Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers

Visible light thermo-optic switches using an Nb2O5 waveguide

Visible-light waveguides and thermo-optic switches were fabricated and demonstrated using Nb2O5, a material with a high refractive index in the visible spectrum, to investigate its material properties and switching performance. To the best of our knowledge, this study is the first to explore these characteristics. The thermo-optic coefficient of Nb2O5 was determined to be 2.27 × 10-5 K-1, while the fabricated switch exhibited an extinction ratio of 6.5 dB and a response time of 77 μs. These results suggest that Nb2O5 is a promising material for advancing the miniaturization of visible-light devices.

Foundry-fabricated dual-color nanophotonic neural probes for photostimulation and electrophysiological recording

Significance

Compact tools capable of delivering multicolor optogenetic stimulation to deep tissue targets with sufficient span, spatiotemporal resolution, and optical power remain challenging to realize. Here, we demonstrate foundry-fabricated nanophotonic neural probes for blue and red photostimulation and electrophysiological recording, which use a combination of spatial multiplexing and on-shank wavelength demultiplexing to increase the number of on-shank emitters.

Aim

We demonstrate silicon (Si) photonic neural probes with 26 photonic channels and 26 recording sites, which were fabricated on 200-mm diameter wafers at a commercial Si photonics foundry. Each photonic channel consists of an on-shank demultiplexer and separate grating coupler emitters for blue and red light, for a total of 52 emitters.

Approach

We evaluate neural probe functionality through bench measurements and in vivo experiments by photostimulating through 16 of the available 26 emitter pairs.

Results

We report neural probe electrode impedances, optical transmission, and beam profiles. We validated a packaged neural probe in optogenetic experiments with mice sensitive to blue or red photostimulation.

Conclusions

Our foundry-fabricated nanophotonic neural probe demonstrates dense dual-color emitter integration on a single shank for targeted photostimulation. Given its two emission wavelengths, high emitter density, and long site span, this probe will facilitate experiments involving bidirectional circuit manipulations across both shallow and deep structures simultaneously.

A Single Sub-Millimetric Metasurface-Based Optical Element for Lattice Bessel Beam Excitation Enabling Brain Activity Recordings In Vivo

Bessel beams (BBs) are propagation-invariant optical fields that retain a narrow central intensity profile over longer propagation lengths than Gaussian beams (GBs). Due to this property, they have been adopted in fluorescence-based light sheet microscopy (LSM) to obtain 2D longitudinally-extended light-sheets. Yet, current approaches for generating BB lattices in LSM focus on regular excitation patterns and involve complex and bulky optics, limiting integration capability and versatility. Here, a flexible method is presented to obtain BB-arrays with arbitrary geometries by encoding on a single sub-millimetric surface all the optical transformations required. This method is applied using a single metasurface to encode the generation of a linear array of BBs, avoiding the use of conjugation and focusing optics. With respect to the current strategies, this approach, allowing for the independent design of each beamlet of the array, increases the degrees of freedom while making optimal use of the available light with no rejection, thus facilitating its integration into optical systems. According to this method, we fabricated a metasurface-based optical element for generating a linear BB-array of excitation in an LSM configuration and recorded neuronal activity at cellular resolution from the zebrafish larva brain. Thus, the proposed approach greatly extends the BB-array versatility and the application scenarios.

Comparative autofluorescence analysis of silicon nitride and tantalum pentoxide waveguides at 532 nm

In this paper, we quantitatively compare the autofluorescence of stoichiometric low pressure chemical vapor deposition (LPCVD) silicon nitride and sputtered tantalum pentoxide waveguides at a pump wavelength of 532 nm. Through a direct quantitative characterization of comparable waveguides formed from the two films, we find no observable autofluorescence for tantalum pentoxide waveguides. Our experimental sensitivity is limited by Raman scattering of the pump into our detection band and our measurements indicate that the autofluorescence of the tantalum pentoxide waveguides is more than 600 × smaller than that of silicon nitride waveguides. This finding holds promise for visible technologies such as biosensors and quantum devices that require strong optical pumping and minimal background noise.

Integrated photonic MEMS switch for visible light

Visible-light integrated photonics serve applications inaccessible to conventional (C- and O-band) silicon photonics, including trapped-ion and neutral atom quantum experiments, biophotonics, and displays. Despite demonstrations of increasingly advanced functionalities and levels of integration, the development of low-power, monolithically integrated, visible-light switches and phase shifters remains an outstanding challenge. Here, we demonstrate an integrated photonic, electrostatic MEMS-actuated Mach-Zehnder interferometer optical switch for the visible spectrum. The device operated with an extinction ratio of 7.2 dB and optical loss of 2.5 dB at a wavelength of 540 nm. The measured 10-90% rise (fall) times were 5 (28) µs, and a low static power dissipation of about 0.5 nW was achieved. The dynamic power dissipation at a 30 kHz switching frequency was estimated to be < 70 µW.

Low-NA two-photon lithography patterning of metal/dielectric tapered optical fibers for depth-selective, volumetric optical neural interfaces

Optical neural implants allow neuroscientists to access deep brain regions, enabling to decipher complex patterns of neural activity. In this field, the use of optical fibers is rapidly increasing, and the ability to generate high-quality metal patterns on their non-planar surface would further extend their application. Here, we propose to use alternating metal shielding and dielectric confinement to engineer the mode-division properties of tapered optical fiber neural implants. This is accomplished through an unconventional application of two-photon lithography (TPL), which employs a low-numerical aperture objective to pattern extensive waveguide sections at both low and high curvature radii. The low-NA TPL is used to polymerize a mask of photoresist, while the rest of the taper undergoes wet metal etching. This implies no direct destructive interaction between the laser beam and the metal to be removed, preserving the optical properties of the dielectric waveguide and of the metal coating. The advantages provided by the presented fabrication method, combined with the intrinsic modal properties of the dielectric waveguide, enable the engineering of the light guiding mechanisms, achieving depth-selective light delivery with a high extinction ratio. The device's light emission and collection properties were investigated in quasi-transparent media and highly scattering brain slices, finding that our proposed method facilitates 360° symmetric light collection around the dielectric-confined section with depth resolution. This opens a perspective for the realization of optical neural implants that can interface the implant axis all-around, with low-NA TPL that can also be applied on other types of non-planar surfaces.

Implantable silicon neural probes with nanophotonic phased arrays for single-lobe beam steering

In brain activity mapping with optogenetics, patterned illumination is crucial for targeted neural stimulation. However, due to optical scattering in brain tissue, light-emitting implants are needed to bring patterned illumination to deep brain regions. A promising solution is silicon neural probes with integrated nanophotonic circuits that form tailored beam patterns without lenses. Here we propose neural probes with grating-based light emitters that generate a single steerable beam. The light emitters, optimized for blue or amber light, combine end-fire optical phased arrays with slab gratings to suppress higher-order sidelobes. In vivo experiments in mice demonstrated that the optical phased array provided sufficient power for optogenetic stimulation. While beam steering performance in tissue reveals challenges, including beam broadening from scattering and the need for a wider steering range, this proof-of-concept demonstration illustrates the design principles for realizing compact optical phased arrays capable of continuous single-beam scanning, laying the groundwork for advancing optical phased arrays toward targeted optogenetic stimulation.

A thin film lithium niobate near-infrared platform for multiplexing quantum nodes

Practical quantum networks will require multi-qubit quantum nodes. This in turn will increase the complexity of the photonic circuits needed to control each qubit and require strategies to multiplex memories. Integrated photonics operating at visible to near-infrared (VNIR) wavelength range can provide solutions to these needs. In this work, we realize a VNIR thin-film lithium niobate (TFLN) integrated photonics platform with the key components to meet these requirements, including low-loss couplers (<1 dB/facet), switches (>20 dB extinction), and high-bandwidth electro-optic modulators (>50 GHz). With these devices, we demonstrate high-efficiency and CW-compatible frequency shifting (>50% efficiency at 15 GHz), as well as simultaneous laser amplitude and frequency control. Finally, we highlight an architecture for multiplexing quantum memories and outline how this platform can enable a 2-order of magnitude improvement in entanglement rates over single memory nodes. Our results demonstrate that TFLN can meet the necessary performance and scalability benchmarks to enable large-scale quantum nodes.

Stress-Dependent Optical Extinction in Low-Pressure Chemical Vapor Deposition Silicon Nitride Measured by Nanomechanical Photothermal Sensing

Understanding optical absorption in silicon nitride is crucial for cutting-edge technologies like photonic integrated circuits, nanomechanical photothermal infrared sensing and spectroscopy, and cavity optomechanics. Yet, the origin of its strong dependence on the film deposition and fabrication process is not fully understood. This Letter leverages nanomechanical photothermal sensing to investigate optical extinction κext at a 632.8 nm wavelength in low-pressure chemical vapor deposition (LPCVD) SiN strings across a wide range of deposition-related tensile stresses (200-850 MPa). Measurements reveal a reduction in κext from 103 to 101 ppm with increasing stress, correlated to variations in Si/N content ratio. Within the band-fluctuations framework, this trend indicates an increase of the energy bandgap with the stress, ultimately reducing absorption. Overall, this study showcases the power and simplicity of nanomechanical photothermal sensing for low absorption measurements, offering a sensitive, scattering-free platform for material analysis in nanophotonics and nanomechanics.

Photonic neural probe enabled microendoscopes for light-sheet light-field computational fluorescence brain imaging

Significance

Light-sheet fluorescence microscopy is widely used for high-speed, high-contrast, volumetric imaging. Application of this technique to in vivo brain imaging in non-transparent organisms has been limited by the geometric constraints of conventional light-sheet microscopes, which require orthogonal fluorescence excitation and collection objectives. We have recently demonstrated implantable photonic neural probes that emit addressable light sheets at depth in brain tissue, miniaturizing the excitation optics. Here, we propose a microendoscope consisting of a light-sheet neural probe packaged together with miniaturized fluorescence collection optics based on an image fiber bundle for lensless, light-field, computational fluorescence imaging.

Aim

Foundry-fabricated, silicon-based, light-sheet neural probes can be packaged together with commercially available image fiber bundles to form microendoscopes for light-sheet light-field fluorescence imaging at depth in brain tissue.

Approach

Prototype microendoscopes were developed using light-sheet neural probes with five addressable sheets and image fiber bundles. Fluorescence imaging with the microendoscopes was tested with fluorescent beads suspended in agarose and fixed mouse brain tissue.

Results

Volumetric light-sheet light-field fluorescence imaging was demonstrated using the microendoscopes. Increased imaging depth and enhanced reconstruction accuracy were observed relative to epi-illumination light-field imaging using only a fiber bundle.

Conclusions

Our work offers a solution toward volumetric fluorescence imaging of brain tissue with a compact size and high contrast. The proof-of-concept demonstrations herein illustrate the operating principles and methods of the imaging approach, providing a foundation for future investigations of photonic neural probe enabled microendoscopes for deep-brain fluorescence imaging in vivo.

In vivooptogenetics using a Utah Optrode Array with enhanced light output and spatial selectivity

Objective.Optogenetics allows the manipulation of neural circuitsin vivowith high spatial and temporal precision. However, combining this precision with control over a significant portion of the brain is technologically challenging (especially in larger animal models).Approach.Here, we have developed, optimised, and testedin vivo, the Utah Optrode Array (UOA), an electrically addressable array of optical needles and interstitial sites illuminated by 181μLEDs and used to optogenetically stimulate the brain. The device is specifically designed for non-human primate studies.Main results.Thinning the combinedμLED and needle backplane of the device from 300μm to 230μm improved the efficiency of light delivery to tissue by 80%, allowing lowerμLED drive currents, which improved power management and thermal performance. The spatial selectivity of each site was also improved by integrating an optical interposer to reduce stray light emission. These improvements were achieved using an innovative fabrication method to create an anodically bonded glass/silicon substrate with through-silicon vias etched, forming an optical interposer. Optical modelling was used to demonstrate that the tip structure of the device had a major influence on the illumination pattern. The thermal performance was evaluated through a combination of modelling and experiment, in order to ensure that cortical tissue temperatures did not rise by more than 1 °C. The device was testedin vivoin the visual cortex of macaque expressing ChR2-tdTomato in cortical neurons.Significance.It was shown that the UOA produced the strongest optogenetic response in the region surrounding the needle tips, and that the extent of the optogenetic response matched the predicted illumination profile based on optical modelling-demonstrating the improved spatial selectivity resulting from the optical interposer approach. Furthermore, different needle illumination sites generated different patterns of low-frequency potential activity.

Sub-ppm Nanomechanical Absorption Spectroscopy of Silicon Nitride

Material absorption is a key limitation in nanophotonic systems; however, its characterization is often obscured by scattering and diffraction. Here we show that nanomechanical frequency spectroscopy can be used to characterize material absorption at the parts per million level and use it to characterize the extinction coefficient κ of stoichiometric silicon nitride (Si3N4). Specifically, we track the frequency shift of a high-Q Si3N4 trampoline in response to laser photothermal heating and infer κ from a model including stress relaxation and both conductive and radiative heat transfer. A key insight is the presence of two thermalization time scales: rapid radiative cooling of the Si3N4 film and slow parasitic heating of the Si chip. We infer κ ∼ 0.1-1 ppm for Si3N4 in the 532-1550 nm wavelength range, matching bounds set by waveguide resonators. Our approach is applicable to diverse photonic materials and may offer new insights into their potential.

Implantable photonic neural probes with out-of-plane focusing grating emitters

We have designed, fabricated, and characterized implantable silicon neural probes with nanophotonic grating emitters that focus the emitted light at a specified distance above the surface of the probe for spatially precise optogenetic targeting of neurons. Using the holographic principle, we designed gratings for wavelengths of 488 and 594 nm, targeting the excitation spectra of the optogenetic actuators Channelrhodopsin-2 and Chrimson, respectively. The measured optical emission pattern of these emitters in non-scattering medium and tissue matched well with simulations. To our knowledge, this is the first report of focused spots with the size scale of a neuron soma in brain tissue formed from implantable neural probes.

Development of wafer-scale multifunctional nanophotonic neural probes for brain activity mapping

Optical techniques, such as optogenetic stimulation and functional fluorescence imaging, have been revolutionary for neuroscience by enabling neural circuit analysis with cell-type specificity. To probe deep brain regions, implantable light sources are crucial. Silicon photonics, commonly used for data communications, shows great promise in creating implantable devices with complex optical systems in a compact form factor compatible with high volume manufacturing practices. This article reviews recent developments of wafer-scale multifunctional nanophotonic neural probes. The probes can be realized on 200 or 300 mm wafers in commercial foundries and integrate light emitters for photostimulation, microelectrodes for electrophysiological recording, and microfluidic channels for chemical delivery and sampling. By integrating active optical devices to the probes, denser emitter arrays, enhanced on-chip biosensing, and increased ease of use may be realized. Silicon photonics technology makes possible highly versatile implantable neural probes that can transform neuroscience experiments.

In vivo optogenetics using a Utah Optrode Array with enhanced light output and spatial selectivity

Optogenetics allows manipulation of neural circuits in vivo with high spatial and temporal precision. However, combining this precision with control over a significant portion of the brain is technologically challenging (especially in larger animal models). Here, we have developed, optimised, and tested in vivo, the Utah Optrode Array (UOA), an electrically addressable array of optical needles and interstitial sites illuminated by 181 µLEDs and used to optogenetically stimulate the brain. The device is specifically designed for non-human primate studies. Thinning the combined µLED and needle backplane of the device from 300 µm to 230 µm improved the efficiency of light delivery to tissue by 80%, allowing lower µLED drive currents, which improved power management and thermal performance. The spatial selectivity of each site was also improved by integrating an optical interposer to reduce stray light emission. These improvements were achieved using an innovative fabrication method to create an anodically bonded glass/silicon substrate with through-silicon vias etched, forming an optical interposer. Optical modelling was used to demonstrate that the tip structure of the device had a major influence on the illumination pattern. The thermal performance was evaluated through a combination of modelling and experiment, in order to ensure that cortical tissue temperatures did not rise by more than 1°C. The device was tested in vivo in the visual cortex of macaque expressing ChR2-tdTomato in cortical neurons. It was shown that the strongest optogenetic response occurred in the region surrounding the needle tips, and that the extent of the optogenetic response matched the predicted illumination profile based on optical modelling - demonstrating the improved spatial selectivity resulting from the optical interposer approach. Furthermore, different needle illumination sites generated different patterns of low-frequency potential (LFP) activity.

SiN integrated photonic components in the visible to near-infrared spectral region

Integrated photonics has emerged as one of the most promising platforms for quantum applications. The performances of quantum photonic integrated circuits (QPIC) necessitate a demanding optimization to achieve enhanced properties and tailored characteristics with more stringent requirements with respect to their classical counterparts. In this study, we report on the simulation, fabrication, and characterization of a series of fundamental components for photons manipulation in QPIC based on silicon nitride. These include crossing waveguides, multimode-interferometer-based integrated beam splitters (MMIs), asymmetric integrated Mach-Zehnder interferometers (MZIs) based on MMIs, and micro-ring resonators. Our investigation revolves primarily around the visible to near-infrared spectral region, as these integrated structures are meticulously designed and tailored for optimal operation within this wavelength range. By advancing the development of these elementary building blocks, we aim to pave the way for significant improvements in QPIC in a spectral region only little explored so far.

Biohybrid Photonic Platform for Subcellular Stimulation and Readout of In Vitro Neurons

Targeted manipulation of neural activity via light has become an indispensable tool for gaining insights into the intricate processes governing single neurons and complex neural networks. To shed light onto the underlying interaction mechanisms, it is crucial to achieve precise control of individual neural activity, as well as a spatial read-out resolution on the nanoscale. Here, a versatile photonic platform with subcellular resolution for stimulation and monitoring of in-vitro neurons is demonstrated. Low-loss photonic waveguides are fabricated on glass substrates using nanoimprint lithography and featuring a loss of only -0.9 ± 0.2 dB cm-1 at 489 nm and are combined with optical fiber-based waveguide-access and backside total internal reflection fluorescence microscopy. Neurons are grown on the bio-functionalized photonic chip surface and, expressing the light-sensitive ion channel Channelrhodopsin-2, are stimulated within the evanescent field penetration depth of 57 nm of the biocompatible waveguides. The versatility and cost-efficiency of the platform, along with the possible subcellular resolution, enable tailor-made investigations of neural interaction dynamics with defined spatial control and high throughput.

Absorption and scattering limits of silicon nitride integrated photonics in the visible spectrum

Visible-light photonic integrated circuits (PICs) promise scalability for technologies such as quantum information, biosensing, and scanning displays, yet extending large-scale silicon photonics to shorter wavelengths has been challenging due to the higher losses. Silicon nitride (SiN) has stood out as the leading platform for visible photonics, but the propagation losses strongly depend on the film's deposition and fabrication processes. Current loss measurement techniques cannot accurately distinguish between absorption and surface scattering, making it difficult to identify the dominant loss source and reach the platform's fundamental limit. Here we demonstrate an ultra-low loss, high-confinement SiN platform that approaches the limits of absorption and scattering across the visible spectrum. Leveraging the sensitivity of microresonators to loss, we probe and discriminate each loss contribution with unparalleled sensitivity, and derive their fundamental limits and scaling laws as a function of wavelength, film properties and waveguide parameters. Through the design of the waveguide cross-section, we show how to approach the absorption limit of the platform, and demonstrate the lowest propagation losses in high-confinement SiN to date across the visible spectrum. We envision that our techniques for loss characterization and minimization will contribute to the development of large-scale, dense PICs that redefine the loss limits of integrated platforms across the electromagnetic spectrum.

High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm

Amorphous alumina is highly transparent across the visible spectrum, making it a promising candidate for low-loss waveguiding at short wavelengths. However, previous alumina waveguide demonstrations in the visible region have focused on low- to moderate-confinement waveguides, where the diffuse mode reduces the design flexibility and integration density of photonic integrated circuits. Here, we have developed a high-quality etch mask and a highly selective BCl3 plasma etch, allowing etching of amorphous alumina waveguides up to 800 nm thick. Using this process, we have fabricated waveguides using an alumina film grown by atomic layer deposition (ALD) which are the lowest-loss high-confinement waveguides for blue light to date: we achieve single-mode propagation losses of 0.8 dB/cm at a propagation wavelength of 450 nm.

Implantable photonic neural probes with 3D-printed microfluidics and applications to uncaging

Advances in chip-scale photonic-electronic integration are enabling a new generation of foundry-manufacturable implantable silicon neural probes incorporating nanophotonic waveguides and microelectrodes for optogenetic stimulation and electrophysiological recording in neuroscience research. Further extending neural probe functionalities with integrated microfluidics is a direct approach to achieve neurochemical injection and sampling capabilities. In this work, we use two-photon polymerization 3D printing to integrate microfluidic channels onto photonic neural probes, which include silicon nitride nanophotonic waveguides and grating emitters. The customizability of 3D printing enables a unique geometry of microfluidics that conforms to the shape of each neural probe, enabling integration of microfluidics with a variety of existing neural probes while avoiding the complexities of monolithic microfluidics integration. We demonstrate the photonic and fluidic functionalities of the neural probes via fluorescein injection in agarose gel and photoloysis of caged fluorescein in solution and in fixed brain tissue.

Microcantilever-integrated photonic circuits for broadband laser beam scanning

Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm² areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips.

Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth

Low-loss photonic integrated circuits (PICs) are the key elements in future quantum technologies, nonlinear photonics and neural networks. The low-loss photonic circuits technology targeting C-band application is well established across multi-project wafer (MPW) fabs, whereas near-infrared (NIR) PICs suitable for the state-of-the-art single-photon sources are still underdeveloped. Here, we report the labs-scale process optimization and optical characterization of low-loss tunable photonic integrated circuits for single-photon applications. We demonstrate the lowest propagation losses to the date (as low as 0.55 dB/cm at 925 nm wavelength) in single-mode silicon nitride submicron waveguides (220×550 nm). This performance is achieved due to advanced e-beam lithography and inductively coupled plasma reactive ion etching steps which yields waveguides vertical sidewalls with down to 0.85 nm sidewall roughness. These results provide a chip-scale low-loss PIC platform that could be even further improved with high quality SiO₂ cladding, chemical-mechanical polishing and multistep annealing for extra-strict single-photon applications.

Design of a novel hybrid multimode interferometer operating with both TE and TM polarizations for sensing applications

A novel hybrid multimode interferometer for sensing applications operating with both TE and TM polarizations simultaneously is proposed and numerically demonstrated. The simulations were performed assuming an operating wavelength of 633 nm with the goal of future use as a biosensor, but its applications extend beyond that area and could be adapted for any wavelength or application of interest. By designing the mutimode waveguide core with a low aspect ratio, the confinement characteristics of TE modes and TM modes become very distinct and their interaction with the sample in the sensing area becomes very different as well, resulting in high device sensitivity. In addition, an excitation structure is presented, that allows good control over power distribution between the desired modes while also restricting the power coupled to other undesired modes. This new hybrid TE/TM approach produced a bulk sensitivity per sensor length of 1.798 rad · RIU - 1 · μ m - 1 and a bulk sensitivity per sensor area of 2.140 rad · RIU - 1 · μ m - 2 , which represents a much smaller footprint when compared to other MMI sensors, contributing to a higher level of integration, while also opening possibilities for a new range of MMI devices.

Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators

Integrated electro-optic (EO) modulators are fundamental photonics components with utility in domains ranging from digital communications to quantum information processing. At telecommunication wavelengths, thin-film lithium niobate modulators exhibit state-of-the-art performance in voltage-length product (VπL), optical loss, and EO bandwidth. However, applications in optical imaging, optogenetics, and quantum science generally require devices operating in the visible-to-near-infrared (VNIR) wavelength range. Here, we realize VNIR amplitude and phase modulators featuring VπL's of sub-1 V ⋅ cm, low optical loss, and high bandwidth EO response. Our Mach-Zehnder modulators exhibit a VπL as low as 0.55 V ⋅ cm at 738 nm, on-chip optical loss of ~0.7 dB/cm, and EO bandwidths in excess of 35 GHz. Furthermore, we highlight the opportunities these high-performance modulators offer by demonstrating integrated EO frequency combs operating at VNIR wavelengths, with over 50 lines and tunable spacing, and frequency shifting of pulsed light beyond its intrinsic bandwidth (up to 7x Fourier limit) by an EO shearing method.

Sparse holographic imaging for an integrated augmented reality near-eye display

Diffraction is the main physical effect involved in the imaging process of holographic displays. In the application of near-eye displays, it generates physical limits that constrain the field of view of the devices. In this contribution, we evaluate experimentally an alternative approach for a holographic display based mainly on refraction. This unconventional imaging process, based on sparse aperture imaging, could lead to integrated near-eye displays through retinal projection, with a larger field of view. We introduce for this evaluation an in-house holographic printer that allows the recording of holographic pixel distributions at a microscopic scale. We show how these microholograms can encode angular information that overcomes the diffraction limit and could alleviate the space bandwidth constraint usually associated with conventional display design.

Bidirectional wide-angle waveguide grating antennas with flat-top far-field patterns for optical phased arrays

To build advanced all solid-state LiDAR, optical phased arrays (OPAs) with a large field of view are highly desirable. As a critical building block, a wide-angle waveguide grating antenna is proposed here. Instead of aiming at the elimination of downward radiation of waveguide grating antennas (WGAs) to improve efficiencies, we in turn utilize the downward radiation and double the range of beam steering. In addition to widened field of views, the steered beams in two directions come from a common set of power splitters, phase shifters and antennas, which greatly reduces chip complexity and power consumption, especially for large-scale OPAs. Beam interference and power fluctuation in the far field due to downward emission can be decreased by specially designed SiO₂/Si₃N₄ antireflection coating. The WGA exhibits balanced emissions in both the upward and downward directions, in which the field of view in each direction is more than 90°. The normalized intensity remains almost the same with a small variation of 10% from -39° to 39° for the upward emission and from -42° to 42° for the downward emission. This WGA is featured by a flat-top radiation pattern in far field, high emission efficiency and good tolerance to device fabrication errors. It holds good potential to achieve wide-angle optical phased arrays.

Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform

Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visible light photonic platform on silicon. Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of >60% across a record wavelength span from λ ~ 400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 ± 30 GHz. As an example, a photodetector was integrated with a wavelength-tunable microring in a single chip for on-chip power monitoring.

Optical characterization of deuterated silicon-rich nitride waveguides

Chemical vapor deposition-based growth techniques allow flexible design of complementary metal-oxide semiconductor (CMOS) compatible materials. Here, we report the deuterated silicon-rich nitride films grown using plasma-enhanced chemical vapor deposition. The linear and nonlinear properties of the films are characterized, and we experimentally confirm that the silicon-rich nitride films grown with SiD₄ eliminates Si–H and N–H related absorption. The performance of identical waveguides for films grown with SiH₄ and SiD₄ are compared demonstrating a 2 dB/cm improvement in line with that observed in literature. Waveguides fabricated on the SRN:D film are further shown to possess a nonlinear parameter of 95 W⁻¹ m⁻¹, with the film exhibiting a linear and nonlinear refractive index of 2.46 and 9.8 \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\times$$\end{document}× 10^–18 m²W⁻¹ respectively.

Amorphous-silicon visible-light detector integrated on silicon nitride waveguides

Visible-light integrated photonics is emerging as a promising technology for the realization of optical devices for applications in sensing, quantum information and communications, imaging, and displays. Among the existing photonic platforms, high-index-contrast silicon nitride (Si₃N₄) waveguides offer broadband transparency in the visible spectral range and a high scale of integration. As the complexity of photonic integrated circuits (PICs) increases, on-chip detectors are required to monitor their working point for reconfiguration and stabilization operations. In this Letter, we present a semi-transparent in-line power monitor integrated on Si₃N₄ waveguides that operates in the red-light wavelength range (660 nm). The proposed device exploits the photoconductivity of a hydrogenated amorphous-silicon (a-Si:H) film that is evanescently coupled to an optical waveguide. Experimental results show a responsivity of 30 mA/W, a sensitivity of -45 dBm, and a sub-µs time response. These features enable the use of the proposed photoconductor for high-sensitivity monitoring and control of visible-light Si₃N₄ PICs.

Optical phased array neural probes for beam-steering in brain tissue

Implantable silicon neural probes with integrated nanophotonic waveguides can deliver patterned dynamic illumination into brain tissue at depth. Here, we introduce neural probes with integrated optical phased arrays and demonstrate optical beam steering in vitro. Beam formation in brain tissue is simulated and characterized. The probes are used for optogenetic stimulation and calcium imaging.

Power-efficient silicon nitride thermo-optic phase shifters for visible light

We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phase shifters for blue, green, and yellow wavelengths. The phase shifters operated with low power consumption due to a suspended structure and multi-pass waveguide design. The devices were fabricated on 200-mm silicon wafers using deep ultraviolet lithography as part of an active visible-light integrated photonics platform. The measured power consumption to achieve a π phase shift (averaged over multiple devices) was 0.78, 0.93, 1.09, and 1.20 mW at wavelengths of 445, 488, 532, and 561 nm, respectively. The phase shifters were integrated into Mach-Zehnder interferometer switches, and 10 - 90% rise(fall) times of about 570(590) μs were measured.

Optimization of Silicon Nitride Waveguide Platform for On-Chip Virus Detection

This work presents a rigorous and generic sensitivity analysis of silicon nitride on silicon dioxide strip waveguide for virus detection. In general, by functionalizing the waveguide surface with a specific antibodies layer, we make the optical sensor sensitive only to a particular virus. Unlike conventional virus detection methods such as polymerase chain reaction (PCR), integrated refractive index (RI) optical sensors offer cheap and mass-scale fabrication of compact devices for fast and straightforward detection with high sensitivity and selectivity. Our numerical analysis includes a wide range of wavelengths from visible to mid-infrared. We determined the strip waveguide's single-mode dimensions and the optimum dimensions that maximize the sensitivity to the virus layer attached to its surface at each wavelength using finite difference eigenmode (FDE) solver. We also compared the strip waveguide with the widely used slot waveguide. Our theoretical study shows that silicon nitride strip waveguide working at lower wavelengths is the optimum choice for virus detection as it maximizes both the waveguide sensitivity (Swg) and the figure of merit (FOM) of the sensor. The optimized waveguides are well suited for a range of viruses with different sizes and refractive indices. Balanced Mach-Zehnder interferometer (MZI) sensors were designed using FDE solver and photonic circuit simulator at different wavelengths. The designed sensors show high FOM at λ = 450 nm ranging from 500 RIU-1 up to 1231 RIU-1 with LMZI = 500 µm. Different MZI configurations were also studied and compared. Finally, edge coupling from the fiber to the sensor was designed, showing insertion loss (IL) at λ = 450 nm of 4.1 dB for the design with FOM = 500 RIU-1. The obtained coupling efficiencies are higher than recently proposed fiber couplers.

Multicore fibers with 10 and 16 single-mode cores for the visible spectrum

We report multicore fibers (MCFs) with 10 and 16 linearly distributed cores with single-mode operation in the visible spectrum. The average propagation loss of the cores is 0.06 dB/m at λ = 445 nm and < 0.03 dB/m at wavelengths longer than 488 nm. The low inter-core crosstalk and nearly identical performance of the cores make these MCFs suitable for spatial division multiplexing in the visible spectrum. As a proof-of-concept application, one of the MCFs was coupled to an implantable neural probe to spatially address light-emitting gratings on the probe.

Low-loss broadband bi-layer edge couplers for visible light

Low-loss broadband fiber-to-chip coupling is currently challenging for visible-light photonic-integrated circuits (PICs) that need both high confinement waveguides for high-density integration and a minimum feature size above foundry lithographical limit. Here, we demonstrate bi-layer silicon nitride (SiN) edge couplers that have ≤ 4 dB/facet coupling loss with the Nufern S405-XP fiber over a broad optical wavelength range from 445 to 640 nm. The design uses a thin layer of SiN to expand the mode at the facet and adiabatically transfers the input light into a high-confinement single-mode waveguide (150-nm thick) for routing, while keeping the minimum nominal lithographic feature size at 150 nm. The achieved fiber-to-chip coupling loss is about 3 to 5 dB lower than that of single-layer designs with the same waveguide confinement and minimum feature size limitation.

Hybrid-integrated diode laser in the visible spectral range

Generating visible light with wide tunability and high coherence based on photonic integrated circuits is of high interest for applications in biophotonics, precision metrology, and quantum technology. Here we present, to our knowledge, the first demonstration of a hybrid-integrated diode laser in the visible spectral range. Using an AlGaInP optical amplifier coupled to a low-loss Si₃N₄ feedback circuit based on microring resonators, we obtain a spectral coverage of 10.8 nm around 684.4 nm wavelength with up to 4.8 mW output power. The measured intrinsic linewidth is 2.3±0.2kHz.

Compact solid-state optical phased array beam scanners based on polymeric photonic integrated circuits

Optical phased array (OPA) devices are being actively investigated to develop compact solid-state beam scanners, which are essential in fields such as LiDAR, free-space optical links, biophotonics, etc. Based on the unique nature of perfluorinated polymers, we propose a polymer waveguide OPA with the advantages of low driving power and high optical throughput. Unlike silicon photonic OPAs, the polymer OPAs enable sustainable phase distribution control during beam scanning, which reduces the burden of beamforming. Moreover, by incorporating a tunable wavelength laser comprising a polymer waveguide Bragg reflector, two-dimensional beam scanning is demonstrated, which facilitates the development of laser-integrated polymeric OPA beam scanners.

Integrated Optical Phased Arrays for Beam Forming and Steering

Integrated optical phased arrays can be used for beam shaping and steering with a small footprint, lightweight, high mechanical stability, low price, and high-yield, benefiting from the mature CMOS-compatible fabrication. This paper reviews the development of integrated optical phased arrays in recent years. The principles, building blocks, and configurations of integrated optical phased arrays for beam forming and steering are presented. Various material platforms can be used to build integrated optical phased arrays, e.g., silicon photonics platforms, III/V platforms, and III–V/silicon hybrid platforms. Integrated optical phased arrays can be implemented in the visible, near-infrared, and mid-infrared spectral ranges. The main performance parameters, such as field of view, beamwidth, sidelobe suppression, modulation speed, power consumption, scalability, and so on, are discussed in detail. Some of the typical applications of integrated optical phased arrays, such as free-space communication, light detection and ranging, imaging, and biological sensing, are shown, with future perspectives provided at the end.

Implantable photonic neural probes for light-sheet fluorescence brain imaging

Significance: Light-sheet fluorescence microscopy (LSFM) is a powerful technique for high-speed volumetric functional imaging. However, in typical light-sheet microscopes, the illumination and collection optics impose significant constraints upon the imaging of non-transparent brain tissues. We demonstrate that these constraints can be surmounted using a new class of implantable photonic neural probes. Aim: Mass manufacturable, silicon-based light-sheet photonic neural probes can generate planar patterned illumination at arbitrary depths in brain tissues without any additional micro-optic components. Approach: We develop implantable photonic neural probes that generate light sheets in tissue. The probes were fabricated in a photonics foundry on 200-mm-diameter silicon wafers. The light sheets were characterized in fluorescein and in free space. The probe-enabled imaging approach was tested in fixed, in vitro, and in vivo mouse brain tissues. Imaging tests were also performed using fluorescent beads suspended in agarose. Results: The probes had 5 to 10 addressable sheets and average sheet thicknesses < 16    μ m for propagation distances up to 300    μ m in free space. Imaging areas were as large as ≈ 240    μ m × 490    μ m in brain tissue. Image contrast was enhanced relative to epifluorescence microscopy. Conclusions: The neural probes can lead to new variants of LSFM for deep brain imaging and experiments in freely moving animals.

Silicon nitride PIC-based multi-color laser engines for life science applications

We implement a multi-color laser engine with silicon nitride photonic integrated circuit technology, that combines four fluorophore excitation wavelengths (405 nm, 488 nm, 561 nm, 640 nm) and splits them with variable attenuation among two output fibers used for different microscope imaging modalities. With the help of photonic integrated circuit technology, the volume of the multi-color laser engine's optics is reduced by two orders of magnitude compared to its commercially available discrete optics counterpart. Light multiplexing is implemented by means of a directional coupler based device and variable optical attenuation as well as fiber switching with thermally actuated Mach-Zehnder interferometers. Total insertion losses from lasers to output fibers are in the order of 6 dB at 488 nm, 561 nm, and 640 nm. Higher insertion losses at 405 nm can be further improved on. In addition to the system level results, spectrally resolved performance has been characterized for each of the developed devices.

Detection of SARS-CoV-2 DNA Targets Using Femtoliter Optofluidic Waveguides

Chip-scale SARS-CoV-2 testing was demonstrated using silicon nitride (Si3N4) nanoslot fluidic waveguides to detect a tagged oligonucleotide with a coronavirus DNA sequence. The slot waveguides were fabricated using complementary metal-oxide-semiconductor (CMOS) fabrication processes, including multiscale lithography and selective reactive ion etching (RIE), forming femtoliter fluidic channels. Finite difference method (FDM) simulation was used to calculate the optical field distribution of the waveguide mode when the waveguide sensor was excited by transverse electric (TE) and transverse magnetic (TM) polarized light. For the TE polarization, a strong optical field was created in the slot region and its field intensity was 14× stronger than the evanescent sensing field from the TM polarization. The nanoscale confinement of the optical sensing field significantly enhanced the light-analyte interaction and improved the optical sensitivity. The sensitivity enhancement was experimentally demonstrated by measuring the polarization-dependent fluorescence emission from the tagged oligonucleotide. The photonic chips consisting of femtoliter Si3N4 waveguides provide a low-cost and high throughput platform for real-time virus identification, which is critical for point-of-care (PoC) diagnostic applications.

Integrated Neurophotonics: Toward Dense Volumetric Interrogation of Brain Circuit Activity-at Depth and in Real Time

We propose a new paradigm for dense functional imaging of brain activity to surmount the limitations of present methodologies. We term this approach "integrated neurophotonics"; it combines recent advances in microchip-based integrated photonic and electronic circuitry with those from optogenetics. This approach has the potential to enable lens-less functional imaging from within the brain itself to achieve dense, large-scale stimulation and recording of brain activity with cellular resolution at arbitrary depths. We perform a computational study of several prototype 3D architectures for implantable probe-array modules that are designed to provide fast and dense single-cell resolution (e.g., within a 1-mm3 volume of mouse cortex comprising ∼100,000 neurons). We describe progress toward realizing integrated neurophotonic imaging modules, which can be produced en masse with current semiconductor foundry protocols for chip manufacturing. Implantation of multiple modules can cover extended brain regions.