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Sun H, Lian C, Vásquez-Aza F, Rahimi Kari S, Huang YS, Restelli A, Vitale SA, Takeuchi I, Hu J, Youngblood N, Pavlidis G, Ríos Ocampo CA. Microheater hotspot engineering for spatially resolved and repeatable multi-level switching in foundry-processed phase change silicon photonics. Nat Commun 2025; 16:4291. [PMID: 40346037 PMCID: PMC12064670 DOI: 10.1038/s41467-025-59399-6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/02/2024] [Accepted: 04/15/2025] [Indexed: 05/11/2025] Open
Abstract
Nonvolatile photonic integrated circuits employing phase change materials have relied either on optical switching with precise multi-level control but poor scalability or electrical switching with seamless integration and scalability but mostly limited to a binary response. The main limitation of the latter is relying on stochastic nucleation, since its random nature hinders the repeatability of multi-level states. Here, we show engineered waveguide-integrated microheaters to achieve precise spatial control of the temperature profile (i.e., hotspot) and, thus, switch deterministic areas of an embedded phase change material. We experimentally demonstrate this concept using a variety of foundry-processed doped-silicon microheaters on a silicon-on-insulator platform featuring Sb2Se3 or Ge2Sb2Se4Te and achieve 27 cycles with 7 repeatable levels each. We further characterize the microheaters' response using Transient Thermoreflectance Imaging. Our microstructure engineering concept demonstrates the evasive repeatable multi-levels employing a single microheater device, which is necessary for robust and energy-efficient reprogrammable phase change photonics in analog processing and computing.
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Affiliation(s)
- Hongyi Sun
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, USA
- Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD, USA
| | - Chuanyu Lian
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, USA
- Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD, USA
| | - Francis Vásquez-Aza
- Department of Mechanical Engineering, University of Connecticut, Storrs, CT, USA
| | - Sadra Rahimi Kari
- Electrical & Computer Engineering Department, The University of Pittsburgh, Pittsburgh, PA, USA
| | - Yi-Siou Huang
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, USA
- Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD, USA
| | - Alessandro Restelli
- Joint Quantum Institute, Department of Physics, University of Maryland, College Park, MD, USA
| | - Steven A Vitale
- Advanced Materials and Microsystems Group, MIT Lincoln Laboratory, Lexington, MA, USA
| | - Ichiro Takeuchi
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, USA
| | - Juejun Hu
- Department of Materials Science & Engineering, MIT, Cambridge, MA, USA
| | - Nathan Youngblood
- Electrical & Computer Engineering Department, The University of Pittsburgh, Pittsburgh, PA, USA
| | - Georges Pavlidis
- Department of Mechanical Engineering, University of Connecticut, Storrs, CT, USA
| | - Carlos A Ríos Ocampo
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, USA.
- Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD, USA.
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2
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Zhang X, Sun H, Li Y, Hao J, Liang Q, Zhang Y, Wang Y, Li X, Zhang X, Ma H, Li J. Tunable structural colors based on grayscale lithography and conformal coating of VO 2. NANOPHOTONICS (BERLIN, GERMANY) 2025; 14:1123-1133. [PMID: 40290278 PMCID: PMC12019934 DOI: 10.1515/nanoph-2024-0546] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/16/2024] [Accepted: 12/13/2024] [Indexed: 04/30/2025]
Abstract
Structural colors generated by optical micro-/nanostructures offer a notable advantage over traditional chemical pigments, including higher purity, greater brightness, resistance to fading, and enhanced environmental friendliness. However, achieving dynamically switchable color displays with high performances and without resorting to complex nanofabrication methods remain a challenge. Here, we present a simple method using grayscale lithography and conformal coating to create Salisbury screen (SS) cavities with variable resonant wavelengths, enabling the formation of tunable colorful patterns. The dynamic color display is achieved through the phase change of vanadium dioxide (VO2) nanostructures under electrothermal effects. At a low actuation voltage of 1.4 V, high performances of color switching such as high sensitivity, fast speed, high repeatability, and wide-view angle are achieved. The tunable structural colors, featuring a simple preparation process and high-speed switching, represent a promising alternative for applications such as thermal sensors, security information encryption, and dynamic full-color displays.
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Affiliation(s)
- Xiaochen Zhang
- Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing100081, China
| | - Haozhe Sun
- Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing100081, China
| | - Yuan Li
- Institute of Information Photonics Technology, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing100124, China
| | - Jianhua Hao
- Institute of Information Photonics Technology, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing100124, China
| | - Qinghua Liang
- Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing100081, China
| | - Yongyue Zhang
- Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing100081, China
| | - Yang Wang
- Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing100081, China
| | - Xiaowei Li
- Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing100081, China
| | - Xinping Zhang
- Institute of Information Photonics Technology, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing100124, China
| | - He Ma
- Institute of Information Photonics Technology, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing100124, China
| | - Jiafang Li
- Key Lab of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing100081, China
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3
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Wang G, Shen J, He Y, Han Z, Huang W, Wang H, Cheng Z, Zhou P. Programmable Non-Volatile Photonic Analog-to-Digital Converter Based on Back-End-of-Line Compatible Phase-Change Materials. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2025; 37:e2419444. [PMID: 40059565 DOI: 10.1002/adma.202419444] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/11/2024] [Revised: 01/25/2025] [Indexed: 04/24/2025]
Abstract
High-performance signal processing and telecommunication systems absolutely necessitate analog-to-digital converters (ADCs) that offer extensive bandwidth, exceptional precision, and minimal power consumption, in order to efficiently convert real-world analog signals into digital signals. While current electronic ADCs are constrained by limitations such as low bandwidth, high jitter noise, susceptibility to electromagnetic interference, and excessive energy consumption, photonic ADCs present promising solutions to overcome these challenges. Here, a programmable photonic ADC is developed by integrating phase-change materials (PCMs) with silicon photonics fabricated using foundry processes. Thanks to the programmability and non-volatile nature of PCMs, 2- and 4-bit photonic ADCs are demonstrated on a single chip, achieving zero energy consumption during the quantization. Through the experimental demonstration of 65-state PCMs, photonic ADCs can attain a resolution of 8-bit, marking a significant milestone as the highest resolution reported to date for ADCs leveraging optical technologies. As a proof of concept, an all-optical analog-to-digital conversion system is demonstrated by integrating 2-bit photonic ADCs with optical sampling using a mode-locked laser (MLL). This system achieves the conversion of a 321 MHz radio frequency (RF) signal at a sampling rate of 40 MS s-1. The programmable, energy-efficient, and high-speed photonic ADCs represent a significant advancement in the evolution of signal processing systems.
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Affiliation(s)
- Gaofei Wang
- School of Microelectronics, Fudan University, Shanghai, 200433, P. R. China
- Shaoxin Laboratory, Shaoxing, 312000, P. R. China
| | - Jiabin Shen
- Shaoxin Laboratory, Shaoxing, 312000, P. R. China
- Institute of Optoelectronics, Fudan University, Shanghai, 200433, P. R. China
| | - Yaping He
- School of Microelectronics, Fudan University, Shanghai, 200433, P. R. China
- Shaoxin Laboratory, Shaoxing, 312000, P. R. China
| | - Zhou Han
- School of Microelectronics, Fudan University, Shanghai, 200433, P. R. China
- Shaoxin Laboratory, Shaoxing, 312000, P. R. China
| | - Wentao Huang
- School of Microelectronics, Fudan University, Shanghai, 200433, P. R. China
- Shaoxin Laboratory, Shaoxing, 312000, P. R. China
| | - Hu Wang
- School of Microelectronics, Fudan University, Shanghai, 200433, P. R. China
- Shaoxin Laboratory, Shaoxing, 312000, P. R. China
| | - Zengguang Cheng
- School of Microelectronics, Fudan University, Shanghai, 200433, P. R. China
- Shaoxin Laboratory, Shaoxing, 312000, P. R. China
| | - Peng Zhou
- School of Microelectronics, Fudan University, Shanghai, 200433, P. R. China
- Shaoxin Laboratory, Shaoxing, 312000, P. R. China
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4
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Tang Z, Li C, Pan R, Wang B, Liu Y, Wang Q, Tan J, Xiang Y, Yang H, Li J. Ge 2Sb 2Se 4Te-Based Optical Switch with Ultra-High Contrast Ratio by Multilayer Fabry-Perot Cavity. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2025; 12:e2412499. [PMID: 39950858 PMCID: PMC11984886 DOI: 10.1002/advs.202412499] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/07/2024] [Revised: 12/18/2024] [Indexed: 04/12/2025]
Abstract
Optical switches always desire a high contrast ratio in optical logic circuits and optical communication devices. Although phase change materials are widely applied to design optical switches for their rapid phase change, the high contrast ratio is still hardly achieved for the intrinsic loss of traditional PCMs. Here, the study demonstrates an optical switch with an ultra-high contrast ratio by introducing the Ge2Sb2Se4Te (GSST) into a multilayer film structure treated as a Fabry-Perot (FP) cavity. The reflectance of the multilayer system can be actively tuned by the phase change of GSST for the FP resonance to achieve an optical switch response. By designing the thicknesses of each layer in the multilayer film, the operating wavelength and the contrast ratio of the switch can be precisely controlled, and an ultra-high contrast ratio of 2410/735 (simulation/experiment) for the optical switch is constructed in the near-infrared band. The development of the GSST-based optical switch paves a new way to realize a high optical contrast ratio and offers a new strategy for high-performance optical devices.
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Affiliation(s)
- Zhiyang Tang
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- School of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
| | - Chensheng Li
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
| | - Ruhao Pan
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
| | - Bo Wang
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
| | - Yunan Liu
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
| | - Qianyu Wang
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- School of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
| | - Junhao Tan
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- School of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
| | - Yuan Xiang
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- School of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
| | - Haifang Yang
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- School of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
| | - Junjie Li
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- School of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
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5
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Xie J, Yan J, Han H, Zhao Y, Luo M, Li J, Guo H, Qiao M. Photonic Chip Based on Ultrafast Laser-Induced Reversible Phase Change for Convolutional Neural Network. NANO-MICRO LETTERS 2025; 17:179. [PMID: 40067576 PMCID: PMC11896963 DOI: 10.1007/s40820-025-01693-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/05/2024] [Accepted: 02/14/2025] [Indexed: 03/15/2025]
Abstract
Photonic computing has emerged as a promising technology for the ever-increasing computational demands of machine learning and artificial intelligence. Due to the advantages in computing speed, integrated photonic chips have attracted wide research attention on performing convolutional neural network algorithm. Programmable photonic chips are vital for achieving practical applications of photonic computing. Herein, a programmable photonic chip based on ultrafast laser-induced phase change is fabricated for photonic computing. Through designing the ultrafast laser pulses, the Sb film integrated into photonic waveguides can be reversibly switched between crystalline and amorphous phase, resulting in a large contrast in refractive index and extinction coefficient. As a consequence, the light transmission of waveguides can be switched between write and erase states. To determine the phase change time, the transient laser-induced phase change dynamics of Sb film are revealed at atomic scale, and the time-resolved transient reflectivity is measured. Based on the integrated photonic chip, photonic convolutional neural networks are built to implement machine learning algorithm, and images recognition task is achieved. This work paves a route for fabricating programmable photonic chips by designed ultrafast laser, which will facilitate the application of photonic computing in artificial intelligence.
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Affiliation(s)
- Jiawang Xie
- State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing, 100084, People's Republic of China
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
| | - Jianfeng Yan
- State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing, 100084, People's Republic of China.
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, People's Republic of China.
| | - Haoze Han
- State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing, 100084, People's Republic of China
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
| | - Yuzhi Zhao
- State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing, 100084, People's Republic of China
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
| | - Ma Luo
- State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing, 100084, People's Republic of China
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
| | - Jiaqun Li
- State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing, 100084, People's Republic of China
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
| | - Heng Guo
- State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing, 100084, People's Republic of China
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
| | - Ming Qiao
- State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing, 100084, People's Republic of China
- Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
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6
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Aryana K, Popescu CC, Sun H, Aryana K, Kim HJ, Julian M, Islam MR, Ríos Ocampo CA, Gu T, Hu J, Hopkins PE. Thermal Transport in Chalcogenide-Based Phase Change Materials: A Journey from Fundamental Physics to Device Engineering. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2025; 37:e2414031. [PMID: 39924804 DOI: 10.1002/adma.202414031] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/17/2024] [Revised: 12/05/2024] [Indexed: 02/11/2025]
Abstract
Advancements in nanofabrication processes have propelled nonvolatile phase change materials (PCMs) beyond storage-class applications. They are now making headway in fields such as photonic integrated circuits (PIC), free-space optics, and plasmonics. This shift is owed to their distinct electrical, optical, and thermal properties between their different atomic structures, which can be reversibly switched through thermal stimuli. However, the reliability of PCM-based optical components is not yet on par with that of storage-class devices. This is in part due to the challenges in maintaining a uniform temperature distribution across the PCM volume during phase transformation, which is essential to mitigate stress and element segregation as the device size exceeds a few micrometers. Understanding thermal transport in PCM-based devices is thus crucial as it dictates not only the durability but also the performance and power consumption of these devices. This article reviews recent advances in the development of PCM-based photonic devices from a thermal transport perspective and explores potential avenues to enhance device reliability. The aim is to provide insights into how PCM-based technologies can evolve beyond storage-class applications, maintain their functionality, and achieve longer lifetimes.
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Affiliation(s)
- Kiumars Aryana
- NASA Langley Research Center, Hampton, VA, 23666, USA
- Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, VA, 22904, USA
| | - Cosmin Constantin Popescu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Hongyi Sun
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, 20742, USA
- Institute for Research in Electronics & Applied Physics, University of Maryland, College Park, MD, 20742, USA
| | - Kiarash Aryana
- Department of Mechanical Engineering, Friedrich-Alexander-Universität Erlangen-Nuremberg, 91058, Erlangen, Germany
| | - Hyun Jung Kim
- NASA Langley Research Center, Hampton, VA, 23666, USA
- Department of Aerospace Engineering, Korea Advanced Institute of Science and Technology, Daejeon, 34141, South Korea
| | | | - Md Rafiqul Islam
- Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, VA, 22904, USA
| | - Carlos A Ríos Ocampo
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, 20742, USA
- Institute for Research in Electronics & Applied Physics, University of Maryland, College Park, MD, 20742, USA
| | - Tian Gu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
- Materials Research Laboratory, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Juejun Hu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
- Materials Research Laboratory, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Patrick E Hopkins
- Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, VA, 22904, USA
- Department of Materials Science and Engineering, University of Virginia, Charlottesville, VA, 22904, USA
- Department of Physics, University of Virginia, Charlottesville, VA, 22904, USA
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7
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He Y, Farmakidis N, Aggarwal S, Dong B, Lee JS, Wang M, Zhang Y, Parmigiani F, Bhaskaran H. Energy-Efficient Integrated Electro-Optic Memristors. NANO LETTERS 2024; 24:16325-16332. [PMID: 39658825 DOI: 10.1021/acs.nanolett.4c04567] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/12/2024]
Abstract
Neuromorphic photonic processors are redefining the boundaries of classical computing by enabling high-speed multidimensional information processing within the memory. Memristors, the backbone of neuromorphic processors, retain their state after programming without static power consumption. Among them, electro-optic memristors are of great interest, as they enable dual electrical-optical functionality that bridges the efficiency of electronics and the bandwidth of photonics. However, efficient, scalable, and CMOS-compatible implementations of electro-optic memristors are still lacking. Here, we devise electro-optic memristors by structuring the phase-change material as a nanoscale constriction, geometrically confining the electrically generated heat profile to overlap with the optical field, thus achieving programmability and readability in both the electrical and optical domains. We demonstrate sub-10 pJ electrical switching energy and a high electro-optical modulation efficiency of 0.15 nJ/dB. Our work opens up opportunities for high-performance and energy-efficient integrated electro-optic neuromorphic computing.
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Affiliation(s)
- Yuhan He
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K
| | - Nikolaos Farmakidis
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K
| | - Samarth Aggarwal
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K
| | - Bowei Dong
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K
- Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), 138634, Singapore
| | - June Sang Lee
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K
| | - Mengyun Wang
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K
| | - Yi Zhang
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K
| | | | - Harish Bhaskaran
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, U.K
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8
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Guo T, Zhang Z, Lin Z, Tian J, Jin Y, Evans J, Xu Y, He S. Durable and programmable ultrafast nanophotonic matrix of spectral pixels. NATURE NANOTECHNOLOGY 2024; 19:1635-1643. [PMID: 39134690 PMCID: PMC11567887 DOI: 10.1038/s41565-024-01756-5] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/05/2024] [Accepted: 07/16/2024] [Indexed: 11/17/2024]
Abstract
Locally addressable nanophotonic devices are essential for modern applications such as light detection, optical imaging, beam steering and displays. Despite recent advances, a versatile solution with a high-speed tuning rate, long-life durability and programmability across multiple pixels remains elusive. Here we introduce a programmable nanophotonic matrix consisting of vanadium dioxide (VO2) cavities on pixelated microheaters that meets all these requirements. The indirect Joule heating of these VO2 cavities can result in pronounced spectral modulation with colour changes and ensures exceptional endurance even after a million switching cycles. Precise control over the thermal dissipation power through a SiO2 layer of an optimized thickness on Si facilitates an ultrafast modulation rate exceeding 70 kHz. We demonstrated a video-rate nanophotonic colour display by electrically addressing a matrix of 12 × 12 pixels. Furthermore, inspired by the unique pixel-level programmability with multiple intermediate states of the spectral pixels, a spatiotemporal modulation concept is introduced for spectrum detection.
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Affiliation(s)
- Tingbiao Guo
- Centre for Optical and Electromagnetic Research, Enze-ZJU Joint Lab for MedEngInfo Collaborative Innovation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, People's Republic of China
- Taizhou Institute of Medicine, Health and New Drug Clinical Research; Taizhou Enze Medical Center (Enze), Taizhou Hospital, Zhejiang University, Taizhou, People's Republic of China
| | - Zhi Zhang
- Centre for Optical and Electromagnetic Research, Enze-ZJU Joint Lab for MedEngInfo Collaborative Innovation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, People's Republic of China
- National Engineering Research Center for Optical Instruments, Zhejiang University, Hangzhou, People's Republic of China
| | - Zijian Lin
- Centre for Optical and Electromagnetic Research, Enze-ZJU Joint Lab for MedEngInfo Collaborative Innovation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, People's Republic of China
- Shanghai Institute for Advanced Study, Zhejiang University, Shanghai, People's Republic of China
| | - Jiahan Tian
- Centre for Optical and Electromagnetic Research, Enze-ZJU Joint Lab for MedEngInfo Collaborative Innovation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, People's Republic of China
| | - Yi Jin
- Centre for Optical and Electromagnetic Research, Enze-ZJU Joint Lab for MedEngInfo Collaborative Innovation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, People's Republic of China
| | - Julian Evans
- Centre for Optical and Electromagnetic Research, Enze-ZJU Joint Lab for MedEngInfo Collaborative Innovation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, People's Republic of China
| | - Yinghe Xu
- Taizhou Institute of Medicine, Health and New Drug Clinical Research; Taizhou Enze Medical Center (Enze), Taizhou Hospital, Zhejiang University, Taizhou, People's Republic of China
| | - Sailing He
- Centre for Optical and Electromagnetic Research, Enze-ZJU Joint Lab for MedEngInfo Collaborative Innovation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, People's Republic of China.
- Taizhou Institute of Medicine, Health and New Drug Clinical Research; Taizhou Enze Medical Center (Enze), Taizhou Hospital, Zhejiang University, Taizhou, People's Republic of China.
- National Engineering Research Center for Optical Instruments, Zhejiang University, Hangzhou, People's Republic of China.
- Department of Electromagnetic Engineering, School of Electrical Engineering, KTH Royal Institute of Technology, Stockholm, Sweden.
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9
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Popescu CC, Aryana K, Garud P, Dao KP, Vitale S, Liberman V, Bae HB, Lee TW, Kang M, Richardson KA, Julian M, Ocampo CAR, Zhang Y, Gu T, Hu J, Kim HJ. Electrically Reconfigurable Phase-Change Transmissive Metasurface. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2400627. [PMID: 38724020 DOI: 10.1002/adma.202400627] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/12/2024] [Revised: 04/25/2024] [Indexed: 07/23/2024]
Abstract
Programmable and reconfigurable optics hold significant potential for transforming a broad spectrum of applications, spanning space explorations to biomedical imaging, gas sensing, and optical cloaking. The ability to adjust the optical properties of components like filters, lenses, and beam steering devices could result in dramatic reductions in size, weight, and power consumption in future optoelectronic devices. Among the potential candidates for reconfigurable optics, chalcogenide-based phase change materials (PCMs) offer great promise due to their non-volatile and analogue switching characteristics. Although PCM have found widespread use in electronic data storage, these memory devices are deeply sub-micron-sized. To incorporate phase change materials into free-space optical components, it is essential to scale them up to beyond several hundreds of microns while maintaining reliable switching characteristics. This study demonstrated a non-mechanical, non-volatile transmissive filter based on low-loss PCMs with a 200 × 200 µm2 switching area. The device/metafilter can be consistently switched between low- and high-transmission states using electrical pulses with a switching contrast ratio of 5.5 dB. The device was reversibly switched for 1250 cycles before accelerated degradation took place. The work represents an important step toward realizing free-space reconfigurable optics based on PCMs.
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Affiliation(s)
- Cosmin Constantin Popescu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | | | - Parth Garud
- NASA Langley Research Center, Hampton, VA, 23666, USA
| | - Khoi Phuong Dao
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Steven Vitale
- Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, MA, 02421, USA
| | - Vladimir Liberman
- Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, MA, 02421, USA
| | - Hyung-Bin Bae
- KAIST Analysis Center, Korea Advanced Institute of Science and Technology, Yuseong-gu, Daejeon, 34141, South Korea
| | - Tae-Woo Lee
- KAIST Analysis Center, Korea Advanced Institute of Science and Technology, Yuseong-gu, Daejeon, 34141, South Korea
| | - Myungkoo Kang
- CREOL, The College of Optics & Photonics University of Central Florida Orlando, Orlando, FL, 32816, USA
| | - Kathleen A Richardson
- CREOL, The College of Optics & Photonics University of Central Florida Orlando, Orlando, FL, 32816, USA
| | | | - Carlos A Ríos Ocampo
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, 20742, USA
| | - Yifei Zhang
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Tian Gu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
- Materials Research Laboratory, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Juejun Hu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
- Materials Research Laboratory, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Hyun Jung Kim
- NASA Langley Research Center, Hampton, VA, 23666, USA
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10
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Li R, Yue Z, Luan H, Dong Y, Chen X, Gu M. Multimodal Artificial Synapses for Neuromorphic Application. RESEARCH (WASHINGTON, D.C.) 2024; 7:0427. [PMID: 39161534 PMCID: PMC11331013 DOI: 10.34133/research.0427] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 04/06/2024] [Accepted: 06/24/2024] [Indexed: 08/21/2024]
Abstract
The rapid development of neuromorphic computing has led to widespread investigation of artificial synapses. These synapses can perform parallel in-memory computing functions while transmitting signals, enabling low-energy and fast artificial intelligence. Robots are the most ideal endpoint for the application of artificial intelligence. In the human nervous system, there are different types of synapses for sensory input, allowing for signal preprocessing at the receiving end. Therefore, the development of anthropomorphic intelligent robots requires not only an artificial intelligence system as the brain but also the combination of multimodal artificial synapses for multisensory sensing, including visual, tactile, olfactory, auditory, and taste. This article reviews the working mechanisms of artificial synapses with different stimulation and response modalities, and presents their use in various neuromorphic tasks. We aim to provide researchers in this frontier field with a comprehensive understanding of multimodal artificial synapses.
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Affiliation(s)
- Runze Li
- School of Artificial Intelligence Science and Technology,
University of Shanghai for Science and Technology, Shanghai 200093, China
- Institute of Photonic Chips,
University of Shanghai for Science and Technology, Shanghai 200093, China
- Zhangjiang Laboratory, Pudong, Shanghai 201210, China
| | - Zengji Yue
- School of Artificial Intelligence Science and Technology,
University of Shanghai for Science and Technology, Shanghai 200093, China
| | - Haitao Luan
- School of Artificial Intelligence Science and Technology,
University of Shanghai for Science and Technology, Shanghai 200093, China
| | - Yibo Dong
- School of Artificial Intelligence Science and Technology,
University of Shanghai for Science and Technology, Shanghai 200093, China
| | - Xi Chen
- School of Artificial Intelligence Science and Technology,
University of Shanghai for Science and Technology, Shanghai 200093, China
| | - Min Gu
- School of Artificial Intelligence Science and Technology,
University of Shanghai for Science and Technology, Shanghai 200093, China
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11
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Adya U, Sturm D, Chen R, Wu C, Majumdar A, Li M, Moazeni S. Post-processing of phase change material in a zero-change commercial silicon photonic process. OPTICS EXPRESS 2024; 32:27552-27562. [PMID: 39538589 DOI: 10.1364/oe.526141] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/12/2024] [Accepted: 06/21/2024] [Indexed: 11/16/2024]
Abstract
Integration of phase change material (PCM) with photonic integrated circuits can transform large-scale photonic systems by providing non-volatile control over phase and amplitude. The next generation of commercial silicon photonic processes can benefit from the addition of PCM to enable ultra-low power, highly reconfigurable, and compact photonic integrated circuits for large-scale applications. Despite all the advantages of PCM-based photonics, today's commercial foundries do not provide them in their silicon photonic processes yet. We demonstrate the first-ever electrically programmable PCM device that is monolithically post-processed in a commercial foundry silicon photonics process using a few fabrication steps and coarse-resolution photolithography. These devices achieved 1.4 dB/μm of amplitude switching contrast using a thin layer of 12.5 nm GeSbTe in this work. We have also characterized the reconfiguration speed as well as repeatability of these devices over 20,000 switching cycles. Our solution enables non-volatile photonic VLSI systems that can be fabricated at low cost and high reliability in a commercial foundry process, paving the way for the development of non-volatile programmable photonic integrated circuits for a variety of emerging applications.
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12
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Han J, Liang F, Zhao Y, Wang X, Zhao D, Wang BZ. Reconfigurable topological wave routing based on tunable valley kink states and valley-polarized chiral edge states. OPTICS EXPRESS 2024; 32:26819-26832. [PMID: 39538536 DOI: 10.1364/oe.529005] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/02/2024] [Accepted: 06/30/2024] [Indexed: 11/16/2024]
Abstract
Valley kink states and valley-polarized chiral edge states, whose topologically protected one-way propagation property provides a promising solution for manipulating light waves, have recently attracted considerable attention in topological photonics. However, it remains a great challenge to realize flexibly tunable dispersion for two different topological states and to develop a dynamically controllable topological photonic platform for switching topological wave routing. In this work, we propose a reconfigurable topological wave routing structure in the telecommunication frequency range, where phase-change material Sb2S3 cylinders with tunable refractive index are embedded into each topological channel to dynamically tune the dispersion of topological edge states. Via switching the phase states of Sb2S3 between amorphous and crystalline, we numerically demonstrate some unique applications of the proposed topological photonic crystals, such as topological optical switches, dual-channel selective transport, and controllable multi-channel intersection waveguides. More importantly, by digitally encoding each waveguide channel without the requirement of controlling each unit cell in the bulk domain, the proposed topological photonic platform provides a convenient and easy-to-implement solution for achieving dynamically reconfigurable topological wave routing propagation. Besides, the unique features of immunity against bending interface with disorders demonstrate the robustness of the topological wave propagation. Our proposed topological photonic platform has potential applications for designing intelligent photonic devices and opens up an avenue for advanced integrated photonic systems with reconfigurability.
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13
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Wei M, Lin X, Xu K, Wu Y, Wang C, Wang Z, Lei K, Bao K, Li J, Li L, Li E, Lin H. Inverse design of compact nonvolatile reconfigurable silicon photonic devices with phase-change materials. NANOPHOTONICS (BERLIN, GERMANY) 2024; 13:2183-2192. [PMID: 39634507 PMCID: PMC11502029 DOI: 10.1515/nanoph-2023-0637] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/29/2023] [Accepted: 12/07/2023] [Indexed: 12/07/2024]
Abstract
In the development of silicon photonics, the continued downsizing of photonic integrated circuits will further increase the integration density, which augments the functionality of photonic chips. Compared with the traditional design method, inverse design presents a novel approach for achieving compact photonic devices. However, achieving compact, reconfigurable photonic devices with the inverse design that employs the traditional modulation method exemplified by the thermo-optic effect poses a significant challenge due to the weak modulation capability. Low-loss phase change materials (PCMs) exemplified by Sb2Se3 are a promising candidate for solving this problem benefiting from their high refractive index contrast. In this work, we first developed a robust inverse design method to realize reconfigurable silicon and phase-change materials hybrid photonic devices including mode converter and optical switch. The mode converter exhibits a broadband operation of >100 nm. The optical switch shows an extinction ratio of >25 dB and a multilevel switching of 41 (>5 bits) by simply changing the crystallinity of Sb2Se3. Here, we experimentally demonstrated a Sb2Se3/Si hybrid integrated optical switch for the first time, wherein routing can be switched by the phase transition of the whole Sb2Se3. Our work provides an effective solution for the design of photonic devices that is insensitive to fabrication errors, thereby paving the way for high integration density in future photonic chips.
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Affiliation(s)
- Maoliang Wei
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou310027, China
| | - Xiaobin Lin
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou310027, China
| | - Kai Xu
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou310027, China
| | - Yingchun Wu
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang310030, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang310024, China
| | - Chi Wang
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou310027, China
| | - Zijia Wang
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou310027, China
| | - Kunhao Lei
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou310027, China
| | - Kangjian Bao
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang310030, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang310024, China
| | - Junying Li
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou310024, China
| | - Lan Li
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang310030, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang310024, China
| | - Erping Li
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou310027, China
| | - Hongtao Lin
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou310027, China
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14
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Li C, Pan R, Gu C, Guo H, Li J. Reconfigurable Micro/Nano-Optical Devices Based on Phase Transitions: From Materials, Mechanisms to Applications. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2306344. [PMID: 38489745 PMCID: PMC11132080 DOI: 10.1002/advs.202306344] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/04/2023] [Revised: 01/10/2024] [Indexed: 03/17/2024]
Abstract
In recent years, numerous efforts have been devoted to exploring innovative micro/nano-optical devices (MNODs) with reconfigurable functionality, which is highly significant because of the progressively increasing requirements for next-generation photonic systems. Fortunately, phase change materials (PCMs) provide an extremely competitive pathway to achieve this goal. The phase transitions induce significant changes to materials in optical, electrical properties or shapes, triggering great research interests in applying PCMs to reconfigurable micro/nano-optical devices (RMNODs). More specifically, the PCMs-based RMNODs can interact with incident light in on-demand or adaptive manners and thus realize unique functions. In this review, RMNODs based on phase transitions are systematically summarized and comprehensively overviewed from materials, phase change mechanisms to applications. The reconfigurable optical devices consisting of three kinds of typical PCMs are emphatically introduced, including chalcogenides, transition metal oxides, and shape memory alloys, highlighting the reversible state switch and dramatic contrast of optical responses along with designated utilities generated by phase transition. Finally, a comprehensive summary of the whole content is given, discussing the challenge and outlooking the potential development of the PCMs-based RMNODs in the future.
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Affiliation(s)
- Chensheng Li
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- CAS Key Laboratory of Vacuum PhysicsSchool of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
| | - Ruhao Pan
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
| | - Changzhi Gu
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- CAS Key Laboratory of Vacuum PhysicsSchool of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
| | - Haiming Guo
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- CAS Key Laboratory of Vacuum PhysicsSchool of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
| | - Junjie Li
- Beijing National Laboratory for Condensed Matter PhysicsInstitute of PhysicsChinese Academy of SciencesBeijing100190China
- CAS Key Laboratory of Vacuum PhysicsSchool of Physical SciencesUniversity of Chinese Academy of SciencesBeijing100049China
- Songshan Lake Materials LaboratoryDongguanGuangdong523808China
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15
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Fang Z, Chen R, Fröch JE, Tanguy QAA, Khan AI, Wu X, Tara V, Manna A, Sharp D, Munley C, Miller F, Zhao Y, Geiger S, Böhringer KF, Reynolds MS, Pop E, Majumdar A. Nonvolatile Phase-Only Transmissive Spatial Light Modulator with Electrical Addressability of Individual Pixels. ACS NANO 2024; 18:11245-11256. [PMID: 38639708 DOI: 10.1021/acsnano.4c00340] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/20/2024]
Abstract
Active metasurfaces with tunable subwavelength-scale nanoscatterers are promising platforms for high-performance spatial light modulators (SLMs). Among the tuning methods, phase-change materials (PCMs) are attractive because of their nonvolatile, threshold-driven, and drastic optical modulation, rendering zero-static power, crosstalk immunity, and compact pixels. However, current electrically controlled PCM-based metasurfaces are limited to global amplitude modulation, which is insufficient for SLMs. Here, an individual-pixel addressable, transmissive metasurface is experimentally demonstrated using the low-loss PCM Sb2Se3 and doped silicon nanowire heaters. The nanowires simultaneously form a diatomic metasurface, supporting a high-quality-factor (∼406) quasi-bound-state-in-the-continuum mode. A global phase-only modulation of ∼0.25π (∼0.2π) in simulation (experiment) is achieved, showing ten times enhancement. A 2π phase shift is further obtained using a guided-mode resonance with enhanced light-Sb2Se3 interaction. Finally, individual-pixel addressability and SLM functionality are demonstrated through deterministic multilevel switching (ten levels) and tunable far-field beam shaping. Our work presents zero-static power transmissive phase-only SLMs, enabled by electrically controlled low-loss PCMs and individual meta-molecule addressable metasurfaces.
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Affiliation(s)
- Zhuoran Fang
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
| | - Rui Chen
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
| | - Johannes E Fröch
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
- Department of Physics, University of Washington, Seattle, Washington 98195, United States
| | - Quentin A A Tanguy
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
| | - Asir Intisar Khan
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Xiangjin Wu
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Virat Tara
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
| | - Arnab Manna
- Department of Physics, University of Washington, Seattle, Washington 98195, United States
| | - David Sharp
- Department of Physics, University of Washington, Seattle, Washington 98195, United States
| | - Christopher Munley
- Department of Physics, University of Washington, Seattle, Washington 98195, United States
| | - Forrest Miller
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
- The Charles Stark Draper Laboratory, Cambridge, Massachusetts 02139, United States
| | - Yang Zhao
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
| | - Sarah Geiger
- The Charles Stark Draper Laboratory, Cambridge, Massachusetts 02139, United States
| | - Karl F Böhringer
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
- Institute for Nano-engineered Systems, University of Washington, Seattle, Washington 98195, United States
| | - Matthew S Reynolds
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
| | - Eric Pop
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Arka Majumdar
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
- Department of Physics, University of Washington, Seattle, Washington 98195, United States
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16
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Ko JH, Seo DH, Jeong HH, Kim S, Song YM. Sub-1-Volt Electrically Programmable Optical Modulator Based on Active Tamm Plasmon. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2310556. [PMID: 38174820 DOI: 10.1002/adma.202310556] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/11/2023] [Revised: 11/26/2023] [Indexed: 01/05/2024]
Abstract
Reconfigurable optical devices hold great promise for advancing high-density optical interconnects, photonic switching, and memory applications. While many optical modulators based on active materials have been demonstrated, it is challenging to achieve a high modulation depth with a low operation voltage in the near-infrared (NIR) range, which is a highly sought-after wavelength window for free-space communication and imaging applications. Here, electrically switchable Tamm plasmon coupled with poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS) is introduced. The device allows for a high modulation depth across the entire NIR range by fully absorbing incident light even under epsilon near zero conditions. Optical modulation exceeding 88% is achieved using a CMOS-compatible voltage of ±1 V. This modulation is facilitated by precise electrical control of the charge carrier density through an electrochemical doping/dedoping process. Additionally, the potential applications of the device are extended for a non-volatile multi-memory state optical device, capable of rewritable optical memory storage and exhibiting long-term potentiation/depression properties with neuromorphic behavior.
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Affiliation(s)
- Joo Hwan Ko
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju, 61005, Republic of Korea
| | - Dong Hyun Seo
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju, 61005, Republic of Korea
| | - Hyeon-Ho Jeong
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju, 61005, Republic of Korea
- Department of Semiconductor Engineering, Gwangju Institute of Science AND Technology, Gwangju, 61005, Republic of Korea
| | - Sejeong Kim
- Department of Electrical and Electronic Engineering, University of Melbourne, Victoria, 3000, Australia
| | - Young Min Song
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju, 61005, Republic of Korea
- Department of Semiconductor Engineering, Gwangju Institute of Science AND Technology, Gwangju, 61005, Republic of Korea
- AI Graduate School, Gwangju Institute of Science and Technology, Gwangju, 61005, Republic of Korea
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17
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Wei M, Xu K, Tang B, Li J, Yun Y, Zhang P, Wu Y, Bao K, Lei K, Chen Z, Ma H, Sun C, Liu R, Li M, Li L, Lin H. Monolithic back-end-of-line integration of phase change materials into foundry-manufactured silicon photonics. Nat Commun 2024; 15:2786. [PMID: 38555287 PMCID: PMC10981744 DOI: 10.1038/s41467-024-47206-7] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/06/2023] [Accepted: 03/16/2024] [Indexed: 04/02/2024] Open
Abstract
Monolithic integration of novel materials without modifying the existing photonic component library is crucial to advancing heterogeneous silicon photonic integrated circuits. Here we show the introduction of a silicon nitride etch stop layer at select areas, coupled with low-loss oxide trench, enabling incorporation of functional materials without compromising foundry-verified device reliability. As an illustration, two distinct chalcogenide phase change materials (PCMs) with remarkable nonvolatile modulation capabilities, namely Sb2Se3 and Ge2Sb2Se4Te1, were monolithic back-end-of-line integrated, offering compact phase and intensity tuning units with zero-static power consumption. By employing these building blocks, the phase error of a push-pull Mach-Zehnder interferometer optical switch could be reduced with a 48% peak power consumption reduction. Mirco-ring filters with >5-bit wavelength selective intensity modulation and waveguide-based >7-bit intensity-modulation broadband attenuators could also be achieved. This foundry-compatible platform could open up the possibility of integrating other excellent optoelectronic materials into future silicon photonic process design kits.
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Affiliation(s)
- Maoliang Wei
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China
| | - Kai Xu
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China
| | - Bo Tang
- Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, 100029, China
| | - Junying Li
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China.
- Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, 310024, China.
| | - Yiting Yun
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China
| | - Peng Zhang
- Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, 100029, China
| | - Yingchun Wu
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310030, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
| | - Kangjian Bao
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310030, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
| | - Kunhao Lei
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China
| | - Zequn Chen
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310030, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
| | - Hui Ma
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China
| | - Chunlei Sun
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310030, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China
| | - Ruonan Liu
- Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, 100029, China
| | - Ming Li
- State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
| | - Lan Li
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, Zhejiang, 310030, China.
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou, Zhejiang, 310024, China.
| | - Hongtao Lin
- The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China.
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18
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Alquliah A, Ha J, Ndao A. Multi-channel broadband nonvolatile programmable modal switch. OPTICS EXPRESS 2024; 32:10979-10999. [PMID: 38570958 DOI: 10.1364/oe.517313] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/28/2023] [Accepted: 02/20/2024] [Indexed: 04/05/2024]
Abstract
Mode-division multiplexing (MDM) in chip-scale photonics is paramount to sustain data capacity growth and reduce power consumption. However, its scalability hinges on developing efficient and dynamic modal switches. Existing active modal switches suffer from substantial static power consumption, large footprints, and narrow bandwidth. Here, we present, for the first time, to the best of our knowledge, a novel multiport, broadband, non-volatile, and programmable modal switch designed for on-chip MDM systems. Our design leverages the unique properties of integrating nanoscale phase-change materials (PCM) within a silicon photonic architecture. This enables independent manipulation of spatial modes, allowing for dynamic, non-volatile, and selective routing to six distinct output ports. Crucially, our switch outperforms current dynamic modal switches by offering non-volatile, energy-efficient multiport functionality and excels in performance metrics. Our switch exhibits exceptional broadband operating bandwidth exceeding 70 nm, with low loss (< 1 dB), and a high extinction ratio (> 10 dB). Our framework provides a step forward in chip-scale MDM, paving the way for future green and scalable data centers and high-performance computers.
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19
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Shang K, Niu L, Jin H, Wang H, Zhang W, Gan F, Xu P. Non-volatile 2 × 2 optical switch using multimode interference in an Sb 2Se 3-loaded waveguide. OPTICS LETTERS 2024; 49:722-725. [PMID: 38300099 DOI: 10.1364/ol.511301] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/07/2023] [Accepted: 12/18/2023] [Indexed: 02/02/2024]
Abstract
We propose a non-volatile 2 × 2 photonic switch based on multimode interference in an Sb2Se3-loaded waveguide. The different modal symmetries of the TE0 and TE1 modes supported in the multimode region change their propagation constants distinctly upon the Sb2Se3 phase transition. Through careful optical design and FDTD optimization of the multimode waveguide dimensions, efficient switching is achieved despite the modest index contrast of Sb2Se3 relative to Ge2Sb2Te5. The fabricated optical switch demonstrates favorable characteristics, including low insertion loss of ∼1 dB, a compact length of ∼27 µm, and small cross talk below -15 dB across a 35 nm bandwidth. Such non-volatile and broadband components will be critical for future high-density programmable photonic-integrated circuits for optical communications and signal processing.
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20
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Uemura T, Chiba H, Yoda T, Moritake Y, Tanaka Y, Ono M, Kuramochi E, Notomi M. Nanocavity tuning and formation controlled by the phase change of sub-micron-square GST patterns on Si photonic crystals. OPTICS EXPRESS 2024; 32:1802-1824. [PMID: 38297724 DOI: 10.1364/oe.510757] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/02/2023] [Accepted: 12/21/2023] [Indexed: 02/02/2024]
Abstract
It has been well established that photonic crystal nanocavities with wavelength sized mode volume enable various integrable photonic devices with extremely small consumption energy and small footprint. In this study, we explore the possibility of non-volatile functionalities employing photonic crystal nanocavities and phase change material, Ge2Sb2Te5 (GST). Recently, non-volatile photonic devices based on GST have attracted significant interest and are expected to enable energy-efficient photonic processing, especially for optical computing. However, the device size and the area of GST in previous studies have been rather large. Here, we propose and fabricate Si photonic crystal nanocavities on which submicron-square GST patterns are selectively loaded. Because of the strong light confinement, extremely small area of GST is sufficient to manipulate the cavity mode. We have succeeded to fabricate 30-nm-thick and several-100nm-square GST blocks patterned at the center of photonic crystal cavity with a high alignment accuracy. We confirmed that the resonant wavelength and Q-factor of cavity modes are controlled by the phase change of GST. Moreover, cavity formation controlled by submicron-sized GST is also demonstrated by GST-loaded photonic-crystal line-defect waveguides. Our approach in which we place sub-micron-sized GST inside a photonic crystal nanocavity is promising for realizing extremely energy-efficient non-volatile integrable photonic devices, such as switches, modulators, memories, and reconfigurable novel devices.
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21
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Fang Z, Mills B, Chen R, Zhang J, Xu P, Hu J, Majumdar A. Arbitrary Programming of Racetrack Resonators Using Low-Loss Phase-Change Material Sb 2Se 3. NANO LETTERS 2024; 24:97-103. [PMID: 38127716 DOI: 10.1021/acs.nanolett.3c03353] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/23/2023]
Abstract
The programmable photonic integrated circuit (PIC) is an enabling technology behind optical interconnects and quantum information processing. Conventionally, the programmability of PICs is driven by the thermo-optic effect, free carrier dispersion, or mechanical tuning. These effects afford either high speed or a large extinction ratio, but all require constant power or bias to maintain the states, which is undesirable for programmability with infrequent switching. Recent progress in programmable PICs based on nonvolatile phase-change materials (PCMs) offers an attractive solution to a truly "set-and-forget" switch that requires zero static energy. Here, we report an essential building block of large-scale programmable PICs─a racetrack resonator with independent control of coupling and phase. We changed the resonance extinction ratio (ER) without perturbing the resonance wavelength, leveraging a programmable unit based on a directional coupler and a low-loss PCM Sb2Se3. The unit is only 33-μm-long and has an operating bandwidth over 50 nm, a low insertion loss (∼0.36 dB), high ER (∼15 dB), and excellent fabrication yield of over 1000 cycles endurance across nine switches. The work is a crucial step toward future large-scale energy-efficient programmable PICs.
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Affiliation(s)
- Zhuoran Fang
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
| | - Brian Mills
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Rui Chen
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
| | - Jieying Zhang
- Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China
- Key Laboratory of Photoelectric Detection Materials and Devices of Zhejiang Province, Ningbo 315211, China
| | - Peipeng Xu
- Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China
- Key Laboratory of Photoelectric Detection Materials and Devices of Zhejiang Province, Ningbo 315211, China
| | - Juejun Hu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Arka Majumdar
- Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States
- Department of Physics, University of Washington, Seattle, Washington 98195, United States
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22
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Xu M, Chen X, Guo Y, Wang Y, Qiu D, Du X, Cui Y, Wang X, Xiong J. Reconfigurable Neuromorphic Computing: Materials, Devices, and Integration. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2301063. [PMID: 37285592 DOI: 10.1002/adma.202301063] [Citation(s) in RCA: 19] [Impact Index Per Article: 9.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/03/2023] [Revised: 05/15/2023] [Indexed: 06/09/2023]
Abstract
Neuromorphic computing has been attracting ever-increasing attention due to superior energy efficiency, with great promise to promote the next wave of artificial general intelligence in the post-Moore era. Current approaches are, however, broadly designed for stationary and unitary assignments, thus encountering reluctant interconnections, power consumption, and data-intensive computing in that domain. Reconfigurable neuromorphic computing, an on-demand paradigm inspired by the inherent programmability of brain, can maximally reallocate finite resources to perform the proliferation of reproducibly brain-inspired functions, highlighting a disruptive framework for bridging the gap between different primitives. Although relevant research has flourished in diverse materials and devices with novel mechanisms and architectures, a precise overview remains blank and urgently desirable. Herein, the recent strides along this pursuit are systematically reviewed from material, device, and integration perspectives. At the material and device level, one comprehensively conclude the dominant mechanisms for reconfigurability, categorized into ion migration, carrier migration, phase transition, spintronics, and photonics. Integration-level developments for reconfigurable neuromorphic computing are also exhibited. Finally, a perspective on the future challenges for reconfigurable neuromorphic computing is discussed, definitely expanding its horizon for scientific communities.
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Affiliation(s)
- Minyi Xu
- State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054, China
| | - Xinrui Chen
- State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054, China
| | - Yehao Guo
- State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054, China
| | - Yang Wang
- State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054, China
| | - Dong Qiu
- State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054, China
| | - Xinchuan Du
- State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054, China
| | - Yi Cui
- State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054, China
| | - Xianfu Wang
- State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054, China
| | - Jie Xiong
- State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Physics, University of Electronic Science and Technology of China, Chengdu, 610054, China
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23
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Prabhathan P, Sreekanth KV, Teng J, Ko JH, Yoo YJ, Jeong HH, Lee Y, Zhang S, Cao T, Popescu CC, Mills B, Gu T, Fang Z, Chen R, Tong H, Wang Y, He Q, Lu Y, Liu Z, Yu H, Mandal A, Cui Y, Ansari AS, Bhingardive V, Kang M, Lai CK, Merklein M, Müller MJ, Song YM, Tian Z, Hu J, Losurdo M, Majumdar A, Miao X, Chen X, Gholipour B, Richardson KA, Eggleton BJ, Sharda K, Wuttig M, Singh R. Roadmap for phase change materials in photonics and beyond. iScience 2023; 26:107946. [PMID: 37854690 PMCID: PMC10579438 DOI: 10.1016/j.isci.2023.107946] [Citation(s) in RCA: 16] [Impact Index Per Article: 8.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/20/2023] Open
Abstract
Phase Change Materials (PCMs) have demonstrated tremendous potential as a platform for achieving diverse functionalities in active and reconfigurable micro-nanophotonic devices across the electromagnetic spectrum, ranging from terahertz to visible frequencies. This comprehensive roadmap reviews the material and device aspects of PCMs, and their diverse applications in active and reconfigurable micro-nanophotonic devices across the electromagnetic spectrum. It discusses various device configurations and optimization techniques, including deep learning-based metasurface design. The integration of PCMs with Photonic Integrated Circuits and advanced electric-driven PCMs are explored. PCMs hold great promise for multifunctional device development, including applications in non-volatile memory, optical data storage, photonics, energy harvesting, biomedical technology, neuromorphic computing, thermal management, and flexible electronics.
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Affiliation(s)
- Patinharekandy Prabhathan
- Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, 21 Nanyang Link, Singapore 637371, Singapore
- Centre for Disruptive Photonic Technologies, The Photonic Institute, 50 Nanyang Avenue, Singapore 639798, Singapore
| | - Kandammathe Valiyaveedu Sreekanth
- Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A∗STAR), 2 Fusionopolis Way, Innovis #08-03, Singapore 138634, Republic of Singapore
| | - Jinghua Teng
- Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A∗STAR), 2 Fusionopolis Way, Innovis #08-03, Singapore 138634, Republic of Singapore
| | - Joo Hwan Ko
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea
| | - Young Jin Yoo
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea
| | - Hyeon-Ho Jeong
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea
| | - Yubin Lee
- School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea
| | - Shoujun Zhang
- DELL, Center for Terahertz Waves and College of Precision Instrument and Optoelectronics Engineering, Key Laboratory of Optoelectronic Information Technology (Ministry of Education of China), Tianjin University, Tianjin 300072, China
| | - Tun Cao
- DELL, School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
| | - Cosmin-Constantin Popescu
- Department of Materials Science & Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Brian Mills
- Department of Materials Science & Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Tian Gu
- Department of Materials Science & Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
- Materials Research Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Zhuoran Fang
- Department of Electrical & Computer Engineering, University of Washington, Washington, Seattle, USA
| | - Rui Chen
- Department of Electrical & Computer Engineering, University of Washington, Washington, Seattle, USA
| | - Hao Tong
- Wuhan National Research Center for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, China
| | - Yi Wang
- Wuhan National Research Center for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, China
| | - Qiang He
- Wuhan National Research Center for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, China
| | - Yitao Lu
- Wuhan National Research Center for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, China
| | - Zhiyuan Liu
- Wuhan National Research Center for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, China
| | - Han Yu
- Institute of Advanced Materials, Beijing Normal University, Beijing 100875, China
| | - Avik Mandal
- Nanoscale Optics Lab, ECE Department, University of Alberta, Edmonton, Canada
| | - Yihao Cui
- Nanoscale Optics Lab, ECE Department, University of Alberta, Edmonton, Canada
| | - Abbas Sheikh Ansari
- Nanoscale Optics Lab, ECE Department, University of Alberta, Edmonton, Canada
| | - Viraj Bhingardive
- Nanoscale Optics Lab, ECE Department, University of Alberta, Edmonton, Canada
| | - Myungkoo Kang
- CREOL, College of Optics and Photonics, University of Central Florida, Orlando, FL, USA
| | - Choon Kong Lai
- Institute of Photonics and Optical Science (IPOS), School of Physics, The University of Sydney, New South Wales, NSW 2006, Australia
- The University of Sydney Nano Institute (Sydney Nano), The University of Sydney, New South Wales, NSW 2006, Australia
| | - Moritz Merklein
- Institute of Photonics and Optical Science (IPOS), School of Physics, The University of Sydney, New South Wales, NSW 2006, Australia
- The University of Sydney Nano Institute (Sydney Nano), The University of Sydney, New South Wales, NSW 2006, Australia
| | | | - Young Min Song
- School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea
- Anti-Viral Research Center, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea
- AI Graduate School, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea
| | - Zhen Tian
- DELL, Center for Terahertz Waves and College of Precision Instrument and Optoelectronics Engineering, Key Laboratory of Optoelectronic Information Technology (Ministry of Education of China), Tianjin University, Tianjin 300072, China
| | - Juejun Hu
- Department of Materials Science & Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
- Materials Research Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Maria Losurdo
- Istituto di Chimica della Materia Condensata e di Tecnologie per l'Energia, CNR-ICMATE, Corso Stati Uniti 4, 35127 Padova, Italy
| | - Arka Majumdar
- Department of Electrical & Computer Engineering, University of Washington, Washington, Seattle, USA
| | - Xiangshui Miao
- Wuhan National Research Center for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, China
| | - Xiao Chen
- Institute of Advanced Materials, Beijing Normal University, Beijing 100875, China
| | - Behrad Gholipour
- Nanoscale Optics Lab, ECE Department, University of Alberta, Edmonton, Canada
| | - Kathleen A. Richardson
- CREOL, College of Optics and Photonics, University of Central Florida, Orlando, FL, USA
- Department of Materials Science and Engineering, University of Central Florida, Orlando, FL, USA
| | - Benjamin J. Eggleton
- Institute of Photonics and Optical Science (IPOS), School of Physics, The University of Sydney, New South Wales, NSW 2006, Australia
- The University of Sydney Nano Institute (Sydney Nano), The University of Sydney, New South Wales, NSW 2006, Australia
| | - Kanudha Sharda
- iScience, Cell Press, 125 London Wall, Barbican, London EC2Y 5AJ, UK
- iScience, Cell Press, RELX India Pvt Ltd., 14th Floor, Building No. 10B, DLF Cyber City, Phase II, Gurugram, Haryana 122002, India
| | - Matthias Wuttig
- Institute of Physics IA, RWTH Aachen University, 52074 Aachen, Germany
- Peter Grünberg Institute (PGI 10), Forschungszentrum Jülich, 52428 Jülich, Germany
| | - Ranjan Singh
- Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, 21 Nanyang Link, Singapore 637371, Singapore
- Centre for Disruptive Photonic Technologies, The Photonic Institute, 50 Nanyang Avenue, Singapore 639798, Singapore
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24
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Nobile N, Erickson JR, Ríos C, Zhang Y, Hu J, Vitale SA, Xiong F, Youngblood N. Time-Resolved Temperature Mapping Leveraging the Strong Thermo-Optic Effect in Phase-Change Materials. ACS PHOTONICS 2023; 10:3576-3585. [PMID: 37869555 PMCID: PMC10588450 DOI: 10.1021/acsphotonics.3c00620] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/09/2023] [Indexed: 10/24/2023]
Abstract
Optical phase-change materials are highly promising for emerging applications such as tunable metasurfaces, reconfigurable photonic circuits, and non-von Neumann computing. However, these materials typically require both high melting temperatures and fast quenching rates to reversibly switch between their crystalline and amorphous phases: a significant challenge for large-scale integration. In this work, we use temperature-dependent ellipsometry to study the thermo-optic effect in GST and use these results to demonstrate an experimental technique that leverages the thermo-optic effect in GST to enable both spatial and temporal thermal measurements of two common electro-thermal microheater designs currently used by the phase-change community. Our approach shows excellent agreement between experimental results and numerical simulations and provides a noninvasive method for rapid characterization of electrically programmable phase-change devices.
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Affiliation(s)
- Nicholas
A. Nobile
- University
of Pittsburgh, Deppartments of
Electrical and Computer Engineering, Pittsburgh, Pennsylvania 15261, United States
| | - John R. Erickson
- University
of Pittsburgh, Deppartments of
Electrical and Computer Engineering, Pittsburgh, Pennsylvania 15261, United States
| | - Carlos Ríos
- University
of Maryland, Departments of
Materials Science and Engineering, College Park, Maryland 20742, United States
- University
of Maryland, Institute for Research
in Electronics and Applied Physics, College Park, Maryland 20742, United States
| | - Yifei Zhang
- MIT, Departments of
Materials Science and Engineering, Cambridge, Massachusetts 02139, United States
| | - Juejun Hu
- MIT, Departments of
Materials Science and Engineering, Cambridge, Massachusetts 02139, United States
| | - Steven A. Vitale
- Advanced
Materials and Microsystems Group, MIT Lincoln
Laboratory, Lexington, Massachusetts 02421, United States
| | - Feng Xiong
- University
of Pittsburgh, Deppartments of
Electrical and Computer Engineering, Pittsburgh, Pennsylvania 15261, United States
| | - Nathan Youngblood
- University
of Pittsburgh, Deppartments of
Electrical and Computer Engineering, Pittsburgh, Pennsylvania 15261, United States
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25
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Ruan J, Gao Y, Song C, Xu P, Zhang W, Chen Y, Shen X. Compact reconfigurable on-chip polarization beam splitters enabled by phase change material. OPTICS EXPRESS 2023; 31:33091-33102. [PMID: 37859096 DOI: 10.1364/oe.498920] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/26/2023] [Accepted: 09/12/2023] [Indexed: 10/21/2023]
Abstract
In this paper, we present the design of a compact reconfigurable polarization beam splitter (PBS) enabled by ultralow-loss phase-changing Sb2Se3. By harnessing the phase-change-mediated mode coupling in a directional coupler (DC), guided light with different polarizations could be routed into different paths and this routing could be dynamically switched upon the phase change of Sb2Se3. With an optimized DC region, the proposed PBS demonstrates efficient polarization splitting with crosstalk less than -21.3 dB and insertion loss less than 0.16 dB at 1550 nm for both phase states of Sb2Se3, and features energy efficient property benefitting from the nonvolatile phase change of Sb2Se3, which holds great potentials for on-chip applications involving polarization control, including polarization-division multiplexing system, quantum photonics, microwave photonics, etc.
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26
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Aryana K, Kim HJ, Popescu CC, Vitale S, Bae HB, Lee T, Gu T, Hu J. Toward Accurate Thermal Modeling of Phase Change Material-Based Photonic Devices. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2023:e2304145. [PMID: 37649187 DOI: 10.1002/smll.202304145] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/17/2023] [Revised: 07/11/2023] [Indexed: 09/01/2023]
Abstract
Reconfigurable or programmable photonic devices are rapidly growing and have become an integral part of many optical systems. The ability to selectively modulate electromagnetic waves through electrical stimuli is crucial in the advancement of a variety of applications from data communication and computing devices to environmental science and space explorations. Chalcogenide-based phase-change materials (PCMs) are one of the most promising material candidates for reconfigurable photonics due to their large optical contrast between their different solid-state structural phases. Although significant efforts have been devoted to accurate simulation of PCM-based devices, in this paper, three important aspects which have often evaded prior models yet having significant impacts on the thermal and phase transition behavior of these devices are highlighted: the enthalpy of fusion, the heat capacity change upon glass transition, as well as the thermal conductivity of liquid-phase PCMs. The important topic of switching energy scaling in PCM devices, which also helps explain why the three above-mentioned effects have long been overlooked in electronic PCM memories but only become important in photonics, is further investigated. These findings offer insight to facilitate accurate modeling of PCM-based photonic devices and can inform the development of more efficient reconfigurable optics.
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Affiliation(s)
| | - Hyun Jung Kim
- NASA Langley Research Center, Hampton, VA, 23681, USA
| | - Cosmin-Constantin Popescu
- Department of Materials & Science Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Steven Vitale
- Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, MA, 02421, USA
| | - Hyung Bin Bae
- KAIST Analysis Center, Korea Advanced Institute of Science and Technology, Yuseong-gu, Daejeon, 34141, South Korea
| | - Taewoo Lee
- KAIST Analysis Center, Korea Advanced Institute of Science and Technology, Yuseong-gu, Daejeon, 34141, South Korea
| | - Tian Gu
- Department of Materials & Science Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
- Materials Research Laboratory, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
| | - Juejun Hu
- Department of Materials & Science Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
- Materials Research Laboratory, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA
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27
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Chen R, Fang Z, Perez C, Miller F, Kumari K, Saxena A, Zheng J, Geiger SJ, Goodson KE, Majumdar A. Non-volatile electrically programmable integrated photonics with a 5-bit operation. Nat Commun 2023; 14:3465. [PMID: 37308496 DOI: 10.1038/s41467-023-39180-3] [Citation(s) in RCA: 18] [Impact Index Per Article: 9.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/21/2023] [Accepted: 06/02/2023] [Indexed: 06/14/2023] Open
Abstract
Scalable programmable photonic integrated circuits (PICs) can potentially transform the current state of classical and quantum optical information processing. However, traditional means of programming, including thermo-optic, free carrier dispersion, and Pockels effect result in either large device footprints or high static energy consumptions, significantly limiting their scalability. While chalcogenide-based non-volatile phase-change materials (PCMs) could mitigate these problems thanks to their strong index modulation and zero static power consumption, they often suffer from large absorptive loss, low cyclability, and lack of multilevel operation. Here, we report a wide-bandgap PCM antimony sulfide (Sb2S3)-clad silicon photonic platform simultaneously achieving low loss (<1.0 dB), high extinction ratio (>10 dB), high cyclability (>1600 switching events), and 5-bit operation. These Sb2S3-based devices are programmed via on-chip silicon PIN diode heaters within sub-ms timescale, with a programming energy density of [Formula: see text]. Remarkably, Sb2S3 is programmed into fine intermediate states by applying multiple identical pulses, providing controllable multilevel operations. Through dynamic pulse control, we achieve 5-bit (32 levels) operations, rendering 0.50 ± 0.16 dB per step. Using this multilevel behavior, we further trim random phase error in a balanced Mach-Zehnder interferometer.
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Affiliation(s)
- Rui Chen
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, 98195, USA.
| | - Zhuoran Fang
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, 98195, USA
| | - Christopher Perez
- Department of Mechanical Engineering, Stanford University, Stanford, CA, 94305, USA
| | - Forrest Miller
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, 98195, USA
| | - Khushboo Kumari
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, 98195, USA
| | - Abhi Saxena
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, 98195, USA
| | - Jiajiu Zheng
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, 98195, USA
| | - Sarah J Geiger
- The Charles Stark Draper Laboratory, Cambridge, MA, 02139, USA
| | - Kenneth E Goodson
- Department of Mechanical Engineering, Stanford University, Stanford, CA, 94305, USA
| | - Arka Majumdar
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, 98195, USA.
- Department of Physics, University of Washington, Seattle, WA, 98195, USA.
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28
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Zhu H, Lu Y, Cai L. Wavelength-shift-free racetrack resonator hybrided with phase change material for photonic in-memory computing. OPTICS EXPRESS 2023; 31:18840-18850. [PMID: 37381314 DOI: 10.1364/oe.489525] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/09/2023] [Accepted: 04/27/2023] [Indexed: 06/30/2023]
Abstract
The photonic in-memory computing architecture based on phase change materials (PCMs) is increasingly attracting widespread attention due to its high computational efficiency and low power consumption. However, PCM-based microring resonator photonic computing devices face challenges in terms of resonant wavelength shift (RWS) for large-scale photonic network. Here, we propose a PCM-slot-based 1 × 2 racetrack resonator with free wavelength shift for in-memory computing. The low-loss PCMs such as Sb2Se3 and Sb2S3 are utilized to fill the waveguide slot of the resonator for the low insertion (IL) and high extinction ratio (ER). The Sb2Se3-slot-based racetrack resonator has an IL of 1.3 (0.1) dB and an ER of 35.5 (8.6) dB at the drop (through) port. The corresponding IL of 0.84 (0.27) dB and ER of 18.6 (10.11) dB are obtained for the Sb2S3-slot-based device. The change in optical transmittance of the two devices at the resonant wavelength is more than 80%. No shift of the resonance wavelength can be achieved upon phase change among the multi-level states. Moreover, the device exhibits a high degree of fabrication tolerance. The proposed device demonstrates ultra-low RWS, high transmittance-tuning range, and low IL, which provides a new scheme for realizing an energy-efficient and large-scale in-memory computing network.
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29
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López C. Artificial Intelligence and Advanced Materials. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2208683. [PMID: 36560859 DOI: 10.1002/adma.202208683] [Citation(s) in RCA: 18] [Impact Index Per Article: 9.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/21/2022] [Revised: 12/01/2022] [Indexed: 06/09/2023]
Abstract
Artificial intelligence (AI) is gaining strength, and materials science can both contribute to and profit from it. In a simultaneous progress race, new materials, systems, and processes can be devised and optimized thanks to machine learning (ML) techniques, and such progress can be turned into innovative computing platforms. Future materials scientists will profit from understanding how ML can boost the conception of advanced materials. This review covers aspects of computation from the fundamentals to directions taken and repercussions produced by computation to account for the origins, procedures, and applications of AI. ML and its methods are reviewed to provide basic knowledge of its implementation and its potential. The materials and systems used to implement AI with electric charges are finding serious competition from other information-carrying and processing agents. The impact these techniques have on the inception of new advanced materials is so deep that a new paradigm is developing where implicit knowledge is being mined to conceive materials and systems for functions instead of finding applications to found materials. How far this trend can be carried is hard to fathom, as exemplified by the power to discover unheard of materials or physical laws buried in data.
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Affiliation(s)
- Cefe López
- Instituto de Ciencia de Materiales de Madrid (ICMM), Consejo Superior de Investigaciones Científicas (CSIC), Calle Sor Juana Inés de la Cruz 3, Madrid, 28049, Spain
- Donostia International Physics Centre (DIPC), Paseo Manuel de Lardizábal 4, San Sebastián, 20018, España
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30
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Li T, Li Y, Wang Y, Liu Y, Liu Y, Wang Z, Miao R, Han D, Hui Z, Li W. Neuromorphic Photonics Based on Phase Change Materials. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:nano13111756. [PMID: 37299659 DOI: 10.3390/nano13111756] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/30/2023] [Revised: 04/19/2023] [Accepted: 05/19/2023] [Indexed: 06/12/2023]
Abstract
Neuromorphic photonics devices based on phase change materials (PCMs) and silicon photonics technology have emerged as promising solutions for addressing the limitations of traditional spiking neural networks in terms of scalability, response delay, and energy consumption. In this review, we provide a comprehensive analysis of various PCMs used in neuromorphic devices, comparing their optical properties and discussing their applications. We explore materials such as GST (Ge2Sb2Te5), GeTe-Sb2Te3, GSST (Ge2Sb2Se4Te1), Sb2S3/Sb2Se3, Sc0.2Sb2Te3 (SST), and In2Se3, highlighting their advantages and challenges in terms of erasure power consumption, response rate, material lifetime, and on-chip insertion loss. By investigating the integration of different PCMs with silicon-based optoelectronics, this review aims to identify potential breakthroughs in computational performance and scalability of photonic spiking neural networks. Further research and development are essential to optimize these materials and overcome their limitations, paving the way for more efficient and high-performance photonic neuromorphic devices in artificial intelligence and high-performance computing applications.
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Affiliation(s)
- Tiantian Li
- School of Electronic Engineering, Xi'an University of Posts and Telecommunications, Xi'an 710121, China
| | - Yijie Li
- School of Electronic Engineering, Xi'an University of Posts and Telecommunications, Xi'an 710121, China
| | - Yuteng Wang
- College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China
| | - Yuxin Liu
- School of Electronic Engineering, Xi'an University of Posts and Telecommunications, Xi'an 710121, China
| | - Yumeng Liu
- School of Electronic Engineering, Xi'an University of Posts and Telecommunications, Xi'an 710121, China
| | - Zhan Wang
- School of Electronic Engineering, Xi'an University of Posts and Telecommunications, Xi'an 710121, China
| | - Ruixia Miao
- School of Electronic Engineering, Xi'an University of Posts and Telecommunications, Xi'an 710121, China
| | - Dongdong Han
- School of Electronic Engineering, Xi'an University of Posts and Telecommunications, Xi'an 710121, China
| | - Zhanqiang Hui
- School of Electronic Engineering, Xi'an University of Posts and Telecommunications, Xi'an 710121, China
| | - Wei Li
- Los Alamos National Laboratory, Computer, Computational, and Statistical Sciences Division, Los Alamos, NM 87545, USA
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31
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Zhou W, Dong B, Farmakidis N, Li X, Youngblood N, Huang K, He Y, David Wright C, Pernice WHP, Bhaskaran H. In-memory photonic dot-product engine with electrically programmable weight banks. Nat Commun 2023; 14:2887. [PMID: 37210411 DOI: 10.1038/s41467-023-38473-x] [Citation(s) in RCA: 20] [Impact Index Per Article: 10.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/09/2022] [Accepted: 05/03/2023] [Indexed: 05/22/2023] Open
Abstract
Electronically reprogrammable photonic circuits based on phase-change chalcogenides present an avenue to resolve the von-Neumann bottleneck; however, implementation of such hybrid photonic-electronic processing has not achieved computational success. Here, we achieve this milestone by demonstrating an in-memory photonic-electronic dot-product engine, one that decouples electronic programming of phase-change materials (PCMs) and photonic computation. Specifically, we develop non-volatile electronically reprogrammable PCM memory cells with a record-high 4-bit weight encoding, the lowest energy consumption per unit modulation depth (1.7 nJ/dB) for Erase operation (crystallization), and a high switching contrast (158.5%) using non-resonant silicon-on-insulator waveguide microheater devices. This enables us to perform parallel multiplications for image processing with a superior contrast-to-noise ratio (≥87.36) that leads to an enhanced computing accuracy (standard deviation σ ≤ 0.007). An in-memory hybrid computing system is developed in hardware for convolutional processing for recognizing images from the MNIST database with inferencing accuracies of 86% and 87%.
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Affiliation(s)
- Wen Zhou
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK
| | - Bowei Dong
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK
| | - Nikolaos Farmakidis
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK
| | - Xuan Li
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK
| | - Nathan Youngblood
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK
- Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, PA, 15261, USA
| | - Kairan Huang
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK
| | - Yuhan He
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK
| | - C David Wright
- Department of Engineering, University of Exeter, Exeter, EX4 4QF, UK
| | - Wolfram H P Pernice
- Institute of Physics, University of Münster, Heisenbergstr. 11, 48149, Münster, Germany
- Kirchhoff-Institute for Physics, Heidelberg University, Im Neuenheimer Feld 227, 69120, Heidelberg, Germany
| | - Harish Bhaskaran
- Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK.
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32
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Yajima S, Nishiyama N, Shoji Y. High-speed modulation in a waveguide magneto-optical switch with impedance-matching electrode. OPTICS EXPRESS 2023; 31:16243-16250. [PMID: 37157707 DOI: 10.1364/oe.480835] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/10/2023]
Abstract
A magneto-optical switch responding to signal with 200 ps rise time was demonstrated. The switch uses current-induced magnetic field to modulate the magneto-optical effect. Impedance-matching electrodes were designed to apply high-frequency current and accommodate the high-speed switching. A static magnetic field generated by a permanent magnet was applied orthogonal to the current-induced ones and acts as a torque and helps the magnetic moment reverse its direction which assist the high-speed magnetization reversal.
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33
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Chen K, Wang X, Zou C, Liu Q, Chen K, Shi Y, Xu T, Zhao W, He L, Gao F, Li S. Two-In-One: End-Emitting Blue LED and Self-Powered UV Photodetector based on Single Trapezoidal PIN GaN Microwire for Ambient Light UV Monitoring and Feedback. SMALL METHODS 2023:e2300138. [PMID: 37093176 DOI: 10.1002/smtd.202300138] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/02/2023] [Revised: 03/23/2023] [Indexed: 05/03/2023]
Abstract
With the continuous miniaturization and integration of the semiconductor industry, micro/nanoscale integrated photonics has received extensive attention as a key technology for optical communication, optical storage, and optical interconnection. Here, a two-in-one device is reported with both unidirectional blue light emission and UV photodetection functions based on single trapezoidal PIN GaN microwire. By constructing a Fabry-Perot resonator cavity structure, the end-emitting blue light-emitting diode with a low turn-on voltage (≈0.97 V) and high color purity (full width at half maximum ≈22 nm) is implemented. Furthermore, benefiting from the slow growth rate of the semipolar planes on both sides of the trapezoidal microwire and the high diffuse reflectivity of the patterned substrate, the trapezoidal microwire sides can be used as a high-performance UV photodetector. In self-driven mode, the device exhibits a large responsivity (0.218 A W-1 ), high external quantum efficiency (83.31%) and fast response speed (rise/decay time of 0.48/0.98 ms). Finally, the prepared two-in-one device is successfully integrated into ambient light UV monitoring and feedback system and tested. This work provides a novel strategy to combine luminescence with photodetection, demonstrating high potential for applications, such as on-chip photonic integration, energy-saving communication and ambient light monitoring and feedback system.
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Affiliation(s)
- Kai Chen
- Guangdong Engineering Research Centre of Optoelectronic Functional Materials and Devices, Institute of Semiconductors, South China Normal University, Guangzhou, 510631, China
| | - Xingfu Wang
- Guangdong Engineering Research Centre of Optoelectronic Functional Materials and Devices, Institute of Semiconductors, South China Normal University, Guangzhou, 510631, China
| | - Can Zou
- Guangdong Engineering Research Centre of Optoelectronic Functional Materials and Devices, Institute of Semiconductors, South China Normal University, Guangzhou, 510631, China
| | - Qing Liu
- Guangdong Engineering Research Centre of Optoelectronic Functional Materials and Devices, Institute of Semiconductors, South China Normal University, Guangzhou, 510631, China
| | - Kun Chen
- Guangdong Engineering Research Centre of Optoelectronic Functional Materials and Devices, Institute of Semiconductors, South China Normal University, Guangzhou, 510631, China
| | - Yuhao Shi
- Guangdong Engineering Research Centre of Optoelectronic Functional Materials and Devices, Institute of Semiconductors, South China Normal University, Guangzhou, 510631, China
| | - Tengwen Xu
- Guangdong Engineering Research Centre of Optoelectronic Functional Materials and Devices, Institute of Semiconductors, South China Normal University, Guangzhou, 510631, China
| | - Wei Zhao
- Institute of Semiconductors, Guangdong Academy of Sciences, Guangzhou, 510650, China
| | - Longfei He
- Institute of Semiconductors, Guangdong Academy of Sciences, Guangzhou, 510650, China
| | - Fangliang Gao
- Guangdong Engineering Research Centre of Optoelectronic Functional Materials and Devices, Institute of Semiconductors, South China Normal University, Guangzhou, 510631, China
| | - Shuti Li
- Guangdong Engineering Research Centre of Optoelectronic Functional Materials and Devices, Institute of Semiconductors, South China Normal University, Guangzhou, 510631, China
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34
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Jin H, Niu L, Zheng J, Xu P, Majumdar A. Compact nonvolatile polarization switch using an asymmetric Sb 2Se 3-loaded silicon waveguide. OPTICS EXPRESS 2023; 31:10684-10693. [PMID: 37157610 DOI: 10.1364/oe.482817] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/10/2023]
Abstract
We propose and simulate a compact (∼29.5 µm-long) nonvolatile polarization switch based on an asymmetric Sb2Se3-clad silicon photonic waveguide. The polarization state is switched between TM0 and TE0 mode by modifying the phase of nonvolatile Sb2Se3 between amorphous and crystalline. When the Sb2Se3 is amorphous, two-mode interference happens in the polarization-rotation section resulting in efficient TE0-TM0 conversion. On the other hand, when the material is in the crystalline state, there is little polarization conversion because the interference between the two hybridized modes is significantly suppressed, and both TE0 and TM0 modes go through the device without any change. The designed polarization switch has a high polarization extinction ratio of > 20 dB and an ultra-low excess loss of < 0.22 dB in the wavelength range of 1520-1585 nm for both TE0 and TM0 modes.
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35
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Fang Z, Chen R, Tara V, Majumdar A. Non-volatile phase-change materials for programmable photonics. Sci Bull (Beijing) 2023; 68:783-786. [PMID: 37002168 DOI: 10.1016/j.scib.2023.03.034] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 03/28/2023]
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36
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Zhu H, Lu Y, Cai L. High-Performance On-Chip Racetrack Resonator Based on GSST-Slot for In-Memory Computing. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:nano13050837. [PMID: 36903715 PMCID: PMC10005299 DOI: 10.3390/nano13050837] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/07/2023] [Revised: 02/11/2023] [Accepted: 02/17/2023] [Indexed: 06/01/2023]
Abstract
The data shuttling between computing and memory dominates the power consumption and time delay in electronic computing systems due to the bottleneck of the von Neumann architecture. To increase computational efficiency and reduce power consumption, photonic in-memory computing architecture based on phase change material (PCM) is attracting increasing attention. However, the extinction ratio and insertion loss of the PCM-based photonic computing unit are imperative to be improved before its application in a large-scale optical computing network. Here, we propose a 1 × 2 racetrack resonator based on Ge2Sb2Se4Te1 (GSST)-slot for in-memory computing. It demonstrates high extinction ratios of 30.22 dB and 29.64 dB at the through port and drop port, respectively. The insertion loss is as low as around 0.16 dB at the drop port in the amorphous state and about 0.93 dB at the through port in the crystalline state. A high extinction ratio means a wider range of transmittance variation, resulting in more multilevel levels. During the transition between crystalline and amorphous states, the tuning range of the resonant wavelength is as high as 7.13 nm, which plays an important role in the realization of reconfigurable photonic integrated circuits. The proposed phase-change cell demonstrates scalar multiplication operations with high accuracy and energy efficiency due to a higher extinction ratio and lower insertion loss compared with other traditional optical computing devices. The recognition accuracy on the MNIST dataset is as high as 94.6% in the photonic neuromorphic network. The computational energy efficiency can reach 28 TOPS/W, and the computational density of 600 TOPS/mm2. The superior performance is ascribed to the enhanced interaction between light and matter by filling the slot with GSST. Such a device enables an effective approach to power-efficient in-memory computing.
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37
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Quan Z, Wan Y, Ma X, Wang J. Nonvolatile multi-level adjustable optical switch based on the phase change material. OPTICS EXPRESS 2022; 30:36096-36109. [PMID: 36258546 DOI: 10.1364/oe.464326] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/18/2022] [Accepted: 08/30/2022] [Indexed: 06/16/2023]
Abstract
For the advantages of the faster computation speed and lower energy consumption, all-optical computation has attracted great attention compared with the traditional electric computation method. Optical switches are the critical elementary units of optical computation devices. However, the traditional optical switches have two shortcomings, expending the outside energy to keep the switch state and the weak multi-level adjustable ability, which greatly restrict the realization of the large-scale photonic integrated circuits and optical spiking neural networks. In this paper, we use a subwavelength grating slot-ridge (SWGSR) waveguides on the silicon platform to design a nonvolatile multi-level adjustable optical switch based on the phase change material Ge2Sb2Te5 (GST). Changing the phase state of GST can modulate the transmission of the optical switch, and the change of the optical transmittance of the optical switch is about 70%, which is much higher than that of previous optical switches. As no static power is required to maintain the phase state, it can find promising applications in optical switch matrices and reconfigurable optical spiking neural networks.
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38
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Zhang Y, Liu S, Chen J, Cheng S, Jin W, Zhang Y, Liu Z, Zhang J, Yuan L. All-optically modulated nonvolatile optical switching based on a graded-index multimode fiber. OPTICS EXPRESS 2022; 30:36691-36699. [PMID: 36258592 DOI: 10.1364/oe.468095] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/17/2022] [Accepted: 08/28/2022] [Indexed: 06/16/2023]
Abstract
Photonic switches have attractive application prospects in optical communication data networks that require dynamic reconfiguration. Integrating optical switching devices with optical fiber, the most widely deployed photonic technology platform, can realize signal transmission and processing in practical applications. Here, we demonstrate the multilevel optical switching using the phase-change material Ge2Sb2Te5 (GST) integrated on a graded-index multimode fiber. This switching process works by exploiting the significant difference in extinction coefficient between the crystalline state and the amorphous state of the GST. Using GST to achieve the switch function, no external energy source is needed to maintain the existing state of the switch, and the device is nonvolatile. This multi-level optical switch is an all-fiber integrated device. We apply GST to the end facets of the graded-index multimode fiber by magnetron sputtering, which is a reflective structure. A pulsing scheme is used to control the optical propagation state of the optical modulation signal to realize the switching function. It can store up to 11 non-volatile reliable and repeatable levels encoded by the pump source laser with a wavelength of 1550 nm. At the same time, the switching process between states is on the order of hundreds of nanoseconds. The present experimental results demonstrate the feasibility of 11 multilevel states in the field of optical fibers commonly used in communications. It can be well coupled with the all-fiber terminal device. It also shows that the device is still applicable in the 1525 nm∼1610 nm broadband range, promising for designing future multilevel photonic switches and memory devices.
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39
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Lian C, Vagionas C, Alexoudi T, Pleros N, Youngblood N, Ríos C. Photonic (computational) memories: tunable nanophotonics for data storage and computing. NANOPHOTONICS (BERLIN, GERMANY) 2022; 11:3823-3854. [PMID: 39635175 PMCID: PMC11501226 DOI: 10.1515/nanoph-2022-0089] [Citation(s) in RCA: 16] [Impact Index Per Article: 5.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/19/2022] [Accepted: 04/18/2022] [Indexed: 12/07/2024]
Abstract
The exponential growth of information stored in data centers and computational power required for various data-intensive applications, such as deep learning and AI, call for new strategies to improve or move beyond the traditional von Neumann architecture. Recent achievements in information storage and computation in the optical domain, enabling energy-efficient, fast, and high-bandwidth data processing, show great potential for photonics to overcome the von Neumann bottleneck and reduce the energy wasted to Joule heating. Optically readable memories are fundamental in this process, and while light-based storage has traditionally (and commercially) employed free-space optics, recent developments in photonic integrated circuits (PICs) and optical nano-materials have opened the doors to new opportunities on-chip. Photonic memories have yet to rival their electronic digital counterparts in storage density; however, their inherent analog nature and ultrahigh bandwidth make them ideal for unconventional computing strategies. Here, we review emerging nanophotonic devices that possess memory capabilities by elaborating on their tunable mechanisms and evaluating them in terms of scalability and device performance. Moreover, we discuss the progress on large-scale architectures for photonic memory arrays and optical computing primarily based on memory performance.
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Affiliation(s)
- Chuanyu Lian
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, USA
- Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD, USA
| | - Christos Vagionas
- Department of Informatics, Aristotle University of Thessaloniki, Thessaloniki, Greece
- Center for Interdisciplinary Research and Innovation, Aristotle University of Thessaloniki, Thessaloniki, Greece
| | - Theonitsa Alexoudi
- Department of Informatics, Aristotle University of Thessaloniki, Thessaloniki, Greece
- Center for Interdisciplinary Research and Innovation, Aristotle University of Thessaloniki, Thessaloniki, Greece
| | - Nikos Pleros
- Department of Informatics, Aristotle University of Thessaloniki, Thessaloniki, Greece
- Center for Interdisciplinary Research and Innovation, Aristotle University of Thessaloniki, Thessaloniki, Greece
| | - Nathan Youngblood
- Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, PA, USA
| | - Carlos Ríos
- Department of Materials Science & Engineering, University of Maryland, College Park, MD, USA
- Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD, USA
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40
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Brückerhoff-Plückelmann F, Feldmann J, Gehring H, Zhou W, Wright CD, Bhaskaran H, Pernice W. Broadband photonic tensor core with integrated ultra-low crosstalk wavelength multiplexers. NANOPHOTONICS (BERLIN, GERMANY) 2022; 11:4063-4072. [PMID: 39635170 PMCID: PMC11501485 DOI: 10.1515/nanoph-2021-0752] [Citation(s) in RCA: 10] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/03/2021] [Revised: 01/26/2022] [Accepted: 01/31/2022] [Indexed: 12/07/2024]
Abstract
The integration of artificial intelligence (AI) systems in the daily life greatly increases the amount of data generated and processed. In addition to the large computational power required, the hardware needs to be compact and energy efficient. One promising approach to fulfill those requirements is phase-change material based photonic neuromorphic computing that enables in-memory computation and a high degree of parallelization. In the following, we present an optimized layout of a photonic tensor core (PTC) which is designed to perform real valued matrix vector multiplications and operates at telecommunication wavelengths. We deploy the well-studied phase-change material Ge2Sb2Te5 (GST) as an optical attenuator to perform single positive valued multiplications. In order to generalize the multiplication to arbitrary real factors, we develop a novel symmetric multiplication unit which directly includes a reference-computation branch. The variable GST attenuator enables a modulation depth of 5 dB over a wavelength range of 100 nm with a wavelength dependency below 0.8 dB. The passive photonic circuit itself ensures equal coupling to the main-computation and reference-computation branch over the complete wavelength range. For the first time, we integrate wavelength multiplexers (MUX) together with a photonic crossbar array on-chip, paving the way towards fully integrated systems. The MUX are crucial for the PTC since they enable multiple computational channels in a single photonic crossbar array. We minimize the crosstalk between the channels by designing Bragg scattering based MUX. By cascading, we achieve an extinction ratio larger than 61 dB while the insertion loss is below 1 dB.
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Affiliation(s)
| | - Johannes Feldmann
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, Oxfordshire, UK
| | - Helge Gehring
- University of Münster, Heisenberg Str. 11, Muenster48155, Germany
| | - Wen Zhou
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, Oxfordshire, UK
| | - C. David Wright
- College of Engineering, Mathematics and Physical Sciences, Harrison Building, Streatham Campus, University of Exeter, North Park Road, Exeter EX4 4QF, UK
| | - Harish Bhaskaran
- Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, Oxfordshire, UK
| | - Wolfram Pernice
- University of Münster, Heisenberg Str. 11, Muenster48155, Germany
- Heidelberg University, Kirchhoff-Institute for Physics, Im Neuenheimer Feld 227, 69120Heidelberg, Germany
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41
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Teo TY, Ma X, Pastor E, Wang H, George JK, Yang JKW, Wall S, Miscuglio M, Simpson RE, Sorger VJ. Programmable chalcogenide-based all-optical deep neural networks. NANOPHOTONICS (BERLIN, GERMANY) 2022; 11:4073-4088. [PMID: 39635165 PMCID: PMC11501810 DOI: 10.1515/nanoph-2022-0099] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/22/2022] [Revised: 04/02/2022] [Accepted: 04/18/2022] [Indexed: 12/07/2024]
Abstract
We demonstrate a passive all-chalcogenide all-optical perceptron scheme. The network's nonlinear activation function (NLAF) relies on the nonlinear response of Ge2Sb2Te5 to femtosecond laser pulses. We measured the sub-picosecond time-resolved optical constants of Ge2Sb2Te5 at a wavelength of 1500 nm and used them to design a high-speed Ge2Sb2Te5-tuned microring resonator all-optical NLAF. The NLAF had a sigmoidal response when subjected to different laser fluence excitation and had a dynamic range of -9.7 dB. The perceptron's waveguide material was AlN because it allowed efficient heat dissipation during laser switching. A two-temperature analysis revealed that the operating speed of the NLAF is ≤ 1 ns. The percepton's nonvolatile weights were set using low-loss Sb2S3-tuned Mach Zehnder interferometers (MZIs). A three-layer deep neural network model was used to test the feasibility of the network scheme and a maximum training accuracy of 94.5% was obtained. We conclude that combining Sb2S3-programmed MZI weights with the nonlinear response of Ge2Sb2Te5 to femtosecond pulses is sufficient to perform energy-efficient all-optical neural classifications at rates greater than 1 GHz.
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Affiliation(s)
- Ting Yu Teo
- Singapore University of Technology and Design, 8 Somapah Road, Singapore487372, Singapore
| | - Xiaoxuan Ma
- Deptartment of Electrical and Computer Engineering, George Washington University, Washington, DC, USA
| | - Ernest Pastor
- ICFO - Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, Av. Carl Friedrich Gauss 3, Castelldefels08860, Barcelona, Spain
| | - Hao Wang
- Singapore University of Technology and Design, 8 Somapah Road, Singapore487372, Singapore
| | - Jonathan K. George
- Deptartment of Electrical and Computer Engineering, George Washington University, Washington, DC, USA
| | - Joel K. W. Yang
- Singapore University of Technology and Design, 8 Somapah Road, Singapore487372, Singapore
| | - Simon Wall
- ICFO - Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, Av. Carl Friedrich Gauss 3, Castelldefels08860, Barcelona, Spain
- Department of Physics and Astronomy, Aarhus University, Ny Munkegade 120, Aarhus C8000, Denmark
| | - Mario Miscuglio
- Deptartment of Electrical and Computer Engineering, George Washington University, Washington, DC, USA
| | - Robert E. Simpson
- Singapore University of Technology and Design, 8 Somapah Road, Singapore487372, Singapore
| | - Volker J. Sorger
- Deptartment of Electrical and Computer Engineering, George Washington University, Washington, DC, USA
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42
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Song C, Gao Y, Wang G, Chen Y, Xu P, Gu C, Shi Y, Shen X. Compact nonvolatile 2×2 photonic switch based on two-mode interference. OPTICS EXPRESS 2022; 30:30430-30440. [PMID: 36242147 DOI: 10.1364/oe.467736] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/13/2022] [Accepted: 07/20/2022] [Indexed: 06/16/2023]
Abstract
On-chip nonvolatile photonic switches enabled by phase change materials (PCMs) are promising building blocks for power-efficient programmable photonic integrated circuits. However, large absorption loss in conventional PCMs (such as Ge2Sb2Te5) interacting with weak evanescent waves in silicon waveguides usually leads to high insertion loss and a large device footprint. In this paper, we propose a 2×2 photonic switch based on two-mode interference in a multimode slot waveguide (MSW) with ultralow loss Sb2S3 integrated inside the slot region. The MSW supports two lowest order TE modes, i.e., symmetric TE00 and antisymmetric TE01 modes, and the phase of Sb2S3 could actively tune two-mode interference behavior. Owing to the enhanced electric field in the slot, the interaction strength between modal field and Sb2S3 could be boosted, and a photonic switch containing a ∼9.4 µm-long Sb2S3-MSW hybrid section could effectively alter the light transmission between bar and cross ports upon the phase change of Sb2S3 with a cross talk (CT) less than -13.6 dB and an insertion loss (IL) less than 0.26 dB in the telecommunication C-band. Especially at 1550 nm, the CT in the amorphous (crystalline) Sb2S3 is -36.1 dB (-31.1 dB) with a corresponding IL of 0.073 dB (0.055 dB). The proposed 2×2 photonic switch is compact in size and compatible with on-chip microheaters, which may find promising applications in reconfigurable photonic devices.
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43
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Fang Z, Chen R, Zheng J, Khan AI, Neilson KM, Geiger SJ, Callahan DM, Moebius MG, Saxena A, Chen ME, Rios C, Hu J, Pop E, Majumdar A. Ultra-low-energy programmable non-volatile silicon photonics based on phase-change materials with graphene heaters. NATURE NANOTECHNOLOGY 2022; 17:842-848. [PMID: 35788188 DOI: 10.1038/s41565-022-01153-w] [Citation(s) in RCA: 47] [Impact Index Per Article: 15.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/17/2021] [Accepted: 05/13/2022] [Indexed: 06/15/2023]
Abstract
Silicon photonics is evolving from laboratory research to real-world applications with the potential to transform many technologies, including optical neural networks and quantum information processing. A key element for these applications is a reconfigurable switch operating at ultra-low programming energy-a challenging proposition for traditional thermo-optic or free carrier switches. Recent advances in non-volatile programmable silicon photonics based on phase-change materials (PCMs) provide an attractive solution to energy-efficient photonic switches with zero static power, but the programming energy density remains high (hundreds of attojoules per cubic nanometre). Here we demonstrate a non-volatile electrically reconfigurable silicon photonic platform leveraging a monolayer graphene heater with high energy efficiency and endurance. In particular, we show a broadband switch based on the technologically mature PCM Ge2Sb2Te5 and a phase shifter employing the emerging low-loss PCM Sb2Se3. The graphene-assisted photonic switches exhibited an endurance of over 1,000 cycles and a programming energy density of 8.7 ± 1.4 aJ nm-3, that is, within an order of magnitude of the PCM thermodynamic switching energy limit (~1.2 aJ nm-3) and at least a 20-fold reduction in switching energy compared with the state of the art. Our work shows that graphene is a reliable and energy-efficient heater compatible with dielectric platforms, including Si3N4, for technologically relevant non-volatile programmable silicon photonics.
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Affiliation(s)
- Zhuoran Fang
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, USA.
| | - Rui Chen
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, USA
| | - Jiajiu Zheng
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, USA
| | - Asir Intisar Khan
- Department of Electrical Engineering, Stanford University, Stanford, CA, USA
| | - Kathryn M Neilson
- Department of Electrical Engineering, Stanford University, Stanford, CA, USA
| | | | | | | | - Abhi Saxena
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, USA
| | - Michelle E Chen
- Department of Electrical Engineering, Stanford University, Stanford, CA, USA
- Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
| | - Carlos Rios
- Department of Materials Science and Engineering, University of Maryland, College Park, MD, USA
- Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD, USA
| | - Juejun Hu
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Eric Pop
- Department of Electrical Engineering, Stanford University, Stanford, CA, USA
- Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
| | - Arka Majumdar
- Department of Electrical and Computer Engineering, University of Washington, Seattle, WA, USA.
- Department of Physics, University of Washington, Seattle, WA, USA.
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44
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Wu D, Yang X, Wang N, Lu L, Chen J, Zhou L, Rahman BMA. Resonant multilevel optical switching with phase change material GST. NANOPHOTONICS (BERLIN, GERMANY) 2022; 11:3437-3446. [PMID: 39635234 PMCID: PMC11501755 DOI: 10.1515/nanoph-2022-0276] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/14/2022] [Accepted: 06/07/2022] [Indexed: 12/07/2024]
Abstract
We demonstrate a multilevel optical memristive switch based on a silicon Fabry-Perot resonator. The resonator is constructed by a pair of waveguide Bragg gratings at the ends of a multimode interferometer (MMI) covered with sub-micrometer-size Ge2Sb2Te5 (GST) thin film on top. The interaction between the optical field and GST is greatly enhanced due to the resonant effect. The GST phase transition is triggered by applying electrical pulses to the doped-silicon microheater. Light is transmitted when GST is amorphous while it is highly absorbed by the crystalline GST at the resonance wavelength, leading to a higher on-off extinction ratio (ER) compared to the non-resonant device. The resonant device achieves a maximum transmission contrast of 10.29 dB and a total of 38 distinct nonvolatile switching levels. Our work provides an effective solution to improving the multilevel switching performance of phase-change devices and paves the way for future nonvolatile silicon photonics devices.
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Affiliation(s)
- Di Wu
- Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Lab of Navigation and Location Services, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Xing Yang
- Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Lab of Navigation and Location Services, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Ningning Wang
- Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Lab of Navigation and Location Services, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Liangjun Lu
- Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Lab of Navigation and Location Services, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
- Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Lab of Navigation and Location Services, Shanghai200240, China
| | - Jianping Chen
- Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Lab of Navigation and Location Services, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
- Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Lab of Navigation and Location Services, Shanghai200240, China
| | - Linjie Zhou
- Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Lab of Navigation and Location Services, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
- Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Lab of Navigation and Location Services, Shanghai200240, China
| | - B. M. Azizur Rahman
- School of Engineering & Mathematical Sciences, City University of London, London EC1V 0HB, UK
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45
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Farmakidis N, Youngblood N, Lee JS, Feldmann J, Lodi A, Li X, Aggarwal S, Zhou W, Bogani L, Pernice WHP, Wright CD, Bhaskaran H. Electronically Reconfigurable Photonic Switches Incorporating Plasmonic Structures and Phase Change Materials. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2022; 9:e2200383. [PMID: 35434939 PMCID: PMC9284156 DOI: 10.1002/advs.202200383] [Citation(s) in RCA: 7] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/03/2022] [Revised: 03/15/2022] [Indexed: 05/11/2023]
Abstract
The ever-increasing demands for data processing and storage will require seamless monolithic co-integration of electronics and photonics. Phase-change materials are uniquely suited to fulfill this function due to their dual electro-optical sensitivity, nonvolatile retention properties, and fast switching dynamics. The extreme size disparity however between CMOS electronics and dielectric photonics inhibits the realization of efficient and compact electrically driven photonic switches, logic and routing elements. Here, the authors achieve an important milestone in harmonizing the two domains by demonstrating an electrically reconfigurable, ultra-compact and nonvolatile memory that is optically accessible. The platform relies on localized heat, generated within a plasmonic structure; this uniquely allows for both optical and electrical readout signals to be interlocked with the material state of the PCM while still ensuring that the writing operation is electrically decoupled. Importantly, by miniaturization and effective thermal engineering, the authors achieve unprecedented energy efficiency, opening up a path towards low-energy optoelectronic hardware for neuromorphic and in-memory computing.
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Affiliation(s)
| | - Nathan Youngblood
- Department of MaterialsUniversity of OxfordParks RoadOxfordOX1 3PHUK
- Present Address: Department of Electrical and Computer EngineeringSwanson School of EngineeringUniversity of PittsburghPittsburghPA15261USA
| | - June Sang Lee
- Department of MaterialsUniversity of OxfordParks RoadOxfordOX1 3PHUK
| | - Johannes Feldmann
- Department of MaterialsUniversity of OxfordParks RoadOxfordOX1 3PHUK
| | - Alessandro Lodi
- Department of MaterialsUniversity of OxfordParks RoadOxfordOX1 3PHUK
| | - Xuan Li
- Department of MaterialsUniversity of OxfordParks RoadOxfordOX1 3PHUK
| | - Samarth Aggarwal
- Department of MaterialsUniversity of OxfordParks RoadOxfordOX1 3PHUK
| | - Wen Zhou
- Department of MaterialsUniversity of OxfordParks RoadOxfordOX1 3PHUK
| | - Lapo Bogani
- Department of MaterialsUniversity of OxfordParks RoadOxfordOX1 3PHUK
| | | | - C David Wright
- Departmentof EngineeringUniversity of ExeterExeterEX4 4QFUK
| | - Harish Bhaskaran
- Department of MaterialsUniversity of OxfordParks RoadOxfordOX1 3PHUK
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46
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Gutiérrez Y, Ovvyan AP, Santos G, Juan D, Rosales SA, Junquera J, García-Fernández P, Dicorato S, Giangregorio MM, Dilonardo E, Palumbo F, Modreanu M, Resl J, Ishchenko O, Garry G, Jonuzi T, Georghe M, Cobianu C, Hingerl K, Cobet C, Moreno F, Pernice WH, Losurdo M. Interlaboratory study on Sb 2S 3 interplay between structure, dielectric function, and amorphous-to-crystalline phase change for photonics. iScience 2022; 25:104377. [PMID: 35620425 PMCID: PMC9127585 DOI: 10.1016/j.isci.2022.104377] [Citation(s) in RCA: 11] [Impact Index Per Article: 3.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/01/2022] [Revised: 04/05/2022] [Accepted: 05/04/2022] [Indexed: 11/23/2022] Open
Abstract
Antimony sulfide, Sb2S3, is interesting as the phase-change material for applications requiring high transmission from the visible to telecom wavelengths, with its band gap tunable from 2.2 to 1.6 eV, depending on the amorphous and crystalline phase. Here we present results from an interlaboratory study on the interplay between the structural change and resulting optical contrast during the amorphous-to-crystalline transformation triggered both thermally and optically. By statistical analysis of Raman and ellipsometric spectroscopic data, we have identified two regimes of crystallization, namely 250°C ≤ T < 300°C, resulting in Type-I spherulitic crystallization yielding an optical contrast Δn ∼ 0.4, and 300 ≤ T < 350°C, yielding Type-II crystallization bended spherulitic structure with different dielectric function and optical contrast Δn ∼ 0.2 below 1.5 eV. Based on our findings, applications of on-chip reconfigurable nanophotonic phase modulators and of a reconfigurable high-refractive-index core/phase-change shell nanoantenna are designed and proposed.
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Affiliation(s)
| | - Anna P. Ovvyan
- Institute of Physics, University of Münster, Heisenbergstraße 11, 48149 Münster, Germany
| | - Gonzalo Santos
- Departmento de Física Aplicada, Universidad de Cantabria, Avda. Los Castros S/n, 39005 Santander, Spain
| | - Dilson Juan
- Departmento de Física Aplicada, Universidad de Cantabria, Avda. Los Castros S/n, 39005 Santander, Spain
| | - Saul A. Rosales
- Departmento de Física Aplicada, Universidad de Cantabria, Avda. Los Castros S/n, 39005 Santander, Spain
| | - Javier Junquera
- Departamento de Ciencias de La Tierra y Física de La Materia Condensada, Universidad de Cantabria, Cantabria Campus Internacional, Avda. de Los Castros S/n, 39005 Santander, Spain
| | - Pablo García-Fernández
- Departamento de Ciencias de La Tierra y Física de La Materia Condensada, Universidad de Cantabria, Cantabria Campus Internacional, Avda. de Los Castros S/n, 39005 Santander, Spain
| | | | | | | | - Fabio Palumbo
- CNR ICMATE, Corso Stati Uniti 4, I-35127, Padova, Italy
| | - Mircea Modreanu
- Tyndall National Institute-University College Cork, Lee Maltings, Dyke Parade, Cork T12 R5CP, Ireland
| | - Josef Resl
- Center for Surface and Nanoanalytics, Johannes Kepler University, 4040 Linz, Austria
| | | | - Guy Garry
- TE-OX, 21 Rue Jean Rostand, 91400 Orsay, France
| | - Tigers Jonuzi
- VLC Photonics S.L. Universidad Politécnica de Valencia (access I) Camino de Vera S/n - 46022Valencia, Spain
| | - Marin Georghe
- NANOM MEMS Srl, G. Cosbuc 9, 505400 Rasnov, Brasov, Romania
| | - Cornel Cobianu
- NANOM MEMS Srl, G. Cosbuc 9, 505400 Rasnov, Brasov, Romania
| | - Kurt Hingerl
- Center for Surface and Nanoanalytics, Johannes Kepler University, 4040 Linz, Austria
| | - Christoph Cobet
- Center for Surface and Nanoanalytics, Johannes Kepler University, 4040 Linz, Austria
| | - Fernando Moreno
- Departmento de Física Aplicada, Universidad de Cantabria, Avda. Los Castros S/n, 39005 Santander, Spain
| | - Wolfram H.P. Pernice
- Institute of Physics, University of Münster, Heisenbergstraße 11, 48149 Münster, Germany
- Heidelberg University, Kirchhoff-Institute for Physics, Im Neuenheimer Feld 227, 69120 Heidelberg, Germany
| | - Maria Losurdo
- CNR ICMATE, Corso Stati Uniti 4, I-35127, Padova, Italy
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47
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Impact of GST thickness on GST-loaded silicon waveguides for optimal optical switching. Sci Rep 2022; 12:9774. [PMID: 35697925 PMCID: PMC9192748 DOI: 10.1038/s41598-022-13848-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/16/2022] [Accepted: 05/30/2022] [Indexed: 11/08/2022] Open
Abstract
Phase-change integrated photonics has emerged as a new platform for developing photonic integrated circuits by integrating phase-change materials like GeSbTe (GST) onto the silicon photonics platform. The thickness of the GST patch that is usually placed on top of the waveguide is crucial for ensuring high optical performance. In this work, we investigate the impact of the GST thickness in terms of optical performance through numerical simulation and experiment. We show that higher-order modes can be excited in a GST-loaded silicon waveguide with relatively thin GST thicknesses (<100 nm), resulting in a dramatic reduction in the extinction ratio. Our results would be useful for designing high-performance GST/Si-based photonic devices such as non-volatile memories that could find utility in many emerging applications.
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48
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A Review of Capabilities and Scope for Hybrid Integration Offered by Silicon-Nitride-Based Photonic Integrated Circuits. SENSORS 2022; 22:s22114227. [PMID: 35684846 PMCID: PMC9185365 DOI: 10.3390/s22114227] [Citation(s) in RCA: 12] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/27/2022] [Revised: 05/26/2022] [Accepted: 05/27/2022] [Indexed: 12/23/2022]
Abstract
In this review we present some of the recent advances in the field of silicon nitride photonic integrated circuits. The review focuses on the material deposition techniques currently available, illustrating the capabilities of each technique. The review then expands on the functionalisation of the platform to achieve nonlinear processing, optical modulation, nonvolatile optical memories and integration with III-V materials to obtain lasing or gain capabilities.
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49
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Bai H, Su X, Zhang Q, Uher C, Tang X, Wu J. Electrically Tunable Antiferroelectric to Paraelectric Switching in a Semiconductor. NANO LETTERS 2022; 22:4083-4089. [PMID: 35549361 DOI: 10.1021/acs.nanolett.2c00787] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
The monoclinic α-Cu2Se phase is the first multipolar antiferroelectric semiconductor identified recently by electron microscopy. As a semiconductor, although there are no delocalized electrons to form a static macroscopic polarization, a spontaneous and localized antiferroelectric polarization was found along multiple directions. In conventional ferroelectrics, the polarity can be switched by an applied electric field, and a ferroelectric to paraelectric transition can be modulated by temperature. Here, we show that a reversible and robust antiferroelectric to paraelectric switching in a Cu2Se semiconductor can be tuned electrically by low-voltage and high-frequency electric pulses, and the structural transformations are imaged directly by transmission electron microscopy (TEM). The atomic mechanism of the transformation was assigned to an electrically triggered cation rearrangement with a low-energy barrier. Due to differences of the antiferroelectric and paraelectric phases regarding their electrical, mechanical, and optical properties, such an electrically tunable transformation has a great potential in various applications in microelectronics.
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Affiliation(s)
- Hui Bai
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
- Nanostructure Research Center, Wuhan University of Technology, Wuhan 430070, China
| | - Xianli Su
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
| | - Qingjie Zhang
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
| | - Ctirad Uher
- Department of Physics, University of Michigan, Ann Arbor, Michigan 48109, United States
| | - Xinfeng Tang
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
| | - Jinsong Wu
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
- Nanostructure Research Center, Wuhan University of Technology, Wuhan 430070, China
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50
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Lawandi R, Heenkenda R, Sarangan A. Switchable distributed Bragg reflector using GST phase change material. OPTICS LETTERS 2022; 47:1937-1940. [PMID: 35427305 DOI: 10.1364/ol.455220] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/01/2022] [Accepted: 03/07/2022] [Indexed: 06/14/2023]
Abstract
We demonstrate the design, fabrication, and measurement of a switchable distributed Bragg reflector (DBR) that can be thermally switched from a close-to-zero reflective OFF state to a more than 70% reflection in its ON state. This is accomplished using a multilayer thin film stack using germanium (Ge) and the phase change material (PCM) Ge2Sb2Te5 (GST). The refractive indexes of Ge and GST in the amorphous state are closely matched, resulting in a nearly zero interface reflection. With appropriate antireflection coatings at the cavity ends, the overall reflection can be designed to be close to zero. When the GST is switched to the crystalline state, the refractive index contrast between the Ge and GST layers will increase dramatically contributing to the DBR reflection. Using this unique feature, we were able to design and experimentally demonstrate more than 70% reflection in the ON state and close to zero reflection in the OFF state at a wavelength of 2 µm.
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