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Lee S, Abbas MS, Yoo D, Lee K, Fabunmi TG, Lee E, Kim HI, Kim I, Jang D, Lee S, Lee J, Park KT, Lee C, Kim M, Lee YS, Chang CS, Yi GC. Pulsed-Mode Metalorganic Vapor-Phase Epitaxy of GaN on Graphene-Coated c-Sapphire for Freestanding GaN Thin Films. NANO LETTERS 2023; 23:11578-11585. [PMID: 38051017 DOI: 10.1021/acs.nanolett.3c03333] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/07/2023]
Abstract
We report the growth of high-quality GaN epitaxial thin films on graphene-coated c-sapphire substrates using pulsed-mode metalorganic vapor-phase epitaxy, together with the fabrication of freestanding GaN films by simple mechanical exfoliation for transferable light-emitting diodes (LEDs). High-quality GaN films grown on the graphene-coated sapphire substrates were easily lifted off by using thermal release tape and transferred onto foreign substrates. Furthermore, we revealed that the pulsed operation of ammonia flow during GaN growth was a critical factor for the fabrication of high-quality freestanding GaN films. These films, exhibiting excellent single crystallinity, were utilized to fabricate transferable GaN LEDs by heteroepitaxially growing InxGa1-xN/GaN multiple quantum wells and a p-GaN layer on the GaN films, showing their potential application in advanced optoelectronic devices.
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Affiliation(s)
- Seokje Lee
- Department of Physics and Astronomy, Seoul National University, Seoul 08826, Republic of Korea
| | - Muhammad S Abbas
- Department of Physics, Sungkyunkwan University College of Natural Science, Suwon 16419, Republic of Korea
- Centre for Advanced Studies in Physics (CASP), Government College University Lahore, Lahore 54000, Pakistan
| | - Dongha Yoo
- Department of Physics and Astronomy, Seoul National University, Seoul 08826, Republic of Korea
| | - Keundong Lee
- Department of Electrical and Computer Engineering, University of California San Diego, La Jolla, California 92093, United States
| | - Tobiloba G Fabunmi
- Department of Physics and Astronomy, Seoul National University, Seoul 08826, Republic of Korea
| | - Eunsu Lee
- Department of Physics and Astronomy, Seoul National University, Seoul 08826, Republic of Korea
| | - Han Ik Kim
- Department of Physics and Astronomy, Seoul National University, Seoul 08826, Republic of Korea
| | - Imhwan Kim
- Department of Physics and Astronomy, Seoul National University, Seoul 08826, Republic of Korea
| | - Daniel Jang
- SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, Suwon 16419, Republic of Korea
| | - Sangmin Lee
- Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Jusang Lee
- Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Ki-Tae Park
- Department of Mechanical Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Changgu Lee
- SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, Suwon 16419, Republic of Korea
- School of Mechanical Engineering, Sungkyunkwan University College of Engineering, Suwon 16419, Republic of Korea
| | - Miyoung Kim
- Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Yun Seog Lee
- Department of Mechanical Engineering, Seoul National University, Seoul 08826, Republic of Korea
| | - Celesta S Chang
- Department of Physics and Astronomy, Seoul National University, Seoul 08826, Republic of Korea
| | - Gyu-Chul Yi
- Department of Physics and Astronomy, Seoul National University, Seoul 08826, Republic of Korea
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Ryu JE, Park S, Park Y, Ryu SW, Hwang K, Jang HW. Technological Breakthroughs in Chip Fabrication, Transfer, and Color Conversion for High-Performance Micro-LED Displays. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2204947. [PMID: 35950613 DOI: 10.1002/adma.202204947] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/31/2022] [Revised: 08/05/2022] [Indexed: 06/15/2023]
Abstract
The implementation of high-efficiency and high-resolution displays has been the focus of considerable research interest. Recently, micro light-emitting diodes (micro-LEDs), which are inorganic light-emitting diodes of size <100 µm2 , have emerged as a promising display technology owing to their superior features and advantages over other displays like liquid crystal displays and organic light-emitting diodes. Although many companies have introduced micro-LED displays since 2012, obstacles to mass production still exist. Three major challenges, i.e., low quantum efficiency, time-consuming transfer, and complex color conversion, have been overcome with technological breakthroughs to realize cost-effective micro-LED displays. In the review, methods for improving the degraded quantum efficiency of GaN-based micro-LEDs induced by the size effect are examined, including wet chemical treatment, passivation layer adoption, LED structure design, and growing LEDs in self-passivated structures. Novel transfer technologies, including pick-up transfer and self-assembly methods, for developing large-area micro-LED displays with high yield and reliability are discussed in depth. Quantum dots as color conversion materials for high color purity, and deposition methods such as electrohydrodynamic jet printing or contact printing on micro-LEDs are also addressed. This review presents current status and critical challenges of micro-LED technology and promising technical breakthroughs for commercialization of high-performance displays.
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Affiliation(s)
- Jung-El Ryu
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
| | - Sohyeon Park
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
| | - Yongjo Park
- Advance Institute of Convergence Technology, Seoul National University, Suwon, 16229, Republic of Korea
| | - Sang-Wan Ryu
- Department of Physics, Chonnam National University, Gwangju, 61186, Republic of Korea
| | - Kyungwook Hwang
- Samsung Advanced Institute of Technology, Suwon, 16678, Republic of Korea
| | - Ho Won Jang
- Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
- Advance Institute of Convergence Technology, Seoul National University, Suwon, 16229, Republic of Korea
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Chen Q, Yang K, Liang M, Kang J, Yi X, Wang J, Li J, Liu Z. Lattice modulation strategies for 2D material assisted epitaxial growth. NANO CONVERGENCE 2023; 10:39. [PMID: 37626161 PMCID: PMC10457265 DOI: 10.1186/s40580-023-00388-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/16/2023] [Accepted: 08/13/2023] [Indexed: 08/27/2023]
Abstract
As an emerging single crystals growth technique, the 2D-material-assisted epitaxy shows excellent advantages in flexible and transferable structure fabrication, dissimilar materials integration, and matter assembly, which offers opportunities for novel optoelectronics and electronics development and opens a pathway for the next-generation integrated system fabrication. Studying and understanding the lattice modulation mechanism in 2D-material-assisted epitaxy could greatly benefit its practical application and further development. In this review, we overview the tremendous experimental and theoretical findings in varied 2D-material-assisted epitaxy. The lattice guidance mechanism and corresponding epitaxial relationship construction strategy in remote epitaxy, van der Waals epitaxy, and quasi van der Waals epitaxy are discussed, respectively. Besides, the possible application scenarios and future development directions of 2D-material-assisted epitaxy are also given. We believe the discussions and perspectives exhibited here could help to provide insight into the essence of the 2D-material-assisted epitaxy and motivate novel structure design and offer solutions to heterogeneous integration via the 2D-material-assisted epitaxy method.
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Affiliation(s)
- Qi Chen
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Kailai Yang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Meng Liang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Junjie Kang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.
| | - Xiaoyan Yi
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Junxi Wang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Jinmin Li
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Zhiqiang Liu
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.
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Chen Q, Yang K, Shi B, Yi X, Wang J, Li J, Liu Z. Principles for 2D-Material-Assisted Nitrides Epitaxial Growth. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2211075. [PMID: 36897809 DOI: 10.1002/adma.202211075] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/28/2022] [Revised: 03/02/2023] [Indexed: 05/05/2023]
Abstract
Beyond traditional heteroepitaxy, 2D-materials-assisted epitaxy opens opportunities to revolutionize future material integration methods. However, basic principles in 2D-material-assisted nitrides' epitaxy remain unclear, which impedes understanding the essence, thus hindering its progress. Here, the crystallographic information of nitrides/2D material interface is theoretically established, which is further confirmed experimentally. It is found that the atomic interaction at the nitrides/2D material interface is related to the nature of underlying substrates. For single-crystalline substrates, the heterointerface behaves like a covalent one and the epilayer inherits the substrate's lattice. Meanwhile, for amorphous substrates, the heterointerface tends to be a van der Waals one and strongly relies on the properties of 2D materials. Therefore, modulated by graphene, the nitrides' epilayer is polycrystalline. In contrast, single-crystalline GaN films are successfully achieved on WS2 . These results provide a suitable growth-front construction strategy for high-quality 2D-material-assisted nitrides' epitaxy. It also opens a pathway toward various semiconductors heterointegration.
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Affiliation(s)
- Qi Chen
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Kailai Yang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Bo Shi
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Xiaoyan Yi
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Junxi Wang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Jinmin Li
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Zhiqiang Liu
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
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Roh I, Goh SH, Meng Y, Kim JS, Han S, Xu Z, Lee HE, Kim Y, Bae SH. Applications of remote epitaxy and van der Waals epitaxy. NANO CONVERGENCE 2023; 10:20. [PMID: 37120780 PMCID: PMC10149550 DOI: 10.1186/s40580-023-00369-3] [Citation(s) in RCA: 4] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/07/2023] [Accepted: 04/09/2023] [Indexed: 05/03/2023]
Abstract
Epitaxy technology produces high-quality material building blocks that underpin various fields of applications. However, fundamental limitations exist for conventional epitaxy, such as the lattice matching constraints that have greatly narrowed down the choices of available epitaxial material combinations. Recent emerging epitaxy techniques such as remote and van der Waals epitaxy have shown exciting perspectives to overcome these limitations and provide freestanding nanomembranes for massive novel applications. Here, we review the mechanism and fundamentals for van der Waals and remote epitaxy to produce freestanding nanomembranes. Key benefits that are exclusive to these two growth strategies are comprehensively summarized. A number of original applications have also been discussed, highlighting the advantages of these freestanding films-based designs. Finally, we discuss the current limitations with possible solutions and potential future directions towards nanomembranes-based advanced heterogeneous integration.
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Affiliation(s)
- Ilpyo Roh
- Mechanical Engineering & Materials Science, Washington University in St. Louis, Saint Louis, MO, 63105, USA
- R&D CENTER, M.O.P Co., Ltd, Seoul, 07281, South Korea
| | - Seok Hyeon Goh
- Division of Advanced Materials Engineering, Jeonbuk National University, Jeonju, 54896, South Korea
| | - Yuan Meng
- Mechanical Engineering & Materials Science, Washington University in St. Louis, Saint Louis, MO, 63105, USA
| | - Justin S Kim
- The Institution of Materials Science & Engineering, Washington University in St. Louis, Saint Louis, MO, 63130, USA
| | - Sangmoon Han
- Mechanical Engineering & Materials Science, Washington University in St. Louis, Saint Louis, MO, 63105, USA
| | - Zhihao Xu
- The Institution of Materials Science & Engineering, Washington University in St. Louis, Saint Louis, MO, 63130, USA
| | - Han Eol Lee
- Division of Advanced Materials Engineering, Jeonbuk National University, Jeonju, 54896, South Korea.
| | - Yeongin Kim
- Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, OH, 45221, USA.
| | - Sang-Hoon Bae
- Mechanical Engineering & Materials Science, Washington University in St. Louis, Saint Louis, MO, 63105, USA.
- The Institution of Materials Science & Engineering, Washington University in St. Louis, Saint Louis, MO, 63130, USA.
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6
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Wang Y, Qu Y, Xu Y, Li D, Lu Z, Li J, Su X, Wang G, Shi L, Zeng X, Wang J, Cao B, Xu K. Modulation of Remote Epitaxial Heterointerface by Graphene-Assisted Attenuative Charge Transfer. ACS NANO 2023; 17:4023-4033. [PMID: 36744849 DOI: 10.1021/acsnano.3c00026] [Citation(s) in RCA: 5] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Remote epitaxy (RE), substrate polarity can "penetrate" two-dimensional materials (2DMs) and act on the epi-layer, showing a prospective universal growth strategy. However, essentially, the role that 2DMs plays in RE has not been deeply investigated so far. Here, the RE of single-crystal films on the weakest polarity/iconicity substrate is realized to reveal its essence physical properties. Graphene facilitates attenuative charge transfer (ACT) from a substrate to epi-layer to construct remote interactions. Interfacial atoms are assembled into "incommensurate" epitaxial relationships through graphene to reduce misfit dislocations in the epi-layer. Moreover, graphene reduces the atomic migration barrier, leading to a tendency toward a "layer-by-layer" growth mode. Such film growth mode is different with the conventional epitaxy (CE), and it is beneficial for the fast growth of epi-layers and the reduction of dislocations at coalescence boundaries. The insightful revelation of the role of graphene reveals the interface physics of RE and provides a more valuable guide to using 2DMs to expand three-dimensional materials (3DMs) for application in devices.
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Affiliation(s)
- Yuning Wang
- School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, Anhui230026, China
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
| | - Yipu Qu
- School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, Anhui230026, China
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
- School of Electrical and Information Engineering, Zhengzhou University, Zhengzhou, Henan450001, China
| | - Yu Xu
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
- Suzhou Nanowin Science and Technology Co., Ltd., Suzhou215123, China
| | - Didi Li
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
- School of Physical Science and Technology, Shanghai Tech University, Shanghai201210, China
| | - Zhengqian Lu
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
- School of Electrical and Information Engineering, Zhengzhou University, Zhengzhou, Henan450001, China
| | - Jianjie Li
- School of Optoelectronic Science and Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, Jiangsu215006, China
- Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, Jiangsu215006, China
| | - Xujun Su
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
- Shenyang National Laboratory for Materials Science, Shenyang, Liaoning110010, China
| | - Guobin Wang
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
- Shenyang National Laboratory for Materials Science, Shenyang, Liaoning110010, China
| | - Lin Shi
- School of Materials Science and Engineering, Yancheng Institute of Technology, Yancheng224051, China
| | - Xionghui Zeng
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
| | - Jianfeng Wang
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
- Suzhou Nanowin Science and Technology Co., Ltd., Suzhou215123, China
- Shenyang National Laboratory for Materials Science, Shenyang, Liaoning110010, China
| | - Bing Cao
- School of Optoelectronic Science and Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, Jiangsu215006, China
- Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, Jiangsu215006, China
| | - Ke Xu
- Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu215123, China
- Suzhou Nanowin Science and Technology Co., Ltd., Suzhou215123, China
- Shenyang National Laboratory for Materials Science, Shenyang, Liaoning110010, China
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Li S, Chen X, Liu L, Zeng Z, Chang S, Wang H, Wu H, Long S, Liu C. Micron channel length ZnO thin film transistors using bilayer electrodes. J Colloid Interface Sci 2022; 622:769-779. [DOI: 10.1016/j.jcis.2022.04.016] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/22/2022] [Revised: 04/02/2022] [Accepted: 04/04/2022] [Indexed: 11/29/2022]
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Lee HE, Lee D, Lee TI, Jang J, Jang J, Lim YW, Shin JH, Kang SM, Choi GM, Joe DJ, Kim JH, Lee SH, Park SH, Park CB, Kim TS, Lee KJ, Bae BS. Siloxane Hybrid Material-Encapsulated Highly Robust Flexible μLEDs for Biocompatible Lighting Applications. ACS APPLIED MATERIALS & INTERFACES 2022; 14:28258-28269. [PMID: 35674729 DOI: 10.1021/acsami.2c03922] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Flexible micro-light-emitting diodes (f-μLEDs) have been regarded as an attractive light source for the next-generation human-machine interfaces, thanks to their noticeable optoelectronic performances. However, when it comes to their practical utilizations fulfilling industrial standards, there have been unsolved reliability and durability issues of the f-μLEDs, despite previous developments in the high-performance f-μLEDs for various applications. Herein, highly robust flexible μLEDs (f-HμLEDs) with 20 × 20 arrays, which are realized by a siloxane-based organic-inorganic hybrid material (SHM), are reported. The f-HμLEDs are created by combining the f-μLED fabrication process with SHM synthesis procedures (i.e., sol-gel reaction and successive photocuring). The outstanding mechanical, thermal, and environmental stabilities of our f-HμLEDs are confirmed by a host of experimental and theoretical examinations, including a bending fatigue test (105 bending/unbending cycles), a lifetime accelerated stress test (85 °C and 85% relative humidity), and finite element method simulations. Eventually, to demonstrate the potential of our f-HμLEDs for practical applications of flexible displays and/or biomedical devices, their white light emission due to quantum dot-based color conversion of blue light emitted by GaN-based f-HμLEDs is demonstrated, and the biocompatibility of our f-HμLEDs is confirmed via cytotoxicity and cell proliferation tests with muscle, bone, and neuron cell lines. As far as we can tell, this work is the first demonstration of the flexible μLED encapsulation platform based on the SHM, which proved its mechanical, thermal, and environmental stabilities and biocompatibility, enabling us to envisage biomedical and/or flexible display applications using our f-HμLEDs.
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Affiliation(s)
- Han Eol Lee
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Division of Advanced Materials Engineering, Jeonbuk National University, 567 Baekje-daero, Deokjin-gu, Jeonju-si 54896, Jeollabuk-do, Republic of Korea
| | - Daewon Lee
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Tae-Ik Lee
- Joining R&D Group, Root Industry Technology Center, Korea Institute of Industrial Technology (KITECH), 156 Gaetbeol-ro, Yeonsu-gu, Incheon 21999, Republic of Korea
- Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Jinhyeong Jang
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Junho Jang
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Young-Woo Lim
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Jung Ho Shin
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Seung-Mo Kang
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Gwang-Mun Choi
- ICT Creative Research Laboratory, Electronics and Telecommunications Research Institute (ETRI), Daejeon 34141, Republic of Korea
| | - Daniel J Joe
- Safety Measurement Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea
| | - Jeong Hyeon Kim
- Division of Advanced Materials Engineering, Jeonbuk National University, 567 Baekje-daero, Deokjin-gu, Jeonju-si 54896, Jeollabuk-do, Republic of Korea
| | - Seung Hyung Lee
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Sang Hyun Park
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Chan Beum Park
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Taek-Soo Kim
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Keon Jae Lee
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
| | - Byeong-Soo Bae
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
- Wearable Platform Materials Technology Center (WMC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea
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Oh H, Yi GC. Synthesis of Atomically Thin h-BN Layers Using BCl 3 and NH 3 by Sequential-Pulsed Chemical Vapor Deposition on Cu Foil. NANOMATERIALS 2021; 12:nano12010080. [PMID: 35010030 PMCID: PMC8746830 DOI: 10.3390/nano12010080] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/06/2021] [Revised: 12/13/2021] [Accepted: 12/27/2021] [Indexed: 11/25/2022]
Abstract
The chemical vapor deposition of hexagonal boron nitride layers from BCl3 and NH3 is highly beneficial for scalable synthesis with high controllability, yet multiple challenges such as corrosive reaction or by-product formation have hindered its successful demonstration. Here, we report the synthesis of polycrystalline hexagonal boron nitride (h-BN) layers on copper foil using BCl3 and NH3. The sequential pulse injection of precursors leads to the formation of atomically thin h-BN layers with a polycrystalline structure. The relationship between growth temperature and crystallinity of the h-BN film is investigated using transmission electron microscopy and Raman spectroscopy. Investigation on the initial growth mode achieved by the suppression of precursor supply revealed the formation of triangular domains and existence of preferred crystal orientations. The possible growth mechanism of h-BN in this sequential-pulsed CVD is discussed.
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Affiliation(s)
- Hongseok Oh
- Department of Physics and Integrative Institute of Basic Science, Soongsil University, Seoul 06978, Korea;
| | - Gyu-Chul Yi
- Department of Physics and Astronomy and Institute of Applied Physics, Seoul National University, Seoul 08826, Korea
- Correspondence:
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10
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Temperature Effect of van der Waals Epitaxial GaN Films on Pulse-Laser-Deposited 2D MoS 2 Layer. NANOMATERIALS 2021; 11:nano11061406. [PMID: 34073367 PMCID: PMC8228796 DOI: 10.3390/nano11061406] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/04/2021] [Revised: 05/22/2021] [Accepted: 05/23/2021] [Indexed: 11/28/2022]
Abstract
Van der Waals epitaxial GaN thin films on c-sapphire substrates with a sp2-bonded two-dimensional (2D) MoS2 buffer layer, prepared by pulse laser deposition, were investigated. Low temperature plasma-assisted molecular beam epitaxy (MBE) was successfully employed for the deposition of uniform and ~5 nm GaN thin films on layered 2D MoS2 at different substrate temperatures of 500, 600 and 700 °C, respectively. The surface morphology, surface chemical composition, crystal microstructure, and optical properties of the GaN thin films were identified experimentally by using both in situ and ex situ characterizations. During the MBE growth with a higher substrate temperature, the increased surface migration of atoms contributed to a better formation of the GaN/MoS2 heteroepitaxial structure. Therefore, the crystallinity and optical properties of GaN thin films can obviously be enhanced via the high temperature growth. Likewise, the surface morphology of GaN films can achieve a smoother and more stable chemical composition. Finally, due to the van der Waals bonding, the exfoliation of the heterostructure GaN/MoS2 can also be conducted and investigated by transmission electron microscopy. The largest granular structure with good crystallinity of the GaN thin films can be observed in the case of the high-temperature growth at 700 °C.
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11
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Zhang S, Liu B, Ren F, Yin Y, Wang Y, Chen Z, Jiang B, Liu B, Liu Z, Sun J, Liang M, Yan J, Wei T, Yi X, Wang J, Li J, Gao P, Liu Z, Liu Z. Graphene-Nanorod Enhanced Quasi-Van Der Waals Epitaxy for High Indium Composition Nitride Films. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2021; 17:e2100098. [PMID: 33788402 DOI: 10.1002/smll.202100098] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/07/2021] [Revised: 02/21/2021] [Indexed: 06/12/2023]
Abstract
The nitride films with high indium (In) composition play a crucial role in the fabrication of In-rich InGaN-based optoelectronic devices. However, a major limitation is In incorporation requiring a low temperature during growth at the expense of nitride dissociation. Here, to overcome this limitation, a strain-modulated growth method, namely the graphene (Gr)-nanorod (NR) enhanced quasi-van der Waals epitaxy, is proposed to increase the In composition in InGaN alloy. The lattice transparency of Gr enables constraint of in-plane orientation of nitride film and epitaxial relationships at the heterointerface. The Gr interlayer together with NRs buffer layer substantially reduces the stress of the GaN film by 74.4%, from 0.9 to 0.23 GPa, and thus increases the In incorporation by 30.7%. The first principles calculations confirm that the release of strain accounts for the dramatic improvement. The photoluminescence peak of multiple quantum wells shifts from 461 to 497 nm and the functionally small-sized cyan light-emitting diodes of 7 × 9 mil2 are demonstrated. These findings provide an efficient approach for the growth of In-rich InGaN film and extend the applications of nitrides in advanced optoelectronic, photovoltaic, and thermoelectric devices.
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Affiliation(s)
- Shuo Zhang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Bingyao Liu
- Electron Microscopy Laboratory and International Center for Quantum Materials, School of Physics, Peking University, Beijing, 100871, China
- Academy for Advanced Interdisciplinary Studies, Peking University, Beijing, 100871, China
- Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, China
- Beijing Graphene Institute (BGI), Beijing, 100095, China
| | - Fang Ren
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Yue Yin
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Yunyu Wang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Zhaolong Chen
- Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, China
- Beijing Graphene Institute (BGI), Beijing, 100095, China
| | - Bei Jiang
- Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, China
| | - Bingzhi Liu
- Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, China
- Beijing Graphene Institute (BGI), Beijing, 100095, China
- College of Energy, Soochow Institute for Energy and Materials Innovations, Jiangsu Provincial Key Laboratory for Advanced Carbon Materials and Wearable Energy Technologies, Soochow University, Suzhou, 215006, China
| | - Zhetong Liu
- Electron Microscopy Laboratory and International Center for Quantum Materials, School of Physics, Peking University, Beijing, 100871, China
- Academy for Advanced Interdisciplinary Studies, Peking University, Beijing, 100871, China
- Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, China
- Beijing Graphene Institute (BGI), Beijing, 100095, China
| | - Jingyu Sun
- Beijing Graphene Institute (BGI), Beijing, 100095, China
- College of Energy, Soochow Institute for Energy and Materials Innovations, Jiangsu Provincial Key Laboratory for Advanced Carbon Materials and Wearable Energy Technologies, Soochow University, Suzhou, 215006, China
| | - Meng Liang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Jianchang Yan
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Tongbo Wei
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Xiaoyan Yi
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Junxi Wang
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Jinmin Li
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Peng Gao
- Electron Microscopy Laboratory and International Center for Quantum Materials, School of Physics, Peking University, Beijing, 100871, China
- Academy for Advanced Interdisciplinary Studies, Peking University, Beijing, 100871, China
- Beijing Graphene Institute (BGI), Beijing, 100095, China
- Collaborative Innovation Center of Quantum Matter, Beijing, 100871, China
| | - Zhongfan Liu
- Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, China
- Beijing Graphene Institute (BGI), Beijing, 100095, China
| | - Zhiqiang Liu
- Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China
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12
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Gong Z. Layer-Scale and Chip-Scale Transfer Techniques for Functional Devices and Systems: A Review. NANOMATERIALS (BASEL, SWITZERLAND) 2021; 11:842. [PMID: 33806237 PMCID: PMC8065746 DOI: 10.3390/nano11040842] [Citation(s) in RCA: 6] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/28/2021] [Revised: 03/16/2021] [Accepted: 03/22/2021] [Indexed: 02/07/2023]
Abstract
Hetero-integration of functional semiconductor layers and devices has received strong research interest from both academia and industry. While conventional techniques such as pick-and-place and wafer bonding can partially address this challenge, a variety of new layer transfer and chip-scale transfer technologies have been developed. In this review, we summarize such transfer techniques for heterogeneous integration of ultrathin semiconductor layers or chips to a receiving substrate for many applications, such as microdisplays and flexible electronics. We showed that a wide range of materials, devices, and systems with expanded functionalities and improved performance can be demonstrated by using these technologies. Finally, we give a detailed analysis of the advantages and disadvantages of these techniques, and discuss the future research directions of layer transfer and chip transfer techniques.
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Affiliation(s)
- Zheng Gong
- Institute of Semiconductors, Guangdong Academy of Sciences, No. 363 Changxing Road, Tianhe District, Guangzhou 510650, China;
- Foshan Debao Display Technology Co Ltd., Room 508-1, Level 5, Block A, Golden Valley Optoelectronics, Nanhai District, Foshan 528200, China
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13
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Lan S, Tang B, Hu H, Zhou S. Strategically constructed patterned sapphire with silica array to boost substrate performance in GaN-based flip-chip visible light-emitting diodes. OPTICS EXPRESS 2020; 28:38444-38455. [PMID: 33379655 DOI: 10.1364/oe.413088] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/21/2020] [Accepted: 11/20/2020] [Indexed: 06/12/2023]
Abstract
A strategically constructed substrate, patterned sapphire with silica array (PSSA), was developed to boost the efficiency of patterned sapphire substrate (PSS) in GaN-based light-emitting diodes (LEDs) application. The light output power of a flip-chip LED on PSSA improved by 16.5% at 120 mA than that of device grown on PSS. The XRD and STEM measurements revealed that the GaN epilayer grown on PSSA had better crystalline quality compared to the epilayer grown on PSS, which was the result of decreased misfit at coalescence boundary in the PSSA case. Moreover, the light extraction efficiency of the flip-chip LED on PSSA was significantly enhanced, benefiting from the small refractive-index contrast between the patterned silica array and air. This small refractive-index contrast also contributed to a more convergent emission pattern for the flip-chip LED on PSSA, as demonstrated by the far-field radiation pattern measurements. The discovery that PSSA could excel at defect suppression and light extraction revealed a new substrate platform for III-nitride optoelectronic devices.
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14
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Lee JY, Min JH, Bae SY, Park MD, Jeong WL, Park JH, Kang CM, Lee DS. Multiple epitaxial lateral overgrowth of GaN thin films using a patterned graphene mask by metal organic chemical vapor deposition. J Appl Crystallogr 2020. [DOI: 10.1107/s1600576720012856] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022] Open
Abstract
Single-crystal gallium nitride (GaN) thin films were grown using a graphene mask via multiple epitaxial lateral overgrowth (multiple-ELOG). During the growth process, the graphene mask self-decomposed to enable the emergence of a GaN film with a thickness of several hundred nanometres. This is in contrast to selective area growth of GaN using an SiO2 mask leading to the well known hexagonal-pyramid shape under the same growth conditions. The multiple-ELOG GaN had a single-crystalline wurtzite structure corresponding to the crystallinity of the GaN template, which was confirmed with electron backscatter diffraction measurements. An X-ray diffraction rocking curve of the asymmetric 102 reflection showed that the FWHM for the multiple-ELOG GaN decreased to 405 from 540′′ for the underlying GaN template. From these results, the self-decomposition of the graphene mask during ELOG was experimentally proven to be affected by the GaN decomposition rather than the high-temperature/H2 growth conditions.
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15
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Guan N, Amador-Mendez N, Kunti A, Babichev A, Das S, Kapoor A, Gogneau N, Eymery J, Julien FH, Durand C, Tchernycheva M. Heat Dissipation in Flexible Nitride Nanowire Light-Emitting Diodes. NANOMATERIALS (BASEL, SWITZERLAND) 2020; 10:E2271. [PMID: 33207755 PMCID: PMC7696961 DOI: 10.3390/nano10112271] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/15/2020] [Revised: 11/10/2020] [Accepted: 11/12/2020] [Indexed: 01/05/2023]
Abstract
We analyze the thermal behavior of a flexible nanowire (NW) light-emitting diode (LED) operated under different injection conditions. The LED is based on metal-organic vapor-phase deposition (MOCVD)-grown self-assembled InGaN/GaN NWs in a polydimethylsiloxane (PDMS) matrix. Despite the poor thermal conductivity of the polymer, active nitride NWs effectively dissipate heat to the substrate. Therefore, the flexible LED mounted on a copper heat sink can operate under high injection without significant overheating, while the device mounted on a plastic holder showed a 25% higher temperature for the same injected current. The efficiency of the heat dissipation by nitride NWs was further confirmed with finite-element modeling of the temperature distribution in a NW/polymer composite membrane.
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Affiliation(s)
- Nan Guan
- C2N-CNRS, Université Paris Saclay, 91120 Palaiseau, France; (N.G.); (N.A.-M.); (A.K.); (N.G.); (F.H.J.)
| | - Nuño Amador-Mendez
- C2N-CNRS, Université Paris Saclay, 91120 Palaiseau, France; (N.G.); (N.A.-M.); (A.K.); (N.G.); (F.H.J.)
| | - Arup Kunti
- C2N-CNRS, Université Paris Saclay, 91120 Palaiseau, France; (N.G.); (N.A.-M.); (A.K.); (N.G.); (F.H.J.)
| | | | - Subrata Das
- Materials Science and Technology Division, CSIR-National Institute for Interdisciplinary Science and Technology, Thiruvananthapuram, Kerala 695019, India;
| | - Akanksha Kapoor
- Univ. Grenoble Alpes, CEA, IRIG, PHELIQS, NPSC, 38000 Grenoble, France; (A.K.); (C.D.)
| | - Noëlle Gogneau
- C2N-CNRS, Université Paris Saclay, 91120 Palaiseau, France; (N.G.); (N.A.-M.); (A.K.); (N.G.); (F.H.J.)
| | - Joël Eymery
- Univ. Grenoble Alpes, CEA, IRIG, MEM, NRS, 38000 Grenoble, France;
| | - François Henri Julien
- C2N-CNRS, Université Paris Saclay, 91120 Palaiseau, France; (N.G.); (N.A.-M.); (A.K.); (N.G.); (F.H.J.)
| | - Christophe Durand
- Univ. Grenoble Alpes, CEA, IRIG, PHELIQS, NPSC, 38000 Grenoble, France; (A.K.); (C.D.)
| | - Maria Tchernycheva
- C2N-CNRS, Université Paris Saclay, 91120 Palaiseau, France; (N.G.); (N.A.-M.); (A.K.); (N.G.); (F.H.J.)
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16
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Flexible and monolithically integrated multicolor light emitting diodes using morphology-controlled GaN microstructures grown on graphene films. Sci Rep 2020; 10:19677. [PMID: 33184325 PMCID: PMC7665051 DOI: 10.1038/s41598-020-76476-6] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/25/2020] [Accepted: 10/09/2020] [Indexed: 11/23/2022] Open
Abstract
We report flexible and monolithically integrated multicolor light-emitting diode (LED) arrays using morphology-controlled growth of GaN microstructures on chemical-vapor-deposited (CVD) graphene films. As the morphology-controlled growth template of GaN microstructures, we used position-controlled ZnO nanostructure arrays with different spacings grown on graphene substrates. In particular, we investigated the effect of the growth parameters, including micropattern spacings and growth time and temperature, on the morphology of the GaN microstructures when they were coated on ZnO nanostructures on graphene substrates. By optimizing the growth parameters, both GaN microrods and micropyramids formed simultaneously on the graphene substrates. Subsequent depositions of InGaN/GaN quantum well and p-GaN layers and n- and p-type metallization yielded monolithic integration of microstructural LED arrays on the same substrate, which enabled multicolor emission depending on the shape of the microstructures. Furthermore, the CVD graphene substrates beneath the microstructure LEDs facilitated transfer of the LED arrays onto any foreign substrate. In this study, Cu foil was used for flexible LEDs. The flexible devices exhibited stable electroluminescence, even under severe bending conditions. Cyclic bending tests demonstrated the excellent mechanical stability and reliability of the devices.
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17
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Chen Q, Yin Y, Ren F, Liang M, Yi X, Liu Z. Van der Waals Epitaxy of III-Nitrides and Its Applications. MATERIALS 2020; 13:ma13173835. [PMID: 32878046 PMCID: PMC7503271 DOI: 10.3390/ma13173835] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/15/2020] [Revised: 08/22/2020] [Accepted: 08/25/2020] [Indexed: 12/03/2022]
Abstract
III-nitride semiconductors have wide bandgap and high carrier mobility, making them suitable candidates for light-emitting diodes (LEDs), laser diodes (LDs), high electron mobility transistors (HEMTs) and other optoelectronics. Compared with conventional epitaxy technique, van der Waals epitaxy (vdWE) has been proven to be a useful route to relax the requirements of lattice mismatch and thermal mismatch between the nitride epilayers and the substrates. By using vdWE, the stress in the epilayer can be sufficiently relaxed, and the epilayer can be easily exfoliated and transferred, which provides opportunities for novel device design and fabrication. In this paper, we review and discuss the important progress on the researches of nitrides vdWE. The potential applications of nitride vdWE are also prospected.
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Affiliation(s)
- Qi Chen
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (Q.C.); (Y.Y.); (F.R.); (M.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Yue Yin
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (Q.C.); (Y.Y.); (F.R.); (M.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Fang Ren
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (Q.C.); (Y.Y.); (F.R.); (M.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Meng Liang
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (Q.C.); (Y.Y.); (F.R.); (M.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Xiaoyan Yi
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (Q.C.); (Y.Y.); (F.R.); (M.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
- Correspondence: (X.Y.); (Z.L.); Tel.: +86-010-8230-5423 (Z.L.)
| | - Zhiqiang Liu
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (Q.C.); (Y.Y.); (F.R.); (M.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
- Correspondence: (X.Y.); (Z.L.); Tel.: +86-010-8230-5423 (Z.L.)
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Yu J, Wang L, Hao Z, Luo Y, Sun C, Wang J, Han Y, Xiong B, Li H. Van der Waals Epitaxy of III-Nitride Semiconductors Based on 2D Materials for Flexible Applications. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2020; 32:e1903407. [PMID: 31486182 DOI: 10.1002/adma.201903407] [Citation(s) in RCA: 11] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/28/2019] [Revised: 07/07/2019] [Indexed: 06/10/2023]
Abstract
III-nitride semiconductors have attracted considerable attention in recent years owing to their excellent physical properties and wide applications in solid-state lighting, flat-panel displays, and solar energy and power electronics. Generally, GaN-based devices are heteroepitaxially grown on c-plane sapphire, Si (111), or 6H-SiC substrates. However, it is very difficult to release the GaN-based films from such single-crystalline substrates and transfer them onto other foreign substrates. Consequently, it is difficult to meet the ever-increasing demand for wearable and foldable applications. On the other hand, sp2 -bonded two-dimensional (2D) materials, which exhibit hexagonal in-plane lattice arrangements and weakly bonded layers, can be transferred onto flexible substrates with ease. Hence, flexible III-nitride devices can be implemented through such 2D release layers. In this progress report, the recent advances in the different strategies for the growth of III-nitrides based on 2D materials are reviewed, with a focus on van der Waals epitaxy and transfer printing. Various attempts are presented and discussed herein, including the different kinds of 2D materials (graphene, hexagonal boron nitride, and transition metal dichalcogenides) used as release layers. Finally, current challenges and future perspectives regarding the development of flexible III-nitride devices are discussed.
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Affiliation(s)
- Jiadong Yu
- Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China
- Flexible Intelligent Optoelectronic Device and Technology Center, Institute of Flexible Electronics Technology of THU, Zhejiang, Jiaxing, 314006, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing, 100084, China
| | - Lai Wang
- Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing, 100084, China
| | - Zhibiao Hao
- Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing, 100084, China
| | - Yi Luo
- Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China
- Flexible Intelligent Optoelectronic Device and Technology Center, Institute of Flexible Electronics Technology of THU, Zhejiang, Jiaxing, 314006, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing, 100084, China
| | - Changzheng Sun
- Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing, 100084, China
| | - Jian Wang
- Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing, 100084, China
| | - Yanjun Han
- Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China
- Flexible Intelligent Optoelectronic Device and Technology Center, Institute of Flexible Electronics Technology of THU, Zhejiang, Jiaxing, 314006, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing, 100084, China
| | - Bing Xiong
- Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China
- Center for Flexible Electronics Technology, Tsinghua University, Beijing, 100084, China
| | - Hongtao Li
- Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China
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Li Z, Guo D, Xiao P, Chen J, Ning H, Wang Y, Zhang X, Fu X, Yao R, Peng J. Silver Nanorings Fabricated by Glycerol-Based Cosolvent Polyol Method. MICROMACHINES 2020; 11:mi11030236. [PMID: 32106449 PMCID: PMC7143913 DOI: 10.3390/mi11030236] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/17/2020] [Revised: 02/22/2020] [Accepted: 02/22/2020] [Indexed: 11/16/2022]
Abstract
The urgent demand for transparent flexible electrodes applied in wide bandgap devices has promoted the development of new materials. Silver nanoring (AgNR), known as a special structure of silver nanowire (AgNW), exhibits attractive potential in the field of wearable electronics. In this work, an environmentally friendly glycerol-based cosolvent polyol method was investigated. The Taguchi design was utilized to ascertain the factors that affect the yield and ring diameter of AgNRs. Structural characterization showed that AgNR seeds grew at a certain angle during the early nucleation period. The results indicated that the yield and ring diameter of AgNRs were significantly affected by the ratio of cosolvent. Besides, the ring diameter of AgNRs was also tightly related to the concentration of polyvinylpyrrolidone (PVP). The difference of reducibility between glycerol, water, and ethylene glycol leads to the selective growth of (111) plane and is probably the main reason AgNRs are formed. As a result, AgNRs with a ring diameter range from 7.17 to 42.94 μm were synthesized, and the quantity was increased significantly under the optimal level of factors.
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Affiliation(s)
- Zhihang Li
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China; (Z.L.); (J.C.); (X.Z.); (X.F.); (J.P.)
| | - Dong Guo
- School of Medical Instrument & Food Engineering, University of Shanghai for Science and Technology, No.516 Jungong Road, Shanghai 200093, China;
| | - Peng Xiao
- School of Physics and Optoelectronic Engineering, Foshan University, Foshan 528000, China;
| | - Junlong Chen
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China; (Z.L.); (J.C.); (X.Z.); (X.F.); (J.P.)
| | - Honglong Ning
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China; (Z.L.); (J.C.); (X.Z.); (X.F.); (J.P.)
- Correspondence: (H.N.); (R.Y.); Tel.: +86-20-8711-4525 (H.N.)
| | - Yiping Wang
- State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;
| | - Xu Zhang
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China; (Z.L.); (J.C.); (X.Z.); (X.F.); (J.P.)
| | - Xiao Fu
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China; (Z.L.); (J.C.); (X.Z.); (X.F.); (J.P.)
| | - Rihui Yao
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China; (Z.L.); (J.C.); (X.Z.); (X.F.); (J.P.)
- Guangdong Province Key Lab of Display Material and Technology, Sun Yat-sen University, Guangzhou 510275, China
- Correspondence: (H.N.); (R.Y.); Tel.: +86-20-8711-4525 (H.N.)
| | - Junbiao Peng
- Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China; (Z.L.); (J.C.); (X.Z.); (X.F.); (J.P.)
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Kim S, Jiang Y, Thompson Towell KL, Boutilier MSH, Nayakanti N, Cao C, Chen C, Jacob C, Zhao H, Turner KT, Hart AJ. Soft nanocomposite electroadhesives for digital micro- and nanotransfer printing. SCIENCE ADVANCES 2019; 5:eaax4790. [PMID: 31646176 PMCID: PMC6788868 DOI: 10.1126/sciadv.aax4790] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/26/2019] [Accepted: 09/14/2019] [Indexed: 06/10/2023]
Abstract
Automated handling of microscale objects is essential for manufacturing of next-generation electronic systems. Yet, mechanical pick-and-place technologies cannot manipulate smaller objects whose surface forces dominate over gravity, and emerging microtransfer printing methods require multidirectional motion, heating, and/or chemical bonding to switch adhesion. We introduce soft nanocomposite electroadhesives (SNEs), comprising sparse forests of dielectric-coated carbon nanotubes (CNTs), which have electrostatically switchable dry adhesion. SNEs exhibit 40-fold lower nominal dry adhesion than typical solids, yet their adhesion is increased >100-fold by applying 30 V to the CNTs. We characterize the scaling of adhesion with surface morphology, dielectric thickness, and applied voltage and demonstrate digital transfer printing of films of Ag nanowires, polymer and metal microparticles, and unpackaged light-emitting diodes.
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Affiliation(s)
- Sanha Kim
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
- Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, South Korea
| | - Yijie Jiang
- Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA, USA
| | - Kiera L. Thompson Towell
- Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA, USA
| | - Michael S. H. Boutilier
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Nigamaa Nayakanti
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Changhong Cao
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Chunxu Chen
- Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA, USA
| | - Christine Jacob
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Hangbo Zhao
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Kevin T. Turner
- Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA, USA
| | - A. John Hart
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
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21
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Guan N, Amador-Mendez N, Wang J, Das S, Kapoor A, Julien FH, Gogneau N, Foldyna M, Som S, Eymery J, Durand C, Tchernycheva M. Colour optimization of phosphor-converted flexible nitride nanowire white light emitting diodes. JPHYS PHOTONICS 2019. [DOI: 10.1088/2515-7647/ab2c84] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022] Open
Abstract
Abstract
We demonstrate flexible nanowire white light-emitting-diodes (LEDs) with an optimized colour quality. The devices consist of flexible InGaN/GaN nanowire LEDs acting as pumps, capped with removable phosphor-doped polydimethylsiloxane membranes. Five different phosphors with tens of microns in grain size emitting from green to orange are investigated using both violet-blue and a blue-green nanowire-based LED pumps. In addition, a flexible nanowire white LED with a warm white emission is demonstrated using two layers of different phosphors. Compared to the previous realizations of flexible nanowire white LEDs, these novel LEDs improve the colour rendering index from 54 to 86 and show a colour tuneable from a bluish cool white colour to natural white and finally to warm white. The flexibility tests show that the LEDs can be bent down to 1.5 cm curvature radius without significant degradation. Therefore, the replacement of the nano-phosphors used in the previous realization by relatively inexpensive micro-phosphors does not degrade the good mechanical flexibility of the white nanowire LEDs.
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Xu Y, Cao B, Li Z, Zheng S, Cai D, Wang M, Zhang Y, Wang J, Wang C, Xu K. A self-assembled graphene nanomask for the epitaxial growth of nonplanar and planar GaN. CrystEngComm 2019. [DOI: 10.1039/c9ce00970a] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/13/2022]
Abstract
Herein, we demonstrated the fabrication of architectural GaN nanostructures by the self-assembly NSAG (SNSAG) technology using multilayer graphene (MLG) as a nanomask.
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Affiliation(s)
- Yu Xu
- Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO)
- Chinese Academy of Sciences (CAS)
- Suzhou 215123
- People's Republic of China
- Suzhou Nanowin Science and Technology Co., Ltd
| | - Bing Cao
- School of Optoelectronic Science and Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology
- Soochow University
- Suzhou 215006
- People's Republic of China
- Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China
| | - Zongyao Li
- Suzhou Nanowin Science and Technology Co., Ltd
- Suzhou 215123
- People's Republic of China
| | - Shunan Zheng
- Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO)
- Chinese Academy of Sciences (CAS)
- Suzhou 215123
- People's Republic of China
| | - Demin Cai
- Suzhou Nanowin Science and Technology Co., Ltd
- Suzhou 215123
- People's Republic of China
| | - Mingyue Wang
- Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO)
- Chinese Academy of Sciences (CAS)
- Suzhou 215123
- People's Republic of China
- Suzhou Nanowin Science and Technology Co., Ltd
| | - Yumin Zhang
- Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO)
- Chinese Academy of Sciences (CAS)
- Suzhou 215123
- People's Republic of China
- Suzhou Nanowin Science and Technology Co., Ltd
| | - Jianfeng Wang
- Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO)
- Chinese Academy of Sciences (CAS)
- Suzhou 215123
- People's Republic of China
- Suzhou Nanowin Science and Technology Co., Ltd
| | - Chinhua Wang
- School of Optoelectronic Science and Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology
- Soochow University
- Suzhou 215006
- People's Republic of China
- Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China
| | - Ke Xu
- Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO)
- Chinese Academy of Sciences (CAS)
- Suzhou 215123
- People's Republic of China
- Suzhou Nanowin Science and Technology Co., Ltd
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23
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Son KR, Lee BR, Kim TG. Chromium/Nickel-Doped Silicon Oxide Thin-Film Electrode: Mechanism and Application to Microscale Light-Emitting Diodes. ACS APPLIED MATERIALS & INTERFACES 2018; 10:40967-40972. [PMID: 30427178 DOI: 10.1021/acsami.8b15364] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Light extraction of microscale light-emitting diodes (μLEDs) is fundamentally limited by p-type metal electrodes for current injection due to the small pixel size of the LEDs. We propose Cr/Ni-doped silicon oxide (CN-SiOX) films as p-type contact electrodes for blue μLEDs to increase the light-output power under the same emitting areas. The conductivity of CN-SiOX electrode originates from the diffusion of top Cr/Ni atoms via electric-field-induced doping treatments, which allows for effective hole injection into the active layer. Consequently, we achieved a 62% improvement in the current density and a 47% increase in the light-output power compared to ITO-based μLEDs.
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Affiliation(s)
- Kyung Rock Son
- School of Electrical Engineering , Korea University , Seongbuk-gu, Seoul 02841 , Korea
| | - Byeong Ryong Lee
- School of Electrical Engineering , Korea University , Seongbuk-gu, Seoul 02841 , Korea
| | - Tae Geun Kim
- School of Electrical Engineering , Korea University , Seongbuk-gu, Seoul 02841 , Korea
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Son KR, Lee TH, Lee BR, Im HS, Kim TG. Nitride-Based Microlight-Emitting Diodes Using AlN Thin-Film Electrodes with Nanoscale Indium/Tin Conducting Filaments. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2018; 14:e1801032. [PMID: 30286283 DOI: 10.1002/smll.201801032] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/16/2018] [Revised: 08/14/2018] [Indexed: 06/08/2023]
Abstract
Microlight-emitting diodes (µLEDs) are emerging solutions for both high-quality displays and lighting technologies. However, the overall light output power density of these devices is low, as the emission area is shielded by the p-electrodes required for current injection. In this study, instead of the more conventionally used indium tin oxide (ITO), an AlN thin film with nanoscale conducing filaments (CFs) is used, referred to as CF-AlN, as a transparent conducting electrode (TCE), to enhance the output power density from the same emission area. As a result of this modification, the electroluminescence intensity is enhanced by 10% at an injection current of 10 mA, and the current density is improved by 13% at a forward voltage of 4.9 V, in comparison to the parameters observed with ITO-based µLEDs. This improvement is attributed to the higher transmittance of CF-AlN TCEs, together with efficient hole injection from the p-electrode into the light-emitting layer, through the CFs formed in the AlN layer. In addition, using transmission electron microscopy analyses, the origin of the CFs is directly identified as the diffusion of In and Sn ions, which provides critical insight into the conduction mechanism of AlN-based TCEs.
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Affiliation(s)
- Kyung Rock Son
- School of Electrical Engineering, Korea University, Seongbuk-gu, Seoul, 02841, Korea
| | - Tae Ho Lee
- School of Electrical Engineering, Korea University, Seongbuk-gu, Seoul, 02841, Korea
| | - Byeong Ryong Lee
- School of Electrical Engineering, Korea University, Seongbuk-gu, Seoul, 02841, Korea
| | - Hyun Sik Im
- Physics and Semiconductor Science, Dongguk University, Jung-gu, Seoul, 04620, Korea
| | - Tae Geun Kim
- School of Electrical Engineering, Korea University, Seongbuk-gu, Seoul, 02841, Korea
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Ren F, Yin Y, Wang Y, Liu Z, Liang M, Ou H, Ao J, Wei T, Yan J, Yuan G, Yi X, Wang J, Li J, Dasa D, Weman H. Direct Growth of AlGaN Nanorod LEDs on Graphene-Covered Si. MATERIALS (BASEL, SWITZERLAND) 2018; 11:E2372. [PMID: 30486245 PMCID: PMC6316983 DOI: 10.3390/ma11122372] [Citation(s) in RCA: 12] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/09/2018] [Revised: 11/21/2018] [Accepted: 11/23/2018] [Indexed: 11/30/2022]
Abstract
High density of defects and stress owing to the lattice and thermal mismatch between nitride materials and heterogeneous substrates have always been important problems and limit the development of nitride materials. In this paper, AlGaN light-emitting diodes (LEDs) were grown directly on a single-layer graphene-covered Si (111) substrate by metal organic chemical vapor deposition (MOCVD) without a metal catalyst. The nanorods was nucleated by AlGaN nucleation islands with a 35% Al composition, and included n-AlGaN, 6 period of AlGaN multiple quantum wells (MQWs), and p-AlGaN. Scanning electron microscopy (SEM) and electron backscatter diffraction (EBSD) showed that the nanorods were vertically aligned and had an accordant orientation along the [0001] direction. The structure of AlGaN nanorod LEDs was investigated by scanning transmission electron microscopy (STEM). Raman measurements of graphene before and after MOCVD growth revealed the graphene could withstand the high temperature and ammonia atmosphere in MOCVD. Photoluminescence (PL) and cathodoluminescence (CL) characterized an emission at ~325 nm and demonstrated the low defects density in AlGaN nanorod LEDs.
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Affiliation(s)
- Fang Ren
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Yue Yin
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Yunyu Wang
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Zhiqiang Liu
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Meng Liang
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Haiyan Ou
- Department of Photonics Engineering, Technical University of Denmark, Ørsteds Plads 345A, DK-2800 Kongens Lyngby, Denmark;
| | - Jinping Ao
- Department of Electrical and Electronic Engineering, The University of Tokushima, 2-1, Minami-josanjima, Tokushima 770-8506, Japan;
| | - Tongbo Wei
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Jianchang Yan
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Guodong Yuan
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Xiaoyan Yi
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Junxi Wang
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Jinmin Li
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
| | - Dheeraj Dasa
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
| | - Helge Weman
- Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (F.R.); (Y.Y.); (Y.W.); (M.L.); (T.W.); (J.Y.); (J.W.); (J.L.)
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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Tian Z, Li Y, Su X, Feng L, Wang S, Ding W, Li Q, Zhang Y, Guo M, Yun F, Lee SWR. Super flexible GaN light emitting diodes using microscale pyramid arrays through laser lift-off and dual transfer. OPTICS EXPRESS 2018; 26:1817-1824. [PMID: 29402050 DOI: 10.1364/oe.26.001817] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/14/2017] [Accepted: 12/29/2017] [Indexed: 06/07/2023]
Abstract
We demonstrated a method to obtain super flexible LEDs, based on high quality pyramid arrays grown directly on sapphire substrates. Laser lift-off (LLO) and dual transfer processes were applied to transfer pyramid arrays face up onto the flexible substrates, which is more efficient than back light emission. Ag grid and Ag nanowires were employed as the electrical connection. No significant performance reduction appeared until the device reached a curvature radius of 0.5 mm. The performance reduction results from cracks appearing at the junction of the Ag grid, which can be improved by replacing the Ag grid with a strip electrode.
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27
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Imaoka T, Okada T, Samukawa S, Yamamoto K. Room-Temperature Synthesis of GaN Driven by Kinetic Energy beyond the Limit of Thermodynamics. ACS APPLIED MATERIALS & INTERFACES 2017; 9:41629-41633. [PMID: 29135223 DOI: 10.1021/acsami.7b13694] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
The nitridation reaction is significantly important to utilize the unique properties of nitrides and nitrogen-doped materials. However, nitridation generally requires a high temperature or highly reactive reagents (often explosive) because the energies of N-N bond cleavage and nitrogen anion formation (N3-) are very high. We demonstrate the first room-temperature synthesis of GaN directly from GaCl3 by nanoscale atom exchange reaction. Nonequilibrium nitrogen molecules with very high translational energy were used as a chemically stable and safe nitrogen source. The irradiation of molecular nitrogen to the desired reaction area successfully provided a gallium nitride (GaN) nanosheet that exhibited a typical photoluminescence spectrum. Because this process retains the target substrate room temperature and does not involve any photon nor charged ion, it allows damage-less synthesis of the semiconducting metal nitrides, even directly on plastic substrates such as polyethylene terephthalate (PET).
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Affiliation(s)
- Takane Imaoka
- Laboratory for Chemistry and Life Science, Institute of Innovative Research, Tokyo Institute of Technology , Yokohama 225-8503, Japan
| | | | | | - Kimihisa Yamamoto
- Laboratory for Chemistry and Life Science, Institute of Innovative Research, Tokyo Institute of Technology , Yokohama 225-8503, Japan
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Diverse Functionalities of Vertically Stacked Graphene/Single layer n-MoS 2/SiO 2/p-GaN Heterostructures. Sci Rep 2017; 7:10002. [PMID: 28855573 PMCID: PMC5577265 DOI: 10.1038/s41598-017-09998-1] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/30/2017] [Accepted: 08/01/2017] [Indexed: 11/23/2022] Open
Abstract
Integrating different dimentional materials on vertically stacked p-n hetero-junctions have facinated a considerable scrunity and can open up excellent feasibility with various functionalities in opto-electronic devices. Here, we demonstrate that vertically stacked p-GaN/SiO2/n-MoS2/Graphene heterostructures enable to exhibit prominent dual opto-electronic characteristics, including efficient photo-detection and light emission, which represents the emergence of a new class of devices. The photoresponsivity was found to achieve as high as ~10.4 AW−1 and the detectivity and external quantum efficiency were estimated to be 1.1 × 1010 Jones and ~30%, respectively. These values are superier than most reported hererojunction devices. In addition, this device exhibits as a self-powered photodetector, showing a high responsivity and fast response speed. Moreover, the device demonstrates the light emission with low turn-on voltage (~1.0 V) which can be realized by electron injection from graphene electrode and holes from GaN film into monolayer MoS2 layer. These results indicate that with a suitable choice of band alignment, the vertical stacking of materials with different dimentionalities could be significant potential for integration of highly efficient heterostructures and open up feasible pathways towards integrated nanoscale multi-functional optoelectronic devices for a variety of applications.
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Lee K, Park JW, Tchoe Y, Yoon J, Chung K, Yoon H, Lee S, Yoon C, Ho Park B, Yi GC. Flexible resistive random access memory devices by using NiO x /GaN microdisk arrays fabricated on graphene films. NANOTECHNOLOGY 2017; 28:205202. [PMID: 28303797 DOI: 10.1088/1361-6528/aa6763] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
We report flexible resistive random access memory (ReRAM) arrays fabricated by using NiO x /GaN microdisk arrays on graphene films. The ReRAM device was created from discrete GaN microdisk arrays grown on graphene films produced by chemical vapor deposition, followed by deposition of NiO x thin layers and Au metal contacts. The microdisk ReRAM arrays were transferred to flexible plastic substrates by a simple lift-off technique. The electrical and memory characteristics of the ReRAM devices were investigated under bending conditions. Resistive switching characteristics, including cumulative probability, endurance, and retention, were measured. After 1000 bending repetitions, no significant change in the device characteristics was observed. The flexible ReRAM devices, constructed by using only inorganic materials, operated reliably at temperatures as high as 180 °C.
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Affiliation(s)
- Keundong Lee
- Department of Physics and Astronomy, Institute of Applied Physics and Research Institute of Advanced Materials (RIAM), Seoul National University, Seoul 151-747, Republic of Korea
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