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Xia Q, Zhang Q, Sun S, Hussain F, Zhang C, Zhu X, Meng F, Liu K, Geng H, Xu J, Zan F, Wang P, Gu L, Xia H. Tunnel Intergrowth Li x MnO 2 Nanosheet Arrays as 3D Cathode for High-Performance All-Solid-State Thin Film Lithium Microbatteries. Adv Mater 2021; 33:e2003524. [PMID: 33336535 DOI: 10.1002/adma.202003524] [Citation(s) in RCA: 17] [Impact Index Per Article: 5.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/23/2020] [Revised: 11/08/2020] [Indexed: 06/12/2023]
Abstract
All-solid-state thin film lithium batteries (TFBs) are proposed as the ideal power sources for microelectronic devices. However, the high-temperature (>500 °C) annealing process of cathode films, such as LiCoO2 and LiMn2 O4, restricts the on-chip integration and potential applications of TFBs. Herein, tunnel structured Lix MnO2 nanosheet arrays are fabricated as 3D cathode for TFBs by a facile electrolyte Li+ ion infusion method at very low temperature of 180 °C. Featuring an interesting tunnel intergrowth structure consisting of alternating 1 × 3 and 1 × 2 tunnels, the Lix MnO2 cathode shows high specific capacity with good structural stability between 2.0 and 4.3 V (vs. Li+ /Li). By utilizing the 3D Lix MnO2 cathode, all-solid-state Lix MnO2 /LiPON/Li TFB (3DLMO-TFB) has been successfully constructed with prominent advantages of greatly enriched cathode/electrolyte interface and shortened Li+ diffusion length in the 3D structure. Consequently, the 3DLMO-TFB device exhibits large specific capacity (185 mAh g-1 at 50 mA g-1 ), good rate performance, and excellent cycle performance (81.3% capacity retention after 1000 cycles), outperforming the TFBs using spinel LiMn2 O4 thin film cathodes fabricated at high temperature. Importantly, the low-temperature preparation of high-performance cathode film enables the fabrication of TFBs on various rigid and flexible substrates, which could greatly expand their potential applications in microelectronics.
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Affiliation(s)
- Qiuying Xia
- School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China
- Herbert Gleiter Institute of Nanoscience, Nanjing University of Science and Technology, Nanjing, 210094, China
| | - Qinghua Zhang
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
- Yangtze River Delta Physics Research Center Co. Ltd., Liyang, 213300, China
| | - Shuo Sun
- School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China
- Herbert Gleiter Institute of Nanoscience, Nanjing University of Science and Technology, Nanjing, 210094, China
| | - Fiaz Hussain
- School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China
- Herbert Gleiter Institute of Nanoscience, Nanjing University of Science and Technology, Nanjing, 210094, China
| | - Chunchen Zhang
- National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093, China
| | - Xiaohui Zhu
- School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China
- Herbert Gleiter Institute of Nanoscience, Nanjing University of Science and Technology, Nanjing, 210094, China
| | - Fanqi Meng
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
- School of Physical Sciences, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Kaiming Liu
- School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China
- Herbert Gleiter Institute of Nanoscience, Nanjing University of Science and Technology, Nanjing, 210094, China
| | - Hao Geng
- School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China
- Herbert Gleiter Institute of Nanoscience, Nanjing University of Science and Technology, Nanjing, 210094, China
| | - Jing Xu
- School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China
- Herbert Gleiter Institute of Nanoscience, Nanjing University of Science and Technology, Nanjing, 210094, China
| | - Feng Zan
- School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China
- Herbert Gleiter Institute of Nanoscience, Nanjing University of Science and Technology, Nanjing, 210094, China
| | - Peng Wang
- National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093, China
| | - Lin Gu
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
- School of Physical Sciences, University of Chinese Academy of Sciences, Beijing, 100049, China
- Songshan Lake Materials Laboratory, Dongguan, 523808, China
| | - Hui Xia
- School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China
- Herbert Gleiter Institute of Nanoscience, Nanjing University of Science and Technology, Nanjing, 210094, China
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Riha SC, Koegel AA, Meng X, Kim IS, Cao Y, Pellin MJ, Elam JW, Martinson ABF. Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications. ACS Appl Mater Interfaces 2016; 8:2774-2780. [PMID: 26784956 DOI: 10.1021/acsami.5b11075] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Manganese sulfide (MnS) thin films were synthesized via atomic layer deposition (ALD) using gaseous manganese bis(ethylcyclopentadienyl) and hydrogen sulfide as precursors. At deposition temperatures ≤150 °C phase-pure γ-MnS thin films were deposited, while at temperatures >150 °C, a mixed phase consisting of both γ- and α-MnS resulted. In situ quartz crystal microbalance (QCM) studies validate the self-limiting behavior of both ALD half-reactions and, combined with quadrupole mass spectrometry (QMS), allow the derivation of a self-consistent reaction mechanism. Finally, MnS thin films were deposited on copper foil and tested as a Li-ion battery anode. The MnS coin cells showed exceptional cycle stability and near-theoretical capacity.
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Affiliation(s)
- Shannon C Riha
- Department of Chemistry, University of Wisconsin-Stevens Point , Stevens Point, Wisconsin 54481, United States
| | - Alexandra A Koegel
- Department of Chemistry, University of Wisconsin-Stevens Point , Stevens Point, Wisconsin 54481, United States
| | - Xiangbo Meng
- Energy Systems Division, Argonne National Laboratory , Argonne, Illinois 60439, United States
| | - In Soo Kim
- Materials Science Division, Argonne National Laboratory , Argonne, Illinois 60439, United States
| | - Yanqiang Cao
- Energy Systems Division, Argonne National Laboratory , Argonne, Illinois 60439, United States
| | - Michael J Pellin
- Materials Science Division, Argonne National Laboratory , Argonne, Illinois 60439, United States
| | - Jeffrey W Elam
- Energy Systems Division, Argonne National Laboratory , Argonne, Illinois 60439, United States
| | - Alex B F Martinson
- Materials Science Division, Argonne National Laboratory , Argonne, Illinois 60439, United States
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