Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition

Elucidation of Local Ordering and Atomic-Scale Structure in Polymer-Derived SiOC

Silicon oxycarbide (SiOC) is a versatile ceramic material with tunable microstructure and compositions that can be modulated through precursor chemistry and processing conditions. Though there are several noteworthy uses of SiOC across a range of application spaces, the difficulties in elucidating the short- to medium-range order within these materials have limited the maturation of strategies to precisely control SiC x O4-x compositions for user-tailored applications. In this contribution, we implement a range of synchrotron scattering and spectroscopy methods coupled with stochastic modeling techniques to elucidate changes in local chemistry and structure associated with the pyrolysis of a commercially available SiOC polymer precursor. Stochastic modeling approaches provide valuable insights into decoupling local Si-O and Si-C environments while confirming predominate heterogeneous phases in materials. Using pyrolysis temperatures between 250 to 800 °C results in a heterogeneous material predominately composed of SiOC and amorphous SiO2 domains. At 1100 °C, redistribution of Si-C pairs in the SiOC network and Si-O from the SiO2 domains create a more ordered SiOC phase with local cubic SiC-like ordering. In addition, residual carbon leads to a detectable carbon phases at 1100 °C that persist at higher temperatures. These efforts address the difficulties of obtaining atomic-scale insights into the local structure and nanoscale heterogeneities in SiOC, providing pathways toward establishing structure-property relationships for future materials development.

Freestanding 2D Glasses by Atomic Layer Deposition

Atomic layer deposition (ALD) is notable for highly controlled syntheses of ultrathin materials through self-limiting reactions. However, ALD materials have strong bonding interactions with substrates, which have generally made substrate removal for the preparation of freestanding large-area 2D films challenging. Here, we report a strategy for the fabrication of freestanding, amorphous ultrathin films by growing on single-crystal NaCl. NaCl surfaces, typically poor substrates, are improved by inserting hydroxyl groups across the surface. This heterogeneous surface forms bonding and nonbonding interactions with ALD materials, allowing us to grow amorphous ultrathin alumina and titania on the surface and remove the films with minimal damage. We show that this tailored substrate can be removed under mild conditions and that the ultrathin material can be transferred to an arbitrary substrate with assistance from a poly(methyl methacrylate) scaffold. This simple process results in materials that span 1 cm2 and have few cracks and pinholes. This strategy provides easy access to an expansive class of freestanding 2D glasses that have previously been challenging targets of fabrication at this scale.

Role of Surface Chemistry in Pyrrole Autoxidation

Chemical compounds in liquid hydrocarbon fuels that contain five-membered pyrrole (Py) rings readily react with oxygen from air and polymerize through a process known as autoxidation. Autoxidation degrades the quality of fuel and leads to the formation of unwanted gum deposits in fuel storage vessels and engine components. Recent work has found that the rate of formation of these gum deposits is affected by material surfaces exposed to the fuel, but the origins of these effects are not yet understood. In this work, atomic layer deposition (ALD) is employed to grow aluminum oxide, zinc oxide, titanium dioxide, and manganese oxide films on silicon substrates to control material surface chemistry and study Py adsorption and gum nucleation on these surfaces. Quartz crystal microbalance (QCM) studies of gas-phase Py adsorption indicate 1.5-2.8 kcal/mol exergonic adsorption of Lewis basic Py onto Lewis acidic surface sites. More favorable Py adsorption onto Lewis acidic surfaces correlates with faster polypyrrole (PPy) film nucleation in vapor phase oxidative molecular deposition (oMLD) polymerization studies. Liquid-phase studies of Py autoxidation reveal primarily particulate formation, indicating a homogeneous PPy propagation step rather than a completely surface-based polymerization mechanism. The amount of PPy particulate formation is positively correlated with more acidic surfaces (lower pH-PZC values), indicating that the rate-limiting step for Py autoxidation involves Lewis acidic surface sites. These studies help to establish new mechanistic insights into the role of surface chemistry in the autoxidation of pyrrolic species. We apply this knowledge to demonstrate a polymer coating formed by vapor phase polymer deposition that slows autoxidation by 2 orders of magnitude.

On the Structure of Oxygen Deficient Amorphous Oxide Films

Understanding defects in amorphous oxide films and heterostructures is vital to improving performance of microelectronic devices, thin-film transistors, and electrocatalysis. However, to what extent the structure and properties of point defects in amorphous solids are similar to those in the crystalline phase are still debated. The validity of this analogy and the experimental and theoretical evidence of the effects of oxygen deficiency in amorphous oxide films are critically discussed. The authors start with the meaning and significance of defect models, such as "oxygen vacancy" in crystalline oxides, and then introduce experimental and computational methods used to study intrinsic defects in amorphous oxides and discuss their limitations and challenges. To test the validity of existing defect models, ab initio molecular dynamics is used with a non-local density functional to model the structure and electronic properties of oxygen-deficient amorphous alumina. Unlike some previous studies, the formation of deep defect states in the bandgap caused by the oxygen deficiency is found. Apart from atomistic structures analogous to crystal vacancies, the formation of more stable defect states characterized by the bond formation between under-coordinated Al ions is shown. The limitations of such defect models and how they may be overcome in simulations are discussed.

Nature of GaOx Shells Grown on Silica by Atomic Layer Deposition

Gallia-based shells with a thickness varying from a submonolayer to ca. 2.5 nm were prepared by atomic layer deposition (ALD) using trimethylgallium, ozone, and partially dehydroxylated silica, followed by calcination at 500 °C. Insight into the atomic-scale structure of these shells was obtained by high-field 71Ga solid-state nuclear magnetic resonance (NMR) experiments and the modeling of X-ray differential pair distribution function data, complemented by Ga K-edge X-ray absorption spectroscopy and 29Si dynamic nuclear polarization surface enhanced NMR spectroscopy (DNP SENS) studies. When applying one ALD cycle, the grown submonolayer contains mostly tetracoordinate Ga sites with Si atoms in the second coordination sphere ([4]Ga(Si)) and, according to 15N DNP SENS using pyridine as the probe molecule, both strong Lewis acid sites (LAS) and strong Brønsted acid sites (BAS), consistent with the formation of gallosilicate Ga-O-Si and Ga-μ2-OH-Si species. The shells obtained using five and ten ALD cycles display characteristics of amorphous gallia (GaOx), i.e., an increased relative fraction of pentacoordinate sites ([5]Ga(Ga)), the presence of mild LAS, and a decreased relative abundance of strong BAS. The prepared Ga1-, Ga5-, and Ga10-SiO2-500 materials catalyze the dehydrogenation of isobutane to isobutene, and their catalytic performance correlates with the relative abundance and strength of LAS and BAS, viz., Ga1-SiO2-500, a material with a higher relative fraction of strong LAS, is more active and stable compared to Ga5- and Ga10-SiO2-500. In contrast, related ALD-derived Al1-, Al5-, and Al10-SiO2-500 materials do not catalyze the dehydrogenation of isobutane and this correlates with the lack of strong LAS in these materials that instead feature abundant strong BAS formed via the atomic-scale mixing of Al sites with silica, leading to Al-μ2-OH-Si sites. Our results suggest that [4]Ga(Si) sites provide strong Lewis acidity and drive the dehydrogenation activity, while the appearance of [5]Ga(Ga) sites with mild Lewis activity is associated with catalyst deactivation through coking. Overall, the atomic-level insights into the structure of the GaOx-based materials prepared in this work provide a guide to design active Ga-based catalysts by a rational tailoring of Lewis and Brønsted acidity (nature, strength, and abundance).

Atomic-Layer-Deposited Aluminum Oxide Thin Films Probed with X-ray Scattering and Compared to Molecular Dynamics and Density Functional Theory Models

A better understanding of amorphous aluminum oxide's structure and electronic properties is obtained through combined experimental and computational approaches. Grazing incidence X-ray scattering measurements were carried out on aluminum oxide thin films grown using thermal atomic layer deposition. The corresponding pair distribution functions (PDFs) showed structures similar to previously reported PDFs of solid-state amorphous alumina and molten alumina. Structural models based on crystalline alumina polymorphs (PDFgui) and amorphous alumina (molecular dynamics, MD) were examined for structural comparisons to the experimental PDF data. Smaller MD models were optimized and verified against larger models to allow for quantum chemical electronic structure calculations. The electronic structure of the amorphous alumina models yields additional insight into the band structure and electronic defects present in amorphous alumina that are not present in crystalline samples.

Resolving the Heat of Trimethylaluminum and Water Atomic Layer Deposition Half-Reactions

Atomic layer deposition (ALD) is a surface synthesis technique that is characterized by self-limiting reactions between gas-phase precursors and a solid substrate. Although ALD processes have been demonstrated that span the periodic table, a greater understanding of the surface chemistry that affords ALD is necessary to enable greater precision, including area- and site-selective growth. We offer new insight into the thermodynamics and kinetics of the trimethylaluminum (TMA) and H₂O ALD half-reactions with calibrated and time-resolved in situ pyroelectric calorimetry. The half-reactions produce 3.46 and 2.76 eV/Al heat, respectively, which is greater than the heat predicted by computational models based on crystalline Al₂O₃ substrates and closely aligned with the heat predicted by standard heats of formation. The pyroelectric thin-film calorimeter offers submillisecond temporal resolution that uniquely and clearly resolves precursor delivery and reaction kinetics. Both half-reactions are observed to exhibit multiple kinetic rates, with average TMA half-reaction rates at least 2 orders of magnitude faster than the H₂O half-reaction kinetics. Comparing the experimental heat with published computational literature and additional first-principles modeling highlights the need to refine our models and mechanistic understanding of even the most ubiquitous ALD reactions.

Elucidating the Roles of Amorphous Alumina Overcoat in Palladium-Catalyzed Selective Hydrogenation

Amorphous alumina overcoats generated by atomic layer deposition (ALD) have been shown to improve the selectivity and durability of supported metal catalysts in many reactions. Several mechanisms have been proposed to explain the enhanced catalytic performance, but the accessibilities of reactants through the amorphous overcoats remain elusive, which is crucial for understanding reaction mechanisms. Here, we show that an AlOx ALD overcoat is able to improve the alkene product selectivity of a supported Pd catalyst in acetylene (C2H2) hydrogenation. We further demonstrate that the AlOx ALD overcoat blocks the access of C2H2 (kinetic diameter of 0.33 nm), O2 (0.35 nm), and CO (0.38 nm) but allows H2 (0.29 nm) to access Pd surfaces. A H-D exchange experiment suggests that H2 might dissociate heterolytically at the Pd-AlOx interface. These findings are in favor of a hydrogen spillover mechanism.

Advanced Functionalized CeO2/Al2O3 Nanocomposite Sensor for Determination of Opioid Medication Tramadol Hydrochloride in Pharmaceutical Formulations

BACKGROUND

The exceptional characteristics of cerium oxide (CeO₂) and aluminum oxide (Al₂O₃) nanoscales have inspired significant attention to those nanocomposites as possible electroactive resources for applications of sensing and biosensing.

METHODS

In this research, an innovative new factionalized CeO₂/Al₂O₃ nanocomposite membrane sensor was presented to assess tramadol hydrochloride (TRD) in marketable products.

RESULTS

Tramadol-phosphomolybdate (TRD-PM) was formed by mixing tramadol hydrochloride and phosphomolybdic acid (PMA) in the attendance of polymeric matrix and o-nitrophenyloctyl ether solvent mediator. With 1.0 × 10^-10-1.0 × 10^-2 mol L^-1 as a range of linearity and E_mV = (57.567 ± 0.2) log [TRD] + 676.29 as a regression equation, the functionalized sensor using TRD-PM-CeO₂/Al₂O₃ nanocomposite showed great selectivity and sensitivity for the discriminating and measurement of TRD. Using the regression equation E_mV = (52.143 ± 0.4) log [TRD] + 431.45, the unmodified coated wire sensor of TRD-PM, on the other hand, showed a Nernstian response between 1.0 × 10^-6 and 1.0 × 10^-2 mol L^-1, Using the methodology's specified guidelines, the proposed improved potentiometric system was validated against several criteria.

CONCLUSION

The suggested method is suitable for the determination of TRD in its products.

Iterative reverse Monte Carlo and molecular statics for improved atomic structure modeling: a case study of zinc oxide grown by atomic layer deposition

Reverse Monte Carlo (RMC) modeling is a common method to derive atomic structure models of materials from experimental diffraction data. However, conventional RMC modeling does not impose energetic constraints and can produce non-physical local structures within the simulation volume. Although previous strategies have introduced energetic constraints during RMC modeling, these approaches have limitations in computational cost and physical accuracy. In this work, we periodically introduce molecular statics (MS) energy minimizations during RMC modeling in an iterative RMC-MS approach. We test this iterative RMC-MS approach using diffraction data collected by in operando high energy X-ray diffraction during atomic layer deposition of ZnO as a sample case. For MS relaxations we employ ReaxFF pair potentials previously established for ZnO. We find that RMC-MS and RMC provide equivalent agreement with experimental data, but RMC-MS structures are on average 0.6 eV per atom lower in energy and are more consistent with known ZnO atomic structure features. The iterative RMC-MS approach we report can accommodate large systems with minimal additional computational burden beyond a standard RMC simulation and can leverage established pair potentials for immediate application to study a wide range of materials.

Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM

Atomic layer deposition (ALD) provides uniform and conformal thin films that are of interest for a range of applications. To better understand the properties of amorphous ALD films, we need an improved understanding of their local atomic structure. Previous work demonstrated measurement of how the local atomic structure of ALD-grown aluminum oxide (AlO x ) evolves in operando during growth by employing synchrotron high-energy X-ray diffraction (HE-XRD). In this work, we report on efforts to employ electron diffraction pair distribution function (ePDF) measurements using more broadly available transmission electron microscope (TEM) instrumentation to study the atomic structure of amorphous ALD-AlO x . We observe electron beam damage in the ALD-coated samples during ePDF at ambient temperature and successfully mitigate this beam damage using ePDF at cryogenic temperatures (cryo-ePDF). We employ cryo-ePDF and reverse Monte Carlo (RMC) modeling to obtain structural models of ALD-AlO x coatings formed at a range of deposition temperatures from 150 to 332 °C. From these model structures, we derive structural metrics including stoichiometry, pair distances, and coordination environments in the ALD-AlO x films as a function of deposition temperature. The structural variations we observe with growth temperature are consistent with temperature-dependent changes in the surface hydroxyl density on the growth surface. The sample preparation and cryo-ePDF procedures we report here can be used for the routine measurement of ALD-grown amorphous thin films to improve our understanding of the atomic structure of these materials, establish structure-property relationships, and help accelerate the timescale for the application of ALD to address technological needs.

Resolving the Atomic Structure of Sequential Infiltration Synthesis Derived Inorganic Clusters

Sequential infiltration synthesis (SIS) is a route to the precision deposition of inorganic solids in analogy to atomic layer deposition but occurs within (vs upon) a soft material template. SIS has enabled exquisite nanoscale morphological complexity in various oxides through selective nucleation in block copolymers templates. However, the earliest stages of SIS growth remain unresolved, including the atomic structure of nuclei and the evolution of local coordination environments, before and after polymer template removal. We employed In K-edge extended X-ray absorption fine structure and atomic pair distribution function analysis of high-energy X-ray scattering to unravel (1) the structural evolution of InO_xH_y clusters inside a poly(methyl methacrylate) (PMMA) host matrix and (2) the formation of porous In₂O₃ solids (obtained after annealing) as a function of SIS cycle number. Early SIS cycles result in InO_xH_y cluster growth with high aspect ratio, followed by the formation of a three-dimensional network with additional SIS cycles. That the atomic structures of the InO_xH_y clusters can be modeled as multinuclear clusters with bonding patterns related to those in In₂O₃ and In(OH)₃ crystal structures suggests that SIS may be an efficient route to 3D arrays of discrete-atom-number clusters. Annealing the mixed inorganic/polymer films in air removes the PMMA template and consolidates the as-grown clusters into cubic In₂O₃ nanocrystals with structural details that also depend on SIS cycle number.