Leveraging on ENZ Metamaterials to Achieve 2D and 3D Hyper-Resolution in Two-Photon Direct Laser Writing

Direct Laser Writing: From Materials Synthesis and Conversion to Electronic Device Processing

Direct Laser Writing (DLW) has been increasingly selected as a microfabrication route for efficient, cost-effective, high-resolution material synthesis and conversion. Concurrently, lasers participate in the patterning and assembly of functional geometries in several fields of application, of which electronics stand out. In this review, recent advances and strategies based on DLW for electronics microfabrication are surveyed and outlined, based on laser material growth strategies. First, the main DLW parameters influencing material synthesis and transformation mechanisms are summarized, aimed at selective, tailored writing of conductive and semiconducting materials. Additive and transformative DLW processing mechanisms are discussed, to open space to explore several categories of materials directly synthesized or transformed for electronics microfabrication. These include metallic conductors, metal oxides, transition metal chalcogenides and carbides, laser-induced graphene, and their mixtures. By accessing a wide range of material types, DLW-based electronic applications are explored, including processing components, energy harvesting and storage, sensing, and bioelectronics. The expanded capability of lasers to participate in multiple fabrication steps at different implementation levels, from material engineering to device processing, indicates their future applicability to next-generation electronics, where more accessible, green microfabrication approaches integrate lasers as comprehensive tools.

Dual-Functional Tunable Metasurface for Meta-Axicon with a Variable Depth of Focus and Continuous-Zoom Metalens

Optical metasurfaces have been widely investigated for their versatile ability to manipulate wavefront and miniaturize traditional optical components into ultrathin planar devices. The integration of metasurfaces with multifunctionality and tunability has fundamentally transformed optics with unprecedented control over light propagation and manipulation. This study introduces a pioneering framework for the development of tunable metasurfaces with multifunctionality, and an example of a tunable metasurface of dual functionalities is proposed and numerically verified as one of the tunable meta-axicon for generating Bessel beams with a variable depth of focus (DOF) and a continuous-zoom metalens. Specifically, this design achieves dual-functional phase modulation by helicity-multiplexing from the combination of the geometric phase as well as the propagation phase and realizes tunability for both functionalities through rotational actuation between double metasurface layers. As a result, dual functionalities with continuous tunability of the proposed TiO2 metasurface are enabled independently for the left and right circularly polarized (LCP and RCP) incidences at 532 nm. Specifically, LCP light triggers the metasurface to function as a tunable axicon, generating non-diffracting Bessel beams with variable numerical apertures (NA) and DOFs. Conversely, the RCP incidence induces it to operate as a continuous-zoom metalens and generates variable spherical wavefront focusing on diverse focal lengths. This study not only initially implements the design of tunable meta-axicon, but also achieves the integration of such a tunable meta-axicon and continuous-zoom metalens within a single metasurface configuration. The proposed device could find potential applications in biological imaging, microscopic measurement, laser fabrication, optical manipulation, multi-plane imaging, depth estimation, optical data storage, etc.

Plasmonic direct-writing lithography via high numerical aperture objectives

The exploration of light-matter interactions at the sub-wavelength scale requires advanced nano-patterning tools with low cost and high flexibility. Plasmonic lithography as a promising candidate receives much attention owing to its ability to confine ultraviolet light sources into an extremely tiny volume. To date, most plasmonic patterning schemes utilize metallic nano-structures to achieve tight focusing. The drawback is that the plasmonic structures need, however, to be pre-defined, usually accompanied with the expense of complex fabrication processes. Here we numerically and experimentally report an antenna-free plasmonic lithography technique using high numerical aperture (NA) objectives as the scanning head. Minimum feature sizes of 0.36λ/NA and 0.46λ/NA are numerically and experimentally demonstrated, respectively, under the linearly polarized continuous-wave illumination at 457 nm with no involvement of nonlinear effects. Back-focal-plane imaging is used to visualize surface-plasmon excitations, acting as a viable way of adjusting focus precisely. Our method can serve as a candidate for laser processing at the sub-wavelength scale, and offers a truly convenient and economical way of nano-patterning.

Quantum Dot Transfer from the Organic Phase to Acrylic Monomers for the Controlled Integration of Single-Photon Sources by Photopolymerization

This paper reports on a new strategy for obtaining homogeneous dispersion of grafted quantum dots (QDs) in a photopolymer matrix and their use for the integration of single-photon sources by two-photon polymerization (TPP) with nanoscale precision. The method is based on phase transfer of QDs from organic solvents to an acrylic matrix. The detailed protocol is described, and the corresponding mechanism is investigated and revealed. The phase transfer is done by ligand exchange through the introduction of mono-2-(methacryloyloxy) ethyl succinate (MES) that replaces oleic acid (OA). Infrared (IR) measurements show the replacement of OA on the QD surface by MES after ligand exchange. This allows QDs to move from the hexane phase to the pentaerythritol triacrylate (PETA) phase. The QDs that are homogeneously dispersed in the photopolymer without any clusterization do not show any significant broadening in their photoluminescence spectra even after more than 3 years. The ability of the hybrid photopolymer to create micro- and nanostructures by two-photon polymerization is demonstrated. The homogeneity of emission from 2D and 3D microstructures is confirmed by confocal photoluminescence microscopy. The fabrication and integration of a single-photon source in a spatially controlled manner by TPP is achieved and confirmed by auto-correlation measurements.

Two Photon Induced Pulsed Laser Polymerization with Near Infrared Light

We introduce two-photon (2P) pulsed laser polymerization (PLP) at 800 nm, demonstrating its working principle even through biological tissue. We show that 2P PLP is reliable in determining propagation rate coefficients on the example of the free radical polymerization of methyl methacrylate (MMA) at frequencies ranging from 10 to 100 Hz.

Femtosecond Laser Ablation of Quantum Dot Films toward Physical Unclonable Multilevel Fluorescent Anticounterfeiting Labels

Femtosecond laser ablation (FsLA) technology has been demonstrated to achieve programmable ablation and removal of diverse materials with high precision. Owing to the cross-scale and digital processing characteristics, the FsLA technology has attracted increasing interest. However, the moderate repeatability of FsLA limits its application in the fabrication of advanced micro-/nanostructures due to the nonidentity of each laser pulse and fluctuation of environment. Fortunately, moderate repeatability combined with programmable ablation and high precision perfectly matches with the technical requirements of a physical unclonable fluorescent anticounterfeiting label. Herein, we applied FsLA to quantum dot (QD) films to fabricate a physical unclonable multilevel fluorescent anticounterfeiting label. Visual Jilin University logos, quick response (QR) codes, microlines, and microholes have been achieved for the multilevel anticounterfeiting functions. Of particular significance, the microholes with a macroidentical and microidentifiable geometry guarantee the physical unclonable functions (PUFs). Moreover, the fluorescent anticounterfeiting label is compatible with deep learning algorithms that facilitate authentication to be convenient and accurate. This work shows a fantastic future potential to be a core anticounterfeiting technique for commercial products and drugs.

Complex aspherical singlet and doublet microoptics by grayscale 3D printing

We demonstrate 3D printed aspherical singlet and doublet microoptical components by grayscale lithography and characterize and evaluate their excellent shape accuracy and optical performance. The typical two-photon polymerization (2PP) 3D printing process creates steps in the structure which is undesired for optical surfaces. We utilize two-photon grayscale lithography (2GL) to create step-free lenses. To showcase the 2GL process, the focusing ability of a spherical and aspherical singlet lens are compared. The surface deviations of the aspherical lens are minimized by an iterative design process and no distinct steps can be measured via confocal microscopy. We design, print, and optimize an air-spaced doublet lens with a diameter of 300 µm. After optimization, the residual shape deviation is less than 100 nm for the top lens and 20 nm for the bottom lens of the doublet. We examine the optical performance with an USAF 1951 resolution test chart to find a resolution of 645 lp/mm.

Benzylidene Cyclopentanone Derivative Photoinitiator for Two-Photon Photopolymerization-Photochemistry and 3D Structures Fabrication for X-ray Application

Micron- and submicron-scale 3D structure realization nowadays is possible due to the two-photon photopolymerization (TPP) direct laser writing photolithography (DLW photolithography) method. However, the achievement of lithographic features with dimensions less than 100 nm is in demand for the fabrication of micro-optical elements with high curvature values, including X-ray microlenses. Spectroscopic and photochemical study of a photoinitiator (PI) based on a methyl methacrylate derivative of 2,5-bis(4-(dimethylamino)benzylidene) cyclopentanone was performed. Enhanced intersystem crossing in the methyl methacrylate derivative results in increased radical generation for the subsequent initiation of polymerization. A comprehensive study of the new photocompositions was performed, with particular emphasis on photochemical constants, the degree of photopolymerization, and topology. The optimal parameters for the fabrication of mechanically stable structures were determined in this research. The threshold dose parameters for lithography (radiation power of 5 mW at a speed of 180 µm/s) when trying to reach saturation values with a conversion degree of (35 ± 1) % were defined, as well as parameters for sub-100 nm feature fabrication. Moreover, the 45 nm feature size for elements was reached. Fabrication of X-ray lens microstructures was also demonstrated.

Designed Growth of AgNP Arrays for Anti-counterfeiting Based on Surface-Enhanced Raman Spectroscopy Signals

Based on etched PS sphere arrays, the different growths of Ag nanoparticles with tunable LSPR are designed when SiO2-25 nm/Ag-30 nm/SiO2-100 nm sandwich nanocavity structures are annealed at 500 °C, including the hexagonal silver nanoparticle rings, circular silver nanoparticle rings, and aggregated silver nanoparticles. The uniformity of particle size and regularity of position generate enhanced electromagnetic field and good surface-enhanced Raman spectroscopy signals as confirmed by UV-vis observation and finite difference time domain method simulation. The developed nanostructures are effectively used as stable, nonreproducible, and markable anti-counterfeiting signs.

All-Optical Tunability of Metalenses Permeated with Liquid Crystals

Metasurfaces have been extensively engineered to produce a wide range of optical phenomena, allowing exceptional control over the propagation of light. However, they are generally designed as single-purpose devices without a modifiable postfabrication optical response, which can be a limitation to real-world applications. In this work, we report a nanostructured planar-fused silica metalens permeated with a nematic liquid crystal (NLC) and gold nanoparticle solution. The physical properties of embedded NLCs can be manipulated with the application of external stimuli, enabling reconfigurable optical metasurfaces. We report the all-optical, dynamic control of the metalens optical response resulting from thermoplasmonic-induced changes of the NLC solution associated with the nematic-isotropic phase transition. A continuous and reversible tuning of the metalens focal length is experimentally demonstrated, with a variation of 80 μm (0.16% of the 5 cm nominal focal length) along the optical axis. This is achieved without direct mechanical or electrical manipulation of the device. The reconfigurable properties are compared with corroborating numerical simulations of the focal length shift and exhibit close correspondence.

Low Cost and Easy Validation Anticounterfeiting Plasmonic Tags Based on Thin Films of Metal and Dielectric

Multilevel anticounterfeiting Physical Unclonable Function (PUF) tags based on thin film of silver (Ag), Zinc Oxide (ZnO) and PolyVinylPyrrolidone (PVP), are experimentally demonstrated and validated. We exploit the low adhesion of silver to glass and consequent degradation during ZnO deposition to induce morphological randomness. Several photographs of the tag surfaces have been collected with different illumination conditions and using two smartphones of diverse brand. The photos were analyzed using an image recognition algorithm revealing low common minutiae for different tags. Moreover, the optical response reveals peculiar spectra due to labels of plasmonic nature. The proposed systems can be easily fabricated on large areas and represent a cost-effective solution for practical protection of objects.

Metamaterials and Metasurfaces: A Review from the Perspectives of Materials, Mechanisms and Advanced Metadevices

Throughout human history, the control of light, electricity and heat has evolved to become the cornerstone of various innovations and developments in electrical and electromagnetic technologies. Wireless communications, laser and computer technologies have all been achieved by altering the way light and other energy forms act naturally and how to manage them in a controlled manner. At the nanoscale, to control light and heat, matured nanostructure fabrication techniques have been developed in the last two decades, and a wide range of groundbreaking processes have been achieved. Photonic crystals, nanolithography, plasmonics phenomena and nanoparticle manipulation are the main areas where these techniques have been applied successfully and led to an emergent material sciences branch known as metamaterials. Metamaterials and functional material development strategies are focused on the structures of the matter itself, which has led to unconventional and unique electromagnetic properties through the manipulation of light-and in a more general picture the electromagnetic waves-in widespread manner. Metamaterial's nanostructures have precise shape, geometry, size, direction and arrangement. Such configurations are impacting the electromagnetic light waves to generate novel properties that are difficult or even impossible to obtain with natural materials. This review discusses these metamaterials and metasurfaces from the perspectives of materials, mechanisms and advanced metadevices in depth, with the aim to serve as a solid reference for future works in this exciting and rapidly emerging topic.

Investigation of Lattice Plasmon Modes in 2D Arrays of Au Nanoantennas

The coupling of gold nanoantennas (AuNAs) in the arrangement of monomers in bidimensional gratings is investigated both experimentally and numerically. The influence of edge diffraction, corresponding to the grazing propagation of specific diffracted orders, and the dependence of grating parameters on lattice plasmon modes are studied. It is shown that the grating pitch influences the spectral position of the Rayleigh wavelength related to the grazing diffraction in air and/or in glass. In order to investigate the effect of diffraction and its interplay with the Rayleigh wavelength, extinction measurements with different incidence angles are carried out. For incidence angles above θ=20∘, along with the excitation of quadrupolar and vertical modes, very narrow dips or sharp excitations are observed in the spectra. These ones strongly depend on the respective spectral position of Rayleigh anomaly and specific dipolar mode, on the propagation direction of the grazing diffraction, and on the considered plasmon mode. These features are explained in the light of numerical calculations obtained with Green’s tensor method. All the above different characteristics and couplings are of great practical interest, especially for a possible implementation in biosensor devices and for other technological applications spanning from precision medicine and life science to telecommunications and energy systems.

Design of Two-Mode Spectroscopic Sensor for Biomedical Applications: Analysis and Measurement of Relative Intensity Noise through Control Mechanism

The design of an intracavity spectroscopy based two-mode biomedical sensor involves a thorough investigation of the system. For this purpose, the individual components that are present in the system must be examined. This work describes the principle of two very important gadgets, namely the Fibre Bragg Grating (FBG), and the tunable coupler. We adhere to a Petri network scheme to model and analyze the performance of the FBG, and the results mirror strikingly low difference in the values of Bragg Wavelength during its ascending and descending operational principle, thereby maintaining the accuracy of the sensor’s results. Next, a pseudocode is developed and implemented for the investigation of the optical coupler in LabView. The values of its maximum output power are determined, and the coupling ratio for various values of controlling voltage is determined at three different wavelengths. The hysteresis results mirror an extremely low difference between the forward and reverse values in the results. Both the results of the FBG and the coupler are thereby extremely reliable to use them in the laser system, as evident from the respective intensity noise outcomes, as well as the experimentation on substances of interest (Dichloro Methane and Propofol).

Leveraging AI in Photonics and Beyond

Artificial intelligence (AI) techniques have been spreading in most scientific areas and have become a heated focus in photonics research in recent years. Forward modeling and inverse design using AI can achieve high efficiency and accuracy for photonics components. With AI-assisted electronic circuit design for photonics components, more advanced photonics applications have emerged. Photonics benefit a great deal from AI, and AI, in turn, benefits from photonics by carrying out AI algorithms, such as complicated deep neural networks using photonics components that use photons rather than electrons. Beyond the photonics domain, other related research areas or topics governed by Maxwell’s equations share remarkable similarities in using the help of AI. The studies in computational electromagnetics, the design of microwave devices, as well as their various applications greatly benefit from AI. This article reviews leveraging AI in photonics modeling, simulation, and inverse design; leveraging photonics computing for implementing AI algorithms; and leveraging AI beyond photonics topics, such as microwaves and quantum-related topics.

A Metasurface Beam Combiner Based on the Control of Angular Response

Beam combiners are widely used in various optical applications including optical communication and smart detection, which spatially overlap multiple input beams and integrate a output beam with higher intensity, multiple wavelengths, coherent phase, etc. Since conventional beam combiners consist of various optical components with different working principles depending on the properties of incident light, they are usually bulky and have certain restrictions on the incident light. In recent years, metasurfaces have received much attention and become a rapidly developing research field. Their novel mechanisms and flexible structural design provide a promising way to realize miniaturized and integrated components in optical systems. In this paper, we start from studying the ability of metasurfaces to manipulate the incident wavefront, and then propose a metasurface beam combiner in theory that generates an extraordinary refracted beam based on the principle of phase gradient metasurface. This metasurface combines two monochromatic light incidents at different angles with identical polarization but arbitrary amplitudes and initial phases. The combining efficiency, which is defined as the ratio of the power in the combining direction to the total incident power, is 42.4% at the working wavelength of 980 nm. The simulated results indicate that this proposed method is able to simplify the design of optical combiners, making them miniaturized and integrated for smart optical systems.

Refractive Index Sensing Based on Multiple Fano Resonances in a Split-Ring Cavity-Coupled MIM Waveguide

A metal–insulator–metal (MIM) waveguide consisting of a circular split-ring resonance cavity (CSRRC) and a double symmetric rectangular stub waveguide (DSRSW) is designed, which can excite quadruple Fano resonances. The finite element method (FEM) is used to investigate influences of geometric parameters on the transmission characteristics of the structure. The results show that Fano resonances are excited by the interference between the DSRSW and the CSRRC. Among them, the resonance wavelengths of the Fano resonances are tuned by the narrow-band discrete state excited by the CSRRC, and the resonance line transmittance and profiles are tuned by the wide-band continuous state excited by the DSRSW. The sensitivity (S) can be up to 1328.8 nm/RIU, and the figure of merit (FOM) can be up to 4.80 × 104. Based on these advantages, the structure has potential applications in sensing in the sub-wavelength range.

Hybrid Plasmonic/Photonic Nanoscale Strategy for Multilevel Anticounterfeit Labels

Innovative goods authentication strategies are of fundamental importance considering the increasing counterfeiting levels. Such a task has been effectively addressed with the so-called physical unclonable functions (PUFs), being physical properties of a system that characterize it univocally. PUFs are commonly implemented by exploiting naturally occurring non-idealities in clean-room fabrication processes. The broad availability of classic paradigm PUFs, however, makes them vulnerable. Here, we propose a hybrid plasmonic/photonic multilayered structure working as a three-level strong PUF. Our approach leverages on the combination of a functional nanostructured surface, a resonant response, and a unique chromatic signature all together in one single device. The structure consists of a resonant cavity, where the top mirror is replaced with a layer of plasmonic Ag nanoislands. The naturally random spatial distribution of clusters and nanoparticles formed by this deposition technique constitutes the manufacturer-resistant nanoscale morphological fingerprint of the proposed PUF. The presence of Ag nanoislands allows us to tailor the interplay between the photonic and plasmonic modes to achieve two additional security levels. The first one is constituted by the chromatic response and broad iridescence of our structures, while the second by their rich spectral response, accessible even through a common smartphone light-emitting diode. We demonstrate that the proposed architectures could also be used as an irreversible and quantitative temperature exposure label. The proposed PUFs are inexpensive, chip-to-wafer-size scalable, and can be deposited over a variety of substrates. They also hold a great promise as an encryption framework envisioning morpho-cryptography applications.

Plasmonic Metasurfaces Based on Pyramidal Nanoholes for High-Efficiency SERS Biosensing

An inverted pyramidal metasurface was designed, fabricated, and studied at the nanoscale level for the development of a label-free pathogen detection on a chip platform that merges nanotechnology and surface-enhanced Raman scattering (SERS). Based on the integration and synergy of these ingredients, a virus immunoassay was proposed as a relevant proof of concept for very sensitive detection of hepatitis A virus, for the first time to our best knowledge, in a very small volume (2 μL), without complex signal amplification, allowing to detect a minimal virus concentration of 13 pg/mL. The proposed work aims to develop a high-flux and high-accuracy surface-enhanced Raman spectroscopy (SERS) nanobiosensor for the detection of pathogens to provide an effective method for early and easy water monitoring, which can be fast and convenient.

Controllable Fast and Slow Light in Photonic-Molecule Optomechanics with Phonon Pump

We theoretically investigate the optical output fields of a photonic-molecule optomechanical system in an optomechanically induced transparency (OMIT) regime, in which the optomechanical cavity is optically driven by a strong pump laser field and a weak probe laser field and the mechanical mode is driven by weak coherent phonon driving. The numerical simulations indicate that when the driven frequency of the phonon pump equals the frequency difference of the two laser fields, we show an enhancement OMIT where the probe transmission can exceed unity via controlling the driving amplitude and pump phase of the phonon driving. In addition, the phase dispersion of the transmitted probe field can be modified for different parametric regimes, which leads to a tunable delayed probe light transmission. We further study the group delay of the output probe field with numerical simulations, which can reach a tunable conversion from slow to fast light with the manipulation of the pump laser power, the ratio parameter of the two cavities, and the driving amplitude and phase of the weak phonon pump.

A High-Sensitivity SPR Sensor with Bimetal/Silicon/Two-Dimensional Material Structure: A Theoretical Analysis

In this paper, we reported a theoretical study of a novel Surface plasmon resonance (SPR) biosensor composed of BK7 prism, gold (Au)/silver (Ag) bimetallic layer, silicon and two-dimensional (2D) materials. The bimetallic layer combines the advantages of Au and Ag and the high refractive index silicon layer enhances the electric field on the surface of the sensor, so that the sensor has a better overall performance in terms of sensitivity and figure of merit (FOM). Compared with ordinary dielectrics, 2D materials have excellent photoelectric properties, such as larger specific surface area, higher carrier density and stronger adsorption capacity, which improve the detection ability of the sensor. The sensitivity of the optimized sensor achieves 297.2°/RIU, 274°/RIU and 246°/RIU when the silicon layer is covered with graphene, MXene (Ti3T2Cx) and MoS2, respectively. Compared with the traditional SPR sensor, the sensitivity of the structure has been significantly improved, and its excellent performance has broad application prospects in biosensing and other fields.

Photo-Aligned Nematic Liquid Crystals Enable the Modulation of Thermoplasmonic Heating

We experimentally demonstrate that the plasmonic heat delivered by a single layer of homogeneously distributed gold nanoparticles (AuNPs), immobilized on a glass substrate, can be optically tuned by taking advantage of the properties of an organic layer based on azobenzene and nematic liquid crystal (NLC) molecules. The effect, which exploits the dependence of the NLC refractive index value on the molecular director orientation, is realized using the polarization-dependent, light-induced molecular reorientation of a thin film of photo-aligning material that the NLC is in contact with. The reversibility of the optically induced molecular director reorientation of the NLC enables an active modulation of the plasmonic photo-induced heat.