/nano- structured materials. In this Review, various aspects of the micro-/nano-structured materials as mechanical metamaterials, potential tools for their multidimensional fabrication, and selected methods for their structural and performance characterization are described, as well as some prospects for the future developments in this exciting and emerging field.

Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method

A method for fabrication of three-dimensional (3D) silicon nanostructures based on selective formation of porous silicon using ion beam irradiation of bulk p-type silicon followed by electrochemical etching is shown. It opens a route towards the fabrication of two-dimensional (2D) and 3D silicon-based photonic crystals with high flexibility and industrial compatibility. In this work, we present the fabrication of 2D photonic lattice and photonic slab structures and propose a process for the fabrication of 3D woodpile photonic crystals based on this approach. Simulated results of photonic band structures for the fabricated 2D photonic crystals show the presence of TE or TM gap in mid-infrared range.

Pumping-power-dependent photoluminescence angular distribution from an opal photonic crystal composed of monodisperse Eu3+/SiO2 core/shell nanospheres

High quality opal photonic crystals (PhCs) were successfully fabricated by self-assembling of monodisperse Eu(3+)/SiO(2) core/shell nanospheres. Angular resolved photoluminescence (PL) spectra of a PhC sample were measured with different pumping powers, and its PL emission strongly depended on spectroscopic position of the photonic stop band and the optical pumping power. Suppression of the PL occurred in the directions where the emission lines aligned with the center of the photonic stop band. Suppression and enhancement of the PL were observed at low- and high-pumping powers, respectively, in the directions where the emission lines were located at the edges of the photonic stop band. When pumping power exceeded 6 µJ/pulse, a super-linear dependence was found between the pumping power and PL intensity. The dramatic enhancement of PL was attributed to the amplification of spontaneous emission resulted from the creation of large population inversion and the slow group velocity of the emitted light inside the PhC. The opal PhC provided highly angular-selective quasi-monochromatic PL output, which can be useful for a variety of optical applications.

Centimeter-scale colloidal crystal belts via robust self-assembly strategy

Centimeter-scale poly(acrylic acid-co-DVB80) (PAA) 3D colloidal crystal belts were prepared via a novel robust vertical deposition technique based on negative pressure and curvature substrate of the glass vial. The formation of PAA colloidal crystal belts was investigated. The results indicated that curvature could control the dimension of PAA colloidal crystal belts. Well-controlled negative pressure resulted in rapid fabrication of well-defined PAA colloidal crystal belts. Curvature substrate of glass vial could distribute shrinking stress in the process of drying of colloidal films. Strong hydrogen bonding interactions among carboxyl groups on the surface of PAA colloidal particles was responsible for PAA colloidal crystal belts with closed-packing characteristics.

Waveguiding at the edge of a three-dimensional photonic crystal

We find that electromagnetic waves can be guided at the edge of a three-dimensional photonic crystal in air. When the waveguide is defined by the intersection of two surface planes, the edge modes are associated with the corresponding surface bands. A simple cell counting approach is presented to describe the periodic evolution of the system with interesting interplays among edge, surface, and bulk states.

Three-dimensional power splitter based on self-imaging effect in multimode layer-by-layer photonic crystal waveguides

The self-imaging effect based on symmetrical interference in multimode layer-by-layer photonic crystal waveguides (PhCWs), is numerically studied with finite-difference time-domain simulations. With the properties of twofold images, a kind of three-dimensional (3D) PhCW-based power splitters with an ultracompact size using complete photonic bandgaps is proposed, calculated, and analyzed. The presented structure can be extended for the design of M×N power splitters for 3D photonic integrated circuits applications.

Optical properties of three-dimensional woodpile photonic crystals composed of circular cylinders with planar defect structures

The optical properties of three-dimensional woodpile photonic crystals (PhCs) composed of circular cylinder rods with a planar defect structure at the central layer are theoretically investigated using the parallel finite-difference time-domain method and plane-wave expansion method. Three types of planar defects are introduced into the PhC by alternating respectively the dielectric constant, cylinder diameter, and misalignment of the rods at the defect layer. The transmission spectrum and band diagram of each planar defect structure are systematically studied. The resonance and transmission properties of the defect structures can be characterized by two distinct resonant modes, the defect mode and the band-edge resonant mode, which have been identified by detailed spectrum analysis, calculated mode profiles and field patterns. It is shown that, by modifying the rod diameter or the dielectric constant of materials at the defect layer, the resonant modes can be varied and controlled. Also, by applying dislocation to a layer of dielectric rods, the photonic band edges can be shifted.

Surface modes of three-dimensional photonic crystals constructed using a top-down approach

We have investigated the photonic modes at the surface of three-dimensional photonic crystals fabricated using a top-down approach involving two-step etching at angles of ± 45°. Numerical simulations revealed the properties of these surface modes, including their polarization characteristics and dependence on the surface structure. The formation of surface modes was experimentally demonstrated using an evanescent-coupling method and agreed well with the simulations.

Coupled-wave analysis for photonic-crystal surface-emitting lasers on air holes with arbitrary sidewalls

The coupled-wave theory (CWT) is extended to a photonic crystal structure with arbitrary sidewalls, and a simple, fast, and effective model for the quantitatively analysis of the radiative characteristics of two-dimensional (2D) photonic-crystal surface-emitting lasers (PC-SELs) has been developed. For illustrating complicated coupling effects accurately, sufficient numbers of waves are included in the formulation, by considering their vertical field profiles. The radiation of band-edge modes is analyzed for two in-plane air-hole geometries, in the case of two types of sidewalls: i.e. "tapered case" and "tilted case." The results of CWT analysis agree well with the results of finite-difference time-domain (FDTD) numerical simulation. From the analytical solutions of the CWT, the symmetry properties of the band-edge modes are investigated. In-plane asymmetry of the air holes is crucial for achieving high output power because it causes partial constructive interference. Asymmetric air holes and tilted sidewalls help in inducing in-plane asymmetries. By breaking the symmetries with respect to the two orthogonal symmetric axes of the band-edge modes, the two factors can be tuned independently, so that the radiation power is enhanced while preserving the mode selectivity performance. Finally, top-down reactive ion etching (RIE) approach is suggested for the fabrication of such a structure.

Epitaxial growth of three-dimensionally architectured optoelectronic devices

Optoelectronic devices have long benefited from structuring in multiple dimensions on microscopic length scales. However, preserving crystal epitaxy, a general necessity for good optoelectronic properties, while imparting a complex three-dimensional structure remains a significant challenge. Three-dimensional (3D) photonic crystals are one class of materials where epitaxy of 3D structures would enable new functionalities. Many 3D photonic crystal devices have been proposed, including zero-threshold lasers, low-loss waveguides, high-efficiency light-emitting diodes (LEDs) and solar cells, but have generally not been realized because of material limitations. Exciting concepts in metamaterials, including negative refraction and cloaking, could be made practical using 3D structures that incorporate electrically pumped gain elements to balance the inherent optical loss of such devices. Here we demonstrate the 3D-template-directed epitaxy of group III-V materials, which enables formation of 3D structured optoelectronic devices. We illustrate the power of this technique by fabricating an electrically driven 3D photonic crystal LED.