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Lapitskaya V, Nikolaev A, Khabarava A, Sadyrin E, Antipov P, Abdulvakhidov K, Aizikovich S, Chizhik S. The Influence of Nitrogen Flow on the Stoichiometric Composition, Structure, Mechanical, and Microtribological Properties of TiN Coatings. Materials (Basel) 2023; 17:120. [PMID: 38203974 PMCID: PMC10779842 DOI: 10.3390/ma17010120] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/27/2023] [Revised: 12/20/2023] [Accepted: 12/22/2023] [Indexed: 01/12/2024]
Abstract
Utilizing reactive DC magnetron sputtering method, TiN coatings were deposited on the silicon substrates at different nitrogen flows and powers. A study of the X-ray phase composition of the coatings was carried out. The stoichiometric composition of the coatings was determined using energy dispersive x-ray spectroscopy. The structure of the surface, cross-section, and thickness of the coatings were determined using scanning electron (SEM) and atomic force microscopy (AFM). A significant change in the surface structure of TiN coatings was established with changes in deposition power and nitrogen flow. SEM images of cross-sections of all coated samples showed that the formation of coatings occurs in the form of a columnar structure with a perpendicular orientation relative to the silicon substrate. The mechanical properties (elastic modulus E and microhardness H) of TiN coatings of the first group demonstrate a maximum at a nitrogen flow of 3 sccm and are 184 ± 11 GPa and 15.7 ± 1.3 GPa, respectively. In the second group, the values of E and H increase due to a decrease in the size of the structural elements of the coating (grains and crystallites). In the third group, E and H decrease. Microtribological tests were carried out in 4 stages: at a constant load, multi-cycle for 10 and 100 cycles, and with increasing load. The coefficient of friction (CoF) and specific volumetric wear ω depend on the roughness, topology, and mechanical properties of the resulting coatings. Fracture toughness was determined using nanoscratch and depends on the mechanical properties of TiN coatings. Within each group, coatings with the best mechanical and microtribological properties were described: in the first group-TiN coating at 3 sccm (with (29.6 ± 0.1) at.% N), in the second group-TiN coating at 2 sccm (with (40.8 ± 0.2) at.% N), and in the third group-TiN coating at 1 sccm (c (37.3 ± 0.2) at.% N).
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Affiliation(s)
- Vasilina Lapitskaya
- Nanoprocesses and Technology Laboratory, A.V. Luikov Heat and Mass Transfer Institute, National Academy of Science of Belarus, 15 P. Brovki str., 220072 Minsk, Belarus; (A.K.); (S.C.)
| | - Andrey Nikolaev
- Research and Education Center “Materials”, Don State Technical University, 1 Gagarin sq., 344003 Rostov-on-Don, Russia; (A.N.); (E.S.); (P.A.); (S.A.)
| | - Anastasiya Khabarava
- Nanoprocesses and Technology Laboratory, A.V. Luikov Heat and Mass Transfer Institute, National Academy of Science of Belarus, 15 P. Brovki str., 220072 Minsk, Belarus; (A.K.); (S.C.)
| | - Evgeniy Sadyrin
- Research and Education Center “Materials”, Don State Technical University, 1 Gagarin sq., 344003 Rostov-on-Don, Russia; (A.N.); (E.S.); (P.A.); (S.A.)
| | - Pavel Antipov
- Research and Education Center “Materials”, Don State Technical University, 1 Gagarin sq., 344003 Rostov-on-Don, Russia; (A.N.); (E.S.); (P.A.); (S.A.)
| | - Kamaludin Abdulvakhidov
- International Research Institute for Smart Materials, Southern Federal University, Sladkova 178/24, 344090 Rostov-on-Don, Russia;
| | - Sergei Aizikovich
- Research and Education Center “Materials”, Don State Technical University, 1 Gagarin sq., 344003 Rostov-on-Don, Russia; (A.N.); (E.S.); (P.A.); (S.A.)
| | - Sergei Chizhik
- Nanoprocesses and Technology Laboratory, A.V. Luikov Heat and Mass Transfer Institute, National Academy of Science of Belarus, 15 P. Brovki str., 220072 Minsk, Belarus; (A.K.); (S.C.)
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