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Murataj I, Angelini A, Cara E, Porro S, Beckhoff B, Kayser Y, Hönicke P, Ciesielski R, Gollwitzer C, Soltwisch V, Perez-Murano F, Fernandez-Regulez M, Carignano S, Boarino L, Castellino M, Ferrarese Lupi F. Hybrid Metrology for Nanostructured Optical Metasurfaces. ACS Appl Mater Interfaces 2023; 15:57992-58002. [PMID: 37991460 PMCID: PMC10739581 DOI: 10.1021/acsami.3c13923] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/18/2023] [Revised: 10/23/2023] [Accepted: 11/07/2023] [Indexed: 11/23/2023]
Abstract
Metasurfaces have garnered increasing research interest in recent years due to their remarkable advantages, such as efficient miniaturization and novel functionalities compared to traditional optical elements such as lenses and filters. These advantages have facilitated their rapid commercial deployment. Recent advancements in nanofabrication have enabled the reduction of optical metasurface dimensions to the nanometer scale, expanding their capabilities to cover visible wavelengths. However, the pursuit of large-scale manufacturing of metasurfaces with customizable functions presents challenges in controlling the dimensions and composition of the constituent dielectric materials. To address these challenges, the combination of block copolymer (BCP) self-assembly and sequential infiltration synthesis (SIS), offers an alternative for fabrication of high-resolution dielectric nanostructures with tailored composition and optical functionalities. However, the absence of metrological techniques capable of providing precise and reliable characterization of the refractive index of dielectric nanostructures persists. This study introduces a hybrid metrology strategy that integrates complementary synchrotron-based traceable X-ray techniques to achieve comprehensive material characterization for the determination of the refractive index on the nanoscale. To establish correlations between material functionality and their underlying chemical, compositional and dimensional properties, TiO2 nanostructures model systems were fabricated by SIS of BCPs. The results from synchrotron-based analyses were integrated into physical models, serving as a validation scheme for laboratory-scale measurements to determine effective refractive indices of the nanoscale dielectric materials.
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Affiliation(s)
- Irdi Murataj
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129, Torino, Italy
| | - Angelo Angelini
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
| | - Eleonora Cara
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
| | - Samuele Porro
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129, Torino, Italy
| | - Burkhard Beckhoff
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Yves Kayser
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Philipp Hönicke
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Richard Ciesielski
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Christian Gollwitzer
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | - Victor Soltwisch
- Physikalisch-Technische
Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany
| | | | | | - Stefano Carignano
- ICCUB, Universitat de Barcelona, Carrer Martí i Franquès,
1, 08028, Barcelona, Spain
| | - Luca Boarino
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
| | - Micaela Castellino
- Dipartimento
di Scienza Applicata e Tecnologia, Politecnico
di Torino, Corso Duca degli Abruzzi, 24, 10129, Torino, Italy
| | - Federico Ferrarese Lupi
- Advanced
Materials and Life Science Division, Istituto
Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy
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2
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Rodríguez-Álvarez J, Labarta A, Idrobo JC, Dell'Anna R, Cian A, Giubertoni D, Borrisé X, Guerrero A, Perez-Murano F, Fraile Rodríguez A, Batlle X. Imaging of Antiferroelectric Dark Modes in an Inverted Plasmonic Lattice. ACS Nano 2023; 17:8123-8132. [PMID: 37089111 PMCID: PMC10173685 DOI: 10.1021/acsnano.2c11016] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
Plasmonic lattice nanostructures are of technological interest because of their capacity to manipulate light below the diffraction limit. Here, we present a detailed study of dark and bright modes in the visible and near-infrared energy regime of an inverted plasmonic honeycomb lattice by a combination of Au+ focused ion beam lithography with nanometric resolution, optical and electron spectroscopy, and finite-difference time-domain simulations. The lattice consists of slits carved in a gold thin film, exhibiting hotspots and a set of bright and dark modes. We proposed that some of the dark modes detected by electron energy-loss spectroscopy are caused by antiferroelectric arrangements of the slit polarizations with two times the size of the hexagonal unit cell. The plasmonic resonances take place within the 0.5-2 eV energy range, indicating that they could be suitable for a synergistic coupling with excitons in two-dimensional transition metal dichalcogenides materials or for designing nanoscale sensing platforms based on near-field enhancement over a metallic surface.
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Affiliation(s)
- Javier Rodríguez-Álvarez
- Departament de Física de la Matèria Condensada, Universitat de Barcelona, Barcelona 08028, Spain
- Institut de Nanociència i Nanotecnologia (IN2UB), Universitat de Barcelona, Barcelona 08028, Spain
| | - Amílcar Labarta
- Departament de Física de la Matèria Condensada, Universitat de Barcelona, Barcelona 08028, Spain
- Institut de Nanociència i Nanotecnologia (IN2UB), Universitat de Barcelona, Barcelona 08028, Spain
| | - Juan Carlos Idrobo
- Materials Science and Engineering Department, University of Washington, Seattle, Washington 98195, United States
| | - Rossana Dell'Anna
- Sensors & Devices Center, FBK - Bruno Kessler Foundation, via Sommarive, 18, Povo, TN 38123, Italy
| | - Alessandro Cian
- Sensors & Devices Center, FBK - Bruno Kessler Foundation, via Sommarive, 18, Povo, TN 38123, Italy
| | - Damiano Giubertoni
- Sensors & Devices Center, FBK - Bruno Kessler Foundation, via Sommarive, 18, Povo, TN 38123, Italy
| | - Xavier Borrisé
- Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST, Campus UAB, Bellaterra, Barcelona 08193, Spain
| | - Albert Guerrero
- Institut de Microelectrònica de Barcelona (IMB-CNM, CSIC), Bellaterra 08193, Spain
| | | | - Arantxa Fraile Rodríguez
- Departament de Física de la Matèria Condensada, Universitat de Barcelona, Barcelona 08028, Spain
- Institut de Nanociència i Nanotecnologia (IN2UB), Universitat de Barcelona, Barcelona 08028, Spain
| | - Xavier Batlle
- Departament de Física de la Matèria Condensada, Universitat de Barcelona, Barcelona 08028, Spain
- Institut de Nanociència i Nanotecnologia (IN2UB), Universitat de Barcelona, Barcelona 08028, Spain
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Gottlieb S, Pigard L, Ryu YK, Lorenzoni M, Evangelio L, Fernández-Regúlez M, Rawlings CD, Spieser M, Perez-Murano F, Müller M, Knoll AW. Thermal Imaging of Block Copolymers with Sub-10 nm Resolution. ACS Nano 2021; 15:9005-9016. [PMID: 33938722 DOI: 10.1021/acsnano.1c01820] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Thermal silicon probes have demonstrated their potential to investigate the thermal properties of various materials at high resolution. However, a thorough assessment of the achievable resolution is missing. Here, we present a probe-based thermal-imaging technique capable of providing sub-10 nm lateral resolution at a sub-10 ms pixel rate. We demonstrate the resolution by resolving microphase-separated PS-b-PMMA block copolymers that self-assemble in 11 to 19 nm half-period lamellar structures. We resolve an asymmetry in the heat flux signal at submolecular dimensions and assess the ratio of heat flux into both polymers in various geometries. These observations are quantitatively compared with coarse-grained molecular simulations of energy transport that reveal an enhancement of transport along the macromolecular backbone and a Kapitza resistance at the internal interfaces of the self-assembled structure. This comparison discloses a tip-sample contact radius of a ≈ 4 nm and identifies combinations of enhanced intramolecular transport and Kapitza resistance.
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Affiliation(s)
- Steven Gottlieb
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Louis Pigard
- Institute for Theoretical Physics, Georg-August-University, 37077 Göttingen, Germany
| | - Yu Kyoung Ryu
- IBM Research - Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
| | - Matteo Lorenzoni
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Laura Evangelio
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Marta Fernández-Regúlez
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Colin D Rawlings
- IBM Research - Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
| | - Martin Spieser
- SwissLitho AG, Technoparkstrasse 1, 8805 Zürich, Switzerland
| | - Francesc Perez-Murano
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Carrer dels Tillers s/n, 08193 Bellaterra, Barcelona, Spain
| | - Marcus Müller
- Institute for Theoretical Physics, Georg-August-University, 37077 Göttingen, Germany
| | - Armin W Knoll
- IBM Research - Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
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Perez-Murano F, Martín JI, De Teresa JM. Optical lithography. Nanofabrication 2020. [DOI: 10.1088/978-0-7503-2608-7ch2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022] Open
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5
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Tzanov V, Llobet J, Torres F, Perez-Murano F, Barniol N. Multi-Frequency Resonance Behaviour of a Si FractalNEMS Resonator. Nanomaterials (Basel) 2020; 10:nano10040811. [PMID: 32340340 PMCID: PMC7221872 DOI: 10.3390/nano10040811] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/14/2020] [Revised: 04/01/2020] [Accepted: 04/10/2020] [Indexed: 01/02/2023]
Abstract
Novel Si-based nanosize mechanical resonator has been top-down fabricated. The shape of the resonating body has been numerically derived and consists of seven star-polygons that form a fractal structure. The actual resonator is defined by focused ion-beam implantation on a SOI wafer where its 18 vertices are clamped to nanopillars. The structure is suspended over a 10 μm trench and has width of 12 μm. Its thickness of 0.040 μm is defined by the fabrication process and prescribes Young’s modulus of 76 GPa which is significantly lower than the value of the bulk material. The resonator is excited by the bottom Si-layer and the interferometric characterisation confirms broadband frequency response with quality factors of over 800 for several peaks between 2 MHz and 16 MHz. COMSOL FEM software has been used to vary material properties and residual stress in order to fit the eigenfrequencies of the model with the resonance peaks detected experimentally. Further use of the model shows how the symmetry of the device affects the frequency spectrum. Also, by using the FEM model, the possibility for an electrical read out of the device was tested. The experimental measurements and simulations proved that the device can resonate at many different excitation frequencies allowing multiple operational bands. The size, and the power needed for actuation are comparable with the ones of single beam resonator while the fractal structure allows much larger area for functionalisation.
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Affiliation(s)
- Vassil Tzanov
- Department of Electronics Engineering, Engineering School, Universitat Autonoma de Barcelona (UAB), 08193 Bellaterra, Spain; (F.T.); (N.B.)
- Correspondence:
| | - Jordi Llobet
- International Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, Portugal;
- Institut de Microelectronica de Barcelona (IMB-CNM CSIC), 08193 Bellaterra, Spain;
| | - Francesc Torres
- Department of Electronics Engineering, Engineering School, Universitat Autonoma de Barcelona (UAB), 08193 Bellaterra, Spain; (F.T.); (N.B.)
| | | | - Nuria Barniol
- Department of Electronics Engineering, Engineering School, Universitat Autonoma de Barcelona (UAB), 08193 Bellaterra, Spain; (F.T.); (N.B.)
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Gottlieb S, Fernández-Regúlez M, Lorenzoni M, Evangelio L, Perez-Murano F. Grain-Boundary-Induced Alignment of Block Copolymer Thin Films. Nanomaterials (Basel) 2020; 10:nano10010103. [PMID: 31947950 PMCID: PMC7022512 DOI: 10.3390/nano10010103] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/03/2019] [Revised: 12/30/2019] [Accepted: 12/30/2019] [Indexed: 01/01/2023]
Abstract
We present and discuss the capability of grain boundaries to induce order in block copolymer thin films between horizontally and vertically assembled block copolymer grains. The system we use as a proof of principle is a thermally annealed 23.4 nm full-pitch lamellar Polystyrene-block-polymethylmetacrylate (PS-b-PMMA) di-block copolymer. In this paper, grain-boundary-induced alignment is achieved by the mechanical removal of the neutral brush layer via atomic force microscopy (AFM). The concept is also confirmed by a mask-less e-beam direct writing process. An elongated grain of vertically aligned lamellae is trapped between two grains of horizontally aligned lamellae. This configuration leads to the formation of 90° twist grain boundaries. The features maintain their orientation on a characteristic length scale, which is described by the material's correlation length ξ. As a result of an energy minimization process, the block copolymer domains in the vertically aligned grain orient perpendicularly to the grain boundary. The energy-minimizing feature is the grain boundary itself. The width of the manipulated area (e.g., the horizontally aligned grain) does not represent a critical process parameter.
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8
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Gottlieb S, Kazazis D, Mochi I, Evangelio L, Fernández-Regúlez M, Ekinci Y, Perez-Murano F. Nano-confinement of block copolymers in high accuracy topographical guiding patterns: modelling the emergence of defectivity due to incommensurability. Soft Matter 2018; 14:6799-6808. [PMID: 29998277 DOI: 10.1039/c8sm01045e] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Extreme ultraviolet interference lithography (EUV-IL) is used to manufacture topographical guiding patterns to direct the self-assembly of block copolymers. High-accuracy silicon oxide-like patterns with trenches ranging from 68 nm to 117 nm width are fabricated by exposing a hydrogen silsesquioxane (HSQ) resist layer using EUV-IL. We investigate how the accuracy, the low line width roughness and the low line edge roughness of the resulting patterns allow achieving DSA line/space patterns of a PS-b-PMMA (polystyrene-block-poly methyl methacrylate) block copolymer of 11 nm half-pitch with low defectivity. We conduct an in-depth study of the dependence of the DSA pattern morphology on the trench width and on how the neutral brush covers the guiding pattern. We identify the relation between trench width and the emergence of defects with nanometer precision. Based on these studies, we develop a model that extends available free energy models, which allows us to predict the patterning process window.
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Affiliation(s)
- Steven Gottlieb
- Instituto de Microelectrónica de Barcelona IMB-CNM, CSIC, 08193 Bellaterra, Barcelona, Spain.
| | - Dimitrios Kazazis
- Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, CH-5232 Villigen-PSI, Switzerland
| | - Iacopo Mochi
- Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, CH-5232 Villigen-PSI, Switzerland
| | - Laura Evangelio
- Instituto de Microelectrónica de Barcelona IMB-CNM, CSIC, 08193 Bellaterra, Barcelona, Spain.
| | - Marta Fernández-Regúlez
- Instituto de Microelectrónica de Barcelona IMB-CNM, CSIC, 08193 Bellaterra, Barcelona, Spain.
| | - Yasin Ekinci
- Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, CH-5232 Villigen-PSI, Switzerland
| | - Francesc Perez-Murano
- Instituto de Microelectrónica de Barcelona IMB-CNM, CSIC, 08193 Bellaterra, Barcelona, Spain.
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Moneo A, González-Orive A, Bock S, Fenero M, Herrer IL, Milan DC, Lorenzoni M, Nichols RJ, Cea P, Perez-Murano F, Low PJ, Martin S. Towards molecular electronic devices based on 'all-carbon' wires. Nanoscale 2018; 10:14128-14138. [PMID: 29999063 DOI: 10.1039/c8nr02347f] [Citation(s) in RCA: 27] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/13/2023]
Abstract
Nascent molecular electronic devices based on linear 'all-carbon' wires attached to gold electrodes through robust and reliable C-Au contacts are prepared via efficient in situ sequential cleavage of trimethylsilyl end groups from an oligoyne, Me3Si-(C[triple bond, length as m-dash]C)4-SiMe3 (1). In the first stage of the fabrication process, removal of one trimethylsilyl (TMS) group in the presence of a gold substrate, which ultimately serves as the bottom electrode, using a stoichiometric fluoride-driven process gives a highly-ordered monolayer, Au|C[triple bond, length as m-dash]CC[triple bond, length as m-dash]CC[triple bond, length as m-dash]CC[triple bond, length as m-dash]CSiMe3 (Au|C8SiMe3). In the second stage, treatment of Au|C8SiMe3 with excess fluoride results in removal of the remaining TMS protecting group to give a modified monolayer Au|C[triple bond, length as m-dash]CC[triple bond, length as m-dash]CC[triple bond, length as m-dash]CC[triple bond, length as m-dash]CH (Au|C8H). The reactive terminal C[triple bond, length as m-dash]C-H moiety in Au|C8H can be modified by 'click' reactions with (azidomethyl)ferrocene (N3CH2Fc) to introduce a redox probe, to give Au|C6C2N3HCH2Fc. Alternatively, incubation of the modified gold substrate supported monolayer Au|C8H in a solution of gold nanoparticles (GNPs), results in covalent attachment of GNPs on top of the film via a second alkynyl carbon-Au σ-bond, to give structures Au|C8|GNP in which the monolayer of linear, 'all-carbon' C8 chains is sandwiched between two macroscopic gold contacts. The covalent carbon-surface bond as well as the covalent attachment of the metal particles to the monolayer by cleavage of the alkyne C-H bond is confirmed by surface-enhanced Raman scattering (SERS). The integrity of the carbon chain in both Au|C6C2N3HCH2Fc systems and after formation of the gold top-contact electrode in Au|C8|GNP is demonstrated through electrochemical methods. The electrical properties of these nascent metal-monolayer-metal devices Au|C8|GNP featuring 'all-carbon' molecular wires were characterised by sigmoidal I-V curves, indicative of well-behaved junctions free of short circuits.
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Affiliation(s)
- Andrea Moneo
- Departamento de Química Física, Facultad de Ciencias, Universidad de Zaragoza, 50009, Spain.
| | - Alejandro González-Orive
- Departamento de Química Física, Facultad de Ciencias, Universidad de Zaragoza, 50009, Spain. and Instituto de Nanociencia de Aragón (INA) and Laboratorio de Microscopías Avanzadas (LMA), edificio i+d Campus Rio Ebro, Universidad de Zaragoza, C/Mariano Esquillor, s/n, 50018 Zaragoza, Spain
| | - Sören Bock
- School of Molecular Sciences, University of Western Australia, 35 Stirling Highway, Crawley, WA 6009, Australia
| | - Marta Fenero
- Departamento de Química Física, Facultad de Ciencias, Universidad de Zaragoza, 50009, Spain. and Instituto de Nanociencia de Aragón (INA) and Laboratorio de Microscopías Avanzadas (LMA), edificio i+d Campus Rio Ebro, Universidad de Zaragoza, C/Mariano Esquillor, s/n, 50018 Zaragoza, Spain
| | - I Lucía Herrer
- Departamento de Química Física, Facultad de Ciencias, Universidad de Zaragoza, 50009, Spain. and Instituto de Nanociencia de Aragón (INA) and Laboratorio de Microscopías Avanzadas (LMA), edificio i+d Campus Rio Ebro, Universidad de Zaragoza, C/Mariano Esquillor, s/n, 50018 Zaragoza, Spain
| | - David C Milan
- Department of Chemistry, University of Liverpool, Liverpool, L69 7ZD, UK
| | - Matteo Lorenzoni
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Campus UAB, 08193 Bellaterra, Spain
| | - Richard J Nichols
- Department of Chemistry, University of Liverpool, Liverpool, L69 7ZD, UK
| | - Pilar Cea
- Departamento de Química Física, Facultad de Ciencias, Universidad de Zaragoza, 50009, Spain. and Instituto de Nanociencia de Aragón (INA) and Laboratorio de Microscopías Avanzadas (LMA), edificio i+d Campus Rio Ebro, Universidad de Zaragoza, C/Mariano Esquillor, s/n, 50018 Zaragoza, Spain
| | - Francesc Perez-Murano
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Campus UAB, 08193 Bellaterra, Spain
| | - Paul J Low
- School of Molecular Sciences, University of Western Australia, 35 Stirling Highway, Crawley, WA 6009, Australia
| | - Santiago Martin
- Departamento de Química Física, Facultad de Ciencias, Universidad de Zaragoza, 50009, Spain. and Instituto de Ciencias de Materiales de Aragón (ICMA), Universidad de Zaragoza-CSIC, 50009 Zaragoza, Spain
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Conde-Rubio A, Rodríguez AF, Borrisé X, Perez-Murano F, Batlle X, Labarta A. Geometric frustration in a hexagonal lattice of plasmonic nanoelements. Opt Express 2018; 26:20211-20224. [PMID: 30119347 DOI: 10.1364/oe.26.020211] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/23/2018] [Accepted: 07/10/2018] [Indexed: 06/08/2023]
Abstract
We introduce the concept of geometric frustration in plasmonic arrays of nanoelements. In particular, we present the case of a hexagonal lattice of Au nanoasterisks arranged so that the gaps between neighboring elements are small and lead to a strong near-field dipolar coupling. Besides, far-field interactions yield higher-order collective modes around the visible region that follow the translational symmetry of the lattice. However, dipolar excitations of the gaps in the hexagonal array are geometrically frustrated for interactions beyond nearest neighbors, yielding the destabilization of the low energy modes in the near infrared. This in turn results in a slow dynamics of the optical response and a complex interplay between localized and collective modes, a behavior that shares features with geometrically frustrated magnetic systems.
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Llobet J, Rius G, Chuquitarqui A, Borrisé X, Koops R, van Veghel M, Perez-Murano F. Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology. Nanotechnology 2018; 29:155303. [PMID: 29388920 DOI: 10.1088/1361-6528/aaac67] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
We present the fabrication, operation, and CMOS integration of arrays of suspended silicon nanowires (SiNWs). The functional structures are obtained by a top-down fabrication approach consisting in a resistless process based on focused ion beam irradiation, causing local gallium implantation and silicon amorphization, plus selective silicon etching by tetramethylammonium hydroxide, and a thermal annealing process in a boron rich atmosphere. The last step enables the electrical functionality of the irradiated material. Doubly clamped silicon beams are fabricated by this method. The electrical readout of their mechanical response can be addressed by a frequency down-mixing detection technique thanks to an enhanced piezoresistive transduction mechanism. Three specific aspects are discussed: (i) the engineering of mechanically coupled SiNWs, by making use of the nanometer scale overhang that it is inherently-generated with this fabrication process, (ii) the statistical distribution of patterned lateral dimensions when fabricating large arrays of identical devices, and (iii) the compatibility of the patterning methodology with CMOS circuits. Our results suggest that the application of this method to the integration of large arrays of suspended SiNWs with CMOS circuitry is interesting in view of applications such as advanced radio frequency band pass filters and ultra-high-sensitivity mass sensors.
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Affiliation(s)
- J Llobet
- Institute of Microelectronics of Barcelona (IMB-CNM, CSIC), E-08193 Bellaterra, Spain. International Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, Portugal
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12
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Gottlieb S, Lorenzoni M, Evangelio L, Fernández-Regúlez M, Ryu YK, Rawlings C, Spieser M, Knoll AW, Perez-Murano F. Thermal scanning probe lithography for the directed self-assembly of block copolymers. Nanotechnology 2017; 28:175301. [PMID: 28374684 DOI: 10.1088/1361-6528/aa673c] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
Thermal scanning probe lithography (t-SPL) is applied to the fabrication of chemical guiding patterns for directed self-assembly (DSA) of block copolymers (BCP). The two key steps of the overall process are the accurate patterning of a poly(phthalaldehyde) resist layer of only 3.5 nm thickness, and the subsequent oxygen-plasma functionalization of an underlying neutral poly(styrene-random-methyl methacrylate) brush layer. We demonstrate that this method allows one to obtain aligned line/space patterns of poly(styrene-block-methyl methacrylate) BCP of 18.5 and 11.7 nm half-pitch. Defect-free alignment has been demonstrated over areas of tens of square micrometres. The main advantages of t-SPL are the absence of proximity effects, which enables the realization of patterns with 10 nm resolution, and its compatibility with standard DSA methods. In the brush activation step by oxygen-plasma exposure, we observe swelling of the brush. This effect is discussed in terms of the chemical reactions occurring in the exposed areas. Our results show that t-SPL can be a suitable method for research activities in the field of DSA, in particular for low-pitch, high-χ BCP to achieve sub-10 nm line/space patterns.
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Affiliation(s)
- S Gottlieb
- Instituto de Microelectrónica de Barcelona IMB-CNM, CSIC, E-08193 Bellaterra, Barcelona, Spain
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13
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Navarro C, Nicolet C, Ariura F, Chevalier X, Xu K, Hockey MA, Mumtaz M, Fleury G, Hadziioannou G, Legrain A, Zelsmann M, Gharbi A, Tiron R, Pain L, Evangelio L, Fernandez-Regulez M, Perez-Murano F, Cayrefourcq I. Recent Achievements in Sub-10 nm DSA Lithography for Line/Space Patterning. J PHOTOPOLYM SCI TEC 2017. [DOI: 10.2494/photopolymer.30.69] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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14
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Rius G, Lorenzoni M, Matsui S, Tanemura M, Perez-Murano F. Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes. Beilstein J Nanotechnol 2015; 6:215-222. [PMID: 25671165 PMCID: PMC4311679 DOI: 10.3762/bjnano.6.20] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/28/2014] [Accepted: 12/14/2014] [Indexed: 05/29/2023]
Abstract
Many nanofabrication methods based on scanning probe microscopy have been developed during the last decades. Local anodic oxidation (LAO) is one of such methods: Upon application of an electric field between tip and surface under ambient conditions, oxide patterning with nanometer-scale resolution can be performed with good control of dimensions and placement. LAO through the non-contact mode of atomic force microscopy (AFM) has proven to yield a better resolution and tip preservation than the contact mode and it can be effectively performed in the dynamic mode of AFM. The tip plays a crucial role for the LAO-AFM, because it regulates the minimum feature size and the electric field. For instance, the feasibility of carbon nanotube (CNT)-functionalized tips showed great promise for LAO-AFM, yet, the fabrication of CNT tips presents difficulties. Here, we explore the use of a carbon nanofiber (CNF) as the tip apex of AFM probes for the application of LAO on silicon substrates in the AFM amplitude modulation dynamic mode of operation. We show the good performance of CNF-AFM probes in terms of resolution and reproducibility, as well as demonstration that the CNF apex provides enhanced conditions in terms of field-induced, chemical process efficiency.
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Affiliation(s)
- Gemma Rius
- Nagoya Institute of Technology, NITech, Gokiso, Showa, 466-8555 Nagoya, Japan
| | - Matteo Lorenzoni
- Institut de Microelectronica de Barcelona, IMB-CNM-CSIC, Campus UAB 08193 Bellaterra, Spain
| | - Soichiro Matsui
- Nagoya Institute of Technology, NITech, Gokiso, Showa, 466-8555 Nagoya, Japan
| | - Masaki Tanemura
- Nagoya Institute of Technology, NITech, Gokiso, Showa, 466-8555 Nagoya, Japan
| | - Francesc Perez-Murano
- Institut de Microelectronica de Barcelona, IMB-CNM-CSIC, Campus UAB 08193 Bellaterra, Spain
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15
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Fernandez-Regulez M, Sansa M, Serra-Garcia M, Gil-Santos E, Tamayo J, Perez-Murano F, San Paulo A. Horizontally patterned Si nanowire growth for nanomechanical devices. Nanotechnology 2013; 24:095303. [PMID: 23403917 DOI: 10.1088/0957-4484/24/9/095303] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
Abstract
We report a method to pattern horizontal vapor-liquid-solid growth of Si nanowires at vertical sidewalls of Si microstructures. The method allows one to produce either single nanowire structures or well-ordered nanowire arrays with predefined growth positions, thus enabling a practical development of nanomechanical devices that exploit the singular properties of Si nanowires. In particular, we demonstrate the fabrication of doubly clamped nanowire resonators and resonator arrays whose mechanical resonances can be measured by optical or electrical readout. We also show that the fabrication method enables the electrical readout of the resonant mode splitting of nanowire resonators in the VHF range, which allows the application of such an effect for enhanced nanomechanical sensing with nanowire resonators.
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Affiliation(s)
- M Fernandez-Regulez
- Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), Campus UAB, F-08193 Bellaterra, Spain
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16
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Tosolini G, Villanueva LG, Perez-Murano F, Bausells J. Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors. Rev Sci Instrum 2012; 83:015002. [PMID: 22299978 DOI: 10.1063/1.3673603] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits, or systems. The technology for the fabrication of micro and nanoelectromechanical systems (MEMS and NEMS) is evolving rapidly, with new kind of device concepts for applications like sensing or harvesting are being proposed and demonstrated. However, the characterization tools and methods for these new devices are still not fully developed. Here, we present an on-wafer, highly precise, and rapid characterization method to measure the mechanical, electrical, and electromechanical properties of piezoresistive cantilevers. The setup is based on a combination of probe-card and atomic force microscopy technology, it allows accessing many devices across a wafer and it can be applied to a broad range of MEMS and NEMS. Using this setup we have characterized the performance of multiple submicron thick piezoresistive cantilever force sensors. For the best design we have obtained a force sensitivity Re(F) = 158μV/nN, a noise of 5.8 μV (1 Hz-1 kHz) and a minimum detectable force of 37 pN with a relative standard deviation of σ(r) ≈ 8%. This small value of σ(r), together with a high fabrication yield >95%, validates our fabrication technology. These devices are intended to be used as bio-molecular detectors for the measurement of intermolecular forces between ligand and receptor molecule pairs.
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Affiliation(s)
- G Tosolini
- Instituto de Microelectrónica de Barcelona IMB-CNM (CSIC), Bellaterra, Spain
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17
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Ingrosso C, Martin-Olmos C, Llobera A, Innocenti C, Sangregorio C, Striccoli M, Agostiano A, Voigt A, Gruetzner G, Brugger J, Perez-Murano F, Curri ML. Oxide nanocrystal based nanocomposites for fabricating photoplastic AFM probes. Nanoscale 2011; 3:4632-4639. [PMID: 21858377 DOI: 10.1039/c1nr10487j] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
We report on the synthesis, characterization and application of a novel nanocomposite made of a negative tone epoxy based photoresist modified with organic-capped Fe(2)O(3) nanocrystals (NCs). The mechanical properties of the nanocomposite drastically improve upon incorporation of a suitable concentration of NCs in the polymer, without deteriorating its photolithography performance. High aspect ratio 3D microstructures made of the nanocomposite have been fabricated with a uniform surface morphology and with a resolution down to few micrometres. The embedded organic-capped Fe(2)O(3) NCs drastically increase the stiffness and hardness of the epoxy based photoresist matrix, making the final material extremely interesting for manufacturing miniaturized polymer based mechanical devices and systems. In particular, the nanocomposite has been used as structural material for fabricating photoplastic Atomic Force Microscopy (AFM) probes with integrated tips showing outstanding mechanical response and high resolution imaging performance. The fabricated probes consist of straight cantilevers with low stress-gradient and high quality factors, incorporating sharp polymeric tips. They present considerably improved performance compared to pure epoxy based photoresist AFM probes, and to commercial silicon AFM probes.
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Affiliation(s)
- Chiara Ingrosso
- CNR-IPCF Sez. Bari c/o Dipartimento di Chimica, Università di Bari, via Orabona 4, Bari, 70126, Italy
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18
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Verd J, Sansa M, Uranga A, Perez-Murano F, Segura J, Barniol N. Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution. Lab Chip 2011; 11:2670-2672. [PMID: 21748145 DOI: 10.1039/c1lc20103d] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 μm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.
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Affiliation(s)
- J Verd
- Department of Physics, Universitat de les Illes Balears, Palma (Illes Balears), 07122, Spain.
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Garcia-Sanchez D, San Paulo A, Esplandiu MJ, Perez-Murano F, Forró L, Aguasca A, Bachtold A. Mechanical detection of carbon nanotube resonator vibrations. Phys Rev Lett 2007; 99:085501. [PMID: 17930953 DOI: 10.1103/physrevlett.99.085501] [Citation(s) in RCA: 25] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/20/2006] [Indexed: 05/22/2023]
Abstract
Bending-mode vibrations of carbon nanotube resonators were mechanically detected in air at atmospheric pressure by means of a novel scanning force microscopy method. The fundamental and higher order bending eigenmodes were imaged at up to 3.1 GHz with subnanometer resolution in vibration amplitude. The resonance frequency and the eigenmode shape of multiwall nanotubes are consistent with the elastic beam theory for a doubly clamped beam. For single-wall nanotubes, however, resonance frequencies are significantly shifted, which is attributed to fabrication generating, for example, slack. The effect of slack is studied by pulling down the tube with the tip, which drastically reduces the resonance frequency.
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Arcamone J, Misischi B, Serra-Graells F, van den Boogaart MAF, Brugger J, Torres F, Abadal G, Barniol N, Perez-Murano F. A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators. ACTA ACUST UNITED AC 2007. [DOI: 10.1109/tcsii.2007.892228] [Citation(s) in RCA: 29] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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de Haro C, Mas R, Abadal G, Muñoz J, Perez-Murano F, Dominguez C. Electrochemical platinum coatings for improving performance of implantable microelectrode arrays. Biomaterials 2002; 23:4515-21. [PMID: 12322971 DOI: 10.1016/s0142-9612(02)00195-3] [Citation(s) in RCA: 40] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
Abstract
The formation and properties of electrochemical platinum films grown on platinum contacts contained in implantable flexible microelectrodes were investigated. The resulting platinum deposits were obtained by applying cyclic voltammetry to baths containing concentrations around 70 mM of chloroplatinic acid. A pre-activation step was necessary before the platinum-electroplating step in order to achieve good adhesive properties. The benefits of this process were ascribed to higher corrosion resistance, lower impedance and improved adhesion to the sputtered platinum. These improvements can make the application of this electrochemical technique highly useful for increasing the lifetime of implantable microelectrode arrays, such as cuff structures (IEEE Trans. Biomed. Eng. 40 (1993) 640). These medical devices, obtained by semiconductor technology could be used for selective stimulation of nerve fascicles, although, poor long-term performance has been achieved with them. The dissolution rate for platinum thin-film microelectrodes under fixed corrosion test conditions was 38.8 ng/C. Lower rates were observed for electroplated microelectrodes, obtaining a dissolution rate of 7.8 ng/C under analogous experimental ageing conditions. The corrosion behaviour of the electroplated platinum during stimulation experimental conditions was estimated by electrochemical impedance spectroscopy.
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Affiliation(s)
- C de Haro
- Department of Electronic Engineering, University Autonomous of Barcelona, Bellaterra, Spain.
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Ye JH, Perez-Murano F, Barniol N, Abadal G, Aymerich X. Nanoscale Modification of H-Terminated n-Si(100) Surfaces in Aqueous Solutions with an in Situ Electrochemical Scanning Tunneling Microscope. ACTA ACUST UNITED AC 2002. [DOI: 10.1021/j100049a028] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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