1
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Boebinger MG, Yilmaz DE, Ghosh A, Misra S, Mathis TS, Kalinin SV, Jesse S, Gogotsi Y, van Duin ACT, Unocic RR. Direct Fabrication of Atomically Defined Pores in MXenes Using Feedback-Driven STEM. SMALL METHODS 2024:e2400203. [PMID: 38803318 DOI: 10.1002/smtd.202400203] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/07/2024] [Revised: 05/05/2024] [Indexed: 05/29/2024]
Abstract
Controlled fabrication of nanopores in 2D materials offer the means to create robust membranes needed for ion transport and nanofiltration. Techniques for creating nanopores have relied upon either plasma etching or direct irradiation; however, aberration-corrected scanning transmission electron microscopy (STEM) offers the advantage of combining a sub-Å sized electron beam for atomic manipulation along with atomic resolution imaging. Here, a method for automated nanopore fabrication is utilized with real-time atomic visualization to enhance the mechanistic understanding of beam-induced transformations. Additionally, an electron beam simulation technique, Electron-Beam Simulator (E-BeamSim) is developed to observe the atomic movements and interactions resulting from electron beam irradiation. Using the MXene Ti3C2Tx, the influence of temperature on nanopore fabrication is explored by tracking atomic transformations and find that at room temperature the electron beam irradiation induces random displacement and results in titanium pileups at the nanopore edge, which is confirmed by E-BeamSim. At elevated temperatures, after removal of the surface functional groups and with the increased mobility of atoms results in atomic transformations that lead to the selective removal of atoms layer by layer. This work can lead to the development of defect engineering techniques within functionalized MXene layers and other 2D materials.
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Affiliation(s)
- Matthew G Boebinger
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
| | - Dundar E Yilmaz
- Department of Mechanical Engineering, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Ayana Ghosh
- Computational Sciences and Engineering Division, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
| | - Sudhajit Misra
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
| | - Tyler S Mathis
- A.J. Drexel Nanomaterials Institute and Department of Materials Science and Engineering, Drexel University, Philadelphia, PA, 19104, USA
| | - Sergei V Kalinin
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN, 37996, USA
| | - Stephen Jesse
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
| | - Yury Gogotsi
- A.J. Drexel Nanomaterials Institute and Department of Materials Science and Engineering, Drexel University, Philadelphia, PA, 19104, USA
| | - Adri C T van Duin
- Department of Mechanical Engineering, The Pennsylvania State University, University Park, PA, 16802, USA
| | - Raymond R Unocic
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
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2
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Nonappa. Precision nanoengineering for functional self-assemblies across length scales. Chem Commun (Camb) 2023; 59:13800-13819. [PMID: 37902292 DOI: 10.1039/d3cc02205f] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/31/2023]
Abstract
As nanotechnology continues to push the boundaries across disciplines, there is an increasing need for engineering nanomaterials with atomic-level precision for self-assembly across length scales, i.e., from the nanoscale to the macroscale. Although molecular self-assembly allows atomic precision, extending it beyond certain length scales presents a challenge. Therefore, the attention has turned to size and shape-controlled metal nanoparticles as building blocks for multifunctional colloidal self-assemblies. However, traditionally, metal nanoparticles suffer from polydispersity, uncontrolled aggregation, and inhomogeneous ligand distribution, resulting in heterogeneous end products. In this feature article, I will discuss how virus capsids provide clues for designing subunit-based, precise, efficient, and error-free self-assembly of colloidal molecules. The atomically precise nanoscale proteinic subunits of capsids display rigidity (conformational and structural) and patchy distribution of interacting sites. Recent experimental evidence suggests that atomically precise noble metal nanoclusters display an anisotropic distribution of ligands and patchy ligand bundles. This enables symmetry breaking, consequently offering a facile route for two-dimensional colloidal crystals, bilayers, and elastic monolayer membranes. Furthermore, inter-nanocluster interactions mediated via the ligand functional groups are versatile, offering routes for discrete supracolloidal capsids, composite cages, toroids, and macroscopic hierarchically porous frameworks. Therefore, engineered nanoparticles with atomically precise structures have the potential to overcome the limitations of molecular self-assembly and large colloidal particles. Self-assembly allows the emergence of new optical properties, mechanical strength, photothermal stability, catalytic efficiency, quantum yield, and biological properties. The self-assembled structures allow reproducible optoelectronic properties, mechanical performance, and accurate sensing. More importantly, the intrinsic properties of individual nanoclusters are retained across length scales. The atomically precise nanoparticles offer enormous potential for next-generation functional materials, optoelectronics, precision sensors, and photonic devices.
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Affiliation(s)
- Nonappa
- Facutly of Engineering and Natural Sciences, Tampere University, FI-33720, Tampere, Finland.
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3
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Dyck O, Lupini AR, Jesse S. The Synthescope: A Vision for Combining Synthesis with Atomic Fabrication. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2301560. [PMID: 37574252 DOI: 10.1002/adma.202301560] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/17/2023] [Revised: 05/09/2023] [Indexed: 08/15/2023]
Abstract
The scanning transmission electron microscope, a workhorse instrument in materials characterization, is being transformed into an atomic-scale material-manipulation platform. With an eye on the trajectory of recent developments and the obstacles toward progress in this field, a vision for a path toward an expanded set of capabilities and applications is provided. The microscope is reconceptualized as an instrument for fabrication and synthesis with the capability to image and characterize atomic-scale structural formation as it occurs. Further development and refinement of this approach may have substantial impact on research in microelectronics, quantum information science, and catalysis, where precise control over atomic-scale structure and chemistry of a few "active sites" can have a dramatic impact on larger-scale functionality and where developing a better understanding of atomic-scale processes can help point the way to larger-scale synthesis approaches.
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Affiliation(s)
- Ondrej Dyck
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
| | - Andrew R Lupini
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
| | - Stephen Jesse
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
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4
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Dyck O, Yeom S, Lupini AR, Swett JL, Hensley D, Yoon M, Jesse S. Top-Down Fabrication of Atomic Patterns in Twisted Bilayer Graphene. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2302906. [PMID: 37309684 DOI: 10.1002/adma.202302906] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/29/2023] [Revised: 05/23/2023] [Indexed: 06/14/2023]
Abstract
Atomic-scale engineering typically involves bottom-up approaches, leveraging parameters such as temperature, partial pressures, and chemical affinity to promote spontaneous arrangement of atoms. These parameters are applied globally, resulting in atomic-scale features scattered probabilistically throughout the material. In a top-down approach, different regions of the material are exposed to different parameters, resulting in structural changes varying on the scale of the resolution. In this work, the application of global and local parameters is combined in an aberration-corrected scanning transmission electron microscope (STEM) to demonstrate atomic-scale precision patterning of atoms in twisted bilayer graphene. The focused electron beam is used to define attachment points for foreign atoms through the controlled ejection of carbon atoms from the graphene lattice. The sample environment is staged with nearby source materials such that the sample temperature can induce migration of the source atoms across the sample surface. Under these conditions, the electron-beam (top-down) enables carbon atoms in the graphene to be replaced spontaneously by diffusing adatoms (bottom-up). Using image-based feedback control, arbitrary patterns of atoms and atom clusters are attached to the twisted bilayer graphene with limited human interaction. The role of substrate temperature on adatom and vacancy diffusion is explored by first-principles simulations.
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Affiliation(s)
- Ondrej Dyck
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
| | - Sinchul Yeom
- Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
| | - Andrew R Lupini
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
| | - Jacob L Swett
- Biodesign Institute, Arizona State University, Tempe, AZ, 87287, USA
| | - Dale Hensley
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
| | - Mina Yoon
- Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
| | - Stephen Jesse
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37830, USA
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5
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Jones RR, Miksch C, Kwon H, Pothoven C, Rusimova KR, Kamp M, Gong K, Zhang L, Batten T, Smith B, Silhanek AV, Fischer P, Wolverson D, Valev VK. Dense Arrays of Nanohelices: Raman Scattering from Achiral Molecules Reveals the Near-Field Enhancements at Chiral Metasurfaces. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023; 35:e2209282. [PMID: 36631958 DOI: 10.1002/adma.202209282] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/09/2022] [Revised: 12/11/2022] [Indexed: 06/17/2023]
Abstract
Against the background of the current healthcare and climate emergencies, surface enhanced Raman scattering (SERS) is becoming a highly topical technique for identifying and fingerprinting molecules, e.g., within viruses, bacteria, drugs, and atmospheric aerosols. Crucial for SERS is the need for substrates with strong and reproducible enhancements of the Raman signal over large areas and with a low fabrication cost. Here, dense arrays of plasmonic nanohelices (≈100 nm in length), which are of interest for many advanced nanophotonics applications, are investigated, and they are shown to present excellent SERS properties. As an illustration, two new ways to probe near-field enhancement generated with circular polarization at chiral metasurfaces are presented, first using the Raman spectra of achiral molecules (crystal violet) and second using a single, element-specific, achiral molecular vibrational mode (i.e., a single Raman peak). The nanohelices can be fabricated over large areas at a low cost and they provide strong, robust and uniform Raman enhancement. It is anticipated that these advanced materials will find broad applications in surface enhanced Raman spectroscopies and material science.
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Affiliation(s)
- Robin R Jones
- Centre for Photonics and Photonic Materials and Centre for Nanoscience and Nanotechnology, Department of Physics, University of Bath, Claverton Down, BA2 7AY, UK
| | - Cornelia Miksch
- Max Planck Institute for Intelligent Systems, Heisenbergstraße 3, 70569, Stuttgart, Germany
| | - Hyunah Kwon
- Max Planck Institute for Intelligent Systems, Heisenbergstraße 3, 70569, Stuttgart, Germany
| | - Coosje Pothoven
- VSPARTICLE, Molengraaffsingel 10, JD Delft, 2629, The Netherlands
| | - Kristina R Rusimova
- Centre for Photonics and Photonic Materials and Centre for Nanoscience and Nanotechnology, Department of Physics, University of Bath, Claverton Down, BA2 7AY, UK
| | - Maarten Kamp
- VSPARTICLE, Molengraaffsingel 10, JD Delft, 2629, The Netherlands
| | - Kedong Gong
- Department of Environmental Science and Engineering, Fudan University, Shanghai, 200433, China
| | - Liwu Zhang
- Department of Environmental Science and Engineering, Fudan University, Shanghai, 200433, China
| | - Tim Batten
- Renishaw plc, New Mills, Kingswood, Wotton-under-Edge, GL12 8JR, UK
| | - Brian Smith
- Renishaw plc, New Mills, Kingswood, Wotton-under-Edge, GL12 8JR, UK
| | - Alejandro V Silhanek
- Experimental Physics of Nanostructured Materials, Q-MAT, CESAM, University of Liége, Sart Tilman, B-4000, Belgium
| | - Peer Fischer
- Max Planck Institute for Intelligent Systems, Heisenbergstraße 3, 70569, Stuttgart, Germany
- Institute of Physical Chemistry, University of Stuttgart, Pfaffenwaldring 55, 70569, Stuttgart, Germany
| | - Daniel Wolverson
- Centre for Photonics and Photonic Materials and Centre for Nanoscience and Nanotechnology, Department of Physics, University of Bath, Claverton Down, BA2 7AY, UK
| | - Ventsislav K Valev
- Centre for Photonics and Photonic Materials and Centre for Nanoscience and Nanotechnology, Department of Physics, University of Bath, Claverton Down, BA2 7AY, UK
- Centre for Therapeutic Innovation, University of Bath, Bath, BA2 7AY, UK
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6
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Ma S, Dahiya AS, Dahiya R. Out-of-Plane Electronics on Flexible Substrates Using Inorganic Nanowires Grown on High-Aspect-Ratio Printed Gold Micropillars. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2023:e2210711. [PMID: 37178312 DOI: 10.1002/adma.202210711] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/17/2022] [Revised: 02/06/2023] [Indexed: 05/15/2023]
Abstract
Out-of-plane or 3D electronics on flexible substrates are an interesting direction that can enable novel solutions such as efficient bioelectricity generation and artificial retina. However, the development of devices with such architectures is limited by the lack of suitable fabrication techniques. Additive manufacturing (AM) can but often fail to provide high-resolution, sub-micrometer 3D architectures. Herein, the optimization of a drop-on-demand (DoD), high-resolution electrohydrodynamic (EHD)-based jet printing method for generating 3D gold (Au) micropillars is reported. Libraries of Au micropillar electrode arrays (MEAs) reaching a maximum height of 196 µm and a maximum aspect ratio of 52 are printed. Further, by combining AM with the hydrothermal growth method, a seedless synthesis of zinc oxide (ZnO) nanowires (NWs) on the printed Au MEAs is demonstrated. The developed hybrid approach leads to hierarchical light-sensitive NW-connected networks exhibiting favorable ultraviolet (UV) sensing as demonstrated via fabricating flexible photodetectors (PDs). The 3D PDs exhibit an excellent omnidirectional light-absorption ability and thus, maintain high photocurrents over wide light incidence angles (±90°). Lastly, the PDs are tested under both concave and convex bending at 40 mm, showing excellent mechanical flexibility.
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Affiliation(s)
- Sihang Ma
- James Watt School of Engineering, University of Glasgow, Glasgow, G12 8QQ, UK
| | | | - Ravinder Dahiya
- Bendable Electronics and Sustainable Technologies (BEST) Group, Electrical and Computer Engineering Department, Northeastern University, Boston, MA, 02115, USA
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7
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Wang CM, Chan HS, Liao CL, Chang CW, Liao WS. Gap-directed chemical lift-off lithographic nanoarchitectonics for arbitrary sub-micrometer patterning. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2023; 14:34-44. [PMID: 36703907 PMCID: PMC9830500 DOI: 10.3762/bjnano.14.4] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/28/2022] [Accepted: 12/28/2022] [Indexed: 05/09/2023]
Abstract
We introduce a unique soft lithographic operation that exploits stamp roof collapse-induced gaps to selectively remove an alkanethiol self-assembled monolayer (SAM) on Au to generate surface patterns that are orders of magnitude smaller than structures on the original elastomer stamp. The smallest achieved feature dimension is 5 nm using a micrometer-scale structured stamp in a chemical lift-off lithography (CLL) process. Molecular patterns retained in the gaps between stamp features and their circumscribed or inscribed circles follow mathematical predictions, and their sizes can be tuned by altering the stamp structure dimensions, including height, pitch, and shape. These generated surface molecular patterns can function as biorecognition arrays or be transferred to the underneath Au layer for metallic structure creation. By combining CLL process with this gap phenomenon, soft material properties that are previously thought as demerits can be used to achieve sub-10 nm features in a straightforward sketch.
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Affiliation(s)
- Chang-Ming Wang
- Department of Chemistry, National Taiwan University, Taipei 10617, Taiwan
| | - Hong-Sheng Chan
- Department of Chemistry, National Taiwan University, Taipei 10617, Taiwan
| | - Chia-Li Liao
- Department of Chemistry, National Taiwan University, Taipei 10617, Taiwan
| | - Che-Wei Chang
- Department of Chemistry, National Taiwan University, Taipei 10617, Taiwan
| | - Wei-Ssu Liao
- Department of Chemistry, National Taiwan University, Taipei 10617, Taiwan
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8
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Chai Z, Childress A, Busnaina AA. Directed Assembly of Nanomaterials for Making Nanoscale Devices and Structures: Mechanisms and Applications. ACS NANO 2022; 16:17641-17686. [PMID: 36269234 PMCID: PMC9706815 DOI: 10.1021/acsnano.2c07910] [Citation(s) in RCA: 14] [Impact Index Per Article: 7.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/08/2022] [Accepted: 10/06/2022] [Indexed: 05/19/2023]
Abstract
Nanofabrication has been utilized to manufacture one-, two-, and three-dimensional functional nanostructures for applications such as electronics, sensors, and photonic devices. Although conventional silicon-based nanofabrication (top-down approach) has developed into a technique with extremely high precision and integration density, nanofabrication based on directed assembly (bottom-up approach) is attracting more interest recently owing to its low cost and the advantages of additive manufacturing. Directed assembly is a process that utilizes external fields to directly interact with nanoelements (nanoparticles, 2D nanomaterials, nanotubes, nanowires, etc.) and drive the nanoelements to site-selectively assemble in patterned areas on substrates to form functional structures. Directed assembly processes can be divided into four different categories depending on the external fields: electric field-directed assembly, fluidic flow-directed assembly, magnetic field-directed assembly, and optical field-directed assembly. In this review, we summarize recent progress utilizing these four processes and address how these directed assembly processes harness the external fields, the underlying mechanism of how the external fields interact with the nanoelements, and the advantages and drawbacks of utilizing each method. Finally, we discuss applications made using directed assembly and provide a perspective on the future developments and challenges.
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Affiliation(s)
- Zhimin Chai
- State
Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing100084, China
- NSF
Nanoscale Science and Engineering Center for High-Rate Nanomanufacturing
(CHN), Northeastern University, Boston, Massachusetts02115, United States
| | - Anthony Childress
- NSF
Nanoscale Science and Engineering Center for High-Rate Nanomanufacturing
(CHN), Northeastern University, Boston, Massachusetts02115, United States
| | - Ahmed A. Busnaina
- NSF
Nanoscale Science and Engineering Center for High-Rate Nanomanufacturing
(CHN), Northeastern University, Boston, Massachusetts02115, United States
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9
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Tiwari P, Ferson ND, Arnold DP, Andrew JS. Overcoming the rise in local deposit resistance during electrophoretic deposition via suspension replenishing. Front Chem 2022; 10:970407. [PMID: 36092676 PMCID: PMC9459854 DOI: 10.3389/fchem.2022.970407] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/15/2022] [Accepted: 07/22/2022] [Indexed: 11/13/2022] Open
Abstract
Nanomaterials have unique properties, functionalities, and excellent performance, and as a result have gained significant interest across disciplines and industries. However, currently, there is a lack of techniques that can assemble as-synthesized nanomaterials in a scalable manner. Electrophoretic deposition (EPD) is a promising method for the scalable assembly of colloidally stable nanomaterials into thick films and arrays. In EPD, an electric field is used to assemble charged colloidal particles onto an oppositely charged substrate. However, in constant voltage EPD the deposition rate decreases with increasing deposition time, which has been attributed in part to the fact that the electric field in the suspension decreases with time. This decreasing electric field has been attributed to two probable causes, (i) increased resistance of the particle film and/or (ii) the growth of an ion-depletion region at the substrate. Here, to increase EPD yield and scalability we sought to distinguish between these two effects and found that the growth of the ion-depletion region plays the most significant role in the increase of the deposit resistance. Here, we also demonstrate a method to maintain constant deposit resistance in EPD by periodic replenishing of suspension, thereby improving EPD’s scalability.
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Affiliation(s)
- Prabal Tiwari
- Department of Materials Science and Engineering, University of Florida, Gainesville, FL, United States
| | - Noah D. Ferson
- Department of Materials Science and Engineering, University of Florida, Gainesville, FL, United States
| | - David P. Arnold
- Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, United States
| | - Jennifer S. Andrew
- Department of Materials Science and Engineering, University of Florida, Gainesville, FL, United States
- *Correspondence: Jennifer S. Andrew,
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10
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Alafeef M, Pan D. Diagnostic Approaches For COVID-19: Lessons Learned and the Path Forward. ACS NANO 2022; 16:11545-11576. [PMID: 35921264 PMCID: PMC9364978 DOI: 10.1021/acsnano.2c01697] [Citation(s) in RCA: 14] [Impact Index Per Article: 7.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/17/2022] [Accepted: 07/12/2022] [Indexed: 05/17/2023]
Abstract
Coronavirus disease 2019 (COVID-19) is a transmitted respiratory disease caused by the infection of the severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2). Although humankind has experienced several outbreaks of infectious diseases, the COVID-19 pandemic has the highest rate of infection and has had high levels of social and economic repercussions. The current COVID-19 pandemic has highlighted the limitations of existing virological tests, which have failed to be adopted at a rate to properly slow the rapid spread of SARS-CoV-2. Pandemic preparedness has developed as a focus of many governments around the world in the event of a future outbreak. Despite the largely widespread availability of vaccines, the importance of testing has not diminished to monitor the evolution of the virus and the resulting stages of the pandemic. Therefore, developing diagnostic technology that serves as a line of defense has become imperative. In particular, that test should satisfy three criteria to be widely adopted: simplicity, economic feasibility, and accessibility. At the heart of it all, it must enable early diagnosis in the course of infection to reduce spread. However, diagnostic manufacturers need guidance on the optimal characteristics of a virological test to ensure pandemic preparedness and to aid in the effective treatment of viral infections. Nanomaterials are a decisive element in developing COVID-19 diagnostic kits as well as a key contributor to enhance the performance of existing tests. Our objective is to develop a profile of the criteria that should be available in a platform as the target product. In this work, virus detection tests were evaluated from the perspective of the COVID-19 pandemic, and then we generalized the requirements to develop a target product profile for a platform for virus detection.
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Affiliation(s)
- Maha Alafeef
- Department of Chemical, Biochemical and Environmental
Engineering, University of Maryland Baltimore County, Interdisciplinary
Health Sciences Facility, 1000 Hilltop Circle, Baltimore, Maryland 21250,
United States
- Departments of Diagnostic Radiology and Nuclear
Medicine and Pediatrics, Center for Blood Oxygen Transport and Hemostasis,
University of Maryland Baltimore School of Medicine, Health Sciences
Research Facility III, 670 W Baltimore Street, Baltimore, Maryland 21201,
United States
- Department of Bioengineering, the
University of Illinois at Urbana−Champaign, Urbana, Illinois 61801,
United States
- Biomedical Engineering Department, Jordan
University of Science and Technology, Irbid 22110,
Jordan
| | - Dipanjan Pan
- Department of Chemical, Biochemical and Environmental
Engineering, University of Maryland Baltimore County, Interdisciplinary
Health Sciences Facility, 1000 Hilltop Circle, Baltimore, Maryland 21250,
United States
- Departments of Diagnostic Radiology and Nuclear
Medicine and Pediatrics, Center for Blood Oxygen Transport and Hemostasis,
University of Maryland Baltimore School of Medicine, Health Sciences
Research Facility III, 670 W Baltimore Street, Baltimore, Maryland 21201,
United States
- Department of Bioengineering, the
University of Illinois at Urbana−Champaign, Urbana, Illinois 61801,
United States
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11
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Haas J, Ulrich F, Hofer C, Wang X, Braun K, Meyer JC. Aligned Stacking of Nanopatterned 2D Materials for High-Resolution 3D Device Fabrication. ACS NANO 2022; 16:1836-1846. [PMID: 35104934 DOI: 10.1021/acsnano.1c09122] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Two-dimensional materials can be combined by placing individual layers on top of each other, so that they are bound only by their van der Waals interaction. The sequence of layers can be chosen arbitrarily, enabling an essentially atomic-level control of the material and thereby a wide choice of properties along one dimension. However, simultaneous control over the structure in the in-plane directions is so far still rather limited. Here, we combine spatially controlled modifications of 2D materials, using focused electron irradiation or electron beam induced etching, with the layer-by-layer assembly of van der Waals heterostructures. The presented assembly process makes it possible to structure each layer with an arbitrary pattern prior to the assembly into the heterostructure. Moreover, it enables a stacking of the layers with accurate lateral alignment, with an accuracy of currently 10 nm, under observation in an electron microscope. Together, this enables the fabrication of almost arbitrary 3D structures with highest spatial resolution.
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Affiliation(s)
- Jonas Haas
- Institute of Applied Physics, Eberhard Karls University of Tuebingen, Auf der Morgenstelle 10, D-72076, Tuebingen, Germany
- Natural and Medical Sciences Institute at the University of Tuebingen, Markwiesenstr. 55, D-72770 Reutlingen, Germany
| | - Finn Ulrich
- Institute of Applied Physics, Eberhard Karls University of Tuebingen, Auf der Morgenstelle 10, D-72076, Tuebingen, Germany
- Natural and Medical Sciences Institute at the University of Tuebingen, Markwiesenstr. 55, D-72770 Reutlingen, Germany
| | - Christoph Hofer
- Institute of Applied Physics, Eberhard Karls University of Tuebingen, Auf der Morgenstelle 10, D-72076, Tuebingen, Germany
- Natural and Medical Sciences Institute at the University of Tuebingen, Markwiesenstr. 55, D-72770 Reutlingen, Germany
| | - Xiao Wang
- School of Physics and Electronics, Hunan University, Changsha, Hunan 410082, China
| | - Kai Braun
- Institute of Physical and Theoretical Chemistry, Eberhard Karls University of Tuebingen, Auf der Morgenstelle 18, D-72076, Tuebingen, Germany
| | - Jannik C Meyer
- Institute of Applied Physics, Eberhard Karls University of Tuebingen, Auf der Morgenstelle 10, D-72076, Tuebingen, Germany
- Natural and Medical Sciences Institute at the University of Tuebingen, Markwiesenstr. 55, D-72770 Reutlingen, Germany
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12
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Ahmed A, Boyle EC, Kottke PA, Fedorov AG. Radiolytic redox interplay defines nanomaterial synthesis in liquids. SCIENCE ADVANCES 2021; 7:eabj8751. [PMID: 34919426 PMCID: PMC8682990 DOI: 10.1126/sciadv.abj8751] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/08/2021] [Accepted: 11/02/2021] [Indexed: 06/14/2023]
Abstract
Irradiation of a liquid solution generates solvated electrons and radiolysis products, which can lead to material deposition or etching. The chemical environment dictates the dominant reactions. Radiolysis-induced reactions in salt solutions have substantially different results in pure water versus water-ammonia, which extends the lifetime of solvated electrons. We investigate the interplay between transport and solution chemistry via the example of solid silver formation from e-beam irradiation of silver nitrate solutions in water and water-ammonia. The addition of ammonia results in the formation of a secondary ring-shaped deposit tens of micrometers in diameter (formed over tens of seconds) around the primary point of deposition (formed over milliseconds). Simulations uncover the relative importance of oxidizing and reducing reactions and transport effects. Our explanation of this behavior involves mechanisms beyond ammonia’s role in extending solvated electron lifetimes.
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13
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Kalinin SV, Ziatdinov M, Hinkle J, Jesse S, Ghosh A, Kelley KP, Lupini AR, Sumpter BG, Vasudevan RK. Automated and Autonomous Experiments in Electron and Scanning Probe Microscopy. ACS NANO 2021; 15:12604-12627. [PMID: 34269558 DOI: 10.1021/acsnano.1c02104] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Machine learning and artificial intelligence (ML/AI) are rapidly becoming an indispensable part of physics research, with domain applications ranging from theory and materials prediction to high-throughput data analysis. In parallel, the recent successes in applying ML/AI methods for autonomous systems from robotics to self-driving cars to organic and inorganic synthesis are generating enthusiasm for the potential of these techniques to enable automated and autonomous experiments (AE) in imaging. Here, we aim to analyze the major pathways toward AE in imaging methods with sequential image formation mechanisms, focusing on scanning probe microscopy (SPM) and (scanning) transmission electron microscopy ((S)TEM). We argue that automated experiments should necessarily be discussed in a broader context of the general domain knowledge that both informs the experiment and is increased as the result of the experiment. As such, this analysis should explore the human and ML/AI roles prior to and during the experiment and consider the latencies, biases, and prior knowledge of the decision-making process. Similarly, such discussion should include the limitations of the existing imaging systems, including intrinsic latencies, non-idealities, and drifts comprising both correctable and stochastic components. We further pose that the role of the AE in microscopy is not the exclusion of human operators (as is the case for autonomous driving), but rather automation of routine operations such as microscope tuning, etc., prior to the experiment, and conversion of low latency decision making processes on the time scale spanning from image acquisition to human-level high-order experiment planning. Overall, we argue that ML/AI can dramatically alter the (S)TEM and SPM fields; however, this process is likely to be highly nontrivial and initiated by combined human-ML workflows and will bring challenges both from the microscope and ML/AI sides. At the same time, these methods will enable opportunities and paradigms for scientific discovery and nanostructure fabrication.
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14
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Berger L, Jurczyk J, Madajska K, Szymańska IB, Hoffmann P, Utke I. Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate. MICROMACHINES 2021; 12:580. [PMID: 34065297 PMCID: PMC8161174 DOI: 10.3390/mi12050580] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/01/2021] [Revised: 05/14/2021] [Accepted: 05/15/2021] [Indexed: 11/17/2022]
Abstract
High-resolution metallic nanostructures can be fabricated with multistep processes, such as electron beam lithography or ice lithography. The gas-assisted direct-write technique known as focused electron beam induced deposition (FEBID) is more versatile than the other candidates. However, it suffers from low throughput. This work presents the combined approach of FEBID and the above-mentioned lithography techniques: direct electron beam lithography (D-EBL). A low-volatility copper precursor is locally condensed onto a room temperature substrate and acts as a positive tone resist. A focused electron beam then directly irradiates the desired patterns, leading to local molecule dissociation. By rinsing or sublimation, the non-irradiated precursor is removed, leaving copper-containing structures. Deposits were formed with drastically enhanced growth rates than FEBID, and their composition was found to be comparable to gas-assisted FEBID structures. The influence of electron scattering within the substrate as well as implementing a post-purification protocol were studied. The latter led to the agglomeration of high-purity copper crystals. We present this as a new approach to electron beam-induced fabrication of metallic nanostructures without the need for cryogenic or hot substrates. D-EBL promises fast and easy fabrication results.
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Affiliation(s)
- Luisa Berger
- Empa—Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland; (L.B.); (J.J.)
| | - Jakub Jurczyk
- Empa—Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland; (L.B.); (J.J.)
- Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow, Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Katarzyna Madajska
- Department of Chemistry, Nicolaus Copernicus University, Gagarina 7, 87-100 Toruń, Poland; (K.M.); (I.B.S.)
| | - Iwona B. Szymańska
- Department of Chemistry, Nicolaus Copernicus University, Gagarina 7, 87-100 Toruń, Poland; (K.M.); (I.B.S.)
| | - Patrik Hoffmann
- Empa—Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Advanced Materials Processing, Feuerwerkerstrasse 39, 3602 Thun, Switzerland;
| | - Ivo Utke
- Empa—Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland; (L.B.); (J.J.)
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15
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Esfandiarpour S, Hastings JT. Limiting regimes for electron-beam induced deposition of copper from aqueous solutions containing surfactants. NANOTECHNOLOGY 2021; 32:155302. [PMID: 33406512 DOI: 10.1088/1361-6528/abd8f5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Focused electron beam induced deposition of pure materials from aqueous solutions has been of interest in recent years. However, controlling the liquid film in partial vacuum is challenging. Here we modify the substrate to increase control over the liquid layer in order to conduct a parametric study of copper deposition in an environmental scanning electron microscope. We identified the transition from electron to mass-transport limited deposition as well as two additional regimes characterized by aggregated and high-aspect ratio deposits. We observe a high deposition efficiency of 1-10 copper atoms per primary electron that is consistent with a radiation chemical model of the deposition process.
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Affiliation(s)
- Samaneh Esfandiarpour
- Electrical and Computer Engineering, University of Kentucky, Lexington, KY 40506, United States of America
| | - J Todd Hastings
- Electrical and Computer Engineering, University of Kentucky, Lexington, KY 40506, United States of America
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16
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Preischl C, Le LH, Bilgilisoy E, Gölzhäuser A, Marbach H. Exploring the fabrication and transfer mechanism of metallic nanostructures on carbon nanomembranes via focused electron beam induced processing. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2021; 12:319-329. [PMID: 33889478 PMCID: PMC8042486 DOI: 10.3762/bjnano.12.26] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/04/2020] [Accepted: 03/26/2021] [Indexed: 06/12/2023]
Abstract
Focused electron beam-induced processing is a versatile method for the fabrication of metallic nanostructures with arbitrary shape, in particular, on top of two-dimensional (2D) organic materials, such as self-assembled monolayers (SAMs). Two methods, namely electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) are studied with the precursors Fe(CO)5 and Co(CO)3NO on SAMs of 1,1',4',1''-terphenyl-4-thiol (TPT). For Co(CO)3NO only EBID leads to deposits consisting of cobalt oxide. In the case of Fe(CO)5 EBID and EBISA yield deposits consisting of iron nanocrystals with high purity. Remarkably, the EBISA process exhibits a strong time dependence, which is analyzed in detail for different electron doses. This time dependence is a new phenomenon, which, to the best of our knowledge, was not reported before. The electron-induced cross-linking of the SAM caused by the cleavage of C-H bonds and the subsequent formation of new C-C bonds between neighboring molecules also seems to play a crucial role in the EBISA process. Previous studies showed that iron nanostructures fabricated on top of a cross-linked SAM on Au/mica can be transferred to solid substrates and grids without any changes, aside from oxidation. Here we demonstrate that iron as well as cobalt oxide structures on top of a cross-linked SAM on Ag/mica do change more significantly. The Fe(NO3)3 solution used for etching of the Ag layer also dissolves the cobalt oxide structures and causes dissolution and reduction of the iron structures. These results demonstrate that the fabrication of hybrids of metallic nanostructures onto organic 2D materials is an intrinsically complex procedure. The interactions among the metallic deposits, the substrate for the growth of the SAM, and the associated etching/dissolving agent need to be considered and further studied.
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Affiliation(s)
- Christian Preischl
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Linh Hoang Le
- Fakultät für Physik, Universität Bielefeld, 33615 Bielefeld, Germany
| | - Elif Bilgilisoy
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Armin Gölzhäuser
- Fakultät für Physik, Universität Bielefeld, 33615 Bielefeld, Germany
| | - Hubertus Marbach
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
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17
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Lingerfelt DB, Yu T, Yoshimura A, Ganesh P, Jakowski J, Sumpter BG. Nonadiabatic Effects on Defect Diffusion in Silicon-Doped Nanographenes. NANO LETTERS 2021; 21:236-242. [PMID: 33337886 DOI: 10.1021/acs.nanolett.0c03587] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Single atom impurities in graphene, substitutional silicon defects in particular, have been observed to diffuse under electron beam irradiation. However, the relative importance of elastic and inelastic scattering in facilitating their mobility remains unclear. Here, we employ excited-state electronic structure calculations to explore potential inelastic effects, and find an electronically nonadiabatic excited-state silicon diffusion pathway involving "softened" Si-C bonding that presents an ∼2 eV lower diffusion barrier than the ground-state pathway. Beam-induced transition rates to this state indicate that the excited-state pathway is accessible through irradiation of the defect site. However, even in the limit of fully elastic scattering, upward nonadiabatic transitions are also possible along the diffusion coordinate, increasing the diffusion barrier and further demonstrating the potential for electronic nonadiabaticity to influence beam-induced atomic transformations in materials. We also propose some experimentally testable signatures of such excited-state pathways.
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Affiliation(s)
- David B Lingerfelt
- Nanomaterials Theory Institute, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, United States
| | - Tao Yu
- Department of Chemistry, University of North Dakota, Grand Forks, North Dakota 58202, United States
| | - Anthony Yoshimura
- Department of Physics, Applied Physics, and Astronomy, Rensselaer Polytechnic Institute, Troy, New York 12180, United States
| | - Panchapakesan Ganesh
- Nanomaterials Theory Institute, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, United States
| | - Jacek Jakowski
- Computational Sciences and Engineering Division Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, United States
| | - Bobby G Sumpter
- Nanomaterials Theory Institute, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, United States
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18
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Kuhness D, Gruber A, Winkler R, Sattelkow J, Fitzek H, Letofsky-Papst I, Kothleitner G, Plank H. High-Fidelity 3D Nanoprinting of Plasmonic Gold Nanoantennas. ACS APPLIED MATERIALS & INTERFACES 2021; 13:1178-1191. [PMID: 33372522 DOI: 10.1021/acsami.0c17030] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
The direct-write fabrication of freestanding nanoantennas for plasmonic applications is a challenging task, as demands for overall morphologies, nanoscale features, and material qualities are very high. Within the small pool of capable technologies, three-dimensional (3D) nanoprinting via focused electron beam-induced deposition (FEBID) is a promising candidate due to its design flexibility. As FEBID materials notoriously suffer from high carbon contents, the chemical postgrowth transfer into pure metals is indispensably needed, which can severely harm or even destroy FEBID-based 3D nanoarchitectures. Following this challenge, we first dissect FEBID growth characteristics and then combine individual advantages by an advanced patterning approach. This allows the direct-write fabrication of high-fidelity shapes with nanoscale features in the sub-10 nm range, which allow a shape-stable chemical transfer into plasmonically active Au nanoantennas. The here-introduced strategy is a generic approach toward more complex 3D architectures for future applications in the field of 3D plasmonics.
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Affiliation(s)
- David Kuhness
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | | | - Robert Winkler
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Jürgen Sattelkow
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Harald Fitzek
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
| | - Ilse Letofsky-Papst
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Gerald Kothleitner
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Harald Plank
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
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19
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de Vera P, Azzolini M, Sushko G, Abril I, Garcia-Molina R, Dapor M, Solov'yov IA, Solov'yov AV. Multiscale simulation of the focused electron beam induced deposition process. Sci Rep 2020; 10:20827. [PMID: 33257728 PMCID: PMC7705715 DOI: 10.1038/s41598-020-77120-z] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/31/2020] [Accepted: 11/03/2020] [Indexed: 11/09/2022] Open
Abstract
Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack of molecular-level understanding of the underlying irradiation-driven chemistry (IDC). Computational modeling is a tool to comprehend and further optimize FEBID-related technologies. Here we utilize a novel multiscale methodology which couples Monte Carlo simulations for radiation transport with irradiation-driven molecular dynamics for simulating IDC with atomistic resolution. Through an in depth analysis of [Formula: see text] deposition on [Formula: see text] and its subsequent irradiation with electrons, we provide a comprehensive description of the FEBID process and its intrinsic operation. Our analysis reveals that simulations deliver unprecedented results in modeling the FEBID process, demonstrating an excellent agreement with available experimental data of the simulated nanomaterial composition, microstructure and growth rate as a function of the primary beam parameters. The generality of the methodology provides a powerful tool to study versatile problems where IDC and multiscale phenomena play an essential role.
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Affiliation(s)
- Pablo de Vera
- MBN Research Center, Altenhöferallee 3, 60438, Frankfurt am Main, Germany. .,Departamento de Física - Centro de Investigación en Óptica y Nanofísica (CIOyN), Universidad de Murcia, 30100, Murcia, Spain.
| | - Martina Azzolini
- European Centre for Theoretical Studies in Nuclear Physics and Related Areas (ECT*), 38123, Trento, Italy
| | - Gennady Sushko
- MBN Research Center, Altenhöferallee 3, 60438, Frankfurt am Main, Germany
| | - Isabel Abril
- Departament de Física Aplicada, Universitat d'Alacant, 03080, Alacant, Spain
| | - Rafael Garcia-Molina
- Departamento de Física - Centro de Investigación en Óptica y Nanofísica (CIOyN), Universidad de Murcia, 30100, Murcia, Spain
| | - Maurizio Dapor
- European Centre for Theoretical Studies in Nuclear Physics and Related Areas (ECT*), 38123, Trento, Italy
| | - Ilia A Solov'yov
- Department of Physics, Carl von Ossietzky University, Carl-von-Ossietzky Straße 9-11, 26129, Oldenburg, Germany
| | - Andrey V Solov'yov
- MBN Research Center, Altenhöferallee 3, 60438, Frankfurt am Main, Germany
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20
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Ganjian M, Angeloni L, Mirzaali MJ, Modaresifar K, Hagen CW, Ghatkesar MK, Hagedoorn PL, Fratila-Apachitei LE, Zadpoor AA. Quantitative mechanics of 3D printed nanopillars interacting with bacterial cells. NANOSCALE 2020; 12:21988-22001. [PMID: 32914826 DOI: 10.1039/d0nr05984f] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/10/2023]
Abstract
One of the methods to create sub-10 nm resolution metal-composed 3D nanopillars is electron beam-induced deposition (EBID). Surface nanotopographies (e.g., nanopillars) could play an important role in the design and fabrication of implantable medical devices by preventing the infections that are caused by the bacterial colonization of the implant surface. The mechanical properties of such nanoscale structures can influence their bactericidal efficiency. In addition, these properties are key factors in determining the fate of stem cells. In this study, we quantified the relevant mechanical properties of EBID nanopillars interacting with Staphylococcus aureus (S. aureus) using atomic force microscopy (AFM). We first determined the elastic modulus (17.7 GPa) and the fracture stress (3.0 ± 0.3 GPa) of the nanopillars using the quantitative imaging (QI) mode and contact mode (CM) of AFM. The displacement of the nanopillars interacting with the bacteria cells was measured by scanning electron microscopy (50.3 ± 9.0 nm). Finite element method based simulations were then applied to obtain the force-displacement curve of the nanopillars (considering the specified dimensions and the measured value of the elastic modulus) based on which an interaction force of 88.7 ± 36.1 nN was determined. The maximum von Mises stress of the nanopillars subjected to these forces was also determined (3.2 ± 0.3 GPa). These values were close to the maximum (i.e., fracture) stress of the pillars as measured by AFM, indicating that the nanopillars were close to their breaking point while interacting with S. aureus. These findings reveal unique quantitative data regarding the mechanical properties of nanopillars interacting with bacterial cells and highlight the possibilities of enhancing the bactericidal activity of the investigated EBID nanopillars by adjusting both their geometry and mechanical properties.
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Affiliation(s)
- Mahya Ganjian
- Department of Biomechanical Engineering, Faculty of Mechanical, Maritime, and Materials Engineering, Delft University of Technology, Mekelweg 2, 2628CD, Delft, The Netherlands.
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21
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Kim S, Jung S, Lee J, Kim S, Fedorov AG. High-Resolution Three-Dimensional Sculpting of Two-Dimensional Graphene Oxide by E-Beam Direct Write. ACS APPLIED MATERIALS & INTERFACES 2020; 12:39595-39601. [PMID: 32805878 DOI: 10.1021/acsami.0c11053] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
On-demand switchable "additive/subtractive" patterning of two-dimensional (2D) nanomaterials is an essential capability for developing new concepts of functional nanomaterials and their device realizations. Traditionally, this is performed via a multistep process using photoresist coating and patterning by conventional photo or electron beam lithography, which is followed by bulk dry/wet etching or deposition. This limits the range of functionalities and structural topologies that can be achieved as well as increases the complexity, cost, and possibility of contamination, which are significant barriers to device fabrication from highly sensitive 2D materials. Focused electron beam-induced processing (FEBIP) enables a material chemistry/site-specific, high-resolution multimode atomic scale processing and provides unprecedented opportunities for "direct-write", single-step surface patterning of 2D nanomaterials with an in situ imaging capability. It allows for realizing a rapid multiscale/multimode approach, ranging from an atomic scale manipulation (e.g., via targeted defect introduction as an active site) to a large-area surface modification on nano- and microscales, including patterned doping and material removal/deposition with 2D (in-plane)/three-dimensional (3D) (out-of-plane) control. In this work, we report on a new capability of FEBIP for nanoscale patterning of graphene oxide via removal of oxygenated carbon moieties with no use of reactive gas required for etching complemented by carbon atom deposition using a focused electron beam. The mechanism of experimentally observed phenomena is explored using the density functional theory (DFT) calculations, revealing that interactions of e-beam that liberated reactive oxygen radicals with carbon atoms on the graphene basal plane lead to the creation of atomic vacancies in the material. The reaction byproducts are volatile carbon dioxides, which are dissociated and volatilized from the graphene oxide surface functional groups by interactions with an energetic focused electron beam. Along with selective subtractive patterning of graphene oxide, the same electron beam with increased irradiation doses can deposit out-of-plane 3D carbon nanostructures on top of or around the 2D etched pattern, thus forming a hybrid 2D/3D nanocomposite with a feature control down to a few nanometers. This in operando dual nanofabrication capability of FEBIP is unmatched by any other nanopatterning techniques and opens a new design window for forming 2D/3D complex nanostructures and functional nanodevices.
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Affiliation(s)
- Songkil Kim
- School of Mechanical Engineering, Pusan National University, Busan 46241, South Korea
| | - SungYeb Jung
- Department of Physics, Pusan National University, Busan 46241, South Korea
| | - Jaekwang Lee
- Department of Physics, Pusan National University, Busan 46241, South Korea
| | - Seokjun Kim
- School of Mechanical Engineering, Pusan National University, Busan 46241, South Korea
| | - Andrei G Fedorov
- George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States
- Parker H. Petit Institute for Bioengineering and Bioscience, Georgia Institute of Technology, Atlanta, Georgia 30332, United States
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22
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Shiue J, Kuo PC. Deep-patterning of complex oxides by focused ion beam with PMMA-assisted hybrid protective layer. NANO EXPRESS 2020. [DOI: 10.1088/2632-959x/abb07c] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
Abstract
Abstract
Studying novel properties of complex oxides in nanoscale has become a popular research interest. Nanofabrication of complex oxides without damaging its intrinsic structure, however, is still challenging. In this work, we investigated the commonly used focused ion beam (FIB) technique for deep-patterning SrTiO3 (STO) using Cr as a surface protective layer and found that it was insufficient in protecting STO against the damage caused by the FIB beam tail effect. We further developed a new method for effectively deep-patterning STO using FIB. Our approach adopted a hybrid surface layer of Cr and polymethyl methacrylate (PMMA) to protect the STO surface during the FIB milling process against the damage caused by the beam tail. This PMMA-assisted hybrid protective layer can effectively prevent the damage resulting from the energetic ion beam, as verified by high-resolution transmission electron microscopy characterization. It was found that PMMA is not spun off during the FIB process but forms bubbles and likely absorbs the energy from the ion beam during this process. At the same time, a thin Cr layer of this hybrid served as a charge-releasing path and kept the patterning precise. This mechanism is very different from simply using Cr as a scarifying surface layer for ion bombardment.
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23
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Belianinov A, Burch MJ, Ievlev A, Kim S, Stanford MG, Mahady K, Lewis BB, Fowlkes JD, Rack PD, Ovchinnikova OS. Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition. MICROMACHINES 2020; 11:E527. [PMID: 32455865 PMCID: PMC7281202 DOI: 10.3390/mi11050527] [Citation(s) in RCA: 13] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/16/2020] [Revised: 05/19/2020] [Accepted: 05/20/2020] [Indexed: 12/11/2022]
Abstract
The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic precursor gas to fabricate nanoscale structures in 3D with high-precision and smaller critical dimensions than focused electron beam induced deposition (FEBID), traditional liquid metal source FIBID, or other additive manufacturing technology. In this work, we report the effect of beam current, dwell time, and pixel pitch on the resultant segment and angle growth for nanoscale 3D mesh objects. We note subtle beam heating effects, which impact the segment angle and the feature size. Additionally, we investigate the competition of material deposition and sputtering during the 3D FIBID process, with helium ion microscopy experiments and Monte Carlo simulations. Our results show complex 3D mesh structures measuring ~300 nm in the largest dimension, with individual features as small as 16 nm at full width half maximum (FWHM). These assemblies can be completed in minutes, with the underlying fabrication technology compatible with existing lithographic techniques, suggesting a higher-throughput pathway to integrating FIBID with established nanofabrication techniques.
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Affiliation(s)
- Alex Belianinov
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
| | - Matthew J. Burch
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
| | - Anton Ievlev
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
| | - Songkil Kim
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
- School of Mechanical Engineering, Pusan National University, Busan 46241, Korea
| | - Michael G. Stanford
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Kyle Mahady
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Brett B. Lewis
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Jason D. Fowlkes
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Philip D. Rack
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA; (M.G.S.); (K.M.); (B.B.L.)
| | - Olga S. Ovchinnikova
- Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (A.B.); (M.J.B.); (A.I.); (S.K.); (J.D.F.); (P.D.R.)
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24
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Skoric L, Sanz-Hernández D, Meng F, Donnelly C, Merino-Aceituno S, Fernández-Pacheco A. Layer-by-Layer Growth of Complex-Shaped Three-Dimensional Nanostructures with Focused Electron Beams. NANO LETTERS 2020; 20:184-191. [PMID: 31869235 DOI: 10.1021/acs.nanolett.9b03565] [Citation(s) in RCA: 30] [Impact Index Per Article: 7.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of nanotechnology currently challenged by fundamental limitations of conventional lithography. One of the most promising direct-write methods for 3D nanofabrication is focused electron beam-induced deposition (FEBID), owing to its high spatial resolution and versatility. Here we extend FEBID to the growth of complex-shaped 3D nanostructures by combining the layer-by-layer approach of conventional macroscopic 3D printers and the proximity effect correction of electron beam lithography. This framework is based on the continuum FEBID model and is capable of adjusting for a wide range of effects present during deposition, including beam-induced heating, defocusing, and gas flux anisotropies. We demonstrate the capabilities of our platform by fabricating free-standing nanowires, surfaces with varying curvatures and topologies, and general 3D objects, directly from standard stereolithography (STL) files and using different precursors. Real 3D nanoprinting as demonstrated here opens up exciting avenues for the study and exploitation of 3D nanoscale phenomena.
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Affiliation(s)
- Luka Skoric
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
| | - Dédalo Sanz-Hernández
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
| | - Fanfan Meng
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
| | - Claire Donnelly
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
| | - Sara Merino-Aceituno
- Faculty of Mathematics , University of Vienna , Oskar-Morgenstern-Platz 1 , 1090 , Vienna , Austria
| | - Amalio Fernández-Pacheco
- Cavendish Laboratory , University of Cambridge , JJ Thomson Avenue , CB3 0HE , Cambridge , United Kingdom
- SUPA, School of Physics and Astronomy , University of Glasgow , Kelvin Building, G12 8QQ , Glasgow , Scotland, United Kingdom
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25
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Harlow GS, Drnec J, Wiegmann T, Lipé W, Evertsson J, Persson AR, Wallenberg R, Lundgren E, Vinogradov NA. Observing growth under confinement: Sn nanopillars in porous alumina templates. NANOSCALE ADVANCES 2019; 1:4764-4771. [PMID: 36133116 PMCID: PMC9418422 DOI: 10.1039/c9na00473d] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/02/2019] [Accepted: 10/28/2019] [Indexed: 06/16/2023]
Abstract
Using a micro-focused high-energy X-ray beam, we have performed in situ time-resolved depth profiling during the electrochemical deposition of Sn into an ordered porous anodic alumina template. Combined with micro-diffraction we are able to follow the variation of the structure at the atomic scale as a function of depth and time. We show that Sn initially deposits at the bottom of the pores, and forms metallic nanopillars with a preferred [100] orientation and a relatively low mosaicity. The lattice strain is found to differ from previous ex situ measurements where the Sn had been removed from the porous support. The dendritic nature of the pore bottom affects the Sn growth mode and results in a variation of Sn grain size, strain and mosaicity. Such atomic scale information of nano-templated materials during electrodeposition may improve the future fabrication of devices.
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Affiliation(s)
- Gary S Harlow
- Division of Synchrotron Radiation Research, Lund University 221 00 Lund Sweden
| | - Jakub Drnec
- ESRF - The European Synchrotron 71 Avenue des Martyrs 38000 Grenoble France
| | - Tim Wiegmann
- ESRF - The European Synchrotron 71 Avenue des Martyrs 38000 Grenoble France
| | - Weronica Lipé
- Division of Synchrotron Radiation Research, Lund University 221 00 Lund Sweden
| | - Jonas Evertsson
- Division of Synchrotron Radiation Research, Lund University 221 00 Lund Sweden
| | - Axel R Persson
- National Center for High Resolution Electron Microscopy and NanoLund, Lund University 221 00 Lund Sweden
| | - Reine Wallenberg
- National Center for High Resolution Electron Microscopy and NanoLund, Lund University 221 00 Lund Sweden
| | - Edvin Lundgren
- Division of Synchrotron Radiation Research, Lund University 221 00 Lund Sweden
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26
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Mahady KT, Tan S, Greenzweig Y, Raveh A, Rack PD. Monte Carlo simulation of nanoscale material focused ion beam gas-assisted etching: Ga + and Ne + etching of SiO 2 in the presence of a XeF 2 precursor gas. NANOSCALE ADVANCES 2019; 1:3584-3596. [PMID: 36133559 PMCID: PMC9416977 DOI: 10.1039/c9na00390h] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/21/2019] [Accepted: 07/27/2019] [Indexed: 06/01/2023]
Abstract
Elucidating energetic particle-precursor gas-solid interactions is critical to many atomic and nanoscale synthesis approaches. Focused ion beam sputtering and gas-assisted etching are among the more commonly used direct-write nanomachining techniques that have been developed. Here, we demonstrate a method to simulate gas-assisted focused ion beam (FIB) induced etching for editing/machining materials at the nanoscale. The method consists of an ion-solid Monte Carlo simulation, to which we have added additional routines to emulate detailed gas precursor-solid interactions, including the gas flux, adsorption, and desorption. Furthermore, for the reactive etching component, a model is presented by which energetic ions/target atoms, and secondary electrons, transfer energy to adsorbed gas molecules. The simulation is described in detail, and is validated using analytical and experimental data for surface gas adsorption, and etching yields. The method is used to study XeF2 assisted FIB induced etching of nanoscale vias, using both a 35 keV Ga+, and a 10 keV Ne+ beam. Remarkable agreement between experimental and simulated nanoscale vias is demonstrated over a range of experimental conditions. Importantly, we demonstrate that the resolution depends strongly on the XeF2 gas flux, with optimal resolution obtained for either pure sputtering, or saturated gas coverage; saturated gas coverage has the clear advantage of lower overall dose, and thus lower implant damage, and much faster processing.
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Affiliation(s)
- Kyle T Mahady
- University of Tennessee Knoxville Tennessee 37996 USA
| | - Shida Tan
- Intel Corporation Santa Clara California 95054 USA
| | | | | | - Philip D Rack
- University of Tennessee Knoxville Tennessee 37996 USA
- Center for Nanophase Materials Science, Oak Ridge National Laboratory Oak Ridge Tennessee 37831 USA
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27
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Porrati F, Barth S, Sachser R, Dobrovolskiy OV, Seybert A, Frangakis AS, Huth M. Crystalline Niobium Carbide Superconducting Nanowires Prepared by Focused Ion Beam Direct Writing. ACS NANO 2019; 13:6287-6296. [PMID: 31046238 DOI: 10.1021/acsnano.9b00059] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
Superconducting planar nanostructures are widely used in applications, e.g., for highly sensitive magnetometers and in basic research, e.g., to study finite size effects or vortex dynamics. In contrast, 3D superconducting nanostructures, despite their potential in quantum information processing and nanoelectronics, have been addressed only in a few pioneering experiments. This is due to the complexity of fabricating 3D nanostructures by conventional techniques such as electron-beam lithography and to the scarce number of superconducting materials available for direct-writing techniques, which enable the growth of 3D free-standing nanostructures. Here, we present a comparative study of planar nanowires and free-standing 3D nanowires fabricated by focused electron- and ion (Ga+)-beam induced deposition (FEBID and FIBID) using the precursor Nb(NMe2)3(N- t-Bu). FEBID nanowires contain about 67 atomic percent C, 22 atomic percent N, and 11 atomic percent Nb, while FIBID samples are composed of 43 atomic percent C, 13 atomic percent N, 15.5 atomic percent Ga, and 28.5 atomic percent Nb. Transmission electron microscopy shows that FEBID samples are amorphous, while FIBID samples exhibit a fcc NbC polycrystalline structure, with grains about 15-20 nm in diameter. Electrical transport measurements show that FEBID nanowires are highly resistive following a variable-range-hopping behavior. In contradistinction, FIBID planar nanowires become superconducting at Tc ≈ 5 K. In addition, the critical temperature of free-standing 3D nanowires is as high as Tc ≈ 11 K, which is close to the value of bulk NbC. In conclusion, FIBID-NbC is a promising material for the fabrication of superconducting nanowire single-photon detectors (SNSPD) and for the development of 3D superconductivity with applications in quantum information processing and nanoelectronics.
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Affiliation(s)
- Fabrizio Porrati
- Physikalisches Institut , Goethe-Universität , Max-von-Laue-Strasse 1 , D-60438 Frankfurt am Main , Germany
| | - Sven Barth
- Institute of Materials Chemistry , TU Wien , Getreidemarkt 9/BC/02 , A-1060 Wien , Austria
| | - Roland Sachser
- Physikalisches Institut , Goethe-Universität , Max-von-Laue-Strasse 1 , D-60438 Frankfurt am Main , Germany
| | - Oleksandr V Dobrovolskiy
- Physikalisches Institut , Goethe-Universität , Max-von-Laue-Strasse 1 , D-60438 Frankfurt am Main , Germany
| | - Anja Seybert
- Buchmann Institute for Molecular Life Sciences , Goethe-Universität , Max-von-Laue-Strasse 15 , D-60438 Frankfurt am Main , Germany
| | - Achilleas S Frangakis
- Buchmann Institute for Molecular Life Sciences , Goethe-Universität , Max-von-Laue-Strasse 15 , D-60438 Frankfurt am Main , Germany
| | - Michael Huth
- Physikalisches Institut , Goethe-Universität , Max-von-Laue-Strasse 1 , D-60438 Frankfurt am Main , Germany
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28
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Sheng H, Zheng H, Jia S, Chan MKY, Rajh T, Wang J, Wen J. Atomistic manipulation of reversible oxidation and reduction in Ag with an electron beam. NANOSCALE 2019; 11:10756-10762. [PMID: 31120466 DOI: 10.1039/c8nr09525f] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
Employing electrons for direct control of a nanoscale reaction is highly desirable since it enables fabrication of nanostructures with different properties at atomic resolution and with flexibility of dimensions and location. Here, applying in situ transmission electron microscopy, we show the reversible oxidation and reduction kinetics in Ag, well controlled by changing the dose rate of the electron beam. Aberration-corrected high-resolution transmission electron microscopy observation reveals that O atoms are preferably inserted and extracted along the {111} close-packed planes of Ag, leading to the nucleation and decomposition of nanoscale Ag2O islands on the Ag substrate. By controlling the electron beam size and dose rate, we demonstrated the fabrication of an array of 3 nm Ag2O nanodots in an Ag matrix. Our results open a new pathway to manipulate an atomistic reaction with an electron beam towards the precise fabrication of nanostructures for device applications.
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Affiliation(s)
- Huaping Sheng
- Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439, USA.
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29
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Henry MR, Kim S, Fedorov AG. Non-equilibrium adatom thermal state enables rapid additive nanomanufacturing. Phys Chem Chem Phys 2019; 21:10449-10456. [PMID: 31069358 DOI: 10.1039/c9cp01478k] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
A new state of radical thermal non-equilibrium in surface adsorbed molecules is discovered that enables rapid surface diffusion of energized adatoms with a negligible effect on the substrate surface temperature. Due to enhanced surface diffusion, growth rates can be achieved that improve the feasibility of many nanofabrication techniques. Since the adatom temperature cannot be directly measured without disturbing its thermodynamic state, the first principle hard-cube model is used to predict both the adatom effective temperature and the surface temperature in response to gaseous particle impingement in a vacuum. The validity of the approach is supported by local, spatially-resolved surface temperature measurements of the thermal response to supersonic microjet gas impingement. The ability to determine and control the adatom effective temperature, and therefore the surface diffusion rate, opens new degrees of freedom in controlling a wide range of nanofabrication processes that critically depend on surface diffusion of precursor molecules. This fundamental understanding has the potential to accelerate research into nanoscale fabrication and to yield the new materials with unique properties that are only accessible with nanoscale features.
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Affiliation(s)
- Matthew R Henry
- George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA.
| | - Songkil Kim
- George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA.
| | - Andrei G Fedorov
- George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA. and Parker H. Petit Institute for Bioengineering and Bioscience, Georgia Institute of Technology, Atlanta, GA 30332, USA
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30
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Dong P, Rakesh K, Manukumar H, Mohammed YHE, Karthik C, Sumathi S, Mallu P, Qin HL. Innovative nano-carriers in anticancer drug delivery-a comprehensive review. Bioorg Chem 2019; 85:325-336. [DOI: 10.1016/j.bioorg.2019.01.019] [Citation(s) in RCA: 67] [Impact Index Per Article: 13.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/17/2018] [Revised: 01/07/2019] [Accepted: 01/08/2019] [Indexed: 02/07/2023]
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31
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Liu B, Wang L, Zhu Y, Xia Y, Huang W, Li Z. CdS sensitized sol-gel derived thin films of self-patterned micro-blocks of closely-packed SnO2 nanoparticles as high-performance photoanodes in alkaline solution of methanol. Electrochim Acta 2019. [DOI: 10.1016/j.electacta.2018.10.129] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/28/2022]
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32
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Dyck O, Kim S, Jimenez-Izal E, Alexandrova AN, Kalinin SV, Jesse S. Building Structures Atom by Atom via Electron Beam Manipulation. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2018; 14:e1801771. [PMID: 30146718 DOI: 10.1002/smll.201801771] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/08/2018] [Revised: 07/24/2018] [Indexed: 06/08/2023]
Abstract
Building materials from the atom up is the pinnacle of materials fabrication. Until recently the only platform that offered single-atom manipulation was scanning tunneling microscopy. Here controlled manipulation and assembly of a few atom structures are demonstrated by bringing together single atoms using a scanning transmission electron microscope. An atomically focused electron beam is used to introduce Si substitutional defects and defect clusters in graphene with spatial control of a few nanometers and enable controlled motion of Si atoms. The Si substitutional defects are then further manipulated to form dimers, trimers, and more complex structures. The dynamics of a beam-induced atomic-scale chemical process is captured in a time-series of images at atomic resolution. These studies suggest that control of the e-beam-induced local processes offers the next step toward atom-by-atom nanofabrication, providing an enabling tool for the study of atomic-scale chemistry in 2D materials and fabrication of predefined structures and defects with atomic specificity.
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Affiliation(s)
- Ondrej Dyck
- The Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
- The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
| | - Songkil Kim
- School of Mechanical Engineering, Pusan National University, Busan, 46241, South Korea
| | - Elisa Jimenez-Izal
- Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, CA, 90095-1569, USA
- Kimika Fakultatea, Euskal Herriko Unibertsitatea (UPV/EHU), and Donostia International Physics Center (DIPC), P. K. 1072, 20080, Donostia, Euskadi, Spain
| | - Anastassia N Alexandrova
- Kimika Fakultatea, Euskal Herriko Unibertsitatea (UPV/EHU), and Donostia International Physics Center (DIPC), P. K. 1072, 20080, Donostia, Euskadi, Spain
- California NanoSystems Institute, 570 Westwood Plaza, Building 114, Los Angeles, CA, 90095, USA
| | - Sergei V Kalinin
- The Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
- The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
| | - Stephen Jesse
- The Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
- The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN, 37831, USA
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33
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Sachan R, Zarkadoula E, Ou X, Trautmann C, Zhang Y, Chisholm MF, Weber WJ. Sculpting Nanoscale Functional Channels in Complex Oxides Using Energetic Ions and Electrons. ACS APPLIED MATERIALS & INTERFACES 2018; 10:16731-16738. [PMID: 29697252 DOI: 10.1021/acsami.8b02326] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
The formation of metastable phases has attracted significant attention because of their unique properties and potential functionalities. In the present study, we demonstrate the phase conversion of energetic-ion-induced amorphous nanochannels/tracks into a metastable defect fluorite in A2B2O7 structured complex oxides by electron irradiation. Through in situ electron irradiation experiments in a scanning transmission electron microscope, we observe electron-induced epitaxial crystallization of the amorphous nanochannels in Yb2Ti2O7 into the defect fluorite. This energetic-electron-induced phase transformation is attributed to the coupled effect of ionization-induced electronic excitations and local heating, along with subthreshold elastic energy transfers. We also show the role of ionic radii of A-site cations (A = Yb, Gd, and Sm) and B-site cations (Ti and Zr) in facilitating the electron-beam-induced crystallization of the amorphous phase to the defect-fluorite structure. The formation of the defect-fluorite structure is eased by the decrease in the difference between ionic radii of A- and B-site cations in the lattice. Molecular dynamics simulations of thermal annealing of the amorphous phase nanochannels in A2B2O7 draw parallels to the electron-irradiation-induced crystallization and confirm the role of ionic radii in lowering the barrier for crystallization. These results suggest that employing guided electron irradiation with atomic precision is a useful technique for selected area phase formation in nanoscale printed devices.
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Affiliation(s)
- Ritesh Sachan
- Materials Science and Technology Division , Oak Ridge National Laboratory , Oak Ridge , Tennessee 37831 , United States
| | - Eva Zarkadoula
- Materials Science and Technology Division , Oak Ridge National Laboratory , Oak Ridge , Tennessee 37831 , United States
| | - Xin Ou
- State Key Laboratory of Functional Material for Informatics, Shanghai Institute of Microsystem and Information Technology , Chinese Academy of Sciences , Shanghai 200050 , China
| | - Christina Trautmann
- GSI Helmholtzzentrum für Schwerionenforschung GmbH , Planckstrasse, 1 , Darmstadt D-64291 , Germany
- Materialwissenschaft , Technische Universität Darmstadt , Darmstadt 64287 , Germany
| | - Yanwen Zhang
- Materials Science and Technology Division , Oak Ridge National Laboratory , Oak Ridge , Tennessee 37831 , United States
- Department of Materials Science and Engineering , University of Tennessee , Knoxville , Tennessee 37996 , United States
| | - Matthew F Chisholm
- Materials Science and Technology Division , Oak Ridge National Laboratory , Oak Ridge , Tennessee 37831 , United States
| | - William J Weber
- Materials Science and Technology Division , Oak Ridge National Laboratory , Oak Ridge , Tennessee 37831 , United States
- Department of Materials Science and Engineering , University of Tennessee , Knoxville , Tennessee 37996 , United States
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34
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Höflich K, Jurczyk JM, Madajska K, Götz M, Berger L, Guerra-Nuñez C, Haverkamp C, Szymanska I, Utke I. Towards the third dimension in direct electron beam writing of silver. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:842-849. [PMID: 29600145 PMCID: PMC5852464 DOI: 10.3762/bjnano.9.78] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/09/2017] [Accepted: 02/14/2018] [Indexed: 05/06/2023]
Abstract
Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell-time-dependent deposition behavior and growth characteristics. While silver 2,2-dimethylbutyrate showed a strong depletion in the center of the impinging electron beam profile hindering any vertical growth, silver pentafluoropropionate indicated a pronounced dependency of the deposit height on the dwell time. Truly three-dimensional silver structures could be realized with silver pentafluoropropionate. The pillars were polycrystalline with silver contents of more than 50 atom % and exhibit strong Raman enhancement. This constitutes a promising route towards the direct electron beam writing of three-dimensional plasmonic device parts from the gas phase.
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Affiliation(s)
- Katja Höflich
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Jakub Mateusz Jurczyk
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Sciences, AGH University of Science and Technology, 30-059 Kraków, Poland
| | - Katarzyna Madajska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Maximilian Götz
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Luisa Berger
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Carlos Guerra-Nuñez
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Caspar Haverkamp
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Iwona Szymanska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Ivo Utke
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
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35
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Berger L, Madajska K, Szymanska IB, Höflich K, Polyakov MN, Jurczyk J, Guerra-Nuñez C, Utke I. Gas-assisted silver deposition with a focused electron beam. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:224-232. [PMID: 29441267 PMCID: PMC5789381 DOI: 10.3762/bjnano.9.24] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/02/2017] [Accepted: 12/18/2017] [Indexed: 05/15/2023]
Abstract
Focused electron beam induced deposition (FEBID) is a flexible direct-write method to obtain defined structures with a high lateral resolution. In order to use this technique in application fields such as plasmonics, suitable precursors which allow the deposition of desired materials have to be identified. Well known for its plasmonic properties, silver represents an interesting candidate for FEBID. For this purpose the carboxylate complex silver(I) pentafluoropropionate (AgO2CC2F5) was used for the first time in FEBID and resulted in deposits with high silver content of up to 76 atom %. As verified by TEM investigations, the deposited material is composed of pure silver crystallites in a carbon matrix. It showed good electrical properties and a strong Raman signal enhancement. Interestingly, silver crystal growth presents a strong dependency on electron dose and precursor refreshment.
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Affiliation(s)
- Luisa Berger
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Katarzyna Madajska
- Department of Chemistry, Nicolaus Copernicus University, Gagarina 7, 87 100 Toruń, Poland
| | - Iwona B Szymanska
- Department of Chemistry, Nicolaus Copernicus University, Gagarina 7, 87 100 Toruń, Poland
| | - Katja Höflich
- Nanoscale Structures and Microscopic Analysis, Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Mikhail N Polyakov
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Jakub Jurczyk
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- AGH University of Science and Technology Krakow, Faculty of Physics and Applied Computer Science, Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Carlos Guerra-Nuñez
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Ivo Utke
- Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
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36
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Song J, Hudak BM, Sims H, Sharma Y, Ward TZ, Pantelides ST, Lupini AR, Snijders PC. Homo-endotaxial one-dimensional Si nanostructures. NANOSCALE 2017; 10:260-267. [PMID: 29210405 DOI: 10.1039/c7nr06968e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
One-dimensional (1D) nanostructures are highly sought after, both for their novel electronic properties as well as for their improved functionality. However, due to their nanoscale dimensions, these properties are significantly affected by the environment in which they are embedded. In this paper, we report on the creation of 1D homo-endotaxial Si nanostructures, i.e. 1D Si nanostructures with a lattice structure that is uniquely different from the Si diamond lattice in which they are embedded. We use scanning tunneling microscopy and spectroscopy, scanning transmission electron microscopy, density functional theory, and conductive atomic force microscopy to elucidate their formation and properties. Depending on kinetic constraints during growth, they can be prepared as endotaxial 1D Si nanostructures completely embedded in crystalline Si, or underneath a stripe of amorphous Si containing a large concentration of Bi atoms. These homo-endotaxial 1D Si nanostructures have the potential to be useful components in nanoelectronic devices based on the technologically mature Si platform.
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Affiliation(s)
- Jiaming Song
- Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA.
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37
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Chemical Changes in Layered Ferroelectric Semiconductors Induced by Helium Ion Beam. Sci Rep 2017; 7:16619. [PMID: 29192283 PMCID: PMC5709364 DOI: 10.1038/s41598-017-16949-3] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/27/2017] [Accepted: 11/20/2017] [Indexed: 11/11/2022] Open
Abstract
Multi-material systems interfaced with 2D materials, or entirely new 3D heterostructures can lead to the next generation multi-functional device architectures. Physical and chemical control at the nanoscale is also necessary tailor these materials as functional structures approach physical limit. 2D transition metal thiophosphates (TPS), with a general formulae Cu1−xIn1+x/3P2S6, have shown ferroelectric polarization behavior with a Tc above the room temperature, making them attractive candidates for designing both: chemical and physical properties. Our previous studies have demonstrated that ferroic order persists on the surface, and that spinoidal decomposition of ferroelectric and paraelectric phases occurs in non-stoichiometric Cu/In ratio formulations. Here, we discuss the chemical changes induced by helium ion irradiation. We explore the TPS compound library with varying Cu/In ratio, using Helium Ion Microscopy, Atomic Force Microscopy (AFM), and Time of Flight-Secondary Ion Mass Spectrometry (ToF-SIMS). We correlate physical nano- and micro- structures to the helium ion dose, as well as chemical signatures of copper, oxygen and sulfur. Our ToF-SIMS results show that He ion irradiation leads to oxygen penetration into the irradiated areas, and diffuses along the Cu-rich domains to the extent of the stopping distance of the helium ions.
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Belić D, Shawrav MM, Bertagnolli E, Wanzenboeck HD. Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:2530-2543. [PMID: 29259868 PMCID: PMC5727840 DOI: 10.3762/bjnano.8.253] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/30/2017] [Accepted: 11/08/2017] [Indexed: 06/07/2023]
Abstract
This work presents a highly effective approach for the chemical purification of directly written 2D and 3D gold nanostructures suitable for plasmonics, biomolecule immobilisation, and nanoelectronics. Gold nano- and microstructures can be fabricated by one-step direct-write lithography process using focused electron beam induced deposition (FEBID). Typically, as-deposited gold nanostructures suffer from a low Au content and unacceptably high carbon contamination. We show that the undesirable carbon contamination can be diminished using a two-step process - a combination of optimized deposition followed by appropriate postdeposition cleaning. Starting from the common metal-organic precursor Me2-Au-tfac, it is demonstrated that the Au content in pristine FEBID nanostructures can be increased from 30 atom % to as much as 72 atom %, depending on the sustained electron beam dose. As a second step, oxygen-plasma treatment is established to further enhance the Au content in the structures, while preserving their morphology to a high degree. This two-step process represents a simple, feasible and high-throughput method for direct writing of purer gold nanostructures that can enable their future use for demanding applications.
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Affiliation(s)
- Domagoj Belić
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
- University of Liverpool, Department of Chemistry, Crown Street, Liverpool L69 7ZD, United Kingdom
| | - Mostafa M Shawrav
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
- Institute of Sensors & Actuator System, TU Wien, Gusshausstrasse 27–29, 1040 Vienna, Austria
| | - Emmerich Bertagnolli
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
| | - Heinz D Wanzenboeck
- Institute of Solid State Electronics, TU Wien, Floragasse 7, 1040 Vienna, Austria
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Sanz-Hernández D, Fernández-Pacheco A. Modelling focused electron beam induced deposition beyond Langmuir adsorption. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2017; 8:2151-2161. [PMID: 29090116 PMCID: PMC5647696 DOI: 10.3762/bjnano.8.214] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/04/2017] [Accepted: 09/18/2017] [Indexed: 05/03/2023]
Abstract
In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes. Two types of adsorption energies, describing both physisorption and spontaneous chemisorption, are included. Steady state solutions under no diffusion are investigated and compared under a wide range of conditions. The different growth regimes observed are fully explained by relative changes in FEBID characteristic frequencies. Additionally, we present a set of FEBID frequency maps where growth rate and surface coverage are plotted as a function of characteristic timescales. From the analysis of Langmuir, as well as homogeneous and heterogeneous multilayer maps, we infer that three types of growth regimes are possible for FEBID under no diffusion, resulting into four types of adsorption isotherms. We propose the use of these maps as a powerful tool for the analysis of FEBID processes.
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Affiliation(s)
- Dédalo Sanz-Hernández
- Cavendish Laboratory, University of Cambridge, JJ Thomson Cambridge, CB3 0HE, United Kingdom
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Patra CN. Spherical electric double layers containing mixed electrolytes: A case study for multivalent counterions. Chem Phys Lett 2017. [DOI: 10.1016/j.cplett.2017.08.010] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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Junige M, Löffler M, Geidel M, Albert M, Bartha JW, Zschech E, Rellinghaus B, Dorp WFV. Area-selective atomic layer deposition of Ru on electron-beam-written Pt(C) patterns versus SiO 2 substratum. NANOTECHNOLOGY 2017; 28:395301. [PMID: 28837051 DOI: 10.1088/1361-6528/aa8844] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Area selectivity is an emerging sub-topic in the field of atomic layer deposition (ALD), which employs opposite nucleation phenomena to distinct heterogeneous starting materials on a surface. In this paper, we intend to grow Ru exclusively on locally pre-defined Pt patterns, while keeping a SiO2 substratum free from any deposition. In a first step, we study in detail the Ru ALD nucleation on SiO2 and clarify the impact of the set-point temperature. An initial incubation period with actually no growth was revealed before a formation of minor, isolated RuO x islands; clearly no continuous Ru layer formed on SiO2. A lower temperature was beneficial in facilitating a longer incubation and consequently a wider window for (inherent) selectivity. In a second step, we write C-rich Pt micro-patterns on SiO2 by focused electron-beam-induced deposition (FEBID), varying the number of FEBID scans at two electron beam acceleration voltages. Subsequently, the localized Pt(C) deposits are pre-cleaned in O2 and overgrown by Ru ALD. Already sub-nanometer-thin Pt(C) patterns, which were supposedly purified into some form of Pt(O x ), acted as very effective activation for the locally restricted, thus area-selective ALD growth of a pure, continuous Ru covering, whereas the SiO2 substratum sufficiently inhibited towards no growth. FEBID at lower electron energy reduced unwanted stray deposition and achieved well-resolved pattern features. We access the nucleation phenomena by utilizing a hybrid metrology approach, which uniquely combines in-situ real-time spectroscopic ellipsometry, in-vacuo x-ray photoelectron spectroscopy, ex-situ high-resolution scanning electron microscopy, and mapping energy-dispersive x-ray spectroscopy.
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Affiliation(s)
- Marcel Junige
- Technische Universität Dresden, Faculty of Electrical and Computer Engineering, Institute of Semiconductors and Microsystems (IHM), D-01062 Dresden, Germany
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Ievlev AV, Jakowski J, Burch MJ, Iberi V, Hysmith H, Joy DC, Sumpter BG, Belianinov A, Unocic RR, Ovchinnikova OS. Building with ions: towards direct write of platinum nanostructures using in situ liquid cell helium ion microscopy. NANOSCALE 2017; 9:12949-12956. [PMID: 28831493 DOI: 10.1039/c7nr04417h] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Direct write with a liquid precursor using an ion beam in situ, allows fabrication of nanostructures with higher purity than using gas phase deposition. Specifically, positively charged helium ions, when compared to electrons, localize the reaction zone to a single-digit nanometer scale. However, to control the interaction of the ion beam with the liquid precursor, as well as enable single digit fabrication, a comprehensive understanding of the radiolytic process, and the role of secondary electrons has to be developed. Here, we demonstrate an approach for directly writing platinum nanostructures from aqueous solution using a helium ion microscope, and discuss possible mechanisms for the beam-induced particle growth in the framework of Born-Oppenheimer and real-time electron dynamics models. We illustrate the nanoparticle nucleation and growth parameters through data analysis of in situ acquired movie data, and correlate these results to a fully encompassing, time-dependent, quantum dynamical simulation that takes into account both quantum and classical interactions. Finally, sub-15 nm resolution platinum structures generated in liquid are demonstrated.
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Affiliation(s)
- Anton V Ievlev
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA.
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Susi T, Meyer JC, Kotakoski J. Manipulating low-dimensional materials down to the level of single atoms with electron irradiation. Ultramicroscopy 2017; 180:163-172. [DOI: 10.1016/j.ultramic.2017.03.005] [Citation(s) in RCA: 92] [Impact Index Per Article: 13.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/30/2016] [Revised: 02/24/2017] [Accepted: 03/01/2017] [Indexed: 10/20/2022]
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Höflich K, Jurczyk J, Zhang Y, Puydinger Dos Santos MV, Götz M, Guerra-Nuñez C, Best JP, Kapusta C, Utke I. Direct Electron Beam Writing of Silver-Based Nanostructures. ACS APPLIED MATERIALS & INTERFACES 2017. [PMID: 28631921 DOI: 10.1021/acsami.7b04353] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/15/2023]
Abstract
Direct writing utilizing a focused electron beam constitutes an interesting alternative to resist-based techniques, as it allows for precise and flexible growth onto any conductive substrate in a single-step process. One important challenge, however, is the identification of appropriate precursors which allow for deposition of the material of choice, e.g., for envisaged applications in nano-optics. In this regard the coinage metal silver is of particular interest since it shows a relatively high plasma frequency and, thus, excellent plasmonic properties in the visible range. By utilizing the precursor compound AgO2Me2Bu, direct writing of silver-based nanostructures via local electron beam induced deposition could be realized for the first time. Interestingly, the silver deposition was strongly dependent on electron dose; at low doses of 30 nC/μm2 a dominant formation of pure silver crystals was observed, while at higher electron doses around 104 nC/μm2 large carbon contents were measured. A scheme for the enhanced silver deposition under low electron fluxes by an electronic activation of precursor dissociation below thermal CVD temperature is proposed and validated using material characterization techniques. Finally, the knowledge gained was employed to fabricate well-defined two-dimensional deposits with maximized silver content approaching 75 at. %, which was achieved by proper adjustment of the deposition parameters. The corresponding deposits consist of plasmonically active silver crystallites and demonstrate a pronounced Raman signal enhancement of the carbonaceous matrix.
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Affiliation(s)
- Katja Höflich
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Nanoscale Structures and Microscopic Analysis, Helmholtz-Zentrum Berlin für Materialien und Energie , Hahn-Meitner-Platz 1, D-14109 Berlin, Germany
| | - Jakub Jurczyk
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow , Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Yucheng Zhang
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Marcos V Puydinger Dos Santos
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
- Institute of Physics Gleb Wataghin, University of Campinas , Rua Sergio Buarque de Holanda 777 Cidade Universitaria, 13083-859 Campinas-SP, Brazil
| | - Maximilian Götz
- Nanoscale Structures and Microscopic Analysis, Helmholtz-Zentrum Berlin für Materialien und Energie , Hahn-Meitner-Platz 1, D-14109 Berlin, Germany
| | - Carlos Guerra-Nuñez
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - James P Best
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
| | - Czeslaw Kapusta
- Faculty of Physics and Applied Computer Science, AGH University of Science and Technology Krakow , Al. Mickiewicza 30, 30-059 Kraków, Poland
| | - Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland
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Park JH, Steingart DA, Kodambaka S, Ross FM. Electrochemical electron beam lithography: Write, read, and erase metallic nanocrystals on demand. SCIENCE ADVANCES 2017; 3:e1700234. [PMID: 28706992 PMCID: PMC5507638 DOI: 10.1126/sciadv.1700234] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/22/2017] [Accepted: 06/12/2017] [Indexed: 05/08/2023]
Abstract
We develop a solution-based nanoscale patterning technique for site-specific deposition and dissolution of metallic nanocrystals. Nanocrystals are grown at desired locations by electron beam-induced reduction of metal ions in solution, with the ions supplied by dissolution of a nearby electrode via an applied potential. The nanocrystals can be "erased" by choice of beam conditions and regrown repeatably. We demonstrate these processes via in situ transmission electron microscopy using Au as the model material and extend to other metals. We anticipate that this approach can be used to deposit multicomponent alloys and core-shell nanostructures with nanoscale spatial and compositional resolutions for a variety of possible applications.
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Affiliation(s)
- Jeung Hun Park
- Department of Materials Science and Engineering, University of California, Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA
- Department of Mechanical and Aerospace Engineering, and Andlinger Center for Energy and the Environment, Princeton University, Princeton, NJ 08544, USA
- IBM Thomas J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, NY 10598, USA
| | - Daniel A. Steingart
- Department of Mechanical and Aerospace Engineering, and Andlinger Center for Energy and the Environment, Princeton University, Princeton, NJ 08544, USA
- Corresponding author. (D.A.S.); (S.K.); (F.M.R.)
| | - Suneel Kodambaka
- Department of Materials Science and Engineering, University of California, Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA
- Corresponding author. (D.A.S.); (S.K.); (F.M.R.)
| | - Frances M. Ross
- IBM Thomas J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, NY 10598, USA
- Corresponding author. (D.A.S.); (S.K.); (F.M.R.)
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Hirt L, Reiser A, Spolenak R, Zambelli T. Additive Manufacturing of Metal Structures at the Micrometer Scale. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2017; 29. [PMID: 28052421 DOI: 10.1002/adma.201604211] [Citation(s) in RCA: 108] [Impact Index Per Article: 15.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/05/2016] [Revised: 11/03/2016] [Indexed: 05/06/2023]
Abstract
Currently, the focus of additive manufacturing (AM) is shifting from simple prototyping to actual production. One driving factor of this process is the ability of AM to build geometries that are not accessible by subtractive fabrication techniques. While these techniques often call for a geometry that is easiest to manufacture, AM enables the geometry required for best performance to be built by freeing the design process from restrictions imposed by traditional machining. At the micrometer scale, the design limitations of standard fabrication techniques are even more severe. Microscale AM thus holds great potential, as confirmed by the rapid success of commercial micro-stereolithography tools as an enabling technology for a broad range of scientific applications. For metals, however, there is still no established AM solution at small scales. To tackle the limited resolution of standard metal AM methods (a few tens of micrometers at best), various new techniques aimed at the micrometer scale and below are presently under development. Here, we review these recent efforts. Specifically, we feature the techniques of direct ink writing, electrohydrodynamic printing, laser-assisted electrophoretic deposition, laser-induced forward transfer, local electroplating methods, laser-induced photoreduction and focused electron or ion beam induced deposition. Although these methods have proven to facilitate the AM of metals with feature sizes in the range of 0.1-10 µm, they are still in a prototype stage and their potential is not fully explored yet. For instance, comprehensive studies of material availability and material properties are often lacking, yet compulsory for actual applications. We address these items while critically discussing and comparing the potential of current microscale metal AM techniques.
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Affiliation(s)
- Luca Hirt
- ETH and University of Zürich, Institute for Biomedical Engineering, Laboratory of Biosensors and Bioelectronics, Gloriastrasse 35, CH-8092, Zurich, Switzerland
| | - Alain Reiser
- ETH Zürich, Department of Materials, Laboratory for Nanometallurgy, Vladimir-Prelog-Weg 5, CH-8093, Zurich, Switzerland
| | - Ralph Spolenak
- ETH Zürich, Department of Materials, Laboratory for Nanometallurgy, Vladimir-Prelog-Weg 5, CH-8093, Zurich, Switzerland
| | - Tomaso Zambelli
- ETH and University of Zürich, Institute for Biomedical Engineering, Laboratory of Biosensors and Bioelectronics, Gloriastrasse 35, CH-8092, Zurich, Switzerland
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YANG DL, ZENG FX, SUN M, GU WH, LI L. Investigation on Properties of Collagen Nanowires Quasiepitaxially Grown on Mica Lattice Plane. CHINESE JOURNAL OF ANALYTICAL CHEMISTRY 2017. [DOI: 10.1016/s1872-2040(17)61003-x] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
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Esfandiarpour S, Boehme L, Hastings JT. Focused electron beam induced deposition of copper with high resolution and purity from aqueous solutions. NANOTECHNOLOGY 2017; 28:125301. [PMID: 28220760 DOI: 10.1088/1361-6528/aa5a4a] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/11/2023]
Abstract
Electron-beam induced deposition of high-purity copper nanostructures is desirable for nanoscale rapid prototyping, interconnection of chemically synthesized structures, and integrated circuit editing. However, metalorganic, gas-phase precursors for copper introduce high levels of carbon contamination. Here we demonstrate electron beam induced deposition of high-purity copper nanostructures from aqueous solutions of copper sulfate. The addition of sulfuric acid eliminates oxygen contamination from the deposit and produces a deposit with ∼95 at% copper. The addition of sodium dodecyl sulfate (SDS), Triton X-100, or polyethylene glycole (PEG) improves pattern resolution and controls deposit morphology but leads to slightly reduced purity. High resolution nested lines with a 100 nm pitch are obtained from CuSO4-H2SO4-SDS-H2O. Higher aspect ratios (∼1:1) with reduced line edge roughness and unintended deposition are obtained from CuSO4-H2SO4-PEG-H2O. Evidence for radiation-chemical deposition mechanisms was observed, including deposition efficiency as high as 1.4 primary electrons/Cu atom.
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Precision controlled atomic resolution scanning transmission electron microscopy using spiral scan pathways. Sci Rep 2017; 7:43585. [PMID: 28272404 PMCID: PMC5341089 DOI: 10.1038/srep43585] [Citation(s) in RCA: 15] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/01/2016] [Accepted: 01/18/2017] [Indexed: 11/25/2022] Open
Abstract
Atomic-resolution imaging in an aberration-corrected scanning transmission electron microscope (STEM) can enable direct correlation between atomic structure and materials functionality. The fast and precise control of the STEM probe is, however, challenging because the true beam location deviates from the assigned location depending on the properties of the deflectors. To reduce these deviations, i.e. image distortions, we use spiral scanning paths, allowing precise control of a sub-Å sized electron probe within an aberration-corrected STEM. Although spiral scanning avoids the sudden changes in the beam location (fly-back distortion) present in conventional raster scans, it is not distortion-free. “Archimedean” spirals, with a constant angular frequency within each scan, are used to determine the characteristic response at different frequencies. We then show that such characteristic functions can be used to correct image distortions present in more complicated constant linear velocity spirals, where the frequency varies within each scan. Through the combined application of constant linear velocity scanning and beam path corrections, spiral scan images are shown to exhibit less scan distortion than conventional raster scan images. The methodology presented here will be useful for in situ STEM imaging at higher temporal resolution and for imaging beam sensitive materials.
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Momotenko D, Page A, Adobes-Vidal M, Unwin PR. Write-Read 3D Patterning with a Dual-Channel Nanopipette. ACS NANO 2016; 10:8871-8. [PMID: 27569272 DOI: 10.1021/acsnano.6b04761] [Citation(s) in RCA: 29] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
Nanopipettes are becoming extremely versatile and powerful tools in nanoscience for a wide variety of applications from imaging to nanoscale sensing. Herein, the capabilities of nanopipettes to build complex free-standing three-dimensional (3D) nanostructures are demonstrated using a simple double-barrel nanopipette device. Electrochemical control of ionic fluxes enables highly localized delivery of precursor species from one channel and simultaneous (dynamic and responsive) ion conductance probe-to-substrate distance feedback with the other for reliable high-quality patterning. Nanopipettes with 30-50 nm tip opening dimensions of each channel allowed confinement of ionic fluxes for the fabrication of high aspect ratio copper pillar, zigzag, and Γ-like structures, as well as permitted the subsequent topographical mapping of the patterned features with the same nanopipette probe as used for nanostructure engineering. This approach offers versatility and robustness for high-resolution 3D "printing" (writing) and read-out at the nanoscale.
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Affiliation(s)
- Dmitry Momotenko
- Department of Chemistry and ‡MOAC Doctoral Training Centre, University of Warwick , Coventry, CV4 7AL, United Kingdom
| | - Ashley Page
- Department of Chemistry and ‡MOAC Doctoral Training Centre, University of Warwick , Coventry, CV4 7AL, United Kingdom
| | - Maria Adobes-Vidal
- Department of Chemistry and ‡MOAC Doctoral Training Centre, University of Warwick , Coventry, CV4 7AL, United Kingdom
| | - Patrick R Unwin
- Department of Chemistry and ‡MOAC Doctoral Training Centre, University of Warwick , Coventry, CV4 7AL, United Kingdom
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