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Design and Characterization of Surface Acoustic Wave-Based Wireless and Passive Temperature Sensing System. MICROMACHINES 2024; 15:544. [PMID: 38675355 PMCID: PMC11052069 DOI: 10.3390/mi15040544] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/18/2024] [Revised: 04/05/2024] [Accepted: 04/12/2024] [Indexed: 04/28/2024]
Abstract
The surface acoustic wave (SAW) temperature sensor has received significant attention due to its wirelessly powered, battery-free, and chipless capabilities. This paper proposes a wireless sensing system comprising a one-port SAW resonator, helix antenna, and transceiver circuit. The SAW resonator used in this system is based on aluminum nitride (AlN) thin film, which exhibits high velocity and excellent piezoelectric properties. Simulations and experiments were conducted to investigate the performance of the designed SAW resonator. A helix antenna was also designed using finite element simulation to facilitate signal transmission between the SAW temperature sensor and the transceiver. An impedance-matching network was introduced between the helix antenna and the SAW resonator to optimize signal transmission. When the wireless SAW temperature sensor was placed within a certain distance of the mother antenna, the reflection peak of the SAW resonator was observed in the spectrum of the return signal. The frequency of the echo signal increased almost linearly as the temperature increased during the temperature tests. The fitted temperature coefficient of frequency (TCF) was -31.34 ppm/°C, indicating that the wireless temperature sensing system has high-temperature sensitivity.
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Abstract
Flexible electronics have recently gained considerable attention due to their potential to provide new and innovative solutions to a wide range of challenges in various electronic fields. These electronics require specific material properties and performance because they need to be integrated into a variety of surfaces or folded and rolled for newly formatted electronics. Two-dimensional (2D) materials have emerged as promising candidates for flexible electronics due to their unique mechanical, electrical, and optical properties, as well as their compatibility with other materials, enabling the creation of various flexible electronic devices. This article provides a comprehensive review of the progress made in developing flexible electronic devices using 2D materials. In addition, it highlights the key aspects of materials, scalable material production, and device fabrication processes for flexible applications, along with important examples of demonstrations that achieved breakthroughs in various flexible and wearable electronic applications. Finally, we discuss the opportunities, current challenges, potential solutions, and future investigative directions about this field.
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Nanostructured Channel for Improving Emission Efficiency of Hybrid Light-Emitting Field-Effect Transistors. ACS PHOTONICS 2023; 10:4315-4321. [PMID: 38145168 PMCID: PMC10739997 DOI: 10.1021/acsphotonics.3c01080] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/08/2023] [Revised: 11/20/2023] [Accepted: 11/22/2023] [Indexed: 12/26/2023]
Abstract
We report on the mechanism of enhancing the luminance and external quantum efficiency (EQE) by developing nanostructured channels in hybrid (organic/inorganic) light-emitting transistors (HLETs) that combine a solution-processed oxide and a polymer heterostructure. The heterostructure comprised two parts: (i) the zinc tin oxide/zinc oxide (ZTO/ZnO), with and without ZnO nanowires (NWs) grown on the top of the ZTO/ZnO stack, as the charge transport layer and (ii) a polymer Super Yellow (SY, also known as PDY-132) layer as the light-emitting layer. Device characterization shows that using NWs significantly improves luminance and EQE (≈1.1% @ 5000 cd m-2) compared to previously reported similar HLET devices that show EQE < 1%. The size and shape of the NWs were controlled through solution concentration and growth time, which also render NWs to have higher crystallinity. Notably, the size of the NWs was found to provide higher escape efficiency for emitted photons while offering lower contact resistance for charge injection, which resulted in the improved optical performance of HLETs. These results represent a significant step forward in enabling efficient and all-solution-processed HLET technology for lighting and display applications.
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Recent Advances in Nanowire-Based Wearable Physical Sensors. BIOSENSORS 2023; 13:1025. [PMID: 38131785 PMCID: PMC10742341 DOI: 10.3390/bios13121025] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/01/2023] [Revised: 12/06/2023] [Accepted: 12/08/2023] [Indexed: 12/23/2023]
Abstract
Wearable electronics is a technology that closely integrates electronic devices with the human body or clothing, which can realize human-computer interaction, health monitoring, smart medical, and other functions. Wearable physical sensors are an important part of wearable electronics. They can sense various physical signals from the human body or the surrounding environment and convert them into electrical signals for processing and analysis. Nanowires (NW) have unique properties such as a high surface-to-volume ratio, high flexibility, high carrier mobility, a tunable bandgap, a large piezoresistive coefficient, and a strong light-matter interaction. They are one of the ideal candidates for the fabrication of wearable physical sensors with high sensitivity, fast response, and low power consumption. In this review, we summarize recent advances in various types of NW-based wearable physical sensors, specifically including mechanical, photoelectric, temperature, and multifunctional sensors. The discussion revolves around the structural design, sensing mechanisms, manufacture, and practical applications of these sensors, highlighting the positive role that NWs play in the sensing process. Finally, we present the conclusions with perspectives on current challenges and future opportunities in this field.
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5.7 GHz Ultrasensitive Shear Horizontal-Surface Acoustic Wave Humidity Sensor Based on LiNbO 3/SiO 2/SiC Heterostructures with a Sensitive Layer of Polyethyleneimine-SiO 2 Nanocomposites. ACS APPLIED MATERIALS & INTERFACES 2023; 15:35422-35429. [PMID: 37462178 DOI: 10.1021/acsami.3c02642] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 07/28/2023]
Abstract
Humidity sensing and water molecule monitoring have become hot research topics attributed to their potential applications in monitoring breathing/physiological conditions of humans, air conditioning in greenhouses, and soil moisture in agriculture. However, there is a huge challenge for highly sensitive and precision humidity detection with wireless and fast responsive capabilities. In this work, a hybrid/synergistic strategy was proposed using a LiNbO3/SiO2/SiC heterostructure to generate shear-horizontal (SH) surface acoustic waves (SAWs) and using a nanocomposite of polyethylenimine-silicon dioxide nanoparticles (PEI-SiO2 NPs) to form a sensitive layer, thus achieving an ultrahigh sensitivity of SAW humidity sensors. Ultrahigh frequencies (1∼15 GHz) of SAW devices were obtained on a high-velocity heterostructure of LiNbO3/SiO2/SiC. Among the multimodal wave modes, we selected SH waves for humidity sensing and achieved a high mass-sensitivity of 5383 MHz · mm2 · μg-1. With the PEI-SiO2 NP composite as the sensitive layer, an ultrahigh sensitivity of 2.02 MHz/% RH was obtained, which is two orders of magnitude higher than those of the conventional SAW humidity sensors (∼202.5 MHz frequency) within a humidity range of 20-80% RH.
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Recent Advancements in Physiological, Biochemical, and Multimodal Sensors Based on Flexible Substrates: Strategies, Technologies, and Integrations. ACS APPLIED MATERIALS & INTERFACES 2023; 15:21721-21745. [PMID: 37098855 DOI: 10.1021/acsami.3c02690] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/11/2023]
Abstract
Flexible wearable devices have been widely used in biomedical applications, the Internet of Things, and other fields, attracting the attention of many researchers. The physiological and biochemical information on the human body reflects various health states, providing essential data for human health examination and personalized medical treatment. Meanwhile, physiological and biochemical information reveals the moving state and position of the human body, and it is the data basis for realizing human-computer interactions. Flexible wearable physiological and biochemical sensors provide real-time, human-friendly monitoring because of their light weight, wearability, and high flexibility. This paper reviews the latest advancements, strategies, and technologies of flexibly wearable physiological and biochemical sensors (pressure, strain, humidity, saliva, sweat, and tears). Next, we systematically summarize the integration principles of flexible physiological and biochemical sensors with the current research progress. Finally, important directions and challenges of physiological, biochemical, and multimodal sensors are proposed to realize their potential applications for human movement, health monitoring, and personalized medicine.
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Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications. Sci Rep 2023; 13:6838. [PMID: 37100930 PMCID: PMC10133308 DOI: 10.1038/s41598-023-34099-7] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/18/2022] [Accepted: 04/24/2023] [Indexed: 04/28/2023] Open
Abstract
This work presents the single-chip integration of a multi-frequency surface acoustic wave resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing material, is integrated onto a confined sensing area of SAWR via electrospray deposition (ESD). The ESD method allows ng-resolution deposition of GO, optimizing the amount of sensing material. The proposed sensor consists of SWARs at three different resonant frequencies (180, 200 and 250 MHz) with a shared common sensing region, thus allowing direct analysis of sensor performances at different operating frequencies. Our findings reveal that the resonant frequency of the sensor impacts both measurement sensitivity and stability. A higher operating frequency ensures better sensitivity but suffers from a larger damping effect from absorbed water molecules. The maximum measurement sensitivity of 17.4 ppm/RH% is achieved with low drift. In addition, the developed sensor exhibits improved stability and sensitivity by as much as 150% and 75% in frequency shift and Quality factor (Q), respectively, by carefully selecting the operating frequencies at a given RH% range. Finally, the sensors are used for various hygienic applications, such as non-contact proximity detection and face mask inspection.
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Emerging Wearable Chemical Sensors Enabling Advanced Integrated Systems toward Personalized and Preventive Medicine. Anal Chem 2023; 95:490-514. [PMID: 36625107 DOI: 10.1021/acs.analchem.2c04527] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/11/2023]
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An Overview of Flexible Sensors: Development, Application, and Challenges. SENSORS (BASEL, SWITZERLAND) 2023; 23:817. [PMID: 36679612 PMCID: PMC9863693 DOI: 10.3390/s23020817] [Citation(s) in RCA: 4] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/29/2022] [Revised: 01/01/2023] [Accepted: 01/04/2023] [Indexed: 06/17/2023]
Abstract
The emergence and advancement of flexible electronics have great potential to lead development trends in many fields, such as "smart electronic skin" and wearable electronics. By acting as intermediates to detect a variety of external stimuli or physiological parameters, flexible sensors are regarded as a core component of flexible electronic systems and have been extensively studied. Unlike conventional rigid sensors requiring costly instruments and complicated fabrication processes, flexible sensors can be manufactured by simple procedures with excellent production efficiency, reliable output performance, and superior adaptability to the irregular surface of the surroundings where they are applied. Here, recent studies on flexible sensors for sensing humidity and strain/pressure are outlined, emphasizing their sensory materials, working mechanisms, structures, fabrication methods, and particular applications. Furthermore, a conclusion, including future perspectives and a short overview of the market share in this field, is given for further advancing this field of research.
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mm-band surface acoustic wave devices utilizing two-dimensional boron nitride. Sci Rep 2022; 12:20578. [PMID: 36446863 PMCID: PMC9709152 DOI: 10.1038/s41598-022-24852-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/27/2022] [Accepted: 11/21/2022] [Indexed: 12/03/2022] Open
Abstract
The simple structure, low power consumption, and small form factor have made surface acoustic wave (SAW) devices essential to mobile communication as RF filters. For instance, the latest 5G smartphones are equipped with almost 100 acoustic wave filters to select a specific frequency band and increase communication capacity. On the arrival of the newest communication standard, 5G, mm-band up to 39 GHz is supposed to be utilized, whereas the conventional SAW filters are limited to below 3 GHz, leaving a critical component missing. Here, we show an emerging 2D material-hexagonal boron nitride-can become a key enabler of mm-band SAW filter. Our study, based on first principles analysis and acousto-electric simulation, shows the operating frequency of SAW devices can reach over 20 GHz in its fundamental mode and 40 GHz in its interface mode with high electromechanical coupling coefficient (K2) and low insertion loss. In addition to the orders of magnitude improvement compared to the conventional SAW devices, our study provides a systematic approach to utilizing van der Waals crystals with highly anisotropic acoustic properties for practical applications.
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Toward Continuous Breath Monitoring on a Mobile Phone Using a Frugal Conducting Cloth-Based Smart Mask. ACS OMEGA 2022; 7:42926-42938. [PMID: 36467907 PMCID: PMC9713799 DOI: 10.1021/acsomega.2c05017] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/06/2022] [Accepted: 09/15/2022] [Indexed: 06/17/2023]
Abstract
A frugal humidity sensor that can detect changes in the humidity of exhaled breath of individuals has been fabricated. The sensor comprises a humidity-sensitive conducting polymer that is in situ formed on a cloth that acts as a substrate. Interdigitated silver electrodes were screen-printed on the modified cloth, and conducting threads connected the electrodes to the measurement circuit. The sensor's response to changing humidity was measured as a voltage drop across the sensor using a microcontroller. The sensor was capable of discerning between fast, normal, and slow breathing based on the response time. A response time of ∼1.3 s was observed for fast breathing. An Android-based mobile application was designed to collect sensor data via Bluetooth for analysis. A time series classification algorithm was implemented to analyze patterns in breathing. The sensor was later stitched onto a face mask, transforming it into a smart mask that can monitor changes in the breathing pattern at work, play, and sleep.
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An ultra-thin flexible wearable sensor with multi-response capability prepared from ZIF-67 and conductive metal-organic framework composites for health signal monitoring. LAB ON A CHIP 2022; 22:4593-4602. [PMID: 36325953 DOI: 10.1039/d2lc00921h] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/16/2023]
Abstract
Simulation of somatosensory systems in human skin with electronic devices has broad applications in the development of intelligent robots and wearable electronic devices. Here, we give an account of a new biomimetic flexible dual-mode pressure sensor, which is based on the first developed sea dandelion-like conductive metal-organic framework (cZIF-67@Cu-CAT) and the self-synthesized mechanically luminescent zinc sulfide nanoparticles and cleverly combines the microdome structure of the lotus leaf. According to finite element simulation analysis (FEA), the deformation behavior and pressure distribution of the contact interface with dandelion-like nanostructures cause the contact area of the sensor to increase rapidly and steadily with the load. It is for this reason that the piezoresistive pressure sensor has a high sensitivity of 71.74 kPa-1 over a wide range of 0.5 to 80 kPa. More importantly, it can roughly perceive stress changes in the external environment through mechanoluminescence materials without a power supply. The ultra-thin flexible pressure sensor is suitable for sensitive monitoring of small vibrations, including wrist pulse and joint motion. Combined with Bluetooth data transmission, it is not difficult to see that the high-sensitivity ultra-thin sensor designed in this study has broad potential in the applications of bio-wearable electronics and will play an immeasurable role in various sports training and joint protection in the future.
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An Evaluation of the Biocatalyst for the Synthesis and Application of Zinc Oxide Nanoparticles for Water Remediation—A Review. Catalysts 2022. [DOI: 10.3390/catal12111442] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022] Open
Abstract
Global water scarcity is threatening the lives of humans, and it is exacerbated by the contamination of water, which occurs because of increased industrialization and soaring population density. The available conventional physical and chemical water treatment techniques are hazardous to living organisms and are not environmentally friendly, as toxic chemical elements are used during these processes. Nanotechnology has presented a possible way in which to solve these issues by using unique materials with desirable properties. Zinc oxide nanoparticles (ZnO NPs) can be used effectively and efficiently for water treatment, along with other nanotechnologies. Owing to rising concerns regarding the environmental unfriendliness and toxicity of nanomaterials, ZnO NPs have recently been synthesized through biologically available and replenishable sources using a green chemistry or green synthesis protocol. The green-synthesized ZnO NPs are less toxic, more eco-friendly, and more biocompatible than other chemically and physically synthesized materials. In this article, the biogenic synthesis and characterization techniques of ZnO NPs using plants, bacteria, fungi, algae, and biological derivatives are reviewed and discussed. The applications of the biologically prepared ZnO NPs, when used for water treatment, are outlined. Additionally, their mechanisms of action, such as the photocatalytic degradation of dyes, the production of reactive oxygen species (ROS), the generation of compounds such as hydrogen peroxide and superoxide, Zn2+ release to degrade microbes, as well as their adsorbent properties with regard to heavy metals and other contaminants in water bodies, are explained. Furthermore, challenges facing the green synthesis of these nanomaterials are outlined. Future research should focus on how nanomaterials should reach the commercialization stage, and suggestions as to how this ought to be achieved are presented.
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Ultra-thin CoAl layered double hydroxide nanosheets for the construction of highly sensitive and selective QCM humidity sensor. CHINESE CHEM LETT 2022. [DOI: 10.1016/j.cclet.2022.107930] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
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Flexible multifunctional platform based on piezoelectric acoustics for human-machine interaction and environmental perception. MICROSYSTEMS & NANOENGINEERING 2022; 8:99. [PMID: 36119378 PMCID: PMC9474866 DOI: 10.1038/s41378-022-00402-1] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/11/2022] [Revised: 04/26/2022] [Accepted: 05/18/2022] [Indexed: 06/15/2023]
Abstract
Flexible human-machine interfaces show broad prospects for next-generation flexible or wearable electronics compared with their currently available bulky and rigid counterparts. However, compared to their rigid counterparts, most reported flexible devices (e.g., flexible loudspeakers and microphones) show inferior performance, mainly due to the nature of their flexibility. Therefore, it is of great significance to improve their performance by developing and optimizing new materials, structures and design methodologies. In this paper, a flexible acoustic platform based on a zinc oxide (ZnO) thin film on an aluminum foil substrate is developed and optimized; this platform can be applied as a loudspeaker, a microphone, or an ambient sensor depending on the selection of its excitation frequencies. When used as a speaker, the proposed structure shows a high sound pressure level (SPL) of ~90 dB (with a standard deviation of ~3.6 dB), a low total harmonic distortion of ~1.41%, and a uniform directivity (with a standard deviation of ~4 dB). Its normalized SPL is higher than those of similar devices reported in the recent literature. When used as a microphone, the proposed device shows a precision of 98% for speech recognition, and the measured audio signals show a strong similarity to the original audio signals, demonstrating its equivalent performance compared to a rigid commercial microphone. As a flexible sensor, this device shows a high temperature coefficient of frequency of -289 ppm/K and good performance for respiratory monitoring.
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Breath monitoring, sleep disorder detection, and tracking using thin-film acoustic waves and open-source electronics. NANOTECHNOLOGY AND PRECISION ENGINEERING 2022. [DOI: 10.1063/10.0013471] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]
Abstract
Apnoea, a major sleep disorder, affects many adults and causes several issues, such as fatigue, high blood pressure, liver conditions, increased risk of type II diabetes, and heart problems. Therefore, advanced monitoring and diagnosing tools of apnoea disorders are needed to facilitate better treatment, with advantages such as accuracy, comfort of use, cost effectiveness, and embedded computation capabilities to recognise, store, process, and transmit time series data. In this work we present an adaptation of our apnoea-Pi open-source surface acoustic wave (SAW) platform (Apnoea-Pi) to monitor and recognise apnoea in patients. The platform is based on a thin-film SAW device using bimorph ZnO and Al structures, including those fabricated as Al foils or plates, to achieve breath tracking based on humidity and temperature changes. We applied open-source electronics and provided embedded computing characteristics for signal processing, data recognition, storage, and transmission of breath signals. We show that the thin-film SAW device out-performed standard and off-the-shelf capacitive electronic sensors in terms of their response and accuracy for human breath-tracking purposes. This in combination with embedded electronics makes a suitable platform for human breath monitoring and sleep disorder recognition.
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Origami Paper-Based Stretchable Humidity Sensor for Textile-Attachable Wearable Electronics. ACS APPLIED MATERIALS & INTERFACES 2022; 14:36227-36237. [PMID: 35912486 DOI: 10.1021/acsami.2c08245] [Citation(s) in RCA: 16] [Impact Index Per Article: 8.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Flexible and stretchable humidity sensors for wearable purposes have become increasingly important in health care and physiological signal monitoring. However, to the authors' knowledge, there is no report on flexible and stretchable paper-based humidity sensors that are low-cost, easily fabricated, and environmentally friendly. In this work, for the first time, we propose a stretchable, textile-compatible paper-based origami humidity sensor (POHS). The POHS can achieve good stretchability by integrating origami folding structures with a paper substrate, in which an airlaid paper acts as both a sensing material and a sensor substrate. This sensor has high sensitivity, good response, and recovery properties with excellent stability during deformation. This sensor has proved to be capable of dynamically monitoring the breathing rate after 300 folding and unfolding cycles. The flexible and stretchable nature of our POHS ensures that it is compatible for textile attachment and its utility for wearable applications, including respiration rate monitoring and diaper wetting detection. The facile fabrication process and convenient disposal method of the POHS proposed in this study provide feasible solutions for the development of low-cost wearable humidity sensors.
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Guar Gum/Ethyl Cellulose-Polyvinyl Pyrrolidone Composite-Based Quartz Crystal Microbalance Humidity Sensor for Human Respiration Monitoring. ACS APPLIED MATERIALS & INTERFACES 2022; 14:31343-31353. [PMID: 35786849 DOI: 10.1021/acsami.2c08434] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
In this work, the guar gum (GG) and the electrospinned ethyl cellulose-polyvinyl pyrrolidone (EC-PVP) nanofibers were used as humidity-sensitive materials for fabricating a quartz crystal microbalance (QCM) sensor. Fourier transform infrared spectroscopy, scanning electron microscopy, water contact angle test, and X-ray photoelectron spectra were used to characterize the synthesized GG/EC-PVP composite material, confirming its successful preparation and good hydrophilicity. The humidity sensitivity experiments were performed at room temperature. The GG/EC-PVP-coated QCM sensor has high sensitivity (55.72 Hz/%RH) and low hysteresis (2.8% RH) in a wide relative humidity range (0-97% RH), short response/recovery time (26/2 s), excellent selectivity, good repeatability, and stability. The combined action of hydrophilic groups and porous structure enhances the humidity sensitivity. The GG/EC-PVP sensor can be used to capture and measure typical breathing patterns in different human basic emotions due to its good performance. Furthermore, a lie-detector system was also designed for judging the lying through detecting the emotional breathing pattern of the subjects.
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Abstract
Metal-oxide nanomaterials (MONs) have gained considerable interest in the construction of flexible/wearable sensors due to their tunable band gap, low cost, large specific area, and ease of manufacturing. Furthermore, MONs are in high demand for applications, such as gas leakage alarms, environmental protection, health tracking, and smart devices integrated with another system. In this Review, we introduce a comprehensive investigation of factors to boost the sensitivity of MON-based sensors in environmental indicators and health monitoring. Finally, the challenges and perspectives of MON-based flexible/wearable sensors are considered.
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Surface acoustic wave sensor based on Au/TiO 2/PEDOT with dual response to carbon dioxide and humidity. Anal Chim Acta 2022; 1190:339264. [PMID: 34857144 DOI: 10.1016/j.aca.2021.339264] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/24/2021] [Revised: 10/30/2021] [Accepted: 11/07/2021] [Indexed: 02/08/2023]
Abstract
A surface acoustic wave (SAW) gas sensor with an Au/TiO2/poly(3,4-ethylenedioxythiophene) (PEDOT, which is a conductive polymer with photoelectric conversion function) sensing film was constructed for the quantitative detection of water vapor and CO2. The Au/TiO2/PEDOT sensing film was assembled on the delayed region of the 204 MHz SAW delay line, which was used as the base device for the gas sensor. The center frequency of the sensor decreases with an increase in relative humidity (RH), and the center frequency increases with increasing CO2 concentration, so that not only can the two gases be identified, but quantitative analysis can also be performed. The SAW sensor has a response range of 5%-90% for RH and a response range of 500-2000 ppm for CO2 gas. The shifts in center frequency varied linearly with the concentrations, giving rise to the sensitivities of -0.0068 and -0.1880 kHz %-1 for RH and ∼0.003 kHz ppm-1 CO2. The response/recovery time is 9 s/9.2 s for 700 ppm CO2 and 15 s/14 s for 70% RH. The experimental results show that the SAW sensor offers excellent selectivity, wide response range, rapid response, and good stability and repeatability. The mechanism of humidity and CO2 sensing is attributed to the hydrophilic porous structure of the Au/TiO2/PEDOT sensing film, and also to the reversible variation of its viscoelasticity under illumination conditions. The sensor, combined with the communication function of its own SAW device, has several prospective applications in the monitoring of atmospheric conditions.
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A new strategy to minimize humidity influences on acoustic wave ultraviolet sensors using ZnO nanowires wrapped with hydrophobic silica nanoparticles. MICROSYSTEMS & NANOENGINEERING 2022; 8:121. [PMID: 36407888 PMCID: PMC9666537 DOI: 10.1038/s41378-022-00455-2] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/29/2022] [Revised: 08/05/2022] [Accepted: 09/06/2022] [Indexed: 05/12/2023]
Abstract
Surface acoustic wave (SAW) technology has been widely developed for ultraviolet (UV) detection due to its advantages of miniaturization, portability, potential to be integrated with microelectronics, and passive/wireless capabilities. To enhance UV sensitivity, nanowires (NWs), such as ZnO, are often applied to enhance SAW-based UV detection due to their highly porous and interconnected 3D network structures and good UV sensitivity. However, ZnO NWs are normally hydrophilic, and thus, changes in environmental parameters such as humidity will significantly influence the detection precision and sensitivity of SAW-based UV sensors. To solve this issue, in this work, we proposed a new strategy using ZnO NWs wrapped with hydrophobic silica nanoparticles as the effective sensing layer. Analysis of the distribution and chemical bonds of these hydrophobic silica nanoparticles showed that numerous C-F bonds (which are hydrophobic) were found on the surface of the sensitive layer, which effectively blocked the adsorption of water molecules onto the ZnO NWs. This new sensing layer design minimizes the influence of humidity on the ZnO NW-based UV sensor within the relative humidity range of 10-70%. The sensor showed a UV sensitivity of 9.53 ppm (mW/cm2)-1, with high linearity (R 2 value of 0.99904), small hysteresis (<1.65%) and good repeatability. This work solves the long-term dilemma of ZnO NW-based sensors, which are often sensitive to humidity changes.
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Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications. MICROSYSTEMS & NANOENGINEERING 2021; 7:97. [PMID: 34900331 PMCID: PMC8626450 DOI: 10.1038/s41378-021-00325-3] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/22/2021] [Revised: 09/24/2021] [Accepted: 10/03/2021] [Indexed: 05/26/2023]
Abstract
Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direction and bending direction. Currently, there are few studies on this topic, and the bending mechanisms during off-axis bending deformations have remained unexplored for multisensing applications. Herein, we fabricated aluminum nitride (AlN) flexible SAW devices by using high-quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors. A theoretical model was first developed using coupling wave equations and the boundary condition method to analyze the characteristics of the device with bending and off-axis deformation under elastic strains. The relationships between the frequency shifts of the SAW device and the bending strain and off-axis angle were obtained, and the results were identical to those from the theoretical calculations. Finally, we performed proof-of-concept demonstrations of its multisensing potential by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface, thus paving the way for the application of versatile flexible electronics.
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High Performance Acoustic Wave Nitrogen Dioxide Sensor with Ultraviolet Activated 3D Porous Architecture of Ag-Decorated Reduced Graphene Oxide and Polypyrrole Aerogel. ACS APPLIED MATERIALS & INTERFACES 2021; 13:42094-42103. [PMID: 34431295 DOI: 10.1021/acsami.1c13309] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Surface acoustic wave (SAW) devices have been widely explored for real-time monitoring of toxic and irritant chemical gases such as nitrogen oxide (NO2), but they often have issues such as a complicated process of the sensing layer, low sensitivity, long response time, irreversibility, and/or requirement of high temperatures to enhance sensitivity. Herein, we report a sensing material design for room-temperature NO2 detection based on a 3D porous architecture of Ag-decorated reduced graphene oxide-polypyrrole hybrid aerogels (rGO-PPy/Ag) and apply UV activation as an effective strategy to further enhance the NO2 sensing performance. The rGO-PPy/Ag-based SAW sensor with the UV activation exhibits high sensitivity (127.68 Hz/ppm), fast response/recovery time (36.7 s/58.5 s), excellent reproducibility and selectivity, and fast recoverability. Its enhancement mechanisms for highly sensitive and selective detection of NO2 are based on a 3D porous architecture, Ag-decorated rGO-PPy, p-p heterojunction in rGO-PPy/Ag, and UV photogenerated carriers generated in the sensing layer. The scientific findings of this work will provide the guidance for future exploration of next-generation acoustic-wave-based gas sensors.
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Self-Powered Respiration Monitoring Enabled By a Triboelectric Nanogenerator. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2021; 33:e2101262. [PMID: 34240473 DOI: 10.1002/adma.202101262] [Citation(s) in RCA: 81] [Impact Index Per Article: 27.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/14/2021] [Revised: 03/23/2021] [Indexed: 05/26/2023]
Abstract
In mammals, physiological respiration involves respiratory cycles of inhaled and exhaled breaths, which has traditionally been an underutilized resource potentially encompassing a wealth of physiologically relevant information as well as clues to potential diseases. Recently, triboelectric nanogenerators (TENGs) have been widely adopted for self-powered respiration monitoring owing to their compelling features, such as decent biocompatibility, wearing comfort, low-cost, and high sensitivity to respiration activities in the aspect of low frequency and slight amplitude body motions. Physiological respiration behaviors and exhaled chemical regents can be precisely and continuously monitored by TENG-based respiration sensors for personalized health care. This article presents an overview of TENG enabled self-powered respiration monitoring, with a focus on the working principle, sensing materials, functional structures, and related applications in both physical respiration motion detection and chemical breath analysis. Concepts and approaches for acquisition of physical information associated with respiratory rate and depth are covered in the first part. Then the sensing mechanism, theoretical modeling, and applications related to detection of chemicals released from breathing gases are systemically summarized. Finally, the opportunities and challenges of triboelectric effect enabled self-powered respiration monitoring are comprehensively discussed and criticized.
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Structure with thin SiO x/SiN x bilayer and Al electrodes for high-frequency, large-coupling, and low-cost surface acoustic wave devices. ULTRASONICS 2021; 115:106460. [PMID: 34029835 DOI: 10.1016/j.ultras.2021.106460] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/26/2021] [Revised: 05/01/2021] [Accepted: 05/03/2021] [Indexed: 06/12/2023]
Abstract
With the development of fifth-generation wireless systems, the Internet of Things, and health services, surface acoustic wave (SAW)-based filters and sensors have attracted considerable interest. This study presents a new structure for high-frequency, large-coupling, and low-cost SAW devices that helps implement high-frequency and wideband filters and enhances the sensitivity of sensors. The structure is based on 15°Y-X LiNbO3, thin SiOx/SiNx bilayer overlay, and Al electrodes. Furthermore, a low-cost fabrication process for SAW devices based on this structure was designed. Simulation and experimental results show that the bilayer substantially weakens the leaky nature of shear-horizontal-type SAWs with a phase velocity higher than that of a slow-shear bulk wave in LiNbO3. Thus, the limitation related to the velocity of 4029 m/s was overcome, and the phase velocity reached approximately 4500 m/s, which means an increase of 50% compared with that of conventional Cu/15°Y-X LiNbO3 devices. Consequently, the frequency dramatically increases, and the quality of the SAW response is ensured. Simultaneously, a large electromechanical coupling factor close to 20% can be achieved, which is still suitable for wideband filters and sensors with high energy transduction coefficients. This new structure is expected to become a major candidate for SAW devices in the future.
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Evaluation of Shear Horizontal Surface Acoustic Wave Biosensors Using "Layer Parameter" Obtained from Sensor Responses during Immunoreaction. SENSORS (BASEL, SWITZERLAND) 2021; 21:4924. [PMID: 34300665 PMCID: PMC8309872 DOI: 10.3390/s21144924] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/22/2021] [Revised: 07/01/2021] [Accepted: 07/14/2021] [Indexed: 01/24/2023]
Abstract
Shear horizontal surface acoustic wave (SH-SAW) biosensors measure the reaction of capture antibodies immobilized on the sensing surface to capture test molecules (antigens) by using the change in SH-SAW propagation characteristics. SH-SAW displacement exists not only on the SH-SAW propagating surface, but also partially penetrates the specimen liquid to a certain depth, which is determined by the liquid properties of the specimen and the operating frequency of the SH-SAW. This phenomenon is called viscosity penetration. In previous studies, the effect of viscosity penetration was not considered in the measurement of SH-SAW biosensors, and the mass or viscosity change caused by the specific binding of capture antibodies to the target antigen was mainly used for the measurement. However, by considering the effect of viscosity penetration, it was found that the antigen-antibody reaction could be measured and the detection characteristics of the biosensor could be improved. Therefore, this study aims to evaluate the detection properties of SH-SAW biosensors in the surface height direction by investigating the relationship between molecular dimensions and SH-SAW propagation characteristics, which are pseudo-changed by varying the diameter of gold nanoparticles. For the evaluation, we introduced a layer parameter defined by the ratio of the SH-SAW amplitude change to the SH-SAW velocity change caused by the antigen-antibody reaction. We found a correlation between the layer parameter and pseudo-varied molecular dimensions. The results suggest that SH-SAW does not only measure the mass and viscosity but can also measure the size of the molecule to be detected. This shows that SH-SAW biosensors can be used for advanced functionality.
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Surface acoustic wave relative humidity sensor based on sputtering SiO
2
film. SURF INTERFACE ANAL 2021. [DOI: 10.1002/sia.6989] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/17/2023]
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A highly selective and recyclable sensor for the electroanalysis of phosphothioate pesticides using silver-doped ZnO nanorods arrays. Anal Chim Acta 2021; 1152:338285. [PMID: 33648640 DOI: 10.1016/j.aca.2021.338285] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/19/2020] [Revised: 01/20/2021] [Accepted: 01/31/2021] [Indexed: 10/22/2022]
Abstract
Silver-doped ZnO nanorods (Ag/ZnO) arrays have in-situ grown onto indium tin oxide (ITO) via the one-pot hydrothermal route towards a highly selective and recyclable electroanalysis of phosphothioate pesticides (PTs) with phoxim (Phox) as a model. It was discovered that the Ag/ZnO arrays-modified electrode could obtain a steady and sharp electrochemical output of solid-state Ag/AgCl at a low potential (i.e., 0.12 V). More importantly, the achieved Ag/AgCl signals could decrease selectively induced by sulfide (S)-containing Phox by the specific Cl-S displacement reaction, which would trigger AgCl into non-electroactive Ag-Phox complex. The Ag/ZnO arrays-modified sensors present a linear range from 0.050 to 700.0 μM for the detection of Phox, with a limit of detection down to 0.010 μM. The practical applicability of the developed electroanalysis strategy was successfully employed to detect Phox in the tap water and cabbage samples. Moreover, the photocatalytic performances of the Ag/ZnO arrays were subsequently verified for the degradation of Phox, displaying the higher photocatalytic efficiency than pure ZnO nanorods. Besides, the as-developed sensor can allow for the recyclable detection of Phox by the Ag/ZnO-photocatalyzed removal of Phox after each of the detection cycles. Therefore, the sensors platform based on Ag/ZnO arrays can be expected to have potential for the electrochemical monitoring and photocatalytic degradation of toxic pesticides in the food and environmental fields.
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High-Performance Humidity Sensor Based on the Graphene Flower/Zinc Oxide Composite. NANOMATERIALS 2021; 11:nano11010242. [PMID: 33477616 PMCID: PMC7831307 DOI: 10.3390/nano11010242] [Citation(s) in RCA: 12] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/28/2020] [Revised: 01/07/2021] [Accepted: 01/13/2021] [Indexed: 02/06/2023]
Abstract
Performance of an electronic device relies heavily on the availability of a suitable functional material. One of the simple, easy, and cost-effective ways to obtain novel functional materials with improved properties for desired applications is to make composites of selected materials. In this work, a novel composite of transparent n-type zinc oxide (ZnO) with a wide bandgap and a unique structure of graphene in the form of a graphene flower (GrF) is synthesized and used as the functional layer of a humidity sensor. The (GrF/ZnO) composite was synthesized by a simple sol–gel method. Morphological, elemental, and structural characterizations of GrF/ZnO composite were performed by a field emission scanning electron microscope (FESEM), energy-dispersive spectroscopy (EDS), and an x-ray diffractometer (XRD), respectively, to fully understand the properties of this newly synthesized functional material. The proposed humidity sensor was tested in the relative humidity (RH) range of 15% RH% to 86% RH%. The demonstrated sensor illustrated a highly sensitive response to humidity with an average current change of 7.77 μA/RH%. Other prominent characteristics shown by this device include but were not limited to high stability, repeatable results, fast response, and quick recovery time. The proposed humidity sensor was highly sensitive to human breathing, thus making it a promising candidate for various applications related to health monitoring.
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