Sheil R, Perng YC, Mars J, Cho J, Dunn B, Toney MF, Chang JP. Synthesis and Crystallization of Atomic Layer Deposition β-Eucryptite LiAlSiO
4 Thin-Film Solid Electrolytes.
ACS Appl Mater Interfaces 2020;
12:56935-56942. [PMID:
33314924 DOI:
10.1021/acsami.0c11614]
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Abstract
Atomic layer deposition (ALD) was used to control the stoichiometry of thin lithium aluminosilicate films, thereby enabling crystallization into the ion-conducting β-eucryptite LiAlSiO4 phase. The rapid thermal annealed ALD film developed a well-defined epitaxial relationship to the silicon substrate: β-LiAlSiO4 (12̅10)||Si (100) and β-LiAlSiO4 (101̅0)||Si (001). The extrapolated room temperature ionic conductivity was found to be 1.2 × 10-7 S/cm in the [12̅10] direction. Because of the unique 1-D channel along the c axis of β-LiAlSiO4, the epitaxial thin film has the potential to facilitate ionic transport if oriented with the c axis normal to the electrode surface, making it a promising electrolyte material for three-dimensional lithium-ion microbatteries.
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