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Park YC, Shim HR, Jeong K, Im SG. A Solvent-Free, Thermally Curable Low-Temperature Organic Planarization Layer for Thin Film Encapsulation. Small 2023; 19:e2206090. [PMID: 36541730 DOI: 10.1002/smll.202206090] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/04/2022] [Revised: 11/28/2022] [Indexed: 06/17/2023]
Abstract
Thin film encapsulation (TFE) is an essential component to ensure reliable operation of environmentally susceptible organic light-emitting diode-based display. In order to integrate defect-free TFE on display with complex surface structures, additional planarization layer is imperative to planarize the surface topography. The thickness of conventional planarization layer is as high as tens of µm, but the thickness must be reduced substantially to minimize the light leakage in smaller devices such as micro light-emitting diodes. In this study, a thin-less than 2 µm-planarization is achieved via solvent-free process, initiated chemical vapor deposition (iCVD). By adapting copolymer from two soft, but curable monomers, glycidyl acrylate (GA) and 2-(dimethylamino)ethyl methacrylate, excellent planarization performance is achieved on various nano-grating patterns. With only 1.5 µm-thick iCVD planarization layer, a 600 nm-deep trench polyurethane acrylate pattern is flattened completely. The TFE fabricated on planarized pattern exhibits excellent barrier property as fabricated on flat glass substrate, which strongly suggests that iCVD planarization layer can serve as a promising planarization layer to fabricate TFE on various types of complicated device surfaces.
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Affiliation(s)
- Yong Cheon Park
- Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
| | - Hye Rin Shim
- Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
| | - Kihoon Jeong
- Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
| | - Sung Gap Im
- Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
- KAIST Institute for NanoCentury (KINC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea
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2
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Sohn S, Kim S, Shim JW, Jung SK, Jung S. Printed Organic Light-Emitting Diodes on Fabric with Roll-to-Roll Sputtered ITO Anode and Poly(vinyl alcohol) Planarization Layer. ACS Appl Mater Interfaces 2021; 13:28521-28528. [PMID: 34105342 DOI: 10.1021/acsami.1c02681] [Citation(s) in RCA: 6] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
Electronic textiles, which are a combination of fabrics and electronics, can help realize wearable electronic devices by changing the rigidity of these textiles. We demonstrate organic light-emitting diodes (OLEDs) by directly printing the emitting material on fabric substrates using the nozzle-printing technique. Printing the emitting material directly on a fabric substrate with a rough surface is difficult. To address this, we introduce a planarization layer by using a synthesized 3.5 wt % poly(vinyl alcohol) (PVA) solution. The sputtered ITO anode with the thermally annealed PVA planarization layer on a fabric substrate achieves a low sheet resistance in the range of 60-80 Ω/sq, whereas the ITO electrode without a PVA layer exhibits high sheet resistance values of 10-25 kΩ/sq. This result is because the thermally annealed PVA layer on the fabric surface has a uniform surface morphology and a water contact angle as high as 96°, thus acting as a protective layer with a waterproofing effect; in contrast, the water is completely absorbed on the rough surface without a PVA layer. The fabric-based OLEDs with a thermally annealed PVA layer exhibit a lower turn-on voltage of 3 V and higher luminance values of 5346 cd/m2 at 8 V compared with the devices without a PVA layer (7 V and 3622 cd/m2) at 18 V. These fabric-based OLEDs with a PVA planarization layer can be produced by the nozzle-printing process and can achieve selective patterning as well as direct printing of the emitting material and ITO sputtering on a fabric substrate; furthermore, they emit well even when it bent into a circle with a radius of 1 cm.
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Affiliation(s)
- Sunyoung Sohn
- Department of Semiconductor Physics and Electronics, Sangji University, Wonju 26339, Republic of Korea
| | - Seongju Kim
- Department of Mechanical Engineering, Pohang University of Science and Technology, Pohang 37673, Republic of Korea
| | - Jae Won Shim
- School of Electrical Engineering, Korea University, Seoul 02841, Republic of Korea
| | | | - Sungjune Jung
- Department of Mechanical Engineering, Pohang University of Science and Technology, Pohang 37673, Republic of Korea
- Department of Materials Science and Engineering, Pohang University of Science and Technology, Pohang 37673, Republic of Korea
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3
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Kim BS, Won S, Seo J, Jeong SK, Kim C, Kim KS, Kim SH, Cho SM, Kim JH. Embedded Reverse-Offset Printing of Silver Nanowires and Its Application to Double-Stacked Transparent Electrodes with Microscale Patterns. ACS Appl Mater Interfaces 2021; 13:26601-26609. [PMID: 34033467 DOI: 10.1021/acsami.1c04858] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
We propose an embedded reverse-offset printing (EROP) method, which generates silver nanowire (AgNW) transparent electrodes for display applications. The proposed EROP method can solve the two critical issues of microscale pattern formation and surface planarization. The AgNW electrode had a transmittance of 82% at 550 nm, a sheet resistance of 12.2 Ω/sq, and a 3.27 nm smooth surface. We realized the roll-based pattern formation of AgNW on a plastic substrate as small as 10 μm with negligible step differences to facilitate the proposed method. The proposed EROP method also produced a double-stacked AgNW electrode, enabling the simultaneous operation of separately micropatterned devices. To verify the usefulness of EROP, we fabricated an organic light-emitting diode (OLED) device to demonstrate leakage current reduction and efficiency improvement compared with a conventional indium tin oxide (ITO)-based OLED device. The EROP-based OLED showed 38 and 25% higher current efficiencies than an insulator-patterned AgNW OLED and a conventional ITO-based OLED, respectively.
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Affiliation(s)
- Bong Sung Kim
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery & Materials, Daejeon 34103, Republic of Korea
| | - Sejeong Won
- Center for Advanced Meta-Materials (CAMM), Daejeon 34103, Republic of Korea
| | - Jungkook Seo
- Novel Material Research Laboratory, School of Chemical Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea
| | - Sang Kyu Jeong
- Novel Material Research Laboratory, School of Chemical Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea
| | - Chan Kim
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery & Materials, Daejeon 34103, Republic of Korea
- Nanomechatronics, University of Science & Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
| | - Kwang-Seop Kim
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery & Materials, Daejeon 34103, Republic of Korea
- Nanomechatronics, University of Science & Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
| | - Sun Ho Kim
- Post-Silicon Semiconductor Institute, Korea Institute of Science and Technology, Seoul 02792, Republic of Korea
| | - Sung Min Cho
- Novel Material Research Laboratory, School of Chemical Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea
| | - Jae-Hyun Kim
- Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery & Materials, Daejeon 34103, Republic of Korea
- Nanomechatronics, University of Science & Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
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4
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Sprick RS, Bonillo B, Clowes R, Guiglion P, Brownbill NJ, Slater BJ, Blanc F, Zwijnenburg MA, Adams DJ, Cooper AI. Corrigendum: Visible-Light-Driven Hydrogen Evolution Using Planarized Conjugated Polymer Photocatalysts. Angew Chem Int Ed Engl 2018; 57:2520. [PMID: 29485756 DOI: 10.1002/anie.201800571] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
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Deshmukh KD, Matsidik R, Prasad SKK, Chandrasekaran N, Welford A, Connal LA, Liu ACY, Gann E, Thomsen L, Kabra D, Hodgkiss JM, Sommer M, McNeill CR. Impact of Acceptor Fluorination on the Performance of All-Polymer Solar Cells. ACS Appl Mater Interfaces 2018; 10:955-969. [PMID: 29206027 DOI: 10.1021/acsami.7b14582] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Here, we systematically study the effect of fluorination on the performance of all-polymer solar cells by employing a naphthalene diimide (NDI)-based polymer acceptor with thiophene-flanked phenyl co-monomer. Fluorination of the phenyl co-monomer with either two or four fluorine units is used to create a series of acceptor polymers with either no fluorination (PNDITPhT), bifluorination (PNDITF2T), or tetrafluorination (PNDITF4T). In blends with the donor polymer PTB7-Th, fluorination results in an increase in power conversion efficiency from 3.1 to 4.6% despite a decrease in open-circuit voltage from 0.86 V (unfluorinated) to 0.78 V (tetrafluorinated). Countering this decrease in open-circuit voltage is an increase in short-circuit current from 7.7 to 11.7 mA/cm2 as well as an increase in fill factor from 0.45 to 0.53. The origin of the improvement in performance with fluorination is explored using a combination of morphological, photophysical, and charge-transport studies. Interestingly, fluorination is found not to affect the ultrafast charge-generation kinetics, but instead is found to improve charge-collection yield subsequent to charge generation, linked to improved electron mobility and improved phase separation. Fluorination also leads to improved light absorption, with the blue-shifted absorption profile of the fluorinated polymers complementing the absorption profile of the low-band gap PTB7-Th.
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Affiliation(s)
| | | | - Shyamal K K Prasad
- MacDiarmid Institute for Advanced Materials and Nanotechnology, and School of Chemical and Physical Sciences, Victoria University of Wellington , Wellington 6140, New Zealand
| | | | | | - Luke A Connal
- Department of Chemical and Biomolecular Engineering, The University of Melbourne , Melbourne 3010, Victoria, Australia
| | | | - Eliot Gann
- Australian Synchrotron , 800 Blackburn Road, Clayton 3168, Victoria, Australia
| | - Lars Thomsen
- Australian Synchrotron , 800 Blackburn Road, Clayton 3168, Victoria, Australia
| | | | - Justin M Hodgkiss
- MacDiarmid Institute for Advanced Materials and Nanotechnology, and School of Chemical and Physical Sciences, Victoria University of Wellington , Wellington 6140, New Zealand
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Ngororabanga JMV, Du Plessis J, Mama N. Fluorescent Polymer Incorporating Triazolyl Coumarin Units for Cu 2+ Detection via Planarization of Ict-Based Fluorophore. Sensors (Basel) 2017; 17:s17091980. [PMID: 28867764 PMCID: PMC5620599 DOI: 10.3390/s17091980] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/26/2017] [Revised: 07/28/2017] [Accepted: 08/04/2017] [Indexed: 11/16/2022]
Abstract
A novel fluorescent polymer with pendant triazolyl coumarin units was synthesized through radical polymerization. The polymer showed reasonable sensitivity and selectivity towards Cu2+ in acetonitrile in comparison to other tested metal ions with a significant quenching effect on fluorescence and blue shifting in the range of 20 nm. The blue shift was assigned to the conformation changes of the diethylamino group from the coumarin moiety which led to planarization of the triazolyl coumarin units. The possible binding modes for Cu2+ towards the polymer were determined through the comparison of the emission responses of the polymer, starting vinyl monomer and reference compound, and the triazole ring was identified as one of the possible binding sites for Cu2+. The detection limits of the polymer and vinyl monomer towards Cu2+ were determined from fluorescence titration experiments and a higher sensitivity (35 times) was observed for the polymer compared with its starting monomer.
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Affiliation(s)
| | - Jacolien Du Plessis
- Department of Chemistry, Nelson Mandela Metropolitan University, Port Elizabeth 6031, South Africa.
| | - Neliswa Mama
- Department of Chemistry, Nelson Mandela Metropolitan University, Port Elizabeth 6031, South Africa.
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Buijnsters JG, Tsigkourakos M, Hantschel T, Gomes FOV, Nuytten T, Favia P, Bender H, Arstila K, Celis JP, Vandervorst W. Effect of Boron Doping on the Wear Behavior of the Growth and Nucleation Surfaces of Micro- and Nanocrystalline Diamond Films. ACS Appl Mater Interfaces 2016; 8:26381-26391. [PMID: 27595278 DOI: 10.1021/acsami.6b08083] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
B-doped diamond has become the ultimate material for applications in the field of microelectromechanical systems (MEMS), which require both highly wear resistant and electrically conductive diamond films and microstructures. Despite the extensive research of the tribological properties of undoped diamond, to date there is very limited knowledge of the wear properties of highly B-doped diamond. Therefore, in this work a comprehensive investigation of the wear behavior of highly B-doped diamond is presented. Reciprocating sliding tests are performed on micro- and nanocrystalline diamond (MCD, NCD) films with varying B-doping levels and thicknesses. We demonstrate a linear dependency of the wear rate of the different diamond films with the B-doping level. Specifically, the wear rate increases by a factor of 3 between NCD films with 0.6 and 2.8 at. % B-doping levels. This increase in the wear rate can be linked to a 50% decrease in both hardness and elastic modulus of the highly B-doped NCD films, as determined by nanoindentation measurements. Moreover, we show that fine-grained diamond films are more prone to wear. Particularly, NCD films with a 3× smaller grain size but similar B-doping levels exhibit a double wear rate, indicating the crucial role of the grain size on the diamond film wear behavior. On the other hand, MCD films are the most wear-resistant films due to their larger grains and lower B-doping levels. We propose a graphical scheme of the wear behavior which involves planarization and mechanochemically driven amorphization of the surface to describe the wear mechanism of B-doped diamond films. Finally, the wear behavior of the nucleation surface of NCD films is investigated for the first time. In particular, the nucleation surface is shown to be susceptible to higher wear compared to the growth surface due to its higher grain boundary line density.
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Affiliation(s)
- Josephus G Buijnsters
- Department of Precision and Microsystems Engineering, Research Group of Micro and Nano Engineering, Delft University of Technology , Mekelweg 2, 2628 CD Delft, The Netherlands
- Department of Materials Engineering, KU Leuven , Kasteelpark Arenberg 44, B-3001 Leuven, Belgium
| | - Menelaos Tsigkourakos
- Department of Precision and Microsystems Engineering, Research Group of Micro and Nano Engineering, Delft University of Technology , Mekelweg 2, 2628 CD Delft, The Netherlands
- Imec , Kapeldreef 75, B-3001 Leuven, Belgium
- IKS-Department of Physics, KU Leuven , Celestijnenlaan 200D, B-3001 Leuven, Belgium
| | | | - Francis O V Gomes
- Imec , Kapeldreef 75, B-3001 Leuven, Belgium
- IKS-Department of Physics, KU Leuven , Celestijnenlaan 200D, B-3001 Leuven, Belgium
| | | | - Paola Favia
- Imec , Kapeldreef 75, B-3001 Leuven, Belgium
| | - Hugo Bender
- Imec , Kapeldreef 75, B-3001 Leuven, Belgium
| | - Kai Arstila
- Imec , Kapeldreef 75, B-3001 Leuven, Belgium
- Department of Physics, University of Jyväskylä , P.O. Box 35, FI-40014 Jyväskylä, Finland
| | - Jean-Pierre Celis
- Department of Materials Engineering, KU Leuven , Kasteelpark Arenberg 44, B-3001 Leuven, Belgium
| | - Wilfried Vandervorst
- Imec , Kapeldreef 75, B-3001 Leuven, Belgium
- IKS-Department of Physics, KU Leuven , Celestijnenlaan 200D, B-3001 Leuven, Belgium
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8
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Sprick RS, Bonillo B, Clowes R, Guiglion P, Brownbill NJ, Slater BJ, Blanc F, Zwijnenburg MA, Adams DJ, Cooper AI. Visible-Light-Driven Hydrogen Evolution Using Planarized Conjugated Polymer Photocatalysts. Angew Chem Int Ed Engl 2015; 55:1792-6. [PMID: 26696450 PMCID: PMC4755226 DOI: 10.1002/anie.201510542] [Citation(s) in RCA: 303] [Impact Index Per Article: 33.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/13/2015] [Indexed: 11/24/2022]
Abstract
Linear poly(p‐phenylene)s are modestly active UV photocatalysts for hydrogen production in the presence of a sacrificial electron donor. Introduction of planarized fluorene, carbazole, dibenzo[b,d]thiophene or dibenzo[b,d]thiophene sulfone units greatly enhances the H2 evolution rate. The most active dibenzo[b,d]thiophene sulfone co‐polymer has a UV photocatalytic activity that rivals TiO2, but is much more active under visible light. The dibenzo[b,d]thiophene sulfone co‐polymer has an apparent quantum yield of 2.3 % at 420 nm, as compared to 0.1 % for platinized commercial pristine carbon nitride.
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Affiliation(s)
- Reiner Sebastian Sprick
- Department of Chemistry and Centre for Materials Discovery, University of Liverpool, Crown Street, Liverpool, L69 7ZD, UK
| | - Baltasar Bonillo
- Department of Chemistry and Centre for Materials Discovery, University of Liverpool, Crown Street, Liverpool, L69 7ZD, UK
| | - Rob Clowes
- Department of Chemistry and Centre for Materials Discovery, University of Liverpool, Crown Street, Liverpool, L69 7ZD, UK
| | - Pierre Guiglion
- Department of Chemistry, University College London, 20 Gordon Street, London, WC1H 0AJ, UK
| | - Nick J Brownbill
- Department of Chemistry and Centre for Materials Discovery, University of Liverpool, Crown Street, Liverpool, L69 7ZD, UK
| | - Benjamin J Slater
- Department of Chemistry and Centre for Materials Discovery, University of Liverpool, Crown Street, Liverpool, L69 7ZD, UK
| | - Frédéric Blanc
- Department of Chemistry and Centre for Materials Discovery, University of Liverpool, Crown Street, Liverpool, L69 7ZD, UK.,Stephenson Institute for Renewable Energy, University of Liverpool, Crown Street, Liverpool, L69 7ZD, UK
| | - Martijn A Zwijnenburg
- Department of Chemistry, University College London, 20 Gordon Street, London, WC1H 0AJ, UK
| | - Dave J Adams
- Department of Chemistry and Centre for Materials Discovery, University of Liverpool, Crown Street, Liverpool, L69 7ZD, UK.
| | - Andrew I Cooper
- Department of Chemistry and Centre for Materials Discovery, University of Liverpool, Crown Street, Liverpool, L69 7ZD, UK.
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Niesen B, Blondiaux N, Boccard M, Stuckelberger M, Pugin R, Scolan E, Meillaud F, Haug FJ, Hessler-Wyser A, Ballif C. Self-patterned nanoparticle layers for vertical interconnects: application in tandem solar cells. Nano Lett 2014; 14:5085-5091. [PMID: 25102168 DOI: 10.1021/nl501774u] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
We demonstrate self-patterned insulating nanoparticle layers to define local electrical interconnects in thin-film electronic devices. We show this with thin-film silicon tandem solar cells, where we introduce between the two component cells a solution-processed SiO2 nanoparticle layer with local openings to allow for charge transport. Because of its low refractive index, high transparency, and smooth surface, the SiO2 nanoparticle layer acts as an excellent intermediate reflector allowing for efficient light management.
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Affiliation(s)
- Bjoern Niesen
- Photovoltaics and Thin-Film Electronics Laboratory (PV-Lab), Institute of Microengineering, Ecole Polytechnique Fédérale de Lausanne (EPFL) , Rue de la Maladière 71, CH-2000 Neuchâtel, Switzerland
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Murugan NA, Olsen JMH, Kongsted J, Rinkevicius Z, Aidas K, Ågren H. Amyloid Fibril-Induced Structural and Spectral Modifications in the Thioflavin-T Optical Probe. J Phys Chem Lett 2013; 4:70-77. [PMID: 26291214 DOI: 10.1021/jz3018557] [Citation(s) in RCA: 24] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Motivated by future possibilities to design target molecules for fibrils with diagnostic or therapeutic capability related to amyloidosis diseases, we investigate in this work the dielectric nature of amyloid fibril microenvironments in different binding sites using an optical probe, thioflavin-T (THT), which has been used extensively to stain such fibrils. We study the fibril-environment-induced structural and spectral changes of THT at each binding site and compare the results to the fibril-free situation in aqueous solution. All binding sites are found to show a similar effect with respect to the conformational changes of THT; in the presence of the fibril, its molecular geometry tends to become planarized. However, depending on the dielectric nature of the specific binding site, a red shift, blue shift, or no shift in the absorption spectra of THT is predicted. Interestingly, the experimentally measured red shift in the spectra is seen only when THT binds to one of the core or surface-binding sites. It is found that the dielectric nature of the microenvironment in the fibril is strongly nonhomogeneous.
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Affiliation(s)
- N Arul Murugan
- †Division of Theoretical Chemistry and Biology, School of Biotechnology, Royal Institute of Technology, SE-10691 Stockholm, Sweden
| | - Jógvan Magnus Haugaard Olsen
- ‡Department of Physics, Chemistry and Pharmacy, University of Southern Denmark, Campusvej 55, DK-5230 Odense M, Denmark
| | - Jacob Kongsted
- ‡Department of Physics, Chemistry and Pharmacy, University of Southern Denmark, Campusvej 55, DK-5230 Odense M, Denmark
| | - Zilvinas Rinkevicius
- †Division of Theoretical Chemistry and Biology, School of Biotechnology, Royal Institute of Technology, SE-10691 Stockholm, Sweden
| | - Kestutis Aidas
- §Department of General Physics and Spectroscopy, Faculty of Physics, Vilnius University, Sauletekio al. 9, LT-10222 Vilnius, Lithuania
| | - Hans Ågren
- †Division of Theoretical Chemistry and Biology, School of Biotechnology, Royal Institute of Technology, SE-10691 Stockholm, Sweden
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Uddin A, Milaninia K, Chen CH, Theogarajan L. Wafer Scale Integration of CMOS Chips for Biomedical Applications via Self-Aligned Masking. IEEE Trans Compon Packaging Manuf Technol 2011; 1:1996-2004. [PMID: 22400126 PMCID: PMC3293476 DOI: 10.1109/tcpmt.2011.2166395] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/04/2023]
Abstract
This paper presents a novel technique for the integration of small CMOS chips into a large area substrate. A key component of the technique is the CMOS chip based self-aligned masking. This allows for the fabrication of sockets in wafers that are at most 5 µm larger than the chip on each side. The chip and the large area substrate are bonded onto a carrier such that the top surfaces of the two components are flush. The unique features of this technique enable the integration of macroscale components, such as leads and microfluidics. Furthermore, the integration process allows for MEMS micromachining after CMOS die-wafer integration. To demonstrate the capabilities of the proposed technology, a low-power integrated potentiostat chip for biosensing implemented in the AMI 0.5 µm CMOS technology is integrated in a silicon substrate. The horizontal gap and the vertical displacement between the chip and the large area substrate measured after the integration were 4 µm and 0.5 µm, respectively. A number of 104 interconnects are patterned with high-precision alignment. Electrical measurements have shown that the functionality of the chip is not affected by the integration process.
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